JP2002147412A - Oscillating actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an oscillating actuator with a low manufacturing cost preventing axial size increase of an actuator even when it is provided with a position detection sensor, capable of using an end face of the actuator as a mounting face, and capable of exercising superior detection accuracy without using a special position detection sensor. SOLUTION: This oscillating actuator 1 is provided with a function detecting an oscillating position of an oscillating member 4 oscillating inside a body 2 by the position detection sensor mounted on an exterior of the body 2. A sensor mounting part 25 with an arcing cross section formed by using an oscillation axial line O of the oscillating member 4 as a center is provided on the exterior of the body 2. In the sensor mounting part 25, the straight rod-like position detection sensor 20 is mounted in the direction with its longitudinal direction parallel to the oscillation axial line O, and the position detection sensor 20 can be fixed in a random angular position in the arc.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a rocking actuator, and more particularly, to a rocking actuator having a function of detecting a rocking position of a rocking member that rocks inside a body from outside the body. Things.

[0002]

2. Description of the Related Art As shown in FIG.
In a vane-shaped swing actuator 51 provided with a position detecting mechanism 53 for detecting a swing position of a swing member (not shown) swinging inside the arm, an arm 54 having a magnet as a detected body 55 is Attached to one end of a shaft 56 of the actuator 51 so as to be integrally swingable,
An adapter 57 surrounding the arm 54 is attached to one end in the axial direction, and a magnetic proximity sensor, which is a position detection sensor 58, is attached to the adapter 57 so as to be movable in the circumferential direction and fixable at an arbitrary position (actual fairness 7). -28402).

However, the conventional swing actuator 51 is provided with an arm 54 attached to a shaft 56 and an adapter 57 surrounding the arm 54.
1 increases in the axial direction, and the rear end face (axial end face) 52 of the body 52 of the actuator 51
Since a is closed by the position detection mechanism 53, there is a problem that the rear end surface 52a cannot be used as a mounting surface. Further, there is a problem that the number of components constituting the position detecting mechanism 53 is large, and the manufacturing cost is high.

In order to solve these problems, a circumferential sensor mounting portion curved at a constant curvature is provided at a facing portion of a pair of bodies, and a position detecting sensor curved at the same curvature is mounted on the sensor mounting portion. Japanese Patent No. 2704220 discloses a swing actuator configured to perform the above operation. According to the swing actuator, the rear end surface of the body can be used as a mounting surface.

However, in this swing actuator, it is necessary to also curve the sensor element and the substrate incorporated in the sensor case in order to make the curved position detecting sensor the same size as a normal straight rod-shaped position detecting sensor. In addition, there is a problem that it is difficult to manufacture a position detection sensor, and when a normal sensor element or a substrate is used, the position detection sensor becomes very large, so that the body having the sensor mounting portion also becomes large. There is a problem that it will. In addition, since a position detecting sensor having a different curvature for each size of the swing actuator must be prepared, there is a problem that maintenance of the position detecting sensor is troublesome.

[0006]

SUMMARY OF THE INVENTION In view of the above, the present invention has been made in view of the above, and even if a position detecting mechanism is provided, the swing actuator does not become large in the axial direction, and the axial end face of the swing actuator (axial direction) It is an object of the present invention to provide an oscillating actuator which can be used as a mounting surface at both end surfaces, has a low manufacturing cost, does not require a special position detection sensor, and can exhibit excellent detection accuracy. And

[0007]

In order to achieve the above object, a swing actuator according to a first aspect of the present invention has a swing position of a swing member swinging inside a body, which is mounted outside the body. In a swing actuator having a function of detecting by a position detection sensor, a sensor mounting portion having an arc-shaped cross section formed around a swing center axis of the swing member is provided outside the body, and the sensor mounting portion is provided. Is characterized in that a straight rod-shaped position detection sensor is mounted so that its longitudinal direction is parallel to the swing center axis, and the position detection sensor can be fixed at an arbitrary angular position in the arc. is there.

A swing actuator according to a second aspect of the present invention includes a body, a swing member rotatably supported inside the body, and a position detecting mechanism for detecting a position of the swing member. In the swing actuator provided,
A cover plate that covers an end surface of the body includes a locking portion that is parallel to a swing track of the swing member, and the position detection mechanism includes a detection target attached to the swing member, and a detection target of the detection target. A position detection sensor for detecting a position, a fixing member, and a fixing screw that is screwed into one of the fixing member or the position detection sensor and the other end of which is in contact with the outer peripheral surface of the body, It is characterized by comprising a locking piece in which a fixing member is movably inserted into the locking portion, and an engaging portion that engages with the position detection sensor.

According to a third aspect of the present invention, in the swing actuator according to the second aspect, the locking portion sandwiches the locking piece with the body. Is what you do.

According to a fourth aspect of the present invention, there is provided a swing actuator, comprising: a body; a swing member rotatably supported inside the body; and a position detecting mechanism for detecting a swing position of the swing member. Wherein the body has an outer peripheral surface provided with a sensor mounting groove which is parallel to a pivot center axis of the pivot member and opens outward, and wherein the position detecting mechanism comprises: An object to be detected attached to the member, a position detection sensor for detecting the position of the object to be detected, a fixed member, and a tip that is screwed into one of the fixed member or the position detection sensor and inserted through the other to form a tip. A fixing screw contacting the bottom of the sensor mounting groove, wherein the sensor mounting groove has an opening having a width in which the position detection sensor and the fixing member can be inserted, and a locking portion wider than the opening. To The fixing member includes a locking piece that moves in the groove width direction and can be locked to the locking portion, and an engaging portion that engages with the position detection sensor. .

Further, according to a fifth aspect of the present invention, in the swing actuator according to the fourth aspect, the body includes a guide groove extending in a groove width direction, and the fixing member is arranged in the groove width direction. It is characterized by comprising a slide portion which can move and engage with the guide groove.

In the oscillating actuator according to the first aspect of the present invention, the sensor mounting portion for mounting the position detecting sensor is formed outside the body in an arc-shaped cross section centering on the oscillating center axis of the oscillating member. Therefore, the sensor mounting portion is provided not on the end surface (axial end surface, lower surface or upper surface in the later-described embodiment) but on the peripheral surface (side surface, front surface, or rear surface in the later-described embodiment), and is provided around the body. The position detection sensor is attached to the sensor attachment portion provided on the surface. Therefore, since there is no need to provide an arm or an adapter surrounding the arm on the rear end surface of the body as in the above-described prior art, the actuator does not increase in the axial direction even with the position detection mechanism, and the The end surface can be used as a mounting surface. Further, since the number of components constituting the position detecting mechanism is small, it is possible to reduce the manufacturing cost.

Further, since this sensor mounting portion mounts the straight rod-shaped position detection sensor in a direction in which the longitudinal direction thereof is parallel to the swing center axis of the swing member, it is curved as in the above-mentioned prior art. It is possible to use a normal sensor instead of a special position detection sensor, and since the position detection sensor can be fixed at any angle position in the above arc, the detection position can be arbitrarily changed within this adjustable range It is possible to

Further, as described above, since the sensor mounting portion for mounting the position detection sensor is formed outside the body as an arc-shaped cross section centered on the swing center axis of the swing member, the position detection sensor is provided. Is fixed, the distance from the swing center axis of the swing member to the position detection sensor is always constant. Therefore, the detection accuracy can be stabilized.

In the swing actuator according to the second aspect of the present invention having the above-described structure, since the lid that covers the end surface of the body is provided with the locking portion parallel to the swing track of the swing member, The position detection sensor can be fixed at an arbitrary position on the outer peripheral surface of the body. Therefore, it is not necessary to dispose the position detecting mechanism on the rear end surface of the body as in the above-described conventional technique, and therefore, even if the position detecting mechanism is provided, the swing actuator does not become large. Further, since the rear end surface can be used as a mounting surface, the degree of freedom in mounting is improved. Further, since the number of components constituting the position detecting mechanism is small, the manufacturing cost can be reduced.

Further, since it is not necessary to prepare a curved position detecting sensor having a different curvature for each size of the swing actuator, maintenance is not troublesome.

Further, by moving the position detecting sensor in the direction of the oscillating orbit of the oscillating member, the fixing screw can be screwed into one of the fixing member or the position detecting sensor and the other can be inserted therethrough. The position detection sensor can be attached and detached from the outer peripheral surface of the body. Therefore, even when the end of the sensor mounting groove is closed by another member mounted on the body, or when the installation place is narrow and a space for inserting the position detection sensor in the longitudinal direction of the body cannot be secured, maintenance can be easily performed. You. Further, since it is not necessary to move the position detection sensor in the axial direction, the swing actuator itself can be made compact in the axial direction.

In addition to the above, in the swing actuator according to the third aspect of the present invention having the above structure, the locking piece of the fixing member is moved between the body and the cover plate during the assembly process of the swing actuator. As a result, the fixing member does not drop off from the body and is lost. Also, since there is no need to separately provide an insertion port for inserting the locking piece into the locking portion,
The detection range of the position detection sensor can be set wide, and the swing actuator itself can be made compact.

In the swing actuator according to the fourth aspect of the present invention having the above structure, since the sensor mounting groove is provided on the outer peripheral surface of the body, the position detecting sensor is fixed at an arbitrary position on the outer peripheral surface of the body. can do. Therefore, it is not necessary to dispose the position detecting mechanism on the rear end surface of the body as in the above-described conventional technique, and therefore, even if the position detecting mechanism is provided, the swing actuator does not become large. Further, since the rear end surface can be used as a mounting surface, the degree of freedom in mounting is improved. Further, since the number of components constituting the position detecting mechanism is small, the manufacturing cost can be reduced.

Further, since there is no need to prepare a curved position detecting sensor having a different curvature for each size of the swing actuator, maintenance is not troublesome.

Further, since the position detection sensor is housed in the sensor mounting groove, the position detection sensor does not protrude from the body to be in the way or break in contact with other devices. It can also give a clean impression.

Also, since the position detecting sensor can be inserted into the sensor mounting groove from the opening of the sensor mounting groove,
Even when the end of the sensor attachment groove is closed by another member attached to the body, or when the installation location is narrow and a space for inserting the position detection sensor in the longitudinal direction of the body cannot be secured, maintenance can be easily performed.

Further, since it is not necessary to move the position detecting sensor in the axial direction, the swing actuator itself can be made compact in the axial direction.

In addition, in the swing actuator according to the fifth aspect of the present invention having the above structure, the fixing member can be moved to the body in the groove width direction by the engagement between the guide groove and the engaging portion. In order to support, the moving direction of the position detection sensor is limited to the groove width direction, and the position of the position detection sensor can be easily set. Accordingly, an accurate position detection function can be ensured.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a front view of a swing actuator 1 according to a first embodiment of the present invention, FIG. 2 is a right side view, FIG. 3 is a left side view, and FIG. 4 is a rear view. , FIG. 5 is a plan view,
FIG. 6 shows bottom views. FIG. 7 shows FIG.
8 is a cross-sectional view taken along the line BB in FIG. 2, and FIG. 9 is a cross-sectional view taken along the line CC in FIG. FIG. 10 is an exploded perspective view of the position detection sensor 20, the fixing member 26 and the fixing screw 27, and FIG.

The oscillating actuator 1 according to this embodiment is a vane-shaped oscillating actuator. First, a rectangular cylindrical body (main body or actuator) formed of an aluminum alloy that is lightweight and has excellent corrosion resistance and workability. A cylindrical member 3 having a bottom is formed substantially in the center of the body 2 made of a non-magnetic material, and a swing member made of a non-magnetic material is formed in the cylindrical hole 3 having a bottom. 4 are interpolated. The bottomed cylindrical hole 3 is provided with an inward flange-shaped protrusion at the periphery of one end opening of the upper and lower through holes having a cylindrical inner surface. Deep groove ball bearings 5 are arranged between a pair of reduced diameter portions (also referred to as small diameter portions) 4 a formed at both ends in the axial direction of the swing member 4 and the inner surface of the bottomed cylindrical hole 3. The swing member 4 is rotatably supported by the body 2 via a pair of deep groove ball bearings 5. A cover plate 7 is attached to the body 2 with a screw member 6 so as to close the entrance of the bottomed cylindrical hole 3, and the cover plate 7 presses the pair of deep groove ball bearings 5 against the bottom of the bottomed cylindrical hole 3. This eliminates the axial gap. Since a pair of relatively large deep groove ball bearings 5 fitted into the inner diameter of the bottomed cylindrical hole 3 are disposed at both axial ends of the body 2, the actuator 1 can support a relatively large moment. Have been.

The oscillating member 4, like the body 2, is integrally formed of an aluminum alloy that is lightweight and has excellent corrosion resistance and workability. A body 4b is provided axially inside a pair of reduced diameter portions 4a. The movable wing 4c is formed in the body 4b by a space having a semicircular cross section that is curved in a substantially U shape, and a substantially U-shaped arc surface 4d is formed on both sides of the movable wing 4c. . The fixed wing 8 is disposed on the substantially U-shaped arc surface 4d. Sealing means 9 for maintaining airtightness with the inner surface of the bottomed cylindrical hole 3 is provided at the edge of the substantially U-shaped arc surface 4d formed on the swing member 4, and the fixed wing 8 has Sealing means 10 is provided for maintaining airtightness between the inner surface of the bottom cylindrical hole 3 and the arc surface 4d. Fixed wing 8 and arc surface 4
d are substantially concentric arcs facing each other, and the sealing property of the sealing means 10 is enhanced.

The body 2 is provided with a pair of insertion holes 11 penetrating from the front surface 2a toward the bottomed cylindrical hole 3. A pair of adjusting members 12 are inserted into the pair of insertion holes 11, and the pair of adjustment members 12 are inserted. Are screwed to the fixed wing 8 so as to be able to advance and retreat in the bottomed cylindrical hole 3 and screwed to the fixing nut 13 outside the body 2. Each of the adjusting members 12 is provided with an O-ring 14 for maintaining airtightness between the adjusting member 12 and the insertion hole 11.

The fixed wing 8 is fixed in the bottomed cylindrical hole 3 by a pair of adjusting members 12, so that a pair of semilunar pressure chambers 15 partitioned by movable wings 4 c provided on the swinging member 4. Are formed in the bottomed cylindrical hole 3.

When the adjusting member 12 protrudes from the fixed wing 8,
The swing angle of the swing member 4 is adjusted in accordance with the degree of advance and retreat of the adjustment member 12 so that the tip end 12a comes into contact with the arc surfaces 4d on both sides of the movable wing 4c at the swing end of the swing member 4. Can be. Further, since the adjusting member 12 also has a function of fixing the fixed wing 8 in the bottomed cylindrical hole 3, there is no need for a separate means for fixing the fixed wing 8 in the bottomed cylindrical hole 3. Therefore, not only can the manufacturing cost be reduced, but also the swing actuator 1 can be made compact. Further, since the swing angle adjusting mechanism is constituted by the adjusting member 12 and the fixed blade 8, even if the swing angle adjusting mechanism is provided, the vane type swing actuator 1 becomes large or the body 2 is mounted. There is no restriction on Further, since the O-ring 14 is attached to the adjustment member 12 near the entrance of the insertion hole 11, if the adjustment member 12 is retracted more than necessary, the O
The ring 14 comes out of the insertion hole 11 and leakage occurs. Therefore, the screwing of the adjusting member 12 with the fixed wing 8 is not released, which is safe.

The tip portion 12a of the adjusting member 12 is a spherical surface having the same curvature as the arc surface 4d formed on the swinging member 4. Since the adjusting member 12 and the arc surface 4d are in line contact with each other, Low stress at contact area. Therefore, the contact portion does not deform and the stop angle does not change.

When the adjusting member 12 abuts against the arc surface 4d, no moment is generated by thrust, so that no radial load is applied to the pair of deep groove ball bearings 5 by thrust. Therefore, the swing member 12 does not tilt at the swing end, and the accuracy of the pair of deep groove ball bearings 5 can be maintained for a long period of time.

A pair of piping ports 1 are provided on the front 2a of the body 2.
The piping port 17 communicates with the insertion hole 11 that opens to the pressure chamber 15 via the flow path 18. A pair of piping ports 17 and a pair of adjustment members 1
2 is provided on the same surface of the body 2, adjustment of the swing speed and adjustment of the swing angle can be performed from the same direction, and workability is extremely good.

The swinging member 4 is provided with a hole 4e opening on the outer peripheral surface thereof, and a permanent magnet 19, which is an object to be detected, is disposed in the hole 4e and fixed with an adhesive. .
Therefore, the permanent magnet 19, which is the object to be detected, does not fall off due to the compressed air, which is the working fluid of the swing actuator 1, and does not break at the swing end by colliding with another member.

A position detecting sensor 20 for detecting the permanent magnet 19, which is an object to be detected, has a rod-shaped or straight rod-shaped sensor case 21 having a concave stepped portion 21a formed at the tip thereof, and a magnetic proximity switch (shown in FIG. ) And an indicator lamp 22 for displaying the operation state of the magnetic proximity switch, and the lead wire 2 connected to the magnetic proximity switch.
3 extends from the rear end of the sensor case 21 to the outside.
The magnetic proximity switch outputs an electric signal when the permanent magnet 19 as a detection target approaches, and transmits this signal to a predetermined location via the lead wire 23.

The rectangular cylindrical body 2 is formed by extrusion of an aluminum alloy so that a pair of arc-shaped sensor mounting portions (also called arc-shaped surfaces) 25 penetrate in the axial direction on both side surfaces 2b and 2c. Correspondingly, a pair of locking portions 7b having a key-shaped cross section or a substantially L-shaped cross section facing the pair of arc surfaces 25 from the end face 7a are formed on the lid plate 7 correspondingly.

The fixing member 26 for fixing the position detecting sensor 20 to the body 2 has a locking piece 26a and an engaging portion 26b. The locking piece 26a has a key-shaped cross section or a substantially L-shaped cross-section corresponding to the key cross-section of the locking portion 7b.
b and the arc surface 25 so as to be movable. On the other hand, the engaging portion 26b has a lower surface 26c and an end surface 26d facing the concave step portion 21a of the sensor case 21, and has a screw hole 2d.
6e is formed through substantially the center of the lower surface 26c. A male screw-shaped fixing screw 27 is screwed into the screw hole 26e.
In order to pass through the insertion hole 21b provided concentrically with the screw hole 26e of the fixing member 26 through the fixing member 26 and make contact with the arc surface 25,
The fixing member 26 supports the sensor case 21 and holds the sensor case 21 with the arc surface 25. The end surface 26d is in contact with the concave step portion 21a of the sensor case 21 to prevent rotation.
The cross-sectional shapes of the locking portion 7b, the locking piece 26a, the engaging portion 26b, and the arc surface 25 are shown in FIGS.
It may be as shown in FIG. 16 or FIG.

That is, in FIG. 12, the contact portions between the locking portions 7b and the locking pieces 26a are provided with inclined chamfers 7w, 26w in the sectional shape of FIG.

In FIG. 13, the locking portion 7b and the locking piece 26a are formed as convex protrusions.

In FIG. 14, the locking portion 7b and the locking piece 26a are formed as convex projections, and the front end of the locking piece 26a is housed in the concave portion 2x provided in the body 2 and the cover is formed. Projection 26x sandwiched between plate 7 and body 2
Is provided.

In FIG. 15, the locking portion 7b and the locking piece 26a are formed as convex protrusions, and the front end of the locking piece 26a is housed in the concave portion 2x provided in the body 2 to cover the lid. Projection 26x sandwiched between plate 7 and body 2
The contact portions between the locking portion 7b and the locking piece 26a are provided with inclined chamfers 7w and 26w.

In FIG. 16, the locking portion 7b is formed by a portion that is relatively convex due to the provision of the concave portion 7x in the cover plate 7. The locking piece 26a is formed as a convex projection, and a projection 26x that is housed in the recess 7x and is sandwiched between the cover plate 7 and the body 2 is provided at the tip of the locking piece 26a. ing.

In FIG. 17, the locking portion 7b is formed by a portion that is relatively convex due to the provision of the concave portion 7x in the cover plate 7. The locking piece 26a is formed as a convex projection, and a projection 26x that is housed in the recess 7x and is sandwiched between the cover plate 7 and the body 2 is provided at the tip of the locking piece 26a. And the locking portion 7b
And an inclined chamfered portion 7 at the contact portion of the locking piece 26a.
w, 26w are provided.

In each figure, the chamfers 7w and 26w
This is provided to effectively prevent the position detection sensor 20 from tilting when the fixing screw 27 is tightened.

Since the height of the lower surface 26c of the fixing member 26 is set slightly larger than the height of the concave step portion 21a of the sensor case 21, the position detection sensor 20
Is not pressed by the fixing member 26. Therefore,
Even if the fixing screw 27 is screwed more than necessary, the position detection sensor 20 will not be damaged or malfunction.

Locking portion 7b, arc surface 25 and locking piece 26
“a” is formed in an arc shape parallel to the swing trajectory of the swing member 4 and concentric with the swing center axis 0 of the swing member 4. The locking piece 26a, the locking portion 7b, and the arc surface 25
Have opposite curvatures respectively. Therefore, the relative distance in the circumferential direction between the position detection sensor 20 and the permanent magnet 19, which is the object to be detected, is always kept equal, so that an accurate position detection function can be ensured.

Since the position detecting sensor 20 is disposed on an arcuate surface 25 provided at a position lower than both side surfaces 2b and 2c of the body 2, the position detecting sensor 20 is
It does not protrude out of the way and does not get in the way and does not break due to contact with other devices, and can give a neat impression to the appearance. Further, even when the position detecting mechanism is provided, the body 2 does not become large.

Next, the position detecting sensor 2 having the above configuration
The method of mounting 0 will be described.

In the swing actuator 1, a fixing member 26 is movably sandwiched between the locking portion 7b provided on the cover plate 7 and the body 2 along the opening thereof during the assembly process. In this state, first, a fixing screw 27 is attached to the fixing member 26.
Is screwed so as not to protrude from the lower surface 26c. Next, the concave step portion 21 a of the sensor case 21 is overlapped on the lower surface 26 c of the fixing member 26, and the fixing screw 27 is further screwed into the insertion hole 21 b of the sensor case 21. In this state, the position detection sensor 20 and the fixed member 26 can be moved integrally. Then, after moving to any position,
When the fixing screw 27 is screwed in, the fixing screw 27 is deeply inserted into the insertion hole 21 b of the sensor case 21 as the screwing proceeds, and comes into contact with the arc surface 25 of the body 2. When the screw is further screwed in, the fixing member 26 rises relatively, the locking piece 26a presses the locking portion 7b, and the fixing member 26 is fixed to the locking portion 7b.

The body 2 is provided with a plurality of female screw-shaped screw means 2e on the back surface 2d. In addition, the round hole 2f and the long hole 2g into which the positioning pins are fitted are finished with high precision, thereby ensuring the reproducibility and accuracy of mounting the body 2. The body 2 is provided with a plurality of through holes 2j penetrating from the upper surface 2h to the lower surface 2i, and the upper surface 2h and the lower surface 2i are respectively provided with a plurality of female screw-shaped screw means 2k coaxially with the through holes 2j. Is provided. In addition, a long hole 2m into which a positioning pin is fitted, and a round hole into which a boss (not shown) formed on a connecting plate for attaching the body 2 to a head of a robot or a base of equipment is formed on an upper surface 2h of the body 2. 2n are finished with high precision, and the reproducibility and accuracy of mounting the body 2 are ensured. The cover plate 7 has an elongated hole 7d into which a positioning pin is fitted, and an outer peripheral surface 7c into which a hole (not shown) formed in a connecting plate for attaching the body 2 to a head of a robot or a base of equipment is formed. Are finished with high precision, and the reproducibility and accuracy of the mounting of the body 2 are ensured. The through hole 2j and the screw means 2e, 2k
Is selectively used as a means for attaching the body 2 to the head of the robot or the gantry of the equipment.

The swing actuator 1 is mounted on the body 2 by a method of screwing a screw member from the back surface 2d to the screw means 2e, a method of inserting a bolt from the upper surface 2h into the through hole 2j, or a method of screwing from the upper surface 2h. The method can be arbitrarily selected from among five methods: a method of screwing a screw member to 2k, a method of inserting a bolt from the lower surface 2i to the through hole 2j, and a method of screwing a screw member to the screw means 2k from the lower surface 2i. Because of this, the degree of freedom of mounting is very large,
Is used as a mounting surface, the body 2 can be easily fixed coaxially to the head of the robot simply by interposing a single connecting member (not shown) such as a flange, thereby reducing the manufacturing cost of the equipment itself. Can be suppressed.

The swing member 4 is integrally provided with a table 29 projecting outward from the lower surface 2i of the body 2. A plurality of screw means 29b for attaching a work or a tool is provided on the end surface 29a of the table 29. Is provided.
In addition, the long groove 29c for fitting the positioning pin and the outer peripheral surface 29d of the table 29 for fitting with a hole (not shown) formed in the connecting plate for attaching a work or a tool are finished with high precision, and the reproduction of the attachment is performed. Gender and accuracy are assured.

The pair of reduced-diameter portions 4a for fitting the pair of deep groove ball bearings 5 in the swing member 4 and the table 29 can be easily coaxially machined. In the body 2, the housing of the bottomed cylindrical hole 3 and the round hole 2q and the housing of the bottomed cylindrical hole 3 and the cover plate 7 can be easily coaxially processed. The bottomed cylindrical hole 3 of the body 2 has both the pressure chamber 15 and the housing of the outer ring of the deep groove ball bearing 5. Therefore, the amount of concentric run-out of the table 29 based on the round hole 2q and the amount of concentric run-out of the table 29 based on the outer peripheral surface 7c of the cover plate 7 can be extremely reduced. Further, a pair of deep groove ball bearings 5
Is set to be substantially equal to the inner diameter of the bottomed cylindrical hole 3, so that a relatively large moment can be supported. Further, the movable member 4c and the table 29 are attached to the swing member 4.
Are formed integrally, there is no loosening or sagging between the table 29 and the movable wing 4c.

Next, the operation of the swing actuator 1 provided with the sensor mounting mechanism having the above configuration will be described.

By switching a switching valve (not shown), compressed air as a working fluid is supplied from a compressed air supply source to one pressure chamber 15 through one piping port 17, flow path 18 and insertion hole 11, while the other is supplied. When the other pressure chamber 15 is opened to the atmosphere through the insertion hole 11, the flow path 18, the piping port 17, and the switching valve (not shown), the movable blade 4c of the swinging member 4 is rotated by being pressed by the compressed air. An arc surface 4d formed on one side of 4c protrudes into the other pressure chamber 15 from the fixed wing 8 into the other end portion 12 of the adjusting member 12.
a, the rotation of the swing member 4 stops.

The stop position of the swing member 4 or the magnitude of the swing angle can be easily adjusted by changing the amount of protrusion of the adjusting member 12. When the tip 12a of the adjusting member 12 does not protrude from the fixed wing 8, the arc surface 4d of the swinging member 4 directly abuts on the fixed wing 8,
The rotation of the swing member 4 stops.

The fact that the swing member 4 has reached one swing end of the swing range means that one of the sensor mounting portions 25 provided on the outer surface of the body 2 is fixed to a required position in one of the sensor mounting portions 25. The magnetic proximity switch incorporated in the detection sensor 20 is detected by detecting the magnetic field of the permanent magnet 19, which is the object to be detected, and a signal is sent from the magnetic proximity switch to a sequencer or the like via the lead wire 23.

In the swing actuator 1 having the above configuration, the following operation and effect can be obtained.

That is, first, since the locking portion 7b parallel to the swing track of the swing member 4 is provided on the cover plate 7 covering the end surface of the body 2, the position detecting sensor 20 can be moved to any position on the outer circumferential surface of the body 2. Position. Therefore, it is not necessary to dispose the position detecting mechanism on the rear end surface of the body 2 (the lower surface 2i of the body 2 in this embodiment) as in the above-described prior art. Does not become large. Further, since the rear end surface can be used as a mounting surface, the degree of freedom in mounting is improved. Further, since the number of components constituting the position detecting mechanism is small, the manufacturing cost can be reduced.

Further, since there is no need to prepare a curved position detecting sensor having a different curvature for each size of the swing actuator 1, maintenance is not troublesome.

Further, by moving the position detecting sensor 20 in the direction of the oscillating orbit of the oscillating member 4, the position detecting sensor 20 is screwed into the fixing screw 27 and the sensor case 2 of the position detecting sensor 20 is moved.
1 can be inserted, so that the position detection sensor 20 can be detached from the outer peripheral surface of the body 2. Therefore, even when the axial end of the sensor mounting portion 25 is closed by another member mounted on the body 2 or when the installation location is narrow and a space for inserting the position detection sensor 20 in the longitudinal direction of the body 2 cannot be secured. , Easy maintenance. Further, since it is not necessary to move the position detection sensor 20 in the axial direction, the swing actuator 1 itself can be made compact in the axial direction.

Further, the locking piece 26a of the fixing member 26 can be movably sandwiched between the body 2 and the cover plate 7 along the locking portion 7b during the assembly process of the swing actuator 1. In addition, the fixing member 26 does not drop from the body 2 and is lost. Further, the locking piece 26a is fixed to the locking portion 7b.
Since there is no need to separately provide an insertion port for insertion into the
The swing actuator 1 itself can be made compact.

FIG. 18 is a front view of a swing actuator 1 according to a second embodiment of the present invention, FIG. 19 is a right side view, FIG. 20 is a left side view, and FIG. 21 is a rear view. , FIG.
23 is a plan view, and FIG. 23 is a bottom view. 24 is a sectional view taken along line DD in FIG. 18, FIG. 25 is a sectional view taken along line EE in FIG. 19, and FIG. 26 is a sectional view taken along line FF in FIG. FIG. 27 is an exploded perspective view of the position detection sensor 20, the fixing member 26, and the fixing screw 27.

The oscillating actuator 1 according to the present embodiment is a vane-type oscillating actuator. First, a rectangular cylindrical body (main body or actuator) formed of an aluminum alloy that is lightweight and has excellent corrosion resistance and workability. A cylindrical member 3 having a bottom is formed substantially in the center of the body 2 made of a non-magnetic material, and a swing member made of a non-magnetic material is formed in the cylindrical hole 3 having a bottom. 4 are interpolated. The bottomed cylindrical hole 3 is provided with an inward flange-shaped protrusion at the periphery of one end opening of the upper and lower through holes having a cylindrical inner surface. Deep groove ball bearings 5 are arranged between a pair of reduced diameter portions (also referred to as small diameter portions) 4 a formed at both ends in the axial direction of the swing member 4 and the inner surface of the bottomed cylindrical hole 3. The swing member 4 is rotatably supported by the body 2 via a pair of deep groove ball bearings 5. A cover plate 7 is attached to the body 2 with a screw member 6 so as to close the entrance of the bottomed cylindrical hole 3, and the cover plate 7 presses the pair of deep groove ball bearings 5 against the bottom of the bottomed cylindrical hole 3. This eliminates the axial gap. Since a pair of relatively large deep groove ball bearings 5 fitted into the inner diameter of the bottomed cylindrical hole 3 are disposed at both axial ends of the body 2, the actuator 1 can support a relatively large moment. Have been.

The oscillating member 4, like the body 2, is integrally formed of an aluminum alloy that is lightweight and has excellent corrosion resistance and workability. A body 4b is provided axially inside a pair of reduced diameter portions 4a. The movable wing 4c is formed in the body 4b by a space having a semicircular cross section that is curved in a substantially U shape, and a substantially U-shaped arc surface 4d is formed on both sides of the movable wing 4c. . The fixed wing 8 is disposed on the substantially U-shaped arc surface 4d. Sealing means 9 for maintaining airtightness with the inner surface of the bottomed cylindrical hole 3 is provided at the edge of the substantially U-shaped arc surface 4d formed on the swing member 4, and the fixed wing 8 has Sealing means 10 is provided for maintaining airtightness between the inner surface of the bottom cylindrical hole 3 and the arc surface 4d. Fixed wing 8 and arc surface 4
d are substantially concentric arcs facing each other, and the sealing property of the sealing means 10 is enhanced.

The body 2 is provided with a pair of insertion holes 11 penetrating from the front surface 2a toward the bottomed cylindrical hole 3. A pair of adjusting members 12 are inserted into the pair of insertion holes 11, and the pair of adjustment members 12 are inserted. Are screwed to the fixed wing 8 so as to be able to advance and retreat in the bottomed cylindrical hole 3 and screwed to the fixing nut 13 outside the body 2. Each of the adjusting members 12 is provided with an O-ring 14 for maintaining airtightness between the adjusting member 12 and the insertion hole 11.

The stationary blade 8 is fixed in the bottomed cylindrical hole 3 by the pair of adjusting members 12, so that a pair of semicircular pressure chambers 15 partitioned by movable blades 4 c provided on the swinging member 4. Are formed in the bottomed cylindrical hole 3.

When the adjusting member 12 projects from the fixed wing 8,
The swing angle of the swing member 4 is adjusted in accordance with the degree of advance and retreat of the adjustment member 12 so that the tip end 12a comes into contact with the arc surfaces 4d on both sides of the movable wing 4c at the swing end of the swing member 4. Can be. Further, since the adjusting member 12 also has a function of fixing the fixed wing 8 in the bottomed cylindrical hole 3, there is no need for a separate means for fixing the fixed wing 8 in the bottomed cylindrical hole 3. Therefore, not only can the manufacturing cost be reduced, but also the swing actuator 1 can be made compact. Further, since the swing angle adjusting mechanism is constituted by the adjusting member 12 and the fixed blade 8, even if the swing angle adjusting mechanism is provided, the vane type swing actuator 1 becomes large or the body 2 is mounted. There is no restriction on Further, since the O-ring 14 is attached to the adjustment member 12 near the entrance of the insertion hole 11, if the adjustment member 12 is retracted more than necessary, the O
The ring 14 comes out of the insertion hole 11 and leakage occurs. Therefore, the screwing of the adjusting member 12 with the fixed wing 8 is not released, which is safe.

The tip portion 12a of the adjusting member 12 is a spherical surface having the same curvature as the arc surface 4d formed on the swinging member 4. Since the adjusting member 12 and the arc surface 4d are in line contact with each other, Low stress at contact area. Therefore, the contact portion does not deform and the stop angle does not change.

When the adjusting member 12 comes into contact with the arc surface 4d, no moment is generated by the thrust, so that no radial load is applied to the pair of deep groove ball bearings 5 by the thrust. Therefore, the swing member 12 does not tilt at the swing end, and the accuracy of the pair of deep groove ball bearings 5 can be maintained for a long period of time.

A pair of piping ports 1 is provided on the front 2a of the body 2.
The piping port 17 communicates with the insertion hole 11 that opens to the pressure chamber 15 via the flow path 18. A pair of piping ports 17 and a pair of adjustment members 1
2 is provided on the same surface of the body 2, adjustment of the swing speed and adjustment of the swing angle can be performed from the same direction, and workability is extremely good.

The swing member 4 is provided with a hole 4e which is open on the outer peripheral surface thereof, and a permanent magnet 19 as a detection object is disposed in the hole 4e and fixed with an adhesive. .
Therefore, the permanent magnet 19, which is the object to be detected, does not fall off due to the compressed air, which is the working fluid of the swing actuator 1, and does not break at the swing end by colliding with another member.

A position detecting sensor 20 for detecting the permanent magnet 19 as a detection object is provided on a rod-like or straight rod-like sensor case 21 having a concave stepped portion 21a formed at the tip thereof, and a magnetic proximity switch (not shown) as a sensor element. ) And an indicator lamp 22 for displaying the operation state of the magnetic proximity switch, and the lead wire 2 connected to the magnetic proximity switch.
3 extends from the rear end of the sensor case 21 to the outside.
The magnetic proximity switch outputs an electric signal when the permanent magnet 19 as a detection target approaches, and transmits this signal to a predetermined location via the lead wire 23.

The rectangular cylindrical body 2 is formed by extruding an aluminum alloy so that a pair of arc-shaped sensor mounting portions (also referred to as sensor mounting grooves) 25 penetrate in the axial direction on both side surfaces 2b and 2c. The sensor mounting groove 25 is formed integrally with the position detection sensor 20 and the fixing member 26.
An opening 25a having a width through which the opening 2 can be inserted;
And a locking portion 25b wider than 5a. Guide grooves 25 extending in the axial width direction by cutting out a part of the locking portion 25b are formed on both side surfaces 2b and 2c of the body 2, respectively.
c is formed.

The fixing member 26 for fixing the position detecting sensor 20 to the body 2 has a locking piece 26a and an engaging portion 26b. The locking piece 26a extends in the direction of the rocking orbit of the rocking member 4, moves in the groove width direction, and engages with the locking portion 25b of the sensor mounting groove 25. On the other hand, the engaging portion 26b has a lower surface 26c and an end surface 26d facing the concave step portion 21a of the sensor case 21, and has a screw hole 26e.
Is formed substantially at the center of the lower surface 26c. A male screw-shaped fixing screw 27 is screwed into the screw hole 26e.
a through the insertion hole 21b provided concentrically with the screw hole 26e of the fixing member 26, and the bottom surface 25d of the sensor mounting groove 25 is inserted.
The fixing member 26 supports the sensor case 21 and holds the sensor case 21 with the bottom surface 25 d of the sensor mounting groove 25. The end face 26 d is the concave step 2 of the sensor case 21.
1a, and is prevented from rotating. A slide portion 26f protrudes from the upper surface of the locking piece 26a,
It is supported and guided by the guide groove 25c.

At least a part of the inner periphery of the insertion hole 21 b is slightly smaller than the outer periphery of the fixing screw 27. Since the sensor case 21 is formed of a flexible synthetic resin, the insertion hole 21 b is deformed in the elastic deformation region by inserting the fixing screw 27, and presses the fixing screw 27. Therefore, the fixing screw 27 does not drop from the sensor case 21 and is lost.

Since the height of the lower surface 26c of the fixing member 26 is set slightly larger than the height of the concave step portion 21a of the sensor case 21, the position detection sensor 20
Is not pressed by the fixing member 26. Therefore,
Even if the fixing screw 27 is screwed more than necessary, the position detection sensor 20 will not be damaged or malfunction.

The locking portion 25b and the bottom surface 25d of the sensor mounting groove 25 and the locking piece 26a of the fixing member 26 are respectively parallel to the rocking path of the rocking member 4 and concentric with the rocking center axis 0 of the rocking member 4. , The relative distance in the circumferential direction between the position detection sensor 20 and the permanent magnet 19 as the object to be detected is always kept equal, and an accurate position detection function can be secured.

The fixing member 26 is inverted and the sensor case 21
Is formed in a symmetrical shape capable of holding the
The locking piece 26a can be inverted with respect to 1 (see FIG. 29 described later and FIG. 30 symmetrical thereto). Since a pair of locking portions 25b are provided on both sides of the opening 25a of the sensor mounting groove 25, one of the pair of locking portions 25b is provided depending on the swing stop position of the swing member 4. The locking pieces 26a can be selectively locked. Therefore, it is not necessary to prepare two types of fixing members 26 having different self-contained characteristics. In addition, since only one of the fixing members 26, which are different from each other, is at hand, there is no possibility that the position detection sensor 20 cannot be attached to a required position.

In this embodiment, a pair of locking portions 25b are provided on both sides of the sensor mounting groove 25 so that the sensor mounting groove 25 is provided.
Is formed in a substantially T-shaped cross section. However, depending on the detection range of the position detection sensor 20, a locking portion 25b is provided only on one side of the sensor mounting groove 25 so that the sensor mounting groove 25 has a substantially L-shaped cross section.
It may be formed in a character shape. In this case, it is not necessary to provide a wall on the other side of the sensor mounting groove 25. In this embodiment, the locking portion 25b is formed in an arc shape. However, if the detection range of the position detection sensor 20 may be narrow, the locking portion 25b may be formed in a U-shape. The relative distance in the circumferential direction between the detection sensor 20 and the permanent magnet 19 that is the object to be detected hardly changes.

Next, the position detecting sensor 2 having the above configuration
The method of mounting 0 will be described.

First, as shown in FIG.
The lower surface 26c of the sensor case 21 is overlapped with the concave step portion 21a of the sensor case 21, and the fixing screw 27 screwed into the screw hole 26e of the fixing member 26 is inserted into the insertion hole 21b of the sensor case 21 to some extent. In this state, the position detection sensor 20 and the fixed member 26 can be moved integrally.

Next, as shown in FIGS. 29 (a), (b) and (c), the position of the slide portion 26f and the position of the guide groove 25c are adjusted, and the fixing member 26 and the position detecting sensor 20 are moved from the outer peripheral surface of the body 2. It is inserted into the sensor mounting groove 25 through the opening 25a of the sensor mounting groove 25. Next, when the position detection sensor 20 is moved in the groove width direction, the locking piece 26a is inserted into one of the locking portions 25b, and the sliding portion 2a is inserted.
6f is engaged with one guide groove 25c. In this state, the movement of the position detection sensor 20 in the axial direction with respect to the body 2 is restricted, and the position of the position detection sensor 20 can be easily set. Thereby, an accurate position detection function can be ensured.

Next, when the fixing screw 27 is screwed in, the fixing screw 27 is deeply inserted into the insertion hole 21 b of the sensor case 21 as the screwing proceeds, and comes into contact with the bottom surface 25 d of the sensor mounting groove 25. When the screw is further screwed in, the fixing member 26 is relatively lifted up, and the locking piece 26a rotates about the opening 25a of the sensor mounting groove 25 as a fulcrum, and presses the bottom surface 25d of the sensor mounting groove 25. Thereby, the fixing member 26 is fixed at an arbitrary position in the sensor mounting groove 25.
When the fixing screw 27 is inserted into the insertion hole 21b of the sensor case 21 in a state where the fixing member 26 is inverted, the locking piece 26a provided in the opposite direction can be inserted into the other locking portion 25b.

The body 2 has a front 2a to a rear 2d.
Are provided with a plurality of through holes 2r penetrating through the rear surface 2.
d is a plurality of female screw-shaped screw means 2 coaxial with the through hole 2r.
s is provided. On the back surface 2d of the body 2, a round hole 2f and a long hole 2g into which a positioning pin is fitted are finished with high precision, thereby ensuring the reproducibility and accuracy of mounting the body 2. The body 2 is provided with a plurality of through holes 2j penetrating from the upper surface 2h to the lower surface 2i, and the upper surface 2h and the lower surface 2i respectively have
A plurality of female screw-shaped screw means 2k are provided coaxially with the through hole 2j. In addition, a long hole 2m into which a positioning pin is fitted, and a round hole into which a boss (not shown) formed on a connecting plate for attaching the body 2 to a head of a robot or a base of equipment is formed on an upper surface 2h of the body 2. 2n are finished with high precision, and the reproducibility and accuracy of mounting the body 2 are ensured. The cover plate 7 has an elongated hole 7d into which a positioning pin is fitted, and an outer peripheral surface 7c into which a hole (not shown) formed in a connecting plate for attaching the body 2 to a head of a robot or a base of equipment is formed. Are finished with high precision, and the reproducibility and accuracy of the mounting of the body 2 are ensured. The through holes 2j, 2r and the screw means 2e, 2k, 2s are selectively used as means for attaching the body 2 to a robot head or a gantry of equipment.

The swing actuator 1 can be mounted on the body 2 by inserting a bolt from the front surface 2a into the through hole 2r, by inserting a bolt from the rear surface 2d into the through hole 2r, or by mounting the bolt from the rear surface 2d to the screw means 2e. A method of screwing a screw member, a method of inserting a bolt from the upper surface 2h into the through hole 2j, a method of screwing a screw member from the upper surface 2h to the screw means 2k, a method of inserting a bolt from the lower surface 2i into the through hole 2j,
In addition, since the screw member can be arbitrarily selected from among seven types of screwing the screw member from the lower surface 2i to the screw means 2k, the degree of freedom in mounting is extremely large. Connection member (not shown) such as
The body 2 can be easily fixed coaxially to the head of the robot only by interposing a single sheet of the same, and the manufacturing cost of the equipment itself can be reduced.

The swing member 4 is integrally provided with a table 29 projecting outward from the lower surface 2i of the body 2. A plurality of screw means 29b for attaching a work or a tool is provided on the end surface 29a of the table 29. Is provided.
In addition, the long groove 29c for fitting the positioning pin and the outer peripheral surface 29d of the table 29 for fitting with a hole (not shown) formed in the connecting plate for attaching a work or a tool are finished with high precision, and the reproduction of the attachment is performed. Gender and accuracy are assured.

In the swinging member 4, the pair of reduced diameter portions 4a for fitting the pair of deep groove ball bearings 5 and the table 29 can be easily coaxially processed. In the body 2, the housing of the bottomed cylindrical hole 3 and the round hole 2q and the housing of the bottomed cylindrical hole 3 and the cover plate 7 can be easily coaxially processed. Since the bottomed cylindrical hole 3 of the body 2 has both the pressure chamber 15 and the housing of the outer ring of the deep groove ball bearing 5, the amount of concentric deflection of the table 29 with respect to the round hole 2 q and the outer peripheral surface of the cover plate 7 7
The concentric runout amount of the table 29 based on c can be made very small. Further, since the outer diameter of the pair of deep groove ball bearings 5 is set substantially equal to the inner diameter of the bottomed cylindrical hole 3, a relatively large moment can be supported. Further, since the movable wing 4c and the table 29 are formed integrally with the swinging member 4, the table 29 and the movable wing 4c
There is no loosening or sagging between them.

Next, the operation of the swing actuator 1 having the above-described sensor mounting mechanism will be described.

By switching a switching valve (not shown), compressed air as a working fluid is supplied from a compressed air supply source to one pressure chamber 15 through one piping port 17, flow path 18 and insertion hole 11, while the other is supplied. When the other pressure chamber 15 is opened to the atmosphere through the insertion hole 11, the flow path 18, the piping port 17, and the switching valve (not shown), the movable blade 4c of the swinging member 4 is rotated by being pressed by the compressed air. An arc surface 4d formed on one side of 4c protrudes into the other pressure chamber 15 from the fixed wing 8 into the other end portion 12 of the adjusting member 12.
a, the rotation of the swing member 4 stops.

The stop position of the swing member 4 or the magnitude of the swing angle can be easily adjusted by changing the amount of protrusion of the adjustment member 12. When the tip 12a of the adjusting member 12 does not protrude from the fixed wing 8, the arc surface 4d of the swinging member 4 directly abuts on the fixed wing 8,
The rotation of the swing member 4 stops.

The fact that the swing member 4 has reached one swing end of the swing range means that one of the sensor mounting portions 25 provided on the outer surface of the body 2 is fixed at a required position in one of the sensor mounting portions 25. The magnetic proximity switch incorporated in the detection sensor 20 is detected by detecting the magnetic field of the permanent magnet 19, which is the object to be detected, and a signal is sent from the magnetic proximity switch to a sequencer or the like via the lead wire 23.

In the swing actuator 1 having the above configuration, the following operation and effect can be obtained.

That is, first, since the sensor mounting groove 25 is provided on the outer peripheral surface of the body 2, the position detecting sensor 20
Can be fixed to an arbitrary position on the outer peripheral surface of the body 2. Therefore, it is not necessary to dispose the position detecting mechanism on the rear end surface of the body 2 (the lower surface 2i of the body 2 in this embodiment) as in the above-described prior art. Does not become large. Further, since the rear end surface can be used as a mounting surface, the degree of freedom in mounting is improved. Further, since the number of components constituting the position detecting mechanism is small, the manufacturing cost can be reduced.

Further, since it is not necessary to prepare a curved position detecting sensor having a different curvature for each size of the swing actuator 1, maintenance is not troublesome.

Further, since the position detection sensor 20 is housed in the sensor mounting groove 25, the position detection sensor 20 may protrude from the body 2 and obstruct it, or may be damaged by contact with other devices. No, it can give a clean impression to the appearance.

Further, since the position detecting sensor 20 can be inserted into the sensor mounting groove 25 from the opening 25a of the sensor mounting groove 25, the axial end of the sensor mounting groove 25 is attached to the other body attached to the body 2. Maintenance can be easily performed even when the space is closed by a member or when the installation place is narrow and a space for inserting the position detection sensor 20 in the longitudinal direction of the body 2 cannot be secured.

Further, since it is not necessary to move the position detecting sensor 20 in the axial direction, the swing actuator 1 itself can be made compact in the axial direction.

Further, since the fixing member 26 is movably supported on the body 2 in the groove width direction by the engagement between the guide groove 25c and the engagement portion 26b, the movement direction of the position detection sensor 20 is limited to the groove width direction. And the position detection sensor 20
Can be easily set. Therefore, an accurate position detection function can be secured.

[0101]

The present invention has the following effects.

That is, first, in the swing actuator according to the first aspect of the present invention having the above structure, the sensor mounting portion for mounting the position detecting sensor is provided outside the body with a circular cross section centered on the swing center axis of the swing member. Since the sensor mounting portion is formed in an arc shape, the sensor mounting portion is provided not on the end surface of the body but on the peripheral surface, and the position detection sensor is mounted on the sensor mounting portion provided on the peripheral surface of the body. Therefore, there is no need to provide an arm or an adapter surrounding the arm on the rear end surface of the body unlike the prior art,
Even if the position detecting mechanism is provided, the actuator does not become large in the axial direction, and the end surface of the actuator can be used as a mounting surface. Further, since the number of components constituting the position detecting mechanism is small, it is possible to reduce the manufacturing cost.

Further, since the sensor mounting portion mounts the position detecting sensor having a straight rod shape with its longitudinal direction parallel to the center axis of the rocking member, a special position curved as in the prior art is used. A normal sensor can be used instead of the detection sensor, and since the position detection sensor can be fixed at any angle position in the arc, the detection position can be arbitrarily changed within this adjustable range. it can.

Further, as described above, since the sensor mounting portion for mounting the position detecting sensor is formed outside the body as an arc-shaped cross section centered on the center axis of the rocking member, the position detecting sensor is provided. Is fixed, the distance from the swing center axis of the swing member to the position detection sensor is always constant. Therefore, the detection accuracy can be stabilized.

Further, according to the present invention having the above structure,
In the swing actuator, the position detection sensor is fixed to an arbitrary position on the outer peripheral surface of the body because the cover plate covering the end surface of the body is provided with a locking portion parallel to the swing track of the swing member. be able to. Therefore, it is not necessary to dispose the position detecting mechanism on the rear end surface of the body as in the related art, so that the swing actuator does not become large even if the position detecting mechanism is provided. Further, since the rear end surface can be used as a mounting surface, the degree of freedom in mounting is improved. Further, since the number of components constituting the position detecting mechanism is small, the manufacturing cost can be reduced.

Further, since it is not necessary to prepare a curved position detecting sensor having a different curvature for each size of the swing actuator, maintenance is not troublesome.

Further, by moving the position detecting sensor in the direction of the swinging orbit of the swinging member, the fixing screw can be screwed into one of the fixing member or the position detecting sensor and the other can be inserted therethrough. The position detection sensor can be attached and detached from the outer peripheral surface of the body. Therefore, even when the end of the sensor mounting groove is closed by another member mounted on the body, or when the installation place is narrow and a space for inserting the position detection sensor in the longitudinal direction of the body cannot be secured, maintenance can be easily performed. You. Further, since it is not necessary to move the position detection sensor in the axial direction, the swing actuator itself can be made compact in the axial direction.

In addition to the above, in the swing actuator according to the third aspect of the present invention having the above configuration, the locking piece of the fixing member is moved between the body and the cover plate during the assembly process of the swing actuator. As a result, the fixing member does not drop off from the body and is lost. Further, since there is no need to separately provide an insertion port for inserting the locking piece into the locking portion, the detection range of the position detection sensor can be set wider and the swing actuator itself can be made compact accordingly. .

Further, according to the present invention having the above configuration,
Since the sensor mounting groove is provided on the outer peripheral surface of the body, the position detecting sensor can be fixed at an arbitrary position on the outer peripheral surface of the body. Therefore, it is not necessary to dispose the position detecting mechanism on the rear end surface of the body as in the related art, so that the swing actuator does not become large even if the position detecting mechanism is provided. Further, since the rear end surface can be used as a mounting surface, the degree of freedom in mounting is improved. Further, since the number of components constituting the position detecting mechanism is small, the manufacturing cost can be reduced.

Further, since there is no need to prepare a curved position detecting sensor having a different curvature for each size of the swing actuator, maintenance is not troublesome.

Further, since the position detecting sensor is housed in the sensor mounting groove, the position detecting sensor does not protrude from the body to be in the way and does not break due to contact with other devices. It can also give a clean impression.

Further, since the position detecting sensor can be inserted into the sensor mounting groove from the opening of the sensor mounting groove,
Even if the end of the sensor attachment groove is closed by another member attached to the body, or if the installation location is too small to secure a space for inserting the position detection sensor in the longitudinal direction of the body, maintenance can be easily performed.

Further, since there is no need to move the position detecting sensor in the axial direction, the swing actuator itself can be made compact in the axial direction.

In addition, in the swing actuator according to the fifth aspect of the present invention having the above structure, the fixing member can be freely moved in the groove width direction by the engagement between the guide groove and the engaging portion. In order to support, the moving direction of the position detection sensor is limited to the groove width direction, and the position of the position detection sensor can be easily set. Therefore, an accurate position detection function can be secured.

[Brief description of the drawings]

FIG. 1 is a front view of a swing actuator according to a first embodiment of the present invention.

FIG. 2 is a right side view of the actuator.

FIG. 3 is a left side view of the actuator.

FIG. 4 is a rear view of the actuator.

FIG. 5 is a plan view of the actuator.

FIG. 6 is a bottom view of the actuator.

FIG. 7 is a sectional view taken along line AA in FIG. 1;

FIG. 8 is a sectional view taken along line BB in FIG. 2;

9 is a sectional view taken along line CC in FIG.

FIG. 10 is an exploded perspective view of a position detection sensor, a fixing member, and a fixing screw.

FIG. 11 is a perspective view of a lid plate.

FIG. 12 is a cross-sectional view showing another example of the shape of a locking portion, a locking piece, an engaging portion, and an arc surface.

FIG. 13 is a cross-sectional view showing another example of the shape of the locking portion, the locking piece, the engaging portion, and the arc surface.

FIG. 14 is a cross-sectional view showing another example of the shape of a locking portion, a locking piece, an engaging portion, and an arc surface.

FIG. 15 is a cross-sectional view showing another example of the shape of the locking portion, the locking piece, the engaging portion, and the arc surface.

FIG. 16 is a sectional view showing another example of the shape of the locking portion, the locking piece, the engaging portion, and the arc surface.

FIG. 17 is a cross-sectional view showing another example of the shape of the locking portion, the locking piece, the engaging portion, and the arc surface.

FIG. 18 is a front view of a swing actuator according to a second embodiment of the present invention.

FIG. 19 is a right side view of the actuator.

FIG. 20 is a left side view of the actuator.

FIG. 21 is a rear view of the actuator.

FIG. 22 is a plan view of the actuator.

FIG. 23 is a bottom view of the actuator.

24 is a sectional view taken along line DD in FIG. 18;

FIG. 25 is a sectional view taken along line EE in FIG. 19;

26 is a sectional view taken along line FF in FIG.

FIG. 27 is an exploded perspective view of a position detection sensor, a fixing member, and a fixing screw.

FIG. 28 is an explanatory view showing a method of mounting the position detection sensor.

FIG. 29 is an explanatory view showing a method of mounting the position detection sensor.

FIG. 30 is an explanatory view showing a method of mounting the position detection sensor.

FIG. 31 is a sectional view of a swing actuator according to a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Swing actuator 2 Body 3 Cylindrical hole with a bottom 4 Swing member 7 Cover plate 7b, 25b Locking portion 12 Adjusting member 15 Pressure chamber 19 Permanent magnet (detected body) 20 Position detection sensor 21 Sensor case 25 Sensor mounting portion ( Sensor mounting groove) 25a Opening 25c Guide groove 25d Bottom part 26 Fixing member 26a Locking piece 26b Engaging part 26f Slide part 27 Fixing screw 0 Oscillating center axis

Claims (5)

[Claims] An oscillating member having a function of detecting an oscillating position of an oscillating member (4) that oscillates inside a body (2) by a position detection sensor (20) mounted outside the body (2). In the dynamic actuator (1), a sensor mounting portion (25) having an arc-shaped cross section formed around a swing center axis (0) of the swing member (4) is provided outside the body (2); The sensor mounting portion (25) mounts a straight rod-shaped position detection sensor (20) with its longitudinal direction parallel to the swing center axis (0), and detects the position at an arbitrary angular position in the arc. A swing actuator, wherein the sensor (20) can be fixed. 2. A body (2), a swing member (4) rotatably supported inside the body (2), and a position detecting mechanism for detecting a position of the swing member (4). In the swing actuator (1) provided, a cover plate (7) covering an end surface of the body (2) includes a locking portion (7b) parallel to a swing track of the swing member (4); A detection mechanism configured to detect the position of the detected object (19) mounted on the swing member (4); a position detection sensor (20) configured to detect a position of the detected object (19);
And a fixing screw (2) that is screwed into one of the fixing member (26) or the position detection sensor (20) and inserted into the other, and the leading end of which contacts the outer peripheral surface of the body (2).
7), and a locking piece (26a) in which the fixing member (26) is movably inserted into the locking section (7b); and an engaging section (26) that engages with the position detection sensor (20). 26b). 3. The rocking actuator according to claim 2, wherein said locking portion (7b) sandwiches said locking piece (26a) with said body (2). 4. A body (2), a swing member (4) rotatably supported inside the body (2), and a position detecting mechanism for detecting a swing position of the swing member (4). In the oscillating actuator (1) comprising: a sensor mounting groove in which the body (2) is open outward on the outer peripheral surface in parallel with the oscillating center axis (0) of the oscillating member (4). (25), wherein the position detection mechanism comprises: a detection target (19) mounted on the swing member (4); and a position detection sensor (20) for detecting a position of the detection target (19). , Fixing member (26)
And a fixing screw (27) screwed into one of the fixing member (26) or the position detection sensor (20) and inserted into the other, and the tip of which contacts the bottom (25d) of the sensor mounting groove (25). The sensor mounting groove (25) is provided with the position detection sensor (2).
0) and an opening (25a) having a width into which the fixing member (26) can be inserted, and a locking portion (25b) wider than the opening (25a). The fixing member (26) A locking piece (26a) that moves in the groove width direction and can be locked to the locking portion (25b), and an engaging portion (26b) that engages with the position detection sensor (20). And the swing actuator. 5. The swing actuator according to claim 4, wherein said body (2) extends in a groove width direction.
A rocking actuator, comprising: a slide portion (26f) in which the fixing member (26) moves in the groove width direction and can engage with the guide groove (25b).