JP2002126978A - Polishing device using ultrasonic wave - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a polishing device using ultrasonic wave capable of facilitating attaching work of a mold, reducing a component cost, certainly transmitting precise vibrations to a vibrating rod. SOLUTION: A vibrating rod 14 has a solid portion 16 at one side of a middle part in a longitudinal direction, and a hollow portion 18 at the other side of the middle part the longitudinal direction. The solid portion 16 side of the vibrating rod 14 is fixed to a horn 12 coupled to an ultrasonic vibrating element 10, and an end of the hollow portion 18 is made to be a free end. A mold 26 is fitted with the free end of the hollow portion 18. One end of the vibrating rod 14 is made to be a free end, so that only one ultrasonic vibrating element 10 and one horn 12 are required. A part fixed to the horn 12 of the vibrating rod 14 is made to be the hollow portion 16, thereby eliminating a fixed part by adhering at a fixed part of the vibrating rod, so that deficiency due to adhering can be eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus using ultrasonic waves for polishing an uneven surface of a mold or the like.

[0002]

2. Description of the Related Art With the miniaturization of information equipment, there is an increasing demand for dies having small and complicated shapes. The engraving of these molds is performed exclusively by electric discharge machining, but the surface obtained by electric discharge machining has a satin-like shape, and since there is also a damaged layer, the surface of the mold obtained by electric discharge machining is satisfactory. Was not. Therefore, the mold required polishing as post-processing of the electric discharge machining.

[0003] Journal of the Japan Society of Abrasive Processing Vol. 43, No. 5 1
999, MAY, P .; A polishing apparatus for polishing a surface of a through-hole of a mold is provided in “Research on polishing of a small mold using ultrasonic elliptical vibration” of No. 226031. This polishing apparatus is shown in FIGS. Polishing device 40
Are an upper ultrasonic transducer 42 and a lower ultrasonic transducer 44
And an upper horn 46 connected to the upper ultrasonic transducer 42 for increasing the amplitude, and a lower horn 48 connected to the lower ultrasonic transducer 44 for increasing the amplitude. And upper horn 46 and lower horn 4
8 and a cylindrical vibrating rod 50 which is connected and fixed between the vibrating rods.

When the mold 52 is attached to the polishing apparatus 40, for example, the lower horn 48 connected to the lower ultrasonic vibrator 44 is removed from the lower end of the vibrating rod 50, and the vibrating rod 50 is removed.
The lower horn 48 is connected and fixed to the lower end of the vibrating rod 50 again.

Next, a resin is filled between the outer surface of the vibrating bar 50 and the hole of the mold 52 and cured, and a tool resin 54 is fixedly formed on the outer surface of the vibrating bar 50. Since the resin contracts when it cures, a gap 56 (FIG. 5) is generated between the outer surface of the tool resin 54 and the surface of the hole of the mold. The abrasive grains 58
Is supplied, and a standing wave is caused to flow through the vibrating rod 50 by the upper ultrasonic transducer 42 and the lower ultrasonic transducer 44,
The vibration bar 50 (including the upper horn 46, the lower horn 48, the upper ultrasonic oscillator 42, and the lower ultrasonic oscillator 44) is moved up and down. Thus, the surface of the hole of the mold 52 is polished without causing uneven polishing.

[0006]

In the conventional polishing apparatus 40, the ultrasonic vibrators 42 and 44 (and the horns 46 and 48) are fixed to both ends of the vibrating rod 50. When attaching the 52, for example, the lower horn 48 was removed from the lower end of the vibrating bar 50, and after fitting the vibrating bar 50 and 52 molds, the lower horn 48 was fixed to the lower end of the vibrating bar 50. As described above, there is a disadvantage that it takes time to attach the mold 52 to the polishing apparatus 40. Further, the ultrasonic vibrators 42 and 44 are provided at both ends of the vibrating rod 50.
, A total of two ultrasonic transducers 42 and 44
(And a total of two horns 46, 48), and the parts cost was high.

FIG. 6 shows a fixed state of the vibrating rod 50 and the horns 46, 48 in the polishing apparatus 40. This polishing device 4
At 0, a cap 60 is provided between the vibrating bar 50 and the horns 46 and 48. A through female screw 62 is formed in the center of the axis of the cap 60, a female screw 64 is formed in the horns 46 and 48, and the cap 60 and the horns 46 and 48 are fixed with the male screw 66. The method of fixing the vibrating rod 50 and the cap 60 is as follows.
The inside of the cylindrical vibrating rod 50 and the outside of the cap 60 were fitted together, and the fitted portion was bonded with an adhesive. The bonding operation between the vibrating bar 50 and the cap 60 is difficult, and the vibrations from the ultrasonic vibrators 42 and 44 cause the bonded portion to come off, making it impossible to transmit the vibration to the vibrating bar 50 accurately.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has been made in consideration of the above problems, and has been made in view of an ultrasonic wave that facilitates the work of attaching a mold, reduces the cost of parts, and reliably transmits accurate vibration to a vibrating rod. It is an object of the present invention to provide a polishing apparatus using the same.

[0009]

SUMMARY OF THE INVENTION In order to achieve the above object, a polishing apparatus using an ultrasonic wave according to the present invention transmits a vibration generated by an ultrasonic vibrator to a vibrating rod and a tool fixed to the vibrating rod. In a polishing apparatus using ultrasonic waves for polishing a workpiece with a resin, the ultrasonic vibrator is made one, and one of the vibrating rods is made a solid part and the other is made a hollow part, and the vibrating rod is solid. The vibrating rod is fixed directly or indirectly to the ultrasonic transducer, and the hollow end of the vibrating rod is a free end.

[0010]

Next, the present invention will be described with reference to the drawings. FIG. 1 is a partial cross-sectional front view showing a polishing apparatus using ultrasonic waves according to the present invention. In the present invention, only one ultrasonic transducer 10 and horn 12 are used instead of the conventional two. One end of a vibrating rod 14 is fixed to a horn 12 connected to the ultrasonic vibrator 10. Vibrating rod 14
, One side of the length is a solid portion 16 and the other side of the length is a hollow portion 18 having a space formed therein. The end of the solid portion 16 is fixed to the horn 12, and the end of the hollow portion 18 is a free end. The vibrating rod 14 (the ultrasonic vibrator 10 and the horn 12) is moved by three-axis moving means (not shown).
It is set so that it can be displaced in three directions of X axis, Y axis and Z axis.

As shown in FIG. 2, a female screw portion 20 is formed on the horn 12, and a female screw portion 22 is also formed on the shaft center of one end of the solid portion 16 of the vibrating rod 14. Horn 1 with male screw 24
The horn 12 and the vibrating rod 14 are fixed by screwing the female screw part 20 of the second and the female screw part 22 of the vibrating rod 14. In the present invention, the ultrasonic vibrator 10 is disposed above, the vibrating rod 14 is disposed below, and the free end of the hollow portion 18 is the lowermost end. The hollow portion 18 of the vibrating rod 14 is inserted into a hole of a mold 26 which is a workpiece. The mold 26 is held by a holding member 28.

After the hollow portion 18 of the vibrating rod 14 is inserted into the hole of the mold 26, the outer surface of the vibrating rod 14 is
A resin is filled between the holes 6 and cured to form a tool resin 30 on the outer surface of the vibrating rod 14. Since the tool resin 30 contracts when it cures, the outer surface of the tool resin 30 and the mold 2
A gap (not shown) is created between the hole 6 and the surface. When polishing the surface of the hole of the mold 26, as in the conventional case,
A slurry containing abrasive grains (not shown) is supplied to the gap, and a carrier wave is given to the vibrating rod 14 by the ultrasonic vibrator 10.

The tool resin 30 is formed at the outer surface of only the hollow portion 18 on the free end side of the vibrating rod 14. This is because a strong carrier wave is generated on the free end side of the vibrating rod 14, and the hollow portion 18 is more suitable for machining than the solid portion 16.

As shown in FIG. 3, the inner surface of the hole of the mold 26 has an inclined surface 32 and inner wall surfaces 34 and 36 parallel to the axial direction of the vibrating rod 14. To polish the inclined surface 32, the tool resin 30 is pressed against the inclined surface 32 of the mold 26 by adjusting the relative position of the tool resin 30 with respect to the mold 26 by a three-axis direction moving means. After that, the ultrasonic vibrator 10 is operated to apply a carrier wave to the vibrating rod 14, and the inclined surface 32 of the mold 26 is polished by the tool resin 30.
At this time, the vibrating rod 14 is not moved in the vertical direction.

On the other hand, in order to polish the inner wall surfaces 34 and 36 of the mold 26, the vibrating rod 14 and the tool resin 30 are adjusted to predetermined positions by a three-axis moving means, and the vibrating rod 14 is In addition, the tool resin 30 is moved up and down.

In the present invention, since one end of the vibrating rod 14 is a free end, the number of the ultrasonic vibrator 10 and the horn 12 can be reduced to one, and the cost of parts can be reduced. Further, the vibration bar 14 can be obtained only by fitting the mold 26 to the free end of the vibration bar 14.
Since the mounting of the mold and the mold 26 is completed, it is possible to process various types of workpieces including, for example, one end closed holes. Further, after inserting the vibrating rod into the mold 26 as in the related art, the operation of fixing the ultrasonic vibrator and the horn to the vibrating rod can be omitted.

According to the present invention, the horn 1
By fixing the solid portion 16 to the horn 12, the horn 12 and the vibrating rod 14 can be directly fixed by the male screw 24, and the cap conventionally required can be omitted. Further, by omitting the cap, it is possible to eliminate the adhesive fixing portion for fixing the vibrating rod with the adhesive, thereby eliminating the problem of the conventional vibrating rod coming off.

In the above-described embodiment, the object to be polished is the mold 26. However, the present invention is not limited to the mold 26 but can be applied to various workpieces. In addition, although the vibration bar 14 is described as being fixed to the horn 12 connected to the ultrasonic vibrator 10, the vibration bar 14 may be directly fixed to the ultrasonic vibrator 10 without passing through the horn 12.

[0019]

As described above, according to the polishing apparatus using ultrasonic waves according to the present invention, one end of the vibrating rod is set to the free end,
The free end and the mold are fitted together. As a result, the number of ultrasonic transducers and horns conventionally used two can be reduced to one, and the cost of parts can be reduced. In addition, since the mold is fitted to the free end of the vibrating rod, the degree of freedom of the arrangement position of the mold with respect to the vibrating rod is increased,
It can be applied to the processing of various types of workpieces.
Further, since the vibrating rod to be fixed to the horn is a solid portion, a cap conventionally used at a fixing portion between the vibrating rod and the horn can be omitted to reduce costs. In addition, it is possible to eliminate the bonding portion at the fixed portion of the vibration bar, to eliminate the possibility of the vibration bar coming off, and to surely transmit the vibration from the ultrasonic vibrator to the vibration bar.

[Brief description of the drawings]

FIG. 1 is a partial cross-sectional front view showing an embodiment of a polishing apparatus using ultrasonic waves according to the present invention.

FIG. 2 is an enlarged sectional view of a connecting portion between a horn and a vibrating bar shown in FIG.

FIG. 3 is an enlarged sectional view of a main part of the vibrating rod shown in FIG.

FIG. 4 is a partial sectional front view of a conventional polishing apparatus using ultrasonic waves.

FIG. 5 is an enlarged sectional view of a main part of FIG.

FIG. 6 is an enlarged sectional view of a connecting portion between the horn and the vibrating rod shown in FIG.

[Description of Signs] 10 Ultrasonic vibrator 12 Horn 14 Vibration bar 16 Solid part 18 Hollow part 20 Female screw part 22 Female screw part 24 Male screw 30 Tool resin

Claims (3)

[Claims] 1. A polishing apparatus using ultrasonic waves for transmitting vibration generated by an ultrasonic vibrator to a vibrating rod and polishing a workpiece with a tool resin fixed to the vibrating rod, wherein the ultrasonic vibrator is used for And one of the vibrating rods is a solid part and the other is a hollow part, and the solid part side of the vibrating rod is fixed directly or indirectly to the ultrasonic vibrator, and the hollow of the vibrating rod is A polishing apparatus using ultrasonic waves, characterized in that a free end is provided on a part side. 2. The polishing apparatus according to claim 1, wherein the tool resin is formed on an outer surface of a hollow portion of the vibrating rod. 3. The polishing apparatus according to claim 1, wherein an adhesive is not used at a position where the vibrating rod is directly or indirectly fixed to the ultrasonic vibrator. .