JP2002107914A - Pellicle and pellicle mounting method - Google Patents

Abstract

[PROBLEMS] To provide a pellicle and a method for mounting a pellicle which can be surely and easily mounted on a photomask without damaging a pellicle plate. A pellicle (11) has a pellicle frame (15).
The pellicle plate 3 is adhered to one end of the pellicle frame, and the photomask 7 is mounted on the other end of the pellicle frame 15. At one end of the pellicle frame 15, a pellicle plate bonding portion to which the pellicle plate 3 is bonded,
And a pressed portion 15a located outside the outer peripheral edge of the main body.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an LSI,
The present invention relates to a pellicle and a pellicle mounting method suitable for an exposure method using light having a wavelength of substantially 220 nm or less, which is used for manufacturing a semiconductor element such as a liquid crystal display device or the like.

[0002]

2. Description of the Related Art In the manufacture of semiconductor elements such as LSIs and VLSIs or liquid crystal display devices, a pellicle is placed on a photomask in order to prevent dust from adhering to the pattern forming surface of the photomask during patterning. It is common to carry out exposure work by mounting. The exposure light used in the manufacture of these elements and devices, wavelength in response to a request miniaturization is becoming increasingly shorter, techniques devised to use an F ₂ laser etc. Wavelength 220nm or less of the exposure light Today Have been.

FIG. 5 is a perspective view showing a state in which a conventional pellicle is mounted on a photomask, and FIG. 6 is a sectional view taken along the line AA of FIG. The pellicle 1 is configured by bonding a pellicle film 2 that transmits exposure light to a pellicle frame 5 with an adhesive 4. At the time of the exposure operation, the pellicle 1 has the pellicle frame 5 mounted on the photomask 7 with the adhesive 6. Specifically, after placing the pellicle frame 5 on the photomask 7 with the adhesive 6 interposed therebetween, the pellicle film 2
The pellicle frame 5 is pressed toward the photomask 7 by a mounting device (pellicle mounter) (not shown) as shown by an arrow F in the figure from above, and the pellicle frame 5 is maintained while maintaining the state. Attach to

Conventionally, the pellicle film 2 has a thickness of 1 μm.
The following synthetic resin thin films are used. However, in the conventional pellicle film 2, if the above-mentioned short-wavelength light is irradiated, the synthetic resin is easily decomposed and cannot be put to practical use. The use of a pellicle plate obtained by processing a synthetic quartz glass into a thin flat plate has been studied. The synthetic quartz glass is, for example, a glass made of silicon oxide substantially obtained by reacting a silicon source and an oxygen source in a gas phase to grow a porous material called silicon oxide called soot and sintering the soot. It is.

[0005]

When a pellicle using a pellicle plate is mounted on a photomask, the pellicle frame is directed from above the pellicle plate toward the photomask, as in the case of the pellicle 1 using the pellicle film 2. And press
The pellicle plate may be broken.

The present invention has been made in view of such a situation, and an object of the present invention is to provide a pellicle and a pellicle mounting method which can be surely and easily mounted on a photomask without damaging a pellicle plate. It is in.

[0007]

In order to achieve the above-mentioned object, the present invention provides a pellicle frame in which a pellicle plate is adhered to one end of the pellicle frame, and a photomask is provided on the other end of the pellicle frame. In the pellicle to be mounted, one end of the pellicle frame has a pellicle plate bonding portion to which a pellicle plate is bonded and a pressed portion located outside the outer peripheral edge of the pellicle plate. To provide a pellicle. According to another aspect of the present invention, there is provided a pellicle having a pellicle plate adhered to one end of a pellicle frame, the pellicle being mounted on a photomask at the other end of the pellicle frame. In the method, one end of the pellicle frame has a pressed portion located outside an outer peripheral edge of the pellicle plate, and the other end of the pellicle frame is in contact with a photomask, A pellicle mounting method is provided, wherein a pressed portion is pressed by a pellicle mounter to mount the pellicle on the photomask.

According to the pellicle and the method of mounting the pellicle having the above-described configuration, the pellicle can be reliably and easily mounted on the photomask without damaging the pellicle plate.
In the present specification, the “pellicle plate” refers to a plate material made of synthetic quartz glass having a thickness of about 0.01 to 2 mm adhered to the pellicle plate bonding portion at one end of the pellicle frame. For bonding, an adhesive such as a polybutene resin, an acrylic resin, an epoxy resin, a silicone-based, or a fluororesin-based adhesive can be used as in the conventional case.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a state in which a pellicle according to a first embodiment of the present invention is mounted on a photomask, and FIG. 2 is an AA plane view of FIG.

As shown in FIG. 1, the pellicle 11 is formed by bonding a pellicle plate 3 that transmits exposure light to a pellicle plate bonding portion at an upper end (one end) of a pellicle frame 15. The pellicle frame 15 includes the pellicle plate bonding portion and a pressed portion 15 a located outside the outer peripheral edge of the pellicle plate 3.

As shown in FIG. 2, in the present embodiment, the inner peripheral side of the upper end surface of the pellicle frame 15 having a rectangular longitudinal cross section is gradually depressed so that the outer peripheral side portion is projected upward. The portion on the outer peripheral side is a pressed portion 15a. A concave portion on the inner peripheral side of the upper end surface of the pellicle frame 15 is a pellicle plate bonding portion, and an adhesive 4 is applied thereon, and the peripheral portion of the pellicle plate 3 is placed on the adhesive 4. The pellicle plate 3 and the pellicle frame 15 are bonded. Here, the upper end surface of the pressed portion 15 a protrudes from the upper surface of the pellicle plate 3.

The width W1 of the pressed portion 15a and the width W2 of the concave portion on the inner peripheral side (the pellicle plate bonding portion) are not limited. For example, the outer size of the pellicle frame 15 is 149.0.
× 122.0mm and inner size is 145.0 × 118.0mm
, W1 is 0.1 to 1.9 mm, W2 is 0.1 to
It can be 1.9 mm.

A method for mounting the pellicle 11 on the photomask 7 will be described with reference to FIG. First, the lower end (the other end) of the pellicle frame 15 is brought into contact with the photomask 7 via the adhesive 6. Next, the pressed part 15a of the pellicle frame 15 is pressed toward the photomask 7 by the movable part 20 of the pellicle mounter (mounting device). The movable portion 20 has a configuration in which a pressing frame portion 21 is provided on the lower surface peripheral edge of the flat plate portion, similar to the one used for mounting the conventional pellicle 1 (see FIG. 6) using the pellicle film 2. The pellicle 11 is fixed to the photomask 7 with the adhesive 6 while maintaining the state where the pressed portion 15 a of the pellicle frame 15 is pressed by the pressing frame portion 21 as shown by the arrow F in the drawing. At this time, the pressing frame 21 does not press the pellicle plate 3. Thus, the pellicle 11 can be mounted on the photomask 7.

According to the pellicle 11 and the pellicle mounting method as described above, the pellicle 11 can be securely and easily mounted on the photomask 7 without damaging the pellicle plate 3.

FIG. 3 shows a pellicle 31 according to a second embodiment of the present invention. In the present embodiment, the outer peripheral side of the upper end portion of the pellicle frame 35 having a rectangular vertical cross section is gradually recessed, and a portion on the outer peripheral side is a pressed portion 35a. The adhesive 4 is applied on the inner peripheral portion (the pellicle plate bonding portion) of the upper end of the pellicle frame 35, and the peripheral portion of the pellicle plate 3 is placed on the adhesive 4, and The pellicle frame 35 is adhered.

In order to mount the pellicle 31 on the photomask 7, first, the pellicle frame 3
The lower end of 5 is in contact with photomask 7. Next, the pellicle frame 35 is moved by the movable part 40 of the pellicle mounter.
Is pressed toward the photomask 7.
The movable portion 40 has a configuration in which a pressing frame portion 41 is provided on the lower peripheral edge of the flat plate portion. The pressing frame portion 41 is different from the pressing frame portion 21 (see FIG. 2) of the movable portion used in the first embodiment. It is an extension of the height. The arrow F in FIG.
While maintaining the state where the pressed portion 35a of the pellicle frame 35 is pressed as shown by, the pellicle 31 is
Is fixed to the photomask 7. At this time, the pressing frame 41
Does not press the pellicle plate 3. Thus, the pellicle 31 can be mounted on the photomask 7.

The pellicle 31 as described above can be securely and easily mounted on the photomask 7 without damaging the pellicle plate 3, and the adhesive 4
And the pellicle plate 3 is easily bonded.

FIG. 4 is a view for explaining another example of a method for mounting the pellicle 31 of the second embodiment on the photomask 7. In FIG. As shown in FIG. 4, first, the lower end of the pellicle frame 35 is brought into contact with the photomask 7 via the adhesive 6, and the pressing jig 25 is set on the pressed portion 35a. At this time, the upper end surface of the pressing jig 25 protrudes from the upper surface of the pellicle plate 3. As the pressing jig 25, a frame-shaped member can be used. Next, the pressing frame portion 21 of the movable portion 20 of the pellicle mounter similar to that used in the first embodiment.
As a result, the pellicle 31 is fixed to the photomask 7 with the adhesive 6 while maintaining the state in which the pressed portion 35a of the pellicle frame 35 is pressed via the pressing jig 25 as shown by the arrow F in the drawing. At this time, the pressing frame 21 does not press the pellicle plate 3. Thus, the pellicle 31 can be mounted on the photomask 7. After attaching the pellicle 31 to the photomask 7, the pressing jig 25 is removed from the pellicle 31.

According to the mounting method of the pellicle 31 as described above, a mounter similar to the conventional mounter can be used.

It should be noted that the present invention is not limited to the above-described embodiment, and appropriate modifications and improvements can be made.
For example, the pressed portion on the outer peripheral side of the pellicle frame may be flush with the portion on the inner peripheral side of the pellicle frame (the pellicle plate bonding portion). For example, on the outer peripheral surface of the pellicle frame,
A plurality of pressed parts may be provided at intervals in the circumferential direction.

[0021]

As described above, according to the present invention,
The pellicle can be securely and easily attached to the photomask without damaging the pellicle plate.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a state in which a pellicle according to a first embodiment of the present invention is mounted on a photomask.

FIG. 2 is a sectional view taken along the line AA in FIG.

FIG. 3 is a sectional view showing a state in which a pellicle according to a second embodiment of the present invention is mounted on a photomask.

FIG. 4 is a diagram illustrating a second example of a pellicle mounting method according to a second embodiment of the present invention.

FIG. 5 is a perspective view showing a state in which a conventional pellicle is mounted on a photomask.

FIG. 6 is a sectional view taken along the line AA in FIG.

[Explanation of symbols]

 Reference Signs List 3 pellicle plate 4 adhesive 6 adhesive 7 photomask 11, 31 pellicle 15, 35 pellicle frame 15a, 35a pressed part

Continuing on the front page (72) Inventor: Okada required, Asahi Glass Co., Ltd., 1150 Hazawacho, Kanagawa-ku, Yokohama, Kanagawa Prefecture (72) Inventor Shinya Kikukawa, 1150 Hazawacho, Kanagawa-ku, Yokohama, Kanagawa Prefecture, Asahi Glass Co., Ltd. (72) Invention Person Hiroshi Arishima 1-12-1 Yurakucho, Chiyoda-ku, Tokyo Inside Asahi Glass Co., Ltd. (72) Inventor Hiroshi Morita 1-12-1 Yurakucho, Chiyoda-ku, Tokyo Asahi Glass Co., Ltd. (72) Inventor Shigehito Shigematsu (1-2) Inventor Hiroaki Nakagawa 6-1-2 Waki, Waki-machi, Kuga-gun, Yamaguchi Prefecture F-term in Mitsui Chemicals, Inc. (1-2) 2H095 BC38 BC39 5F046 AA28 CB17 CB27 DA06

Claims (5)

[Claims] 1. A pellicle wherein a pellicle plate is bonded to one end of a pellicle frame and a photomask is mounted on the other end of the pellicle frame. A pellicle comprising: a pellicle plate bonding portion to which a plate is bonded; and a pressed portion located outside an outer peripheral edge of the pellicle plate. 2. The pellicle according to claim 1, wherein an upper end surface of the pressed portion protrudes from an upper surface of the pellicle plate. 3. A method for mounting a pellicle, wherein a pellicle plate is adhered to one end of a pellicle frame, wherein the other end of the pellicle frame is mounted on a photomask. The portion has a pressed portion located outside the outer peripheral edge of the pellicle plate, and in a state where the other end of the pellicle frame is in contact with a photomask, the pressed portion is pressed by a pellicle mounter. Mounting the pellicle on the photomask. 4. The pellicle mounting method according to claim 3, wherein the pressing by the pellicle mounter is performed by pressing an upper end surface of the pressed portion projecting from an upper surface of the pellicle plate. 5. The pressing by the pellicle mounter is performed by pressing the upper end surface of the pressed portion retreated from the upper surface of the pellicle plate via a pressing jig or a pressing frame portion provided on the mounter. 3. The method for mounting a pellicle according to 3.