JP2002107685A - Liquid crystal substrate support device - Google Patents

Abstract

(57) [Summary] [Purpose] It is to enable the quality of a display area to be accurately determined. The liquid crystal substrate support device includes a base having a backlight unit having a first light passage area on an upper portion, and a receiver arranged on the base to receive the liquid crystal substrate, the first light being provided on the base. A receiver provided with a light diffusing plate opposed to the passage area; and a plurality of second masks formed of a light-impermeable material and arranged on the light diffusing plate and corresponding to a display area of a liquid crystal substrate to be inspected. A mask having two light passage areas.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a supporting device used in an inspection apparatus for a liquid crystal substrate to receive and support a liquid crystal substrate such as a liquid crystal display panel.

[0002]

2. Description of the Related Art In general, an inspection apparatus for a liquid crystal panel is provided with a support device for receiving and supporting a liquid crystal substrate to be inspected by a receiver arranged on a backlight unit. The receiver includes a light diffusing plate that diffuses light from the backlight unit and uniformly irradiates the light to the liquid crystal substrate from the back surface. The light that has passed through the light diffusion plate is applied to the entire surface of the liquid crystal substrate.

[0003]

However, in this type of conventional supporting device, since the light irradiated on the back surface of the liquid crystal substrate is scattered light, a plurality of display devices in which the liquid crystal substrate is finally divided into a liquid crystal display panel are provided. In the case of a plurality of areas having regions, the state of light passing through each display region, for example, uneven brightness, uneven color, is affected by light corresponding to the surrounding area, particularly light corresponding to the adjacent display area, As a result, the quality of the display area cannot be accurately determined.

[0004] Therefore, an object of the present invention is to make it possible to accurately determine the quality of a display area.

[0005]

A liquid crystal substrate support device according to the present invention includes a base having a backlight unit having a first light passage area on an upper portion thereof, and a receiver arranged on the base to receive the liquid crystal substrate. And a receiver provided with a light diffusion plate opposed to the first light passage area; and a mask formed of a light-impermeable material and disposed on the light diffusion plate, the liquid crystal substrate being inspected. A mask having a plurality of second light passage areas corresponding to the display area.

[0006] The liquid crystal substrate is received by a receiver, and receives light generated by the backlight unit on a back surface thereof through a light diffusion plate and a mask. The state of light in each display area on the backlighting surface of the liquid crystal substrate differs depending on the quality of the display area.
Therefore, the quality of the liquid crystal substrate is determined by checking the state of light on the anti-light irradiation surface by a visual inspection by an operator or an automatic inspection using an imaging device.

The light applied to the liquid crystal substrate is scattered light scattered by passing through the light diffusion plate. However, of such scattered light, the light that has passed through the second light passing area of the mask irradiates the corresponding display area, but the light that has reached the area around the second light passing area is the corresponding display area. The area is not irradiated.

As a result, according to the present invention, the state of light passing through each display area is not affected by the light corresponding to the surrounding area, and therefore, the quality of each display area can be accurately determined. it can.

[0009] The mask may be formed of an opaque sheet material, or may be printed on the light diffusing plate.

[0010] The mask may be arranged on a surface (light emitting surface) of the light diffusion plate on a side receiving the liquid crystal substrate. In this case, since the mask and the liquid crystal substrate are closer to each other than when the mask is arranged on the light incident side of the light diffusion plate, the state of light passing through each display area is the light corresponding to the surrounding area. And the quality of each display area can be determined more accurately.

[0011] The receiving member may further include an auxiliary member having a third light passage area, the auxiliary member being disposed on the base so as to face the first light passage area, and the auxiliary member being a liquid crystal. The light diffusion plate may include a plurality of suction grooves for vacuum-sucking an edge of the substrate, and the light diffusion plate may be mounted on the auxiliary member to close the third light passage area. By doing so, the liquid crystal substrate can be inspected in a state where the liquid crystal substrate is sucked in the suction groove, so that an accurate inspection can be performed.

[0012] In a preferred embodiment, the suction groove communicates with a hole formed in the auxiliary member and connected to a suction source.

[0013] Instead of the above, the supporting device may further comprise a pair of position regulating members for regulating the position of the receiving member with respect to the base, the first direction being in a plane parallel to the first light passage area. A pair of position regulating members arranged in the backlight unit at an interval and extending in a plane parallel to the first light passage area in a second direction intersecting the first direction in parallel. At least one of the position restricting members has a plurality of suction grooves for vacuum-adsorbing the edge of the liquid crystal substrate, and the light diffusion plate can be disposed between the position restricting members. Even in such a case, since the liquid crystal substrate can be inspected in a state where the liquid crystal substrate is sucked in the suction groove, an accurate inspection can be performed.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 4, a supporting device 10 is a chuck for receiving and supporting a liquid crystal substrate 12 in a lighting inspection device for a liquid crystal substrate 12, such as a liquid crystal display panel having a rectangular shape. Used as top.

The liquid crystal substrate 12 has a plurality of display areas 14 having a rectangular shape. Each display area 14 has a rectangular shape in which liquid crystal is sealed, and in the illustrated example, is arranged in a line so that the width direction is the same. Each display area 14 is later divided into rectangular liquid crystal display panels together with surrounding areas.

The liquid crystal substrate 12 also includes a plurality of electrodes (not shown) to which the probe unit 16 of the lighting inspection device is electrically connected.
Each display area 14 is provided in a line at a position corresponding to one edge in the longitudinal direction.

Each probe unit 16 includes a liquid crystal substrate 12
A plurality of contacts pressed by the electrodes are assembled to an electrically insulating block, and are assembled to the substrate 18 in the electrically insulating block. The substrate 18 has an opening 20 at a position corresponding to above the support device 10.

The lighting inspection device also includes a television camera for photographing an alignment mark (not shown) formed on the liquid crystal substrate 12 for relative positioning between the contact and the electrode of the liquid crystal substrate 12. Such an alignment camera 22 is mounted on the substrate 20.

When the lighting inspection device is for visual lighting inspection with the naked eye of the operator, the quality of the liquid crystal substrate 12 is visually judged from above the substrate 18 through the opening 20. However, when the lighting inspection device is an automatic inspection device, the liquid crystal substrate 12 is collectively photographed over the wide area including the entire display area 14 by the television camera 24 through the opening 20 from above the substrate 18, and its output is output. The quality of each display area 14 or the entire liquid crystal substrate 12 is determined by processing the signal.

In the illustrated example, a general television camera 24 is used.
However, instead of such a television camera 24, a line sensor in which a plurality of light receiving elements are arranged in a line is used, and the line sensor is moved in the longitudinal direction or the width direction of the liquid crystal substrate 12 while the liquid crystal substrate is moved. 12 may be taken.

The supporting device 10 includes a base 30 and a base 3
A pair of long position restricting members 32 arranged on the upper surface of the liquid crystal panel 0 at intervals in the first direction, and a receiving member 34 attached to the base 30 via the position restricting members 32 to receive the liquid crystal substrate 12. The relative movement of the receiving member 34 including the auxiliary member 36 and the light diffusion plate 38 attached to the auxiliary member 36, the mask 40 disposed on the upper surface of the light diffusion plate 38, and A pair of guides 4 that restrict the direction
2 and a plurality of retainers 44 for maintaining the position of the position regulating member 32 with respect to the base 30 in a releasable manner.

The base 30 is a backlight unit in which a plurality of light sources are accommodated in a box-shaped container that opens upward, and has a plate-like outer shape. The base 30 has a light passage area 46 formed on the upper wall of the container to allow light from the light source to pass upward. The light passage area 46 is formed by a rectangular opening having a width larger than the width of the liquid crystal substrate 12 and a length substantially equal to the length of the liquid crystal substrate. The opening, that is, the light passage area 46 is closed by a transparent plate 48.

The position regulating member 32 is formed by a long member having an L-shaped cross section. Position regulating member 3
Numerals 2 are arranged on the base 30 at intervals in a first direction in a plane parallel to the light passage area 46 so as to regulate the position of the receiver 34 with respect to the base 30. A second plane intersecting with the first direction in a plane parallel to 46;
Extending in the direction of.

The position regulating member 32 is relatively movably received in the first direction by a guide 42 mounted on the base 30 so as to extend in the first direction with an interval in the second direction. ing. The guide 42 is a guide rail in the illustrated example.

The auxiliary member 36 is formed in the shape of a frame having a rectangular shape having a light passing area 50 (see FIG. 4) that allows the light to pass upward. A plurality of screw members 52 are mounted on both position regulating members 32 at respective side portions corresponding to the long sides of the rectangle so as to face the region 46. Light passage area 5
0 has a rectangular shape slightly smaller than the liquid crystal substrate 12.

The auxiliary member 36 has a hole 56 (FIG. 4) communicating with a plurality of suction grooves 54 for sucking the edge of the liquid crystal substrate in vacuum.
On each side corresponding to the long side of the rectangle. The hole 56 of the auxiliary member 36 communicates with a hole 58 formed in the position regulating member 32. The hole 58 of the position regulating member 32 is connected to a suction source such as a suction pump. Hole 5
The airtightness between 6, 58 is maintained by the O-ring 60 (see FIG. 4) arranged on the position regulating member 32.

The light diffusing plate 38 has a rectangular shape approximately the same size as the liquid crystal substrate 12.
Is attached to the auxiliary member 36 by an appropriate means such as an adhesive in a state where the light passage area 50 is closed. Although the light diffusing plate 38 is arranged inside the auxiliary member 36 in the illustrated example, it may be arranged on the upper surface of the auxiliary member 36.

The mask 40 has a rectangular shape having substantially the same size as the liquid crystal substrate 12, and has a plurality of light passing areas 62 individually corresponding to the display area 14 of the liquid crystal substrate 12. Each light passage area 62 has substantially the same size and shape as the corresponding display area 14. The light passage area 62 is
In the illustrated example, it is a rectangular opening.

The mask 40 is formed of a so-called light-impermeable sheet material such as a black sheet material which does not allow light to pass in the illustrated example.
The light-diffusing plate 38 is mounted on the upper surface of the light-diffusing plate 38 by a suitable means such as an adhesive. However, mask 4
0 may be formed by printing an opaque area on the upper surface of the light diffusion plate 38 as shown in FIG.

The retainer 44 is a screw member which is screwed into the screw hole of the position regulating member 32 from above and whose lower end is pressed against the upper surface of the guide 42. Each position regulating member 32 has a screw hole 64 into which the screw member 52 is screwed, and one or more positioning pins 66 for releasably positioning the auxiliary member 36 with respect to the position regulating member 32. Each positioning pin 66 is assembled on the upper surface of the position regulating member 32, and is fitted in a hole formed in the auxiliary member 36.

The supporting device 10 receives the liquid crystal substrate 1
2 is mounted on an inspection stage for moving the probe 2 three-dimensionally with respect to the probe unit 16 and rotating the probe 2 angularly around an axis perpendicular to the liquid crystal substrate 12. Liquid crystal substrate 12
Is placed on the light diffusion plate 38 and is sucked by a plurality of suction grooves 54 formed on one side of the rectangle.

The liquid crystal substrate 12 supported by the supporting device 10
Receives the light generated by the light source in the base 30 on the back surface through the light diffusion plate 38 and the mask 40. Each display area 1 on the backlighting surface (the upper surface in the figure) of the liquid crystal substrate 12
The state of light such as uneven brightness and uneven color in the display area
4 greatly depends on the quality. Therefore, the liquid crystal substrate 12
Is determined by checking the state of light on the anti-light irradiation surface by a visual inspection by an operator or an automatic inspection using an imaging device such as a television camera 24.

The light applied to the liquid crystal substrate 12 becomes scattered light scattered by passing through the light diffusion plate 38. Of such scattered light, light passing through the light passing area 62 of the mask 40 is applied to the corresponding display area.
The light that has reached the area around is not applied to the corresponding display area 14. As a result, the state of the light passing through each display area 14 of the liquid crystal substrate 12 is not affected by the light corresponding to the surrounding area, so that the quality of each display area 14 can be accurately determined.

In the supporting device 10, since the mask 40 is disposed on the light emitting surface (the surface on the liquid crystal substrate 12 side) of the light diffusing plate 38, the mask 40 and the liquid crystal substrate 12 approach each other,
Accordingly, the state of the light passing through each display area 14 is less affected by the light corresponding to the surrounding area, and the quality of each display area 14 can be determined more accurately. However, the mask 40 may be arranged on the light incident surface side of the light diffusion plate 38.

During the inspection, the movement of the position restricting member 32 with respect to the base 30 is prevented by the maintenance tool 44.
A change in the position of the position regulating member 32 with respect to 0 is prevented. Thus, the receiving device 34 and the liquid crystal substrate 12 are positioned with respect to the base 30, so that an accurate inspection can be performed.

When changing to a liquid crystal substrate having a different size or a liquid crystal substrate having a different display area shape, the receiver 34 including the auxiliary member 36, the diffusion plate 38 and the mask 40 is replaced with a receiver corresponding to a new type of liquid crystal substrate. Be exchanged.

At this time, as shown in FIG. 6, the two position restricting members 32 are relatively moved in a direction toward or away from each other in accordance with a new liquid crystal substrate, so that the distance between the two position restricting members 32 and the base are adjusted. After the positions of the position regulating member 32 and the receiving member 34 with respect to the base 30 (and, consequently, the positions of the liquid crystal substrate 12 with respect to the base 30 and the probe unit 16) are adjusted to values and positions corresponding to the new liquid crystal substrate, the position of the new liquid crystal substrate is changed. The corresponding receiver is mounted on the base 30 via the position regulating member 32. For this reason, the expensive base 30 and the position regulating member 32 can be used in common for a plurality of types of liquid crystal substrates, and the inspection apparatus itself becomes inexpensive.

As shown in FIGS. 7, 8, and 9, when the dimensions of the new liquid crystal substrate 12a are the same as the dimensions of the original liquid crystal substrate 12, the original mask 40 is replaced with the new liquid crystal substrate 12a.
May be replaced only with the mask 40a having the light passage area 62a according to. In this case, although the interval between the position regulating members 32 does not need to be changed, the position regulating members 32
The position of the new liquid crystal substrate 12a with respect to the base 30 may be adjusted by moving with respect to the base 30.

When adjusting the distance between the position regulating members 32 and the position of the position regulating members 32 with respect to the base 30, the movement of the position regulating members 32 is regulated by the guides 42 in the first direction. Therefore, the distance between the position regulating members 32 and the base 3
The position of the position regulating member 32 with respect to 0 can be easily and accurately changed.

When replacing the receiving member 34, the auxiliary member 36
Is positioned with respect to the base 30 by the positioning pins 66, so that the positioning of the receiving member 34 with respect to the position regulating member 32 or the base 30 can be performed easily and accurately.

Referring to FIG. 8 to FIG.
0 indicates that the suction groove 54 is formed in each position regulating member 32, that the receiving member 72 is different, and that the positioning pin 6
Except that 6 is mounted on the base 30,
It is formed similarly to the support device 10 shown in FIGS.

The receiver 72 has a prismatic auxiliary member 74 mounted on each end of the rectangular light diffusing plate 38 in the longitudinal direction, and a mask 40 mounted on the upper surface of the light diffusing plate 38. The auxiliary member 74 has a hole into which the positioning pin 66 is fitted.

The receiving member 72 is arranged between the position regulating members 32 and is sandwiched between the position regulating members 32. Thereby, the position of the receiving member 34 with respect to the base 30 is regulated. The liquid crystal substrate 12 is placed on the upper surface of the receiving member 72 and a part of the upper surface of both position regulating members 72 and is adsorbed by the adsorption grooves 54, and receives the scattered light from the light diffusion plate 38 on the rear surface in that state.

As shown in FIG. 10, when changing to a liquid crystal substrate having a different size or a liquid crystal substrate 12a having a different display area shape, the receiving member 72 including the auxiliary member 74, the diffusion plate 38 and the mask 40 is replaced with a new liquid crystal substrate. It is exchanged for a receiving tool 72a corresponding to the type of 12a.

When the receiver is replaced, the position restricting members 32 are relatively moved in a direction toward or away from each other in accordance with a new liquid crystal substrate, and the distance between the position restricting members 32 and the position relative to the base are restricted. After the positions of the member and the receiving member are adjusted to values and positions corresponding to the new liquid crystal substrate, the receiving member 72 a corresponding to the new liquid crystal substrate is mounted on the base 30 by the position regulating member 32.

In the above embodiment, the liquid crystal substrate is received horizontally by the receiving device. However, the supporting device is arranged in the inspection device in an inclined state or an upright state, and the liquid crystal substrate is obliquely placed in the receiving device. You may make it receive in an upright state. Further, the receiver, particularly the diffusion plate and the mask, may have a shape other than a rectangle, such as a square, depending on the liquid crystal substrate to be inspected.

The present invention can be applied not only to a lighting inspection apparatus for a liquid crystal display panel but also to an inspection apparatus for a glass substrate on which a thin film transistor is formed. Therefore,
The present invention is not limited to the above embodiments, and can be variously modified without departing from the spirit of the present invention.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a main part of a lighting inspection device including a liquid crystal substrate support device according to the present invention.

FIG. 2 is a perspective view showing one embodiment of a support device used in the device shown in FIG.

FIG. 3 is an exploded perspective view of the support device shown in FIG.

FIG. 4 is a sectional view of the support device shown in FIG. 2;

FIG. 5 is a perspective view showing an embodiment of a receiver in which a mask is printed on a light diffusing plate.

FIG. 6 is a perspective view for explaining a state in which a position regulating member of the support device shown in FIG. 2 is moved with respect to a base.

FIG. 7 is a perspective view for explaining an example in which only the mask is replaced in the support device shown in FIG. 2;

FIG. 8 is a perspective view showing another embodiment of the support device according to the present invention.

FIG. 9 is a sectional view of the support device shown in FIG. 8;

FIG. 10 is a perspective view for explaining an example in which the supporting device shown in FIG. 8 is replaced with another receiving device.

[Explanation of symbols]

 10.70 Supporting device 12, 12a Liquid crystal substrate 14, 14a Display area 16 Probe unit 30 Base (backlight unit) 32 Position regulating member 34, 72 Receiver 36, 74 Auxiliary member 38 Light diffusing plate 40, 40a Mask 42 Guide 44 Maintainers 46, 50, 62, 62a Light passage area 48 Transparent plate 52 Screw member 54 Suction groove 56, 58 hole 60 O-ring 64 Screw hole 66 Positioning pin

Claims (7)

[Claims] A base provided with a backlight unit having a first light-passing area at an upper portion thereof; and a receiver disposed on the base for receiving a liquid crystal substrate, the receiver being opposed to the first light-passing area. A receiver provided with a light diffusing plate, and a plurality of second light passing areas corresponding to display areas of a liquid crystal substrate to be inspected, which are formed of a light-impermeable material and arranged on the light diffusing plate. And a mask having the liquid crystal substrate. 2. The support device according to claim 1, wherein the mask is formed from an opaque sheet material. 3. The support device according to claim 1, wherein the mask is printed on the light diffusion plate. 4. The supporting device according to claim 1, wherein the mask is disposed on a surface of the light diffusion plate on a side receiving the liquid crystal substrate. 5. The receiving member further includes an auxiliary member having a third light passage area, the auxiliary member being disposed on the base so as to face the first light passage area. 5 has a plurality of suction grooves for vacuum suction of an edge of the liquid crystal substrate, and said light diffusion plate is mounted on said auxiliary member to close said third light passage area. The support device according to any one of the above. 6. The supporting device according to claim 5, wherein the suction groove is a hole formed in the auxiliary member and communicates with a hole connected to a suction source. 7. A pair of position restricting members for restricting a position of the receiving member with respect to the base, wherein the pair of position restricting members are arranged in the first position.
A second direction intersecting with the first direction in a plane parallel to the first light passage area and arranged in the backlight unit at an interval in a first direction in a plane parallel to the light passage area; And at least one of the position regulating members has a plurality of suction grooves for vacuum-suctioning the edge of the liquid crystal substrate, and the light diffusing plate includes the position regulating member. The support device according to any one of claims 1 to 4, wherein the support device is disposed between the support devices.