JP2002053643A - Curing agent for epoxy resin and composition for encapsulating semiconductor using the same - Google Patents
Curing agent for epoxy resin and composition for encapsulating semiconductor using the sameInfo
- Publication number
- JP2002053643A JP2002053643A JP2000243215A JP2000243215A JP2002053643A JP 2002053643 A JP2002053643 A JP 2002053643A JP 2000243215 A JP2000243215 A JP 2000243215A JP 2000243215 A JP2000243215 A JP 2000243215A JP 2002053643 A JP2002053643 A JP 2002053643A
- Authority
- JP
- Japan
- Prior art keywords
- epoxy resin
- oxazine
- compound
- group
- condensed polycyclic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003822 epoxy resin Substances 0.000 title claims abstract description 66
- 229920000647 polyepoxide Polymers 0.000 title claims abstract description 66
- 239000003795 chemical substances by application Substances 0.000 title claims abstract description 34
- 239000004065 semiconductor Substances 0.000 title claims abstract description 23
- 239000000203 mixture Substances 0.000 title abstract description 20
- -1 polycyclic oxazine compound Chemical class 0.000 claims abstract description 80
- 235000013824 polyphenols Nutrition 0.000 claims abstract description 44
- 150000008442 polyphenolic compounds Chemical class 0.000 claims abstract description 36
- 238000005538 encapsulation Methods 0.000 claims abstract description 15
- 239000011256 inorganic filler Substances 0.000 claims abstract description 14
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 14
- BCHZICNRHXRCHY-UHFFFAOYSA-N 2h-oxazine Chemical group N1OC=CC=C1 BCHZICNRHXRCHY-UHFFFAOYSA-N 0.000 claims abstract description 11
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims abstract description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 12
- 239000011342 resin composition Substances 0.000 claims description 10
- 150000004893 oxazines Chemical class 0.000 claims description 9
- 125000000217 alkyl group Chemical group 0.000 claims description 8
- 125000003700 epoxy group Chemical group 0.000 claims description 7
- 150000001555 benzenes Chemical class 0.000 claims description 6
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical group C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 claims description 5
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 125000002950 monocyclic group Chemical group 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 125000005575 polycyclic aromatic hydrocarbon group Chemical group 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 2
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 claims description 2
- 125000001424 substituent group Chemical group 0.000 claims description 2
- 238000013329 compounding Methods 0.000 claims 1
- CMLFRMDBDNHMRA-UHFFFAOYSA-N 2h-1,2-benzoxazine Chemical compound C1=CC=C2C=CNOC2=C1 CMLFRMDBDNHMRA-UHFFFAOYSA-N 0.000 abstract description 22
- 229920005989 resin Polymers 0.000 abstract description 19
- 239000011347 resin Substances 0.000 abstract description 19
- 150000001875 compounds Chemical class 0.000 abstract description 8
- 238000000465 moulding Methods 0.000 abstract description 7
- 230000009477 glass transition Effects 0.000 abstract description 2
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 abstract 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 abstract 1
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 29
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 19
- 238000004519 manufacturing process Methods 0.000 description 18
- 239000003566 sealing material Substances 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 14
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 13
- 238000010521 absorption reaction Methods 0.000 description 12
- 230000000704 physical effect Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 239000005011 phenolic resin Substances 0.000 description 11
- 229910000679 solder Inorganic materials 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 229920000642 polymer Polymers 0.000 description 9
- 150000003141 primary amines Chemical class 0.000 description 9
- 238000007789 sealing Methods 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000002156 mixing Methods 0.000 description 7
- 229920003986 novolac Polymers 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 150000002989 phenols Chemical class 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 239000002585 base Substances 0.000 description 5
- 150000005130 benzoxazines Chemical class 0.000 description 5
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- USFPINLPPFWTJW-UHFFFAOYSA-N tetraphenylphosphonium Chemical compound C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 USFPINLPPFWTJW-UHFFFAOYSA-N 0.000 description 5
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 4
- QHPQWRBYOIRBIT-UHFFFAOYSA-N 4-tert-butylphenol Chemical compound CC(C)(C)C1=CC=C(O)C=C1 QHPQWRBYOIRBIT-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 4
- 239000012044 organic layer Substances 0.000 description 4
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- AYEKOFBPNLCAJY-UHFFFAOYSA-O thiamine pyrophosphate Chemical compound CC1=C(CCOP(O)(=O)OP(O)(O)=O)SC=[N+]1CC1=CN=C(C)N=C1N AYEKOFBPNLCAJY-UHFFFAOYSA-O 0.000 description 4
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 3
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 150000004982 aromatic amines Chemical class 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000008393 encapsulating agent Substances 0.000 description 3
- 150000002460 imidazoles Chemical class 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 229920002866 paraformaldehyde Polymers 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 239000000565 sealant Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 238000001721 transfer moulding Methods 0.000 description 3
- LLPKQRMDOFYSGZ-UHFFFAOYSA-N 2,5-dimethyl-1h-imidazole Chemical compound CC1=CN=C(C)N1 LLPKQRMDOFYSGZ-UHFFFAOYSA-N 0.000 description 2
- CQOZJDNCADWEKH-UHFFFAOYSA-N 2-[3,3-bis(2-hydroxyphenyl)propyl]phenol Chemical compound OC1=CC=CC=C1CCC(C=1C(=CC=CC=1)O)C1=CC=CC=C1O CQOZJDNCADWEKH-UHFFFAOYSA-N 0.000 description 2
- CDMGNVWZXRKJNS-UHFFFAOYSA-N 2-benzylphenol Chemical compound OC1=CC=CC=C1CC1=CC=CC=C1 CDMGNVWZXRKJNS-UHFFFAOYSA-N 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
- ZSBDGXGICLIJGD-UHFFFAOYSA-N 4-phenoxyphenol Chemical compound C1=CC(O)=CC=C1OC1=CC=CC=C1 ZSBDGXGICLIJGD-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- 229930040373 Paraformaldehyde Natural products 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 125000003277 amino group Chemical group 0.000 description 2
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229950011260 betanaphthol Drugs 0.000 description 2
- LLEMOWNGBBNAJR-UHFFFAOYSA-N biphenyl-2-ol Chemical compound OC1=CC=CC=C1C1=CC=CC=C1 LLEMOWNGBBNAJR-UHFFFAOYSA-N 0.000 description 2
- YXVFYQXJAXKLAK-UHFFFAOYSA-N biphenyl-4-ol Chemical compound C1=CC(O)=CC=C1C1=CC=CC=C1 YXVFYQXJAXKLAK-UHFFFAOYSA-N 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- 239000004203 carnauba wax Substances 0.000 description 2
- 235000013869 carnauba wax Nutrition 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000007822 coupling agent Substances 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- 239000012778 molding material Substances 0.000 description 2
- 150000002790 naphthalenes Chemical class 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 2
- 238000007142 ring opening reaction Methods 0.000 description 2
- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical compound OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical group C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 2
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- 239000001993 wax Substances 0.000 description 2
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 1
- BGJSXRVXTHVRSN-UHFFFAOYSA-N 1,3,5-trioxane Chemical compound C1OCOCO1 BGJSXRVXTHVRSN-UHFFFAOYSA-N 0.000 description 1
- MUVQKFGNPGZBII-UHFFFAOYSA-N 1-anthrol Chemical compound C1=CC=C2C=C3C(O)=CC=CC3=CC2=C1 MUVQKFGNPGZBII-UHFFFAOYSA-N 0.000 description 1
- RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 1
- GTBXZWADMKOZQJ-UHFFFAOYSA-N 1-phenanthrol Chemical compound C1=CC2=CC=CC=C2C2=C1C(O)=CC=C2 GTBXZWADMKOZQJ-UHFFFAOYSA-N 0.000 description 1
- GNBRZRRANUHHGT-UHFFFAOYSA-N 1-phenylcyclohexa-2,4-dien-1-ol Chemical compound C=1C=CC=CC=1C1(O)CC=CC=C1 GNBRZRRANUHHGT-UHFFFAOYSA-N 0.000 description 1
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- VADKRMSMGWJZCF-UHFFFAOYSA-N 2-bromophenol Chemical compound OC1=CC=CC=C1Br VADKRMSMGWJZCF-UHFFFAOYSA-N 0.000 description 1
- VZJKCHFANGIMED-UHFFFAOYSA-N 2-cyclohexyl-1,3-dihydrobenzo[f][1,3]benzoxazine Chemical compound C1CCCCC1N1CC2=C3C=CC=CC3=CC=C2OC1 VZJKCHFANGIMED-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- KDTZBYPBMTXCSO-UHFFFAOYSA-N 2-phenoxyphenol Chemical compound OC1=CC=CC=C1OC1=CC=CC=C1 KDTZBYPBMTXCSO-UHFFFAOYSA-N 0.000 description 1
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 1
- WJQOZHYUIDYNHM-UHFFFAOYSA-N 2-tert-Butylphenol Chemical compound CC(C)(C)C1=CC=CC=C1O WJQOZHYUIDYNHM-UHFFFAOYSA-N 0.000 description 1
- MNOJRWOWILAHAV-UHFFFAOYSA-N 3-bromophenol Chemical compound OC1=CC=CC(Br)=C1 MNOJRWOWILAHAV-UHFFFAOYSA-N 0.000 description 1
- ZZLHZRRZJWMQOL-UHFFFAOYSA-N 3-methyl-2,4-dihydro-1,3-benzoxazine Chemical compound C1=CC=C2CN(C)COC2=C1 ZZLHZRRZJWMQOL-UHFFFAOYSA-N 0.000 description 1
- HBUCPZGYBSEEHF-UHFFFAOYSA-N 3-phenoxyphenol Chemical compound OC1=CC=CC(OC=2C=CC=CC=2)=C1 HBUCPZGYBSEEHF-UHFFFAOYSA-N 0.000 description 1
- FMZPVXIKKGVLLV-UHFFFAOYSA-N 3-phenyl-2,4-dihydro-1,3-benzoxazine Chemical compound C1OC2=CC=CC=C2CN1C1=CC=CC=C1 FMZPVXIKKGVLLV-UHFFFAOYSA-N 0.000 description 1
- JQPGLJYFBDBJSQ-UHFFFAOYSA-N 3-phenyl-2,4-dihydrobenzo[h][1,3]benzoxazine Chemical compound C1OC(C2=CC=CC=C2C=C2)=C2CN1C1=CC=CC=C1 JQPGLJYFBDBJSQ-UHFFFAOYSA-N 0.000 description 1
- CYEKUDPFXBLGHH-UHFFFAOYSA-N 3-tert-Butylphenol Chemical compound CC(C)(C)C1=CC=CC(O)=C1 CYEKUDPFXBLGHH-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- HDPBBNNDDQOWPJ-UHFFFAOYSA-N 4-[1,2,2-tris(4-hydroxyphenyl)ethyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C=CC(O)=CC=1)C(C=1C=CC(O)=CC=1)C1=CC=C(O)C=C1 HDPBBNNDDQOWPJ-UHFFFAOYSA-N 0.000 description 1
- HJSPWKGEPDZNLK-UHFFFAOYSA-N 4-benzylphenol Chemical compound C1=CC(O)=CC=C1CC1=CC=CC=C1 HJSPWKGEPDZNLK-UHFFFAOYSA-N 0.000 description 1
- GZFGOTFRPZRKDS-UHFFFAOYSA-N 4-bromophenol Chemical compound OC1=CC=C(Br)C=C1 GZFGOTFRPZRKDS-UHFFFAOYSA-N 0.000 description 1
- RGHHSNMVTDWUBI-UHFFFAOYSA-N 4-hydroxybenzaldehyde Chemical compound OC1=CC=C(C=O)C=C1 RGHHSNMVTDWUBI-UHFFFAOYSA-N 0.000 description 1
- TYOXIFXYEIILLY-UHFFFAOYSA-N 5-methyl-2-phenyl-1h-imidazole Chemical compound N1C(C)=CN=C1C1=CC=CC=C1 TYOXIFXYEIILLY-UHFFFAOYSA-N 0.000 description 1
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 1
- FJJNDVRACQEKCJ-UHFFFAOYSA-N 6-tert-butyl-3-cyclohexyl-2,4-dihydro-1,3-benzoxazine Chemical compound C1C2=CC(C(C)(C)C)=CC=C2OCN1C1CCCCC1 FJJNDVRACQEKCJ-UHFFFAOYSA-N 0.000 description 1
- INQHAWUMPJGNOM-UHFFFAOYSA-N 6-tert-butyl-3-phenyl-2,4-dihydro-1,3-benzoxazine Chemical compound C1C2=CC(C(C)(C)C)=CC=C2OCN1C1=CC=CC=C1 INQHAWUMPJGNOM-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- CEVVPOQSIDXGHH-UHFFFAOYSA-N C1C2=C(C=CC(=C2)CC3=CC=CC=C3)OCN1C4=CC=CC5=CC=CC=C54 Chemical compound C1C2=C(C=CC(=C2)CC3=CC=CC=C3)OCN1C4=CC=CC5=CC=CC=C54 CEVVPOQSIDXGHH-UHFFFAOYSA-N 0.000 description 1
- UVFOAHXRMXQWSJ-UHFFFAOYSA-N C1C2=C(C=CC(=C2)CC3=CC=CC=C3)OCN1C4=CC=CC=C4 Chemical compound C1C2=C(C=CC(=C2)CC3=CC=CC=C3)OCN1C4=CC=CC=C4 UVFOAHXRMXQWSJ-UHFFFAOYSA-N 0.000 description 1
- PGFOGAYJPBJORY-UHFFFAOYSA-N CC1=CC2=C(C=C1)ONCC2 Chemical compound CC1=CC2=C(C=C1)ONCC2 PGFOGAYJPBJORY-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 101100340530 Homo sapiens MTIF3 gene Proteins 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- PJANXHGTPQOBST-VAWYXSNFSA-N Stilbene Natural products C=1C=CC=CC=1/C=C/C1=CC=CC=C1 PJANXHGTPQOBST-VAWYXSNFSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 102100039649 Translation initiation factor IF-3, mitochondrial Human genes 0.000 description 1
- PLQFLSNFGHYRJO-UHFFFAOYSA-J [O-]B([O-])[O-].[O-]C(=O)c1cccc2ccccc12.[O-]C(=O)c1cccc2ccccc12.[O-]C(=O)c1cccc2ccccc12.[O-]C(=O)c1cccc2ccccc12.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1 Chemical compound [O-]B([O-])[O-].[O-]C(=O)c1cccc2ccccc12.[O-]C(=O)c1cccc2ccccc12.[O-]C(=O)c1cccc2ccccc12.[O-]C(=O)c1cccc2ccccc12.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1.c1ccc(cc1)[P+](c1ccccc1)(c1ccccc1)c1ccccc1 PLQFLSNFGHYRJO-UHFFFAOYSA-J 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 150000001448 anilines Chemical class 0.000 description 1
- 150000001454 anthracenes Chemical class 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 150000003935 benzaldehydes Chemical class 0.000 description 1
- KXHPPCXNWTUNSB-UHFFFAOYSA-M benzyl(trimethyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC1=CC=CC=C1 KXHPPCXNWTUNSB-UHFFFAOYSA-M 0.000 description 1
- NDKBVBUGCNGSJJ-UHFFFAOYSA-M benzyltrimethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)CC1=CC=CC=C1 NDKBVBUGCNGSJJ-UHFFFAOYSA-M 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- UBXYXCRCOKCZIT-UHFFFAOYSA-N biphenyl-3-ol Chemical compound OC1=CC=CC(C=2C=CC=CC=2)=C1 UBXYXCRCOKCZIT-UHFFFAOYSA-N 0.000 description 1
- 150000001638 boron Chemical class 0.000 description 1
- NTXGQCSETZTARF-UHFFFAOYSA-N buta-1,3-diene;prop-2-enenitrile Chemical compound C=CC=C.C=CC#N NTXGQCSETZTARF-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000000378 calcium silicate Substances 0.000 description 1
- 229910052918 calcium silicate Inorganic materials 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010668 complexation reaction Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 150000001923 cyclic compounds Chemical group 0.000 description 1
- MIHINWMALJZIBX-UHFFFAOYSA-N cyclohexa-2,4-dien-1-ol Chemical compound OC1CC=CC=C1 MIHINWMALJZIBX-UHFFFAOYSA-N 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- DYDNPESBYVVLBO-UHFFFAOYSA-N formanilide Chemical compound O=CNC1=CC=CC=C1 DYDNPESBYVVLBO-UHFFFAOYSA-N 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229920006158 high molecular weight polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical compound C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 1
- 235000010292 orthophenyl phenol Nutrition 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 125000004585 polycyclic heterocycle group Chemical group 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- CASUWPDYGGAUQV-UHFFFAOYSA-M potassium;methanol;hydroxide Chemical compound [OH-].[K+].OC CASUWPDYGGAUQV-UHFFFAOYSA-M 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 235000010215 titanium dioxide Nutrition 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
(57)【要約】
【課題】 低粘度、低吸湿性、高ガラス転移
点で、成形硬化性が良好な半導体封止用組成物を得るた
めのエポキシ樹脂用硬化剤及びこれを用いた半導体封止
用組成物の提供。
【解決手段】 ベンゾオキサジン等、オキサジン
環と芳香族炭化水素環とが縮合した単官能縮合多環オキ
サジン化合物(A)及び、下記例示化合物のようなフェ
ノール置換トリシフェニルメタン構造を有するポリフェ
ノール類(B)からなる組成物をエポキシ樹脂用硬化剤
として使用し、これと、(C)エポキシ樹脂、(D)無
機フィラー及び(E)硬化促進剤を含有してなる組成物
を半導体封止用樹脂として用いる。
Ph(OH)-(-CH(Ph)OH-(Ph)OH)-)n-CH(Ph)OH-(Ph)OH
(Phはフェニレン等のベンゼン核残基、n≧0)PROBLEM TO BE SOLVED: To provide a curing agent for an epoxy resin for obtaining a composition for semiconductor encapsulation having a low viscosity, a low hygroscopicity, a high glass transition point and a good molding curability, and a semiconductor encapsulation using the same. Provision of a stopping composition. SOLUTION: A monofunctional condensed polycyclic oxazine compound (A) in which an oxazine ring and an aromatic hydrocarbon ring are condensed, such as benzoxazine, and polyphenols (B) having a phenol-substituted tricyphenylmethane structure such as the following exemplified compounds: ) As a curing agent for an epoxy resin, and a composition containing (C) an epoxy resin, (D) an inorganic filler, and (E) a curing accelerator as a resin for semiconductor encapsulation. Used. Ph (OH)-(-CH (Ph) OH- (Ph) OH)-) n -CH (Ph) OH- (Ph) OH (Ph is a benzene residue such as phenylene, n ≧ 0)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、低粘度、低吸湿
性、高Tg(ガラス転移点)で、硬化収縮率が小さく、
成形硬化性が良好な半導体封止用組成物を得るためのエ
ポキシ樹脂用硬化剤及びこれを用いた半導体封止用組成
物に関する。特に、高い半田耐熱性が必要な薄型表面実
装パッケージや、低ソリ、高流動性が必要なファインピ
ッチBGA、一括封止タイプのCSP(チップサイズパ
ッケージ)等の封止に適するエポキシ樹脂用硬化剤及び
これを用いた半導体封止用組成物に関する。TECHNICAL FIELD The present invention relates to a low-viscosity, low-hygroscopic, high Tg (glass transition point), low cure shrinkage,
The present invention relates to a curing agent for an epoxy resin for obtaining a semiconductor sealing composition having good molding curability, and a semiconductor sealing composition using the same. In particular, epoxy resin curing agent suitable for encapsulation of thin surface mount packages that require high solder heat resistance, fine pitch BGA that requires low warpage and high fluidity, and CSP (chip size package) of package encapsulation. And a semiconductor encapsulating composition using the same.
【0002】[0002]
【従来の技術】半導体の封止材料として、近年エポキシ
樹脂を用いる樹脂封止が広く用いられている。特にエポ
キシ樹脂とフェノールノボラックを硬化剤として用いた
エポキシ樹脂成形材料が多く用いられている。2. Description of the Related Art In recent years, resin sealing using an epoxy resin has been widely used as a semiconductor sealing material. Particularly, an epoxy resin molding material using an epoxy resin and phenol novolak as a curing agent is often used.
【0003】しかし最近、電子部品の小型化やLSIの
高集積化、半導体素子の大型化に伴ない、高密度実装、
表面実装に適したTQFP(シン・クワッド・フラット
・パッケージ)などに移行しつつあるが、TQFPなど
のパッケージは更に薄型化、多ピン化になり、表面実装
時の半田耐熱性がより強く求められている。However, recently, as electronic components have become smaller, LSIs have become more highly integrated, and semiconductor devices have become larger, high-density packaging has been required.
TQFP (Thin Quad Flat Package), which is suitable for surface mounting, is being shifted to a thinner package and more pins, and solder heat resistance during surface mounting is more demanding. ing.
【0004】また、環境問題から、鉛フリー半田が使用
されるのに伴い、実装温度が上昇するため、封止樹脂に
はより優れた半田耐熱性が要求される。更にパッケージ
の構造も多種多様になり、多ピン化に伴い、従来のTQ
FP以外に、BGA(ボール・グリッド・アレイ)タイ
プも多くなってきた。[0004] Also, due to environmental problems, the mounting temperature rises with the use of lead-free solder, so that the sealing resin is required to have better solder heat resistance. In addition, the package structure is also diverse, and with the increase in the number of pins, the conventional TQ
In addition to FPs, BGA (ball grid array) types have also increased.
【0005】BGAも小型化、薄型化の傾向にあり、今
後ボール間隙が0.8mm以下のファインピッチBGAな
どのCSP(チップサイズパッケージ)が増えてくるこ
とが予想され、封止方法もMAP(マトリックス・アレ
イ・パッケージ)にみられるように、一度に多くのチッ
プを封止する方法が取られるようになり、封止材には低
ソリと、低粘度、高流動性、成形性が要求されている。
このような封止剤に求められる特性に対し、ベースレジ
ン(エポキシ樹脂及び硬化剤)の面からは下記の如き性
質が要求される。BGAs are also becoming smaller and thinner, and it is expected that CSPs (chip size packages) such as fine pitch BGAs with a ball gap of 0.8 mm or less will increase in the future, and the sealing method will be MAP (matrix).・ As seen in arrays and packages, the method of sealing many chips at once has been adopted, and low warpage, low viscosity, high fluidity, and moldability are required for sealing materials. I have.
In contrast to the properties required for such a sealant, the following properties are required from the viewpoint of the base resin (epoxy resin and curing agent).
【0006】(1)半田耐熱性→低吸水性、低粘度(無
機フィラーの多量配合可能)、高接着性、高Tg (2)高流動性→ 低粘度、硬化反応の熱潜在性 (3)低ソリ性→ 成型脱型時の硬度が高いこと(速硬
化性)、熱膨張/収縮が小さいこと、硬化収縮の小さい
こと、低粘度(無機フィラーの多量配合が可能となるた
め、収縮膨張を小さく出来る)、高Tg(低熱膨張のガ
ラス領域が高温まで及ぶ) (4)成形性 → 硬化速度が高い、硬化速度や流動性
の経時劣化が少ないこと。(1) Solder heat resistance → low water absorption, low viscosity (incorporation of a large amount of inorganic filler), high adhesion, high Tg (2) High fluidity → low viscosity, heat potential of curing reaction (3) Low warpage → High hardness during molding and demolding (rapid curing), low thermal expansion / shrinkage, low curing shrinkage, low viscosity (shrinkage expansion is possible because a large amount of inorganic fillers can be incorporated. (Temperature can be reduced), high Tg (the glass region with low thermal expansion extends to high temperatures) (4) Formability → High curing speed, little deterioration of curing speed and fluidity over time.
【0007】[0007]
【発明が解決しようとする課題】しかし、上述のベース
レジンへの要求特性は相反するものがあり、これらを同
時に満足できるものは見つかっていないのが現状であ
る。例えば、低吸水性、低粘度にするために官能基の数
を減らし、分子量を小さくすると、脱型時の硬度や硬化
速度、Tgが下がる等の問題点がある。一方、Tgや硬
化性を上げるため多官能にすると、吸水性が増加し、ま
た粘度も高くなる。また封止用樹脂としてエポキシ樹脂
以外にも、ポリマレイミド樹脂などの使用も検討されて
いるが、靭性や接着性およびコスト面などで欠点があ
る。However, the above-mentioned required properties of the base resin are contradictory, and at present, none of them can satisfy these properties at the same time. For example, if the number of functional groups is reduced and the molecular weight is reduced in order to obtain low water absorption and low viscosity, there are problems such as a decrease in hardness, curing speed and Tg at the time of demolding. On the other hand, when polyfunctional to increase Tg and curability, water absorption increases and viscosity also increases. In addition to the use of epoxy resin as a sealing resin, the use of a polymaleimide resin or the like has been studied, but has drawbacks in terms of toughness, adhesion, cost, and the like.
【0008】本発明の発明者らはこれらの問題を解決
し、半田耐熱性と成形性に優れ、高流動性と低ソリを付
与するする方法として、ベンゾオキサジン等の縮合多環
オキサジン化合物に注目し、これと、特定のポリフェノ
ール類を必須成分としてエポキシ樹脂の硬化剤に用いる
ことを検討した。The inventors of the present invention have focused on condensed polycyclic oxazine compounds such as benzoxazine as a method for solving these problems and providing excellent solder heat resistance and moldability, high fluidity and low warpage. However, the use of this and a specific polyphenol as an essential component in a curing agent for an epoxy resin was studied.
【0009】ベンゼン核とオキサジン核との複素多環式
化合物であるベンゾオキサジン化合物は既に公知である
(例えば、特開昭49−47387)。またこのような
ベンゾオキサジン化合物のうち、熱硬化性である多官能
ベンゾオキサジン樹脂に関しては、難燃性や低吸水性を
生かして主にプリント基板への応用開発が提案されてき
たが、最近になってこれを半導体封止用組成物に用いる
ことも提案されている(特開平6−322121、特開
平11−140278、特開平11−140278)。Benzoxazine compounds, which are heteropolycyclic compounds of a benzene nucleus and an oxazine nucleus, are already known (for example, JP-A-49-47387). Of these benzoxazine compounds, thermosetting polyfunctional benzoxazine resins have been proposed for application mainly to printed circuit boards, taking advantage of flame retardancy and low water absorption. It has also been proposed to use this as a composition for semiconductor encapsulation (JP-A-6-322121, JP-A-11-140278, JP-A-11-140278).
【0010】しかしながら、これら上記提案において
は、いずれも1分子中に複数個のオキサジン環を有する
多官能のベンゾオキサジンが用いられ、それ自身の熱硬
化物をベースレジンとして用いるものである。このよう
な多官能のベンゾオキサジンは、粘度が高く、封止材製
造時にそれ自身の反応により粘度が更に上昇するという
点で大きな欠点を有している。また硬化性も悪いため、
本発明の目的に適合する高性能の封止材料用途には全く
不充分である。However, in these proposals, a multifunctional benzoxazine having a plurality of oxazine rings in one molecule is used, and a thermosetting product of itself is used as a base resin. Such a polyfunctional benzoxazine has a large drawback in that the viscosity is high and the viscosity is further increased by a reaction of itself during the production of the sealing material. Also, because the curability is poor,
It is completely unsatisfactory for high performance encapsulant applications that meet the objectives of the present invention.
【0011】またこれらの特許出願において多官能のベ
ンゾオキサジン化合物を硬化性などの向上を目的として
フェノール樹脂やエポキシ樹脂と併用した例も記載され
ているが、この場合でもあくまで多官能性ベンゾオキサ
ジンの3次元硬化物がベースレジンであり、エポキシ樹
脂やフェノール樹脂は混合添加物又は共重合変性剤とし
て位置付けているため、配合比率もベンゾオキサジンの
比率が高く、エポキシ基に対するOH基比率を適正に保
つために、(ベンゾオキサジン+フェノール樹脂)/エ
ポキシ樹脂比率をコントロールするという考えで配合さ
れたものではないので、高流動性と速硬化性の両立が必
要な半導体封止材を得るという本発明の課題に対しては
全く不充分であり、本発明の目指す用途に用いても実用
性は期待できない。[0011] In these patent applications, there is also described an example in which a polyfunctional benzoxazine compound is used in combination with a phenol resin or an epoxy resin for the purpose of improving curability and the like. Since the three-dimensional cured product is a base resin, and the epoxy resin and phenol resin are positioned as mixed additives or copolymer modifiers, the blending ratio is also high with the ratio of benzoxazine, and the ratio of OH groups to epoxy groups is properly maintained. For this reason, it is not blended with the idea of controlling the ratio of (benzoxazine + phenolic resin) / epoxy resin, so that a semiconductor encapsulant of the present invention that requires both high fluidity and rapid curability is required. It is completely inadequate for the task, and practicality cannot be expected even if it is used for the purpose of the present invention.
【0012】またオキサジン環が1個のオキサジン化合
物、例えば6−メチルジヒドロベンゾオキサジンを中間
体として、フェノール化合物を合成し、これをエポキシ
樹脂等と組み合わせて半導体封止用途等に用いることも
提案されているが(特開平9‐59333)、この方法
においては、オキサジン化合物を一旦開環重合し、高分
子量(フェノール化合物の構造単位の数が少なくとも
3)の多官能フェノール樹脂を製造し、これをエポキシ
樹脂の硬化剤に用いるものである。このため硬化剤自体
が高粘度であり、高流動性が必要な半導体封止材用途に
は適さない。It has also been proposed to synthesize a phenol compound using an oxazine compound having one oxazine ring, for example, 6-methyldihydrobenzoxazine as an intermediate, and to use the phenol compound in combination with an epoxy resin or the like for semiconductor encapsulation applications. However, in this method, a ring-opening polymerization of an oxazine compound is performed once to produce a polyfunctional phenol resin having a high molecular weight (the number of structural units of the phenol compound is at least 3). It is used as a curing agent for epoxy resin. For this reason, the curing agent itself has a high viscosity and is not suitable for semiconductor encapsulant applications that require high fluidity.
【0013】[0013]
【課題を解決するための手段】本発明の発明者らは、そ
れ自身では3次元ネットワークを作らず熱硬化性を有さ
ない単官能のタイプの縮合多環オキサジン化合物を用
い、これと特定のポリフェノール類を必須成分とする硬
化剤をエポキシ樹脂の硬化剤に用いることによりベース
樹脂に求められる前記特性を同時に満足し、半田耐熱性
と成形性に優れ、高流動性と低ソリを有する封止用組成
物が得られることを見出し、本発明に到達した。Means for Solving the Problems The inventors of the present invention use a monofunctional type condensed polycyclic oxazine compound which does not itself form a three-dimensional network and has no thermosetting property, By using a curing agent containing polyphenols as an essential component as a curing agent for an epoxy resin, it simultaneously satisfies the above properties required for a base resin, has excellent solder heat resistance and moldability, and has high fluidity and low warpage. It was found that a composition for use was obtained, and the present invention was reached.
【0014】即ち本発明の単官能縮合多環オキサジン化
合物は、低分子量であり、またOH基の水素結合もない
ので低粘度であり、そのため、これが配合された封止用
組成物には高流動性/低粘度が付与される。そしてこれ
を特定のポリフェノール類と組み合わせれば、単官能縮
合多環ベンゾオキサジン化合物は低粘度であるため、金
型内に容易に充填され、後成形硬化時にはポリフェノー
ル類と、例えば式(6)の如き反応が速やかに起こり、O
H基の数が増加した高分子化合物が生成し、これが硬化
性、脱型性の優れたエポキシ樹脂の硬化剤として働き、
高Tgで低吸水性の硬化物が得られることが判明した。
しかも本発明の樹脂組成物は、成形硬化特性の経時劣化
も防止できる等、従来のオキサジン化合物について知ら
れている知見からは予測できない驚くべき効果を奏する
ことがわかった。That is, the monofunctional condensed polycyclic oxazine compound of the present invention has a low molecular weight and a low viscosity because there is no hydrogen bond of an OH group. Properties / low viscosity. If this is combined with a specific polyphenol, the monofunctional condensed polycyclic benzoxazine compound has a low viscosity, so that it is easily filled in a mold, and after the post-molding curing, the polyphenol and, for example, the formula (6) Reaction occurs quickly, and O
A polymer compound having an increased number of H groups is produced, which acts as a curing agent for an epoxy resin having excellent curability and demoldability,
It was found that a cured product having a high Tg and a low water absorption was obtained.
In addition, it was found that the resin composition of the present invention exhibited surprising effects that could not be predicted from the known knowledge of conventional oxazine compounds, such as the ability to prevent the deterioration of the molding and curing characteristics over time.
【0015】[0015]
【化6】 (式中R1、R2およびnは式(1)(2)における定義と同
じ。)Embedded image (Wherein R 1 , R 2 and n are the same as defined in formulas (1) and (2))
【0016】本発明は式(1)で表される単官能縮合多環
オキサジン化合物(A)及び式(2)及び(3)から選ばれる
ポリフェノール類(B)とからなるエポキシ樹脂用硬化
剤である。The present invention relates to a curing agent for an epoxy resin comprising a monofunctional condensed polycyclic oxazine compound represented by the formula (1) (A) and a polyphenol (B) selected from the formulas (2) and (3). is there.
【0017】[0017]
【化7】 (式中[Aro]は隣接する炭素原子をオキサジン核と共
有して縮合環を形成する単環又は縮合多環芳香族炭化水
素環を表し、R1はフェニル基、炭素数1〜4のアルキ
ル基、またはシクロヘキシル基であり、R2は炭素数1
〜4のアルキル基、フェニル基、ベンジル基又はフェノ
キシ基であり、m≧0である。)Embedded image (Where [Aro] represents a monocyclic or condensed polycyclic aromatic hydrocarbon ring which forms a condensed ring by sharing an adjacent carbon atom with the oxazine nucleus, and R 1 is a phenyl group, an alkyl having 1 to 4 carbons. A cyclohexyl group, and R 2 has 1 carbon atom
To 4 alkyl groups, phenyl groups, benzyl groups or phenoxy groups, and m ≧ 0. )
【0018】[0018]
【化8】 (式中n≧0、R3は水素または炭素数1〜3のアルキ
ル基であり、R4、R5、R6はそれぞれ同一または相異
なるアルキル基、フェニル基、またはベンジル基であ
り、pは0または1〜3の整数、q、r、sは0または
1〜4の整数である。またp,q,r,sが2以上の場
合、一つのベンゼン核に置換する複数の置換基は互いに
同一でも異なるものであってもよい。)Embedded image (Where n ≧ 0, R 3 is hydrogen or an alkyl group having 1 to 3 carbon atoms, and R 4 , R 5 , and R 6 are the same or different alkyl groups, phenyl groups, or benzyl groups; Is an integer of 0 or 1 to 3, and q, r, and s are integers of 0 or 1 to 4. When p, q, r, and s are 2 or more, a plurality of substituents substituted on one benzene nucleus May be the same or different from each other.)
【0019】[0019]
【化9】 (式中n、R3、R4、R5、R6及びp、q、r、sは式
(2)における定義と同一であり、R7は直接結合、−
CH2−、−C(CH3)2−、−O−、−S−、または−
SO2−を表す。)Embedded image (Wherein n, R 3 , R 4 , R 5 , R 6 and p, q, r, s are the same as defined in formula (2), R 7 is a direct bond,-
CH 2 —, —C (CH 3 ) 2 —, —O—, —S—, or —
Represents SO 2 —. )
【0020】また本発明は上記(A)と(B)からなる
硬化剤と、(C)エポキシ樹脂、(D)無機フィラー及
び(E)硬化促進剤を含有してなる半導体封止用樹脂組
成物である。The present invention also provides a resin composition for semiconductor encapsulation comprising the above-mentioned curing agent comprising (A) and (B), (C) an epoxy resin, (D) an inorganic filler and (E) a curing accelerator. Things.
【0021】[0021]
【発明の実施の形態】(単官能縮合多環オキサジン化合
物(A))本発明で用いられる単官能縮合多環オキサジ
ン化合物(A)(以下、これを「単官能オキサジン化合
物」、あるいは「オキサジン化合物」と呼ぶことがあ
る。)は、式(1)で示され、オキサジン核と、ベンゼン核
あるいはナフタレン核、アントラセン核のような単環又
は縮合多環芳香族炭化水素核とが縮合した複素多環式化
合物である。このようなオキサジン化合物の例として、
オキサジン核とベンゼン核が縮合した式(7)のベンゾオ
キサジン化合物やナフタレン核が縮合した式(8)のナフ
トオキサジン化合物等を例示することができる。より具
体的には、式(7)のベンゾオキサジン化合物の例とし
て、3-フェニル-3,4-ジヒドロ-2H-ベンゾ[e][1,3]オ
キサジン、3-メチル-3,4-ジヒドロ-2H-ベンゾ[e][1,
3]オキサジン、6-ターシャリーブチル-3-フェニル-3,4-
ジヒドロ-2H-ベンゾ[e][1,3]オキサジン、6-ターシャ
リーブチル-3-シクロヘキシル-3,4-ジヒドロ-2H-ベンゾ
[e][1,3]オキサジン、3-6-ジフェニル-3,4-ジヒドロ-
2H-ベンゾ[e][1,3]オキサジン、6-ベンジル-3-ナフチ
ル-3,4-ジヒドロ-2H-ベンゾ[e][1,3]オキサジン、6-
ベンジル-3-フェニル-3,4-ジヒドロ-2H-ベンゾ[e][1,
3]オキサジン等、式(8)のナフトオキサジン化合物の例
として、3-フェニル-3,4-ジヒドロ-2H-ナフト[2,1-e]
[1,3]オキサジン、2-シクロヘキシル-2,3-ジヒドロ-1H
-ナフト[1,2-e][1,3]オキサジン等が挙げられる。こ
れらの縮合多環オキサジン化合物は、分子内に1個のオ
キサジン核を有し、オキサジン核内に原料の1価フェノ
ールに由来する1個の-O-結合があるが、その他にはフ
ェノール性水酸基を持たない単官能性化合物である。DESCRIPTION OF THE PREFERRED EMBODIMENTS (Monofunctional condensed polycyclic oxazine compound (A)) The monofunctional condensed polycyclic oxazine compound (A) used in the present invention (hereinafter referred to as "monofunctional oxazine compound" or "oxazine compound") ) Is represented by the formula (1), and is a heteropoly group obtained by condensing an oxazine nucleus with a monocyclic or condensed polycyclic aromatic hydrocarbon nucleus such as a benzene nucleus or a naphthalene nucleus or an anthracene nucleus. It is a cyclic compound. As an example of such an oxazine compound,
Examples include a benzoxazine compound of the formula (7) in which an oxazine nucleus and a benzene nucleus are condensed, and a naphthoxazine compound of the formula (8) in which a naphthalene nucleus is condensed. More specifically, examples of the benzoxazine compound of the formula (7) include 3-phenyl-3,4-dihydro-2H-benzo [e] [1,3] oxazine and 3-methyl-3,4-dihydro -2H-benzo [e] [1,
3] Oxazine, 6-tert-butyl-3-phenyl-3,4-
Dihydro-2H-benzo [e] [1,3] oxazine, 6-tert-butyl-3-cyclohexyl-3,4-dihydro-2H-benzo [e] [1,3] oxazine, 3-6-diphenyl- 3,4-dihydro-
2H-benzo [e] [1,3] oxazine, 6-benzyl-3-naphthyl-3,4-dihydro-2H-benzo [e] [1,3] oxazine, 6-
Benzyl-3-phenyl-3,4-dihydro-2H-benzo [e] [1,
3] Oxazine and the like, as an example of the naphthoxazine compound of the formula (8), 3-phenyl-3,4-dihydro-2H-naphtho [2,1-e]
[1,3] oxazine, 2-cyclohexyl-2,3-dihydro-1H
-Naphtho [1,2-e] [1,3] oxazine and the like. These condensed polycyclic oxazine compounds have one oxazine nucleus in the molecule and have one —O— bond derived from the raw material monohydric phenol in the oxazine nucleus, but other phenolic hydroxyl groups Is a monofunctional compound having no.
【0022】[0022]
【化10】 Embedded image
【0023】[0023]
【化11】 (式(7)及び式(8)におけるR1、R2及びmは式(1)での定
義と同じ)Embedded image (R 1 , R 2 and m in the formulas (7) and (8) are the same as defined in the formula (1))
【0024】これまで封止材としての使用が提案されて
いた多官能型のオキサジン樹脂は、単官能のモノオキサ
ジン化合物に比べ溶融粘度が高い上、封止用樹脂に用い
た場合、混練中の反応により、封止材料としての粘度が
さらに上昇し、高流動性、低粘度という点については、
大きな欠点を有している。また、これらの多官能型のオ
キサジン樹脂からなる組成物では、硬化性がまだ不十分
であり、脱型性が悪くなったり、BGAパッケージのソ
リが大きくなったりして、実用性があるとは言い難い。The polyfunctional oxazine resin, which has been proposed to be used as a sealing material, has a higher melt viscosity than a monofunctional monooxazine compound. Due to the reaction, the viscosity as a sealing material further increases, high fluidity, regarding low viscosity,
It has major drawbacks. In addition, the composition comprising these polyfunctional oxazine resins has insufficient curability, and is difficult to remove, or has a large warpage of the BGA package, and is not practical. Hard to say.
【0025】(単官能縮合多環オキサジン化合物の合
成)本発明において用いる単官能オキサジン化合物は、
フェノール性水酸基を1分子中に1個有し、水酸基に対
してオルト位の少なくとも1つが置換されていない単環
又は縮合多環フェノール類(a),ホルムアルデヒド(b)及
びアミノ基を1分子中に1個有する1級アミン(c)か
ら、公知の方法で合成することができ、上記フェノール
類(a)及び1級アミン(c)の選択により、式(1)のR1、R
2及びnの異なる各種のオキサジン化合物を得ることが
できる。(Synthesis of Monofunctional Condensed Polycyclic Oxazine Compound) The monofunctional oxazine compound used in the present invention comprises:
Monocyclic or condensed polycyclic phenols (a), formaldehyde (b), and amino groups having one phenolic hydroxyl group in one molecule and at least one ortho position to the hydroxyl group are not substituted from primary amine (c) to one closed in, can be synthesized by a known method, by the selection of the phenol (a) and primary amine (c), R 1, R of formula (1)
Various oxazine compounds having different 2 and n can be obtained.
【0026】原料のフェノール類(a)としては、フェノ
ール、p-クレゾール、m-クレゾール、o-クレゾー
ル、p-ターシャリ−ブチルフェノール、m-ターシャリ
−ブチルフェノール、o-ターシャリ−ブチルフェノー
ル、p-フェニルフェノール、m-フェニルフェノール、
o-フェニルフェノール、p-ベンジルフェノール、m-
ベンジルフェノール、o-ベンジルフェノール、p-フェ
ノキシフェノール、m-フェノキシフェノール、o-フェ
ノキシフェノール、p-ブロモフェノール、m-ブロモフ
ェノール、o-ブロモフェノールなどの一置換フェノー
ル、1−ナフトール、2−ナフトール及びその置換体、
ヒドロキシアントラセンやヒドロキシフェナントレン及
びその置換体などのフェノール性水酸基を一分子中に一
個有する縮合多環フェノール類が用いられるが、特にフ
ェノール、p-クレゾール、p-ターシャリ−ブチルフェ
ノール、pフェニルフェノール、1−ナフトール、2−
ナフトールが好ましい。The phenols (a) as raw materials include phenol, p-cresol, m-cresol, o-cresol, p-tert-butylphenol, m-tert-butylphenol, o-tert-butylphenol, p-phenylphenol, m-phenylphenol,
o-phenylphenol, p-benzylphenol, m-
Monosubstituted phenols such as benzylphenol, o-benzylphenol, p-phenoxyphenol, m-phenoxyphenol, o-phenoxyphenol, p-bromophenol, m-bromophenol, o-bromophenol, 1-naphthol, 2-naphthol And its substitutes,
Condensed polycyclic phenols having one phenolic hydroxyl group in one molecule such as hydroxyanthracene, hydroxyphenanthrene and a substituted product thereof are used. In particular, phenol, p-cresol, p-tert-butylphenol, p-phenylphenol, 1-phenylphenol, Naphthol, 2-
Naphthol is preferred.
【0027】フェノールノボラック樹脂や各種ビスフェ
ノール類、トリスフェノール類、テトラフェノール類な
どのポリフェノール類を原料として用いたベンゾオキサ
ジンは、粘度が相対的に高く、また複合化の混練中に反
応し、増粘しやすいため、使用できない。Benzoxazine using phenol novolak resin or polyphenols such as various bisphenols, trisphenols and tetraphenols as raw materials has a relatively high viscosity, and reacts during kneading for complexation to increase the viscosity. Not easy to use.
【0028】ホルムアルデヒドは、その水溶液であるホ
ルマリンや、重合体のパラホルム、トリオキサンなどが
用いられる。As formaldehyde, formalin which is an aqueous solution thereof, polymer paraform, trioxane and the like are used.
【0029】アミノ基を1分子中に1個有する1級アミ
ン(b)としては、アニリン、置換アニリン、ナフチルア
ミンなどの芳香族アミン、シクロヘキシルアミン、メチ
ルアミンなどの脂肪族アミンが用いられるが、芳香族ア
ミンを用いて得られたオキサジン化合物は脂肪族アミン
を用いた場合に比べ、もう一方の硬化剤成分であるポリ
フェノールと混練中に反応しにくいため、低粘度化には
有利で好ましい。金型内での硬化性とのバランスで、芳
香族アミンに、脂肪族アミンを併用することも可能であ
る。Examples of the primary amine (b) having one amino group in one molecule include aromatic amines such as aniline, substituted aniline and naphthylamine, and aliphatic amines such as cyclohexylamine and methylamine. An oxazine compound obtained by using an aromatic amine is less advantageous in reacting with the other curing agent component, polyphenol, during kneading than when an aliphatic amine is used, and is therefore advantageous and preferable for lowering the viscosity. It is also possible to use an aliphatic amine in combination with an aromatic amine in balance with the curability in the mold.
【0030】単官能縮合多環オキサジン化合物(A)は
上記諸原料から公知の方法(例えば特開昭49−473
87)により合成することができる。即ち、ジオキサ
ン、トルエン、メタノール、エチレングリコールジメチ
ルエーテルなどの適当な溶剤にフェノール類を溶解さ
せ、またはフェノール類を加熱により溶融させ、1級ア
ミンとホルムアルデヒドをその中に添加する。または、
フェノール類と1級アミンを上記溶剤に溶解あるいは加
熱により溶融させ、ホルムアルデヒドをその中に添加す
る。または、フェノール類を溶剤に溶解あるいは加熱に
より溶融させ、1級アミンとホルムアルデヒドを予め反
応させたものをその中に添加するなど、任意の方法が使
用できる。通常は無触媒で反応を進行させるが、触媒と
してアルカリ金属、アルカリ土類金属の水酸化物、3級
アミンなどを用いることもできる。原料の仕込み比は通
常フェノール類/1級アミン/ホルムアルデヒド=1/
1/2(モル比)とし、反応条件は通常、温度60〜1
20℃で2〜24時間程度反応させる。反応生成物であ
る有機層と、反応で生成した縮合水とを分離させ、又は
蒸留により縮合水を系外へ除去し、有機層を取り出すこ
とで目的とするオキサジン化合物が得られる。または沈
殿したオキサジン化合物を濾過などで分離し取り出す。The monofunctional condensed polycyclic oxazine compound (A) can be prepared from the above raw materials by a known method (for example, JP-A-49-473).
87). That is, phenols are dissolved in a suitable solvent such as dioxane, toluene, methanol, ethylene glycol dimethyl ether, or the phenols are melted by heating, and a primary amine and formaldehyde are added thereto. Or
The phenol and the primary amine are dissolved in the above solvent or melted by heating, and formaldehyde is added therein. Alternatively, any method can be used, such as dissolving phenols in a solvent or melting by heating, and adding a preliminarily reacted primary amine and formaldehyde thereto. Usually, the reaction proceeds without a catalyst, but a hydroxide of an alkali metal or an alkaline earth metal, a tertiary amine, or the like can be used as a catalyst. The feed ratio of the raw materials is usually phenols / primary amine / formaldehyde = 1 /
The reaction condition is usually a temperature of 60 to 1 (molar ratio).
The reaction is carried out at 20 ° C. for about 2 to 24 hours. The desired oxazine compound can be obtained by separating the organic layer, which is a reaction product, from the condensed water generated by the reaction, or removing the condensed water out of the system by distillation, and taking out the organic layer. Alternatively, the precipitated oxazine compound is separated and removed by filtration or the like.
【0031】上記反応で得られたオキサジン化合物には
通常不純物として、オキサジン化合物の開環により生成
するオリゴマー、例えば下記式(9)の構造を繰り返し単
位とするポリヒドロキシ化合物が含まれるが、この開環
オリゴマーが多いと、高粘度となるので、本発明の半導
体封止用組成物として用いる縮合多環オキサジン化合物
は、上記不純物が50%未満であることが望ましい。オ
キサジン化合物合成の反応条件、例えば反応温度や反応
溶媒の選択により上記開環オリゴマーの生成を抑制する
ことができる。The oxazine compound obtained by the above reaction usually contains, as impurities, an oligomer formed by ring-opening of the oxazine compound, for example, a polyhydroxy compound having a structure represented by the following formula (9) as a repeating unit. If the number of ring oligomers is large, the viscosity will be high. Therefore, it is desirable that the condensed polycyclic oxazine compound used as the composition for semiconductor encapsulation of the present invention has less than 50% of the above impurities. The formation of the above-mentioned ring-opened oligomer can be suppressed by reaction conditions for the synthesis of the oxazine compound, for example, selection of the reaction temperature and the reaction solvent.
【0032】[0032]
【化12】 Embedded image
【0033】その他の不純物として未反応のモノヒドロ
キシ化合物2%以下、1級アミン2%以下、1級アミン
とホルムアルデヒドのみの反応生成物10%以下である
ことが望ましい。As another impurity, it is desirable that the unreacted monohydroxy compound is 2% or less, the primary amine is 2% or less, and the reaction product of only the primary amine and formaldehyde is 10% or less.
【0034】必要に応じてオキサジン化合物をアルカリ
金属の水酸化物の水溶液及び純水で繰り返し洗浄した
後、残存する水と溶媒を減圧下で乾燥除去するなどの方
法で、上記のオリゴマーや不純物を低減させることが出
来る。If necessary, the oxazine compound is washed repeatedly with an aqueous solution of an alkali metal hydroxide and pure water, and then the remaining oligomer and impurities are removed by drying under reduced pressure. Can be reduced.
【0035】(ポリフェノール類(B))エポキシ樹脂
の硬化剤として用いられるポリフェノール類(B)は、
式(2)で示されるであるトリフェニルメタン構造の側鎖
にフェノールを有するフェノール樹脂または、式(3)で
示される側鎖にベンゼン核を介してフェノールが結合し
たトリフェニルメタン構造のフェノール樹脂であり、こ
れらを単独もしくは併用して使用する。式(2)におい
て、n≧0であり、通常分子量の異なる化合物の混合物
として得られるものがそのまま使用されるが、好ましく
は平均値としてnは2以下が好ましい。nがこの範囲よ
り大きい高分子量のフェノール樹脂になると粘度が上昇
し、流動性を損なうため好ましくない。(Polyphenols (B)) The polyphenols (B) used as curing agents for epoxy resins are as follows:
A phenol resin having phenol in the side chain of the triphenylmethane structure represented by the formula (2) or a phenol resin having a triphenylmethane structure in which phenol is bonded to the side chain represented by the formula (3) via a benzene nucleus These are used alone or in combination. In the formula (2), n ≧ 0 and usually obtained as a mixture of compounds having different molecular weights are used as they are, but n is preferably 2 or less as an average value. If n is a high molecular weight phenolic resin larger than this range, the viscosity increases and the fluidity is impaired, which is not preferable.
【0036】上記ポリフェノール類のうち式(2)のポリ
フェノールは、フェノールとサリチルアルデヒド等のヒ
ドロキシベンズアルデヒドとの反応により、また式(3)
のポリフェノールは、フェノールとフェノールが結合し
たベンズアルデヒド類との反応により得られる。Of the above polyphenols, the polyphenol of the formula (2) is obtained by the reaction of phenol with hydroxybenzaldehyde such as salicylaldehyde, and the compound of the formula (3)
Is obtained by the reaction of phenol with benzaldehydes to which phenol is bound.
【0037】ポリフェノール類として、式(2)〜(3)で示
されるポリフェノール類(B)の他に、フェノールアラ
ルキル樹脂、フェノールノボラック樹脂、クレゾールノ
ボラック樹脂、ビスフェノールA、ビスフェノールF、
ポリパラビニルフェノール、デカリン変性フェノール樹
脂、などのフェノール樹脂を本発明の樹脂組成物の特性
に影響が出ない範囲で併用することもできる。As the polyphenols, in addition to the polyphenols (B) represented by the formulas (2) to (3), phenol aralkyl resins, phenol novolak resins, cresol novolak resins, bisphenol A, bisphenol F,
A phenol resin such as polyparavinylphenol or decalin-modified phenol resin can be used in combination as long as the properties of the resin composition of the present invention are not affected.
【0038】(エポキシ樹脂(C))本発明の硬化剤に
より硬化させるエポキシ樹脂(C)としては、1分子中
に2個以上のエポキシ基を持つ任意のエポキシ樹脂が使
用できる。例えば、トリフェノール型エポキシ樹脂、テ
トラフェノールエタン型エポキシ樹脂、ビフェニル型エ
ポキシ樹脂、フェノールノボラック型エポキシ樹脂、オ
ルソクレゾールノボラック型エポキシ樹脂、ジヒドロキ
シナフタリンノボラック型エポキシ樹脂、ジシクロペン
タジエン型エポキシ樹脂、スチルベン型エポキシ樹脂、
ビスフェノールA又はF型エポキシ樹脂、ハロゲン化エ
ポキシ樹脂、ハイドロキノン型エポキシ樹脂などを挙げ
ることができるが、特に式(4)または式(5)で示されるグ
リシジルエーテル基置換フェニル基を有するトリフェノ
ール型エポキシ樹脂を用いた場合、本発明の硬化剤の
(B)成分と構造が類似しているため、高Tg、速硬化
性、高耐熱性に優れるという利点がある。(Epoxy resin (C)) As the epoxy resin (C) cured by the curing agent of the present invention, any epoxy resin having two or more epoxy groups in one molecule can be used. For example, triphenol epoxy resin, tetraphenolethane epoxy resin, biphenyl epoxy resin, phenol novolak epoxy resin, orthocresol novolak epoxy resin, dihydroxynaphthalene novolak epoxy resin, dicyclopentadiene epoxy resin, stilbene epoxy resin,
Bisphenol A or F type epoxy resin, halogenated epoxy resin, hydroquinone type epoxy resin and the like can be mentioned, and in particular, triphenol type epoxy having a glycidyl ether group-substituted phenyl group represented by the formula (4) or (5) When a resin is used, the structure is similar to the component (B) of the curing agent of the present invention, and therefore, there is an advantage that the resin has high Tg, rapid curability, and high heat resistance.
【0039】[0039]
【化13】 (式中n、R3、R4、R5、R6及びp、q、r、s、は
式(2)における定義と同一であり、OGはグリシジルエ
ーテル基をあらわす。)Embedded image (Wherein n, R 3 , R 4 , R 5 , R 6 and p, q, r, s are the same as defined in the formula (2), and OG represents a glycidyl ether group.)
【0040】[0040]
【化14】 (式中n、R3、R4、R5、R6、R7及びp、q、r、
sは式(3)における定義と同一であり、OGはグリシジ
ルエーテル基をあらわす。)Embedded image (Where n, R 3 , R 4 , R 5 , R 6 , R 7 and p, q, r,
s is the same as defined in formula (3), and OG represents a glycidyl ether group. )
【0041】(オキサジン化合物/ポリフェノール類/
エポキシ樹脂の組成比)本発明のオキサジン化合物とポ
リフェノール化合物は、エポキシ樹脂の硬化剤として作
用するが、これら硬化剤の2成分であるオキサジン化合
物(A)/ポリフェノール化合物(B)の配合比は、重
量比で、5/95〜30/70が好ましい。この比が5
/95未満では、オキサジン化合物を使用する効果(低
粘度化、高流動性、低吸水性、高Tg、低硬化収縮な
ど)が、十分に発揮できない。またこの比が30/70
を越えると、硬化速度が低下し、成形性が劣ったり、エ
ポキシ樹脂や無機フィラー、硬化促進剤などと複合して
製造された封止材組成物が、コールドフローを起こしや
すくなったりする場合がある。(Oxazine compound / polyphenols /
The composition ratio of the epoxy resin) The oxazine compound and the polyphenol compound of the present invention act as a curing agent for the epoxy resin. The mixing ratio of the two components of the curing agent, oxazine compound (A) / polyphenol compound (B), is as follows: The weight ratio is preferably from 5/95 to 30/70. This ratio is 5
If it is less than / 95, the effects of using the oxazine compound (low viscosity, high fluidity, low water absorption, high Tg, low curing shrinkage, etc.) cannot be sufficiently exhibited. This ratio is 30/70
If it exceeds, the curing speed is reduced, the moldability is poor, or the sealing material composition manufactured by combining with an epoxy resin, an inorganic filler, a curing accelerator, etc., may be likely to cause cold flow. is there.
【0042】また、硬化剤成分((A)+(B))とエ
ポキシ樹脂(C)との配合比は、エポキシ基/(オキサ
ジン環+水酸基)の当量比で、1.2/1〜1/1.2
の範囲になるようにするのが好ましい。この比が1.2
/1を越えると、エポキシ基同士が反応し、また1/
1.2未満の場合、未反応の水酸基が硬化物中に残存
し、吸水率の上昇などを引き起こす。また硬化速度もや
や低下する傾向がある。The mixing ratio of the curing agent component ((A) + (B)) to the epoxy resin (C) is 1.2 / 1 to 1 in an equivalent ratio of epoxy group / (oxazine ring + hydroxyl group). /1.2
It is preferable to be within the range. This ratio is 1.2
When the ratio exceeds / 1, the epoxy groups react with each other and 1 /
If it is less than 1.2, unreacted hydroxyl groups remain in the cured product, causing an increase in water absorption. Also, the curing speed tends to decrease slightly.
【0043】(無機フィラー(D))本発明の半導体封
止用樹脂組成物には、無機フィラーが必須成分として配
合される。無機フィラーとしては、シリカ、アルミナ、
チタンホワイト、窒化ケイ素、炭化珪素、炭酸カルシウ
ム、炭酸マグネシウム、水酸化アルミニウム、マグネシ
ア、クレー、タルク、ケイ酸カルシウム、酸化チタンな
どが挙げられる。この中で、好ましいのは、シリカ、ア
ルミナである。形状は球状或いは破砕状の何れも使用可
能であるが、球状で細密充填が可能な粒度分布を持つも
のがより好ましい。(Inorganic Filler (D)) The resin composition for semiconductor encapsulation of the present invention contains an inorganic filler as an essential component. As the inorganic filler, silica, alumina,
Examples include titanium white, silicon nitride, silicon carbide, calcium carbonate, magnesium carbonate, aluminum hydroxide, magnesia, clay, talc, calcium silicate, and titanium oxide. Among them, silica and alumina are preferred. Either spherical or crushed shapes can be used, but those having a spherical particle size distribution that can be finely packed are more preferable.
【0044】無機フィラーの充填量は、半導体封止用樹
脂組成物全量中の70〜95重量%、特に80〜93重
量%とするのが好ましい。無機フィラーの充填量が70
%未満の場合、耐湿性に劣り、半田耐熱性やソリにも悪
影響を与える。また、これが95%を越えると流動性が
無くなり、あるいは粘度が大幅に上昇し、成形性が悪く
なる。成形性(溶融粘度、流動性)を損なわない限りに
おいては、低応力性、低吸湿性の点から無機充填材量は
多い方が好ましい。The filling amount of the inorganic filler is preferably 70 to 95% by weight, particularly preferably 80 to 93% by weight based on the total amount of the resin composition for semiconductor encapsulation. The amount of the inorganic filler is 70
%, It is inferior in moisture resistance and also has an adverse effect on solder heat resistance and warpage. On the other hand, if it exceeds 95%, the fluidity is lost or the viscosity is greatly increased, resulting in poor moldability. As long as the moldability (melt viscosity, fluidity) is not impaired, it is preferable that the amount of the inorganic filler is large from the viewpoint of low stress and low hygroscopicity.
【0045】(硬化促進剤(E))硬化促進剤(E)と
しては、エポキシ樹脂をフェノール系硬化剤で硬化させ
るための公知の硬化促進剤を用いることが出来る。これ
らの硬化促進剤は、式(4)に示したオキサジン化合物と
フェノール樹脂との開環重合反応も促進する。このよう
な硬化促進剤としては例えばトリブチルアミン、トリエ
チルアミン、1,8−ジアザビシクロ(540)ウンデ
セン−7、トリエチルアミンなどの3級アミン、塩化ベ
ンジルトリメチルアンモニウム、水酸化ベンジルトリメ
チルアンモニウム、トリエチルアンモニウムテトラフェ
ニルボレートなどの4級アンモニウム塩、2−メチルイ
ミダゾール、2,4−ジメチルイミダゾール、2エチル
4メチルイミダゾール、2フェニルイミダゾール、2フ
ェニル4メチルイミダゾールなどのイミダゾール類、2
エチル4メチルイミダゾールテトラフェニルボレートな
どのイミダゾール類とのテトラフェニルボロン塩、トリ
フェニルホスフィンや、テトラフェニルホスフォニウム
テトラフェニルボレート、などの有機フォスフィン化合
物およびそのボロン塩などを挙げることができるが、こ
の中でも、硬化性や耐湿性の点から、1,8−ジアザビ
シクロ(540)ウンデセン−7(DBU)及びイミダ
ゾール類が好ましい。また、より高流動性にするために
は、加熱により活性が発現する熱潜在性の硬化促進剤が
より好ましく、テトラフェニルホスフォニウム・テトラ
フェニルボレート(TPP・TPB)や、テトラ置換ホ
スフォニウム有機酸塩、例えばテトラフェニルホスフォ
ニウム・テトラキス(ナフタレンカルボキシレート)ボ
レートなどが好ましい。(Curing Accelerator (E)) As the curing accelerator (E), a known curing accelerator for curing an epoxy resin with a phenolic curing agent can be used. These curing accelerators also promote the ring-opening polymerization reaction between the oxazine compound represented by the formula (4) and the phenol resin. Examples of such curing accelerators include tertiary amines such as tributylamine, triethylamine, 1,8-diazabicyclo (540) undecene-7, triethylamine, benzyltrimethylammonium chloride, benzyltrimethylammonium hydroxide, and triethylammonium tetraphenylborate. Quaternary ammonium salts, imidazoles such as 2-methylimidazole, 2,4-dimethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, and 2-phenyl4-methylimidazole;
Examples thereof include tetraphenylboron salts with imidazoles such as ethyl 4-methylimidazole tetraphenylborate, organic phosphine compounds such as triphenylphosphine and tetraphenylphosphonium tetraphenylborate, and boron salts thereof. Among them, 1,8-diazabicyclo (540) undecene-7 (DBU) and imidazoles are preferable from the viewpoint of curability and moisture resistance. In order to achieve higher fluidity, a heat-latent curing accelerator that exhibits activity upon heating is more preferable, and tetraphenylphosphonium / tetraphenylborate (TPP / TPB) or a tetra-substituted phosphonium organic acid is preferred. Salts, such as tetraphenylphosphonium tetrakis (naphthalenecarboxylate) borate, are preferred.
【0046】(その他添加剤)本発明の半導体封止用組
成物には、必要に応じて、離型剤として天然ワックス、
合成ワックス、高級脂肪酸およびその金属塩類、パラフ
ィン等、着色剤としてカーボンブラックなど、カップリ
ング剤としてシランカップリング剤、チタネートカップ
リング剤など、難燃剤としてブロム化エポキシ樹脂、リ
ン化合物、三酸化アンチモン、メラミンなどを配合して
も良い・また低応力剤としてポリブタジエン、ブタジエ
ン−アクリロニトリル共重合体、シリコーンゴム、シリ
コーンオイルなどの各種エラストマーを、添加または予
め反応して用いることができる。これらの添加剤の使用
量は、従来の半導体封止用エポキシ樹脂組成物における
使用量と同様でよい。(Other Additives) The composition for encapsulating a semiconductor of the present invention may contain, if necessary, natural wax,
Synthetic wax, higher fatty acids and their metal salts, paraffin, etc., carbon black and the like as coloring agents, silane coupling agents and titanate coupling agents as coupling agents, brominated epoxy resins, phosphorus compounds, antimony trioxide as flame retardants, Melamine or the like may be blended. Also, various elastomers such as polybutadiene, butadiene-acrylonitrile copolymer, silicone rubber, and silicone oil can be added or reacted in advance as a low stress agent. The amounts of these additives used may be the same as the amounts used in conventional epoxy resin compositions for semiconductor encapsulation.
【0047】(混合方法)本発明のエポキシ樹脂組成物
は、前述のオキサジン化合物(A)、ポリフェノール類
(B)、エポキシ樹脂(C)、無機フィラー(D)、硬
化促進剤(E)およびその他の添加剤を、ミキサー等に
よって十分均一に混合した後、さらに熱ロール、ニーダ
ー、押出機などにより混練処理を行い、次いで冷却固化
させ適当な大きさに粉砕することにより得られる。(Mixing method) The epoxy resin composition of the present invention comprises the above-mentioned oxazine compound (A), polyphenols (B), epoxy resin (C), inorganic filler (D), curing accelerator (E) and other components. Is sufficiently mixed with a mixer or the like, and further kneaded with a hot roll, kneader, extruder, or the like, and then solidified by cooling and pulverized to an appropriate size.
【0048】[0048]
【発明の効果】本発明で用いた単官能縮合多環ベンゾオ
キサジン化合物は低粘度であるため、これと特定のポリ
フェノール類を配合することにより、低粘度/高流動性
の組成物が得られ、これが成形硬化時にはポリフェノー
ル類と速やかに反応し、分子量が上がると共に水酸基が
生成するので、硬化性、脱型性の優れたエポキシ樹脂の
硬化剤として働き、高流動性と速硬化性、低吸水性、高
Tgを同時に高次元で満足する実用的な封止用樹脂組成
物が得られる。さらに、本発明の樹脂組成物は、成形硬
化特性の経時劣化も少ない。特にTQFP用封止剤及び
ファインピッチ用BGAに対して流動性、半田耐熱性、
高Tg、硬化性、硬化性の経時変化防止の点で優れ、レ
ギュラーサイズ用BGA、MPA方式に対応する高Tg
封止剤においても流動性、半田耐熱性が付与され、高密
度実装、表面実装に適した半導体封止材として極めて有
用である。Since the monofunctional condensed polycyclic benzoxazine compound used in the present invention has a low viscosity, a low-viscosity / high-flowability composition can be obtained by blending it with a specific polyphenol. It reacts quickly with polyphenols at the time of molding and curing to increase the molecular weight and generate hydroxyl groups, so it acts as a curing agent for epoxy resins with excellent curability and demoldability, and has high fluidity and rapid curability, and low water absorption. And a practical encapsulating resin composition which simultaneously satisfies a high Tg at a high level. Furthermore, the resin composition of the present invention has less deterioration with time of the molding and curing properties. Especially for TQFP sealant and fine pitch BGA, fluidity, solder heat resistance,
High Tg, excellent in curability and curability over time, and high Tg compatible with BGA for regular size and MPA method
Fluidity and solder heat resistance are imparted to the sealing agent, and it is extremely useful as a semiconductor sealing material suitable for high-density mounting and surface mounting.
【0049】[0049]
【実施例】以下に実施例を挙げて本発明を具体的に説明
する。なお実施例において使用した原料化合物の種類、
封止剤の物性評価方法等は下記のとおりである。EXAMPLES The present invention will be specifically described below with reference to examples. The types of the raw material compounds used in the examples,
The methods for evaluating the properties of the sealant are as follows.
【0050】1.原料 (A)縮合多環オキサジン化合物 (1)ベンゾオキサジン(B.O):下記製造例1によ
り合成した。 (2)ベンゾオキサジン(B.O):下記製造例2によ
り合成した。 (3)多官能縮合多環オキサジン化合物:下記製造例3に
より合成した。 (4)モノベンゾオキサジン重合物:下記製造例4により
合成した。1. Raw Materials (A) Condensed polycyclic oxazine compound (1) Benzoxazine (BO): synthesized according to Production Example 1 below. (2) Benzoxazine (BO): synthesized according to Production Example 2 below. (3) Polyfunctional condensed polycyclic oxazine compound: synthesized according to Production Example 3 below. (4) Monobenzoxazine polymer: synthesized according to Production Example 4 below.
【0051】(B)ポリフェノール類 下記2種のポリフェノールを使用した。 (1)P.Ph 下記式(10)で表されるポリフェノール(B) Polyphenols The following two types of polyphenols were used. (1) P. Ph Polyphenol represented by the following formula (10)
【0052】[0052]
【化15】 n=0.3(平均) OH基当量:98g/eq 溶融粘度:7.7poise(150℃) (2)P.Ph 下記式(11)で表されるポリフェノールEmbedded image n = 0.3 (average) OH group equivalent: 98 g / eq Melt viscosity: 7.7 poise (150 ° C.) Ph Polyphenol represented by the following formula (11)
【0053】[0053]
【化16】 n=0.2(平均) OH基当量:154g/eqEmbedded image n = 0.2 (average) OH group equivalent: 154 g / eq
【0054】(C)エポキシ樹脂 (1)エポキシ樹脂:下記式(12)で表されるエポキシ樹
脂(C) Epoxy resin (1) Epoxy resin: epoxy resin represented by the following formula (12)
【0055】[0055]
【化17】 n=0.3(平均) エポキシ基当量:168g/eq (2)エポキシ樹脂:下記式(13)で表されるエポキシ樹
脂Embedded image n = 0.3 (average) Epoxy group equivalent: 168 g / eq (2) Epoxy resin: epoxy resin represented by the following formula (13)
【0056】[0056]
【化18】 n=1.6(平均) エポキシ基当量:213g/eqEmbedded image n = 1.6 (average) Epoxy group equivalent: 213 g / eq
【0057】2.物性評価方法 [封止材料の物性] (1)溶融粘度:フローテスターにより175℃におけ
る粘度を測定。 (2)スパイラルフロー:トランスファー成形によりス
パイラルフローを測定 (3)キュラストメーター硬化性:175℃での硬化に
よるトルク上昇スピードをキュラストメーターで測定
し、60秒、90秒及び120秒のトルクを読み取る。 (4)脱型性:175℃、120秒のトランスファー成
形を行なった際の脱型性を、変形の有無、熱間剛性など
から下記3段階で評価した。 ○:良好 △:やや劣る ×劣る2. Physical property evaluation method [Physical properties of sealing material] (1) Melt viscosity: The viscosity at 175 ° C was measured by a flow tester. (2) Spiral flow: Spiral flow is measured by transfer molding. (3) Curast meter curability: The torque rise speed by curing at 175 ° C. is measured with a curast meter, and the torque of 60 seconds, 90 seconds and 120 seconds is measured. read. (4) Removability: The removability after transfer molding at 175 ° C. for 120 seconds was evaluated based on the following three grades based on the presence or absence of deformation, hot rigidity and the like. :: good △: slightly poor × poor
【0058】[封止材料硬化物の物性]175℃、120
秒でトランスファー成形した後、180℃−6時間のポ
ストキュアーを行ない、硬化物を作成し、下記方法によ
り評価した。 (4)Tg:TMAで線膨張係数の変曲点よりTgを求
めた。 (5)吸水率:直径50mm、厚さ3mmの円板を85
℃、湿度85%の空気中に放置したときの24時間、7
2時間、168時間後の重量増加より求めた。[Physical Properties of Cured Sealing Material] 175 ° C., 120
After transfer molding in seconds, a post cure at 180 ° C. for 6 hours was performed to prepare a cured product, which was evaluated by the following method. (4) Tg: Tg was determined from the inflection point of the linear expansion coefficient by TMA. (5) Water absorption: 85 disks with a diameter of 50 mm and a thickness of 3 mm
24 hours when left in air at 85 ° C and 85% humidity, 7
It was determined from the weight increase after 2 hours and 168 hours.
【0059】[製造例1](ベンゾオキサジンの合
成) フェノール50部(重量部、以下同じ)をジオキサン溶
媒25部中に溶解し、90℃に加温した。49.5部の
アニリンと86.2部のホルムアルデヒドを各々2時間
かけて滴下した。還流温度まで昇温し、その状態で4時
間保持した。反応終了後、縮合水及びホルマリン中の水
を有機層から除去し、その後有機層を水洗・分液した。
水洗後減圧条件下40〜60℃で、ジオキサン、未反応
モノマーなどを除去して89.5部のベンゾオキサジン
(3-フェニル-3,4-ジヒドロ-2H-ベンゾ[e][1,3]オ
キサジン)を得た。得られたベンゾオキサジンの性状
は下記のとおりである。 純度 81%(GPCによる) フェノール 0.1%(GCによる) アニリン 0.2%(GCによる) アニリンホルムアルデヒド重合物 5.5%(GCによる) 開環重合物 13%(GPCによる) 粘度(30℃) 2.5 poise オキサジン環の当量(既に開環したものも含めて計算):224g/eq [Preparation Example 1] (Synthesis of benzoxazine) 50 parts (parts by weight, the same applies hereinafter) of phenol were dissolved in 25 parts of a dioxane solvent and heated to 90 ° C. 49.5 parts of aniline and 86.2 parts of formaldehyde were each added dropwise over 2 hours. The temperature was raised to the reflux temperature, and kept in that state for 4 hours. After completion of the reaction, the condensed water and water in formalin were removed from the organic layer, and then the organic layer was washed with water and separated.
After washing with water, dioxane and unreacted monomers are removed at 40 to 60 ° C. under reduced pressure to remove 89.5 parts of benzoxazine (3-phenyl-3,4-dihydro-2H-benzo [e] [1,3]. Oxazine) was obtained. The properties of the obtained benzoxazine are as follows. Purity 81% (by GPC) Phenol 0.1% (by GC) Aniline 0.2% (by GC) Aniline formaldehyde polymer 5.5% (by GC) Ring-opening polymer 13% (by GPC) Viscosity (30 ° C) 2.5 poise Oxazine ring Equivalent (calculated including those already opened): 224 g / eq
【0060】[製造例2](ベンゾオキサジンの製造) p−ターシャリーブチルフェノール150部をメタノー
ル溶媒80部中に溶解した。パラホルムアルデヒド80
部、KOH0.58部をメタノール溶媒80部に溶解
し、冷却しながらこの溶液にアニリン99部を添加し
た。その後パラホルムアルデヒド/アニリン/KOHメ
タノール溶液をp−ターシャリーブチルフェノール溶液
に添加し、70℃で攪拌しながら4時間反応させた。反
応終了後、製造例1と同様にして129部のベンゾオキ
サジン(6-ターシャリーブチル-3-フェニル-3,4-ジヒ
ドロ-2H-ベンゾ[e][1,3]オキサジン)を得た。得られ
たベンゾオキサジンのオキサジン環当量(開環したも
のも含めて計算)は267g/eqであった。[Production Example 2] (Production of benzoxazine) 150 parts of p-tert-butylphenol were dissolved in 80 parts of a methanol solvent. Paraformaldehyde 80
And 0.58 parts of KOH were dissolved in 80 parts of a methanol solvent, and 99 parts of aniline was added to the solution while cooling. Thereafter, a paraformaldehyde / aniline / KOH methanol solution was added to the p-tert-butylphenol solution, and reacted at 70 ° C. for 4 hours while stirring. After the reaction, 129 parts of benzoxazine (6-tert-butyl-3-phenyl-3,4-dihydro-2H-benzo [e] [1,3] oxazine) was obtained in the same manner as in Production Example 1. The benzoxazine obtained had an oxazine ring equivalent (calculated including that of the ring opened) of 267 g / eq.
【0061】[製造例3](多官能ベンゾオキサジンの
製造) ビスフェノールA、アニリン/ホルムアルデヒドから製
造例1と同様の方法により6,6−(1メチルエチリデ
ン)ビス(3,4−ジヒドロー3−フェニル-2H-1,3-ベ
ンゾオキサジン)を合成した。オキサジン環当量(開環
したものも含めて計算)232g/eqであった。[Production Example 3] (Production of polyfunctional benzoxazine) 6,6- (1-methylethylidene) bis (3,4-dihydro-3-phenyl) was prepared from bisphenol A and aniline / formaldehyde in the same manner as in Production Example 1. -2H-1,3-benzoxazine) was synthesized. The oxazine ring equivalent was 232 g / eq (calculated including that of the ring opened).
【0062】[製造例4](モノベンゾオキサジン重合
物の製造) 製造例1で得られたベンゾオキサジン20gにフェノ
ール1gを添加し、MIBK中で100℃、300分間
熱処理を行ない、分子量2500相当の高分子量重合物
を得た。[Production Example 4] (Production of Monobenzoxazine Polymer) To 20 g of the benzoxazine obtained in Production Example 1 was added 1 g of phenol, and heat treatment was performed in MIBK at 100 ° C. for 300 minutes to obtain a molecular weight of 2500 or more. A high molecular weight polymer was obtained.
【0063】[実施例1〜8]縮合多環オキサジン化合物
として製造例1〜2で得られたベンゾオキサジン及び
、ポリフェノールとしてポリフェノール及び、エ
ポキシ樹脂としてエポキシ樹脂及び、硬化促進剤と
して2−エチル−4―メチルイミダゾール、又はテトラ
フェニルホスフォニウム・テトラフェニルボレート(TP
P・TPB)、無機フィラーとしてシランカップリング剤で
処理されたシリカ、離型剤としてカルナバワックスを表
1記載の配合比で使用した。先ず所定量のベンゾオキサ
ジン化合物と所定量の硬化促進剤を溶融させたポリフェ
ノール及びエポキシ樹脂を秤り取り、ミキサーで充分に
粉砕混合した。更にシランカップリング剤で処理された
シリカ、及びカルナバワックスと混合しミキサーで充分
に混合した。これらの混合物を90℃の2本ロール混練
機で3〜5分混練した後、カッターミルで5mmアンダ
ーに粉砕して封止材料サンプルを作成し、その物性を測
定した。結果を表1〜2に示す。Examples 1 to 8 The benzoxazines obtained in Production Examples 1 and 2 as condensed polycyclic oxazine compounds, polyphenols as polyphenols, epoxy resins as epoxy resins, and 2-ethyl-4 as a curing accelerator -Methylimidazole or tetraphenylphosphonium / tetraphenylborate (TP
P.TPB), silica treated with a silane coupling agent as an inorganic filler, and carnauba wax as a release agent were used in the mixing ratio shown in Table 1. First, a polyphenol and an epoxy resin in which a predetermined amount of a benzoxazine compound and a predetermined amount of a curing accelerator were melted were weighed and sufficiently pulverized and mixed by a mixer. Further, the mixture was mixed with silica treated with a silane coupling agent and carnauba wax, and thoroughly mixed with a mixer. The mixture was kneaded with a two-roll kneader at 90 ° C. for 3 to 5 minutes, and then pulverized to 5 mm under with a cutter mill to prepare a sealing material sample, and the physical properties thereof were measured. The results are shown in Tables 1 and 2.
【0064】[比較例1]実施例1において、ベンゾオキ
サジン化合物を用いず、ポリフェノールのみをエポキ
シ樹脂硬化剤として表1記載の配合比で配合し実施例1
と同様にして封止材料サンプルを作成し、その物性を測
定した。結果を表2に示す。[Comparative Example 1] In Example 1, only the polyphenol was used as an epoxy resin curing agent in the mixing ratio shown in Table 1 without using a benzoxazine compound.
A sealing material sample was prepared in the same manner as described above, and its physical properties were measured. Table 2 shows the results.
【0065】[比較例2]比較例1において、ポリフェノ
ールの代わりにポリフェノールを用い、実施例1と
同様にして封止材料サンプルを作成し、その物性を測定
した。結果を表2に示す。Comparative Example 2 In Comparative Example 1, a sealing material sample was prepared in the same manner as in Example 1 except that polyphenol was used instead of polyphenol, and its physical properties were measured. Table 2 shows the results.
【0066】[比較例3]実施例1において、ベンゾオキ
サジンの代わりに製造例3で得られた多官能ベンゾオ
キサジンを用い、実施例1と同様にして封止材料サンプ
ルを作成し、その物性を測定した。結果を表3に示す。Comparative Example 3 A sealing material sample was prepared in the same manner as in Example 1 except that the polyfunctional benzoxazine obtained in Production Example 3 was used in place of benzoxazine, and the physical properties thereof were measured. It was measured. Table 3 shows the results.
【0067】[比較例4]比較例3において、ポリフェノ
ールの代わりにポリフェノールを用い、エポキシ樹
脂の代わりにエポキシ樹脂を用い、比較例3と同様
にして封止材料サンプルを作成し、その物性を測定し
た。結果を表3に示す。Comparative Example 4 In Comparative Example 3, a sealing material sample was prepared in the same manner as in Comparative Example 3 except that polyphenol was used instead of polyphenol and epoxy resin was used instead of epoxy resin, and the physical properties were measured. did. Table 3 shows the results.
【0068】[比較例5]硬化剤として製造例3で得られ
た多官能ベンゾオキサジン化合物のみを用い、実施例1
と同様にしてエポキシ樹脂を硬化させて封止材料サン
プルを作成し、その物性を測定した。結果を表3に示
す。Comparative Example 5 Example 1 was repeated using only the polyfunctional benzoxazine compound obtained in Production Example 3 as a curing agent.
A sealing material sample was prepared by curing the epoxy resin in the same manner as described above, and the physical properties were measured. Table 3 shows the results.
【0069】[比較例6]製造例4で得られたベンゾオキ
サジンの重合物のみを硬化剤として、実施例1と同様
にしてエポキシ樹脂を硬化させ、封止材料サンプルを
作成し、その物性を測定した。結果を表3に示す。Comparative Example 6 Using only the benzoxazine polymer obtained in Production Example 4 as a curing agent, an epoxy resin was cured in the same manner as in Example 1 to prepare a sealing material sample, and the physical properties thereof were measured. It was measured. Table 3 shows the results.
【0070】[比較例7]ベンゾオキサジンの重合物と
ポリフェノールとからなる硬化剤により実施例1と同
様にしてエポキシ樹脂を硬化させ、封止材料サンプル
を作成し、その物性を測定した。結果を表3に示す。Comparative Example 7 An epoxy resin was cured with a curing agent composed of a polymer of benzoxazine and polyphenol in the same manner as in Example 1, a sealing material sample was prepared, and its physical properties were measured. Table 3 shows the results.
【0071】[0071]
【表1】 TPP・TPB:テトラフェニルホスフォニウム・テトラフェ
ニルボレート[Table 1] TPP ・ TPB : Tetraphenylphosphonium ・ Tetraphenylborate
【0072】[0072]
【表2】 TPP・TPB:テトラフェニルホスフォニウム・テトラフェ
ニルボレート[Table 2] TPP ・ TPB : Tetraphenylphosphonium ・ Tetraphenylborate
【0073】[0073]
【表3】 TPP・TPB:テトラフェニルホスフォニウム・テトラフェ
ニルボレート[Table 3] TPP ・ TPB : Tetraphenylphosphonium ・ Tetraphenylborate
【0074】本発明の単官能縮合多環オキサジン化合物
と、ポリフェノール類からなる硬化剤を用いて硬化させ
た各実施例のエポキシ樹脂は、いずれも低粘度、速硬化
性、成形性、Tg、低吸水性等の物性のバランスが取れ
ており、封止用成形材料として優れている。これに対し
て、単官能縮合多環オキサジン化合物を用いない比較例
1及び2ではいずれも、溶融粘度が高く、流動性が不充
分である。また、ベンゾオキサジン化合物として、多官
能ベンゾオキサジンを用いた比較例3及び4の結果で
は、溶融粘度が上昇しており、流動性にも乏しい。フェ
ノール樹脂を用いず、上記多官能ベンゾオキサジン化合
物のみでエポキシ樹脂を硬化させた比較例5の結果にお
いても、硬化性が著しく低い上、耐吸水性も劣ってい
る。更に本発明で使用した単官能ベンゾオキサジン化合
物をあらかじめ重合させた高分子重合物(多官能性ポリ
フェノール)を硬化剤に用いた比較例6では溶融粘度が
著しく増加し、また耐吸水性にも劣る結果となってい
る。The epoxy resin of each of the examples cured by using the monofunctional condensed polycyclic oxazine compound of the present invention and a curing agent composed of polyphenols has a low viscosity, a fast curing property, a moldability, a low Tg, and a low Tg. It has a good balance of physical properties such as water absorption, and is excellent as a molding material for sealing. On the other hand, in Comparative Examples 1 and 2 in which no monofunctional condensed polycyclic oxazine compound was used, the melt viscosity was high and the fluidity was insufficient. Further, in the results of Comparative Examples 3 and 4 using a polyfunctional benzoxazine as the benzoxazine compound, the melt viscosity was increased and the fluidity was poor. In the result of Comparative Example 5 in which the epoxy resin was cured only with the above polyfunctional benzoxazine compound without using the phenol resin, the curability was remarkably low and the water absorption resistance was also poor. Furthermore, in Comparative Example 6 in which a polymer (polyfunctional polyphenol) obtained by pre-polymerizing the monofunctional benzoxazine compound used in the present invention was used as a curing agent, the melt viscosity was remarkably increased and the water absorption resistance was poor. The result is.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H01L 23/31 (72)発明者 大平 正人 茨城県鹿嶋市大字光3番地 住金ケミカル 株式会社開発研究所内 (72)発明者 市原 邦夫 茨城県鹿嶋市大字光3番地 住金ケミカル 株式会社開発研究所内 Fターム(参考) 4J002 CC03X CC06X CC07X CD00W CD07W CE00X EJ017 EJ047 EU236 FD018 FD14X FD146 FD147 FD159 GQ05 4J036 AA01 AF05 AF08 AF36 AJ03 AJ14 DA04 DA06 DB05 DC38 FB07 JA07 4M109 AA01 BA01 BA03 CA21 EA02 EA03 EB02 EB03 EB04 EB12 EC01 EC05 EC20 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) H01L 23/31 (72) Inventor Masato Ohira 3 Oji Hikari, Kashima City, Ibaraki Pref. Sumikin Chemical Co., Ltd. 72) Inventor Kunio Ichihara 3, Oaza, Kashima, Ibaraki Pref. F-term (reference) 4J002 CC03X CC06X CC07X CD00W CD07W CE00X EJ017 EJ047 EU236 FD018 FD14X FD146 FD147 FD159 GQ05 DA05 AF03 DA06 DB05 DC38 FB07 JA07 4M109 AA01 BA01 BA03 CA21 EA02 EA03 EB02 EB03 EB04 EB12 EC01 EC05 EC20
Claims (5)
ン化合物(A)及び式(2)及び(3)から選ばれるポリフェ
ノール類(B)とからなるエポキシ樹脂用硬化剤。 【化1】 (式中[Aro]は隣接する炭素原子をオキサジン核と共有
して縮合環を形成する単環又は縮合多環芳香族炭化水素
環を表し、R1はフェニル基、炭素数1〜4のアルキル
基、またはシクロヘキシル基であり、R2は炭素数1〜
4のアルキル基、フェニル基、ベンジル基又はフェノキ
シ基であり、m≧0である。) 【化2】 (式中n≧0、R3は水素または炭素数1〜3のアルキ
ル基であり、R4、R5、R6はそれぞれ同一または相異
なるアルキル基、フェニル基、またはベンジル基であ
り、pは0または1〜3の整数、q、r、sは0または
1〜4の整数である。またp,q,r,sが2以上の場
合、一つのベンゼン核に置換する複数の置換基は互いに
同一でも異なるものであってもよい。) 【化3】 (式中n、R3、R4、R5、R6及びp、q、r、sは式
(2)における定義と同一であり、R7は直接結合、−
CH2−、−C(CH3)2−、−O−、−S−、または−
SO2−を表す。)A curing agent for an epoxy resin comprising a monofunctional condensed polycyclic oxazine compound represented by the formula (1) (A) and a polyphenol (B) selected from the formulas (2) and (3). Embedded image (Where [Aro] represents a monocyclic or condensed polycyclic aromatic hydrocarbon ring which forms a condensed ring by sharing an adjacent carbon atom with the oxazine nucleus, and R 1 is a phenyl group, an alkyl having 1 to 4 carbons. Or a cyclohexyl group, and R 2 has 1 to 1 carbon atoms.
4 is an alkyl group, a phenyl group, a benzyl group or a phenoxy group, and m ≧ 0. ) (Where n ≧ 0, R 3 is hydrogen or an alkyl group having 1 to 3 carbon atoms, and R 4 , R 5 , and R 6 are the same or different alkyl groups, phenyl groups, or benzyl groups; Is an integer of 0 or 1 to 3, and q, r, and s are integers of 0 or 1 to 4. When p, q, r, and s are 2 or more, a plurality of substituents substituted on one benzene nucleus May be the same or different from each other.) (Wherein n, R 3 , R 4 , R 5 , R 6 and p, q, r, s are the same as defined in formula (2), R 7 is a direct bond,-
CH 2 —, —C (CH 3 ) 2 —, —O—, —S—, or —
Represents SO 2 —. )
ポリフェノール化合物(B)の重量比(A)/(B)
が、5/95〜30/70である請求項1記載のエポキ
シ樹脂用硬化剤。2. A weight ratio (A) / (B) of a monofunctional condensed polycyclic oxazine compound (A) and a polyphenol compound (B).
Is from 5/95 to 30/70.
サジン化合物 (B)請求項1記載のポリフェノール類 (C)エポキシ樹脂 (D)無機フィラー及び (E)硬化促進剤 を含有してなる半導体封止用樹脂組成物。3. A monofunctional condensed polycyclic oxazine compound according to claim 1, (B) a polyphenol according to claim 1, (C) an epoxy resin, (D) an inorganic filler, and (E) a curing accelerator. A resin composition for semiconductor encapsulation comprising:
るエポキシ樹脂である請求項3記載の半導体封止用樹脂
組成物。 【化4】 (式中n、R3、R4、R5、R6及びp、q、r、sは式
(2)における定義と同一であり、OGはグリシジルエー
テル基をあらわす。) 【化5】 (式中n、R3、R4、R5、R6、R7及びp、q、r、
sは式(3)における定義と同一であり、OGはグリシジ
ルエーテル基をあらわす。)4. The resin composition for semiconductor encapsulation according to claim 3, wherein the epoxy resin is an epoxy resin represented by the formula (4) or (5). Embedded image (Where n, R 3 , R 4 , R 5 , R 6 and p, q, r, s are
As defined in (2), OG represents a glycidyl ether group. ) (Where n, R 3 , R 4 , R 5 , R 6 , R 7 and p, q, r,
s is the same as defined in formula (3), and OG represents a glycidyl ether group. )
フェノール化合物(B)のエポキシ樹脂(C)に対する
配合比が、エポキシ基/(縮合多環オキサジン化合物の
オキサジン環+ポリフェノール類の水酸基)の当量比
で、1.5/1〜1/1.2である請求項3または4に
記載の半導体封止用樹脂組成物。5. The compounding ratio of the condensed polycyclic oxazine compound (A) and polyphenol compound (B) to the epoxy resin (C) is equivalent to epoxy group / (oxazine ring of condensed polycyclic oxazine compound + hydroxyl group of polyphenols). The resin composition for semiconductor encapsulation according to claim 3, wherein the ratio is 1.5 / 1 to 1 / 1.2.
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JP2008141052A (en) * | 2006-12-04 | 2008-06-19 | Denso Corp | Electronic package |
JP2010254990A (en) * | 2009-04-03 | 2010-11-11 | Sumitomo Bakelite Co Ltd | Semiconductor sealing resin composition and semiconductor device |
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JPWO2020122045A1 (en) * | 2018-12-10 | 2021-10-28 | Eneos株式会社 | A composition for a cured resin, a cured product of the composition, a method for producing the composition and the cured product, and a semiconductor device. |
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