JP2002037435A - Movable body system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To move a plurality of movable bodies along the same trajectory with good accuracy. SOLUTION: The plurality of movable bodies 21 are enabled to move along the inner wall of a guide member 20 disposed along a circulating trajectory. The movable bodies 21 are connected to the respective corresponding direct drive motors 22 by connecting member 23, so that the movable bodies are moved along the inner wall of the guide member 20 by rotating the direct drive motors 22. In this arrangement, the plural direct drive motors 22 provided corresponding to the movable bodies 21 are disposed in layers in the vertical direction to the paper surface of the drawing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving body system for moving a moving body equipped with, for example, a component conveying device or a component mounting device along a orbit.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor factory or the like, in order to carry or mount semiconductor components, a moving body system having a moving body equipped with a carrying device and a mounting device has been used. Since precision and automation are required for semiconductor component transportation and component mounting, a linear motor, a ball screw system, or the like is used as a mobile system installed in such a semiconductor factory.

FIG. 1 schematically shows a moving body system for moving a moving body on which the above-described transport device and the like are mounted. As shown in the figure, in this system, the linear motor system 16 itself including the track 1 and the moving body 3 laid in the X-axis direction and the track 1 for guiding and supporting the same is moved in the Y-axis direction by a ball screw system. I can do it. Specifically, the linear motor system 16 is fixed to a mount driven by the ball screw 15 and the ball screw 15 is driven by the motor 17, so that the entire linear motor system 16 can be moved in the Y-axis direction. It has become. According to this system, the moving body 3 can be moved to an arbitrary position on the XY plane by controlling the driving of both the ball screw 15 and the linear motor.

[0004]

However, in the above-described moving body system, the moving body 3 can be moved to an arbitrary position on the XY plane, but only one moving body 3 can be driven by this system. is there. Therefore, when many components are transported from the first position to the second position in the XY plane, the moving body 3 is moved between the first position and the second position by the number of components to be transported. It is necessary to reciprocate, so that a long transport time is required. If a plurality of moving bodies are moved, the transport time and the like can be reduced, but it is impossible to drive the plurality of moving bodies with the above-described conventional moving body system.

The present invention has been made in consideration of the above circumstances, and has as its object to provide a moving object system capable of moving a plurality of moving objects with high accuracy along the same track.

[0006]

In order to solve the above-mentioned problems, a moving object system according to a first aspect of the present invention includes a plurality of moving objects provided so as to be movable along the same orbit. A rotary drive mechanism provided corresponding to the body and stacked and disposed at the center of the orbit, and a connecting member for connecting the corresponding rotary drive mechanism and the moving body, wherein the rotary drive mechanism is By rotating the connecting member, the corresponding moving body is moved along the orbit.

[0007] Further, according to a second aspect of the present invention, in the moving body system according to the first aspect, the orbit is a trajectory obtained by combining a straight trajectory and an arc trajectory. .

The moving object system according to a third aspect of the present invention is the moving object system according to the second aspect, further comprising a guide member for guiding the moving object along the orbit. One end thereof is fixed to the rotary drive mechanism, and the other end supports the movable body in a radial direction of a rotation circle of the rotary drive mechanism.

According to a fourth aspect of the present invention, in the moving body system according to the first aspect, the connecting member has one end fixed to the rotary drive mechanism and the other end fixed. The moving body is rotatably supported.

A mobile system according to a fifth aspect of the present invention is characterized in that, in the mobile system according to the first aspect, the mobile body is provided with a work executing means for performing a predetermined work. .

According to a sixth aspect of the present invention, in the moving body system according to the fifth aspect, the predetermined work is provided at one or a plurality of locations on the orbit. The work table is further provided, and the work table is rotatable.

A mobile system according to a seventh aspect of the present invention is the mobile system according to the fifth aspect, wherein the mobile station is provided at one or a plurality of locations on the orbit, and the predetermined task is performed by the task executing means. The work table is further provided, and the work table is movable along a radial direction of a rotation circle of the rotation drive mechanism.

[0013] A mobile system according to an eighth aspect of the present invention is the mobile system according to any one of the first to seventh aspects, wherein the rotary drive mechanism is a direct drive motor.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. A. First embodiment A-1. Overall Configuration First, FIG. 2 is a plan view showing a configuration of a mobile system according to the first embodiment of the present invention. As shown in the figure, in this moving body system, six moving bodies 21 are movable along the inner wall of a cylindrical guide member 20. Each moving body 21 is equipped with a mounting head (work executing means) 24 for mounting a semiconductor component or the like. Each moving body 21 is provided with a guide roll 21a.
During the movement, the guide rolls 21 a rotate on the inner wall of the guide member 20.

An outer rotor type direct drive motor (rotation drive mechanism) 22 is arranged at the center of the guide member 20. As shown in FIG. 3, six direct drive motors 22 are vertically stacked. As shown in FIGS. 2 and 3, one end of a connecting member 23 extending in the radial direction of the rotation circle of the direct drive motor 22 is attached to the rotor 22 a of each direct drive motor 22. It rotates with rotation of 22a.

The above-mentioned six moving bodies 21 are attached to the other ends of the connecting members 23 attached to the six direct drive motors 22 which are respectively stacked. Here, as shown in FIG. 2, the moving body 21 is configured to be movable along a long hole 23 a formed in the connecting member 23 and extending in the radial direction. That is, the moving body 21 is held by the connecting member 23 so as to be movable in the radial direction. Further, the moving body 21 is attracted to the inner wall side of the guide member 20 by a magnet or the like (not shown), so that the guide roll 21a is in contact with the inner wall of the guide member 20 regardless of the position on the track. It comes into contact.

In the present embodiment, the guide member 20 has a shape in which two linear guides 20a and two arc-shaped guides 20b are combined in a plan view. Accordingly, the rotor 22a of the direct drive motor 22 rotates to connect the connecting member 23 and the moving body 21 held by the connecting member 23.
Rotates, the moving body 21 normally moves along a circular orbit. In this case, the moving body 21 does not move along a circular orbit but along a circular orbit along the planar guide member 20 in which a straight line and an arc are combined. I do. In order to enable movement along such a track, the moving body 21 is held by the connecting member 23 so as to be movable in the radial direction as described above, and can always move along the inner wall of the guide member 20. It has become. As shown in FIG. 2, the end of the connecting member 23 described above is attached to the arc-shaped guide 20b.
The groove 20c is formed so as not to intersect with the groove 20c. Also,
Although not shown, the linear guide 20a is also provided with a through hole for avoiding intersection with the connecting member 23.

A-2. Next, the direct drive motor 22 for driving the moving body 21 will be described. Various known motors can be used as the direct drive motor 22. In this embodiment, the motor disclosed in Japanese Patent Application Laid-Open No. 3-124257 is used. 4 will be described.

As shown in FIG. 4, the direct drive motor 22 has a rotor 22a, which is a cylindrical magnetic material, and has tooth portions 30a and concave grooves 3 at equal intervals on its inner peripheral surface.
0b are formed alternately. The permanent magnet 31 is inserted and arranged in each of the concave grooves 30b such that the polarities of the adjacent ones are opposite to each other. An auxiliary permanent magnet 32 that acts in a direction to strengthen the magnetic pole of the tooth portion 30a is disposed on the inner peripheral surface of the tooth portion 30a.

The stator 33 includes an iron core 35 having an A-phase magnetic pole 35a, a B-phase magnetic pole 35b, and a C-phase magnetic pole 43c, and coils 36a to 36 wound around the respective phase magnetic poles 35a to 35c.
c. Here, each phase magnetic pole 35a to 35c
Are sequentially shifted by P / 3 in the circumferential direction (P is the pitch (formation interval) of the teeth 30a). Such an iron core 3
5 is fixed to the shaft 37. Under this configuration, the coil 36a wound around the A-phase magnetic pole 35a, the coil 36b wound around the B-phase magnetic pole 35b, and the coil 36c wound around the C-phase magnetic pole 35c in the excitation sequence shown in FIG. If a so-called bipolar drive is performed, in which a pulse current of which polarity is inverted is supplied, the magnetically stable point of the rotor 22a with respect to the stator 33 changes, and the rotor 22a rotates accordingly.

A-3. Operation Next, the operation of the mobile system having the above configuration will be described. Here, a case in which semiconductor components are mounted using the mounting head 24 mounted on each moving body 21 is shown in FIG.
This will be described with reference to FIG.

For example, when a semiconductor component is taken out of an article storage and mounted on a board or the like on a mounting table, first, as shown in FIG. Is moved before. And
The mounting head 24 mounted thereon takes out the semiconductor component and is moved to the position of the mounting table in any direction by a direct drive motor 22 (see FIG. 2) for driving the moving body 21 (hereinafter, a clock shown in the figure) Direction).

At the time of picking up components by the mounting head 24, as shown in FIG. 6A, the other moving bodies 21 are moved to the vicinity of the component storage space by the corresponding direct drive motors 22, respectively. When the mounting head 24 mounted on the first moving body 21 takes out the semiconductor component and starts moving to the mounting table, the next moving body 2
1 moves in front of the component storage space, and the mounting head 24 mounted thereon takes out the semiconductor component. In this way, the mounting head 24 mounted on each moving body 21 sequentially takes out the semiconductor component from the component storage.

Then, as shown in FIG. 6 (b), the moving body 21 on which the mounting head 24 from which the semiconductor components have been taken out first stops before the mounting table, and at this position the mounting head 2
4 is performed. While such mounting is being performed, the moving body 21 on which the mounting head 24 from which the semiconductor component has been removed from the component storage space moves sequentially in the vicinity of the mounting table. When the mounting operation by the mounting head 24 mounted on the preceding moving body 21 is completed, the moving bodies 21 on standby move sequentially to the mounting table to perform mounting.

When each of the moving bodies 21 makes one rotation of the guide member 20 in this manner, it is possible to take out six semiconductor components from the component storage space and mount them on the board by the mounting table. In the conventional mobile body system (see FIG. 1) used for mounting semiconductor components, only one mobile body can be moved. Therefore, when the mounting operation is repeated a plurality of times, the mobile body is moved from the component storage to the mounting table. It had to go back and forth multiple times, which required a lot of work time. On the other hand, in the present embodiment, as described above, a maximum of six (that is, the number of the moving bodies 21 movably provided on the guide member 20) semiconductor mounting work during one rotation of the moving body 21. It can be performed.

Further, such a semiconductor component mounting operation is
Although very high precision is required for the mounting position and the like, the mobile system according to the present embodiment uses a direct drive motor capable of high-precision positioning, so that the mobile system used for semiconductor component mounting work is used. It is also suitable. Although it is difficult to accurately position the moving body 21 at the arcuate guide 20b in the guide member 20, it is necessary to stop the moving body 21 such as the component storage space or the mounting table as described above. Is a part of the linear guide 20a in the guide member 20, high-accuracy positioning can be easily performed.

Further, since each moving body 21 is driven by a direct drive motor 22 provided correspondingly, each moving body 21 can be individually controlled. Therefore, in the semiconductor mounting operation as described above, it becomes possible for the specific moving body 21 to pass through the parts storage. Therefore, corresponding to various processes,
That is, the present invention is also suitable as a mobile system used to manufacture products of other types. In addition, each such moving body 2
Although six direct drive motors 22 are provided to enable individual control of the motors 1, they are stacked and arranged as described above, thereby suppressing an increase in a planar installation space. In particular, in a semiconductor factory or the like, the inside of the factory is often a clean room, and an increase in the installation space has a great effect on the manufacturing cost of the equipment. However, in the mobile system according to the present embodiment, As described above, an increase in installation space can be suppressed, so that an increase in cost can be suppressed.

B. Second Embodiment Next, a mobile system according to a second embodiment of the present invention will be described. Note that, in the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIG. 7, the mobile system according to the second embodiment is similar to the mobile system according to the first embodiment.
And the moving body 21 is supported at a position at an end of the connecting member 23. Therefore, in the second embodiment, each moving body 21 is moved along a circular orbit along with the rotation of the rotor 22a of the direct drive motor 22 stacked and arranged corresponding to the moving body 21.

The moving body 21 is rotatably supported by a rotating shaft 72 provided at an end of the connecting member 23. The rotating shaft 72 is connected to the direct drive motor 2.
2 is connected to a rotating shaft 70 provided on the upper side 2 by a steel belt 71. Under this configuration, when the rotation shaft 70 is rotated by a drive source (not shown), the rotation shaft 72 rotates, and accordingly, the moving body 21 can rotate at the end of the connecting member 23. ing.

In the moving body system according to the second embodiment, a work table 75 is provided below the drawing, and a mounting head (not shown) provided on the moving body 21 is mounted on the work table 75. A component mounting operation or the like is performed on a substrate or the like placed on the substrate. Here, the work table 75
Can be moved in the radial direction of the rotating circle of the direct drive motor 22, which is the vertical direction in the figure, by a driving mechanism such as a linear motor.

Also in the mobile system according to the second embodiment, a plurality of mobiles 21 can be individually controlled and moved on the same track as in the first embodiment described above.
As described above, the effect of shortening the operation time can be obtained. In addition, since these moving bodies 21 are also driven by the direct drive motor 22, highly accurate positioning can be performed. Further, in this embodiment, since the movable trajectory of the moving body 21 is restricted to a circular trajectory, it may be necessary to adjust the positional relationship between the work place and the mounting head 24, but as described above, The work table 75 as a work place is provided so as to be movable, and the moving body 21 is provided.
Is rotated to adjust the direction and the like, so that the positional relationship as described above can be adjusted.

C. Third Embodiment Next, a mobile system according to a third embodiment of the present invention will be described. In the third embodiment, the same components as those in the first and second embodiments are denoted by the same reference numerals, and description thereof is omitted.

As shown in FIG. 8, the moving body system according to the third embodiment does not have a guide member for guiding and supporting the moving body as in the first embodiment, and the mounting head (moving body, A work execution means) 24 is attached to an end of the connecting member 23. As a result, the mounting head 24 is moved along a circular orbit along with the rotation of the rotor 22a of the direct drive motor 22 that is stacked and arranged corresponding to the mounting head 24.

Here, the mounting head 24 is attached to an end of the connecting member 23 via a direct drive motor 80. That is, the mounting head 24 is
Is provided rotatably with the rotation of the direct drive motor 80. On the other hand, also in the third embodiment, a work table 75 which is movable like the second embodiment is provided.

In the moving object system according to the third embodiment, a plurality of moving objects 21 can be individually controlled and moved on the same track as in the first and second embodiments. This has the effect of shortening the working time. In addition, since these moving bodies 21 are also driven by the direct drive motor 22, highly accurate positioning can be performed. In this embodiment,
Since the movable trajectory of the moving body 21 is restricted to a circular trajectory, it may be necessary to adjust the positional relationship between the work place and the mounting head 24. However, as described above, the work table serving as the work place is required. Since the mounting head 75 is provided so as to be movable and the mounting head 24 is rotated to a desired angle by the direct drive motor 22 to adjust the orientation, the positional relationship as described above can be adjusted.

D. Fourth Embodiment Next, a mobile system according to a fourth embodiment of the present invention will be described. In the fourth embodiment, the same components as those in the first to third embodiments are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIG. 9, the moving body system according to the fourth embodiment does not have a guide member for guiding and supporting the moving body as in the first embodiment, and the mounting head (moving body) 24 is attached to the end of the connecting member 23. As a result, the rotation of the rotor 22a of the direct drive motor 22 stacked corresponding to the mounting head 24 causes the 24 to move along a circular orbit.

In the fourth embodiment, the mounting head 24
Is fixed to the end of the connecting member 23, and the mounting head 2
It is impossible to adjust the direction by moving the 4 itself. However, as shown in FIGS. 9 and 10, in the moving body system according to the present embodiment, the work table 90 on which the work is performed is rotated by the linear motor 93 similarly to the second and third embodiments. The work table 90 is rotatable by a direct drive motor 91 while being movable in the radial direction of the circle. Therefore, after the mounting head 24 stops at a predetermined position on the work table 90, the work table 9
By moving or rotating 0 in the radial direction, the positional relationship between the mounting head 24 and the work table 90 can be adjusted to an appropriate one.

Further, similarly to the first to third embodiments, a plurality of moving bodies 21 can be individually controlled and moved on the same track, and the effect of shortening the working time can be obtained as described above. . In addition, since these moving bodies 21 are also driven by the direct drive motor 22, highly accurate positioning can be performed.

E. Modifications In the various embodiments described above, the moving body system for mounting the semiconductor component by moving the mounting head 24 has been described. However, the moving object is not limited to the mounting head 24. Or a semiconductor component transport robot. Also,
The present invention is not limited to those related to semiconductor manufacturing, and may be a robot or the like used for other purposes.

[0042]

As described above, according to the present invention,
It is possible to move a plurality of moving bodies with high accuracy along the same trajectory.

[Brief description of the drawings]

FIG. 1 is a perspective view schematically showing a mobile system used in a conventional semiconductor factory.

FIG. 2 is a plan view showing a configuration of a mobile system according to the first embodiment of the present invention.

FIG. 3 is a cross-sectional view showing the mobile system according to the first embodiment.

FIG. 4 is a diagram showing a configuration of a direct drive motor that is a component of the mobile system according to the first embodiment.

FIG. 5 is a diagram showing an excitation sequence in the direct drive motor.

FIG. 6 is a diagram for explaining a semiconductor component mounting operation by the mobile system according to the first embodiment.

FIG. 7 is a plan view illustrating a configuration of a mobile system according to a second embodiment of the present invention.

FIG. 8 is a plan view showing a configuration of a mobile system according to a third embodiment of the present invention.

FIG. 9 is a plan view showing a configuration of a mobile system according to a fourth embodiment of the present invention.

FIG. 10 is a sectional view showing the mobile system according to a fourth embodiment.

[Explanation of symbols]

20 ... guide member, 20a ... linear guide, 20b ...
... Arc guide, 21 ... Movable body, 22 ... Direct drive motor (rotation drive mechanism), 23 ... Connecting member,
24 mounting head (work executing means, moving body), 70
... Rotating shaft, 71 ... Steel belt, 72 ... Rotating shaft,
75 Work table, 80 Direct drive motor 90 Work table 91 Direct drive motor 92 Linear motor

Claims (8)

[Claims] 1. A plurality of moving bodies provided so as to be movable along the same orbit, and a rotation drive mechanism provided corresponding to the moving body and stacked and arranged at a central portion of the orbit. And a connecting member for connecting the moving body to the moving body, wherein the rotating drive mechanism rotates the connecting member to move the corresponding moving body along the orbit. And mobile system. 2. The mobile system according to claim 1, wherein the orbit is a trajectory obtained by combining a straight trajectory and an arc trajectory. 3. The moving member further comprises a guide member for guiding the moving body along the orbit. The connecting member has one end fixed to the rotation drive mechanism and the other end connected to the moving body. The moving body system according to claim 2, wherein the moving body system is supported so as to be movable in a radial direction of a rotation circle of the rotation drive mechanism. 4. The connection member according to claim 1, wherein one end of the connection member is fixed to the rotation drive mechanism, and the other end rotatably supports the moving body. Mobile system. 5. The moving body system according to claim 1, wherein the moving body includes a work execution unit for performing a predetermined work. 6. A work table provided at one or a plurality of locations of the orbital track and on which the predetermined work is performed by the work execution means, wherein the work table is rotatable. The mobile system according to claim 5, wherein 7. A work table provided at one or a plurality of locations on the orbit and on which the predetermined work is performed by the work execution means, wherein the work table has a radius of a rotating circle of the rotary drive mechanism. The mobile system according to claim 5, wherein the mobile system is movable along a direction. 8. The mobile system according to claim 1, wherein said rotary drive mechanism is a direct drive motor.