JP2001524893A - データを転写するシステム、および、その用途 - Google Patents
データを転写するシステム、および、その用途Info
- Publication number
- JP2001524893A JP2001524893A JP54864998A JP54864998A JP2001524893A JP 2001524893 A JP2001524893 A JP 2001524893A JP 54864998 A JP54864998 A JP 54864998A JP 54864998 A JP54864998 A JP 54864998A JP 2001524893 A JP2001524893 A JP 2001524893A
- Authority
- JP
- Japan
- Prior art keywords
- data
- transfer
- holder
- head
- transfer head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012546 transfer Methods 0.000 title claims abstract description 89
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000007639 printing Methods 0.000 claims description 46
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000013518 transcription Methods 0.000 claims 2
- 230000035897 transcription Effects 0.000 claims 2
- 238000007651 thermal printing Methods 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000007645 offset printing Methods 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 230000009528 severe injury Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/06—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using cylindrical picture-bearing surfaces, i.e. scanning a main-scanning line substantially perpendicular to the axis and lying in a curved cylindrical surface
- H04N1/0607—Scanning a concave surface, e.g. with internal drum type scanners
- H04N1/0614—Scanning a concave surface, e.g. with internal drum type scanners with main-scanning by rotation of the picture-bearing surface
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/06—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using cylindrical picture-bearing surfaces, i.e. scanning a main-scanning line substantially perpendicular to the axis and lying in a curved cylindrical surface
- H04N1/0607—Scanning a concave surface, e.g. with internal drum type scanners
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/06—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using cylindrical picture-bearing surfaces, i.e. scanning a main-scanning line substantially perpendicular to the axis and lying in a curved cylindrical surface
- H04N1/0607—Scanning a concave surface, e.g. with internal drum type scanners
- H04N1/0621—Scanning a concave surface, e.g. with internal drum type scanners using a picture-bearing surface stationary in the main-scanning direction
- H04N1/0628—Scanning a concave surface, e.g. with internal drum type scanners using a picture-bearing surface stationary in the main-scanning direction using several scanning heads circumferentially spaced from one another and circumferentially aligned, e.g. mounted on a rotating disk
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/06—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using cylindrical picture-bearing surfaces, i.e. scanning a main-scanning line substantially perpendicular to the axis and lying in a curved cylindrical surface
- H04N1/0664—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using cylindrical picture-bearing surfaces, i.e. scanning a main-scanning line substantially perpendicular to the axis and lying in a curved cylindrical surface with sub-scanning by translational movement of the picture-bearing surface
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/06—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using cylindrical picture-bearing surfaces, i.e. scanning a main-scanning line substantially perpendicular to the axis and lying in a curved cylindrical surface
- H04N1/0671—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using cylindrical picture-bearing surfaces, i.e. scanning a main-scanning line substantially perpendicular to the axis and lying in a curved cylindrical surface with sub-scanning by translational movement of the main-scanning components
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/19—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
- H04N1/195—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays the array comprising a two-dimensional array or a combination of two-dimensional arrays
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Electronic Switches (AREA)
- Laser Beam Printer (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Fax Reproducing Arrangements (AREA)
- Facsimile Scanning Arrangements (AREA)
- Optical Recording Or Reproduction (AREA)
- Plural Heterocyclic Compounds (AREA)
- Polymerisation Methods In General (AREA)
- Preparation Of Compounds By Using Micro-Organisms (AREA)
- Optical Communication System (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.データを板状のデータキャリア(23、23')に転写するためのシステム (21)であって、データキャリア(その、データを受け取るために設けられた 側がホールダーの円筒体軸線(29)に面している)を配置するために少なくと も部分的に内部円筒体として形づくられたホールダー(22、22')と、この 円筒体軸線を中心として回転させることができ、またデータをデータキャリア( 23)に転写するために、少なくとも1つの転写手段(24)を有する転写ヘッ ド(30)とを備え、さらに、ホールダー(22、22')と転写ヘッド(30 )を、円筒体軸線(29)の方向に相対的に移動させることもでき、しかも転写 ヘッド(30)または転写手段(24)の少なくとも1つの表面と、データキャ リア(23、23')との距離(d)を、データの転写中に、ホールダーの直径 の1/4よりも小さくするシステムであって、転写手段(24)が、マルチビー ム技法を用いて、データを転写する一配列の光源を備えていることを特徴とする システム。 2.転写ヘッド(30)または転写手段(24)の少なくとも1つの表面と、デ ータキャリア(23、23')との距離(d)が、データの転写中に、1cmよ りも短いことを特徴とする請求項1記載のシステム(21)。 3.転写ヘッド(30)が、ホールダー(22、22')の円筒体軸線(29) の方向に移動できるように配置されることを特徴とする請求項1または2記載の システム(21)。 4.ホールダー(22、22')が、その円筒体軸線(29)に沿って移動でき るように配置されることを特徴とする請求項1または2記載のシステム(21)。 5.この配列が、16個〜256個の光源から成ることを特徴とする前請求項の 1つに記載のシステム(21)。 6.この配列が、64個の光源から成ることを特徴とする前請求項の1つに記載 のシステム(21)。 7.64個の光源が、8列で配置されていることを特徴とする請求項6記載のシ ステム(21)。 8.転写ヘッド(30)が、データキャリア(23、23')上に、この配列の 光源を映し出す光学的手段を備えることを特徴とする前請求項の1つに記載のシ ステム(21)。 9.転写手段(24)が、半導体レーザ、とりわけレーザダイオードを備えるこ とを特徴とする前請求項の1つに記載のシステム(21)。 10.光源が、それぞれレーザダイオードと互いに影響し合う光伝導体の端部で 形成されることを特徴とする請求項9記載のシステム(21)。 11.各レーザダイオードを、それが冷やされるようにペルチエ要素に接続して いることを特徴とする請求項9または10記載のシステム(21)。 12.あらゆるレーザモジュールや、それらのレーザモジュールと関連のあるあ らゆる電力部分が、ホールダー(22、22')の円筒体軸線(29)を中心と して回転できるように、それらを転写ヘッド(30)上に配置することを特徴と する請求項9ないし11の1つに記載のシステム(21)。 13.データが、マルチビーム技法を用いて、データキャリア(23、23')に 転写されることを特徴とする請求項1ないし12の少なくとも1つに記載のシス テムを用いてのデータの転写。 14.イメージを印刷プレート(23、23')上にセットすることを特徴とす る請求項13記載のデータの転写。 15.イメージを感熱プレート(23、23')上にセットすることを特徴とす る請求項13または14記載のデータの転写。 16.各光源の最大強度が、データ転写の前、またはデータ転写中に、個々に測 定されることを特徴とする請求項13ないし15の1つに記載 のデータの転写。 17.しま模様を避けるために、あらゆる光源の最大強度を互いに突き合わせる ことを特徴とする請求項16記載のデータの転写。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH113297 | 1997-05-14 | ||
CH1132/97 | 1997-05-14 | ||
PCT/CH1998/000114 WO1998052345A1 (de) | 1997-05-14 | 1998-03-23 | System zum übertragen von daten und dessen verwendung |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2001524893A true JP2001524893A (ja) | 2001-12-04 |
Family
ID=4203251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54864998A Pending JP2001524893A (ja) | 1997-05-14 | 1998-03-23 | データを転写するシステム、および、その用途 |
Country Status (10)
Country | Link |
---|---|
US (1) | US6313862B1 (ja) |
EP (1) | EP0981895B1 (ja) |
JP (1) | JP2001524893A (ja) |
AT (1) | ATE213373T1 (ja) |
CA (1) | CA2289759C (ja) |
DE (1) | DE59803072D1 (ja) |
DK (1) | DK0981895T3 (ja) |
ES (1) | ES2172875T3 (ja) |
PT (1) | PT981895E (ja) |
WO (1) | WO1998052345A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009514011A (ja) * | 2005-10-26 | 2009-04-02 | マイクロニック レーザー システムズ アクチボラゲット | 書き込み装置及び書き込み方法 |
KR101017545B1 (ko) * | 2006-03-21 | 2011-02-28 | 엑스포제 홀딩 아게 | 내부 드럼 이미지 세터 |
US8122846B2 (en) | 2005-10-26 | 2012-02-28 | Micronic Mydata AB | Platforms, apparatuses, systems and methods for processing and analyzing substrates |
US9164373B2 (en) | 2013-03-12 | 2015-10-20 | Micronic Mydata AB | Method and device for writing photomasks with reduced mura errors |
US9459540B2 (en) | 2013-03-12 | 2016-10-04 | Mycronic AB | Mechanically produced alignment fiducial method and device |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19923679C1 (de) * | 1999-05-22 | 2001-03-08 | Krause Biagosch Gmbh | Belichtungsvorrichtung |
DE10319685A1 (de) | 2003-05-02 | 2004-11-18 | Werner Kammann Maschinenfabrik Gmbh | Vorrichtung zum Belichten von Druckplatten eines Druckwerkes |
DE102005036099A1 (de) * | 2005-08-01 | 2007-02-08 | Heidelberger Druckmaschinen Ag | Vorrichtung zur Temperierung eines Lasermodus in einen Druckplattenbelichter |
CN101639629B (zh) * | 2008-07-29 | 2012-01-04 | 深圳市大族激光科技股份有限公司 | 内鼓式成像装置 |
US8531648B2 (en) * | 2008-09-22 | 2013-09-10 | Asml Netherlands B.V. | Lithographic apparatus, programmable patterning device and lithographic method |
DK2196856T3 (da) * | 2008-12-09 | 2014-01-13 | Luescher Technologies Ag | System til transmission af data og dets anvendelse |
TWI448830B (zh) | 2010-02-09 | 2014-08-11 | Asml Netherlands Bv | 微影裝置及元件製造方法 |
NL2006256A (en) | 2010-02-23 | 2011-08-24 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
JP5584784B2 (ja) | 2010-02-25 | 2014-09-03 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置及びデバイス製造方法 |
NL2006385A (en) | 2010-04-12 | 2011-10-13 | Asml Netherlands Bv | Substrate handling apparatus and lithographic apparatus. |
NL2007789A (en) | 2010-12-08 | 2012-06-11 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
US9304401B2 (en) | 2011-03-29 | 2016-04-05 | Asml Netherlands B.V. | Measurement of the position of a radiation beam spot in lithography |
CN103597404B (zh) | 2011-04-08 | 2017-04-26 | Asml荷兰有限公司 | 光刻设备、可编程图案形成装置以及光刻方法 |
WO2012143188A1 (en) | 2011-04-21 | 2012-10-26 | Asml Netherlands B.V. | Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method |
EP2745174B1 (en) | 2011-08-18 | 2015-09-16 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
NL2009342A (en) | 2011-10-31 | 2013-05-07 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
NL2009797A (en) | 2011-11-29 | 2013-05-30 | Asml Netherlands Bv | Apparatus and method for converting a vector-based representation of a desired device pattern for a lithography apparatus, apparatus and method for providing data to a programmable patterning device, a lithography apparatus and a device manufacturing method. |
NL2009761A (en) | 2011-11-29 | 2013-05-30 | Asml Netherlands Bv | Lithographic apparatus, device manufacturing method and computer program. |
JP5840303B2 (ja) | 2011-12-05 | 2016-01-06 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置及びデバイス製造方法 |
NL2009817A (en) | 2011-12-06 | 2013-06-10 | Asml Netherlands Bv | A lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method of calculating setpoint data and a computer program. |
NL2009902A (en) | 2011-12-27 | 2013-07-01 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
US9354502B2 (en) | 2012-01-12 | 2016-05-31 | Asml Netherlands B.V. | Lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method for providing setpoint data and a computer program |
NL2010020A (en) | 2012-01-17 | 2013-07-18 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
JP6042457B2 (ja) | 2012-02-23 | 2016-12-14 | エーエスエムエル ネザーランズ ビー.ブイ. | デバイス、露光装置および放射誘導方法 |
NL2012052A (en) | 2013-01-29 | 2014-08-04 | Asml Netherlands Bv | A radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method. |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5412209B2 (ja) * | 1973-09-08 | 1979-05-21 | ||
DE3012394A1 (de) * | 1980-03-29 | 1981-10-01 | Triumph-Adler Aktiengesellschaft für Büro- und Informationstechnik, 8500 Nürnberg | Aufzeichnungsvorrichtung |
JPS57151933A (en) | 1981-03-16 | 1982-09-20 | Fuji Photo Film Co Ltd | Laser rotary printer |
DE4303225C2 (de) * | 1993-02-04 | 1996-08-14 | Siemens Nixdorf Inf Syst | Optischer Zeichengenerator für einen elektrografischen Drucker |
US5526142A (en) * | 1992-09-29 | 1996-06-11 | Intergraph Corporation | Scanner/plotter and rotatable drum for use therein |
US5699103A (en) * | 1994-12-20 | 1997-12-16 | Eastman Kodak Company | Method for producing a calibrated array of light-emitting diodes and apparatus including the calibrated array |
US5819661A (en) * | 1995-01-23 | 1998-10-13 | Presstek, Inc. | Method and apparatus for laser imaging of lithographic printing members by thermal non-ablative transfer |
US5738014A (en) | 1996-07-31 | 1998-04-14 | Agfa Division, Bayer Corporation | Method and apparatus for making lithographic printing plates in an automated computer to plate imaging system |
US6113346A (en) | 1996-07-31 | 2000-09-05 | Agfa Corporation | Method for loading and unloading a supply of plates in an automated plate handler |
US5788455A (en) | 1996-07-31 | 1998-08-04 | Agfa Divison, Bayer Corporation | Method and apparatus for picking and transporting plates in an automated platesetter |
US5809360A (en) | 1996-08-07 | 1998-09-15 | Agfa Division - Bayer Corporation | Cassette for storing and accessing plates within an automated plate handler |
US5655452A (en) | 1996-08-07 | 1997-08-12 | Agfa Division, Bayer Corp. | Method and apparatus for an automated plate handler with slip sheet removal mechanism |
US6084602A (en) | 1997-06-04 | 2000-07-04 | Agfa Corporation | Imaging system with high efficiency media loading |
-
1998
- 1998-03-23 AT AT98907801T patent/ATE213373T1/de not_active Application Discontinuation
- 1998-03-23 DE DE59803072T patent/DE59803072D1/de not_active Expired - Lifetime
- 1998-03-23 US US09/423,752 patent/US6313862B1/en not_active Expired - Fee Related
- 1998-03-23 WO PCT/CH1998/000114 patent/WO1998052345A1/de active IP Right Grant
- 1998-03-23 PT PT98907801T patent/PT981895E/pt unknown
- 1998-03-23 CA CA002289759A patent/CA2289759C/en not_active Expired - Fee Related
- 1998-03-23 JP JP54864998A patent/JP2001524893A/ja active Pending
- 1998-03-23 DK DK98907801T patent/DK0981895T3/da active
- 1998-03-23 ES ES98907801T patent/ES2172875T3/es not_active Expired - Lifetime
- 1998-03-23 EP EP98907801A patent/EP0981895B1/de not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009514011A (ja) * | 2005-10-26 | 2009-04-02 | マイクロニック レーザー システムズ アクチボラゲット | 書き込み装置及び書き込み方法 |
US8102410B2 (en) | 2005-10-26 | 2012-01-24 | Micronic Mydata AB | Writing apparatuses and methods |
US8122846B2 (en) | 2005-10-26 | 2012-02-28 | Micronic Mydata AB | Platforms, apparatuses, systems and methods for processing and analyzing substrates |
US8822879B2 (en) | 2005-10-26 | 2014-09-02 | Mycronic AB | Writing apparatuses and methods |
KR101017545B1 (ko) * | 2006-03-21 | 2011-02-28 | 엑스포제 홀딩 아게 | 내부 드럼 이미지 세터 |
US9164373B2 (en) | 2013-03-12 | 2015-10-20 | Micronic Mydata AB | Method and device for writing photomasks with reduced mura errors |
US9459540B2 (en) | 2013-03-12 | 2016-10-04 | Mycronic AB | Mechanically produced alignment fiducial method and device |
Also Published As
Publication number | Publication date |
---|---|
CA2289759A1 (en) | 1998-11-19 |
ATE213373T1 (de) | 2002-02-15 |
EP0981895A1 (de) | 2000-03-01 |
CA2289759C (en) | 2007-03-13 |
WO1998052345A1 (de) | 1998-11-19 |
DE59803072D1 (de) | 2002-03-21 |
DK0981895T3 (da) | 2002-05-27 |
US6313862B1 (en) | 2001-11-06 |
ES2172875T3 (es) | 2002-10-01 |
PT981895E (pt) | 2002-07-31 |
EP0981895B1 (de) | 2002-02-13 |
HK1029475A1 (en) | 2001-03-30 |
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