JP2001343611A - Polarization illumination device and projection type display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an illumination device which can lessen illumination unevenness and a projection type display device using the same. SOLUTION: This device has a light source 1, a rod integrator 2 which is made incident with the light from the light source 1 and emits the light, a relay lens 11 which is made incident with the exit light from the rod integrator 2 and emits the light and a polarized light converter 3 which is made incident with the exit light from the relay lens 11. The polarized light converter 3 has a polarization beam splitter array formed by laminating plural polarization beam splitters 31 to an array form and half-wave phase plates 32 on the prescribed polarization beam splitter exit surfaces among the plural polarization beam splitters 31.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lighting device and a projection display device using the same.

[0002]

2. Description of the Related Art Illumination light emitted from a light source and converted into single polarized light is guided to a light valve to illuminate the light valve, and a modulated light of the light emitted from the light valve is analyzed by an analysis optical system. There is known a projection-type display device that takes out light from a light source, enters a projection optical system, and projects the light on a screen.
As an illumination device for illuminating a light valve used in this projection display device, the one shown in FIG. 9 is well known.

A conventional technique will be described with reference to a configuration diagram shown in FIG. The light source 101 includes a lamp 101a and a concave mirror having a parabolic shape. The light source 101 emits a substantially parallel light beam as a light source light beam. When an elliptical mirror or a spherical mirror is used as a concave mirror, a light source light beam is converted into a substantially parallel light beam using a shaping optical system.

A light source light beam emitted from the light source 101 enters a first lens plate 102 on which a plurality of first lenses 102a are arranged in a plane, and is split into a plurality of light beams defined by the outer shape of the lens 102a. . The outer shapes of the lenses 102a are all the same, and are proportional to the outer shape of the light valve 105 that is the object to be illuminated.

A second lens 103a is arranged at each focal position of the lens 102a of the first lens plate 102. Each second lens 103a is arranged in a plane at a position facing the first lens 102a. These second lenses 103a constitute a second lens plate 103.

[0006] With the above-described configuration, the light source luminous flux incident on each of the first lens plates 102a constituting the first lens plate 102 corresponds to the corresponding second lens plate 103a.
The light is condensed on the top to form a bright spot. Second lens 10
The light emitted from the bright spot on 3a illuminates the light valve 105 via the condenser lens 104. That is, the light source 10
The light beam emitted from the light source 1 is divided into the number of the first lenses 102a of the first lens plate 102, and the respective divided light beams are superimposed on the light valve 105 by the corresponding second lens 103a to form a light valve. 105 is illuminated.

[0007] The illumination device according to the above is incorporated in a projection display device, and the illumination light incident on the light valve 105 modulates the light valve 105 with an image signal.
Only the modulated light out of the light emitted from the light valve 105 is detected and extracted, and is projected on a screen by a projection optical system.

The above description is of the simplest configuration using a single light valve. On the other hand, color projection using a light valve for each of R, G, and B lights is described. In the type display device, in the configuration diagram of FIG.
The color separation is performed by a color separation optical system that separates the light into the three primary color lights B. Each color light is made incident on a light valve arranged for each color light, and modulated and emitted by an image signal of each color light, thereby modulating each color light. Analyze the light and take it out,
The colors are combined by a color combining optical system, and the combined light is projected by a projection lens.

[0009]

In the above-described light valve lighting device, the lens 102a of the first lens plate 102 is provided.
And the light valve 105 can be made uniform and high-luminance. However, in actuality, it has been found that in a projection display device employing the illumination device, illumination unevenness occurs in a projected image. The present inventors have studied the above-described lighting device, and have first and second lens plates 102 and 10 constituting the lighting device.
It has been found that, in the lighting device having the configuration of No. 3, illumination unevenness occurs due to an error in superimposition of the superimposed illumination by each lens.

Each of the plurality of first lenses 102a constituting the lens plate 102 and the light valve 105 have a conjugate relationship with the second lens 103a of the second lens plate 103 provided corresponding to the lens 102a. A point on the first lens 103a must be accurately imaged on the light valve 105 by the second lens 103a. Usually, the first lens 102a of the first lens plate 102 and the second lens plate 103a of the second lens plate 103 are formed by a glass press method or plastic molding, but all the lenses 102a and the lenses 103a have an ideal shape as designed. However, since the image is formed with an error, the image forming position has an error. For this reason, each lens plate 103a cannot accurately illuminate the entire light valve 105 to its peripheral portion, and especially in the peripheral portion, the illumination becomes non-uniform, and illumination unevenness occurs.

In order to remove the illumination unevenness in the peripheral portion, the outer peripheral portion of the light valve 105 is protruded beyond the outer periphery of the light valve 105 and the outer periphery thereof is discarded. While it may not contribute to light valve illumination, doing so would compromise high brightness illumination.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an illumination device capable of reducing illumination unevenness and a projection display device using the same.

[0013]

SUMMARY OF THE INVENTION The present inventors consider that the above problem can be solved by using a glass rod having a cross-sectional shape proportional to the light valve for uniform illumination of the light valve. Was. Experiments have shown that uniform illumination can be achieved if the cross-sectional shape of the glass rod is accurately formed in proportion to the outer shape of the light valve.

However, the light incident on the light valve 105 is preferably not linearly polarized light but linearly polarized light. This is because, when the light valve is a transmission type liquid crystal light valve, the light absorption by the polarizing plate arranged on the incident side is reduced to prevent the polarizing plate from being damaged by heat generation, and the reflection type liquid crystal light valve is used. In the case of a valve, it is to prevent scattered light due to discarded polarized light by the polarization beam splitter for polarization separation of the light valve.
Both are more advantageous for high brightness illumination.

The present invention eliminates the drawbacks of the prior art using the lens plate, and can realize uniform illumination with single polarized light which can emit single polarized light as illumination light. The invention according to claim 1 is a light source, a rod integrator that receives and emits light from the light source, a relay lens that receives and emits light emitted from the rod integrator, and a light that emerges from the relay lens. A polarization conversion device, wherein the polarization conversion device includes a polarization beam splitter array in which a plurality of polarization beam splitters are stacked in an array, and a predetermined polarization beam splitter emission surface of the plurality of polarization beam splitters. A two-wavelength phase plate is provided.

According to a second aspect of the present invention, there is provided the polarized light illuminating apparatus according to the first aspect, further comprising a condenser lens for receiving light emitted from the polarization converter.

According to a third aspect of the present invention, in the polarized light illuminating apparatus according to the first or second aspect, the polarized beam splitter array forms a plurality of light source images formed by the rod integrator by the relay lens. It is characterized by being arranged at an image position.

According to a fourth aspect of the present invention, there is provided the polarized light illuminating apparatus according to the second aspect, wherein the condensing lens condenses the light emitted from the polarization conversion device onto an illuminated object. Polarized lighting device.

According to a fifth aspect of the present invention, there is provided the polarized light illuminating apparatus according to the fourth aspect, wherein the principal ray has a telecentric characteristic between the condenser lens and the illuminated object.

According to a sixth aspect of the present invention, there is provided the polarized light illuminating apparatus according to the second aspect, further comprising a field lens for receiving the light emitted from the condenser lens, and applying the light emitted from the field lens to an object to be illuminated. It is characterized by irradiation.

According to a seventh aspect of the present invention, there is provided the polarized light illuminating apparatus according to the sixth aspect, wherein the principal ray has a telecentric characteristic between the field lens and the illuminated object.

The invention of claim 8 provides the polarized light illuminating device of claim 1 and the light emitted from the polarized light illuminating device,
A color separation optical system that separates the light into (red) light, G (green) light, and B (blue) light, a light valve for R light that receives and emits the R light, and a G light that receives and emits the G light. A light valve for
A light valve for B light that receives and emits the B light, a light valve for R light, a light valve for G light,
A color combining optical system for combining light emitted from the light valve for light and a projection lens for projecting combined light from the color combining optical system are provided.

According to a ninth aspect of the present invention, in the projection display device according to the eighth aspect, the R light light valve, the G light light valve, and the B light light valve are:
Each of them is a reflection type light valve.

According to a tenth aspect of the present invention, there is provided the projection type display device according to the eighth aspect, wherein the R light light valve, the G light light valve, and the B light light valve are each a transmission type light valve. It is a valve.

[0025] According to an eleventh aspect of the present invention, the polarized light illuminating device according to the first aspect and the light emitted from the polarized light illuminating device are R (red) light, G (green) light, and B (blue) light. An optical system that splits the light into R, a reflective light valve for R light that receives and emits the R light, a reflective light valve for G light that receives and emits the G light, and a B that receives and emits the B light. A light-reflecting light valve, an analyzing polarization beam splitter, and a projection lens, wherein the optical system includes a light valve for the R light, a light valve for the G light, and a light valve for the B light. The emitted light is combined, the combined light is emitted to the polarization beam splitter for analysis, and the light analyzed by the polarization beam splitter is projected by the projection lens.

According to a twelfth aspect of the present invention, there is provided the projection display device according to the eighth, ninth, tenth, or eleventh aspect, wherein the polarized light illuminating device is configured to emit light from the polarized light converting device. And a condensing lens for incident light.

According to a thirteenth aspect of the present invention, in the projection type display device according to the eighth, ninth or tenth aspect, the polarized light illuminating device collects light emitted from the polarized light converting device. An optical lens is provided, and a field lens is provided in an optical path between the condenser lens and the light valve for each color light.

[0028]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment of Polarized Lighting Apparatus) FIG.
FIG. 1 is a configuration diagram of a polarized light illumination device according to a first embodiment of the present invention. A light source light emitted from a light source 1 composed of a lamp and a concave mirror of an elliptical mirror is used for a rod integrator 2.
Is condensed and incident on the incident surface 2a. The lamp is arranged at a first focal point of the elliptical mirror close to the elliptical mirror, and the position of the incident surface of the rod integrator 2 matches the position of the second focal point far from the elliptical mirror.

The sectional shape (incident surface shape) of the rod integrator 2 in a plane perpendicular to its optical axis is a proportionally reduced shape of the light valve 5 which is an object to be illuminated. Since the light valve 5 is usually rectangular, the cross-sectional shape of the rod integrator 2 is a rectangular shape proportionally reduced from the above. The integrator 2 is formed of a transparent optical member, for example, a transparent glass member or a fused quartz glass member.

The incident surface 2a is provided inside the rod integrator 2.
The incident light which has entered from above is repeatedly subjected to total internal reflection, propagates, reaches the emission surface 2b, and is emitted from the emission surface 2b. Here, the emission surface 2b forms a uniform surface light source.
In other words, the exit surface 2b is illuminated in a superimposed manner by light from virtual images of a plurality of light sources formed at the position of the incident surface due to internal reflection of the rod integrator 2.

The light exiting from the exit surface 2b of the rod integrator 2 passes through the relay lens 11 and enters the polarization converter 3
Is incident on. The polarization conversion device 3 is a polarization beam splitter array having a configuration in which the polarization beam splitters 31 are arranged in an array shape.
The half-wave phase plate 32 is provided.

The polarization converter 3 converts the incident light into S-polarized light. The light converted into S-polarized light by the polarization converter 3 and emitted is incident on the polarization beam splitter 4 via the condenser lens 12. I do. And the polarization beam splitter 4
Is polarized because it is S-polarized light, and illuminates the light valve 5 to be illuminated.

The configuration of the polarized light illuminating device of the present embodiment has been described above. Further, the polarized light illuminating device will be described in detail with reference to a ray diagram of FIG. In addition, in FIG.
Are omitted.

The light source light condensed substantially at the center of the incident surface 2a of the rod integrator 2 forms a point light source image a at the incident point, and travels in anticipation of the light exit surface 2b among the light beams emitted from the light source image a. It is assumed that the light beam is 11, and the two light beams which travel once after being totally reflected on the inner surface and are projected in view of the emission surface 2b are 12. If the rod integrator 2 is longer, the total internal reflection action by the inner surface is not only one time, but in the present embodiment, it is assumed that the rod integrator 2 is formed to have a length that generates only one total internal reflection. .

In the case of the above description, it can be considered that light is emitted from the virtual image point light source image a 'and the virtual image point light source image a "for the two light beams 12 as shown in the figure. This virtual image of the light source is formed at a target position on the extension surface that constitutes the incident surface of the rod integrator.

That is, in other words, the light emitted from the emission surface 2b of the rod integrator 2 becomes the light source images a and
It can be said that the light emitted from the three light sources a ′ and a ″ is superimposed, and the surface light source is more uniformly averaged.

The relay lens 11 has a function of forming a light source image of the light sources a, a 'and a "as a new light source image on a plurality of polarizing beam splitters 31 constituting the polarizing device 3. In the present embodiment, polarized light is used. Beam splitter 31
Is the number of light source images (in the present embodiment, on the plane parallel to the paper surface and including the optical axis, 3 as a, a ′, a ″ as described above).
), Which is twice as large as 6 pcs. The polarizing beam splitters 31a, 31b, 31c, 31d, 31e and 31f are arranged from the top of the paper, and the polarization splitting units are all arranged in parallel so as to have an inclination of 45 degrees with respect to the optical axis. Then, a new light source image of the light source images a, a ′, and a ″ by the lens 11 is formed at every other position of the polarization beam splitters 31 constituting the polarization beam splitter array 3.

In the present embodiment, the light from the light source image a ″ is condensed by the relay lens 11 to a substantially central portion of the polarization beam splitter 31 a disposed at the top of the sheet of the polarization beam splitter 31 constituting the polarization device 3. And the image of the light source image a is the third polarization beam splitter 31 from the top.
The light source image a 'is formed at the substantially central portion of the polarization beam splitter 31e at the fifth polarizing beam splitter 31e from the top.

The polarization beam splitters 31a, 31c, 3
Among the light emitted from the light source image of 1e, the P-polarized light that has passed through the polarization splitter of each polarization beam splitter is a half-wavelength phase plate 32 disposed on the emission surface of each polarization beam splitter.
Is converted into S-polarized light and proceeds. On the other hand, the S-polarized light reflected by the polarization beam splitters of the respective polarization beam splitters enters the adjacent polarization beam splitters 31b, 31d and 31f, is reflected by the polarization beam splitters of these polarization beam splitters, and is emitted as S-polarized light. You. As described above, all the light is converted into S-polarized light and the polarization device 3 can be emitted.

The S-polarized light emitted from the polarization device 3 is incident on the polarization beam splitter 4 through the condenser lens 12,
Since the S-polarized light is also S-polarized light to the polarization splitting section of the polarization beam splitter 4, the S-polarized light is reflected and emitted by the polarization splitting section to illuminate the light valve 5.

In this embodiment, the illumination by the S-polarized light conversion device has been described. However, the present invention is not limited to the S-polarized light. When it is desired to illuminate with P-polarized light, it is necessary to convert the light into P-polarized light. In this case, the half-wavelength phase plate 3 formed on the exit surface of the polarizing beam splitter 31 of the polarizer 3 is used.
2, the polarization beam splitters 31b, 31d,
What is necessary is just to make it the structure formed in the emission surface of 31f. In that case, the position of the light valve 5 is
Is the position shown at the position 5 ′ on the conjugate plane.

FIG. 3 is a configuration diagram of a polarized light illuminating device according to a second embodiment of the present invention. FIG. 3 shows an embodiment of a configuration in which telecentricity with respect to the light valve 5 and the polarization beam splitter 4 of the embodiment of FIGS. 1 and 2 is ensured.

In FIG. 2, the light beam 11 (principal light beam) is not parallel to the optical axis in the polarization beam splitter 4 and the light valve 5, and does not satisfy the telecentricity. Although the polarization splitting film forming the polarization splitting portion of the polarization beam splitter 4 has polarization characteristics depending on the incident angle, and the liquid crystal layer forming the modulation layer of the light valve 5 also has angle characteristics depending on the incident angle. Therefore, it is desirable for the principal ray to enter the film at the same angle. That is, it is desirable that the light be incident on the polarization separation film at an incident angle of 45 degrees and on the liquid crystal layer at an angle of 0 degrees so that the light is polarized with respect to the optical axis.

The configuration shown in FIG. 3 is a configuration in which the light beam 11 becomes a light beam parallel to the optical axis with respect to the light valve 5 and the polarizing beam splitter 4, that is, the telecentricity is satisfied.

The difference from FIG. 2 is that the field lens 13 is arranged immediately before the incident surface of the polarizing beam splitter 4. This field lens 13
Is arranged, the principal ray 11 can be made parallel to the optical axis with respect to the light valve 5 and the polarizing beam splitter 4, so that telecentric illumination can be achieved.

FIG. 4 is a configuration diagram of a polarized light illuminating device according to a third embodiment of the present invention. FIG. 4 shows an embodiment that realizes telecentric illumination for a light valve and a polarizing beam splitter in a configuration different from that of FIG. In the second embodiment, the converging lens 12 and the field lens 13 are used to secure the main beam telecentric characteristic to the polarization beam splitter 4 and the light valve 5, but in this embodiment, the converging lens 1
By using only 4 in this embodiment, telecentricity was ensured.

In the present embodiment, FIG.
Assuming that the numerical aperture (NA) of the illumination to the polarizing device 3 is the same as in the case shown in FIG. 1, the size of the polarizing beam splitter 4 needs to be large, but the telecentricity of the principal ray is achieved. There is the advantage that only one lens is needed to do this. (Embodiment of Projection Display Apparatus) FIG. 5 is a configuration diagram of a projection display apparatus according to a fourth embodiment of the present invention, and FIG. 6 is a ray diagram of the embodiment.

Hereinafter, the projection type display device of this embodiment will be described with reference to FIGS. In the figures, the same reference numerals are used for the same members as those used in FIGS. 1 to 4. In the present embodiment, the polarized light illuminating device disclosed in FIGS. 1 and 2 is used.

The light source light emitted from the light source 1 is focused on the incident surface 2a of the rod integrator 2, enters the integrator 2, and is emitted from the emission surface 2b using the surface as a planar light source. Light emitted from the emission surface 2b of the rod integrator 2 enters the polarization conversion device 3 via the relay lens 11. The polarization conversion device 3 includes a polarization beam splitter array in which the polarization beam splitters 31a to 31f are formed on an array and the polarization beam splitter 31.
a, 1c arranged on the exit surface of 31c and 31e
And a half-wavelength phase plate 32. The S-polarized light emitted from the polarization conversion device 3 is incident on the polarization beam splitter 41 via the condenser lens 12.

The S-polarized light that has entered the polarization beam splitter 41 has a direction in which the polarization separation section of the polarization beam splitter 41 reflects the incident S-polarized light. Inject from 41.

The S-polarized light emitted from the polarization beam splitter 41 is incident on a color separation / combination compound prism arranged with a gap between the exit surface of the polarization beam splitter 41 and the B-polarized light.
It is separated into (blue) light, R (red) light and G (green) light.

The color separation compound prism is composed of prism members 61, 62 and 63 having a substantially triangular prism shape. The light emitted from the polarization beam splitter 41 enters from the incident surface 61a of the prism member 61 and proceeds as it is, and the B light is reflected by the B light reflecting dichroic film formed on the surface 61b. The R and G lights pass through as they are, and enter the prism member 62 from the incident surface 62a via the gap. The B light travels after being totally reflected by the incident surface 61a, and is emitted from the emission surface 61c.

The R and G lights travel through the prism member 62, and the R light is reflected by the R light reflecting dichroic film formed on the surface 62b, and the G light travels as it is. The G light is transmitted from the incident surface 63a of the prism member 63 bonded to the R light reflecting dichroic film with an adhesive, from the prism member 6
3 is incident. The R light travels under the total reflection at the incident surface 63a, and is emitted from the emission surface 62c.
The G light travels through the prism member 63, travels by being totally reflected by the surface 63b, and is emitted from the emission surface 63c.

The B light, the R light and the G light emitted from the emission surfaces 61c, 62c and 63c of the prism members 61, 62 and 63 respectively receive the liquid crystal reflection type light valves 5B for each color light arranged near each emission surface. The light is incident on 5R and 5G as illumination light.

Each color light reflection type light valve 5B, 5R,
The light incident on the 5G is modulated by each color signal, and the modulated light is reflected and emitted as P-polarized light, and the unmodulated light is reflected and emitted as S-polarized light.

Each color light reflective light valve 5B, 5R,
The light that has exited 5G travels in the same optical axis in the direction opposite to the incident light, exits from the surface 61a of the prism 61 as color-combined light, and reenters the polarization beam splitter 41. That is, the composite prism composed of the prisms 61, 62 and 63 has the function of the color separating optical system as well as the function of the color separating optical system.

The combined light incident on the polarization beam splitter 41 is modulated light (P) transmitted through the polarization splitter by the polarization splitter.
(Polarized light) and unmodulated light (S-polarized light) that is reflected and discarded (analyzed).

The detected modulated light (P-polarized light) enters the projection lens 7 and is projected as a full-color image on a screen (not shown). The above is the description of the projection type display device of the present embodiment, and a ray diagram of the device will be further described with reference to FIG. In FIG. 6, as described with reference to FIG. 2, when cut along a plane including the optical axis that is parallel to the paper surface, the light source is a real point light source on the incident surface of the rod integrator 2 and an extension plane thereof. Consider a case in which a and a ″ can be formed with a and a point light source a ′ of a virtual image. As described above, the light emitted from the plane 2b is superimposed on the light emitted from the light sources a, a ′ and a ′. Since these point light sources can be handled in the same manner as described above, the point light source is formed into an image on the polarization beam splitter of the polarization conversion device 3 by the relay lens 11.

As described above, at the position including the optical axis on the plane parallel to the paper surface of FIG. 6, the light sources are a, a ', and a''.
Therefore, the polarization beam splitters 31 constituting the polarization beam splitter array have six 31a to 31f.
With respect to the imaging position, the image of the light source a is formed on the polarization beam splitter 31c, the image of the light source a 'is formed on the polarization beam splitter 31e, and the image of the light source a''is formed on the polarization beam splitter 31a. It is.

The light emitted from each image formed on the polarization beam splitter and transmitted through the polarization separation portion of the polarization beam splitter becomes P-polarized light, but is formed on the exit surface of the polarization beam splitter. The half-wave phase plate 32 converts the light into S-polarized light. On the other hand, the S-polarized light reflected by the polarization splitter enters the adjacent polarization beam splitter from the side, and is reflected and emitted by the polarization splitter. Since no 波長 wavelength phase plate is provided on the emission surface, the light is emitted as S-polarized light as it is. As described above, the light from the light source is converted into S-polarized light and exits from the polarization converter 3.

The S-polarized light emitted from the polarization conversion device 3 is condensed by the condenser lens 12 to the light valves 5R, 5G, and 5B for the respective color lights via the polarization beam splitter 41 and the above-described color separation compound prism. .

As described above, the shape of the exit surface 2b of the rod integrator 2 is determined by the light valves 5R, 5R, which are the objects to be illuminated.
G and 5B are formed in a proportional shape to the shape.
The light valve emission surface and the light valve 5R for each color light,
5G and 5B have a conjugate relationship with the condenser lens 12,
Condensing lens 12 and light valves for each color light 5R, 5G, 5
A configuration is provided in which a color separation compound prism is arranged in addition to the polarization beam splitter 41 between B and B. From this, in addition to the effect that each color light light valve 5R, 5G, 5B can be efficiently illuminated by each color light, it is also converted in advance into a single polarization conversion by the polarization conversion device 3,
It is possible to illuminate the light valves 5R, 5G, and 5B for each color light with high-brightness single polarized light.

In FIG. 6, only the G light of the R, G, and B light that is color-separated by the color separation compound prism is described as the light rays after the condenser lens 12. further,
Of the light emitted from the polarization conversion device 3, only the S-polarized light that is transmitted and polarized by the polarization beam splitter at the position where the image is formed is described. Furthermore, a light valve 5 for each color light
The modulated light of the combined light, which is emitted from R, 5G, and 5B, passes through the polarizing beam splitter 41 and is projected on the screen by the projection lens 7 as described above.
These drawings are also omitted.

As described above, according to the present embodiment,
Since uniform, high-brightness, and single-polarization illumination can be performed on a plurality of light valves, a projection display device capable of projecting a uniform and high-brightness projection image as a projection image can be provided.

The configuration of the projection type display device used in this embodiment is such that a plurality of prisms are used as a color separation / synthesis optical system. However, the projection type display device employs a polarization illumination device according to the present invention. The present invention is not limited to this. For example, an optical system having a configuration in which a plurality of dichroic mirrors are arranged on the optical axis may be adopted as an optical system that also serves as color separation and synthesis optics, and a projection having the same effect A type display device can be provided.

FIG. 7 is a configuration diagram of a projection type display device according to a fifth embodiment of the present invention, and FIG. 8 is a ray diagram of the same embodiment. The projection display device of the present embodiment will be described with reference to FIGS. Note that this embodiment corresponds to FIG.
Is a projection type display device employing the polarized light illuminating device. In addition, the same components are denoted by the same reference numerals.

In FIG. 7, the light source light emitted from the light source 1 is focused on the incident surface 2a of the rod integrator 2,
The exit surface 2b of the rod integrator 2 is a flat light source. Light emitted from the rod integrator emission surface 2b is composed of a polarization beam splitter array in which a plurality of polarization beam splitters 31 are arranged in an array via the relay lens 11, and a half-wave phase plate 32 formed on a predetermined surface. The light is converted into single polarized light (S-polarized light) via the polarization converter 3. The S-polarized light enters the cross dichroic mirror via the condensing lens 12 in which the dichroic mirror 81B having the B light reflection characteristic and the dichroic mirror 81RG having the R light and G light reflection characteristics are arranged orthogonal to each other. Then, the light is color-separated into B light traveling in directions opposite to each other and perpendicular to the incident direction, and mixed light of R light and G light. The B light travels by bending the traveling direction by the bending mirror 82a, and is incident on the polarization beam splitter 42B via the field lens 13B.

The mixed light of the R light and the G light travels by changing the traveling direction by the bending mirror 82b, and is reflected by the G light reflecting dichroic mirror 81G and travels by changing the traveling direction. It is color-separated into R light traveling in the direction. As described above, the dichroic mirror 81B
The dichroic mirror 81G and the cross dichroic mirror consisting of the mirror 81RG and the mirror 81RG constitute a color separation optical system.

The G light and the R light decomposed by the dichroic mirror 81G are respectively applied to the field lenses 13G and 13R.
Through the polarization beam splitters 42G and 42R, respectively.
Is incident on.

Each of the polarizing beam splitters 42B, 42G,
The polarized light incident on 42R is S-polarized light, and the polarization splitters of the polarization beam splitters 42B, 42G, and 42R are:
It is arranged in a direction to reflect S-polarized light. The respective color lights reflected by the polarization splitting unit are respectively incident on the reflection type light valves 5B, 5G, and 5R, are modulated by the respective color signals, and are a mixed light of the P-polarized light as the modulated light and the S-polarized light as the unmodulated light. Are reflected and emitted, and are incident on the polarization beam splitters 42B, 42G, and 42R for the respective color lights from opposite directions. The modulated light is detected as transmitted light, and the unmodulated light is reflected and discarded.

Each color-modulated light is incident on the cross dichroic prism 9 constituting the color synthesizing optical system from a different incident surface, and the R light reflecting dichroic film 9R and the B light reflecting dichroic film 9 arranged inside at right angles to each other.
B achieves color synthesis, and the synthesized light is emitted from the exit surface of the cross dichroic prism 9 which is not the entrance surface of each color, enters the projection lens 7, and is projected as a full-color image on a screen (not shown).

In the ray diagram of FIG.
For the subsequent light rays, only the B light of the R light, the G light, and the B light is described, and other colors are omitted. Since the configurations of the rod integrator 2 and the polarization conversion device 3 are the same as described above, the description will be omitted.

The configuration of the polarized light illuminating device used in the present embodiment is different from that of the polarized light illuminating device used in the fourth embodiment in that the polarization beam splitters 42B, 42G,
A field lens 13 is provided near each of the 2R incidence surfaces.
The arrangement of R, 13G and 13B is different. By arranging the feed lenses 13R, 13G, and 13B, the telecentricity of the principal ray (corresponding to the ray from the light source a in FIG. 8) can be improved by the polarization beam splitters 42B and 42.
G, 42R and the light valves 5B, 5G, 5R.

The principal rays reflected and emitted from each of the light valves 5B, 5G, 5R are left as they are (while keeping the rays parallel to the optical axis) as the polarization beam splitters 42B, 42G, 4G.
The light travels through the 2R, similarly travels through the cross dichroic prism 9, is synthesized, and is incident on the projection lens 7.
The projection lens 7 has an aperture stop inside, and has a front group lens on the front side (the cross dichroic prism 9 side) of the aperture stop and a rear group lens arranged on the screen side. The front stop has a telecentric configuration in which the aperture stop is arranged at the focal position of the front lens group. As described above, the principal ray is incident on the projection lens 7 as a ray parallel to the optical axis. However, the principal ray defined as a ray passing through the center of the aperture stop of the projection lens coincides with the principal ray, and the The principal ray defined by the aperture stop of the lens 7 can maintain telecentricity with respect to the cross dichroic prism 9, the light valves 5B, 5G, and 5R for the respective color lights and the polarization beam splitters 42B, 42G, and 42R.

As described above, in the present embodiment, a polarization illuminator in which the rod integrator 2 and the polarization converter 3 are disposed is used, and the principal rays are further polarized by the polarization beam splitters 42B, 42G, 42R and the light valve 5B. In the cross dichroic prism 9 which is a color synthesizing optical system, 5G, 5R, and the color synthesizing optical system, it is possible to achieve an effect that a projected image is uniform and has a high luminance and further reduces color shading.

Although the liquid crystal light valve used in the projection type light valve used in the above embodiment is a reflection type liquid crystal light valve, the invention is not limited to this. The projection type light valve using a transmission type light valve is used. It can also be used for display devices.

In such a case, the transmission type light valve usually has a configuration in which a liquid crystal panel is sandwiched between polarizing plates constituting crossed Nicols, and a single illumination light formed by the polarized light illuminating device according to the present invention is subjected to color separation. Color separation by optical system,
What is necessary is just to make it the structure which is made to inject into the said transmission type light valve arrange | positioned for every color light, and to transmit the transmission analysis light by a color synthesis optical system. As described in the embodiment, since uniform and high-brightness illumination with a single polarization to the light valve can be performed, uniform and high-brightness can be achieved in a projection image.

The polarized light illuminating apparatus of the present invention is not limited to the apparatus used for illuminating the above-described light valve for a projector, but may be used for illuminating a reticle of an exposure apparatus using polarized light. Needless to say, it can also be adopted.

[0079]

As described above, according to the first to thirteenth aspects of the present invention, a rod light integrator can produce a uniformly averaged surface light source.
Illumination light of a single polarization can be created. Therefore, uniform illumination of single polarization can be realized, and a projection display device can project a uniform and high-brightness projection image.

According to the fifth and seventh aspects of the present invention, it is possible to eliminate the influence of the angle characteristic depending on the incident angle with respect to the modulation layer of the light valve.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a polarized light illuminating device according to a first embodiment of the present invention.

FIG. 2 is a light ray diagram of the polarized light illuminating device according to the first embodiment of the present invention.

FIG. 3 is a ray diagram of a polarized light illuminating device according to a second embodiment of the present invention.

FIG. 4 is a ray diagram of a polarized light illuminating device according to a third embodiment of the present invention.

FIG. 5 is a configuration diagram of a projection display device according to a fourth embodiment of the present invention.

FIG. 6 is a ray diagram of a projection display device according to a fourth embodiment of the present invention.

FIG. 7 is a configuration diagram of a projection display device according to a fifth embodiment of the present invention.

FIG. 8 is a ray diagram of a projection display according to a fifth embodiment of the present invention.

FIG. 9 is a configuration diagram of a conventional lighting device.

[Explanation of symbols]

1: light source, 2: rod integrator, 3: polarization converter, 4: polarization beam splitter, 5, 5B, 5R, 5
G: light valve, 7: projection lens, 9: cross dichroic prism, 11: relay lens, 12: condenser lens, 13, 13B, 13R, 13G: field lens, 31: polarization beam splitter, 32: 1/2 wavelength Phase plate, 41: polarizing beam splitter, 42B, 42R,
42B: polarizing beam splitter, 61, 62, 63: prism member, 81B, 81RG, 81G: dichroic mirror, 82a, 82b: bending mirror.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G09F 9/00 360 H04N 5/66 102Z 5G435 H04N 5/66 102 5/74 A 5/74 9/31 A 9/31 C G02F 1/1335 530 F-term (reference) 2H088 EA14 EA15 EA16 HA13 HA15 HA20 HA24 HA25 HA28 MA04 2H091 FA05X FA05Z FA10Z FA21X FA21Z FA26X FA26Z FA41X FA41Z FD01 LA18 2H099 AA12 BA09 CA02 A08 BA06 EA51 5C060 BA03 BA04 BA09 BB13 BC05 BD02 GA01 GA02 GB04 GB05 HC07 HC09 HC12 HC16 HC22 HD01 JA19 5G435 AA03 AA04 BB12 BB15 BB16 BB17 CC09 CC12 DD05 EE22 EE26 FF05 FF07 FF08 GG02 GG03 GG04 GG09 GG23

Claims (13)

[Claims] 1. A light source, a rod integrator that receives and emits light from the light source, a relay lens that receives and emits light from the rod integrator, and a polarization converter that receives light emitted from the relay lens A polarization beam splitter array in which a plurality of polarization beam splitters are stacked in an array, and a half wavelength on a predetermined polarization beam splitter emission surface of the plurality of polarization beam splitters. A polarized light illumination device comprising a phase plate. 2. The polarized light illuminating device according to claim 1, further comprising a condenser lens for receiving light emitted from the polarization converter. 3. The polarization illuminating device according to claim 1, wherein the polarization beam splitter array is arranged at a position where a plurality of light source images formed by the rod integrator are formed by the relay lens. Polarized light illumination device. 4. The polarized light illuminating device according to claim 2, wherein the condenser lens condenses the light emitted from the polarization conversion device onto an object to be illuminated. 5. The polarized light illuminating device according to claim 4, wherein the principal ray has a telecentric characteristic between the condenser lens and the object to be illuminated. 6. The polarized light illuminating device according to claim 2, further comprising: a field lens for receiving light emitted from the condenser lens, and irradiating the light to be illuminated with the light emitted from the field lens. Polarized illumination device. 7. The polarized light illuminating device according to claim 6, wherein a principal ray has a telecentric characteristic between the field lens and the object to be illuminated. 8. The polarized light illuminating device according to claim 1, wherein the light emitted from the polarized light illuminating device is R (red) light,
A color separation optical system that separates (green) light and B (blue) light, a light valve for R light that receives and emits the R light, a light valve for G light that receives and emits the G light, A light valve for B light that enters and emits B light; a color combining optical system that combines light emitted from the light valve for R light, the light valve for G light, and the light valve for B light; A projection display device, comprising: a projection lens that projects synthetic light from an optical system. 9. The projection type display device according to claim 8, wherein the R light light valve, the G light light valve, and the B light light valve are each a reflection type light valve. Characteristic projection display device. 10. The projection display device according to claim 8, wherein the light valve for R light, the light valve for G light, and the light valve for B light are each a transmission type light valve. Characteristic projection display device. 11. The polarized light illuminating device according to claim 1, wherein light emitted from the polarized light illuminating device is R (red) light,
An optical system for decomposing the light into (green) light and B (blue) light; a reflective light valve for R light that receives and emits the R light; and a reflective light valve for G light that receives and emits the G light. A reflection type light valve for B light that receives and emits the B light; a polarization beam splitter for analysis; and a projection lens, wherein the optical system includes the light valve for R light and the light for G light. The light emitted from the bulb and the light valve for B light is combined, the combined light is emitted to the polarization beam splitter for analysis, and the light analyzed by the polarization beam splitter is projected by the projection lens. A projection type display device characterized by the above-mentioned. 12. An eighth or ninth or first aspect of the present invention.
The projection display device according to claim 11, wherein the polarization illuminating device includes a condenser lens that receives light emitted from the polarization conversion device. 13. The method of claim 8 or claim 9 or claim 1.
0. The projection display device according to claim 1, wherein the polarization illuminating device includes a condenser lens that receives light emitted from the polarization conversion device, and a condenser lens between the condenser lens and the light valve for each color light. A projection type display device comprising a field lens in an optical path.