JP2001343215A - Position-adjusting apparatus and its method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable highly accurate positioning between a hologram and a housing. SOLUTION: Coordinates (X1, Y1) of a specific point of a hologram pattern or of an alignment mark set to the hologram are obtained in a visual field W1 of a CCD camera (step S1). Coordinates (X2, Y2) are similarly obtained in a visual field W2 (step S3). An inclination θ of the hologram is obtained from these results (step S4). An adjustment amount of a θ stage is operated from the inclination θ, and the θ stage is moved by the operated adjustment amount (steps S5 and S6). Then, coordinates (X3, Y3) of the specific point or the alignment mark are obtained (step S8) in the visual field W1 (step S7). Values of the X3 and Y3 indicate deviation amounts in an x direction and a y direction of the hologram respectively. Adjustment amounts of an X stage and a Y stage of the hologram are operated from the obtained deviation amounts. The X stage and the Y stage are moved by the adjustment amounts (steps S9 and S10).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position adjusting device for accurately positioning two objects and a method thereof.

[0002]

2. Description of the Related Art An optical pickup device mounted on an optical disk drive device includes a light source, an objective lens for focusing a light beam from the light source on the optical disk, a light receiving element for detecting light reflected from the optical disk, and Information is recorded on and reproduced from an optical disk by various optical components provided in the optical path.

A technique disclosed in Japanese Patent Application Laid-Open No. Hei 10-199015 is a technique for adjusting the position and angle of components constituting the optical pickup device and assembling the components into a housing.

[0004]

However, Japanese Patent Application Laid-Open No.
The technique disclosed in Japanese Patent Application Laid-Open No. 199015 has a problem in that it is necessary to previously measure and store the inclination between the coordinate axes of the apparatus, and the processing is complicated.

[0005] In addition, since there is a possibility that an error in coordinate conversion may affect positioning adjustment, there is a problem that high-precision positioning adjustment cannot be performed.

An object of the present invention is to enable positioning between the first and second objects with high accuracy.

Another object of the present invention is to detect not only the position of the mark of the first object but also the position of the mark of the second object, and based on this, the first position of the second object is detected. The object of the present invention is to make it possible to adjust the position of the target object and to perform the adjustment with higher accuracy.

Another object of the present invention is to provide a simple and compact device configuration in which not only the position of the mark of the first object but also the position of the mark of the second object can be detected. Manufacturing costs can be reduced.

Another object of the present invention is to enable the inclination of the first object to be precisely adjusted to an acceptable range.

[0010] Another object of the present invention is to enable the displacement of the first object to be precisely adjusted to an acceptable range.

Another object of the present invention is to make it easier to detect a predetermined mark and to adjust the position and inclination of the first object with respect to the second object with higher accuracy. It is.

[0012] Another object of the present invention is to make the first object to be less susceptible to the influence of other surrounding lights and the like, and to provide the first object to the second object.
Is to be able to adjust the position and inclination of the target object with higher accuracy.

Another object of the present invention is to make it possible to adjust the position and the inclination of the hologram as the first object with respect to the second object with higher accuracy.

Another object of the present invention is to enable stable and accurate detection of the position and inclination of a hologram without being affected by the posture of the hologram and the illumination condition, thereby enabling the first object to be detected with respect to the second object. The purpose of the present invention is to make it possible to adjust the position and inclination of the hologram with higher accuracy.

[0015]

According to a first aspect of the present invention, there is provided a position adjusting device for positioning between a first object and a second object, wherein the position adjusting device supports the second object. A first support member, a second support member that supports the first object, a position adjustment device that changes a position of the supported first object, and the first object. A first imaging device for imaging, a first visual field varying device for moving the first imaging device to vary the visual field of the imaging, and
First detecting means for controlling the imaging device and the first visual field variable device to detect the position of a predetermined landmark of the first object in the plurality of visual fields, and based on the detection result, Calculating means for calculating at least one of the position and inclination of the first object; and controlling the position adjusting device based on the calculated amount of adjustment to control the first object with respect to the second object. Adjusting means for adjusting at least one of the position and the inclination of the object.

Therefore, the field of view of the first object is changed by moving the first imaging device, and the position of the mark of the first object is detected in a plurality of fields of view. It is not necessary to put the entire first object in
It is possible to detect the position of the mark of the first object even if the field of view is narrowed by increasing the magnification of the imaging device, and to adjust the position of the first object with respect to the second object with high accuracy. it can.

According to a second aspect of the present invention, in the position adjusting device according to the first aspect, a second imaging device for imaging the second object, and the second imaging device is moved by moving the second imaging device. A second visual field varying device for varying a visual field of imaging,
And a second detection unit that controls the second field-of-view variable device to detect a position of a predetermined landmark of the second object in a plurality of the fields of view, and wherein the calculation unit includes: The position adjusting device is controlled based on the detection results of the first and second detecting means to adjust at least one of the position and the inclination of the first object with respect to the second object. .

Therefore, not only the position of the mark of the first object but also the position of the mark of the second object is detected and the second object is detected.
Since the position of the first target object with respect to the target object can be adjusted, the adjustment can be performed with higher accuracy.

According to a third aspect of the present invention, in the position adjusting apparatus according to the second aspect, the first and second imaging devices are a single imaging device and the focus of the imaging device is the first imaging device. It is characterized in that it comprises a focus adjusting device that can adjust both the object and the second object.

Therefore, since one imaging device is used as both the first imaging device and the second imaging device, the manufacturing cost can be reduced with a simple and compact device configuration.

According to a fourth aspect of the present invention, in the position adjusting device according to any one of the first to third aspects, the arithmetic means is configured to perform a calculation based on a detection result by the first and second detection means. A tilt calculating means for obtaining at least the former of the respective tilts of the first and second objects;
The position adjusting means adjusts the inclination of the first object obtained by the inclination calculating means, taking into account the inclination of the second object obtained by the inclination calculating means. Means and a first repetition means for repeating this adjustment until the inclination of the first object becomes small to a preset degree.

Therefore, based on the detected inclinations of the first and second objects, the adjustment of the inclination of the first object is repeated until the inclination of the first object becomes small to a preset degree. Thus, the inclination of the first object can be finely adjusted to an acceptable range.

According to a fifth aspect of the present invention, in the position adjusting device according to any one of the first to fourth aspects, the first position adjusting device comprises:
Detecting means for detecting the position of the mark of the first object after the adjustment by the tilt adjusting means, and the calculating means based on the detection result by the first and second detecting means. A position shift calculating unit for obtaining at least the former among the respective position shifts of the first and second objects, wherein the position adjusting unit calculates a position shift of the second object by the position shift calculating unit; In consideration of the above, a position shift adjusting unit that adjusts the position shift of the first object obtained by the position shift calculating unit after adjustment by the tilt adjusting unit, and performs this adjustment of the first object. A second repetition means for repeating until the displacement becomes small to a preset degree.

Therefore, after the adjustment of the inclination of the first object, the displacement of the first object is reduced to a preset degree based on the respective displacements of the first and second objects. By repeating the adjustment of the displacement of the first object until the displacement of the first object is reduced, the displacement of the first object can be precisely adjusted to an allowable range.

According to a sixth aspect of the present invention, in the position adjusting device according to any one of the first to fifth aspects, the first position adjusting device comprises:
At least one of the second imaging device and the second imaging device captures an image via an enlargement optical system that enlarges the image.

Therefore, the predetermined mark can be easily detected by enlarging the image, so that at least one of the first and second objects is precisely detected, and the position of the first object with respect to the second object is determined. And inclination can be adjusted with higher accuracy.

[0027] According to a seventh aspect of the present invention, in the position adjusting device according to any one of the first to sixth aspects, the first position adjusting device comprises:
An illuminating device for illuminating the first object, a first polarizing plate through which light illuminating the first object passes, and a light passing through the first object and entering the first imaging device Second
And a polarizing plate.

Therefore, since the first object is less likely to be affected by other surrounding lights, the position and inclination of the first object with respect to the second object can be determined with higher accuracy. Can be adjusted.

According to an eighth aspect of the present invention, there is provided a position adjusting method for positioning between a hologram as a first object and the second object by using the position adjusting device according to the seventh aspect. The position adjustment method is characterized in that an alignment mark which can be detected by irradiating light polarized by a polarizing plate as the predetermined mark is used for the hologram.

Therefore, the position and inclination of the hologram can be detected more stably and with higher accuracy as compared with the case where the singular point of the hologram pattern of the hologram is used as a mark. The position and inclination of the hologram can be adjusted with higher accuracy.

According to a ninth aspect of the present invention, in the position adjusting method of the eighth aspect, the alignment mark is circular.

Therefore, by making the alignment mark circular, it is possible to detect the position and inclination of the hologram stably and accurately without being affected by the posture of the hologram and the illumination condition. The position and the inclination of the hologram as the first object can be adjusted with higher accuracy.

[0033]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment of the Invention] One embodiment of the present invention will be described as a first embodiment of the present invention.

FIG. 1 is a conceptual diagram showing a schematic configuration of a position adjusting device 1 according to Embodiment 1 of the present invention. The position adjustment device 1 is an optical component of the optical pickup device with respect to the housing 2 of the optical pickup device used in the optical disk drive device during the adjustment and assembly of the components of the optical pickup device used in the optical disk drive device. This is a device for assisting in positioning the hologram 3 and assembling it with the housing 2.

The position adjusting device 1 is provided with a support mechanism 4 as a first support member for supporting the housing 2 as a second object with reference to a reference plane.
The hologram 3, which is the first object placed on the housing 2 held by the above, is supported by a support arm 6 which is a second support member attached to an adjustment stage 5 which is a position adjustment device. . The adjustment stage 5 has an X-axis and a Y-axis.
Axis, θ-axis, each of which can be adjusted, that is, X stage 5a, Y stage 5b, θ stage 5c
And the housing 2 can be adjusted in three axes. The adjustment stage 5 is driven by a driver 18.

The detection of the hologram 3 is performed by taking an image with a detection system 10 as a first image pickup device comprising a microscope 23 as a magnifying optical system and a CCD camera 7 and processing the image data with an image processing device 8. Do. The detection system 10 is attached to a moving mechanism 9 that is a first variable visual field device that moves the detection system 10, and is a mechanism that can move horizontally by a desired distance with respect to the housing 2 and the hologram 3. I have. The moving mechanism 9 includes a driver 20
Driven by By moving the detection system 10,
The field of view of the CCD camera 7 can be changed.

Image processing device 8 and drivers 18 and 20
Is connected to the computer 19. The computer 19 outputs control signals to the drivers 18 and 20 to drive the adjustment stage 5 and the moving mechanism 9, receives image data after image processing by the image processing device 8, and performs various calculations.

As shown in FIG. 2, the position and inclination of the hologram 3 with respect to the housing 2 are adjusted by using two singular points 12 serving as marks of the hologram pattern 11 or two alignment marks 13 provided on the hologram 3. One is detected by the CCD camera 7. The alignment mark 13 attached to the hologram 3 is a mark that can be detected by irradiating polarized light. Support mechanism 4
An illumination device 14 is disposed under the illumination device. Light emitted from the illumination device 14 is polarized through a polarizing plate 15 serving as a first polarizing plate, and the polarized light is applied to the hologram 3 and transmitted through the hologram 3. The transmitted light 17 is transmitted through the polarizing plate 16 as the second polarizing plate and the microscope 23 to the CCD camera 7.
Shoot with It is desirable that the shape of the alignment mark 13 is circular.

Next, the hologram 3 with respect to the housing 2
Will be described with reference to FIGS. 3 and 4. FIG. FIG. 3 is an explanatory diagram illustrating a method of adjusting the hologram 3 with respect to the housing 2, and FIG. 4 is a flowchart of a process of the computer 19 that performs the method of adjusting the hologram 3 with respect to the housing 2.

First, the detection system 10 is moved by the moving mechanism 9 to change the field of view of the CCD camera 7 to the field of view W1.
In the visual field W1 of the D camera 7 (see FIG. 3A), the singular point 12a of the hologram pattern 11 or the alignment mark 13a attached to the hologram 3 at that time is denoted by C.
The image data detected by the CD camera 7 is subjected to predetermined image processing by the image processing device 8 on the detected image data, so that the singular point 12a or the point P1 of the alignment mark 13a is obtained.
The coordinates (X1, Y1) are determined with reference to the (singular point 12a or the normal position of the alignment mark 13a) (step S1). Step S1 implements first detection means. Next, the detection system 10 is moved by the distance P by the moving mechanism 9, and the field of view of the CCD camera 7 is changed to the field of view W2.
(Step S2). Field of view W2 of CCD camera 7
The singular point 12b of the hologram pattern 11 or the alignment mark 13b attached to the hologram pattern 11 is detected by using the image processing device 8 to perform predetermined image processing on the detected image data.
a, or coordinates (X2, Y2) with reference to the point P2 of the alignment mark 13a (the normal position of the singular point 12b or the alignment mark 13b) (step S3). Step S3 implements first detection means.

From these results, the hologram pattern 1
The inclination θ of 1 (see FIG. 3B) is calculated as follows: θ = tan ⁻¹ ｛(Y
(2-Y1) / (P-X1 + X2)} (step S4). Step S4 implements a calculating means and a tilt calculating means.

Then, an adjustment amount of the θ stage 5c is calculated from the obtained value of the inclination θ, and θ is calculated by the calculated adjustment amount.
Move the stage 5c. That is, when the value of the inclination θ exceeds the preset value (Y in step S5), the feed amount of the θ stage 5c is calculated, and the θ stage 5c is moved by the feed amount. (Step S6), the inclination θ is eliminated. Step S
The adjusting means is realized by S5 and S6. And CC
Change the field of view of D camera 7 to field of view W1 (step S
7) Return to step S1. The loop returning from step S7 to step S1 implements the first repetition means.

When the deviation of the inclination θ is within the range of the preset value (N in step S5), the singular point 12b of the hologram pattern 11 or the hologram 3 in the visual field W2 of the CCD camera 7 The alignment mark 13b attached to the singular point 12b or the alignment mark 1 is detected by subjecting the detected image data to predetermined image processing by the image processing device 8.
The coordinates (X3, Y3) based on the point P2 of 3b are obtained (see FIG. 3C) (step S8). Step S8 implements a first detecting means, a calculating means, and a displacement calculating means. The values of X3 and Y3 are the shift amounts of the hologram 3 in the x and y directions, respectively.

Then, an adjustment amount of the X stage 5a and the Y stage 5b of the hologram 3 is calculated from the obtained shift amount, and the X stage 5a and the Y stage 5b are moved by the adjustment amount. That is, when the values of X3 and Y3 exceed the preset values (Y in step S9), the feed amounts of the X stage 5a and the Y stage 5b are calculated, and the X stage is calculated by the feed amount. 5a, Y stage 5b
Is moved (step S10), the displacement X3,
Y3 is eliminated (see FIG. 3 (d)), and then step S
Return to 8. The adjusting means is realized by steps S9 and S10. The loop returning from step S10 to step S8 implements the second repetition means.

When the values of X3 and Y3 are within the range of the preset values (N in step S9), the processing is terminated.

[Second Embodiment of the Invention] Another example of the embodiment of the present invention will be described as a second embodiment of the present invention.

FIG. 5 is a conceptual diagram showing a schematic configuration of the position adjusting device 1. About the point which this position adjusting device 1 has in common with the thing of Embodiment 1 of the invention, the same code | symbol is used for the same member etc., and detailed description is abbreviate | omitted. The following description focuses on the differences between the two.

In the position adjusting device 1, the microscope 23 is provided with an illuminating device 21, which is an illuminating device for epi-illumination, and the illuminating device 21 and the illuminating device 14 are turned on under the control of the computer 19. That is, when detecting the hologram 3, the illumination device 21 by the epi-illumination is turned off, and the hologram 3 is irradiated with light polarized via the polarizing plate 15 by the illumination device 14 below the support mechanism 4. Is transmitted through the polarizing plate 16 and captured by the detection system 10 including the microscope 23 and the CCD camera 7. When detecting the housing 2, the illumination device 14 below the support mechanism 4 is turned off, the housing 2 is illuminated by the illumination device 21 by epi-illumination attached to the microscope 23, and the housing 2 is taken into the CCD camera 7.

When switching the detection between the hologram 3 and the housing 2, a predetermined focus position of the hologram 3 or the housing 2 is determined by a focus adjustment Z stage 22 which is a focus adjustment device for adjusting the focus of the CCD camera 7. The detection system 10 is moved vertically to focus.

Next, a method of measuring the holding accuracy of the housing 2 and a method of adjusting the hologram 3 in consideration of the holding accuracy of the housing 2 will be described with reference to FIGS. 6, 7, and 8. FIG. FIG. 6 shows the hologram 3 with respect to the housing 2.
FIG. 7 and FIG. 8 are flowcharts of the processing of the computer 19 for performing the method of adjusting the hologram 3 with respect to the housing 2.

First, the focus of the CCD camera 7 is adjusted to the focal position of the housing 2 by the Z stage 22 for focus adjustment (step S11). Then, the visual field of the CCD camera 7 is set to the preset visual field W3 (step S1).
2) The singular point 23a of the housing is detected, and the coordinates of the singular point 23a with respect to the point P3 (the normal position of the singular point 23a when focusing on the housing 2) are determined by image processing by the image processing device 8 (see FIG. Xh1, Yh1) (FIG. 6)
(See (a)) (Step S13). Step S13 implements a second detection unit. The detection system 10 is moved by the distance P1 by the moving mechanism 9, and the field of view of the CCD camera 7 is changed to a preset field of view W4 (step S1).
4). Then, the singular point 23b of the housing 2 is detected in the field of view W4 of the CCD camera 7, and the image processing by the image processing device 8 sets the point P4 (the normal position of the singular point 23b when focused on the housing 2) as a reference. Coordinates (Xh2,
Yh2) (see FIG. 6B) (step S1).
5). Step S15 implements a second detection unit.

Then, based on these results, the housing 2
Θh = tan ^-1 ｛(Yh2-Yh1) / (P1-Xh1
+ Xh2)} (step S16). Step S16 implements a calculating means and a tilt calculating means.

Next, the focus of the CCD camera 7 is adjusted to the focal position of the hologram 3 by the focus adjustment Z stage 22 (step S17). Then, the detection system 10 is moved by the moving mechanism 9 to change the field of view of the CCD camera 7 to the field of view W1 (step S18), and the field of view W1 of the CCD camera 7 is changed.
In FIG. 3A, a singular point 12a of the hologram pattern 11 or an alignment mark 13a attached to the hologram 3 at that time is detected by the CCD camera 7, and the image data after the detection is converted into an image processing device. By performing predetermined image processing in step 8, coordinates (X1, Y1) with reference to the singular point 12a or the point P1 of the alignment mark 13a (the normal position of the singular point 12a or the alignment mark 13a) are obtained ( Step S19). Step S19 implements first detection means. Next, the detection system 10 is moved by the distance P by the moving mechanism 9, and the field of view of the CCD camera 7 is changed to the field of view W2 (step S20). The singular point 12b of the hologram pattern 11 or the alignment mark 13b attached to the hologram pattern 11 is detected in the field of view W2 of the CCD camera 7, and the image data after the detection is subjected to predetermined image processing by the image processing device 8. Thereby, coordinates (X2, Y2) based on the singular point 12a or the point P2 of the alignment mark 13a (the normal position of the singular point 12b or the alignment mark 13b) are obtained (step S21). Step S21 implements first detection means.

From these results, the hologram pattern 1
The inclination θ of 1 (see FIG. 3B) is obtained by θ = tan ⁻¹ {(Y2−Y1) / (P−X1 + X2)} (step S22). Step S22 implements a calculating means and a tilt calculating means.

Then, the adjustment amount of the θ stage 5c is calculated from the value obtained by adding the value of the inclination θh obtained in step S16 to the obtained value of the inclination θ (this realizes an operation means). Θ stage 5c by the calculated adjustment amount
Move. That is, when the value of “θ−θh” exceeds the preset value (Y in step S23), the feed amount of the θ stage 5c is calculated, and the θ stage 5c is moved by the feed amount. By moving (step S24), the inclination “θ−θh” is eliminated. Then, the field of view of the CCD camera 7 is changed to the field of view W1 (step S25), and the process returns to step S19. Step S23,
An adjusting unit is realized by S24. Step S25
A first repetition means is realized by a loop returning from step S19 to step S19.

When the value of “θ−θh” is within the range of the preset value (N in step S23), the singular point 12b of the hologram pattern 11 in the field of view W2 of the CCD camera 7, or The alignment mark 13b attached to the hologram 3 is detected, and the image data after the detection is subjected to predetermined image processing by the image processing device 8, so that the singular point 12b or the alignment mark 1 is obtained.
The coordinates (X3, Y3) based on the point P2 of 3b are obtained (see FIG. 3C) (step S26). Step S2
6 implements a first detecting means and a displacement calculating means. The values of X3 and Y3 are the shift amounts of the hologram 3 in the x and y directions, respectively.

Then, the obtained shift amounts (X3, Y3)
Then, the adjustment amount of the X stage 5a and the Y stage 5b of the hologram 3 is calculated from the value in consideration of the displacement amount (Xh1, Yh1) obtained in step S13 (this implements a computing unit and a displacement computing unit). ), The X stage 5a and the Y stage 5b are moved by the adjustment amount. That is, “X3-
When the values of "Xh1" and "Y3-Yh1" are larger than the preset values (step S27).
Y), the feed amounts of the X stage 5a and the Y stage 5b are calculated, and the X stage 5a and the Y stage 5
b (step S28), the displacement X
3 and Y3 are eliminated (see FIG. 3D), and thereafter, the process returns to step S26. Steps S27 and S28 implement an adjusting unit and a displacement adjusting unit. Step S28
A second repetition means is realized by a loop returning from step S26 to step S26.

If the values of X3 and Y3 are within the range of the preset values (N in step S27), the process ends.

[0059]

According to the first aspect of the present invention, the first imaging device is moved to change the visual field of the image, and the position of the mark of the first object is detected in a plurality of visual fields. Therefore, it is not necessary to put the entire first object in the field of view of the first imaging device, and even if the magnification of the first imaging device is increased and the field of view is narrowed, the position of the mark of the first object is detected. As a result, the position of the first object with respect to the second object can be adjusted with high accuracy.

According to a second aspect of the present invention, in the position adjusting device according to the first aspect, not only the position of the mark of the first object but also the position of the mark of the second object is detected. Second
Since the position of the first target object with respect to the target object can be adjusted, the adjustment can be performed with higher accuracy.

According to a third aspect of the present invention, in the position adjusting device of the second aspect, one image pickup device is used as both the first image pickup device and the second image pickup device, so that it is simple and compact. As a simple device configuration, manufacturing costs can be reduced.

According to a fourth aspect of the present invention, in the position adjusting device according to any one of the first to third aspects, the first object is detected based on the detected inclination of the first and second objects. By repeating the adjustment of the inclination of the first object until the inclination of the object becomes small to a preset degree, the inclination of the first object can be finely adjusted to an allowable range.

According to a fifth aspect of the present invention, in the position adjusting device according to any one of the first to fourth aspects, after adjusting the inclination of the first object, the position of the first and second objects is adjusted. On the basis of the respective displacements, the adjustment of the displacement of the first object is repeated until the displacement of the first object is reduced to a preset degree, so that the displacement of the first object is repeated. Can be precisely adjusted to an acceptable range.

According to a sixth aspect of the present invention, in the position adjusting apparatus according to any one of the first to fifth aspects, a predetermined mark can be easily detected by enlarging an image. Elaborately detect at least one of the objects,
The position and inclination of the first object with respect to the second object can be adjusted with higher accuracy.

According to a seventh aspect of the present invention, in the position adjusting device according to any one of the first to sixth aspects, the first object is hardly affected by other surrounding lights or the like. It is possible to precisely detect and adjust the position and the inclination of the first object with respect to the second object with higher accuracy.

According to the eighth aspect of the present invention, compared with a case where a singular point of a hologram pattern of a hologram is used as a mark,
Since the position and inclination of the hologram can be detected stably and with high accuracy, the position and inclination of the hologram as the first object with respect to the second object can be adjusted with higher accuracy.

According to a ninth aspect of the present invention, in the position adjusting method according to the eighth aspect, the alignment mark is formed in a circular shape, so that the hologram is stable and has high accuracy without being affected by the hologram attitude and the illumination condition. Can be detected, so that the position and the inclination of the hologram as the first object with respect to the second object can be adjusted with higher accuracy.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing a schematic configuration of a position adjusting device according to a first embodiment of the present invention.

FIG. 2 is a plan view of a hologram to be positioned by the position adjusting device.

FIG. 3 is an explanatory diagram illustrating a method of positioning a hologram and a housing by the position adjusting device.

FIG. 4 is a flowchart illustrating a process performed by the position adjustment device.

FIG. 5 is a conceptual diagram showing a schematic configuration of a position adjusting device according to a second embodiment of the present invention.

FIG. 6 is an explanatory diagram illustrating a method of positioning the hologram and the housing by the position adjusting device.

FIG. 7 is a flowchart illustrating a process performed by the position adjustment device.

FIG. 8 is a flowchart illustrating a process performed by the position adjustment device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Position adjustment apparatus 2 2nd object 3 1st object, hologram 4 1st support member 5 Position adjustment apparatus 6 2nd support member 9 1st, 2nd visual field variable apparatus 10 1st, 2nd Imaging device 14 lighting device 15 first polarizing plate 16 second polarizing plate 21 lighting device 22 focusing device 23 magnifying optical system

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G11B 7/08 G11B 7/08 A 5D119 7/22 7/22 F term (Reference) 2F065 AA03 AA20 AA35 BB02 BB22 BB27 CC21 EE00 FF04 HH13 HH15 LL33 NN20 PP12 PP13 PP24 QQ26 QQ28 2H043 AD04 AD11 AD19 2H049 CA01 CA05 CA07 CA20 2H052 AC05 AD04 AD06 AD19 AD20 AF02 AF14 AF25 5D117 AA02 CC07 KK01 BA20 A20

Claims (9)

[Claims] 1. A position adjusting device for positioning between a first object and a second object, wherein: a first support member for supporting the second object; and the first object. A second support member for supporting the first object; a position adjusting device for varying the position of the first object supported; a first imaging device for imaging the first object; A first visual field varying device that moves an imaging device to vary the visual field of the imaging, and controls the first imaging device and the first visual field varying device to control the first object in a plurality of the visual fields. First detecting means for detecting the position of the predetermined mark, calculating means for calculating at least one of the position and inclination of the first object based on the detection result, and the calculated adjustment The position adjusting device is controlled based on the amount to adjust the position of the second object. Said first position or adjusting means for adjusting at least one of the inclination of the object that,
A position adjusting device comprising: A second image pickup device for picking up an image of the second object; a second field-of-view changing device for moving the second image pickup device to change the field of view of the image pick-up; A second detection unit configured to control an imaging device and the second visual field variable device to detect a position of a predetermined landmark of the second object in a plurality of the visual fields; The position adjusting device is controlled based on the detection results of the first and second detecting means to adjust at least one of a position and an inclination of the first object with respect to the second object. Item 1
The position adjusting device according to item 1. 3. The first and second imaging devices are a single imaging device and a focus adjustment that can focus the imaging device on both the first object and the second object. 3. The position adjusting device according to claim 2, wherein the position adjusting device is constituted by a device. 4. The computing unit according to claim 1, wherein the first and second detection units are based on detection results obtained by the first and second detection units.
And a tilt calculating means for obtaining at least the former of the respective tilts of the object, wherein the position adjusting means takes into account the tilt of the second object when the tilt calculating means obtains the tilt, Tilt adjusting means for adjusting the tilt of the first object obtained by the tilt calculating means, and first repeating means for repeating this adjustment until the tilt of the first object is reduced to a preset degree 4. The method according to claim 1, further comprising:
The position adjusting device according to any one of the above. 5. The first detecting means detects the position of a mark of a first object after the adjustment by the tilt adjusting means, and the calculating means comprises the first and second detecting means. The position adjustment means for obtaining at least the former of the respective position shifts of the first and second objects based on the detection result of the first and second objects.
When the positional deviation of the target object is obtained, the positional deviation adjusting means for adjusting the positional deviation of the first object obtained by the positional deviation calculating means after adjustment by the inclination adjusting means, taking into account the deviation, This adjustment is repeated until the displacement of the first object becomes small to a preset degree.
2. A repetition means comprising:
The position adjusting device according to any one of claims 1 to 4. 6. The apparatus according to claim 1, wherein at least one of the first and second imaging devices captures an image via an enlargement optical system that enlarges the image. The position adjusting device according to item 1. 7. An illuminating device for illuminating the first object, a first polarizing plate through which light illuminating the first object passes, and the first polarizing plate passing through the first object. The position adjusting device according to any one of claims 1 to 6, further comprising: a second polarizing plate through which light incident on the imaging device is transmitted. 8. A position adjusting method for positioning between a hologram as a first object and the second object using the position adjusting device according to claim 7, wherein the hologram has a polarizing plate. A method wherein an alignment mark which can be detected by irradiating the polarized light is attached as the predetermined mark. 9. The method according to claim 8, wherein the alignment mark is circular.