JP2001332933A - Piezoelectric oscillator - Google Patents
Piezoelectric oscillatorInfo
- Publication number
- JP2001332933A JP2001332933A JP2000149288A JP2000149288A JP2001332933A JP 2001332933 A JP2001332933 A JP 2001332933A JP 2000149288 A JP2000149288 A JP 2000149288A JP 2000149288 A JP2000149288 A JP 2000149288A JP 2001332933 A JP2001332933 A JP 2001332933A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- substrate
- substrates
- oscillator
- crystal oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000010453 quartz Substances 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 5
- 239000013078 crystal Substances 0.000 description 30
- 239000004065 semiconductor Substances 0.000 description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 9
- 239000010931 gold Substances 0.000 description 9
- 229910052737 gold Inorganic materials 0.000 description 9
- 230000010355 oscillation Effects 0.000 description 8
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- -1 solder bumps Chemical compound 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
Landscapes
- Wire Bonding (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は圧電発振回路に関
し、特に低価格の高周波出力タイプ圧電発振器に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric oscillation circuit, and more particularly to a low-cost high-frequency output type piezoelectric oscillator.
【0002】[0002]
【従来の技術】近年、急速に小型化が進む携帯電話に使
用される基準信号源としては、図4に示すような小型水
晶発振器がある。即ち、図4は、従来の所謂シングルシ
ール型と称される水晶発振器100の側面断面構成図で
あり、この一例の場合、セラミック製のパッケージ10
1の凹陥部底部に発振回路及び温度補償回路等の電子回
路を1チップに集積化したICチップ102をフリップ
チップ搭載した後、ICチップ102の上面を覆うよう
に水晶振動片103をシリコーン導電性接着剤104を
用いてパッケージ101の所定の位置に固定したことに
より、図示はしていないがパッケージ101内の配線を
介して水晶振動片103とICチップ102とを導通接
続するよう構成したものである。2. Description of the Related Art In recent years, a small crystal oscillator as shown in FIG. That is, FIG. 4 is a side sectional configuration view of a conventional so-called single seal type crystal oscillator 100. In this example, a ceramic package 10 is used.
After mounting an IC chip 102 in which electronic circuits such as an oscillation circuit and a temperature compensation circuit are integrated on a single chip at the bottom of the recessed portion, a quartz vibrating piece 103 is made of silicone conductive so as to cover the upper surface of the IC chip 102. By fixing the package at a predetermined position of the package 101 using an adhesive 104, the crystal resonator element 103 and the IC chip 102 are electrically connected to each other through wiring in the package 101, though not shown. is there.
【0003】そして、このように水晶発振器100を構
成する電子部品を縦続配置することにより部品搭載面積
が狭範囲に抑えられるので水晶発振器100の小型化が
実現されるのである。[0005] By arranging the electronic components constituting the crystal oscillator 100 in cascade, the component mounting area can be suppressed to a narrow range, so that the crystal oscillator 100 can be downsized.
【0004】[0004]
【本発明が解決しようとする課題】しかしながら、水晶
振動子103以外の発振器回路に含まれる可変容量素子
としては一般にバイポーラタイプの回路が用いられ、増
幅回路としては一般にC−MOSタイプの回路が用いら
れるが、このような異種構成の半導体回路を混在させて
1チップICを構成する為には複雑且つ高度な製造技術
を要することからIC102の高額化が避けられず、こ
れにより水晶発振器100の低価格化を望めずにいた。However, a bipolar type circuit is generally used as a variable capacitance element included in an oscillator circuit other than the crystal unit 103, and a C-MOS type circuit is generally used as an amplifier circuit. However, in order to form a one-chip IC by mixing such heterogeneous semiconductor circuits, a complicated and advanced manufacturing technique is required, so that an increase in the cost of the IC 102 is unavoidable. He couldn't expect price.
【0005】更に、発振増幅回路に代表される交流回路
と周波数温度補償電圧発生回路に代表される直列回路と
から構成される水晶発振器回路を1チップIC化するこ
とにより交流回路と直流回路との近接配置が避けられ
ず、これにより特に高周波出力タイプの水晶発振器10
0の場合では、直流回路と交流回路との間で半導体物質
を伝達媒体とした電気信号のカップリングが生じること
で水晶発振器100は発振条件が変化するので、所要の
発振周波数が出力されないという所謂異常発振という問
題の発生、及び、直流回路からのノイズが発振ループ中
に畳重することによる位相雑音特性の劣悪化という問題
を避けられずにいた。Further, a crystal oscillator circuit composed of an AC circuit typified by an oscillation amplifier circuit and a series circuit typified by a frequency temperature compensation voltage generating circuit is formed into a one-chip IC so that the AC circuit and the DC circuit can be separated. Proximity arrangement is unavoidable, so that particularly high frequency output type crystal oscillator 10
In the case of 0, the oscillation condition of the crystal oscillator 100 changes due to the coupling of an electric signal using a semiconductor material as a transmission medium between the DC circuit and the AC circuit, so that a required oscillation frequency is not output. Inevitably, the problem of abnormal oscillation and the deterioration of phase noise characteristics due to the superposition of noise from the DC circuit in the oscillation loop have been unavoidable.
【0006】本発明は圧電発振器の上記諸問題を解決す
ることによって低価格であり、且つ、高周波出力タイプ
であっても周波数安定度及び周波数純度に優れた小型圧
電発振器を提供することを目的としている。SUMMARY OF THE INVENTION It is an object of the present invention to provide a small-sized piezoelectric oscillator which is low in cost by solving the above-mentioned problems of the piezoelectric oscillator and which is excellent in frequency stability and frequency purity even in a high-frequency output type. I have.
【0007】[0007]
【課題を解決するための手段】上記課題を解決する為に
本発明に係わる請求項1記載の発明は、圧電振動子と電
子回路とからなる圧電発振器に於いて、前記電子回路が
複数のIC基板から成り、該IC基板のうち少なくとも
1つはその上下面に接続端子を備えると共に、該IC基
板の上面接続端子に他のIC基板を接続するよう構成し
たものであることを特徴とする。According to a first aspect of the present invention, there is provided a piezoelectric oscillator comprising a piezoelectric vibrator and an electronic circuit, wherein the electronic circuit comprises a plurality of ICs. The IC substrate is characterized in that at least one of the IC substrates has connection terminals on upper and lower surfaces thereof and is configured to connect another IC substrate to connection terminals on the upper surface of the IC substrate.
【0008】請求項2記載の発明は圧電振動子と電子回
路とからなる圧電発振器に於いて、前記電子回路が複数
のIC基板から成り、該IC基板のうち少なくともいく
つかはその上下面に接続端子を備え、互いに重ねて接続
するよう構成したものであることを特徴とする。According to a second aspect of the present invention, in a piezoelectric oscillator comprising a piezoelectric vibrator and an electronic circuit, the electronic circuit comprises a plurality of IC substrates, and at least some of the IC substrates are connected to upper and lower surfaces thereof. It is characterized by having terminals and being configured to be connected to each other in an overlapping manner.
【0009】請求項3記載の発明は請求項1または請求
項2記載の発明に加え、前記電子回路が直流回路と交流
回路とからなり、該直流回路と、交流回路とを個別のI
C基板にて構成したことを特徴とする。According to a third aspect of the present invention, in addition to the first or second aspect, the electronic circuit includes a DC circuit and an AC circuit, and the DC circuit and the AC circuit are connected to separate I / O circuits.
It is characterized by comprising a C substrate.
【0010】請求項4記載の発明は請求項1乃至請求項
3記載の発明に加え、前記IC基板同士をフリップチッ
プ接続したことを特徴とする。A fourth aspect of the present invention is characterized in that, in addition to the first to third aspects, the IC substrates are flip-chip connected to each other.
【0011】[0011]
【本発明の実施の形態】以下、図示した実施例に基づい
て本発明を詳細に説明する。図1は本発明に基づく水晶
発振器の一実施例の側面断面構成図を示すものである。
同図に示す水晶発振器1は、上下面に接続端子2、3を
有するIC基板4をセラミック製のパッケージ5の凹陥
部内且つパッケージ5の底面に設けた端子6と接続端子
2とを例えば金バンプ7にて導通接続するようフリップ
チップ実装方法により搭載すると共に、IC基板4の上
面端子3と他のIC基板8の一面に設けた接続端子9と
を例えば金バンプ10を介して導通接続するよう搭載
し、更に、IC基板8の上面を覆うよう水晶振動子11
をパッケージ5の適所にシリコーン導電性接着剤12に
て固着するよう構成したものである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on illustrated embodiments. FIG. 1 is a side sectional configuration view of an embodiment of a crystal oscillator according to the present invention.
In the crystal oscillator 1 shown in FIG. 1, an IC substrate 4 having connection terminals 2 and 3 on the upper and lower surfaces is provided in a concave portion of a ceramic package 5 and on a bottom surface of the package 5 by connecting a terminal 6 and a connection terminal 2 to, for example, gold bumps. 7 and a connection terminal 9 provided on one surface of another IC substrate 8 through a flip-chip mounting method. Mounted, and furthermore, a quartz oscillator 11 so as to cover the upper surface of the IC substrate 8.
Is fixed to an appropriate position of the package 5 with the silicone conductive adhesive 12.
【0012】即ち、水晶発振器1の特徴は以下のような
2つの点である。その一つ目の点は、水晶振動子11以
外の水晶発振器回路部分である電子回路を複数のIC基
板にて構成したことにより、例えば発振器回路のうちの
バイポーラタイプ半導体にて構成する部分をIC基板4
とし、MOSタイプ半導体にて構成する部分をIC基板
8としてそれぞれ個別の製造工程にて構成することがで
きる所である。That is, the crystal oscillator 1 has the following two features. The first point is that an electronic circuit which is a crystal oscillator circuit portion other than the crystal oscillator 11 is configured by a plurality of IC substrates, and for example, a portion of the oscillator circuit configured by a bipolar type semiconductor is formed by an IC. Substrate 4
In this case, the portion made of a MOS type semiconductor can be formed as an IC substrate 8 in an individual manufacturing process.
【0013】そして二つ目の点は、図2(a)に示すよ
うに下面に接続端子2と上面に接続端子3を設けたIC
基板4と下面に接続端子9を設けたIC基板8とを上述
したように金バンプ7、10を用いて縦続接続し、且
つ、水晶振動子11の下方に配置した所にある。Second, as shown in FIG. 2A, an IC in which connection terminals 2 are provided on the lower surface and connection terminals 3 are provided on the upper surface.
The substrate 4 and the IC substrate 8 provided with the connection terminals 9 on the lower surface are cascaded using the gold bumps 7 and 10 as described above, and are disposed below the crystal unit 11.
【0014】このような構成は、従来の水晶発振器の構
成では必要としなかったIC基板4とIC基板8とを接
続する為の金バンプ11の厚みを必要とするが、一般に
接合後の金バンプの厚みが約20μm以下と小さな値で
あり、更に、従来の水晶発振器にて用いていた1チップ
ICと比較して、回路の種類毎に分類されたIC基板の
構成の方が単純構成であることから個々のIC基板の厚
みを薄くすることが可能であので、複数のIC基板を重
ねた全体の厚みと上記1チップICとの厚みとは回路機
能が等しければほぼ同等の値とすることができる。Although such a configuration requires the thickness of the gold bump 11 for connecting the IC substrate 4 and the IC substrate 8 which is not required in the configuration of the conventional crystal oscillator, the gold bump 11 after bonding is generally required. Has a small value of about 20 μm or less, and the configuration of the IC substrate classified by circuit type is simpler than that of the one-chip IC used in the conventional crystal oscillator. Therefore, it is possible to reduce the thickness of each IC board. Therefore, the total thickness of the stacked IC boards and the thickness of the one-chip IC should be substantially equal if the circuit functions are equal. Can be.
【0015】そして、これらの結果、水晶発振器1は複
数のIC基板を使用しいながらも、その高さは、従来の
1チップICを使用した水晶発振器の高さと比較して、
ほぼ同等の値に抑えることが可能である。更に、上記で
は半導体の種類毎に分類されたIC基板を用いて説明し
たが、それ以外としては、例えば、発振用増幅回路等の
交流回路をIC基板4とし、温度補償電圧発生回路等の
直流回路をIC基板8として構成しても良く、このよう
に直流回路と交流回路とを個別のIC基板として構成す
ることで従来問題としていた直流回路と交流回路との間
で半導体を介し電気信号の不要なカップリングを阻止す
ることができる。As a result, although the crystal oscillator 1 uses a plurality of IC substrates, its height is higher than that of a conventional crystal oscillator using a one-chip IC.
It can be suppressed to almost the same value. Further, although the above description has been made using IC substrates classified according to the type of semiconductor, other than that, for example, an AC circuit such as an oscillation amplifier circuit may be used as the IC substrate 4 and a DC compensation circuit such as a temperature compensation voltage generation circuit may be used. The circuit may be configured as an IC substrate 8. In this way, by configuring the DC circuit and the AC circuit as separate IC substrates, an electric signal between the DC circuit and the AC circuit, which has been a problem in the past, via a semiconductor. Unnecessary coupling can be prevented.
【0016】そして更に、上記では2つのIC基板を用
いた構成を例に上げて本発明を説明したが、本発明はこ
れに限定されるものではなく、2つ以上のIC基板を縦
続接続したものであっても構わない。Further, in the above description, the present invention has been described by taking as an example a configuration using two IC boards, but the present invention is not limited to this, and two or more IC boards are connected in cascade. It may be something.
【0017】図3は本発明に基づく水晶発振器の他の実
施例として3つのIC基板を用いた場合の水晶発振器の
側面断面構成図を示すものである。同図に示す水晶発振
器1が特徴とする点は、IC基板6の他に上下面に接続
端子13、14を有するIC基板15を備えると共に、
IC基板6の上面の接続端子3とIC基板15の下面の
接続端子13とを金バンプ10にて接続し、更に、IC
基板15の上面の接続端子14とIC基板8との下面の
接続端子9とを金バンプ16にて接続して、3つのIC
基板を縦続構成した所にある。FIG. 3 is a side sectional view of a crystal oscillator using three IC substrates as another embodiment of the crystal oscillator according to the present invention. The feature of the crystal oscillator 1 shown in the figure is that, in addition to the IC substrate 6, an IC substrate 15 having connection terminals 13 and 14 on the upper and lower surfaces is provided.
The connection terminals 3 on the upper surface of the IC substrate 6 and the connection terminals 13 on the lower surface of the IC substrate 15 are connected by gold bumps 10, and the IC
The connection terminals 14 on the upper surface of the substrate 15 and the connection terminals 9 on the lower surface of the IC substrate 8 are connected by gold bumps 16 to form three ICs.
This is where the board is cascaded.
【0018】このような構成により例えば、IC基板6
をバイポーラタイプの半導体により構成した交流回路と
し、IC基板15をMOSタイプの半導体により構成し
た交流回路とし、更に、IC基板8を直流回路とすれば
異種構成の半導体を用いて発振器回路を構成する場合で
あっても複雑なIC製造工程を必要とすることが無く、
更に、直流回路と交流回路との間で不要な電気信号のカ
ップリングが発生することが無い。With such a configuration, for example, the IC substrate 6
Is an AC circuit composed of a bipolar type semiconductor, an IC substrate 15 is an AC circuit composed of a MOS type semiconductor, and furthermore, if the IC substrate 8 is a DC circuit, an oscillator circuit is composed of semiconductors of different types. Even in this case, there is no need for complicated IC manufacturing processes,
Further, unnecessary coupling of an electric signal does not occur between the DC circuit and the AC circuit.
【0019】上述ではフリップチップ実装に於いて、金
バンプを用いて本発明を説明したが、本発明はこれに限
定されるものではなく、半田バンプ等の金以外の材質か
ら成るバンプを用いた場合でも本発明を適用することは
可能である。更に、振動源として水晶振動子を用いて本
発明を説明したが、本発明は水晶振動子以外の圧電振動
子を振動源としたあらゆる圧電発振器に適用することが
可能である。In the above description, the present invention has been described using gold bumps in flip chip mounting. However, the present invention is not limited to this, and bumps made of a material other than gold, such as solder bumps, are used. Even in such a case, the present invention can be applied. Furthermore, although the present invention has been described using a quartz oscillator as a vibration source, the present invention can be applied to any piezoelectric oscillator using a piezoelectric oscillator other than a quartz oscillator as a vibration source.
【0020】[0020]
【発明の効果】以上説明したように本発明に基づく水晶
発振器は、圧電振動子と電子回路とからなる圧電発振器
に於いて、電子回路が複数のIC基板から成り、IC基
板のうち少なくとも1つはその上下面に接続端子を備え
ると共に、IC基板の上面接続端子に他のIC基板を接
続するよう構成したことにより、水晶発振器の小型形状
を損なうことなく、異種半導体を用いて安価に電子回路
を構成することができると共に、電子回路の直流交流回
路間の電気信号のカップリングの発生を抑えることが可
能である為、圧電発振器の低価格化及び、周波数安定度
及び周波数純度に優れた小型圧電発振器が可能であると
いう効果を奏する。As described above, the crystal oscillator according to the present invention is a piezoelectric oscillator comprising a piezoelectric vibrator and an electronic circuit, wherein the electronic circuit comprises a plurality of IC substrates, and at least one of the IC substrates is provided. Is equipped with connection terminals on the upper and lower surfaces, and is configured to connect another IC substrate to the connection terminals on the upper surface of the IC substrate, so that it is possible to use an inexpensive electronic circuit using a heterogeneous semiconductor without impairing the compact shape of the crystal oscillator. And the occurrence of electric signal coupling between the DC and AC circuits of the electronic circuit can be suppressed. There is an effect that a piezoelectric oscillator is possible.
【図1】本発明に基づく水晶発振器の一実施例の側面断
面図を示すものである。FIG. 1 is a side sectional view showing one embodiment of a crystal oscillator according to the present invention.
【図2】本発明の基づく水晶発振器に使用するIC基板
の上下面図を示すものである。FIG. 2 is a top view and a bottom view of an IC substrate used for a crystal oscillator according to the present invention.
【図3】本発明に基づく水晶発振器の他の実施例の側面
断面構成図を示すものである。FIG. 3 is a side sectional view showing another embodiment of the crystal oscillator according to the present invention.
【図4】従来の水晶発振器の側面断面構成図を示すもの
である。FIG. 4 is a side cross-sectional configuration diagram of a conventional crystal oscillator.
1、100水晶発振器、2、3、9、13、14接続端
子、4、8、15IC基板、5、101パッケージ、6
端子、7、10、16金バンプ、11、103水晶振動
子、12、104シリコーン導線性接着剤、1021チ
ップIC、1,100 crystal oscillator, 2, 3, 9, 13, 14 connection terminals, 4, 8, 15 IC substrate, 5, 101 package, 6
Terminals, 7, 10, 16 gold bumps, 11, 103 crystal oscillator, 12, 104 silicone conductive adhesive, 1021 chip IC,
Claims (4)
器に於いて、前記電子回路が複数のIC基板から成り、
該IC基板のうち少なくとも1つはその上下面に接続端
子を備えると共に、該IC基板の上面接続端子に他のI
C基板を接続するよう構成したものであることを特徴と
する圧電発振器。1. A piezoelectric oscillator comprising a piezoelectric vibrator and an electronic circuit, wherein the electronic circuit comprises a plurality of IC substrates,
At least one of the IC substrates has connection terminals on upper and lower surfaces thereof, and another connection terminal is provided on the upper surface connection terminal of the IC substrate.
A piezoelectric oscillator configured to connect a C substrate.
器に於いて、前記電子回路が複数のIC基板から成り、
該IC基板のうち少なくともいくつかはその上下面に接
続端子を備え、互いに重ねて接続するよう構成したもの
であることを特徴とする圧電発振器。2. A piezoelectric oscillator comprising a piezoelectric vibrator and an electronic circuit, wherein said electronic circuit comprises a plurality of IC substrates,
A piezoelectric oscillator, wherein at least some of the IC substrates have connection terminals on upper and lower surfaces thereof and are configured to be connected to each other in an overlapping manner.
なり、該直流回路と、交流回路とを個別のIC基板にて
構成したことを特徴とする請求項1または請求項2記載
の圧電発振器。3. The piezoelectric device according to claim 1, wherein the electronic circuit comprises a DC circuit and an AC circuit, and the DC circuit and the AC circuit are formed on separate IC boards. Oscillator.
たことを特徴とする請求項1乃至請求項3記載の圧電発
振器。4. The piezoelectric oscillator according to claim 1, wherein said IC substrates are flip-chip connected to each other.
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JP2000149288A JP2001332933A (en) | 2000-05-22 | 2000-05-22 | Piezoelectric oscillator |
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JP2000149288A JP2001332933A (en) | 2000-05-22 | 2000-05-22 | Piezoelectric oscillator |
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JP2001332933A true JP2001332933A (en) | 2001-11-30 |
Family
ID=18655163
Family Applications (1)
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006060281A (en) * | 2004-08-17 | 2006-03-02 | Seiko Epson Corp | Piezoelectric oscillator |
EP1689079A3 (en) * | 2005-02-03 | 2007-11-07 | Epson Toyocom Corporation | Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and method of manufacturing the piezoelectric vibrator |
JP2013211854A (en) * | 2009-06-03 | 2013-10-10 | Qualcomm Inc | Apparatus and method for frequency generation |
-
2000
- 2000-05-22 JP JP2000149288A patent/JP2001332933A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006060281A (en) * | 2004-08-17 | 2006-03-02 | Seiko Epson Corp | Piezoelectric oscillator |
EP1689079A3 (en) * | 2005-02-03 | 2007-11-07 | Epson Toyocom Corporation | Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and method of manufacturing the piezoelectric vibrator |
US7427823B2 (en) | 2005-02-03 | 2008-09-23 | Epson Toyocom Corporation | Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and method of manufacturing the piezoelectric vibrator |
US8166621B2 (en) | 2005-02-03 | 2012-05-01 | Seiko Epson Corporation | Method of stabilizing a frequency of a piezoelectric vibration element |
US8281467B2 (en) | 2005-02-03 | 2012-10-09 | Seiko Epson Corporation | Method of manufacturing a piezoelectric vibrator |
US8732924B2 (en) | 2005-02-03 | 2014-05-27 | Seiko Epson Corporation | Method of manufacturing a piezoelectric vibrator |
JP2013211854A (en) * | 2009-06-03 | 2013-10-10 | Qualcomm Inc | Apparatus and method for frequency generation |
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