JP2001302343A - Piezoelectric ceramic composition - Google Patents
Piezoelectric ceramic compositionInfo
- Publication number
- JP2001302343A JP2001302343A JP2000118287A JP2000118287A JP2001302343A JP 2001302343 A JP2001302343 A JP 2001302343A JP 2000118287 A JP2000118287 A JP 2000118287A JP 2000118287 A JP2000118287 A JP 2000118287A JP 2001302343 A JP2001302343 A JP 2001302343A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic composition
- piezoelectric ceramic
- mechanical quality
- quality factor
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、波動デバイス、フ
ィルター、発振子等に用いられる圧電磁器組成物に関す
る。The present invention relates to a piezoelectric ceramic composition used for a wave device, a filter, an oscillator, and the like.
【0002】[0002]
【従来の技術】従来、圧電磁器組成物としては二成分で
構成されるPZT(PbTiO3−PbZrO3)系磁
器や三成分で構成されるPCM[PbTiO3−PbZ
rO3(Mg0.5Nb0.5)TiO3]系磁器が主に
用いられてきた。その理由としては、上記の材料が大き
な圧電性を示すことはもちろんであるが、それととも
に、以下のことを挙げることができる。それは、圧電材
料の用途は、センサー、アクチュエーター、フィルター
等多種にわたり、各用途に要求される特性も様々である
が、上記材料系では特性を各成分量の割合を調整するこ
とにより、要求に対応した特性に適宜に操作できるから
である。Conventionally, piezoelectric composed of two components as a ceramic composition PZT (PbTiO 3 -PbZrO 3) based porcelain or PCM consists of three components [PbTiO 3 -PbZ
rO 3 (Mg 0.5 Nb 0.5 ) TiO 3 ] -based porcelain has been mainly used. The reason for this is, of course, that the above-mentioned materials exhibit great piezoelectricity, but the following can also be mentioned. The applications of piezoelectric materials cover a wide variety of applications, such as sensors, actuators, and filters, and the characteristics required for each application are also diverse. This is because it is possible to appropriately operate according to the determined characteristics.
【0003】しかし、これらの材料の主成分は、どれも
鉛を主成分とするもので、原料比でいうと酸化鉛にして
60wt%以上も含まれている。酸化鉛は、低温でも揮
発性が高く、仮焼、焼結等の製造時に大気中にもれる可
能性がある。また、産業廃棄物中から溶出することも考
えられる。また、この対策をするにも、設備設置のため
膨大な費用を投じなければならない。そこで、無鉛材料
で大きな圧電特性を示す材料が要望され、これまでも多
くの無鉛材料で圧電性が見出されている。例えば、(B
i0.5Na0.5)TiO3、Bi層状化合物である。しか
し、組成物(Bi 0.5Na0.5)TiO3は、電気機械結合
係数Ktが40%程度と実用可能な範囲であったが、機
械的品質係数Qmが250程度と低い。一方、Bi層状
化合物は、機械的品質係数高いが電気機械結合係数が3
0%以下である等の問題が有り、実用化はできなかっ
た。However, the main components of these materials are all
It is mainly composed of lead.
More than 60 wt% is contained. Lead oxide is volatile even at low temperatures.
Highly spontaneous and can be released into the atmosphere during calcination, sintering, etc.
There is a potential. Also consider elution from industrial waste.
available. In order to take this measure, it is necessary to install equipment.
You have to spend a lot of money. Therefore, lead-free materials
Materials that exhibit large piezoelectric characteristics are demanded.
Piezoelectricity has been found in many lead-free materials. For example, (B
i0.5Na0.5) TiOThree, Bi layered compounds. Only
And the composition (Bi 0.5Na0.5) TiOThreeIs an electromechanical coupling
The coefficient Kt was in the practical range of about 40%.
The mechanical quality factor Qm is as low as about 250. On the other hand, Bi layer
The compound has a high mechanical quality factor but an electromechanical coupling factor of 3
There is a problem such as 0% or less, so it cannot be put to practical use
Was.
【0004】そのため、機械的品質係数Qmが1900
以上、かつ、電気機械結合係数Ktが30%以上のもの
が要望されている。Therefore, the mechanical quality factor Qm is 1900
In addition, there is a demand for an electromechanical coupling coefficient Kt of 30% or more.
【0005】[0005]
【発明が解決しようとする課題】本発明は、上記の課題
を解決し、無鉛圧電材料であるとともに、高い機械的品
質係数を有する圧電磁器組成物を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and to provide a piezoelectric ceramic composition which is a lead-free piezoelectric material and has a high mechanical quality factor.
【0006】[0006]
【課題を解決するための手段】本発明は、一般式A
2+5XBi4−5X(Ti1−XNbX)5O
18(A:Ba、Sr、Caのうち少なくとも1種、0
≦X<0.3)で表され、添加物としてFe2O3、C
r2O3、MnO2、NiO、Co2O3の少なくとも
1種類以上を合計2.0wt%以下含有することを特徴
とする圧電磁器組成物である。The present invention provides a compound represented by the general formula A:
2 + 5X Bi 4-5X (Ti 1-X Nb X ) 5 O
18 (A: at least one of Ba, Sr and Ca, 0
≦ X <0.3), and Fe 2 O 3 , C
A piezoelectric ceramic composition characterized by containing at least one kind of r 2 O 3 , MnO 2 , NiO, and Co 2 O 3 in a total amount of 2.0 wt% or less.
【0007】[0007]
【発明の実施の形態】以下、本発明の実施の形態を説明
する。Embodiments of the present invention will be described below.
【0008】主成分原料として、高純度であるBaCO
3、SrCO3、CaCO3、Bi 2O3、TiO2、
Nb2O5を用いた。添加物原料としては、Fe
2O3、Cr2O3、MnO2、NiO、Co2O3を
用いた。[0008] As a main component material, high purity BaCO
3, SrCO3, CaCO3, Bi 2O3, TiO2,
Nb2O5Was used. As an additive material, Fe
2O3, Cr2O3, MnO2, NiO, Co2O3To
Using.
【0009】これらを一般式A2+5XBi
4−5X(Ti1−XNbX)5O18(A:Ba、S
r、Ca)に対し化学量論的に配合し、ボールミルによ
り20時間混合した。これを800℃で1時間保持して
仮焼し、次に、10時間粉砕を行った。バインダーとし
てポリビニルアルコールを用い造粒し、圧力1ton/
cm2で直径20mm、厚さ1mmの円板状に加圧成形
した。焼成は、温度1050〜1150℃で2時間保持
して行った。These are represented by the general formula A 2 + 5X Bi
4-5X (Ti 1-X Nb X ) 5 O 18 (A: Ba, S
r, Ca) was stoichiometrically mixed with the mixture and mixed by a ball mill for 20 hours. This was held at 800 ° C. for 1 hour and calcined, and then pulverized for 10 hours. Granulation using polyvinyl alcohol as a binder, pressure 1 ton /
It was pressed into a disk having a diameter of 20 mm and a thickness of 1 mm in cm 2 . The firing was performed at a temperature of 1050 to 1150 ° C for 2 hours.
【0010】その後、得られた焼結体の両面に銀電極を
設け、100℃のシリコーンオイル中で直流電圧4kV
/mmを電極間に加え、厚み方向に分極した。Thereafter, silver electrodes were provided on both sides of the obtained sintered body, and a DC voltage of 4 kV was applied in silicone oil at 100 ° C.
/ Mm was applied between the electrodes to polarize in the thickness direction.
【0011】そして、これらの試料について、圧電、誘
電特性の評価を行った。圧電特性は、LFインピーダン
スアナライザーを用い、共振−反共振法により電気機械
結合係数kp、kt、機械的品質係数Qmを算出し、評
価した。また、誘電特性は、LCRメータを用いて測定
周波数1MHzで測定を行い、比誘電率ε33 t/ε 0
で評価した。[0011] Then, for these samples,
The electrical characteristics were evaluated. Piezoelectric characteristics are LF impedance
Electrical machine using resonance-anti-resonance method
The coupling coefficients kp and kt and the mechanical quality coefficient Qm are calculated and evaluated.
Valued. The dielectric properties are measured using an LCR meter.
The measurement is performed at a frequency of 1 MHz, and the relative dielectric constant ε33 t/ Ε 0
Was evaluated.
【0012】一例として、表1に、A=Ba、X=0.
1のBa2.5Bi3.5(Ti0.9Nb0.1)5O
18に対し、添加物(Fe2O3、Cr2O3、MnO
2、NiO、Co2O3)を加えた場合の電気機械結合
係数kp、kt、機械的品質係数Qm及び比誘電率ε
33 t/ε0を示す。As an example, Table 1 shows that A = Ba and X = 0.
Ba 2.5 Bi 3.5 (Ti 0.9 Nb 0.1 ) 5 O
18 , additives (Fe 2 O 3 , Cr 2 O 3 , MnO
2, NiO, electromechanical coupling coefficient kp when adding Co 2 O 3), kt, the mechanical quality factor Qm and specific dielectric constant ε
33 t / ε 0 is shown.
【0013】[0013]
【表1】 [Table 1]
【0014】表1において、Fe2O3を加えた場合、
添加量2wt%までは添加物なしの場合に比べ、明らか
に機械的品質係数Qmの向上がみられる。2.5wt%
添加の場合でも機械的品質係数Qmは大きいが、電気機
械結合係数kp、ktが極端に小さくなり、実用には適
さなくなる。他の添加物でも同様の結果が得られ、添加
物は2wt%が限度である。また、1種類だけでなく数
種類添加したときも、機械的品質係数Qmの向上がみら
れる。添加量は、合計で2wt%を越えると電気機械結
合係数kp、ktの減少が生じるため、合計2wt%が
限界であると考えられる。In Table 1, when Fe 2 O 3 is added,
Up to the addition amount of 2 wt%, the mechanical quality factor Qm is clearly improved as compared with the case without the additive. 2.5wt%
Even in the case of addition, the mechanical quality factor Qm is large, but the electromechanical coupling factors kp and kt are extremely small, and are not suitable for practical use. Similar results are obtained with other additives, with the additive being limited to 2 wt%. In addition, when not only one kind but also several kinds are added, an improvement in the mechanical quality factor Qm is observed. If the total amount exceeds 2 wt%, the electromechanical coupling coefficients kp and kt decrease, so that the total amount of 2 wt% is considered to be the limit.
【0015】またA2+5XBi4−5X(Ti1−X
NbX)5O18において、0≦X<0.3の範囲で、
AがSr、Ca単独もしくはBa、Sr、Caのうちの
いずれかの混合の場合でも、上記同様の添加物の効果が
確認できた。A 2 + 5X Bi 4-5X (Ti 1-X
Nb X ) 5 O 18 , in the range of 0 ≦ X <0.3,
Even when A was Sr or Ca alone or a mixture of Ba, Sr and Ca, the same effect of the additive as described above could be confirmed.
【0016】以上より、A2+5XBi4−5X(Ti
1−XNbX)5O18(A:Ba、Sr、Ca、0≦
X<0.3)で表される組成物で、添加物としてFe2
O3、Cr2O3、MnO2、NiO、Co2O3の少
なくとも1種類以上を合計2.0wt%以下加えること
で電気機械結合係数、機械的品質係数が高く、フィルタ
ー、振動子等の用途への適用が可能となる。As described above, A 2 + 5X Bi 4-5X (Ti
1-X Nb X) 5 O 18 (A: Ba, Sr, Ca, 0 ≦
X <0.3), wherein Fe 2
By adding at least one of O 3 , Cr 2 O 3 , MnO 2 , NiO, and Co 2 O 3 in a total amount of 2.0 wt% or less, the electromechanical coupling coefficient and the mechanical quality coefficient are high, and filters, vibrators, etc. Application to the application becomes possible.
【0017】[0017]
【発明の効果】以上説明したように、本発明によれば、
無鉛圧電材料であるとともに、高い機械的品質係数を有
する圧電磁器組成物を提供することができた。As described above, according to the present invention,
A piezoelectric ceramic composition which is a lead-free piezoelectric material and has a high mechanical quality factor can be provided.
Claims (1)
1−XNbX)5O1 8(A:Ba、Sr、Caのうち
少なくとも1種、0≦X<0.3)で表され、添加物と
してFe2O3、Cr2O3、MnO2、NiO、Co
2O3の少なくとも1種類以上を合計2.0wt%以下
含有することを特徴とする圧電磁器組成物。1. A general formula A 2 + 5X Bi 4-5X (Ti
1-X Nb X) 5 O 1 8 (A: Ba, Sr, at least one of Ca, represented by 0 ≦ X <0.3), Fe 2 O 3 as an additive, Cr 2 O 3, MnO 2 , NiO, Co
A piezoelectric ceramic composition comprising at least one kind of 2 O 3 in a total amount of 2.0 wt% or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000118287A JP2001302343A (en) | 2000-04-19 | 2000-04-19 | Piezoelectric ceramic composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000118287A JP2001302343A (en) | 2000-04-19 | 2000-04-19 | Piezoelectric ceramic composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2001302343A true JP2001302343A (en) | 2001-10-31 |
Family
ID=18629455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000118287A Pending JP2001302343A (en) | 2000-04-19 | 2000-04-19 | Piezoelectric ceramic composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2001302343A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002226265A (en) * | 2001-01-31 | 2002-08-14 | Kyocera Corp | Piezoelectric ceramic composition and piezoelectric resonator |
JP2002226264A (en) * | 2001-01-31 | 2002-08-14 | Kyocera Corp | Piezoelectric ceramic composition and piezoelectric resonator |
WO2008130011A1 (en) * | 2007-04-19 | 2008-10-30 | Ngk Spark Plug Co., Ltd. | Piezoelectric ceramic composition and piezoelectric device |
-
2000
- 2000-04-19 JP JP2000118287A patent/JP2001302343A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002226265A (en) * | 2001-01-31 | 2002-08-14 | Kyocera Corp | Piezoelectric ceramic composition and piezoelectric resonator |
JP2002226264A (en) * | 2001-01-31 | 2002-08-14 | Kyocera Corp | Piezoelectric ceramic composition and piezoelectric resonator |
JP4737843B2 (en) * | 2001-01-31 | 2011-08-03 | 京セラ株式会社 | Piezoelectric ceramic composition and piezoelectric resonator |
WO2008130011A1 (en) * | 2007-04-19 | 2008-10-30 | Ngk Spark Plug Co., Ltd. | Piezoelectric ceramic composition and piezoelectric device |
US8502435B2 (en) | 2007-04-19 | 2013-08-06 | Ngk Spark Plug Co., Ltd. | Piezoelectric ceramic composition and piezoelectric device |
KR101393190B1 (en) | 2007-04-19 | 2014-05-08 | 니혼도꾸슈도교 가부시키가이샤 | Piezoelectric ceramic composition and piezoelectric device |
JP5537931B2 (en) * | 2007-04-19 | 2014-07-02 | 日本特殊陶業株式会社 | Piezoelectric ceramic composition and piezoelectric element |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4929522B2 (en) | Piezoelectric ceramic composition | |
JP3259677B2 (en) | Piezoelectric ceramic composition | |
JP4513948B2 (en) | Piezoelectric ceramic and manufacturing method thereof | |
JP5407330B2 (en) | Piezoelectric ceramic composition | |
JP3244027B2 (en) | Piezoelectric ceramic composition | |
JP3228175B2 (en) | Piezoelectric ceramic composition | |
JP6801513B2 (en) | Piezoelectric compositions and piezoelectric elements | |
JPH11292625A (en) | Production of piezoelectric ceramic | |
JP2014224038A (en) | Piezoelectric ceramic and piezoelectric device using the same | |
JP4524558B2 (en) | Piezoelectric ceramic and manufacturing method thereof | |
JP4995412B2 (en) | Piezoelectric ceramic composition and piezoelectric element using the same | |
JP4140796B2 (en) | Piezoelectric ceramics | |
JP4437848B2 (en) | Piezoelectric ceramic composition | |
JP3399364B2 (en) | Piezoelectric ceramic composition | |
JP4493226B2 (en) | Piezoelectric ceramic and piezoelectric element | |
JP2001220226A (en) | Piezoelectric ceramic | |
JPH11217262A (en) | Piezoelectric porcelain composition | |
JP4432280B2 (en) | Piezoelectric ceramic | |
JP2001302343A (en) | Piezoelectric ceramic composition | |
JP2004182532A (en) | Piezoelectric ceramic composition | |
JP4052612B2 (en) | Piezoelectric ceramic composition | |
JP4141051B2 (en) | Piezoelectric ceramic composition | |
JP2866986B2 (en) | Piezoelectric ceramic composition | |
JP2001048641A (en) | Piezoelectric porcelain composition | |
JP4370135B2 (en) | Piezoelectric ceramic composition |