JP2001293680A - Robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a good linearity without adjustment of measuring. SOLUTION: Toothed pulleys 62, 65, 66 and 69 are machined and manufactured in first and second arms 44 and 45, and then an eccentric direction is managed by placing mark 82 '○' in the largest direction of an eccentric amount. When the robot is assembled, in an overlapping state of longer axes of the first and second arms 44 and 45, respective eccentric directions (mark 82 '○') of the toothed pulleys 62, 65, 66 and 69 are arranged so as to mutually cancel eccentric effects of the toothed pulleys 62, 65, 66 and 69.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot for transferring a glass substrate (hereinafter, referred to as an LCD substrate) in a process of manufacturing a semiconductor wafer or a liquid crystal display (LCD).

[0002]

2. Description of the Related Art FIGS. 11 and 12 are schematic views showing the overall construction of a substrate transfer apparatus to which a substrate inspection apparatus for a liquid crystal display (LCD) and a work transfer robot are applied. FIG. 11 is a front view, and FIG. FIG. The substrate inspection apparatus 1 has a function of inspecting the LCD substrate 2 in the manufacturing process, and the substrate transporting apparatus 3 supplies the uninspected LCD substrate 2 to the substrate inspection apparatus 1 and the inspected LCD substrate 2
Is taken out of the substrate inspection apparatus 1. The substrate transport device 3 includes a cassette station 5 for storing a cassette 4 for storing and transporting the uninspected LCD substrate 2 and the inspected LCD substrate 2 together.
A work transfer robot 6 transfers the D substrate 2 between the substrate inspection apparatus 1 and the cassette 4. The cassette 4 includes a cassette 4a for storing the untested LCD substrate 2 and a cassette 4b for storing the tested LCD substrate 2.

The work transfer robot 6 includes a robot 7
And a lateral movement mechanism 8 for horizontally moving the robot 7 between the substrate inspection apparatus 1 and the cassette station 5 in the horizontal direction (the direction of arrow A). The robot 7 and the lateral moving mechanism 8 work in conjunction with each other, take out the uninspected LCD substrate 2 from the cassette 4 a that stores the uninspected LCD substrate 2, and place it on the substrate station 9 of the substrate inspection apparatus 1. The inspected LCD substrate 2 is taken out from the substrate station 9 and inserted into a cassette 4b for storing the inspected substrates.

[0004] The horizontal moving mechanism 8 is arranged in parallel with the pair of linear motion bearings 10 arranged in the horizontal direction between the substrate inspection apparatus 1 and the cassette station 5. It consists of a ball screw 11.

The robot 7 has a pair of arms (twin arms) 12 symmetrically on the left and right sides. In FIG. 12, only the right arm 12 is shown because it is complicated in the drawing. This right arm 12
The first arm 13 and the second arm 14 are sequentially rotatably connected to each other, and a right hand (chuck) 15 is pivotally supported at the end thereof. These first and second arms 13,
Inside 14 is provided an interlocking mechanism using a toothed belt.

FIG. 13 shows a configuration diagram of an interlocking mechanism disclosed in Japanese Patent Application Laid-Open No. 9-285981.
The first and second arms 13 viewed from the direction A shown in FIG.
FIG. 2 is a configuration diagram of an interlocking mechanism provided inside the apparatus;
A drive shaft 17 is rotatably supported on the arm base 16. The first arm 13 is rotatably connected to the drive shaft 17. On the tip side of the first arm 13,
A shaft 18 is provided, and the second arm 14 is rotatably connected to the shaft 18. The drive shaft 17 and the shaft 18 inside the first arm 13 are provided with toothed pulleys 19 and 20, respectively, and a toothed belt 21 is hung between the toothed pulleys 19 and 20.

A shaft 22 is provided on the distal end side of the second arm 14, and the right hand 15 is rotatably provided on the shaft 22. The shaft 18 and the shaft 22 inside the second arm 14 are provided with toothed pulleys 23 and 24, respectively, and a toothed belt 25 is hung between the toothed pulleys 23 and 24.

In such a work transfer robot 6, the right arm 12 and the hand 15 of the robot 7 are moved up and down integrally by driving a not-shown elevating motor as shown in FIG. Further, the work transfer robot 6 is moved in parallel in the horizontal direction between the substrate inspection apparatus 1 and the cassette station 5 as shown in FIG. In addition, the robot 7 integrally turns the right arm 12 and the right hand 15 thereof as shown in FIG. 16 by rotating a not-shown turning motor to change the direction of the LCD board 2.

Further, the robot 7 moves the LCD substrate 2 to the cassette 4 of the cassette station 5 or the substrate inspection device 1.
17, the right arm 12 is retracted (retracted) by an arm driving motor (servo motor) or the like (not shown) in order to store or take out the substrate station 9 from the angle θ1. A translational motion (forward / backward motion) is achieved by rotationally driving up to an angle θ2 when the vehicle advances (extends).

[0010]

However, in the actual robot 7, the first and second arms 13, 14 are provided.
Due to the effects of elongation and backlash of the internal toothed belts 21 and 25 and the eccentricity of the toothed pulleys 19, 20, 23 and 24, the tip of the right arm 12 advances meandering as shown in FIG. The tip of the hand 15 also moves while waving its head to the left and right as shown in FIG.

Among the causes of this meandering, the eccentricity of each toothed pulley 19, 20, 23, 24 is particularly large.

If the tip of the right arm 12 and the tip of the right hand 15 meander as described above, the LCD board 2 may come into contact with peripheral members and be damaged during the transportation of the LCD board 2. In addition, the positioning accuracy when placing the LCD substrate 2 is also reduced.

Thus, each toothed pulley 19, 20, 2
As a countermeasure for canceling the influence of the eccentricity of 3, 24, there is, for example, one disclosed in Japanese Patent Application Laid-Open No. 9-285981. As shown in FIGS. 20 and 21, each of the toothed pulleys 19, 24 has a tapered pin 25, 2 respectively.
6, and each toothed pulley 19, 24 is deliberately eccentric by hitting holes 27, 28, respectively.
In this case, by adjusting the driving method of each of the pins 25 and 26, a position that operates so as to cancel the meandering originally existing in the actual machine is found, and the toothed pulleys 19 and 24 are fixed. That is, each of the toothed pulleys 19, 24 is canceled so as to cancel the eccentricity of each of the toothed pulleys 19, 24.
Is installed with a bias.

However, the countermeasure described in Japanese Patent Application Laid-Open No. 9-285981 is not logical because it has not undergone geometric verification. In an actual robot manufacturing site, whether or not each pin 25, 26 is repeatedly hit or re-hit by completely blind trial and error to drive in order to obtain the linearity of the translation of the arm for each robot. There must be. For this reason, not only can the linearity of the translational motion of the arm not be ensured with sufficient productivity and reproducibility, but also the linearity must be measured for each robot.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a robot which can obtain good linearity at the tip of the arm and the tip of the hand without actually performing adjustment.

[0016]

According to a first aspect of the present invention, there is provided a robot having a plurality of arm members rotatably connected to each other and having a hand attached to a tip end thereof, the plurality of arm members and the hand being interlocked. This is a robot that sets the eccentric directions of the toothed pulleys in the interlocking mechanism in combination so that the effects of the eccentricity cancel each other.

According to a second aspect of the present invention, there is provided a robot in which a first arm member rotatably provided on an arm base and a second arm member are connected to each other and a hand is attached to a distal end thereof. The eccentric direction of the toothed pulley on the arm base side inside the member is set to 0 ° eccentricity with respect to the predetermined direction, and the eccentric direction of the toothed pulley on the second arm member side is set to 90 ° eccentricity with respect to the predetermined direction. The eccentric direction of the toothed pulley on the first arm member side inside the second arm member is set to 90 degrees eccentric with respect to a predetermined direction, and the eccentric direction of the toothed pulley on the hand side is eccentric with respect to a predetermined direction. The robot is set to 180 degrees.

The present invention according to claim 3 provides the invention according to claim 1 or 2
In the described robot, a predetermined mark is formed on the toothed pulley at a position corresponding to the direction in which the amount of eccentricity is greatest.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a configuration diagram of a robot. An elevating table 32 is slidably provided in the robot body 30 with respect to a guide 31. In the robot body 30,
An elevating motor 33 is provided. This lifting motor 33
The ball screw 35 is connected to the rotation shaft of the
It is connected to. The ball screw 35 is rotatably supported by a ball screw support 36, and
It is screwed into 2. Therefore, the rotation drive of the lifting motor 33 is transmitted to the ball screw 35, and the lifting table 32 is
Up and down along

The swing motor 3 is provided inside the lift 32.
7 are provided. An arm base 39 is connected to a rotation shaft of the turning motor 37 via a turning speed reducer 38.

Each of the left and right arms 4 is
0 and 41 are rotatably supported by the shaft. The right arm 40 and the left arm 41 of the left and right arms are provided so as to form a pair (twin arm) symmetrically.

Further, inside the arm base 39, the left and right arms 40 and 41 are respectively translated in a motion ｛advancing (extending motion).
Alternatively, two arm drive motors 42 and 43 for retreating (shrinking movement) are provided.

The right arm 40 includes a first arm 44 rotatably supported by the arm base 39, a second arm 45 rotatably connected to the first arm 44, and a second arm 45. Right hand 46 pivotally connected to arm 45
It is composed of

The left arm 41 includes a first arm 47 pivotally supported by an arm base 39, a second arm 48 pivotally connected to the first arm 47, and a second arm 48 Left hand 49 rotatably connected to arm 48
It is composed of

Each of the first and second arms 44 and 47 of the left and right arms 40 and 41 has an arm base 3
Each of the speed reducers 50 and 51 is disposed at a portion that rotates with respect to the gear 9. These reduction gears 50 and 51 are fixed to the arm base 39.

To the reduction gear input shafts 52 and 53, toothed pulleys 54 and 55 are connected, respectively. The toothed pulleys 56 and 55 connected to the toothed pulleys 54 and 55 and the arm driving motors 42 and 43, respectively. The toothed belts 58 and 59 are hung between the belts 57 and 57, respectively. In addition, each reduction gear 50, 5
The first arm 44,
47 are connected.

Inside the right arm 40, the connecting portion between the first arm 44 and the second arm 45 is the first arm 4
A shaft 64 is provided on the shaft 4, and the second arm 45 is rotatably supported on the shaft 64. First arm 4 of this shaft 64
A toothed pulley 65 is provided on the fourth side, and a toothed pulley 66 is provided on the second arm 45 side. A toothed belt 67 is hung between the toothed pulley 62 and the toothed pulley 65 fixed to the main body of the speed reducer so as not to rotate. A right hand 46 is rotatably supported at the distal end of the second arm 45 via a shaft 68. The shaft 68 is provided with a toothed pulley 69. Between the toothed pulley 69 and the toothed pulley 66, a toothed belt 70 is provided.
Is hung.

Here, the toothed pulley 62 and the toothed pulley 65
Is 2: 1. The ratio of the number of teeth between the toothed pulley 69 and the toothed pulley 66 is also 2: 1. The toothed pulley 62 is fixed to the arm base 39 and does not rotate. The toothed pulley 65 is rotatably supported on an end of the first arm 44 by a bearing (not shown) or the like. or,
The toothed pulley 66 is fixed to the first arm 44 and does not rotate. The toothed pulley 69 is rotatably supported by the second arm 45 by a bearing (not shown) or the like.

On the other hand, inside the left arm 41,
In the connection between the first arm 47 and the second arm 48, a shaft 71 is provided on the first arm 47, and the second arm 48 is rotatably supported on the shaft 71. A toothed pulley 72 is provided on the first arm 47 side of the shaft 71, and a toothed pulley 73 is provided on the second arm 48 side. Toothed pulley 63 fixed to the main body of the speed reducer so as not to rotate
A toothed belt 74 is hung between the gear and the toothed pulley 72. At the end of the second arm 48, the left hand 4
9 is rotatably supported via a shaft 75. The shaft 75 is provided with a toothed pulley 76. A toothed belt 77 is hung between the toothed pulley 76 and the toothed pulley 73.

Here, the toothed pulley 63 and the toothed pulley 72
Is 2: 1. The ratio of the number of teeth between the toothed pulley 76 and the toothed pulley 73 is also 2: 1. The toothed pulley 63 is fixed to the arm base 39 and does not rotate. The toothed pulley 72 is rotatably supported on an end of the first arm 47 by a bearing (not shown) or the like. or,
The toothed pulley 73 is fixed to the first arm 47 and does not rotate. The toothed pulley 76 is rotatably supported by the second arm 48 by a bearing (not shown) or the like.

Accordingly, the right arm 40 will be described. When the right arm 40 is rotated by the angle .theta.10 by the arm drive motor 42, when the viewpoint is taken on the first arm 44, the toothed pulley 62 becomes -.theta.10. , The toothed pulley 65 appears to rotate to -2θ10. However, when taking a viewpoint in a fixed coordinate system, the toothed pulley 62 does not rotate,
Only the toothed pulley 65 rotates by -θ10.

Since the second arm 45 is fixed to the toothed pulley 65, it always rotates in the opposite direction to the first arm 44 by the same angle in the fixed coordinate system as shown in FIG. Then, the first arm 44, the second arm 45
Since the lengths are the same R, the tip of the right arm 40 should move along a straight line (the Y-axis direction in FIG. 2). However, in the actual robot, due to the eccentricity of the toothed pulleys 62 and 65, it does not follow the theory, but moves somewhat out of the straight line, and the amount of deviation deviates from the meandering amount W.
A. Note that ra is the radius of the toothed pulley 62, and rb is the radius of the toothed pulley 65.

Also, when the right arm 40 is rotated by an angle θ10, if the viewpoint is taken on the right arm 40,
The toothed pulley 66 appears to rotate to θ11 = −2θ10, and the toothed pulley 69 also appears to rotate to θ12 = θ10. From the viewpoint of the fixed coordinate system, the right arm 40 is rotated by the angle -θ10, so that the rotation angle of the toothed pulley 69 is always “0”. Therefore, the right hand 46 fixed to the toothed pulley 69 should not be rotated, but should translate at the tip of the right arm 40. However, in the actual robot, the robot does not stand still as theoretically due to the eccentricity of the toothed pulley 69 and the like, but moves while swinging the head, and the angle is θ13 shown in FIG. Then, the meandering amount of the tip of the right hand 46 due to the angle θ13 becomes WH.

By the way, each toothed pulley 62, 63, 6
5, 66, 69, 72, 73 and 76 have an eccentricity of a pulley pitch circle 81 with respect to a circle (reference circle) 80 serving as a reference for attachment as shown in FIG. The upper limit of the eccentricity of these toothed pulleys is defined on the design drawing.

In the shipping inspection after processing and manufacturing the toothed pulley, the eccentricity is measured. Therefore, on the design drawing, an instruction is given to put, for example, a “〇” mark 82 in the direction in which the eccentricity measured in the shipping inspection is the largest.

By doing so, each toothed pulley 62,
63, 65, 66, 69, 72, 73, 76 are marked with “〇” 82 in the direction of the largest eccentricity.

When assembling the robot, when the long axes of the first arm 44 and the second arm 45 overlap with each other on the right arm 40 as shown in FIG. Pulleys 62, 65, 66, 6
9 so that the directions of the “〇” marks 82 in the respective eccentric directions are arranged as shown in FIG.

Each of these toothed pulleys 62, 65, 66, 6
9, the direction of each eccentricity is as shown in FIG.
The eccentric direction of is set as 0 degrees of eccentricity according to the X-axis direction,
The eccentric direction of the toothed pulley 65 is eccentric 90 with respect to the X-axis direction.
The eccentric direction of the toothed pulley 66 is set to 90 degrees with respect to the X-axis direction, and the eccentric direction of the toothed pulley 69 is set to 180 degrees with respect to the X-axis direction. This combination of eccentric directions is the best mode.

Each toothed pulley 62, 65, 6
6 and 69, the effects of the eccentricity of these toothed pulleys are canceled each other, and the right arm 40 during the translational movement described with reference to FIGS.
And the meandering of the tip of the right hand 46 can be minimized.

Each toothed pulley 62, 65, 6
As a method of obtaining the arrangement of the respective eccentric directions of 6 and 69, for example, the effective length of the first arm 67 and the second arm 45 in the right arm 40, the length of the right hand 46, the toothed pulley 62 , 65, 66, and 69, and the lengths of the toothed belts 67, 70, 74, and 77, etc., to create a simulation model of the right arm 40.

Then, for this simulation model, the meandering of the tip of the right arm 40 and the meandering of the tip of the right hand 46 are set using the combinations of the eccentric directions of the toothed pulleys 62, 65, 66, and 69 as variables. The trajectory is obtained by simulation. From this simulation result, the toothed pulleys 62, 65, 66, and 6 that minimize the meandering amount
9 is a result of obtaining combinations of the directions of the respective eccentricities of FIG.

Each toothed pulley 62, 65, 66, 69
As a method of obtaining the arrangement of the respective eccentric directions, the toothed pulley 6 is provided inside the right arm 40 of the actual robot.
2, 65, 66, and 69, and these toothed pulleys 62,
The right arm 40 is actually translated by changing the combination of the directions of the eccentricities 65, 66, and 69, and each tooth that minimizes the meandering of the tip of the right arm 40 and the tip of the right hand 46 is minimized. A combination of the eccentric directions of the attached pulleys 62, 65, 66, and 69 may be obtained.

FIG. 8 shows toothed pulleys 62, 65, 66, 69.
The effects of the eccentricity of the right arm 4
FIG. 9 is a diagram showing the meandering amount at the tip of the right arm 40 and the meandering amount at the tip of the right hand 46 when 0 is translated.
From the figure, the meandering amount at the tip of the right arm 40 and the meandering amount at the tip of the right hand 46 are suppressed to about 0.5 mm or less, and a positioning error when the right arm 40 is fully extended (forward). It turns out to be small.

When such a robot is applied to the work transfer robot 6 for transferring the LCD substrate 2 between the substrate inspection apparatus 1 and the cassette station 5 as shown in FIGS. 4 or L for the substrate station 9 of the substrate inspection apparatus 1.
When storing or removing the CD substrate 2, the right arm 40
Alternatively, even if the left arm 41 translates, the amount of meandering at the tip of the right arm 40 and the amount of meandering at the tip of the right hand 46 at this time are kept small, and during the transportation of the LCD substrate 2, However, there is no possibility that the LCD substrate 2 may be damaged by contacting peripheral members, and the positioning accuracy when the LCD substrate 2 is placed is also increased.

As described above, in one embodiment,
After processing and manufacturing the toothed pulleys 62, 65, 66, and 69, the "打 ち" mark 82 is driven in the direction with the largest amount of eccentricity to control the direction of deflection, and the first time when assembling the robot,
In a state where the long axes of the arm 44 and the second arm 45 overlap each other, the toothed pulleys 62, 65, 66, 69 cancel each other so that the effects of eccentricity of the toothed pulleys 62, 65, 66, 69 are canceled out. By combining the arrangements of the eccentric directions, the amount of meandering at the tip of the right arm 40 and the amount of meandering at the tip of the right hand 46 can be reduced.

In the best mode of the combination of the eccentric directions, as shown in FIG. 7, the eccentric direction of the toothed pulley 62 is set to 0 ° in accordance with the X-axis direction.
The eccentric direction of 5 is set to 90 degrees eccentric with respect to the X-axis direction,
The eccentric direction of the toothed pulley 66 is eccentric 90 with respect to the X-axis direction.
Degrees, and the eccentric direction of the toothed pulley 69 is set to 180 degrees eccentric with respect to the X-axis direction.

As described above, when the present invention is applied to the work transfer robot 6 for transferring the LCD substrate 2 between the substrate inspection apparatus 1 and the cassette station 5, the LCD substrate 2 is moved around the LCD substrate 2 during the transfer of the LCD substrate 2. There is no risk of damage due to contact with the member, and the positioning accuracy when the LCD substrate 2 is placed can be increased.

The present invention is not limited to the above embodiment, but may be modified as follows.

For example, as shown in FIG.
Although the eccentric direction is set to 0 degrees in accordance with the X-axis direction, it is not necessary to set strictly to 0 degrees, and as shown in FIG. May be provided. If the direction of the eccentricity is set within the allowable angle of 30 degrees, the effect of suppressing the meandering amount of the tip of the right arm 40 and the meandering amount of the tip of the right hand 46 can be obtained. This applies not only to the toothed pulley 62 but also to the other toothed pulleys 65, 66, and 69.

In the above-described embodiment, the case where the present invention is applied to a robot has been described. However, the present invention can be applied to all interlocking mechanisms using toothed pulleys. The toothed pulleys 54 and 55 and the toothed pulley 56 in the robot shown in FIG.
57.

In the robot according to the embodiment, the right arm 40 has two arms (the first and second arms 44, 44).
45), but can also be applied to a multi-joint arm in which more arms are connected.

Further, in the above-described embodiment, the mark “○” is stamped on each toothed pulley. However, the present invention is not limited to this, and any mark may be used if the eccentricity is known. Good. Even if it is not a mark, it may be drawn using a paint that does not easily fall off.

The left arm has a symmetrical structure with respect to the right arm described above, and a description of the structure will be omitted.

The position of the mark on the pulley may be any position as long as the direction of the eccentricity can be controlled, and is not limited to the above-described embodiment. For example, the first arm shown in FIG. As in the case of 44 and the second arm 45, the mark 82 may be driven in the direction in which the amount of eccentricity of the toothed pulleys 62, 65, 66, 69 is the smallest, and the direction of deflection may be controlled to assemble. .

Further, the present invention is not limited to the process of stamping (marking) the “「 ”mark 82. If the amount of eccentricity is controlled by using the mark at the time of assembling, for example, the“ 」” mark is not left.
The mark may be written with an oil pen or the like, and the mark may be erased after assembling.

Furthermore, the arrangement of the eccentricity shown in FIGS. 6 and 7 is merely an example, and other arrangements may be made without departing from the essence of the present invention. Is an arrangement in which the meandering is minimized at the “extended position” shown in FIG. 8, but if there is a transport mechanism that wants to suppress the meandering at the “contracted position”, a simulation or the like is performed and a new deviation is performed. You may find the combination of center positions.

FIG. 8 shows the result of a simulation considering only the effect of the eccentricity of the toothed pulley, and it is considered that factors such as the inertial force of each member affect the actual machine. The trajectory may be different from the trajectory shown, but the essence of the invention is to assemble with the eccentric direction of the toothed pulley managed by the mark, so the trajectory of the actual machine is measured, and the The arrangement of the eccentricity may be modified somewhat based on the assembly.

[0059]

As described above in detail, according to the present invention, it is possible to provide a robot capable of obtaining good linearity at the tip of the arm and the tip of the hand without actual measurement adjustment.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing one embodiment of a robot according to the present invention.

FIG. 2 is a diagram for explaining a meandering amount in a left arm in the embodiment of the robot according to the present invention.

FIG. 3 is a diagram for explaining the meandering amount of the tip of the left hand in the embodiment of the robot according to the present invention.

FIG. 4 is a view showing a mark in a direction in which the amount of eccentricity is hit on a toothed pulley in one embodiment of the robot according to the present invention.

FIG. 5 is a diagram showing a posture in which the long axes of the first and second arms of the left arm overlap in the embodiment of the robot according to the present invention.

FIG. 6 is a diagram showing a best mode of the arrangement of the eccentric directions of the respective pulleys inside the left arm in the embodiment of the robot according to the present invention.

FIG. 7 is a schematic view of the eccentric direction of each pulley inside the left arm in the embodiment of the robot according to the present invention.

FIG. 8 is a diagram showing the meandering amount at the tip of the arm and the meandering amount at the tip of the left hand when the effects of the eccentricity of each toothed pulley cancel each other in one embodiment of the robot according to the present invention.

FIG. 9 is a view showing an allowable set angle of an eccentric direction of each toothed pulley in one embodiment of the robot according to the present invention.

FIG. 10 is a view showing a modified example of the robot according to the present invention.

FIG. 11 is an overall configuration diagram of a conventional substrate transfer apparatus to which a substrate inspection apparatus for a liquid crystal display and a work transfer robot are applied.

FIG. 12 is a configuration diagram of the device as viewed from above.

FIG. 13 is a configuration diagram of an interlocking mechanism provided inside the first and second arms.

FIG. 14 is a diagram showing a vertical movement of the robot.

FIG. 15 is a view showing a parallel movement in a lateral direction by a lateral movement mechanism of the robot.

FIG. 16 is a view showing a turning motion of a left arm.

FIG. 17 is a view showing a translational movement of a left arm.

FIG. 18 is a diagram showing the meandering of the tip of the left arm during translational movement.

FIG. 19 is a diagram showing the meandering of the tip of the left hand during translational movement.

FIG. 20 is a diagram showing driving of a pin as a countermeasure for canceling the influence of the eccentricity of the toothed pulley.

FIG. 21 is a diagram showing driving of a pin as a countermeasure for canceling the influence of the eccentricity of the toothed pulley.

[Description of Signs] 30: Robot torso 31: Guide 32: Lifting table 33: Lifting motor 34: Toothed belt 35: Ball screw 36: Ball screw support 37: Rotating motor 38: Rotating reducer 39: Arm mount 40: Left side Arm 41: right arm 42, 43: arm drive motor 44: first arm 45: second arm 46: left hand 47: first arm 48: second arm 49: right hand 50, 51: reducer 54, 55, 56, 57, 62, 63: toothed pulley 58, 59: toothed belt 64, 68, 71, 75: shaft 65, 66, 69, 72, 73, 76: toothed pulley 67, 70, 74, 77: Synchronous belt

Claims (3)

[Claims] 1. A robot in which a plurality of arm members are rotatably connected to each other and a hand is attached to a distal end thereof, wherein the eccentric direction of each toothed pulley in an interlocking mechanism for interlocking the plurality of arm members and the hand is defined by: A robot characterized in that it is set in combination so that the effects of the eccentricity cancel each other. 2. A robot in which a first arm member and a second arm member rotatably provided on an arm base are connected to each other and a hand is attached to a distal end thereof, wherein the arm base inside the first arm member is provided. The eccentric direction of the toothed pulley on the side is set to 0 ° eccentric with respect to a predetermined direction, and the eccentric direction of the toothed pulley on the second arm member side is set to 90 ° eccentric with respect to the predetermined direction. The eccentric direction of the toothed pulley on the first arm member side inside the second arm member is set to 90 degrees eccentric with respect to the predetermined direction, and the eccentric direction of the toothed pulley on the hand side with respect to the predetermined direction. A robot characterized in that the eccentricity is set to 180 degrees. 3. The robot according to claim 1, wherein a predetermined mark is formed on the toothed pulley at a position corresponding to a direction in which the amount of eccentricity is greatest.