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JP2001287165A - Barrel polishing media, manufacturing method therefor, and barrel polishing method - Google Patents

Barrel polishing media, manufacturing method therefor, and barrel polishing method

Info

Publication number
JP2001287165A
JP2001287165A JP2000102000A JP2000102000A JP2001287165A JP 2001287165 A JP2001287165 A JP 2001287165A JP 2000102000 A JP2000102000 A JP 2000102000A JP 2000102000 A JP2000102000 A JP 2000102000A JP 2001287165 A JP2001287165 A JP 2001287165A
Authority
JP
Japan
Prior art keywords
barrel polishing
mass
polishing
barrel
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000102000A
Other languages
Japanese (ja)
Inventor
Koji Nishikawa
浩司 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tipton Manufacturing Corp
Original Assignee
Tipton Manufacturing Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tipton Manufacturing Corp filed Critical Tipton Manufacturing Corp
Priority to JP2000102000A priority Critical patent/JP2001287165A/en
Publication of JP2001287165A publication Critical patent/JP2001287165A/en
Pending legal-status Critical Current

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  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To solve the problem that defoaming agent is sometimes added for polishing work because use of a media consisting of a resin-based material may cause foaming by reaction with a resin component during barrel polishing, while its effect cannot last. SOLUTION: A small amount of defoaming agent (0.1 to 5 mass %) is added to mixture of the resin-based material (30 to 80 mass %) and an abrasive material (70 to 20 mass %) for hot forming into a prescribed shape to be used as barrel polishing media.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、バレル研磨時の
発泡を抑制することを目的としたバレル研磨用メディア
及びその製造方法並びにバレル研磨方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a barrel polishing medium for suppressing foaming during barrel polishing, a method for manufacturing the same, and a barrel polishing method.

【0002】[0002]

【従来の技術】従来樹脂基材からなるメディアを用いる
各種バレル研磨が行われていた。
2. Description of the Related Art Conventionally, various types of barrel polishing using a medium made of a resin base material have been performed.

【0003】前記バレル研磨に際し、コンパウンドを添
加して、ワークの光沢向上、防錆、水の軟化又は消泡作
用等を目的とすることも知られていた。またバレル研磨
中に消泡剤を作業者が添加する場合もあった。
It has been known that a compound is added at the time of barrel polishing to improve the gloss of a work, prevent rust, soften water or defoam, and the like. In some cases, an operator added an antifoaming agent during barrel polishing.

【0004】更にバレル研磨用樹脂メディアに脂肪酸
類、シリコン油又は金属石けんを添加した研磨用メディ
アの提案もある(特公昭49−5715号、特開昭60
−33375号、特開平11−226859号)。
Further, there has been proposed a polishing medium in which a fatty acid, silicone oil or metal soap is added to a resin medium for barrel polishing (JP-B-49-5715, JP-A-60-60).
-33375, JP-A-11-226859).

【0005】[0005]

【発明により解決しようとする課題】従来樹脂基材から
なるメディアを用いると、バレル研磨時に、研磨アクシ
ョンと、メディアの樹脂成分とにより内部に泡が発生
し、この泡が作業環境を損うことがある。例えば回転バ
レルの場合には、研磨終了後、蓋を開くと、泡が盛り上
がって内部を確認することが困難で排出作業に時間がか
かった。
Conventionally, when a medium made of a resin base material is used, bubbles are generated inside by a polishing action and a resin component of the medium during barrel polishing, and these bubbles impair the working environment. There is. For example, in the case of a rotating barrel, when the lid is opened after polishing is completed, bubbles rise and it is difficult to check the inside, and it takes time to discharge the material.

【0006】また遊星旋回バレルの場合には、内部が高
圧になるため、蓋を開けた時に泡が噴き出して周囲を汚
すおそれがあった。更に振動バレルを使用する場合に
も、バレル槽の上方が開放されている為に、泡が槽の周
辺に飛び散ることがあって、槽の周囲を汚損するおそれ
があった。さらにバレル槽内部の泡立ちが緩衝作用とな
って破損し易いワークの破損防止につながる反面、泡立
ちが強すぎると、アクションを弱め、研磨力を減少させ
たり、研磨流動を悪化させる問題点もあった。
Further, in the case of a planetary revolving barrel, since the pressure inside the barrel becomes high, when the lid is opened, there is a risk that bubbles may blow out and contaminate the surroundings. Further, even when a vibrating barrel is used, since the upper part of the barrel tank is open, bubbles may be scattered around the tank, and the periphery of the tank may be soiled. Further, foaming inside the barrel tank acts as a buffering action to prevent breakage of easily breakable work, but if foaming is too strong, there is a problem that action is weakened, polishing power is reduced, or polishing flow is deteriorated. .

【0007】また泡立ったバレル廃液を排水処理設備へ
通すことは、処理設備に多大の負担をかけることになり
好ましくない。
[0007] Further, passing the foamed barrel waste liquid through a wastewater treatment facility is not preferable because it imposes a great burden on the treatment facility.

【0008】次にバレル研磨に際し、コンパウンドを添
加することもあるが、コンパウンドによる消泡効果は一
定時間のみで(例えば遊星旋回バレルで約30分間)長
時間研磨する場合には効果がなくなるので、研磨アクシ
ョンとメディアの摩耗にしたがって泡が増加する一方、
コンパウンドによる消泡作用は劣化する問題点があっ
た。
Next, a compound may be added at the time of barrel polishing. However, the defoaming effect of the compound is not effective when polishing is performed for a long period of time only (for example, about 30 minutes with a planetary rotating barrel). While the foam increases with the abrasive action and media wear,
There is a problem that the defoaming action of the compound is deteriorated.

【0009】次に消泡剤を作業者が研磨槽中に添加すれ
ば、消泡効果は期待できるが、添加労力時間を必要とす
るのみならず、常に注意しなければならない問題点があ
り、回転バレル又は遊星旋回バレルのように蓋を有する
ものは、蓋を開けなければならないので、バレル研磨中
の添加事実上困難な場合が多い。
Next, if an antifoaming agent is added to the polishing tank by an operator, an antifoaming effect can be expected, but there is a problem that not only requires additional labor time but also requires careful attention. Those with lids, such as rotating barrels or planetary barrels, are often difficult to add during barrel polishing because the lid must be opened.

【0010】前記公知の発明は、何れもワークの光沢向
上を目的としたもので、消泡作用、研磨量、摩耗量等の
バランスまで配慮されてはいないので、前記問題点の解
決をすることはできなかった。
[0010] The above-mentioned known inventions are all aimed at improving the gloss of the work, and do not take into account the balance of the defoaming action, the amount of abrasion, the amount of abrasion, and the like. Could not.

【0011】[0011]

【課題を解決するための手段】この発明は、樹脂基材と
砥材との混合物に少量の発泡抑制剤を添加することによ
り前記従来の問題点を解決したのである。
The present invention has solved the above-mentioned conventional problems by adding a small amount of a foaming inhibitor to a mixture of a resin base material and an abrasive.

【0012】即ちバレル研磨用メディアの発明は、樹脂
基材と砥材との混合物100質量%に対し、研磨時の発
泡を抑制する消泡剤を0.1〜5質量%含ませたことを
特徴とするバレル研磨用メディアであり、樹脂基材30
〜80質量%と、砥材70〜20質量%としたものであ
る。
[0012] That is, the invention of the barrel polishing media is characterized in that 0.1 to 5% by mass of a defoaming agent for suppressing foaming during polishing is contained with respect to 100% by mass of a mixture of a resin base material and an abrasive. A barrel polishing medium characterized by a resin base material 30
To 80% by mass, and 70 to 20% by mass of the abrasive material.

【0013】また製造方法の発明は、熱硬化性の樹脂基
材に所定量の砥材と、消泡剤とを添加して撹拌混合した
後、所定の形状及び大きさに成形し、ついで加熱硬化さ
せることを特徴としたバレル研磨用メディアの製造方法
である。更に、熱可塑性の樹脂基材に所定量の砥材と、
消泡剤とを添加して混合し、この混合物を加熱溶融させ
た後、所定の形状及び大きさに成形することを特徴とし
たバレル研磨用メディアの製造方法であり、樹脂基材、
砥材及び消泡剤の添加混合は、順次添加又は同時添加す
るものである。
[0013] Further, the invention of the manufacturing method is such that a predetermined amount of an abrasive and an antifoaming agent are added to a thermosetting resin base material, mixed with stirring, formed into a predetermined shape and size, and then heated. This is a method for producing a barrel polishing medium characterized by curing. Further, a predetermined amount of abrasive material on a thermoplastic resin base material,
An antifoaming agent is added and mixed, and after heating and melting the mixture, a method for producing barrel polishing media characterized by being molded into a predetermined shape and size.
The addition and mixing of the abrasive and the antifoaming agent are sequentially or simultaneously added.

【0014】次に研磨方法の発明は、この発明で製造し
たメディアを使用し、常法によりバレル研磨する方法で
ある。
Next, the invention of the polishing method is a method of barrel polishing using the medium manufactured by the present invention by an ordinary method.

【0015】前記発明において、樹脂基材としては、フ
ェノール樹脂、不飽和ポリエステル樹脂、ポリウレタン
樹脂、エポキシ樹脂、又はユリア樹脂などの熱硬化性樹
脂及びポリエチレン樹脂、ポリプロピレン樹脂、ポリア
ミド樹脂などの熱可塑性樹脂を用いることができる。
In the above invention, the resin substrate may be a thermosetting resin such as a phenol resin, an unsaturated polyester resin, a polyurethane resin, an epoxy resin, or a urea resin, and a thermoplastic resin such as a polyethylene resin, a polypropylene resin, or a polyamide resin. Can be used.

【0016】次に砥材としては、アルミナ、シリカ、炭
化珪素、酸化鉄、酸化硼素、ジルコン、酸化クロム又は
ダイヤモンド或いはこれらを原料とした成形物など従来
知られている砥材は何れも使用することができる。
As the abrasive, any of the conventionally known abrasives such as alumina, silica, silicon carbide, iron oxide, boron oxide, zircon, chromium oxide or diamond or molded products made of these materials can be used. be able to.

【0017】また消泡剤としては、ポリエーテル、オレ
イン酸、ステアリン酸、グリセリンモノラウレート、ト
リブチルホスフェート、ステアリン酸カルシウム、ステ
アリン酸アルミニウム、ポリアルキレングリコール誘導
体、ジメチルシリコンオイル、有機変性シリコンオイ
ル、フルオロシリコンオイル、シリカシリコンコンパウ
ンド、鉱物油又は疎水性シリカなどの単体又はこれらの
組み合わせのものを用いることができる。
Examples of antifoaming agents include polyether, oleic acid, stearic acid, glycerin monolaurate, tributyl phosphate, calcium stearate, aluminum stearate, polyalkylene glycol derivatives, dimethyl silicone oil, organically modified silicone oil, fluorosilicone A simple substance such as oil, silica silicon compound, mineral oil or hydrophobic silica or a combination thereof can be used.

【0018】前記発明において、消泡剤の量が5質量%
を越えると、メディアの摩耗が激しくなり、0.1質量
%未満になると、消泡効果が著しく小さくなる。この点
は、使用する消泡剤、砥材の品質によっても異なるが、
摩耗量、研磨量及び消泡効果のバランスを考慮すれば、
消泡剤の量は2〜3質量%が好ましい場合が多い。
In the above invention, the amount of the antifoaming agent is 5% by mass.
If the ratio exceeds 0.1%, the abrasion of the medium becomes severe, and if it is less than 0.1% by mass, the defoaming effect becomes extremely small. This depends on the quality of the defoamer and abrasive used.
Considering the balance between the amount of wear, the amount of polishing and the defoaming effect,
In many cases, the amount of the defoamer is preferably 2 to 3% by mass.

【0019】[0019]

【発明の実施の形態】この発明は、バレル研磨時の発泡
量を少なくする為に、樹脂基材と砥材の混合物に0.1
〜5質量%の消泡剤を含ませるものである。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention is intended to reduce the amount of foaming during barrel polishing by using a mixture of a resin base material and an abrasive material in an amount of 0.1.
-5% by mass of an antifoaming agent.

【0020】前記における消泡剤は、樹脂基材と砥材と
を一体成形したメディア中に含ませるので、消泡剤が偏
倚することなく、均等に分散していると共に、一時に過
度に作用するおそれもない。
Since the defoaming agent in the above is contained in a medium in which the resin base material and the abrasive are integrally formed, the defoaming agent is uniformly dispersed without any deviation, and at the same time acts excessively. There is no danger.

【0021】この発明は、前記により成形したメディア
を常法により、バレル研磨に使用するので、特別の操
作、作業変更を伴うことなく、常法により実施すること
ができる。但し、研磨能力低下分については研磨時間を
若干長くするとか、その他の手段により支障なく研磨す
ることができる。
Since the present invention is used for barrel polishing using the medium formed as described above in a conventional manner, it can be carried out in a conventional manner without any special operation or work change. However, the polishing time can be slightly increased or other means can be used for the reduction in polishing ability without any trouble.

【0022】[0022]

【実施例1】この発明を実施例について説明する。メデ
ィアの基材としては不飽和ポリエステル樹脂(熱硬化性
樹脂)38質量%と、砥材としてジルコン62質量%を
混合した、撹拌後これらの混合物100質量%に対し、
消泡剤としてSNデフォーマー(サンノプコ株式会社
製)を0.1〜7質量%の範囲で添加し撹拌した。そし
てこのメディアに対しメチルエチルケトンパーオキサイ
ト(硬化剤)を添加してさらに撹拌し、メディア形状が
転写されたシリコン型に注型し、最後に100℃前後の
加熱炉へ装入し7〜8分間保持して、この発明のメディ
アを得た。このメディアは高さ15mm×底面φ15m
mの円錐形状のものである。このメディアを用いて、次
の条件によりバレル研磨テストをした。
Embodiment 1 The present invention will be described with reference to an embodiment. As a base material of the media, 38% by mass of an unsaturated polyester resin (thermosetting resin) and 62% by mass of zircon as an abrasive were mixed.
As a defoaming agent, SN deformer (manufactured by San Nopco Co., Ltd.) was added in the range of 0.1 to 7% by mass and stirred. Then, methyl ethyl ketone peroxide (curing agent) is added to the medium, and the mixture is further stirred, poured into a silicon mold to which the medium shape has been transferred, and finally charged into a heating furnace at about 100 ° C. for 7 to 8 minutes. By holding, the medium of the present invention was obtained. This media is 15mm high x 15m bottom
m conical shape. Using this medium, a barrel polishing test was performed under the following conditions.

【0023】(1)HS−2000・…((株)チップ
トン製、2リットル/槽) 旋回数200rpm (2)メディア・…消泡剤添加したものと未添加のも
の。1リットル/槽投入 (3)水量・…0.5リットル (4)コンパウンド・…HBC、20g/1リットル水
((株)チップトン製、光沢用コンパウンド)の割合で
添加したものと未添加のもの (5)研磨時間・…30分 以上の条件でバレル研磨し、研磨後の廃液を採取してそ
の液を1リットル容器に移し取り、泡の高さを測定した
結果は表1の通りである。泡の高さは3回の研磨テスト
を繰り返して測定し、その時の平均値とした。
(1) HS-2000 (Tipton Co., Ltd., 2 liter / tank) Number of revolutions: 200 rpm (2) Media: With and without defoaming agent. 1 liter / bath input (3) Amount of water: 0.5 liter (4) Compound: HBC, 20 g / 1 liter water (Chipton Co., Ltd., compound for gloss) added and not added (5) Polishing time: 30 minutes Barrel polishing was performed under the above conditions, waste liquid after polishing was collected, the liquid was transferred to a 1-liter container, and the height of bubbles was measured. Table 1 shows the results. . The height of the foam was measured by repeating three polishing tests, and the average value at that time was used.

【0024】[0024]

【表1】 [Table 1]

【0025】上記の結果から消泡剤を添加していくと、
何れも泡の高さが低くなっていることが分かる。つまり
バレル研磨において研磨メディアにこのような消泡剤を
添加すれば研磨により発生した泡量を低減することがで
きるのである。
From the above results, as the defoamer is added,
In each case, it can be seen that the height of the bubbles is low. That is, if such an antifoaming agent is added to the polishing media in barrel polishing, the amount of foam generated by polishing can be reduced.

【0026】次に研磨テストによるメディアの摩耗量と
ワークの研磨量との関係について試験した結果表2を得
た。テストはコンパウンドを添加した状態で行ない、供
試したワークはφ28mm×8mmの円柱状のステンレ
ス銅である。
Next, the relationship between the abrasion amount of the media and the abrasion amount of the work by a polishing test was tested, and Table 2 was obtained. The test was performed with the compound added, and the tested workpiece was a cylindrical stainless steel of φ28 mm × 8 mm.

【0027】[0027]

【表2】 [Table 2]

【0028】この結果から、消泡剤の添加量が増してい
くとメディアの摩耗量も増加し、一方で研磨量もあると
ころから低下することがわかる。これは摩耗した樹脂基
材がバレル槽内で緩衝材となり、ワークへの擦過作用を
劣化させたためと思われる。前記結果によれば、消泡剤
の添加量は2〜3質量%が好ましい。
From these results, it can be seen that as the addition amount of the antifoaming agent increases, the abrasion amount of the media also increases, while the polishing amount decreases from a certain point. This is presumably because the worn resin base material became a buffer material in the barrel tank and deteriorated the rubbing action on the work. According to the above results, the addition amount of the antifoaming agent is preferably 2-3% by mass.

【0029】[0029]

【実施例2】この発明の製造方法の実施例について説明
する。不飽和ポリエステル樹脂40質量%に、アルミナ
60質量%を入れて撹拌混合し、ついでステアリン酸
を、前記混合物100質量%に対して、3質量%入れる
と共に、硬化剤を入れて撹拌混合した後、シリコン型に
注型し、加熱炉に入れて100℃前後で7〜8分間加熱
すれば、この発明のメディアができる。
Embodiment 2 An embodiment of the manufacturing method of the present invention will be described. 60% by mass of alumina is added to 40% by mass of unsaturated polyester resin, and the mixture is stirred and mixed. Then, 3% by mass of stearic acid is added with respect to 100% by mass of the mixture, and a stabilizing agent is added and mixed. A medium of the present invention can be obtained by casting it in a silicon mold and heating it in a heating furnace at about 100 ° C. for about 7 to 8 minutes.

【0030】前記メディアの注型は、メディアの用途に
応じた形状のメディアを形成できるものを使用する。
For the casting of the medium, a medium capable of forming a medium having a shape corresponding to the use of the medium is used.

【0031】[0031]

【実施例3】この発明の他の実施例について説明する。
ポリエチレン樹脂粉末35質量%に、炭化珪素粉末65
質量%を加えて混合し、ついで前記混合物100質量%
に対して、シリカシリコンコンパウンド3質量%を加え
て撹拌混合すると共に、前記混合物を加熱溶融(180
℃位)させた後、成形機にかけて成形し、冷却硬化(常
温放置)させれば、この発明のメディアが出来る。
Embodiment 3 Another embodiment of the present invention will be described.
35% by mass of polyethylene resin powder and 65% of silicon carbide powder
% By weight, and then mixed, and then 100% by weight of the mixture.
, 3% by mass of a silica silicon compound was added thereto, and the mixture was stirred and mixed, and the mixture was heated and melted (180%).
℃), then molded in a molding machine and cooled and cured (room temperature standing) to obtain the media of the present invention.

【0032】[0032]

【発明の効果】この発明のバレル研磨用メディア及びバ
レル研磨方法によれば、バレル槽内に発生する泡が抑制
されバレル槽からの泡の吹出しが抑えられるので作業環
境を悪化させるおそれがない効果がある。またメディア
の摩耗により内部から新しい消泡剤が出てくるので長時
間又は繰り返し使用しても消泡効果が持続する。また消
泡剤を後から添加する煩わしさもなく、バレル研磨後の
廃液処理工程においても泡立ちが少ないため、廃水の処
理が容易となり処理設備への負荷低減や消耗品寿命の延
命化にも繋がるという諸効果がある。
According to the barrel polishing medium and the barrel polishing method of the present invention, the bubbles generated in the barrel tank are suppressed, and the blowing of bubbles from the barrel tank is suppressed, so that there is no possibility that the working environment is deteriorated. There is. In addition, since a new antifoaming agent comes out from the inside due to abrasion of the media, the antifoaming effect is maintained even when used for a long time or repeatedly. In addition, there is no need to add a defoaming agent later, and there is little bubbling in the waste liquid treatment process after barrel polishing. There are various effects.

【0033】この発明の製造方法によれば、メディアの
中へ所定量の消泡剤を均等に分布させ得る効果がある。
According to the production method of the present invention, there is an effect that a predetermined amount of an antifoaming agent can be evenly distributed in a medium.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) B24D 17/00 B24D 17/00 F ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) B24D 17/00 B24D 17/00 F

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 樹脂基材と砥材との混合物100質量%
に対し、研磨時の発泡を抑制する消泡剤を0.1〜5質
量%含ませたことを特徴とするバレル研磨用メディア。
1. 100% by mass of a mixture of a resin base material and an abrasive material
A barrel polishing medium characterized in that an antifoaming agent for suppressing foaming during polishing is contained in an amount of 0.1 to 5% by mass.
【請求項2】 樹脂基材30〜80質量%と、砥材70
〜20質量%としたことを特徴とする請求項1記載のバ
レル研磨用メディア。
2. A resin base material of 30 to 80% by mass and an abrasive material 70
The barrel polishing medium according to claim 1, wherein the content is set to 20 to 20% by mass.
【請求項3】 熱硬化性の樹脂基材に所定量の砥材と、
消泡剤とを添加して撹拌混合した後、所定の形状及び大
きさに成形し、ついで加熱硬化させることを特徴とした
バレル研磨用メディアの製造方法。
3. A predetermined amount of abrasive material on a thermosetting resin base material,
A method for producing barrel polishing media, comprising adding an antifoaming agent, stirring and mixing, forming the mixture into a predetermined shape and size, and then heating and curing.
【請求項4】 熱可塑性の樹脂基材に所定量の砥材と、
消泡剤とを添加して混合し、この混合物を加熱溶融させ
た後、所定の形状及び大きさに成形することを特徴とし
たバレル研磨用メディアの製造方法。
4. A predetermined amount of abrasive material on a thermoplastic resin base material,
A method for producing barrel polishing media, comprising adding and mixing an antifoaming agent, heating and melting the mixture, and then molding the mixture into a predetermined shape and size.
【請求項5】 樹脂基材、砥材及び消泡剤の添加混合
は、順次添加又は同時添加することを特徴とした請求項
3又は4の何れか1項記載のバレル研磨用メディアの製
造方法。
5. The method for producing a barrel polishing medium according to claim 3, wherein the addition and mixing of the resin base material, the abrasive and the defoaming agent are sequentially or simultaneously added. .
【請求項6】 請求項1記載のバレル研磨用メディアを
用いて常法によりバレル研磨することを特徴としたバレ
ル研磨方法。
6. A barrel polishing method using the barrel polishing medium according to claim 1 in a conventional manner.
JP2000102000A 2000-04-04 2000-04-04 Barrel polishing media, manufacturing method therefor, and barrel polishing method Pending JP2001287165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000102000A JP2001287165A (en) 2000-04-04 2000-04-04 Barrel polishing media, manufacturing method therefor, and barrel polishing method

Publications (1)

Publication Number Publication Date
JP2001287165A true JP2001287165A (en) 2001-10-16

Family

ID=18615953

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Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004270917A (en) * 2002-08-05 2004-09-30 Mitsui Chemicals Inc Halogen-based gas charging container, gas charged in the same, and method for processing charging container
JP2020183002A (en) * 2019-05-08 2020-11-12 株式会社チップトン Polishing stone for barrel polishing and centrifugal barrel polishing method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259774A (en) * 1986-04-15 1987-11-12 Aron Kasei Co Ltd Manufacture of polishing chip
JPS63117096A (en) * 1986-11-05 1988-05-21 Idemitsu Kosan Co Ltd Water-soluble additive
JPH0457882A (en) * 1990-06-27 1992-02-25 Showa Denko Kk Medium for barrel finishing
JPH0768463A (en) * 1993-09-01 1995-03-14 Kenko Sangyo Kk Media for grinding
JPH1022241A (en) * 1996-07-08 1998-01-23 Tokyo Fine Chem Kk Lapping liquid for silicon water and lapping agent

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259774A (en) * 1986-04-15 1987-11-12 Aron Kasei Co Ltd Manufacture of polishing chip
JPS63117096A (en) * 1986-11-05 1988-05-21 Idemitsu Kosan Co Ltd Water-soluble additive
JPH0457882A (en) * 1990-06-27 1992-02-25 Showa Denko Kk Medium for barrel finishing
JPH0768463A (en) * 1993-09-01 1995-03-14 Kenko Sangyo Kk Media for grinding
JPH1022241A (en) * 1996-07-08 1998-01-23 Tokyo Fine Chem Kk Lapping liquid for silicon water and lapping agent

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004270917A (en) * 2002-08-05 2004-09-30 Mitsui Chemicals Inc Halogen-based gas charging container, gas charged in the same, and method for processing charging container
JP2020183002A (en) * 2019-05-08 2020-11-12 株式会社チップトン Polishing stone for barrel polishing and centrifugal barrel polishing method

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