JP2001240179A - Precision substrate storing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a precision substrate storing container enabling an identifi cation code provided on a precision substrate to be recognized from the outside of the storing container over a long period of time. SOLUTION: The precision substrate storing container 1 composed of a container main body 2 and a lid 4 stores and holds therein a precision substrate 3 provided with an identification code 6 to be identified by utilizing light. The precision substrate storing container 1 is formed of a light transmittable material and is provided with a recess 8a, which is recessed toward the side of the identification code 6 and whose bottom is flat, at a position opposed to the identification code 6 of the stored precision substrate 3. Further, a protective member 5 may also be detachably mounted in the recess 8a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to at least electricity,
Stores, stores, transports, and manufactures precision substrates such as liquid crystal cells, quartz glass, photomasks, mask blanks, reticles, photomasks with pellicles, or substrates for recording media used in manufacturing fields such as electronics or semiconductors. The present invention relates to a precision substrate storage container used in a process, and particularly to a precision substrate storage container suitable for externally recognizing an identification code provided on a precision substrate stored therein.

[0002]

2. Description of the Related Art For example, in the field of semiconductor-related manufacturing, in recent years, with the miniaturization and high integration of ICs and LSIs, 300 m
Production of semiconductor products by a new semiconductor factory using a large-diameter wafer having a diameter of 17 mm or more (7 inch size) has been studied. ) Or 230.0 mm square (9 inch size) is under study to increase the size of the mask. Automation of means for handling precision substrate storage containers in the manufacturing process and during storage in order to improve production efficiency by increasing the size of precision substrates such as the photomasks and reduce costs by improving the yield of semiconductor products. Is being promoted.

One example of a conventional precision substrate storage container is as follows.
As shown in FIG. 8, there is a type in which a precision substrate, for example, a photomask 103 is stored in the container main body 102, and a lid 104 joined to the container main body 102 by a hinge or hinge structure is fitted from above. Photo mask 103
Are stored in a state where the surface provided with the identification code 106 is turned downward. When the container is stored from below the bottom surface of the container body 102 or with the surface on which the identification code 106 is formed facing upward, the identification code 106 is recognized from above the lid 104 to perform the process management. .

[0004]

However, since the above-mentioned precision substrate storage container has a flat bottom surface of the container body and a flat surface of the lid body, it is likely to be scratched by contact with a manufacturing apparatus or a transportation means during use. Or dust easily adhered during use.
If the surface of the precision substrate storage container becomes cloudy due to such scratches or dust, there is a problem that the identification code reading device provided in the manufacturing process mistakes the identification code provided on the precision substrate.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide an identification code provided on a precision substrate for a long time from outside the precision substrate storage container. It is an object of the present invention to provide a precision substrate storage container that can be recognized stably.

[0006]

The present invention relates to a precision substrate storage container for storing and holding a precision substrate comprising a container main body and a lid, and provided with an identification code for identification using light. The precision substrate storage container is formed of a light-transmitting material, and a recessed portion having a flat bottom at the identification code side is provided at a position facing the identification code of the stored precision substrate. Further, a detachable protection member may be attached to the recess.

[0007]

FIG. 1 shows an embodiment of the present invention.
This will be described with reference to FIGS. Here, a photomask used in an exposure step, which is one of the semiconductor manufacturing steps, was taken as an example of the precision substrate.

FIG. 1 is a bottom view of a precision substrate storage container showing a first embodiment of the present invention, and FIG.
It is the figure which showed the sectional view on the A line with the bottom face down. The precision substrate storage container 1 has a rectangular bottom member and four side walls surrounding the rectangular bottom member, and a container body 2 having an opening formed upward.
And a lid 4 having a downward opening facing the opening of the container body 2 and closing the opening. Container body 2
A plurality of support members 2a, 2a, 2b are provided on the inner surface of
b, 2c, 2d, 4a, and 4b are provided. Here, the side wall of the container body 2 is set low so that the photomask 3 can be easily taken out when the cover 4 is removed, and the side wall of the cover 4 is set high accordingly. However, the present invention is not limited to this. Side walls may be provided at the same height on both the container body 2 and the lid 4, or side walls having different heights may be combined.

[0009] At the periphery of the photomask 3 housed inside, a number, a symbol, a barcode or a two-dimensional barcode (QR code) in which the manufacturing history of the photomask 3 and the processing steps used are recorded are displayed. An identification code 6 is provided. The identification code 6 is formed on a member provided with an adhesive portion on the back surface and is attached to the photomask 3, is formed on an adhesive film member and is attached to the photomask 3, or is formed by inkjet or laser marking. Or the like, on the surface of the photomask 3.

As shown in FIGS. 1 and 2, a concave portion 8a having a flat bottom is formed on the bottom surface of the container body 2 so as to face an identification code 6 formed on a photomask 3 housed therein.
Are formed. The bottom of the recess 8a is used as a detection unit for the identification code 6 formed on the photomask 3.
In addition, the above-mentioned concave portions are provided at one or more positions of the container body 2 as necessary. Further, in a mold used for molding the container body 2 and the lid 4, the flat portion serving as the detection unit may be finished by, for example, using diamond abrasive grains to improve the polishing accuracy of the surface more than other portions, When a high hardness steel material is used to form a mirror surface with a surface roughness of 0.1 μm or less, the transparency of the detection unit provided on the container body 2 or the lid 4 obtained by injection molding is improved. It is more preferable. Further, since the detection section is formed in a concave shape from the surface of the bottom member of the container body 2 and does not contact other members because it is formed at the bottom, it is difficult to be damaged during use. , And it is possible to stably recognize the identification code 6 during that time.

Further, if the detachable protective member 5 is fitted into the recess 8a to protect the detection section, the detection section can be protected from scratches and dust for a longer period of time during transportation or storage. Therefore, the surface condition of the detection unit can be maintained in a good condition for a long period of time.

The material used for the container body 2 and the lid 4 is preferably a transparent material such as PMMA, polycarbonate or polystyrene, and is preferably an antistatic material. In particular, it is preferable to use PMMA which is lightweight, has excellent moldability, and has a high light transmittance so that the identification code 6 provided on the stored photomask 3 is easy to read. Note that the transparent material mentioned here is not only a material that can be seen through, but also emits light from a light source such as a red LED used in the identification code reading device 9.
Any material may be used as long as it has a necessary transmittance for light having a wavelength such as 60 nm to 670 nm.

As shown in FIG. 5, the concave portion 8a provided in the container body 2 is basically formed as a concave portion that opens downward, and the ID code reading device 9 of the identification code reading device 9 disposed in the manufacturing process. It is preferable that the detector has a size and a shape that can be moved in and out. The light emitted from the identification code reading device 9 passes through the detection portion of the concave portion 8a, is reflected by the identification code 6, then passes through the detection portion again, and is detected by the detector of the identification code reading device 9. You. Therefore, as for the thickness of the detection portion, the transmittance of the light having the wavelength emitted from the identification code reader 9 after passing through the detection portion twice is 70% or more from the viewpoint of the light transmittance. 0.5 mm to 5 mm in consideration of the fact that the detection unit needs to have a thickness having sufficient mechanical strength.
, But is preferably set to 1 mm to 3 mm.

A distance t between the lower surface of the identification code 6 provided on the photomask 3 shown in FIG.
Is appropriately set according to the optimum detection distance of the identification code reading device 9. When it is preferable to make the distance between the identification code 6 and the identification code reading device 9 as close as possible in order to read the identification code 6 with high accuracy, the identification code reading device 9 is mounted on the recess 8a of the precision substrate storage container 1.
You can also get into it.

The supporting member 2 for holding the photomask 3
Although a, 2b, 2c, 2d, 4a, and 4b can be formed integrally with the inner surfaces of the container body 2 and the lid 4, respectively.
Further, in order to protect the photomask 3 from being damaged, it is more preferable that the photomask 3 is formed and attached as a separate member made of an elastic material such as polyethylene, various thermoplastic elastomers or fluoro rubber.

As shown in FIG. 4, the protective member 5 is formed in a convex shape that can be fitted into a concave portion 8a provided in the container body 2.
The shape of the protective member 5 is not particularly limited. Usually, it is preferable that the protective member 5 is formed to have the same size as or slightly larger than the concave portion 8a and to be frictionally engaged with the concave portion 8a. It is also possible to provide and lock the locking portion 11 formed of a convex portion to be inserted. That is, the protective member 5 can be detachably locked to the concave portion 8a provided on the bottom surface of the container body 2 by frictional force. The material used for the protective member 5 is preferably softer than the material used for the container body 2. Therefore, various thermoplastic elastomers such as polyethylene, polypropylene, olefins and esters, fluorine rubber, EPDM, NBR or Silicone rubber and the like can be mentioned, and more preferably, it is molded using lightweight, excellent moldability and low cost polyethylene. Also,
The protection member formed of the above-mentioned material may be subjected to an antistatic treatment as required.

As described above, in the precision substrate storage container 1 shown in the first embodiment of the present invention, when the photomask 3 is stored, stored, and transported, the photomask 3 is first placed on the container body 1. And cover the cover 4 from above. For example, as shown in FIGS. 1 and 2, the support members 2a, 2b, 2c, 2d, 4a, and 4b are fitted to a plurality of locations of the photomask 3. While holding the mask 3, for example, L-shaped projections 31 symmetrical with respect to the mirror surface are provided from the left and right side walls of the lid 4 and the container body 2, and a member 32 having a substantially C-shaped cross section is fitted into these. The lid 4 and the container main body 2 may be locked with each other, or the lid and the container main body may be locked using a frame member having a rectangular cross section that sandwiches the four corners of the container main body and the lid. Good.
In FIG. 2, the C-shaped section member 32 and the L-shaped projection 31 do not actually appear, and are indicated by two-dot chain lines. In addition, during transportation or long-term storage, the protection member 5 is attached to the concave portions 8a and 8b formed on the bottom portion of the container main body 2, and dust and the like are attached and scratched. To protect. Next, for use in the manufacturing process, the protection member 5 is removed and put into the manufacturing line. Then, as shown in FIG. 5, it is possible to make the identification code reading device 9 approach the detection unit from the bottom surface side of the container body 2 and read the identification code 6 without misidentification.

The number and position of the identification codes can be changed as appropriate, and may be on the top or side of the photomask. In such a case, the recess may be formed on the surface of the precision substrate storage container in accordance with the position of the identification code on the photomask.

FIG. 6 is a cross-sectional view of the precision substrate storage container according to the second embodiment of the present invention taken along a line at a position equivalent to the line AA in FIG. 1 with the bottom face down. . As shown in FIG. 6, concave portions 18a and 18b serving as detecting portions are provided on the bottom surface of the container body 12 and the upper surface of the lid member 14 so as to face each other, and the cross-sections fitted into the concave portions provided opposite each other. A U-shaped protection member 15 may be attachable. At this time, since the protective member 15 is fitted into the concave portions 18a and 18b formed in the container body 12 and the lid 14, respectively, the protective member 15 is reliably prevented from falling off. The handling of the precision substrate storage container 10 in this case is the same as that described in the above-described embodiment of the present invention, and the description is omitted here.

FIG. 7 is an enlarged sectional view showing the vicinity of a protective member mounted on a concave portion of a precision substrate storage container according to a third embodiment of the present invention. As shown in FIG.
Is a sheet-like member having through-holes formed at both ends, and the protective member 25 is locked and held by a rib 21 formed on a peripheral edge of a concave portion 28 formed on the surface of the precision substrate storage container. Is also good.

In the above-described embodiment of the present invention, a storage container for storing a photomask has been described. However, a precision substrate having the same function as that of the precision mask provided with a recognition code similar to the photomask is provided. If the storage container and the protection member are used, the detection portion of the recognition code provided on the precision substrate storage container can be protected from scratches and dust, and the recognition code can be stably read for a long time without misidentification. It becomes possible.

[0022]

According to the present invention, even when the precision substrate storage container comes into contact with various devices during handling, the detecting portion is not easily damaged. Further, by fitting the protection member having a convex shape to the concave portion, it is possible to further suppress the adhesion of dust or the generation of a scratch on the detection portion when not in use or during transportation. Accordingly, the detection unit is prevented from fogging due to scratches or dust, so that an identification code reading error by the identification code reading device in the manufacturing process is reduced.

[Brief description of the drawings]

FIG. 1 is a bottom view of a precision substrate storage container according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along the line AA in FIG. 1 with the bottom face down.

FIG. 3 is an enlarged cross-sectional view of the vicinity of a concave portion in FIG. 2, showing a protection member inserted into the concave portion.

FIG. 4 is a perspective view of a protection member shown in FIG.

FIG. 5 is a precision substrate storage container showing the first embodiment of the present invention (a cross-sectional view taken along a line equivalent to the line AA in FIG. 1 is shown with the bottom face down). FIG. 3 is a diagram showing a positional relationship between the device and an identification code reading device (shown in a schematic diagram).

FIG. 6 is a cross-sectional view of the precision substrate storage container according to the second embodiment of the present invention taken along a line at a position equivalent to the line AA in FIG. 1, with the bottom face down.

FIG. 7 is an enlarged sectional view of the vicinity of a protection member attached to a concave portion of a precision substrate storage container according to a third embodiment of the present invention.

FIG. 8 shows a conventional precision substrate storage container taken along line AA in FIG.
It is the figure which showed the cross section in the line in the position equivalent to the line with the bottom face down.

[Explanation of symbols]

 1, 10, 100 Precision substrate storage container 2, 12, 102 Container main body 2a, 2b, 2c, 2d, 4a, 4b Support member 3, 13, 23, 103 Photomask 4, 14, 104 Lid 5, 15, 25 Protective member 6, 16, 26, 106 Identification code 7, 17, 107 Pattern forming portion 8a, 8b, 18a, 18b, 28 Depression 9 Identification code reading device 11 Locking portion 21 Rib 31 L-shaped protrusion 32 Cross section C Character-shaped member

Claims (2)

[Claims] 1. A precision substrate storage container, comprising a container body and a lid, for storing and holding a precision substrate provided with an identification code for identification using light, wherein the precision substrate storage container is made of a light-transmitting material. While being formed of material, at the position facing the identification code of the stored precision substrate,
A precision substrate storage container characterized in that a bottom recessed on the identification code side is provided with a flat recess. 2. The precision substrate storage container according to claim 1, wherein a detachable protection member is attached to the recess.