JP2001201468A - Sample analyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample analyzer for which detection mechanism can be made small, simple and compact. SOLUTION: The sample analyzer is provided with an X-ray gun 2, by which a sample 1 is irradiated with X-rays. The sample analyzer is provided with an X-ray waveguide capillary body 3D, composed of many X-ray waveguide capillaries 3 which are arranged, in such a way that their respective opening parts on one end side use an X-ray irradiation point P on the sample 1 as their vertex, that they are arranged on a conical face using an irradiation axis L as their axial center, that signal X-rays from the sample 1 are made incident and that their opening parts on the other end side radiate the incident X-rays to the circumference of the irradiation axis L. The sample analyzer is provided with an X-ray detector 4, which detects signal X-rays radiated from the X-ray waveguide capillary body 3D. Consequently, it is possible to realize a sample analyzer, in which the X-ray detection mechanism can be miniaturized and simplified and which is compact and portable.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for irradiating a sample, for example, a metal or nonmetal material, or a material to be inspected such as a structure, with an X-ray or the like, and detecting a signal X-ray from the sample. The present invention relates to a sample analyzer for analyzing components and the like.

[0002]

2. Description of the Related Art An example of this type of sample analyzer is a fluorescent X-ray device. This fluorescent X-ray apparatus irradiates a sample with X-rays generated from an X-ray gun (X-ray source), and detects fluorescent X-rays emitted from the sample by the irradiation with an X-ray detector. By measuring the wavelength of the fluorescent X-ray, the elements constituting the sample can be known. In such an apparatus, as shown in FIG. 8, the X-ray detector is installed in an inclined direction having a certain angle with respect to the X-ray irradiation axis, and the X-ray gun 2 and the X-ray detector 4 are arranged.
Are arranged at positions separated from each other.

On the other hand, in the above-mentioned fluorescent X-ray apparatus, X-ray photoelectron spectroscopy apparatus and the like, it is necessary to irradiate a small part of a sample with X-rays from an X-ray gun. Research has been conducted, and a new "X-ray beam converging device" (Japanese Patent Application Laid-Open No. 62-299241) and an "X-ray focusing device" (Japanese Patent Application Laid-Open No. 2-21992) have been proposed. This new “X-ray beam focusing device” is designed to combine a large number of small-diameter pipes such that one collecting surface is large and the other collecting surface is small, and the center extension line of each pipe from the other collecting surface is one point. Into a frustoconical shape, converging on
One of the collective surfaces is defined as an X-ray incident surface, and the other
It is a line emission surface. According to this X-ray beam converging device, a finer X-ray beam can be obtained with high power. Further, in the "X-ray concentration apparatus", the extension of the center line of each tube outward from one tube end intersects at one point, and the extension of the center line at the other end of each tube outward from the tube end is as described above. A number of tubes are interconnected so as to be associated with one point different from one point, the X-ray source is located at the meeting point of each tube center line extension at one end of the tube group, and each tube center line at the other end is connected. The irradiation point of the sample is positioned at the extension meeting point. Further, there has been proposed a coaxial ion beam analyzer in which an ion beam is irradiated on a sample, and ions reflected from the sample are detected by a detector arranged around an irradiation axis.

[0004]

As described above, when various materials are analyzed and analyzed using X-rays, it is necessary to converge the X-rays to minute points or to use secondary X-rays from the sample. ,
That is, X-rays containing signals corresponding to the components of the sample (hereinafter referred to as X-rays)
Signal X-rays) must be detected satisfactorily. However, in the conventional fluorescent X-ray apparatus,
Since the X-ray gun and the X-ray detector are installed separately, it is difficult to simplify and downsize the apparatus. In addition, there is a problem that adjustment for adjusting the irradiation position to coincide with the detection focus position and work for setting the sample position are required, and the operability is poor and skill is required.

As shown in FIG. 9, the intensity of the signal X-ray emitted from the sample increases as the angle θ with respect to the irradiated X-ray decreases. However, it is difficult to install the X-ray detector at a position where the angle θ is small. In addition, newly proposed “X-ray beam converging device” and “X-ray concentrating device” are technologies that can converge and irradiate X-rays to minute spots, or efficiently detect X-rays generated from minute spots. Technology,
There is a problem that an adjustment operation for matching the irradiation position and the X-ray detection position is required, and considerable skill is required. An object of the present invention is to provide a sample analyzer which solves such a problem.

[0006]

In order to solve the above-mentioned problems, a sample analyzer provided by the present invention uses X
X-ray generators for irradiating X-rays, and the openings on one end side are arranged along a conical surface whose apex is the X-ray irradiation point of the sample, and signal X-rays from the sample are incident on the other end. The opening has an X-ray waveguide combined with a large number of X-ray waveguides arranged so as to emit an incident signal X-ray around the irradiation axis, and is emitted from the X-ray waveguide. Signal X
An X-ray detector for detecting a line is provided, and the sample is analyzed by an output signal from the X-ray detector. Therefore, the signal X-rays emitted from the sample are received by the X-ray waveguide tube and guided to the X-ray detector.
The X-ray source and the X-ray detector can be coaxially arranged, and the configuration can be simplified and downsized.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a sample analyzer provided by the present invention will be described with reference to an embodiment of an analyzer using X-rays. FIG. 1 is a perspective view showing an example of a basic configuration of a sample analyzer according to the present invention. That is, in FIG. 1, reference numeral 1 denotes a sample to be analyzed, specifically, a metal material or a non-metal material, that is, any material such as cement, concrete, food, and medicine, and a structure. 2
Is an X-ray generator for emitting and irradiating the sample 1 with X-rays, specifically an X-ray gun. P indicates this X-ray irradiation point.

When X-rays are irradiated, signal X-rays are generated along the conical surface whose apex is the irradiation point P as described above. Numeral 3 denotes an X-ray waveguide tube which receives the signal X-rays at an opening on one end side, and is arranged in a large number along the conical surface. The X-ray waveguide 3 is specifically an X-ray guiding X-ray.
The X-ray waveguide tube 3D is constituted by a combination of these fibers. In the illustrated example, this X-ray waveguide thin tube 3 is thick for ease of understanding, and only two tubes are representatively shown. However, these are thin tubes made of fiber, and these have the irradiation point P as the apex, and A large number are provided along a conical surface whose axis is the X-ray irradiation axis L. In the illustrated example, the shape is a single conical surface, but it may be arranged double along the double conical surface, or may be triple or quadruple. However, the openings are formed in the directions of the conical surfaces having the irradiation point P as the apex, so that the signal X-rays can be efficiently and appropriately incident. It is desirable that the apex angle of the conical surface is small as described with reference to FIG.

The other end of the X-ray waveguide tube 3D is provided with an opening for emitting an incident signal X-ray. In the illustrated example, the opening is provided with an X-ray irradiation axis L. They are arranged along a conical surface so as to converge upward. That is, it is formed as a curved tube, and thus this X-ray waveguide thin tube 3D has the function of a lens. Since there are a large number of fibers and X-rays can be converged, this X-ray waveguide tube 3D can also be called a multi-capillary X-ray fiber lens. Numeral 4 denotes an X-ray detector installed in the vicinity of the opening, which is an embodiment in which one X-ray waveguide 3 is provided for each X-ray waveguide capillary 3 in the illustrated example. Since the opening on the other end side has a ring shape, it can be a single annular X-ray detector. Alternatively, one provided at the convergence position, such as an X-ray detector indicated by 4S, may be used. Note that, as will be described later, in the present invention, it is not essential that the opening on the other end side of the X-ray waveguide thin tube 3D be arranged so that the emitted X-rays converge.

With the above-described configuration, the X-ray signal generated from the sample is detected by the X-ray detector 4 and its wavelength is measured to clarify the elements of the sample 1, thereby enabling qualitative analysis. Alternatively, quantitative analysis in which the amount of the contained element is known by measuring the intensity of the signal X-ray can be performed.

In the configuration shown in FIG. 1, the X-ray detector 4,
Although the 4S is located behind the X-ray gun 2, this arrangement is not limited in the present invention, and it may be located in front of the X-ray gun (closer to the sample). In the embodiment shown in FIG. 2, the X-ray waveguide capillary 3L is linear and
This is an example in which the ring is arranged in a ring around the line irradiation axis L. In this embodiment, the X-ray waveguide tube 3D does not have a lens function, but the X-ray gun 2 can be arranged inside the multi-capillary X-ray fiber, that is, the X-ray waveguide tube 3D, so that the size can be reduced.

Next, in the embodiment shown in FIG. 3, the fractionation of the X-ray waveguide thin tube 3D is performed in a concentric circle. A signal X-ray waveguide capillary 3U is arranged on one side. The X-ray detector 4 may have an annular shape. Further, the embodiment shown in FIG.
This shows an example in which the line waveguide capillary 3D is formed in the shape of a truncated cone, and similarly to FIG.
And the signal X-ray waveguide tube 3U. In the embodiment shown in FIGS. 3 and 4, X-ray emission and incidence are performed at the opening of the X-ray waveguide tube 3D having a fixed area.
Ensures more accurate analysis.

FIG. 5 shows the arrangement of the X-ray waveguide capillary 3D in FIG.
In other words, although the X-ray waveguide tube 3 is arranged along a conical surface having the irradiation point P as the vertex, the conical axis of the X-ray waveguide tube 3D which is a combination thereof is X It is not the same as the irradiation axis L of the line gun 2. Although it has a certain angle with respect to the irradiation axis L, this inclination may be fixed or adjustable (variable). It is desirable that this angle be small, for example, within about 30 °. Although each of the modifications described above has been given, the present invention is basically characterized in that the X-ray gun is located within the range of the conical surface whose apex is the irradiation point.

The embodiment according to the present invention basically includes the above-described embodiment. As an actual apparatus, a probe-type apparatus shown in FIG. 6 can be provided. That is, in the drawing, reference numeral 5 denotes an X-ray shielded probe, which is configured as a housing, and has an X-ray generation unit and a detection unit provided inside thereof. The internal configuration is the same as the embodiment shown in FIG.
Although detailed description is omitted, the probe can be downsized and can be used as a portable X-ray analyzer.

FIG. 7 shows an example of a mobile X-ray analysis apparatus for inspecting an object to be inspected, that is, a specimen, which is a real object (structure), specifically, a concrete inner wall surface of a tunnel.
That is, the investigator OP holds the probe 5 in one hand and directly faces the inner wall surface, while the CD is a power supply and control unit for the X-ray gun and the detector and a power supply control unit including a computer.
You can investigate by hanging on your shoulder. An antenna TP is installed in the power supply control unit CD so that the result of the measurement can be transmitted to a work management office (not shown), and information such as traffic traffic can be caught to perform a safety investigation. Has become. HD is a head mounted display, which allows the analysis results to be observed in real time during work.

The sample analyzer provided by the present invention has been described in detail above, but is not limited to the above and illustrated examples, but includes various modifications. First, in the above and illustrated examples, the beam handled for analysis is X
This is a so-called X-linear sample analyzer using a combination of an X-ray generator, that is, an X-ray gun and an X-ray detector. However, this beam can also be used as an electron beam. It is a combination of line detectors. Alternatively, an ion-type sample analyzer that uses a beam as an ion can be used. In this case, a combination of an ion generator (ion gun) and an X-ray detector is used. For these electron beams and ions,
There is an advantage that the beam direction can be deflected by an electromagnetic field. Further, the beam can be a laser, in which case a combination of a laser oscillator and an X-ray detector is used. Thus, the beam in the analyzer of the present invention is not limited to X-rays only. Therefore, the "X-ray generator" defined in the claims of the present invention includes the above-described electron beam generator, ion generator, or laser oscillator.

Next, in the above and illustrated examples, an example of application to a mobile type, that is, a portable type or a mobile type apparatus has been mainly described. The present invention can be applied to an analysis device, and by applying the present invention, it is possible to provide an analysis device which is reduced in size, weight, and simplification, and is economically excellent. The present invention covers all these variations.

[0018]

The sample analyzer provided by the present invention is as described in detail above, so that the detection mechanism can be reduced in size and simplified, and a portable and mobile analyzer can be provided. In connection with this, in the past, it was necessary to cut the sample into a size that could be measured and set it at the sample table position of the large analyzer that had been set up, and this required work. It can be omitted and it can correspond directly to the sample on site, and the workability of analysis and analysis is dramatically improved. The X-ray gun and the X-ray detector can be arranged coaxially, so that the task of matching the irradiation position with the X-ray detection position becomes extremely easy. In addition, there is also an advantage that one operator can perform a hand-held operation, and analysis and analysis can be easily performed. Provided is a sample analyzer that can be reduced in size and weight, has excellent economy, operability, and is easy to handle, even in the case of a large analyzer installed in a research laboratory or the like.

[Brief description of the drawings]

FIG. 1 is a diagram showing a basic configuration of a sample analyzer according to the present invention.

FIG. 2 is a diagram showing a configuration of a modified example of the sample analyzer according to the present invention.

FIG. 3 is a diagram showing a configuration of a modified example of the sample analyzer according to the present invention.

FIG. 4 is a diagram showing a configuration of a modified example of the sample analyzer according to the present invention.

FIG. 5 is a diagram showing a configuration of a modification of the sample analyzer according to the present invention.

FIG. 6 is a diagram showing a practical configuration of a sample analyzer according to the present invention.

FIG. 7 is a diagram showing a usage example of the sample analyzer according to the present invention.

FIG. 8 is a diagram showing the principle of X-ray analysis.

FIG. 9 is a diagram showing characteristics of a signal X-ray.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Sample 2 ... X-ray gun 3 ... X-ray waveguide capillary 3D ... X-ray waveguide capillary 3S ... Irradiation X-ray waveguide capillary 3U ... Signal X-ray waveguide capillary 3L ……………………………………………………………………………………………………………………………………………………………………………………….

Claims (1)

[Claims] 1. An X-ray generator for irradiating a sample with X-rays, and an opening on one end side thereof is arranged along a conical surface whose vertex is the X-ray irradiation point of the sample, and a signal from the sample is provided. X
The X-ray waveguide tube body is formed by combining a large number of X-ray waveguide tubes arranged so as to emit a signal X-ray to the periphery of the irradiation axis. A sample analyzer, comprising: an X-ray detector for detecting a signal X-ray emitted from a line waveguide tube; and analyzing a sample with an output signal from the X-ray detector.