JP2001194255A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JP2001194255A JP2001194255A JP2000191532A JP2000191532A JP2001194255A JP 2001194255 A JP2001194255 A JP 2001194255A JP 2000191532 A JP2000191532 A JP 2000191532A JP 2000191532 A JP2000191532 A JP 2000191532A JP 2001194255 A JP2001194255 A JP 2001194255A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure sensor
- detecting element
- recess
- passage member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000001514 detection method Methods 0.000 claims description 25
- 239000011347 resin Substances 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000003434 inspiratory effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- -1 polybutylene terephthalate Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/141—Monolithic housings, e.g. molded or one-piece housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/003—Fluidic connecting means using a detachable interface or adapter between the process medium and the pressure gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/24—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid specially adapted for measuring pressure in inlet or exhaust ducts of internal-combustion engines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85909—Post-treatment of the connector or wire bonding area
- H01L2224/8592—Applying permanent coating, e.g. protective coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Control Of Throttle Valves Provided In The Intake System Or In The Exhaust System (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、内部を被測定媒体
が流通する通路部材に取り付けられ該通路部材内の圧力
を検出する圧力センサ及びそのような圧力センサを備え
るスロットルボデーに関し、圧力センサとしては、例え
ば、エンジンの吸気管内圧や排気管内圧等を測定するも
のに適用できる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor which is attached to a passage member through which a medium to be measured flows and detects the pressure in the passage member, and a throttle body having such a pressure sensor. The present invention can be applied to, for example, a device for measuring an internal pressure of an intake pipe or an exhaust pipe of an engine.
【0002】[0002]
【従来の技術】例えば、エンジンの吸気管内の圧力を検
出する圧力センサとしては、図7(a)〜(c)に示す
様な半導体式圧力センサが一般的である。これら圧力セ
ンサは、本体ケースJ1と、この本体ケースJ1内部に
収納された半導体よりなる圧力検出素子(例えばダイヤ
フラム式のもの)J2と、この圧力検出素子J2に圧力
を導くために本体ケースJ1から突出して形成された圧
力導入ポートJ3とを有する。2. Description of the Related Art For example, as a pressure sensor for detecting a pressure in an intake pipe of an engine, a semiconductor pressure sensor as shown in FIGS. 7A to 7C is generally used. These pressure sensors include a main body case J1, a semiconductor pressure detecting element (for example, a diaphragm type) J2 housed in the main body case J1, and a main body case J1 for guiding pressure to the pressure detecting element J2. And a pressure introduction port J3 formed to protrude.
【0003】これら圧力センサは、エンジンの吸気系統
を構成する通路部材(インテークマニホルドやサージタ
ンク等)に対し、圧力導入ポートJ3部分を通路部材の
壁を貫通させるように取り付け、通路部材内部の圧力を
該ポートJ3より圧力検出素子J2へ導き、圧力検出素
子J2にて圧力検出を行う。ここで、通路部材内から侵
入してくる水や汚れの付着を防止するために、圧力検出
素子J2やボンディングワイヤJ4の接続部分はゲル等
の樹脂よりなる保護部材J5によって被覆されている。These pressure sensors are attached to a passage member (intake manifold, surge tank, etc.) constituting an intake system of the engine so that a pressure introduction port J3 portion penetrates a wall of the passage member, and the pressure inside the passage member is reduced. From the port J3 to the pressure detecting element J2, and the pressure is detected by the pressure detecting element J2. Here, in order to prevent the adhesion of water and dirt entering from inside the passage member, the connection portions of the pressure detecting element J2 and the bonding wire J4 are covered with a protective member J5 made of resin such as gel.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記の
圧力センサにおいては、センサの取り付け方向に制約が
あるという問題がある。例えば、インテークマニホルド
等の吸気系統に直載される圧力センサ(吸気圧センサ)
では、エンジンの見栄え、センサの取り付けスペースの
関係で、省スペース化を図りたいという要望がある。However, the above-described pressure sensor has a problem that the mounting direction of the sensor is restricted. For example, a pressure sensor (intake pressure sensor) directly mounted on an intake system such as an intake manifold
Then, there is a demand for space saving in relation to the appearance of the engine and the mounting space of the sensor.
【0005】また、この場合、図8(a)の下側に示す
様に、通路部材J6の下側部位に圧力センサを取り付け
ることも考えられるが、必然的に圧力導入ポートJ3が
上向きとなる。そして、該ポートJ3が上向きの場合、
図8(b)に示す様に、センサ内部に水や汚れ等が溜ま
りやすくなる。In this case, as shown in the lower part of FIG. 8A, it is conceivable to attach a pressure sensor to the lower part of the passage member J6. However, the pressure introduction port J3 is necessarily directed upward. . And when the port J3 is upward,
As shown in FIG. 8B, water, dirt, and the like easily accumulate inside the sensor.
【0006】上述のように、圧力検出素子J2及びその
近傍は、保護部材J5で被覆保護されてはいるものの、
これらの部位に水や汚れが付着、更には固着すると、セ
ンサ特性の変動の原因となったり、極端な場合には、ボ
ンディングワイヤの断線等の不具合に至ることも考えら
れる。そのため、現状では、図8(a)の上側に示す様
に、少なくともポートJ3が下向きとなるように、通路
部材J6の上側部位に圧力センサを取り付けざるを得な
い。As described above, although the pressure detecting element J2 and its vicinity are covered and protected by the protective member J5,
If water or dirt adheres or adheres to these parts, it may cause a change in sensor characteristics, or in extreme cases, may cause a defect such as a broken bonding wire. Therefore, at present, as shown in the upper part of FIG. 8A, the pressure sensor has to be attached to the upper part of the passage member J6 so that at least the port J3 faces downward.
【0007】そこで、本発明は上記問題に鑑み、内部を
被測定媒体が流通する通路部材に取り付けられ、該通路
部材内の圧力を検出する圧力センサにおいて、センサの
取り付けにおける省スペース化を図ることを第1の目的
とし、該通路部材における天地方向に関係なく、取付向
きの自由度を高くすることを第2の目的とし、更には、
そのような圧力センサを備えたスロットルボデーを提供
することを第3の目的とする。In view of the above problems, the present invention aims at reducing the space required for mounting a sensor in a pressure sensor which is mounted inside a passage member through which a medium to be measured flows and detects the pressure in the passage member. As a first object, and a second object is to increase the degree of freedom of the mounting direction regardless of the vertical direction of the passage member.
A third object is to provide a throttle body provided with such a pressure sensor.
【0008】[0008]
【課題を解決するための手段】本発明は、そもそも従来
の圧力センサが圧力導入ポートを有し、このポートを通
路部材内に挿入させることで通路部材への取り付けを行
う構成であるため、上記問題が生じることから、圧力導
入ポートを廃止した構成とすることに着目し、なされた
ものである。According to the present invention, since the conventional pressure sensor has a pressure introducing port in the first place, and the port is inserted into the passage member to attach the pressure introduction port to the passage member, the above-described structure is adopted. Since a problem arises, it has been made by paying attention to the configuration in which the pressure introduction port is eliminated.
【0009】まず、請求項1記載の発明では、内部を被
測定媒体が流通する通路部材(900)に取り付けら
れ、該通路部材内の圧力を検出する圧力センサであっ
て、該通路部材に取り付け可能な取付部(2)と、この
取付部に配設され、該通路部材の内壁から該通路部材の
内部へ突出する突出部(3)と、この突出部に配設され
て該通路部材内に位置する圧力検出用の圧力検出素子
(5)とを備えることを特徴としている。According to the first aspect of the present invention, there is provided a pressure sensor which is attached to a passage member (900) through which a medium to be measured flows, and detects a pressure in the passage member. A possible mounting part (2), a protruding part (3) disposed on the mounting part and protruding from the inner wall of the passage member to the inside of the passage member, and a protruding part (3) disposed on the protruding part and inside the passage member. And a pressure detecting element (5) for detecting pressure.
【0010】本発明によれば、圧力センサを、通路部材
の内部へ突出させた形で通路部材へ取り付けることがで
き、通路部材の外部に位置するセンサの部分を最小限に
留めることができるため、センサの取り付けにおける省
スペース化を図ることができる。また、突出部に圧力検
出素子を設けることで圧力検出素子を通路部材内部に配
置できるから、圧力導入ポートを介する従来のものより
も、検出精度が向上する。According to the present invention, the pressure sensor can be attached to the passage member so as to protrude into the passage member, and the portion of the sensor located outside the passage member can be minimized. In addition, space saving in mounting the sensor can be achieved. Further, since the pressure detecting element can be disposed inside the passage member by providing the pressure detecting element in the protruding portion, the detection accuracy is improved as compared with the conventional one through the pressure introducing port.
【0011】また、請求項2記載の発明においては、通
路部材(900)に取り付け可能な取付部(2)と、こ
の取付部に配設され該通路部材の内壁から該通路部材の
内部へ突出する突出部(3)と、この突出部に配設され
て該通路部材内に位置する圧力検出用の圧力検出素子
(5)と、該突出部に配設され該圧力検出素子の配設部
位に存在する水分を該通路部材内へ排出するための排出
通路(6、60)と、を備えることを特徴としている。According to the second aspect of the present invention, a mounting portion (2) that can be mounted on the passage member (900), and protrudes from the inner wall of the passage member to the inside of the passage member. A protruding portion (3), a pressure detecting element (5) disposed on the protruding portion and located in the passage member, for detecting pressure, and a portion where the pressure detecting element is disposed on the protruding portion. And a discharge passage (6, 60) for discharging water existing in the passage member into the passage member.
【0012】本発明によれば、突出部を設け且つこの突
出部に圧力検出素子を設けることで、センサの取り付け
における省スペース化、検出精度向上という効果があ
る。また、圧力検出素子の配設部位に存在する水分を排
出するための排出通路を設けているから、通路部材内の
汚れや水分が圧力検出素子及びその近傍に溜まりにくく
なる。よって、本発明によれば、上記第1の目的を達成
すると共に、通路部材における天地方向に関係なく、取
付向きの自由度が高い圧力センサを提供することができ
る。According to the present invention, the provision of the projection and the provision of the pressure detecting element on the projection provide an effect of saving space in mounting the sensor and improving detection accuracy. In addition, since the discharge passage for discharging the water present at the portion where the pressure detecting element is provided is provided, dirt and water in the passage member are less likely to accumulate in the pressure detecting element and its vicinity. Therefore, according to the present invention, it is possible to provide a pressure sensor that achieves the first object and has a high degree of freedom in the mounting direction regardless of the vertical direction of the passage member.
【0013】また、請求項3記載の発明のように、圧力
検出素子(5)を、樹脂よりなる保護部材(10)によ
って被覆したものとすれば、汚れや水分から圧力検出素
子を保護することを、より高レベルにて実現できる。Further, if the pressure detecting element (5) is covered with a protective member (10) made of resin, the pressure detecting element can be protected from dirt and moisture. Can be realized at a higher level.
【0014】また、請求項4記載の発明では、請求項2
の圧力センサにおいて、突出部(3)を被測定媒体の流
通方向と略直交する方向へ突出させ、その先端面(3
a)に該先端面より凹んだ凹部(4)を形成し、圧力検
出素子(5)を該突出部の先端面よりも引っ込んだ位置
となるように該凹部内に収納し、排出通路を該凹部の内
外を連通するように該凹部の側壁に形成された貫通穴
(6)により構成したことを特徴としている。Further, according to the invention described in claim 4, according to claim 2,
In the pressure sensor of (1), the protruding portion (3) is protruded in the direction substantially
a) a concave portion (4) recessed from the distal end surface is formed, and the pressure detecting element (5) is housed in the concave portion so as to be retracted from the distal end surface of the projecting portion, and the discharge passage is formed in the concave portion. It is characterized in that it is constituted by a through hole (6) formed in the side wall of the recess so as to communicate inside and outside of the recess.
【0015】それによって、圧力検出素子は凹部内に収
納されて被測定媒体の流れに直接さらされることが無
く、汚れや水が付着しにくくなる。もし、凹部内に汚れ
や水が侵入してきても、これら汚れや水は、凹部の側壁
に形成された排出通路としての貫通穴から水とともに凹
部外へ排出されるため、凹部内即ち圧力検出素子の配設
部位に溜まりにくい。Accordingly, the pressure detecting element is housed in the recess and is not directly exposed to the flow of the medium to be measured, so that dirt and water hardly adhere. Even if dirt and water enter the recess, the dirt and water are discharged out of the recess together with water from a through hole formed as a discharge passage formed in the side wall of the recess. Hardly accumulates at the location where it is installed.
【0016】ここで、請求項4の圧力センサにおいて
は、請求項5記載の発明のように、貫通穴(6)を、突
出部(3)の突出方向において圧力検出素子(5)より
も凹部(4)の底面寄りに位置させることが好ましく、
それによって、凹部内へ侵入してくる汚れや水を、圧力
検出素子の高さまで溜まりにくくできる。Here, in the pressure sensor of the fourth aspect, the through hole (6) is recessed in the projection direction of the projection (3) more than the pressure detection element (5). It is preferable to be located near the bottom of (4),
This makes it difficult for dirt and water entering the recess to accumulate to the height of the pressure detecting element.
【0017】さらに、請求項6記載の発明のように、突
出部(3)に配設されたリード部材(7)と圧力検出素
子(5)とを、凹部(4)内にて該突出部の突出方向へ
凸となるように形成されたワイヤ(8)によって電気的
に接続した場合、該突出部の突出方向における該ワイヤ
の頂部を、該突出部の先端面よりも引っ込んだ位置とす
ることが好ましく、それによって、汚れや水が該ワイヤ
に付着しにくくなる。そのため、ワイヤの断線等の不具
合をより確実に防止できる。Further, according to the present invention, the lead member (7) and the pressure detecting element (5) disposed on the projection (3) are connected to each other in the recess (4). When electrically connected by a wire (8) formed so as to protrude in the protruding direction of the protruding portion, the top of the wire in the protruding direction of the protruding portion is set to a position retracted from the tip end surface of the protruding portion. It is preferable that dirt and water hardly adhere to the wire. For this reason, inconveniences such as wire breakage can be more reliably prevented.
【0018】さらに、請求項7記載の発明のように、凹
部(4)内に、圧力検出素子(5)を被覆し且つ貫通穴
(6)を塞がないように樹脂よりなる保護部材(10)
を充填し、この保護部材によってワイヤ(8)とリード
部材(7)及び圧力検出素子(5)との接続部を被覆す
るようにすれば、汚れや水分から圧力検出素子及び電気
接続部分を保護することを、より高レベルにて実現でき
る。Further, the protection member (10) made of resin covers the pressure detecting element (5) in the recess (4) and does not block the through hole (6). )
If the protection member covers the connection between the wire (8) and the lead member (7) and the pressure detection element (5), the pressure detection element and the electric connection part are protected from dirt and moisture. Can be realized at a higher level.
【0019】また、請求項9記載の発明では、請求項2
又は請求項3の圧力センサにおいて、突出部(3)にお
ける被測定媒体の流通方向の下流側に面する部位に、凹
部(40)を形成し、この凹部内に圧力検出素子(5)
を収納するようにしたことを特徴としている。それによ
って、圧力検出素子が被測定流体の上流側に面していな
いから、被測定流体の流れに直接さらされず、汚れや水
が圧力検出素子に付着しにくくなる。According to the ninth aspect of the present invention, in the second aspect,
Alternatively, in the pressure sensor according to claim 3, a recess (40) is formed in a portion of the protrusion (3) facing downstream in the flow direction of the medium to be measured, and the pressure detecting element (5) is formed in the recess.
It is characterized by storing it. Accordingly, since the pressure detecting element does not face the upstream side of the fluid to be measured, the pressure detecting element is not directly exposed to the flow of the fluid to be measured, and dirt and water hardly adhere to the pressure detecting element.
【0020】ここで、請求項9の圧力センサにおいて
は、請求項10記載の発明のように、突出部(3)を、
凹部(40)を覆うカバー部材(31)を有するものと
し、排出通路を該カバー部材に形成された貫通穴(6
0)により構成させることができる。Here, in the pressure sensor according to the ninth aspect, as in the tenth aspect, the projecting portion (3) is
A cover member (31) for covering the recess (40) is provided, and a discharge passage is formed in a through hole (6) formed in the cover member.
0).
【0021】また、請求項11の発明では、請求項1〜
請求項10の圧力センサにおいて、突出部(3)に、通
路部材(900)内の温度を検出するための温度検出素
子(20)を設けたことを特徴としており、もともと通
路部材内に設置すべき温度検出素子を、突出部を利用し
て簡単に配置させることができる。ここで、温度検出素
子を、請求項12記載の発明のように、圧力検出素子
(5)とともに1つのチップに集積化したものとすれ
ば、より高精度で小型化されたセンサを実現できる。[0021] In the eleventh aspect of the present invention, the first to the first aspects are provided.
11. The pressure sensor according to claim 10, wherein the protrusion (3) is provided with a temperature detecting element (20) for detecting the temperature in the passage member (900), and is originally installed in the passage member. The temperature detecting element to be arranged can be easily arranged by using the projection. Here, if the temperature detecting element is integrated on one chip together with the pressure detecting element (5), a more accurate and miniaturized sensor can be realized.
【0022】また、請求項13の発明では、請求項2の
圧力センサにおいて、排出通路(6)が被測定媒体が流
れてくる方向とは異なる位置に形成されており、それに
より、被測定媒体が直接圧力検出素子(5)に当たらな
いため、好ましい。ここで、請求項14の発明のよう
に、排出通路(6)を、被測定媒体が流れてくる方向に
対して下流側に設ければ、請求項13の発明の効果をよ
り効果的に実現できる。According to a thirteenth aspect of the present invention, in the pressure sensor according to the second aspect, the discharge passage (6) is formed at a position different from the direction in which the medium to be measured flows, thereby forming the medium to be measured. Is not directly applied to the pressure detecting element (5), which is preferable. Here, if the discharge passage (6) is provided on the downstream side with respect to the direction in which the medium to be measured flows as in the invention of claim 14, the effect of the invention of claim 13 is realized more effectively. it can.
【0023】また、請求項15の発明は、エンジンの吸
気が流れるスロットル管(950)内の圧力を検出する
圧力センサ(400)を備えるスロットルボデーであっ
て、該圧力センサが、該スロットル管の内壁から該スロ
ットル管の内部へ突出する突出部(30)と、この突出
部における吸気の流れの下流側に面する部位に形成され
た凹部(40)と、この凹部内に配設されて該スロット
ル管内に位置する圧力検出用の圧力検出素子(5)とを
備えたものであることを特徴としている。According to a fifteenth aspect of the present invention, there is provided a throttle body including a pressure sensor (400) for detecting a pressure in a throttle pipe (950) through which intake air of an engine flows, wherein the pressure sensor is provided in the throttle pipe. A projection (30) projecting from the inner wall into the inside of the throttle pipe, a recess (40) formed at a portion of the projection facing the downstream side of the flow of intake air, and a recess (40) provided in the recess; And a pressure detecting element (5) for detecting pressure located in the throttle pipe.
【0024】本発明によれば、センサの取り付けにおけ
る省スペース化を図ることができ、圧力検出素子が吸気
上流側に面していないから、スロットル管における天地
方向に関係なく、取付向きの自由度の高い圧力センサを
備えたスロットルボデーを提供することができる。According to the present invention, it is possible to save space in mounting the sensor, and since the pressure detecting element does not face the upstream side of the intake air, the degree of freedom of the mounting direction is independent of the vertical direction of the throttle tube. And a throttle body provided with a high pressure sensor.
【0025】このスロットルボデーにおいては、請求項
16の発明のように、凹部(40)内には、圧力検出素
子(5)を被覆するように、樹脂よりなる保護部材(1
0)が充填されていることが好ましい。この保護部材に
よる効果は、請求項3の発明と同様である。In this throttle body, a protective member (1) made of resin is provided in the recess (40) so as to cover the pressure detecting element (5).
0) is preferably filled. The effect of the protection member is the same as that of the third aspect.
【0026】また、請求項17の発明では、エンジンの
吸気が流れるスロットル管(950)内の圧力を検出す
る圧力センサ(400)を備えるスロットルボデーであ
って、該圧力センサが、スロットル管の内壁からスロッ
トル管の内部へ突出する突出部(30)と、この突出部
に形成された凹部(40)と、この凹部内に配設されて
スロットル管内に位置する圧力検出用の圧力検出素子
(5)とを備え、該凹部の開口部が天地方向に対して略
平行となっていることを特徴としている。According to a seventeenth aspect of the present invention, there is provided a throttle body including a pressure sensor (400) for detecting a pressure in a throttle pipe (950) through which intake air of an engine flows, wherein the pressure sensor is an inner wall of the throttle pipe. (30) protruding into the throttle pipe from the cylinder, a recess (40) formed in the protrusion, and a pressure detecting element (5) disposed in the recess and located in the throttle pipe. ), And the opening of the concave portion is substantially parallel to the vertical direction.
【0027】本発明によれば、突出部(30)に圧力検
出素子(5)が設けられているため、省スペース化が図
れると共に、該圧力検出素子が設けられる凹部(40)
の開口部が天地方向に対して略平行となっており(図
4、図5参照)、該凹部に汚れが付着したとしても溜ま
りにくい、あるいは固着しにくい構成が達成でき、汚れ
が溜まる、あるいは固着することにより圧力検出素子へ
の影響を低減できるため、好ましい。According to the present invention, since the pressure detecting element (5) is provided on the protruding portion (30), space can be saved, and the concave portion (40) in which the pressure detecting element is provided.
Are substantially parallel to the top and bottom directions (see FIGS. 4 and 5), so that even if dirt adheres to the concave portion, it is possible to achieve a configuration in which dirt hardly accumulates or hardly adheres, and dirt accumulates. The fixation is preferable because the influence on the pressure detecting element can be reduced.
【0028】ここで、請求項18記載のスロットルボデ
ーのように、圧力検出素子(5)を凹部(40)の底面
に配置し、その受圧面も天地方向に対して略平行となっ
ているようにすれば、当該受圧面への汚れの付着あるい
は固着を抑制でき、好ましい。Here, the pressure detecting element (5) is disposed on the bottom surface of the concave portion (40), and the pressure receiving surface is also substantially parallel to the vertical direction. By doing so, the adhesion or fixation of dirt on the pressure receiving surface can be suppressed, which is preferable.
【0029】また、請求項19の発明では、エンジンの
吸気が流れるスロットル管(950)内の圧力を検出す
る圧力センサ(400)を備えるスロットルボデーであ
って、該圧力センサが、スロットル管の内壁からスロッ
トル管の内部へ突出する突出部(30)と、この突出部
に配設されてスロットル管内に位置する圧力検出用の圧
力検出素子(5)とを備え、圧力検出素子の受圧面が天
地方向に対して略平行となっていることを特徴としてい
る。According to a nineteenth aspect of the present invention, there is provided a throttle body including a pressure sensor (400) for detecting a pressure in a throttle pipe (950) through which intake air of an engine flows, wherein the pressure sensor is an inner wall of the throttle pipe. (30) that protrudes from the throttle pipe into the inside of the throttle pipe, and a pressure detecting element (5) that is disposed on the protruding section and is located in the throttle pipe, and the pressure receiving surface of the pressure detecting element is upside down. It is characterized by being substantially parallel to the direction.
【0030】本発明によれば、突出部(30)に圧力検
出素子(5)が設けられているため、省スペース化が図
れると共に、該圧力検出素子の受圧面が天地方向に対し
て略平行となっており(図4、図5参照)、該受圧面に
汚れが付着したとしても溜まりにくい、あるいは固着し
にくい構成が達成でき、汚れが溜まる、あるいは固着す
ることにより圧力検出素子への影響を低減できるため、
好ましい。According to the present invention, since the pressure detecting element (5) is provided on the protruding portion (30), space can be saved, and the pressure receiving surface of the pressure detecting element is substantially parallel to the vertical direction. (See FIG. 4 and FIG. 5), so that even if dirt adheres to the pressure receiving surface, it is possible to achieve a configuration in which the dirt is hardly accumulated or hardly adhered. Can be reduced,
preferable.
【0031】また、請求項20の発明では、請求項1記
載の圧力センサにおいて、圧力検出素子(5)の受圧面
を、天地方向に対し略平行となるようにしたことを特徴
としている。当該受圧面に汚れが付着したとしても、重
力等により排除されるため、受圧面において汚れが固着
しにくく、圧力センサとして圧力検出素子への汚れの影
響を抑制できるため、好ましい。According to a twentieth aspect of the present invention, in the pressure sensor according to the first aspect, the pressure receiving surface of the pressure detecting element (5) is substantially parallel to the vertical direction. Even if the dirt adheres to the pressure receiving surface, the dirt is removed by gravity or the like, so that the dirt is hardly fixed on the pressure receiving surface, and the influence of the dirt on the pressure detecting element as the pressure sensor is preferably suppressed.
【0032】さらに、請求項21の発明では、請求項2
0記載の圧力センサにおいて、圧力検出素子(5)を、
突出部(3)に形成された凹部(4)の底部に配設し、
圧力検出素子の受圧面上には保護部材(10)を設けた
ことを特徴としている。それによれば、汚れに対して保
護部材により圧力検出素子を保護することができ、好ま
しい。Further, according to the invention of claim 21, claim 2
0, the pressure detecting element (5) is
It is arranged at the bottom of the recess (4) formed in the projection (3),
A protection member (10) is provided on the pressure receiving surface of the pressure detecting element. According to this, the pressure detecting element can be protected by the protection member against dirt, which is preferable.
【0033】さらに、請求項22の発明では、請求項2
1記載の圧力センサにおいて、保護部材(10)が、凹
部(4)をほぼ充填するものとしたことを特徴としてい
る。それによれば、保護部材が凹部をほぼ満たしている
ので、汚れが溜まるスペースが無く、圧力センサとし
て、より好ましい。Further, according to the invention of claim 22, in claim 2,
2. The pressure sensor according to claim 1, wherein the protection member (10) substantially fills the recess (4). According to this, since the protection member almost fills the recess, there is no space for collecting dirt, which is more preferable as a pressure sensor.
【0034】また、請求項23の発明では、エンジンの
吸気が流れるスロットル管(950)内の圧力を検出す
る圧力センサ(400)を備えるスロットルボデーであ
って、圧力センサが、スロットル管の内壁からスロット
ル管の内部へ突出する突出部(30)と、この突出部に
配設されてスロットル管内に位置する圧力検出用の圧力
検出素子(5)とを備え、圧力検出素子の受圧面が天地
方向に対して下を向いていることを特徴としている。Further, according to the present invention, there is provided a throttle body including a pressure sensor (400) for detecting a pressure in a throttle pipe (950) through which the intake air of the engine flows, wherein the pressure sensor is provided from an inner wall of the throttle pipe. A projection (30) projecting into the throttle pipe, and a pressure detecting element (5) for pressure detection disposed in the projection and located in the throttle pipe are provided. Is characterized by pointing downwards.
【0035】本発明によれば、突出部(30)に圧力検
出素子(5)が設けられているため、省スペース化が図
れると共に、圧力検出素子(5)の受圧面が天地方向に
対して下を向いている(図6参照)ので、当該受圧面に
汚れが付着しにくく、好ましい。According to the present invention, since the pressure detecting element (5) is provided on the protruding portion (30), space can be saved, and the pressure receiving surface of the pressure detecting element (5) is positioned in the vertical direction. Since it faces downward (see FIG. 6), dirt hardly adheres to the pressure receiving surface, which is preferable.
【0036】また、請求項24の発明は、請求項23記
載のスロットルボデーにおいて、圧力検出素子(5)
を、突出部(30)に形成された凹部の底部に配設し、
圧力検出素子の受圧面上に、保護部材(10)を設けた
ことを特徴としており、保護部材により、当該受圧面に
おける高い保護効果を得ることが出来る。According to a twenty-fourth aspect of the present invention, in the throttle body according to the twenty-third aspect, the pressure detecting element (5) is provided.
Is disposed at the bottom of the recess formed in the projection (30),
The protection member (10) is provided on the pressure receiving surface of the pressure detection element, and the protection member can provide a high protection effect on the pressure receiving surface.
【0037】また、請求項25の発明は、請求項1記載
の圧力センサにおいて、圧力検出素子(5)の受圧面が
天地方向に対して下を向いていることを特徴とするもの
であり、圧力検出素子(5)の受圧面が天地方向に対し
て下を向いている(図6参照)ので、当該受圧面に汚れ
が付着しにくく、好ましい。According to a twenty-fifth aspect of the present invention, in the pressure sensor according to the first aspect, the pressure receiving surface of the pressure detecting element (5) faces downward with respect to the vertical direction. Since the pressure receiving surface of the pressure detecting element (5) faces downward with respect to the vertical direction (see FIG. 6), it is preferable that dirt hardly adheres to the pressure receiving surface.
【0038】なお、上記各手段の括弧内の符号は、後述
する実施形態に記載の具体的手段との対応関係を示す一
例である。The reference numerals in parentheses of the above means are examples showing the correspondence with specific means described in the embodiments described later.
【0039】[0039]
【発明の実施の形態】(第1実施形態)本実施形態は、
本発明の圧力センサをエンジンの吸気系統あるいは排気
系統を構成する通路部材に取り付けられる吸気圧センサ
あるいは排気圧センサに具体化したものとして説明す
る。図1に本実施形態にかかる圧力センサ100の概略
断面構成を示す。圧力センサ100は、内部を空気(被
測定媒体)が流通する通路部材(インテークマニホルド
やサージタンク、スロットルボデー等)900の管壁に
取り付けられ、通路部材900内の圧力を検出するよう
になっている。この通路部材900は、例えば鉄やアル
ミニウム等よりなる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment)
The pressure sensor of the present invention will be described as embodied as an intake pressure sensor or an exhaust pressure sensor attached to a passage member constituting an intake system or an exhaust system of an engine. FIG. 1 shows a schematic cross-sectional configuration of a pressure sensor 100 according to the present embodiment. The pressure sensor 100 is attached to a pipe wall of a passage member (intake manifold, surge tank, throttle body, etc.) 900 through which air (medium to be measured) flows, and detects the pressure in the passage member 900. I have. This passage member 900 is made of, for example, iron or aluminum.
【0040】1は、圧力センサ100の本体部であり、
この本体部1はPPS(ポリフェニレンサルファイド)
やPBT(ポリブチレンテレフタレート)等の樹脂材料
を成型してなるものである。本体部1は、通路部材90
0の外壁面に取り付け可能な取付部2と、この取付部2
に一体化して配設され、通路部材900の内壁面から通
路部材900の内部へ突出する突出部3とを備える。1 is a main body of the pressure sensor 100,
The main body 1 is made of PPS (polyphenylene sulfide)
And a resin material such as PBT (polybutylene terephthalate). The main body 1 includes a passage member 90.
Mounting portion 2 that can be mounted on the outer wall surface of
And a protruding portion 3 protruding from the inner wall surface of the passage member 900 to the inside of the passage member 900.
【0041】取付部2はフランジ状(つば状)をなすと
ともに、貫通したネジ穴2aを有する。そして、取付部
2は、該ネジ穴2aを介して金属又は樹脂よりなるネジ
2bにより通路部材900に固定される。また、突出部
3は、本例では略円柱形状をなし、通路部材900の管
壁に形成された孔901に対して円柱の軸方向に挿入さ
れ、通路部材900内部の空気の流通方向と略直交する
方向へ突出している。ここで、通路部材900の内壁面
から突出部3の先端面3aまでの高さ(突出高さ)は、
例えば10mmから20mmである。The mounting portion 2 has a flange shape (collar shape), and has a threaded screw hole 2a. Then, the mounting portion 2 is fixed to the passage member 900 by screws 2b made of metal or resin through the screw holes 2a. Further, in this example, the protruding portion 3 has a substantially cylindrical shape, is inserted in the axial direction of the cylinder into a hole 901 formed in the tube wall of the passage member 900, and substantially coincides with the direction of air flow inside the passage member 900. It protrudes in the direction perpendicular to the direction. Here, the height (projection height) from the inner wall surface of the passage member 900 to the distal end surface 3a of the projection 3 is:
For example, it is 10 mm to 20 mm.
【0042】また、突出部3と孔901との間はOリン
グ3bが介在されシールされている。なお、図示しない
が、Oリング3bを収納するOリング溝は、突出部3側
にあっても良く、孔901の内周面側にあっても良く、
また、これら両方の側にあっても良い。An O-ring 3b is interposed between the protruding portion 3 and the hole 901 for sealing. Although not shown, the O-ring groove for accommodating the O-ring 3b may be provided on the protruding portion 3 side or on the inner peripheral surface side of the hole 901.
Also, it may be on both of these sides.
【0043】突出部3の先端面3aには該先端面3aよ
り凹んだ凹部4が形成されており、この凹部4によって
突出部3の先端部分は筒形状となっている。この凹部4
は例えば深さが5mm以内の円筒形の穴とすることがで
きる。また、凹部4内には、圧力検出用の圧力検出素子
5が、ガラス台座等を介して凹部4の底部に接着するこ
とにより配設され、通路部材900内に位置している。A concave portion 4 is formed on the distal end surface 3a of the projecting portion 3 so as to be recessed from the distal end surface 3a. The distal end portion of the projecting portion 3 has a cylindrical shape due to the concave portion 4. This recess 4
Can be, for example, a cylindrical hole having a depth of 5 mm or less. A pressure detecting element 5 for pressure detection is provided in the recess 4 by being adhered to the bottom of the recess 4 via a glass pedestal or the like, and is located in the passage member 900.
【0044】この圧力検出素子5は、図示しないが、例
えば、ピエゾ抵抗効果を有した半導体材料(例えば単結
晶シリコン)よりなるダイヤフラム上に複数個の拡散抵
抗を形成して、これら拡散抵抗をブリッジ接続した構成
となっており、このダイヤフラムの変形に応じた拡散抵
抗の抵抗値変化を上記ブリッジ回路から電気信号として
取り出すようになっている。Although not shown, the pressure detecting element 5 is formed, for example, by forming a plurality of diffusion resistors on a diaphragm made of a semiconductor material (for example, single crystal silicon) having a piezoresistive effect, and bridging these diffusion resistors. The configuration is such that the change in the resistance value of the diffusion resistor according to the deformation of the diaphragm is extracted as an electric signal from the bridge circuit.
【0045】また、突出部3の凹部4の側壁には、凹部
4の内外を連通するように貫通穴(本発明でいう排出通
路)6が形成されている。この貫通穴6は、圧力検出素
子5の配設部位即ち凹部4内に存在する水分を、通路部
材900内へ排出するための排出通路として構成されて
いる。この貫通穴6の形状は特に限定するものではな
く、丸穴でも角穴でも良い。Further, a through hole (a discharge passage in the present invention) 6 is formed in the side wall of the concave portion 4 of the projecting portion 3 so as to communicate inside and outside of the concave portion 4. The through hole 6 is configured as a discharge passage for discharging the water present in the portion where the pressure detecting element 5 is provided, that is, the concave portion 4, into the passage member 900. The shape of the through hole 6 is not particularly limited, and may be a round hole or a square hole.
【0046】凹部4の開口部(突出部3の先端面3a)
を上方(斜め上方も含む)または水平方向へ向けて、圧
力センサ100を搭載した場合、凹部4内に滞留しよう
とする水は、主として貫通穴6から、その自重によって
凹部4の外部へ流出するようになっている。本例では、
圧力センサ100は、通路部材900の下側に取り付け
られているが、このような場合、圧力検出素子5の高さ
まで水が溜まらないようにするために、貫通穴6は、突
出部3の突出方向において圧力検出素子5よりも凹部4
の底面寄りに位置していることが好ましい。Opening of recess 4 (tip surface 3a of projection 3)
When the pressure sensor 100 is mounted so that the pressure sensor 100 is directed upward (including obliquely upward) or horizontally, water that is to stay in the recess 4 mainly flows out of the recess 4 from the through hole 6 by its own weight. It has become. In this example,
The pressure sensor 100 is attached to the lower side of the passage member 900. In such a case, in order to prevent water from accumulating to the height of the pressure detecting element 5, the through hole 6 is Recess 4 than pressure sensing element 5 in the direction
Is preferably located closer to the bottom surface.
【0047】また、本体部1には、圧力検出素子5の信
号を外部へ取り出すためのリード部材7がインサート成
形されている。このリード部材7は、例えば、りん青銅
等の導電性部材よりなるもので、本例では、圧力検出素
子5に対する出力用、電源用、GND用として3本配設
されている。また、各リード部材7の一端側は、凹部4
内に露出して、ワイヤボンディング等にて形成されたワ
イヤ8によって圧力検出素子5と電気的に接続されてお
り、他端側は取付部2に形成されたコネクタ部9に露出
している。このコネクタ部9はリード部材9の露出部を
外部端子と接続可能な形状となっている。Further, a lead member 7 for taking out the signal of the pressure detecting element 5 to the outside is insert-molded in the main body 1. The lead members 7 are made of, for example, a conductive member such as phosphor bronze. In this example, three lead members 7 are provided for output to the pressure detecting element 5, for power supply, and for GND. One end of each lead member 7 has a recess 4
And is electrically connected to the pressure detecting element 5 by a wire 8 formed by wire bonding or the like, and the other end is exposed to a connector section 9 formed in the mounting section 2. The connector portion 9 has such a shape that the exposed portion of the lead member 9 can be connected to an external terminal.
【0048】ここで、本例では、通路部材900内に位
置する圧力検出素子5は、凹部4内において突出部3の
先端面3aよりも引っ込んだ位置に収納されている。ま
た、ワイヤ8は、凹部4内にて突出部3の突出方向へ凸
となるように形成されており、突出部3の突出方向にお
けるワイヤ3の頂部は、突出部3の先端面3aよりも引
っ込んだ位置となっている。Here, in this embodiment, the pressure detecting element 5 located in the passage member 900 is housed in the recess 4 at a position retracted from the tip end surface 3a of the protruding portion 3. The wire 8 is formed so as to protrude in the protruding direction of the protruding portion 3 in the recess 4, and the top of the wire 3 in the protruding direction of the protruding portion 3 is higher than the distal end surface 3 a of the protruding portion 3. It is in the retracted position.
【0049】そして、凹部4内には、圧力検出素子5を
被覆し且つ貫通穴6を塞がないように、樹脂等よりなる
保護部材10が充填されている。更に、保護部材10
は、圧力検出素子5とワイヤ8との接続部、及び、リー
ド部材7とワイヤ8との接続部を被覆している。この保
護部材10は、例えばフッ素系ゲルやフッ素で変成され
たシリコン系ゲル等を採用することができる。The recess 4 is filled with a protective member 10 made of resin or the like so as to cover the pressure detecting element 5 and not block the through hole 6. Further, the protective member 10
Covers the connection between the pressure detecting element 5 and the wire 8 and the connection between the lead member 7 and the wire 8. As the protective member 10, for example, a fluorine-based gel or a silicon-based gel modified with fluorine can be used.
【0050】かかる圧力センサ100は、樹脂の型成形
によりリード部材7を埋設した本体部1を形成し、その
凹部4に圧力検出素子5を配設し、ワイヤボンディング
等にてワイヤ8の結線を行った後、保護部材10の充填
を行うことで、製造できる。そして、製造された圧力セ
ンサ100は、Oリング3bを介して通路部材900の
孔901に突出部3を挿入し、取付部2をネジ2bによ
って通路部材900へ固定することにより、図1に示す
様に、取り付けられる。In the pressure sensor 100, the main body 1 in which the lead member 7 is buried is formed by resin molding, the pressure detecting element 5 is disposed in the concave portion 4, and the connection of the wire 8 is performed by wire bonding or the like. After performing, the protective member 10 can be filled to perform manufacturing. Then, the manufactured pressure sensor 100 inserts the protruding portion 3 into the hole 901 of the passage member 900 via the O-ring 3b, and fixes the mounting portion 2 to the passage member 900 with the screw 2b, as shown in FIG. And so on.
【0051】そして、通路部材900内の圧力(吸気
圧)は圧力検出素子5に印加され、圧力検出素子5から
は、この印加圧力に基づく電気信号が出力される。この
電気信号は、ワイヤ8及びリード部材7を介して、外部
へ取り出される。このようにして、通路部材900内の
圧力(吸気圧)が検出されるようになっている。検出さ
れた吸気圧は、図示しない外部回路(車両のECU等)
にて、エンジン制御信号等に用いられる。The pressure (intake pressure) in the passage member 900 is applied to the pressure detecting element 5, and the pressure detecting element 5 outputs an electric signal based on the applied pressure. This electric signal is extracted to the outside via the wire 8 and the lead member 7. Thus, the pressure (intake pressure) in the passage member 900 is detected. The detected intake pressure is stored in an external circuit (not shown) (e.g., a vehicle ECU).
Is used for an engine control signal and the like.
【0052】ところで、本実施形態によれば、突出部3
に圧力検出素子5を設けることで圧力検出素子5を通路
部材900内部に配置できる。そのため、圧力導入ポー
トを介する従来のものよりも、実際の圧力(吸気圧)に
近い圧力が圧力検出素子5に印加されるため、検出精度
が向上する。また、圧力検出素子5の配設部位(凹部4
の内部)に存在する水分を排出するための貫通穴(排出
通路)6を設けているから、通路部材900内の汚れや
水分が圧力検出素子5及びその近傍に溜まりにくくな
る。By the way, according to the present embodiment, the protrusion 3
The pressure detecting element 5 can be disposed inside the passage member 900 by providing the pressure detecting element 5 in the path member 900. For this reason, a pressure closer to the actual pressure (intake pressure) is applied to the pressure detection element 5 than the conventional one through the pressure introduction port, and the detection accuracy is improved. Also, the location of the pressure detecting element 5 (the concave portion 4)
Is provided, the dirt and moisture in the passage member 900 are less likely to accumulate in the pressure detecting element 5 and its vicinity.
【0053】具体的には、空気(被測定媒体)の流通方
向と略直交する方向へ突出した突出部3の先端面3aに
凹部4を形成し、圧力検出素子5を突出部3の先端面3
aよりも引っ込んだ位置となるように凹部4内に収納し
ている。そのため、圧力検出素子5は空気の流れに直接
さらされることが無く、汚れや水が付着しにくくなる。
もし、凹部4内に汚れや水が侵入してきても、これら汚
れや水は、凹部4の側壁に形成された貫通穴(排出通
路)6から水とともに凹部4外へ排出されるため、凹部
4内即ち圧力検出素子5の配設部位に溜まりにくい。More specifically, a concave portion 4 is formed in the distal end surface 3a of the projecting portion 3 projecting in a direction substantially perpendicular to the flow direction of the air (measurement medium), and the pressure detecting element 5 is connected to the distal end surface of the projecting portion 3. 3
It is housed in the recess 4 so as to be at a position retracted from the position a. Therefore, the pressure detection element 5 is not directly exposed to the flow of air, and dirt and water are less likely to adhere.
Even if dirt and water enter the recess 4, the dirt and water are discharged out of the recess 4 together with the water through a through hole (discharge passage) 6 formed in the side wall of the recess 4. It hardly accumulates in the inside, that is, at the position where the pressure detecting element 5 is disposed.
【0054】特に、図1に示す例においては、貫通穴6
を、突出部3の突出方向において圧力検出素子5よりも
凹部4の底面寄りに位置させているため、凹部4内へ侵
入してくる汚れや水を、圧力検出素子5の高さまで溜ま
りにくくできる。なお、図1に示す例とは反対に、通路
部材900の上側部位に圧力センサ100を取り付けた
場合には、凹部4内に汚れや水が溜まりにくくなること
は明らかである。In particular, in the example shown in FIG.
Is located closer to the bottom surface of the concave portion 4 than the pressure detecting element 5 in the protruding direction of the protruding portion 3, so that dirt and water entering the concave portion 4 can hardly be accumulated up to the height of the pressure detecting element 5. . Note that, contrary to the example shown in FIG. 1, when the pressure sensor 100 is attached to the upper portion of the passage member 900, it is apparent that dirt and water hardly accumulate in the recess 4.
【0055】また、貫通穴6を空気の流れに対して下流
側に設けているため、圧力検出素子5は貫通穴6を介し
て、直接空気の流れにされされることはなく、好まし
い。なお、貫通穴6の空気の流れに対する位置は、空気
の流れの下流側に限ることなく、空気の流れる方向と異
なっていればよい。ただ、好ましくは、空気の流れに対
して上流側は避けた方がよい。Further, since the through hole 6 is provided on the downstream side with respect to the flow of air, the pressure detecting element 5 is preferably not directly caused to flow through the air through the through hole 6. The position of the through hole 6 with respect to the flow of air is not limited to the downstream side of the flow of air, and may be different from the direction in which the air flows. However, preferably, the upstream side of the air flow should be avoided.
【0056】また、図1に示す例では、凹部4内におい
て、ワイヤ8における突出部3の突出方向の頂部を、突
出部3の先端面3aよりも引っ込んだ位置としている。
そのため、汚れや水がワイヤ8に付着しにくくなり、ワ
イヤ8の断線等の不具合をより確実に防止できる。さら
に、本例では、保護部材10によって、圧力検出素子
5、ワイヤ8とリード部材7及び圧力検出素子5との接
続部を被覆しているため、汚れや水分から圧力検出素子
5及び電気接続部分を保護することを、より高レベルに
て実現できる。In the example shown in FIG. 1, the top of the wire 8 in the protruding direction of the protruding portion 3 in the recess 4 is located at a position retracted from the distal end surface 3 a of the protruding portion 3.
For this reason, dirt and water hardly adhere to the wire 8, and problems such as disconnection of the wire 8 can be more reliably prevented. Furthermore, in this example, since the connection between the pressure detecting element 5, the wire 8 and the lead member 7 and the pressure detecting element 5 is covered by the protection member 10, the pressure detecting element 5 and the electric connection part are protected from dirt and moisture. Can be protected at a higher level.
【0057】このように、本実施形態によれば、圧力セ
ンサ100を通路部材900の上側部位以外に取り付け
ても、凹部4内に侵入してくる汚れや水は、貫通穴6を
介して凹部4の外部へ排出されるので、圧力検出素子5
及びワイヤ8に汚れや水が付着しにくく、汚れや氷結等
によるセンサ特性の変動や電気接続部の断線等の不具合
が回避される。よって、本実施形態によれば、通路部材
900における天地方向に関係なく、取付向きの自由度
が高い圧力センサ100を提供することができる。As described above, according to the present embodiment, even if the pressure sensor 100 is attached to a portion other than the upper portion of the passage member 900, the dirt and water entering the recess 4 are prevented from passing through the recess 6 through the recess 6. 4, the pressure detecting element 5
In addition, dirt and water hardly adhere to the wire 8, and problems such as fluctuations in sensor characteristics due to dirt and icing and disconnection of the electrical connection part can be avoided. Therefore, according to the present embodiment, it is possible to provide the pressure sensor 100 having a high degree of freedom in the mounting direction regardless of the vertical direction of the passage member 900.
【0058】また、本実施形態によれば、実質的に取付
部2のコネクタ部9が、通路部材900外部に位置する
のみである。そのため、従来のように、圧力導入ポート
を通路部材内に挿入し、センサ本体部分を通路部材の外
部に位置させる構成(図8参照)と比べて、通路部材の
外部に位置する部分が減り、投影面積(搭載に必要な面
積)が小さくなるので、結果的に、搭載スペースが小さ
くて済み搭載性が向上する。According to the present embodiment, the connector 9 of the mounting portion 2 is substantially located only outside the passage member 900. Therefore, as compared with the conventional configuration in which the pressure introduction port is inserted into the passage member and the sensor main body portion is located outside the passage member (see FIG. 8), the portion located outside the passage member is reduced, Since the projection area (the area required for mounting) is reduced, the mounting space is small and the mounting performance is improved.
【0059】なお、本実施形態の圧力センサ100にお
いて、貫通穴(排出通路)6は無いものであっても良
い。その場合でも、結果的に、搭載スペースが小さくて
済むため、センサの取り付けにおける省スペース化を図
ることができる。ただし、天地方向に関係なく取付向き
の自由度を高くするためには、貫通穴6が形成されてい
た方が良いことは、上述の通りである。In the pressure sensor 100 of the present embodiment, the through hole (discharge passage) 6 may not be provided. Even in that case, as a result, the mounting space can be reduced, so that the space for mounting the sensor can be saved. However, as described above, it is better to form the through hole 6 in order to increase the degree of freedom in the mounting direction regardless of the vertical direction.
【0060】(第2実施形態)本実施形態は、上記第1
実施形態において、突出部3における凹部の形成位置及
び貫通穴の形成位置を異ならせたものである。以下、主
として第1実施形態との相違点について説明する。図2
は、本実施形態にかかる圧力センサ200の全体構成図
であり、一部を概略断面にて示してある。なお、図2
中、第1実施形態と同一部分には、図1と同一符号を付
してある。(Second Embodiment) In the present embodiment, the first
In the embodiment, the formation position of the concave portion and the formation position of the through hole in the protrusion 3 are different. Hereinafter, differences from the first embodiment will be mainly described. FIG.
1 is an overall configuration diagram of a pressure sensor 200 according to the present embodiment, and a part is shown in a schematic cross section. Note that FIG.
The same parts as those in the first embodiment are denoted by the same reference numerals as those in FIG.
【0061】本センサ200の突出部3は、柱状の突出
基部30とこの突出基部30に固定された蓋部(本発明
でいうカバー部材)31よりなる。突出基部30におけ
る空気(被測定媒体)の流通方向の下流側に面する部位
には、その表面から凹んだ凹部40が形成されており、
圧力検出素子5は、ガラス台座等を介した接着等によ
り、該凹部40内に収納されている。この凹部40の大
きさ及び形状は、限定するものではないが、例えば上記
第1実施形態と同様とすることができる。The protruding portion 3 of the sensor 200 comprises a columnar protruding base 30 and a lid (cover member in the present invention) 31 fixed to the protruding base 30. At a portion of the protruding base 30 facing the downstream side in the flow direction of the air (measurement medium), a concave portion 40 recessed from the surface is formed,
The pressure detecting element 5 is housed in the recess 40 by bonding or the like via a glass pedestal or the like. The size and shape of the concave portion 40 are not limited, but may be the same as, for example, the first embodiment.
【0062】また、圧力検出素子5及びワイヤ8は、凹
部40内にほぼ完全に位置しており、保護部材10によ
り被覆されている。本例では、保護部材10は、図1の
ように部分的な充填ではなく、凹部4全体を埋めるよう
に充填されているが、部分充填でも構わない。なお、図
2には図示しないが、上記第1実施形態と同様に、リー
ド部材が突出基部30内に埋設されており、該リード部
材はワイヤ8に電気的に接続されるとともに、コネクタ
部9にて外部端子と接続可能となっている。Further, the pressure detecting element 5 and the wire 8 are located almost completely in the recess 40 and are covered with the protective member 10. In this example, the protection member 10 is not partially filled as shown in FIG. 1 but is filled so as to fill the entire concave portion 4, but may be partially filled. Although not shown in FIG. 2, a lead member is embedded in the protruding base 30 as in the first embodiment, and the lead member is electrically connected to the wire 8 and connected to the connector 9. Can be connected to external terminals.
【0063】蓋部31は、突出基部30の凹部40を覆
うように設けられており、突出基部30に対して接着剤
32によって接着固定されている。この蓋部31には、
蓋部31の内外を連通する1個以上(図2では5個図
示)の貫通穴60が形成され、この貫通穴60は、本発
明の排出通路に相当するものである。図2に示す様に、
この貫通穴60は、圧力センサ200をどのような向き
に搭載しても蓋部31内の水が排出されるように、蓋部
31の各所に形成されている。また、蓋部31の内外の
連通は、貫通穴60のみで可能となっているため、汚れ
や水が蓋部31内に侵入しにくくなっている。The lid 31 is provided so as to cover the recess 40 of the protruding base 30, and is adhered and fixed to the protruding base 30 with an adhesive 32. In this lid part 31,
One or more (five in FIG. 2) through-holes 60 are formed to communicate between the inside and outside of the lid 31. The through-holes 60 correspond to a discharge passage of the present invention. As shown in FIG.
The through-holes 60 are formed at various parts of the lid 31 so that water in the lid 31 is discharged regardless of the direction in which the pressure sensor 200 is mounted. In addition, since communication between the inside and outside of the lid 31 is enabled only by the through hole 60, dirt and water are less likely to enter the inside of the lid 31.
【0064】以上のように、本実施形態においても、圧
力センサ200を通路部材900の上側部位以外に取り
付けても、凹部40内の汚れや水は貫通穴60を介して
排出されるので、汚れや氷結等によるセンサ特性の変動
や電気接続部の断線等の不具合が回避される。そのた
め、通路部材900における天地方向に関係なく、取付
向きの自由度が高い圧力センサ200を提供することが
できる。As described above, even in the present embodiment, even if the pressure sensor 200 is attached to a portion other than the upper portion of the passage member 900, the dirt and water in the concave portion 40 are discharged through the through-hole 60. Problems such as fluctuations in sensor characteristics due to icing or icing, and disconnection of the electrical connection portion are avoided. Therefore, it is possible to provide the pressure sensor 200 having a high degree of freedom in the mounting direction regardless of the vertical direction of the passage member 900.
【0065】また、本実施形態によれば、圧力検出素子
5が空気(被測定流体)の上流側に面していないから、
空気の流れに直接さらされず、汚れや水が圧力検出素子
5に付着しにくくなる。また、搭載性向上の効果も、上
記第1実施形態と同様に有する。Further, according to the present embodiment, since the pressure detecting element 5 does not face the upstream side of the air (fluid to be measured),
It is not directly exposed to the flow of air, so that dirt and water hardly adhere to the pressure detecting element 5. Also, the effect of improving the mountability is provided similarly to the first embodiment.
【0066】(第3実施形態)本実施形態は、上記第2
実施形態の圧力センサに対して、温度検出素子を追加し
たものである。図3は、本実施形態にかかる圧力センサ
300の全体構成図であり、一部を概略断面にて示して
ある。なお、図3中、第2実施形態と同一部分には、図
2と同一符号を付してある。(Third Embodiment) In the present embodiment, the second embodiment
The temperature sensor is added to the pressure sensor of the embodiment. FIG. 3 is an overall configuration diagram of the pressure sensor 300 according to the present embodiment, a part of which is shown in a schematic cross section. In FIG. 3, the same parts as in the second embodiment are denoted by the same reference numerals as in FIG.
【0067】突出部3における蓋部31には、通路部材
900内の温度を検出するための温度検出素子20が配
設されている。この温度検出素子20は、例えば一般的
なサーミスタ材料よりなる素子部21と、この素子部2
1からの出力(信号)を取り出すためのリード線22と
を備えている。素子部21は、リード線22を介して蓋
部31に支持されて通路部材900内の空気の流れにさ
らされるように配置されている。A temperature detecting element 20 for detecting the temperature inside the passage member 900 is provided on the lid 31 of the protruding portion 3. The temperature detecting element 20 includes, for example, an element portion 21 made of a general thermistor material and
And a lead wire 22 for taking out an output (signal) from the device 1. The element portion 21 is supported by the lid portion 31 via the lead wire 22 and is arranged so as to be exposed to the flow of air in the passage member 900.
【0068】図示しないが、リード線22は、貫通穴6
0に重ならないようにインサート成形によって蓋部31
内に埋設されている。また、図示しないが、リード線2
2における素子部21と反対側の部位は、突出基部30
内に設けられたリード部材に電気的に接続されている。
このリード部材は、上記図1に示したリード部材7とは
別体の温度検出素子用のものであるが、コネクタ部9に
て外部端子と接続可能となっており、それよって、温度
検出素子20の出力は外部へ取出可能となっている。Although not shown, the lead wire 22 is
Cover part 31 by insert molding so as not to overlap with zero.
Buried inside. Although not shown, lead wire 2
2 is located on the side opposite to the element portion 21.
Is electrically connected to a lead member provided therein.
This lead member is for a temperature detecting element separate from the lead member 7 shown in FIG. 1 described above, but can be connected to an external terminal at the connector section 9, so that the temperature detecting element The output 20 can be taken out.
【0069】エンジンの負荷が同一であっても、吸気温
度によって吸気圧は変化する。本圧力センサ300にお
いては、この温度検出素子20の出力に基づき、圧力検
出素子5で検出された吸気圧を温度補正することが可能
となっている。即ち、吸気圧が、吸気圧を検出した場所
と同じ場所の温度で補正されたことになり、より正確な
吸気圧を検出することができる。Even if the load on the engine is the same, the intake pressure changes depending on the intake air temperature. In the present pressure sensor 300, the temperature of the intake pressure detected by the pressure detecting element 5 can be corrected based on the output of the temperature detecting element 20. That is, the intake pressure is corrected at the same temperature as the location where the intake pressure is detected, and more accurate intake pressure can be detected.
【0070】このように、本実施形態によれば、上記第
2実施形態と同様の効果を奏することに加えて、突出部
3に通路部材900内の温度を検出するための温度検出
素子20を設けたことを特徴としており、もともと通路
部材900内に設置すべき温度検出素子20を、突出部
3を利用して簡単に配置させることができる。As described above, according to the present embodiment, in addition to providing the same effects as those of the second embodiment, the temperature detecting element 20 for detecting the temperature inside the passage member 900 is provided at the projecting portion 3. This is characterized in that the temperature detecting element 20 to be originally installed in the passage member 900 can be easily arranged by using the protrusion 3.
【0071】なお、圧力センサに対する温度検出素子の
付加は、上記実施形態に示した圧力センサ100及び2
00において、温度検出素子を、公知の半導体製造技術
を用いて圧力検出素子5とともに1つのチップに集積化
した構成としても良い。それによって、より高精度で小
型化されたセンサを実現できる。The addition of the temperature detecting element to the pressure sensor is similar to that of the pressure sensors 100 and 2 shown in the above embodiment.
At 00, the temperature detecting element may be integrated with the pressure detecting element 5 on a single chip using a known semiconductor manufacturing technique. Thereby, a more accurate and miniaturized sensor can be realized.
【0072】例えば、圧力検出素子5を構成する半導体
チップ上に、温度−抵抗特性を有する薄膜抵抗を蒸着等
により形成し、これを温度検出素子とするとともに、こ
の温度検出素子用の配線パターンを形成する。この温度
検出素子としての薄膜抵抗は、例えば白金の蒸着膜等を
採用できる。For example, a thin film resistor having a temperature-resistance characteristic is formed on a semiconductor chip constituting the pressure detecting element 5 by vapor deposition or the like, and this is used as a temperature detecting element, and a wiring pattern for this temperature detecting element is formed. Form. As the thin film resistor as the temperature detecting element, for example, a platinum vapor deposition film or the like can be adopted.
【0073】(第4実施形態)本発明の第4実施形態
は、圧力センサの取り付けにおける省スペース化を図
り、且つ、天地方向に関係なく取付向きの自由度を高く
することのできる圧力センサを備えたスロットルボデー
を提供することを目的としたものである。なお、本実施
形態の各図中、上記実施形態と同一部分には、同一符号
を付してある。図4は本実施形態に係るスロットルボデ
ーの要部の概略断面構成を示す図である。(Fourth Embodiment) A fourth embodiment of the present invention is directed to a pressure sensor capable of saving space in mounting the pressure sensor and increasing the degree of freedom in mounting direction regardless of the vertical direction. It is intended to provide a throttle body provided. In the drawings of the present embodiment, the same portions as those in the above embodiment are denoted by the same reference numerals. FIG. 4 is a diagram showing a schematic sectional configuration of a main part of the throttle body according to the present embodiment.
【0074】スロットルボデーは、自動車のエンジンの
吸気系統の一部を構成し、エンジンの吸入空気量を制御
するものであり、全体の基本構成は周知であるため説明
を省略する。図4には、スロットルボデーにおけるスロ
ットル管950の吸気流れ方向の概略断面が示されてい
る。The throttle body constitutes a part of the intake system of the engine of the automobile and controls the amount of intake air of the engine. FIG. 4 shows a schematic cross section of the throttle body 950 in the direction of intake air flow in the throttle body.
【0075】スロットル管950の内部には、上流のエ
アクリーナ側からの吸入空気量を制御して下流のエンジ
ン側へ流すためのスロットル弁951が設けられてい
る。スロットル管950において、スロットル弁951
とエンジンとの間には、圧力センサ400が設けられて
いる。Inside the throttle pipe 950, there is provided a throttle valve 951 for controlling the amount of intake air from the upstream air cleaner side to flow to the downstream engine side. In the throttle pipe 950, the throttle valve 951
A pressure sensor 400 is provided between the engine and the engine.
【0076】この圧力センサ400の本体部1は、上記
第2実施形態の圧力センサと同様の構成とすることがで
き、取付部2にて、スロットル管950の管壁に取り付
けられている。また、本圧力センサ400では、上記第
2実施形態の圧力センサにおいて蓋部の無い構成として
いるが、このとき、突出基部30が本発明のスロットル
ボデーにおける突出部に相当する。The main body 1 of the pressure sensor 400 can have the same configuration as that of the pressure sensor of the second embodiment, and is mounted on the wall of the throttle pipe 950 at the mounting portion 2. The pressure sensor 400 of the second embodiment has no lid in the pressure sensor of the second embodiment. At this time, the projection base 30 corresponds to the projection of the throttle body of the invention.
【0077】そして、圧力センサ400は、スロットル
管950の内壁からスロットル管950の内部へ突出す
る突出基部30と、この突出基部30における吸気の流
れの下流側に面する部位に形成された凹部40と、この
凹部40内に配設されてスロットル管950内に位置す
る圧力検出素子5とを備える。なお、図4中、リード部
材、ワイヤ、Oリングは省略している。The pressure sensor 400 includes a protruding base 30 protruding from the inner wall of the throttle pipe 950 to the inside of the throttle pipe 950, and a recess 40 formed at a portion of the protruding base 30 facing the downstream side of the flow of intake air. And a pressure detecting element 5 disposed in the recess 40 and located in the throttle pipe 950. In FIG. 4, a lead member, a wire, and an O-ring are omitted.
【0078】このように本実施形態によれば、圧力セン
サ400を、スロットル管950の内部へ突出させた形
でスロットル管950へ取り付けることができ、スロッ
トル管950の外部に位置するセンサの部分を最小限に
留めることができるため、センサの取り付けにおける省
スペース化を図ることができる。As described above, according to the present embodiment, the pressure sensor 400 can be attached to the throttle pipe 950 so as to protrude into the throttle pipe 950, and the portion of the sensor located outside the throttle pipe 950 can be removed. Since it can be minimized, space saving in mounting the sensor can be achieved.
【0079】また、従来においては、スロットルボデー
は、車種によって色々な搭載方法がなされるため、スロ
ットルボデーの搭載方向に合わせて、圧力センサの搭載
位置や圧力導入通路を設計する必要があった。その点、
本実施形態によれば、圧力導入通路は不要であり、ま
た、圧力検出素子5が吸気上流側に面していないから、
吸気の流れに直接さらされない。Conventionally, since various mounting methods are used for the throttle body depending on the type of the vehicle, it is necessary to design the mounting position of the pressure sensor and the pressure introduction passage in accordance with the mounting direction of the throttle body. That point,
According to the present embodiment, the pressure introduction passage is unnecessary, and the pressure detection element 5 does not face the intake upstream side.
Not directly exposed to inspiratory flow.
【0080】また、圧力センサ自体が垂直に設けられて
いるため、汚れが付着しても自重で汚れが落ちる。従っ
て、圧力検出素子5の負圧面側(保護部材10が露出す
る側)に汚れが固着せず、センサ特性への影響を抑制で
きる。なお、センサが垂直というのは、天地方向に対し
て圧力センサの受圧面が略平行となっており、受圧面上
の保護部材10上に汚れが付着したとしても、自重によ
り排除される状態のことをいうものであり、例えば、鉛
直方向を基準として45°以内、好ましくは25°以
内、最適は10°以内である。Further, since the pressure sensor itself is provided vertically, even if dirt adheres, the dirt is removed by its own weight. Therefore, dirt does not adhere to the negative pressure surface side (the side where the protection member 10 is exposed) of the pressure detection element 5, and the influence on the sensor characteristics can be suppressed. Note that the sensor is vertical when the pressure receiving surface of the pressure sensor is substantially parallel to the vertical direction, and even if dirt adheres to the protection member 10 on the pressure receiving surface, the sensor is removed by its own weight. This means, for example, within 45 °, preferably within 25 °, and optimally within 10 ° with respect to the vertical direction.
【0081】そのため、吸気中にEGRガスやブローバ
イガス等の汚染ガスが含まれていても、汚れKや水が圧
力検出素子5に付着しにくくなる。よって、本実施形態
によれば、スロットル管950における天地方向に関係
なく、取付向きの自由度の高い圧力センサ400を備え
たスロットルボデーを提供することができ、色々な車種
に対応したスロットルボデーを容易に提供することがで
きる。Therefore, even if the intake gas contains a pollutant gas such as an EGR gas or a blow-by gas, dirt K and water hardly adhere to the pressure detecting element 5. Therefore, according to the present embodiment, it is possible to provide a throttle body including the pressure sensor 400 having a high degree of freedom in the mounting direction, regardless of the vertical direction of the throttle pipe 950, and to provide a throttle body corresponding to various types of vehicles. Can be easily provided.
【0082】また、このスロットルボデーにおいては、
凹部40内には保護部材10が充填され、この保護部材
10にて圧力検出素子5が被覆されているため、汚れK
や水分から圧力検出素子5を保護することを、より高レ
ベルにて実現でき、好ましい。なお、保護部材10は充
填されていなくても良い。また、本実施形態において
も、上記第2実施形態と同様、圧力センサ400に蓋部
(図示せず)を設け、この蓋部に貫通穴を設けた構成と
しても良い。In this throttle body,
The protection member 10 is filled in the recess 40 and the pressure detection element 5 is covered with the protection member 10.
The protection of the pressure detection element 5 from moisture and moisture can be realized at a higher level, which is preferable. Note that the protection member 10 may not be filled. Also, in the present embodiment, similarly to the second embodiment, a configuration may be employed in which a cover (not shown) is provided on the pressure sensor 400 and a through-hole is provided in the cover.
【0083】ここで、図5及び図6に、本実施形態のス
ロットルボデーの変形例を示しておく。上記図4では、
圧力センサ400が、水平方向へ延びるスロットル管9
50における天側に取り付けられていたが、図5に示す
第1の変形例では、圧力センサ400を、水平方向へ延
びるスロットル管950における地側に取り付けてい
る。また、図6に示す第2の変形例のように、天地方向
に延びるスロットル管950に対しても取付可能であ
り、この場合は、圧力検出素子5の受圧面側が下面にな
るため、汚れが堆積しにくい。これら変形例でも、本実
施形態の効果は同じである。Here, FIGS. 5 and 6 show modified examples of the throttle body of the present embodiment. In FIG. 4 above,
The pressure sensor 400 is connected to the throttle pipe 9 extending in the horizontal direction.
In the first modified example shown in FIG. 5, the pressure sensor 400 is mounted on the ground side of the throttle pipe 950 extending in the horizontal direction. Also, as in the second modified example shown in FIG. 6, it can be attached to the throttle pipe 950 extending in the vertical direction. In this case, since the pressure receiving surface side of the pressure detecting element 5 is the lower surface, dirt is removed. Difficult to deposit. The effects of the present embodiment are the same even in these modified examples.
【0084】(他の実施形態)なお、上記実施形態にお
いて、突出部3は、その突出方向が空気流れと略直角で
なくとも良く直角方向から傾いていても良い。例えば、
上記第1実施形態の場合、突出部3が空気の流れと反対
側(図1では右側)へ傾く方が、圧力検出素子5に空気
が直接当たりにくくなり、好ましい。(Other Embodiments) In the above embodiment, the projecting portion 3 does not have to be substantially perpendicular to the air flow, and may be inclined from a perpendicular direction. For example,
In the case of the first embodiment, it is preferable that the protruding portion 3 is inclined to the opposite side (the right side in FIG. 1) to the air flow, because the air hardly hits the pressure detecting element 5 directly.
【0085】また、上記第1実施形態において、凹部4
に形成する貫通穴は凹部4の側壁以外にも、凹部4の底
部に形成しても良い。この場合、保護部材10にて貫通
穴を塞がないように注意しつつ、凹部4の底部から突出
部3の外表面まで連通するように貫通穴を形成すればよ
い。In the first embodiment, the recess 4
The through hole formed at the bottom of the recess 4 may be formed in addition to the side wall of the recess 4. In this case, the through-hole may be formed so as to communicate from the bottom of the concave portion 4 to the outer surface of the protruding portion 3 while taking care not to block the through-hole with the protection member 10.
【0086】また、近年、自動車のエンジン吸気系統に
おいては、EGRが付設され排気ガスの一部を吸気系内
に再循環させることがしばしば行われており、吸気圧セ
ンサにおける検出素子部分(本実施形態では検出素子5
及びワイヤ8の配設部位)への汚れや水の付着を防止す
ることは、重要な課題となってきている。このような事
情からも、上記実施形態は有効であるが、本発明は、エ
ンジンの排気系統(エンジンの排気管等)へ取り付けら
れ、エンジン排気圧を検出する排気圧センサ等に適用し
ても良い。In recent years, in an engine intake system of an automobile, an EGR is often provided to recirculate a part of exhaust gas into the intake system. In the embodiment, the detecting element 5
It is becoming an important issue to prevent dirt and water from adhering to the wire (the portion where the wire 8 is disposed). In view of such circumstances, the above embodiment is effective. However, the present invention is also applicable to an exhaust pressure sensor or the like which is attached to an exhaust system of an engine (eg, an exhaust pipe of the engine) and detects an engine exhaust pressure. good.
【0087】要するに、本発明は、内部を被測定媒体が
流通する通路部材に取り付けられ、該通路部材内の圧力
を検出する圧力センサであるならば、どのようなものに
対しても適用できるものである。また、半導体式の圧力
センサは汚れや水の付着に敏感であるため、本発明の適
用は特に有効であるが、圧力検出素子としては、圧電素
子等であっても良い。In short, the present invention can be applied to any pressure sensor that is attached to a passage member through which a medium to be measured flows and detects the pressure in the passage member. It is. Further, since the semiconductor type pressure sensor is sensitive to the adhesion of dirt and water, the application of the present invention is particularly effective. However, a piezoelectric element may be used as the pressure detecting element.
【図1】本発明の第1実施形態にかかる圧力センサを示
す概略断面図である。FIG. 1 is a schematic sectional view showing a pressure sensor according to a first embodiment of the present invention.
【図2】本発明の第2実施形態にかかる圧力センサの全
体構成図である。FIG. 2 is an overall configuration diagram of a pressure sensor according to a second embodiment of the present invention.
【図3】本発明の第3実施形態にかかる圧力センサの全
体構成図である。FIG. 3 is an overall configuration diagram of a pressure sensor according to a third embodiment of the present invention.
【図4】本発明の第4実施形態にかかるスロットルボデ
ーの要部を示す概略断面図である。FIG. 4 is a schematic sectional view showing a main part of a throttle body according to a fourth embodiment of the present invention.
【図5】上記第4実施形態の第1の変形例を示す概略断
面図である。FIG. 5 is a schematic sectional view showing a first modification of the fourth embodiment.
【図6】上記第4実施形態の第2の変形例を示す概略断
面図である。FIG. 6 is a schematic sectional view showing a second modification of the fourth embodiment.
【図7】従来の圧力センサを示す概略断面図である。FIG. 7 is a schematic sectional view showing a conventional pressure sensor.
【図8】従来の圧力センサにおける取付位置による汚れ
や水の付着を説明する説明図である。FIG. 8 is an explanatory diagram for explaining adhesion of dirt and water depending on a mounting position in a conventional pressure sensor.
2…取付部、3…突出部、4、40…凹部、5…圧力検
出素子、6、60…貫通穴、7…リード部材、8…ワイ
ヤ、10…保護部材、20…温度検出素子、900…通
路部材。2 mounting part, 3 projecting part, 4, 40 recess, 5 pressure detecting element, 6, 60 through hole, 7 lead member, 8 wire, 10 protection member, 20 temperature detecting element, 900 ... passage member.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 ▲徳▼原 実 愛知県刈谷市昭和町1丁目1番地 株式会 社デンソー内 (72)発明者 小池 晴久 愛知県刈谷市昭和町1丁目1番地 株式会 社デンソー内 (72)発明者 嶋津 彰 愛知県刈谷市昭和町1丁目1番地 株式会 社デンソー内 Fターム(参考) 2F055 AA22 BB20 CC02 DD05 EE14 FF38 FF43 GG12 GG25 HH05 3G065 CA00 GA01 GA06 HA21 HA22 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor ▲ Toku ▼ Minoru 1-1-1, Showa-cho, Kariya-shi, Aichi Prefecture Inside DENSO Corporation (72) Inventor Haruhisa Koichi 1-1-1, Showa-cho, Kariya-shi, Aichi Stock Inside the company DENSO (72) Inventor Akira Shimazu 1-1-1, Showa-cho, Kariya-shi, Aichi F-term in the company DENSO (reference) 2F055 AA22 BB20 CC02 DD05 EE14 FF38 FF43 GG12 GG25 HH05 3G065 CA00 GA01 GA06 HA21 HA22
Claims (25)
(900)に取り付けられ、該通路部材内の圧力を検出
する圧力センサであって、 前記通路部材に取り付け可能な取付部(2)と、 この取付部に配設され、前記通路部材の内壁から前記通
路部材の内部へ突出する突出部(3)と、 この突出部に配設されて前記通路部材内に位置する圧力
検出用の圧力検出素子(5)と、を備えることを特徴と
する圧力センサ。1. A pressure sensor which is attached to a passage member (900) through which a medium to be measured flows and detects a pressure in the passage member, the attachment portion being attachable to the passage member. A protruding portion (3) disposed on the mounting portion and protruding from the inner wall of the passage member to the inside of the passage member; and a pressure for pressure detection disposed on the protruding portion and located in the passage member. A pressure sensor, comprising: a detection element (5).
(900)に取り付けられ、該通路部材内の圧力を検出
する圧力センサであって、 前記通路部材に取り付け可能な取付部(2)と、 この取付部に配設され、前記通路部材の内壁から前記通
路部材の内部へ突出する突出部(3)と、 この突出部に配設されて前記通路部材内に位置する圧力
検出用の圧力検出素子(5)と、 前記突出部に配設され、前記圧力検出素子の配設部位に
存在する水分を前記通路部材内へ排出するための排出通
路(6、60)と、を備えることを特徴とする圧力セン
サ。2. A pressure sensor which is attached to a passage member (900) through which a medium to be measured flows and detects a pressure in the passage member, the attachment portion being attachable to the passage member. A protruding portion (3) disposed on the mounting portion and protruding from the inner wall of the passage member to the inside of the passage member; and a pressure for pressure detection disposed on the protruding portion and located in the passage member. A detection element (5); and a discharge passage (6, 60) disposed on the projecting portion, for discharging water present at a position where the pressure detection element is disposed, into the passage member. Features pressure sensor.
る保護部材(10)によって被覆されていることを特徴
とする請求項2に記載の圧力センサ。3. The pressure sensor according to claim 2, wherein the pressure detecting element is covered with a protective member made of resin.
通方向と略直交する方向へ突出し、その先端面(3a)
には該先端面より凹んだ凹部(4)が形成されており、 前記圧力検出素子(5)は前記凹部内において前記突出
部の前記先端面よりも引っ込んだ位置に収納されてお
り、 前記排出通路は、前記凹部の内外を連通するように前記
凹部の側壁にて形成された貫通穴(6)であることを特
徴とする請求項2に記載の圧力センサ。4. The protruding portion (3) protrudes in a direction substantially perpendicular to the flow direction of the medium to be measured, and has a tip surface (3a).
A concave portion (4) recessed from the distal end surface is formed, the pressure detecting element (5) is housed in the concave portion at a position retracted from the distal end surface of the protruding portion, and the discharge is performed. The pressure sensor according to claim 2, wherein the passage is a through hole (6) formed in a side wall of the concave portion so as to communicate inside and outside the concave portion.
の突出方向において前記圧力検出素子(5)よりも前記
凹部(4)の底面寄りに位置していることを特徴とする
請求項4に記載の圧力センサ。5. The protrusion (3), wherein the through-hole (6) is provided with the protrusion (3).
The pressure sensor according to claim 4, wherein the pressure sensor is located closer to the bottom surface of the recess (4) than the pressure detection element (5) in the projecting direction.
子(5)の信号を外部へ取り出すためのリード部材
(7)が配設されており、 このリード部材と前記圧力検出素子とは、前記凹部
(4)内にて前記突出部の突出方向へ凸となるように形
成されたワイヤ(8)によって電気的に接続されてお
り、 前記突出部の突出方向における前記ワイヤの頂部は、前
記突出部の先端面よりも引っ込んだ位置にあることを特
徴とする請求項4または5に記載の圧力センサ。6. The projection (3) is provided with a lead member (7) for extracting a signal of the pressure detection element (5) to the outside, and the lead member, the pressure detection element, Are electrically connected to each other by a wire (8) formed so as to protrude in the protruding direction of the protruding portion in the recess (4), and the top of the wire in the protruding direction of the protruding portion is The pressure sensor according to claim 4, wherein the pressure sensor is located at a position retracted from a tip end surface of the protrusion.
子(5)を被覆し且つ前記貫通穴(6)を塞がないよう
に、樹脂よりなる保護部材(10)が充填されており、 この保護部材によって、前記ワイヤ(8)と前記リード
部材(7)及び前記圧力検出素子(5)との接続部が被
覆されていることを特徴とする請求項6に記載の圧力セ
ンサ。7. A protection member (10) made of resin is filled in the recess (4) so as to cover the pressure detection element (5) and not to block the through hole (6). The pressure sensor according to claim 6, wherein a connection between the wire (8), the lead member (7), and the pressure detecting element (5) is covered with the protection member.
(2)に形成されたコネクタ部(9)を介して外部と接
続可能となっていることを特徴とする請求項6または7
に記載の圧力センサ。8. The lead member (7) is connectable to the outside via a connector part (9) formed on the mounting part (2).
Pressure sensor.
体の流通方向の下流側に面する部位には、凹部(40)
が形成されており、前記圧力検出素子(5)は前記凹部
内に収納されていることを特徴とする請求項2または3
に記載の圧力センサ。9. A recess (40) in a portion of the protruding portion (3) facing downstream in the flow direction of the medium to be measured.
And the pressure detecting element (5) is housed in the recess.
Pressure sensor.
0)を覆うカバー部材(31)を有しており、前記排出
通路は、前記カバー部材に形成された貫通穴(60)で
あることを特徴とする請求項9に記載の圧力センサ。10. The projection (3) is provided with the recess (4).
Pressure sensor according to claim 9, characterized in that it has a cover member (31) covering 0) and the discharge passage is a through hole (60) formed in the cover member.
(900)内の温度を検出するための温度検出素子(2
0)が配設されていることを特徴とする請求項1ないし
10のいずれか1つに記載の圧力センサ。11. A temperature detecting element (2) for detecting a temperature in the passage member (900) is provided at the projecting portion (3).
The pressure sensor according to claim 1, wherein 0) is provided.
子(5)とともに1つのチップに集積化されたものであ
ることを特徴とする請求項11に記載の圧力センサ。12. The pressure sensor according to claim 11, wherein said temperature detecting element is integrated with said pressure detecting element on a single chip.
体が流れてくる方向とは異なる位置に形成されているも
のであることを特徴とする請求項2に記載の圧力セン
サ。13. The pressure sensor according to claim 2, wherein the discharge passage (6) is formed at a position different from a direction in which the medium to be measured flows.
体が流れてくる方向に対して下流側に設けられているこ
とを特徴とする請求項13に記載の圧力センサ。14. The pressure sensor according to claim 13, wherein the discharge passage is provided on a downstream side with respect to a direction in which the measured medium flows.
(950)内の圧力を検出する圧力センサ(400)を
備えるスロットルボデーであって、 前記圧力センサは、前記スロットル管の内壁から前記ス
ロットル管の内部へ突出する突出部(30)と、 この突出部における吸気の流れの下流側に面する部位に
形成された凹部(40)と、 この凹部内に配設されて前記スロットル管内に位置する
圧力検出用の圧力検出素子(5)とを備えたものである
ことを特徴とするスロットルボデー。15. A throttle body provided with a pressure sensor (400) for detecting a pressure in a throttle pipe (950) through which intake air of an engine flows, wherein the pressure sensor is disposed inside the throttle pipe from an inner wall of the throttle pipe. A recess (40) formed at a portion of the protrusion facing the downstream side of the flow of intake air; and a pressure detector disposed in the recess and located in the throttle pipe. And a pressure detecting element (5) for use in the throttle body.
出素子(5)を被覆するように、樹脂よりなる保護部材
(10)が充填されていることを特徴とする請求項15
に記載のスロットルボデー。16. The protection member (10) made of resin is filled in the recess (40) so as to cover the pressure sensing element (5).
Throttle body described in.
(950)内の圧力を検出する圧力センサ(400)を
備えるスロットルボデーであって、 前記圧力センサは、前記スロットル管の内壁から前記ス
ロットル管の内部へ突出する突出部(30)と、 この突出部に形成された凹部(40)と、 この凹部内に配設されて前記スロットル管内に位置する
圧力検出用の圧力検出素子(5)とを備え、 前記凹部の開口部が天地方向に対して略平行となってい
ることを特徴とするスロットルボデー。17. A throttle body provided with a pressure sensor (400) for detecting a pressure in a throttle pipe (950) through which intake air of an engine flows, wherein the pressure sensor is disposed inside the throttle pipe from an inner wall of the throttle pipe. A protruding portion (30) protruding into the protruding portion, a concave portion (40) formed in the protruding portion, and a pressure detecting element (5) disposed in the concave portion and located in the throttle pipe for pressure detection. A throttle body, wherein an opening of the recess is substantially parallel to a vertical direction.
(40)の底面に配置され、その受圧面が前記天地方向
に対して略平行となっていることを特徴とする請求項1
7に記載のスロットルボデー。18. The pressure detecting element (5) is disposed on a bottom surface of the recess (40), and a pressure receiving surface thereof is substantially parallel to the vertical direction.
7. The throttle body according to 7.
(950)内の圧力を検出する圧力センサ(400)を
備えるスロットルボデーであって、 前記圧力センサは、前記スロットル管の内壁から前記ス
ロットル管の内部へ突出する突出部(30)と、 この突出部に配設されて前記スロットル管内に位置する
圧力検出用の圧力検出素子(5)とを備え、 前記圧力検出素子の受圧面が天地方向に対して略平行と
なっていることを特徴とするスロットルボデー。19. A throttle body provided with a pressure sensor (400) for detecting a pressure in a throttle pipe (950) through which intake air of an engine flows, wherein the pressure sensor is disposed inside the throttle pipe from an inner wall of the throttle pipe. And a pressure detecting element (5) disposed on the projecting portion and located in the throttle pipe, for detecting pressure, wherein a pressure receiving surface of the pressure detecting element is vertically oriented with respect to the vertical direction. A throttle body characterized by being substantially parallel.
天地方向に対し、略平行となっていることを特徴とする
請求項1に記載の圧力センサ。20. A pressure receiving surface of the pressure detecting element (5),
The pressure sensor according to claim 1, wherein the pressure sensor is substantially parallel to a vertical direction.
部(3)に形成された凹部(4)の底部に配設され、 前記圧力検出素子の受圧面上には保護部材(10)が設
けられていることを特徴とする請求項20に記載の圧力
センサ。21. The pressure detecting element (5) is disposed at a bottom of a concave portion (4) formed in the projecting portion (3), and a protection member (10) is provided on a pressure receiving surface of the pressure detecting element. The pressure sensor according to claim 20, wherein a pressure sensor is provided.
(4)をほぼ充填するものであることを特徴とする請求
項21に記載の圧力センサ。22. The pressure sensor according to claim 21, wherein the protection member (10) substantially fills the recess (4).
(950)内の圧力を検出する圧力センサ(400)を
備えるスロットルボデーであって、 前記圧力センサは、前記スロットル管の内壁から前記ス
ロットル管の内部へ突出する突出部(30)と、 この突出部に配設されて前記スロットル管内に位置する
圧力検出用の圧力検出素子(5)とを備え、 前記圧力検出素子の受圧面が天地方向に対して下を向い
ていることを特徴とするスロットルボデー。23. A throttle body provided with a pressure sensor (400) for detecting a pressure in a throttle pipe (950) through which intake air of an engine flows, wherein the pressure sensor is disposed inside the throttle pipe from an inner wall of the throttle pipe. And a pressure detecting element (5) disposed on the projecting portion and located in the throttle pipe, for detecting pressure, wherein a pressure receiving surface of the pressure detecting element is vertically oriented with respect to the vertical direction. The throttle body is characterized by pointing downwards.
部(30)に形成された凹部の底部に配設され、 前記圧力検出素子の受圧面上には、保護部材(10)が
設けられていることを特徴とする請求項23に記載のス
ロットルボデー。24. The pressure detecting element (5) is provided at a bottom of a concave portion formed in the projecting portion (30), and a protection member (10) is provided on a pressure receiving surface of the pressure detecting element. The throttle body according to claim 23, wherein the throttle body is provided.
地方向に対して下を向いていることを特徴とする請求項
1に記載の圧力センサ。25. The pressure sensor according to claim 1, wherein a pressure receiving surface of the pressure detecting element is directed downward with respect to a vertical direction.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000191532A JP4380028B2 (en) | 1999-11-02 | 2000-06-26 | Pressure sensor |
FR0013829A FR2800464A1 (en) | 1999-11-02 | 2000-10-27 | PRESSURE SENSING DEVICE AND THROTTLE BODY OF ENGINES |
DE10054144A DE10054144A1 (en) | 1999-11-02 | 2000-11-02 | Pressure sensing device has pressure sensor that is arranged in socket, and which is positioned inside fluid conduit when fastening unit is fastened to fluid conduit |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31258699 | 1999-11-02 | ||
JP11-312586 | 1999-11-02 | ||
JP2000191532A JP4380028B2 (en) | 1999-11-02 | 2000-06-26 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2001194255A true JP2001194255A (en) | 2001-07-19 |
JP4380028B2 JP4380028B2 (en) | 2009-12-09 |
Family
ID=26567237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000191532A Expired - Fee Related JP4380028B2 (en) | 1999-11-02 | 2000-06-26 | Pressure sensor |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4380028B2 (en) |
DE (1) | DE10054144A1 (en) |
FR (1) | FR2800464A1 (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005523430A (en) * | 2002-04-18 | 2005-08-04 | アンスティテュ フランセ デュ ペトロール | Device for measuring the pressure in an internal combustion engine, particularly in a combustion chamber |
JP2005524847A (en) * | 2002-05-08 | 2005-08-18 | ローズマウント インコーポレイテッド | Pressure sensor assembly |
JP2005315602A (en) * | 2004-04-27 | 2005-11-10 | Nippon Seiki Co Ltd | Semiconductor sensor device |
JP2006017621A (en) * | 2004-07-02 | 2006-01-19 | Denso Corp | Pressure sensor system |
JP2006047190A (en) * | 2004-08-06 | 2006-02-16 | Denso Corp | Pressure sensor |
JP2007092608A (en) * | 2005-09-28 | 2007-04-12 | Mitsubishi Electric Corp | Intake control device for internal combustion engine |
JP2007271379A (en) * | 2006-03-30 | 2007-10-18 | Denso Corp | Semiconductor device, sensor device, and method for manufacturing semiconductor device |
JP2008291804A (en) * | 2007-05-28 | 2008-12-04 | Toyota Industries Corp | Exhaust gas recirculation device |
JP2009145267A (en) * | 2007-12-17 | 2009-07-02 | Alps Electric Co Ltd | Waterproof mounting structure of sensor |
WO2012023744A3 (en) * | 2010-08-20 | 2012-05-03 | 두산인프라코어 주식회사 | Adapter structure for mounting boost pressure sensor on electronic turbo-charger engine |
JP2012107927A (en) * | 2010-11-16 | 2012-06-07 | Denso Corp | Pressure sensor |
CN102762830A (en) * | 2009-12-17 | 2012-10-31 | 皮尔伯格有限责任公司 | Valve device for internal combustion engines |
JP2019501379A (en) * | 2015-12-01 | 2019-01-17 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh | Method for manufacturing an apparatus for detecting at least one characteristic of a flow medium in a measurement space |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US6790699B2 (en) | 2002-07-10 | 2004-09-14 | Robert Bosch Gmbh | Method for manufacturing a semiconductor device |
DE102008054618B4 (en) * | 2008-12-15 | 2020-10-08 | Innovative Sensor Technology Ist Ag | Method for manufacturing a device for determining and / or monitoring a process variable and corresponding device |
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JPS597236A (en) * | 1982-07-06 | 1984-01-14 | Nissan Motor Co Ltd | Suction pressure sensor |
JPS5997029A (en) * | 1982-11-26 | 1984-06-04 | Hitachi Ltd | Absolute pressure type semiconductor pressure sensor |
JPS62291534A (en) * | 1986-06-11 | 1987-12-18 | Nippon Soken Inc | Pressure detector |
DE3823449A1 (en) * | 1988-07-11 | 1990-01-18 | Bosch Gmbh Robert | MEASURING DEVICE FOR DETECTING PRESSURE AND TEMPERATURE |
US4930353A (en) * | 1988-08-07 | 1990-06-05 | Nippondenso Co., Ltd. | Semiconductor pressure sensor |
US6405597B1 (en) * | 1997-10-23 | 2002-06-18 | Texas Instruments Incorporated | Flip-chip mounted pressure sensor |
-
2000
- 2000-06-26 JP JP2000191532A patent/JP4380028B2/en not_active Expired - Fee Related
- 2000-10-27 FR FR0013829A patent/FR2800464A1/en active Pending
- 2000-11-02 DE DE10054144A patent/DE10054144A1/en not_active Withdrawn
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JP2005523430A (en) * | 2002-04-18 | 2005-08-04 | アンスティテュ フランセ デュ ペトロール | Device for measuring the pressure in an internal combustion engine, particularly in a combustion chamber |
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Also Published As
Publication number | Publication date |
---|---|
JP4380028B2 (en) | 2009-12-09 |
DE10054144A1 (en) | 2001-05-03 |
FR2800464A1 (en) | 2001-05-04 |
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