JP2001165878A - Infrared ray high temperature heating furnace - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an infrared ray high temperature heating furnace simple in constitution and excellent in heating efficiency of a test material. SOLUTION: This infrared ray high temperature heating furnace is provided with a furnace body 61 having a furnace chamber 62 accommodating a test material 3 and reducing a pressure; and a heater 64 for heating the test material 3 by an IR ray. The heater 64 has a quartz tube 64f; a pair of terminals 64d, an exothermic body 64a; and an introduction wire part 64b positioned between each terminal 64d and the exothermic body 64a. The terminal 64d of the heater 64 is exposed to the outside by penetrating a quartz tube 64f part near the terminal 64d through a through hole at the furnace body 61 side. A seal 65c is provided near the terminal 64d between the furnace body 61 side portion and the quartz tube 64f and the introduction wire portion 64b has a sufficient length such that the seal 65c is durable even by a heat generation of the exothermic body 64a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared high-temperature heating furnace provided with a furnace main body having a furnace chamber for storing test materials and capable of reducing pressure, and a heater for heating the test materials by infrared rays. It relates to a heater to be used.

[0002]

2. Description of the Related Art Conventionally, as a high-temperature infrared heating furnace for heating a test material under a high-temperature vacuum or gas atmosphere, for example, a high-temperature observation furnace described in Japanese Patent Application Laid-Open No. Hei 5-28897 is known. According to the high-temperature observation furnace disclosed in the publication, the furnace body is composed of an ellipsoidal sphere or a spheroid, and the test piece placed at the focal point is set to a reduced pressure atmosphere. Partitioned by a glass plate. The heater is placed in the atmosphere to prevent discharge between terminals of the heater under reduced pressure. According to the observation furnace, it is possible to closely observe the test material with a microscope outside the furnace while heating the test material with a heater.

[0003] However, according to the prior art, the configuration is complicated because the glass plate crosses the furnace body. Also, since the infrared rays emitted from the heater are partially absorbed by the glass plate, the heating efficiency of the test material has been reduced accordingly. A high-temperature observation furnace in which a glass tube for airtightness is separately provided inside the heater is also known, but has the same disadvantage.

[0004]

SUMMARY OF THE INVENTION In view of the above-mentioned conventional circumstances, an object of the present invention is to provide an infrared high-temperature heating furnace having a simple structure and excellent in heating efficiency of a test material, and a heater used therefor. is there.

[0005]

In order to achieve the above object, an infrared high-temperature heating furnace according to the present invention is characterized in that a furnace main body having a furnace chamber for accommodating a test material and capable of depressurizing, and an infrared ray heating method for the test material. A heater for heating by a heater, the heater having a transparent hollow body, a pair of terminals, a heating element, and a conductive wire portion located between each of the terminals and the heating element, the hollow body near the terminal The heater terminal is exposed to the outside by passing a portion through the through hole on the furnace body side, and a seal is provided in the vicinity of the terminal between the furnace body side portion and the hollow body to generate heat from the heating element. Therefore, the conductive wire portion has a sufficient length so that the seal can be durable.

[0006] According to this characteristic configuration, the furnace chamber can be sealed from the outside with a simple configuration in which a seal is provided only between the transparent hollow body and the furnace main body. In addition, there is no inconvenience that the seal is burned out due to the presence of the conductor. Further, since no glass plate or glass tube for airtightness is interposed between the heater and the test material, the heating efficiency is excellent.

Here, the furnace body has a transparent observation window, and the furnace body can be opened around the observation window so that the test material can be externally observed and exchangeable. May have a suitable lid.

In order to make this furnace an infrared ray condensing heating furnace, the furnace chamber is constituted by an elliptical section, an installation portion for the test material is provided at one focal point of the ellipse, and the heater is provided at the other focal point. Just do it. At this time, if the heater is formed in a rod shape and the furnace chamber is formed in a cylindrical shape along the rod-shaped heater, the furnace body can be manufactured at low cost. In addition, by heating the test material along the longitudinal direction with a heater longer than the test material with a margin, it is possible to maintain the observed portion near the center of the test material in a good temperature distribution state. is there.

[0009] To heat the test material at a higher temperature,
A second heater may be provided in the furnace chamber and the test material may be placed on the second heater. At this time, by providing a tubular heat shield around the test material and the second heater, it is possible to prevent the temperature of the test material on the second heater from lowering and to heat other heaters. To prevent that. Preferably, a through hole for observing the test material is formed on the observation window side of the heat shield.

On the other hand, the characteristic configuration of the heater used in the infrared high-temperature heating furnace has a transparent hollow body, a pair of terminals, a heating element, and a conductive wire portion located between each of the terminals and the heating element. The conductor portion has a sufficient length so that a seal provided in the vicinity of the terminal can be durable even by heat generated by a heating element.

[0011]

As described above, according to the features of the infrared high-temperature heating furnace according to the present invention, the heater and the test material can be used with a simple configuration in which only a seal is provided between the transparent hollow body and the furnace body. Thus, it is possible to provide an infrared high-temperature heating furnace excellent in heating efficiency of a test material without a glass plate or the like for airtightness interposed therebetween, and a heater used for the infrared high-temperature heating furnace.

Other objects, configurations and effects of the present invention will become apparent in the following embodiments of the present invention.

[0013]

Next, embodiments of the present invention will be described with reference to the drawings. A stress application observation system 1 shown in FIG. 1 applies a tensile or compressive stress to a test material 3 in a vacuum or a specific gas atmosphere by a stress application observation device 10, and uses a microscope in which only an objective lens 2 is shown. What you observe. The stress imparting observation device 10 includes a tester 30 for pulling a test material 3 placed on a pedestal 20, and an infrared condensing container serving as an observation closed container for sealing the test material 3 in a vacuum at a high temperature. A heating furnace 60 is provided.

A pedestal 20 shown in FIGS. 1 and 3 includes a leg 21 for adjusting the entire inclination, a base 22 and first and second movable bases 23 and 24 which are sequentially stacked on the base 22. The second movable table 24 can be slightly moved in the XY two-axis directions along the plane by the operation handles 23a and 24a. The test material 3 is moved to an appropriate observation position with respect to the objective lens 2 by adjusting the operation handles 23a and 24a.

The tester 30 includes a pair of first and second crossheads 31 for pulling the test material 3 in the horizontal direction in the figure.
32. First and second crossheads 31, 3
Reference numeral 2 denotes a slider 34 which is guided by a linear guide 33 and is slidable in the left and right directions, a laterally extending portion 35 which extends leftward and rightward from the slider 34, and an upper base 4 which extends from the laterally extending portion 35.
And a vertically extending portion 36 extending upward beyond the fourth portion.
On this second movable base 24, one ball screw 38 is supported between the pair of bearings 37,37. The ball screw 38 is formed by connecting a right screw 38a and a left screw 38b at the center, and first and second movable screws 39a and 39b screwed to the outside are respectively fixed through the slider 34. By rotating the ball screw 38, the first and second crossheads 31, 32 can be moved at the same pitch in the right and left opposite directions.

The ball screw 38 is rotated by a predetermined amount from one end through a drive motor 40 including a reduction gear, drive belts 41a and 41b, and a pulley. Also,
A rotary encoder 42 is connected to the other end of the ball screw 38 via a pulley and a conduction belt 43, thereby controlling the rotation of the drive motor 40.

[0017] As shown in FIGS.
An infrared light condensing heating furnace 60 is placed on the upper base 44 supported by 4, and the test material 3 set in the infrared light condensing heating furnace 60 is supplied to the first and second crossheads 31 and 32. The first and second connectors 45 and 46 connected to each other apply a tensile force.

As shown in FIG. 6, the first connecting member 45 generally includes a fixed base 47 connected to the first crosshead 31, an inner cylindrical body 48 connected to the fixed base 47, and an inner space 48a. And a first tensile shaft 51 for connecting the strain gauge 48b and the test material 3 to each other. The disk-shaped fixed base 47 is connected to the longitudinally extending portion 36 by a fixing bolt 47a at the center thereof, and is connected to one end of the inner cylindrical body 48 via a vacuum seal and a plurality of connecting bolts 47b. The strain gauge 48b is fixed in the inner cylindrical body 48 via a mounting tool 48b1 and a mounting screw 48b2. The signal code 48b3 for the strain gauge 48b is connected to an external control device via a code seal portion 47c to which an airtight terminal is connected. A linear ball bearing 48c, which is a linear motion support, is externally fitted to the first tensile shaft 51 between the strain gauge 48b and the test material 3, and the inner cylindrical body 4
8, the first tension shaft 51 is slidably supported, so that a load other than the longitudinal direction of the first tension shaft 51 is hardly applied to the strain gauge 48b.

On the other hand, as shown in FIG.
6 is configured as a rod-shaped second tension shaft 52 connecting the test material 3 and the second crosshead 32. A male screw 52c is formed at the tip of the second tension shaft 52,
This tip is made to pass through a hole formed in the vertically extending portion 36 of the second crosshead 32. The second tension shaft 52 is fixed to the vertically extending portion 36 by tightening the space between the nut 52d screwed to the male screw 52c and the step 52e of the second tension shaft.

As shown in FIGS. 4 and 5, the infrared ray condensing heating furnace 60 has a furnace chamber 62 as a closed chamber inside a furnace body 61 as a closed vessel body, and the furnace chamber 62 has an upper lid. Part 63
By removing this, it is possible to communicate with the outside via the opening 61d. The furnace main body 61 and the lid 63 are made of aluminum, the inner surface of the furnace chamber 62 is plated with gold, and supported on the upper base 44 by four legs 61a. Furnace body 6
Refrigerant passages 61b are formed at four corners of the furnace 1 respectively, and the refrigerant is circulated through a circulation path (not shown) to cool the furnace main body 61. In addition, a communication tube 61c, which is always sealed, through which a sample or a thermocouple is inserted from the outside is penetrated in the furnace chamber 62 near the portion where the test material 3 is disposed.

The furnace chamber 62 of the furnace main body 61 has a cylindrical shape having a cross section in which one focal point F1 of two ellipses E, E is commonly overlapped. The heaters 64, 6 are arranged such that the centers of the heat generating portions 64a are respectively arranged at the other focal points F2, F2.
4 are arranged, and the lid 6 is reflected by the inner surface of the furnace chamber 62.
The near-infrared rays from 3 are efficiently radiated to the test material 3 placed on one focal point F1.

The observation window 63a of the lid 63 presses and holds a transparent quartz glass 63b with an opening plate 63c.
It is configured so that the test material 3 can be observed from the objective lens 2 via 3b. One end of the lid 63 has a conical hole 63d
Gas inlet 63 for sending gas into furnace chamber 62
e is attached. The gas injection port 63e is normally closed by a sealing screw 63f, and various gases are injected into the furnace chamber 62 as needed.

The lid 63 is provided with its arc surface 63g in the furnace main body 61.
Of the furnace main body 61.
To close the opening 61d of the furnace body 61. A vacuum seal 61e is provided on the upper surface of the periphery of the opening 61d. A mounting screw (not shown) is passed through the lid 63 and screwed into the furnace main body 61, and the flange 63h is vacuum-sealed 61e.
To seal the furnace chamber 62 from the outside.

The heater 64 for emitting near-infrared light is connected to both ends of a tungsten heat generating portion 64a located at the center of a transparent quartz tube portion 64f which is an example of a transparent hollow portion. , 64b are overhanging. At each end, the conductor 64b and the terminal 64d
Are joined with a joining foil 64c made of molybdenum, and the inside of the tube portion 64f is kept airtight by pinching off the joining foil portion. Each terminal 64d is supported at both ends of a tube portion 64f by insulators 64e.

The heater 64 includes an infrared focusing heating furnace 6
0 fixed heater bases 65a, 65
a. Then, the vacuum seals 65c, 6
5c and screws (not shown) penetrating the heater fixing lids 65b, 65b are screwed into the heater fixing bases 65a, 65a and pressed to seal boundaries between the inside and outside of the furnace chamber 62 with the vacuum seals 65c, 65c. The inside is kept sealed.

In order to prevent the vacuum seal 65c from deteriorating due to heat generated from the heat generating portion 64a, a contact portion of each vacuum seal 65c is provided with a conducting wire portion 64b which generates little heat. Each vacuum seal 65c is arranged inside the contact portion. That is, the tube portion 64f is connected to the furnace main body 61 via the vacuum seal 65c so that the terminal 64d is positioned outside the furnace main body 61.
The heat generating portion 64a is arranged inside the heater 64 at a position inside the contact portion of the vacuum seal 65c.

As shown in FIGS.
Are the first and second tension shafts 5 in the left and right directions of FIGS.
First and second opening members 66 and 6 for inserting
7 and a suction port 68 for evacuation on the right side. The first and second tension shafts 51 and 52 have upper flat projecting portions 51b and 52b protruding from opposed front ends, respectively.
And projections 51a and 52a protruding upward. The small holes 3 formed on both sides of the test material 3
The test material 3 is configured to be pulled by the first and second tension shafts 51 and 52 by fitting the engaging projections 51a and 52a to the a and 3a. Note that these hooking projections 51
The a and 52a are inclined so as to move away from each other toward the tip thereof, and are configured to be pressed against the overhang portions 51b and 52b as the tensile stress is applied to the test material 3.

As shown in FIGS. 4, 5, and 8, the tube 69 made of quartz glass having a notch 69a at the top is bridged between the first and second openings 66 and 67 to mount the test material 3. Prevention of falling at the time of breakage. Note that the tube 69 made of quartz glass is transparent and is configured so that heating by the heater is not hindered.

As shown in FIGS. 1, 5, and 6, the inner cylindrical body 4
An outer cylindrical body 70 is fitted to the outside of the tube 8 via a vacuum seal 49. This vacuum seal 49 is provided on the inner cylindrical body 48.
And the inner space 48 formed by the outer cylindrical body 70
a is sealed from the outside, and the relative movement of the vacuum seal 49 and the outer cylindrical body 70 in the longitudinal direction of the first tensile shaft 51 is allowed. The outer cylindrical body 70 has an infrared focusing heating furnace 60 on the right side.
And a flange 70a opposed to the flange 66a. A vacuum seal 66b is interposed between the flange 66a and the flange 70a, and the flange 66a and the flange 70a are fastened by the first clamp 66c so as to be close to each other. The outer cylindrical body 70 and the first opening member 66 are connected in a sealed state.

As shown in FIGS.
Similarly, the flange 71a of the seal cylinder 71 externally fitted with the second opening member is also vacuum sealed 67b,
They are connected via the second clamp 67c. The seal cylinder 71 contacts the second tension shaft 52 via the vacuum seal 72 to prevent the right end of the seal cylinder 71 from communicating with the outside. The suction tube 73 is also connected to the flange 68a of the suction hole 68 with the flange facing the same via the vacuum seal 68b and the third clamp 68c.

Next, the procedure for using the above-described stress application observation system 1 and its operation will be described. First, the locking projection 5
The test material 3 is hung between 1a and 52a, and the lid 63 is closed. Next, a microscope (not shown) is operated so that a desired portion can be seen from the observation window 63a. Further, the suction tube 73
When the air in the furnace chamber 62 is sufficiently reduced in pressure, the gas injection ports 75 and 63 are used if necessary.
Inject gas from e or the like.

Then, by driving the drive motor 40,
The first and second crossheads 31, 32 are moved in the separating direction. At this time, the relative displacement of the first and second crossheads 31 and 32 is detected by the rotary encoder 42, and the tensile stress applied to the test material 3 is
8b, the rotary encoder 42 and the strain gauge 48 are controlled by a control device (not shown).
Drive motor 4 by feeding back the information of b
0 can be controlled. When the heater 64 is energized, the test material 3 can be maintained at a high temperature, for example, 1100 ° C. The temperature of the test material 3 is detected by a thermocouple (not shown) and the information is
4 is used for control.

By the action of the vacuum seal 49, the inner space 48a of the inner cylindrical body 48 and the outer cylindrical body 70 forms a closed space AS together with the closed chamber 62. Here, only the linear motion support 48c having extremely low frictional resistance is interposed between the test material 3 and the strain gauge 48b.
The strain gauge 48b can accurately measure the tensile stress applied to the test material 3. On the other hand, in the embodiment of FIG. 2 shown as a comparative example, a strain gauge 48b is interposed between the fixed tensile shaft 47 ′ connected to the first crosshead and the first tensile shaft 51 without vacuum shielding. However, in the comparative example, it is understood that a vacuum seal 66d is interposed on the first tensile shaft 51 between the test material 3 and the strain gauge 48b, which will cause an error in the measurement of the strain gauge 48b.

In the present embodiment, the test material 3 is formed into small pieces so as to be suitable for microscopic observation, and the tensile shafts 51, 52
Since the load applied to the vacuum seal is relatively small, the frictional resistance between the vacuum seal and the tension shaft becomes relatively large with respect to the applied load.
Therefore, in the present embodiment, it is meaningful to dispose the strain gauge 48b in the closed space AS as described above to wipe out the adverse effect due to the frictional resistance between the vacuum seal and the tension shaft.

Next, referring to FIG. 11, a description will be given of a different usage of the infrared ray condensing heating furnace 60 described above. This example is applied to the case where the observation is performed without applying the tensile stress to the test material as described above. In the following different embodiments, the same members as those in the previous embodiment are denoted by the same reference numerals.

In the test, the second opening member 67 is removed, closed with a lid, and vacuum suction is performed from the first opening member 66 side.
The first injection port 61f is closed with a sealing screw 76, and if necessary, a gas or the like is injected from an injection port 75 attached to the second injection port 61g, so that the inside of the furnace chamber 62, which is a closed chamber, has a specific gas atmosphere. can do. Also, the sealing screw 77 is removed, a rod-shaped thermocouple 78a is inserted through the communication passage 61c, and a crucible 78b for receiving a test material is attached to the tip of the thermocouple 78a. Then, the test material 79 is stored in the crucible 78b, and this is observed under heating.

Next, another embodiment of the infrared condensing heating furnace will be described with reference to FIGS. In the embodiment, a first focus F1 is provided in a furnace main body 61 which is a closed container main body.
Are arranged. At the other second focal point F2, heaters 64 are arranged, and these heaters 64 are arranged every 90 degrees. Lid 63
Is thicker than in the previous embodiment, but is provided substantially at the top of the furnace body 61 in the same manner.

This embodiment is different from the previous embodiment in that a pair of water-cooled electrodes 81, 81 are provided along the first focal point F1 at the center of the furnace main body 61. Base 81a
An insulating cylinder 81b is fitted on the outside of the electrode, and an electrode fixing cover 86a and a vacuum seal 86b are provided between the insulating cylinder 81b and the furnace body 61.
And the seal is fixed. A heater plate 82 as a second heater made of bent tungsten or the like is provided between the water-cooled electrodes 81, 81.
c, respectively. An inner cylinder 81d and an outer cylinder 81e having a double structure are provided on the outer side of each water cooling electrode 81, and the cooling water supplied from the water inlet 87a is supplied to the inner cylinder 81d.
Is discharged to the outside through the outer cylinder 81e and the drain port 87b, and the entire water-cooled electrode 81 is cooled. Further, if necessary, gas or the like is injected from the inlet 88a, and gas in the closed space AS is sucked and discharged from the outlet 88b.

A crucible 8 is provided at the upper central portion of the heater plate 82.
3 is installed, into which the test material 89 is placed. A cylindrical heat shield 84 made of the same material as the heater plate 82 is provided between the water-cooled electrodes 81. This heat shield 84
Observation hole 84a is formed above. A thermocouple 85 is connected to a lower portion of the heater plate 82 through a hole 84b formed below the heat shield 84. Although not shown, the heat shield 84 is separable to the left and right at the center, so that the test material 89 can be replaced.

When power is supplied between the water-cooled electrodes 81, the heater plate 82 generates heat, and the test material 89 in the crucible 83 is heated. When power is supplied to each heater 64, the heat shield 84 is heated by the heater 64 and the heater plate 8 is heated.
2 prevents heat radiation from heating. Further, the heat shield 84 is configured such that the heat generating portion 64 a of each heater 64 is
2 also prevents reverse heating. In this embodiment, the temperature of the test material 89 in the crucible 83 can be raised to about 2500 degrees Celsius by using both the heater 64 and the heater plate 82.

Finally, the possibility of still another embodiment of the present invention will be listed. In the above embodiment, the vacuum seals 65c are provided on the left and right sides of the heater 64 to prevent the furnace chamber 62 near the test material 3 from communicating with the outside. However, by inserting a transparent quartz glass plate between the installation part of the test material 3 and the heater 64 and dividing the inside of the furnace chamber 62 into the installation part of the test material 3 and the installation part of the heater 64, the vicinity of the test material 3 is obtained. The inside of the furnace chamber 62 may be kept closed.

In the above embodiment, the infrared condensing heating furnace is used as the closed vessel for observation, but another heating furnace may be used. Further, the observation closed container may be configured such that the temperature is controlled in a cooled state by liquid nitrogen or a Peltier element.

In the above embodiment, the first and second tensile shafts 51 and 52 are moved in the separating directions from both ends of the test material 3 to apply a tensile stress to the test material 3. However, as shown in FIGS. 9 and 10, the first and second tension shafts 51 and 52 are moved away from each other by further projecting the projecting portions 51 b and 52 b and changing the positions of the hooking projections 51 a and 52 a left and right. It is also possible to arrange so that when moved, the locking projections 51a and 52a are brought close to each other to apply a compressive stress to the test material 3. 52 is provided with a long hole 52f and penetrates a locking protrusion 51a protruding from 51b. Further, if the slope S is provided at each end of the hooking projections 51a and 52a, the test material 3 can be easily fitted into the small holes 3a. In the present embodiment, the hooking projections 51a and 52a are inclined so as to approach each other as they approach the tip, and are configured to be pressed against the overhang portions 51b and 52b as compressive stress is applied to the test material 3. It is.

In each of the above embodiments, a tensile or compressive stress is applied to the test material 3 statically. However, the test material 3 may be used to apply these stresses dynamically as a repetitive load. Also,
Heating and non-heating by a heater may be repeatedly performed.

In the above embodiment, each heater 64 is formed in a rod shape and the furnace main body 61 is penetrated at two places, and each terminal 64d is exposed at both ends of the heater 64 to the outside. However, a pair of terminals 64d, 64d may be provided on one of the rod-shaped tube portions, and the heater 64 may be made to penetrate the furnace main body 61 at only one side of the pair of terminals 64d, 64d.
Further, the hollow body 64f may be formed not only as a cylindrical tube portion but also in a spherical shape. At this time, the furnace chamber may be configured as an elliptical rotating body.

It should be noted that the reference numerals in the claims are merely for convenience of comparison with the drawings, and the present invention is not limited to the configuration of the attached drawings by the description. .

[Brief description of the drawings]

FIG. 1 is a diagram illustrating an outline of a stress application observation system according to the present invention.

FIG. 2 is a diagram showing a comparative example of the first linked body.

FIG. 3 is a plan view of a main part of the tester.

FIG. 4 is a longitudinal sectional view of the infrared condensing heating furnace.

FIG. 5 is a sectional view taken along line AA of FIG. 4;

FIG. 6 is a longitudinal sectional view near the first connector.

FIG. 7 is a longitudinal sectional view near the seal cylinder.

FIG. 8 is a plan view near a test material installation portion.

FIG. 9 is a side view of the vicinity of a test material installation section according to a second embodiment.

FIG. 10 is a plan view of FIG. 9;

FIG. 11 is a view corresponding to FIG. 5, showing a different use form of the infrared condensing heating furnace.

FIG. 12 is a view showing a third embodiment of the infrared condensing heating furnace;
FIG.

FIG. 13 is a sectional view taken along line BB of FIG. 12;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Stress application observation system 2 Objective lens 3 Test material 3a Small hole 10 Stress application observation device 20 Pedestal 21 Leg 22 Base 23 First movable base 23a, 24a Operation handle 24 Second movable base 30 Tester 31 First crosshead 32 Second cross head 33 Linear guide 34 Slider 35 Horizontal overhang 36 Vertical overhang 37 Bearing 38 Ball screw 38a Right screw 38b Left screw 39a First movable screw 39b Second movable screw 40 Drive motor 41a, 41b Drive belt 42 Rotary Encoder 43 Conductive belt 44 Upper base 45 First connector 46 Second connector 47 Fixed base 47a Fixed bolt 47b Continuous bolt 47c Code seal part 47 'Fixed tension shaft 48 Inner cylindrical body 48a Internal space 48b Strain gauge 48b1 Mounting tool 48b2 mounting Screw 48 3 code 48c Linear support 49 Vacuum seal (relatively movable) 51 First tension axis 52 Second tension axis 51a, 52a Hook projection 51b, 52b Overhang 52c Male screw 52d Nut 52e Step 52f Slot 60 Infrared light focusing Heating furnace (closed vessel for observation) 61 Furnace main body (closed vessel main body) 61a Leg 61b Refrigerant passage 61c Communication passage 61d Opening 61e Vacuum seal 61f First inlet 61g Second inlet 62 Furnace chamber (sealed chamber) 63 Lid 63a Observation window 63b Quartz glass 63c Opening plate 63d Conical hole 63e Third injection port 63f Sealing screw 63g Arc surface 63h Flange portion 64 Heater 64a Heating element 64b Conducting wire portion 64c Joining foil 64d Terminal 64e Insulator 64f Transparent tube (hollow body) ) 65a Heater fixed base 65b Heater fixed lid 65c Vacuum seal 6 First opening member 66a Flange 66b Vacuum seal 66c First clamp 66c 'Seal foil 66d Vacuum seal 67 Second opening member 67a Flange 67b Vacuum seal 67c Second clamp 68 Suction port 68a Flange 68b Vacuum seal 68c Third clamp 69 Tube 69a Notch Part 70 Outer cylindrical body 70a Flange 71 Seal cylinder 72 Vacuum seal (relatively movable) 73 Suction tube 75 Inlet 76 Sealing screw 77 Sealing screw AS Sealed space E Ellipse F1 One focus F2 The other focus S Slope 78a Thermoelectric Pair 78b Crucible 79 Test material 80 Infrared ray condensing heating furnace (closed vessel for observation) 81 Water-cooled electrode 81a Base 81b Insulating cylinder 81c Heater presser 81d Inner cylinder 81e Outer cylinder 82 Heater plate (second heater) 83 Crucible 84 Heat shield 84a Observation Hole (through hole) 84b Hole 85 Thermocouple 86a Electrode fixing cover 86b Vacuum seal 87a Water inlet 87b Drain 88a Inlet 88b Outlet 89 Test material.

Continued on the front page F term (reference) 2G040 AB07 BA25 CA02 CA12 CA24 CB03 CB14 DA03 EA02 EA07 EA08 EA11 EB02 EC09 GA04 GA08 GC07 3K092 PP09 QA01 QB01 QB24 QC02 QC20 QC25 SS01 SS47 SS48 UB01 VV40 4K06 A14A01 FA16

Claims (8)

[Claims] 1. A furnace body (61) containing a test material (3, 79, 89) and having a furnace chamber (62) capable of reducing pressure.
A heater (64) for heating the test material (3, 79, 89) by infrared rays;
4) is a transparent cavity (64f) and a pair of terminals (64f).
d), a heating element (64a), and a conductor (64b) located between each of the terminals (64d) and the heating element (64a), and a portion of the hollow body (64f) near the terminal (64d) is removed. A terminal (64d) of the heater (64) is exposed to the outside through a through hole on the furnace body (61) side, and the terminal (64d) between the furnace body (61) side portion and the hollow body (64f) is exposed. A seal (65c) is provided near the terminal (64d), and the seal (65c) is also generated by the heat generated by the heating element (64a).
An infrared high-temperature heating furnace in which the conductor portion (64b) has a sufficient length so that c) can be durable. 2. The furnace main body (61) has a transparent observation window (6).
3a), and the furnace body (61) further has a lid (63) capable of opening around the observation window (63a).
The infrared high-temperature heating furnace according to claim 1, comprising: 3. The furnace chamber (62) is formed by an elliptical section (E), and an installation portion for the test material (3, 79, 89) is provided at one focal point (F1) of the ellipse (E). The infrared high-temperature heating furnace according to claim 1, further comprising the heater at the other focal point. 4. The heater (64) is formed in a rod shape, and the furnace chamber (62) is formed in a rod-shaped heater (64).
The infrared high-temperature heating furnace according to claim 3, wherein the furnace is formed in a cylindrical shape along the line. 5. The furnace chamber (6) includes a second heater (82).
The infrared high-temperature heating furnace according to any one of claims 3 and 4, wherein the test material (3, 79, 89) is provided in the second heater (82) and is provided in the second heater (82). 6. An infrared high-temperature heating furnace according to claim 5, wherein a cylindrical heat shield (84) is provided around the test material (3, 79, 89) and the second heater (82). 7. The heat shield (84) according to claim 6, wherein a through hole (84a) for observing the test material (3, 79, 89) is formed on the side of the observation window (63a). Infrared high temperature heating furnace. 8. A heater for use in the infrared high-temperature heating furnace according to claim 1, wherein the transparent cavity (64f), the pair of terminals (64d), and the heating element (64a).
And a conducting wire portion (64b) positioned between each of the terminals (64d) and the heating element (64a).
The seal (6) provided in the vicinity of the terminal even by the heat of (a)
A heater in which the wire portion (64b) has a sufficient length so that 5c) can be durable.