JP2001127578A - Piezoelectric vibrating component and method of manufacturing the same - Google Patents

Abstract

(57) Abstract: A piezoelectric vibration component having a highly reliable end electrode structure is provided. Kind Code: A1 A piezoelectric substrate of a piezoelectric vibrator and a dielectric substrate of a capacitive element have substantially the same length, both ends in the length direction are aligned, and one surface in the thickness direction of each other is formed.
The piezoelectric vibrators 20 are stacked so as to face each other with a gap required for vibration of the piezoelectric vibrators 20. First and second reinforcing layers 41 and 42 are provided on the other surface in the thickness direction of the piezoelectric substrate 200, and third and fourth reinforcing layers 43 are provided on the other surface in the thickness direction of the dielectric substrate 210. , 44 are provided. The first end electrode 51 has both ends attached to the first and third reinforcing layers 41 and 43, and the second end electrode 52 has both ends attached to the second and fourth reinforcing layers 42 and 44. Have been.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrating component used for a piezoelectric resonator or the like and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, a piezoelectric resonator using a thickness-shear mode piezoelectric vibrator has been known as a resonator for obtaining an oscillation frequency of 2 to 16 MHz. The piezoelectric vibrator in the thickness sliding mode has a structure in which a pair of counter electrodes is provided on a piezoelectric substrate. This piezoelectric vibrator has an oscillation circuit 2
It is stacked with a capacitance element forming a load capacitance. Further, the input electrode, the output electrode, and the ground electrode are respectively electrically and mechanically joined using the end electrodes formed on the base plate, and further sealed with a cap. Such a piezoelectric resonator is disclosed, for example, in JP-A-60-123120, JP-A-8-307193, or JP-A-8-2.
It is disclosed in, for example, Japanese Patent No. 37066.

In this type of piezoelectric vibrating component, the piezoelectric vibrator has a structure in which vibrating electrodes are provided on both opposing surfaces of a piezoelectric substrate made of piezoelectric ceramics. One end of each of the vibrating electrodes is led out to one side end face at one end side in the length direction of the piezoelectric substrate, the other end ends in the middle of the length direction of the piezoelectric substrate, and the other end and the end of the piezoelectric substrate. The surface of the piezoelectric substrate is exposed between the side end surface. As means for forming a conductive portion serving as a connection portion with the outside on the exposed portion and the side end surface, JP-A-60-123120 discloses
A dummy electrode is provided on the exposed portion, and the dummy electrode is extended to one end face of the piezoelectric substrate to form a side electrode.

However, in the case of this structure, the electrode film becomes extremely thin at the corners of the piezoelectric substrate. In addition, edge breakage and the like are likely to occur, and the reliability of conduction between the dummy electrode and the side electrode is low. A similar problem has occurred in the capacitive element stacked with the piezoelectric vibrator.

In Japanese Patent Application Laid-Open No. Hei 8-237066, as a means for solving this problem, an end electrode is provided on each of both side end surfaces of the piezoelectric substrate, and the end electrode is covered with a protective film, and a vibrating electrode is provided. Are formed on both sides of the piezoelectric substrate so as to extend on the protective film. In order to obtain end electrodes, temporary electrodes for polarization are formed on opposite side end surfaces of the piezoelectric substrate, and after polarization, the polarized electrodes are left without being deleted. The remaining temporary electrode for polarization is used as an end electrode.

Further, Japanese Patent Application Laid-Open No. 8-307193 discloses that
Disclosed is a technique of providing an end electrode on each of the side end surfaces of both ends of the piezoelectric substrate, covering the end electrode with a damping member, and forming a vibrating electrode extending from both surfaces of the piezoelectric substrate on the damping member. I have. Also in the case of this prior art, the end electrode is used without removing the polarization electrode.

In JP-A-8-307193 or JP-A-8-237066, a polarized electrode is also used as an end electrode. Therefore, after polarization, a step until a damping member or a protective film is formed is not performed. There is no protection means for the split electrode to be the part electrode. For this reason, the polarization electrode that is to be an end electrode is damaged, and the polarization electrode is scraped or peeled off.

Further, in the polishing step for obtaining a predetermined resonance characteristic, it is difficult to completely eliminate the scraping and peeling of the polarized electrode even if a damping material or a protective member is present. In particular, when simultaneously polishing a piezoelectric substrate made of a piezoelectric ceramic material and a viscous and malleable damping material or protective member, the lapping machine may be clogged and the normal polishing operation may be impaired. In addition, peeling of the polarized electrode is more likely to occur.

[0009] In summary, the prior art still needs to be improved in forming a highly reliable end electrode.

[0010]

SUMMARY OF THE INVENTION An object of the present invention is to provide a piezoelectric vibrating component having a highly reliable end electrode structure and a manufacturing method suitable for manufacturing the piezoelectric vibrating component.

[0011]

In order to solve the above-mentioned problems, a piezoelectric vibration component according to the present invention includes a piezoelectric vibrator, a capacitor, a reinforcing layer, and an end electrode.

The piezoelectric substrate of the piezoelectric vibrator and the dielectric substrate of the capacitive element have substantially the same length, the two ends in the length direction are aligned, and one surface in the thickness direction is the piezoelectric vibrator. Are laminated with each other so as to face each other with a gap required for vibration.

[0013] The reinforcing layer includes first to fourth reinforcing layers. The first reinforcing layer is provided on one end side in the length direction of the piezoelectric substrate on the other surface in the thickness direction of the piezoelectric substrate, and one end is led out to one end surface in the length direction of the piezoelectric substrate. Have been.

The second reinforcing layer is provided on the other surface in the thickness direction of the piezoelectric substrate at the other end in the length direction of the piezoelectric substrate, and one end is provided in the other direction in the length direction of the piezoelectric substrate. It is led to the side end surface.

The third reinforcing layer is provided on one end side in the length direction of the dielectric substrate on the other surface in the thickness direction of the dielectric substrate, and one end is provided in the length direction of the dielectric substrate. To one end face.

The fourth reinforcing layer is provided on the other surface in the thickness direction of the dielectric substrate, at the other end in the length direction of the dielectric substrate, and one end is provided at the length of the dielectric substrate. In the other direction.

The end electrode includes a first end electrode and a second end electrode.
End electrodes. The first end electrode is attached to the one end face in the longitudinal direction of the piezoelectric vibrator and the dielectric substrate, and both ends are attached to the first reinforcement layer and the third reinforcement layer. . The second end electrode is attached to the other end face in the longitudinal direction of the piezoelectric vibrator and the dielectric substrate, and both ends are attached to the second reinforcing layer and the fourth reinforcing layer. .

As described above, in the piezoelectric vibrating component according to the present invention, the piezoelectric substrate of the piezoelectric vibrator and the dielectric substrate of the capacitive element have substantially the same length, and both ends in the length direction are aligned. Are stacked on each other so that one surface in the thickness direction faces each other with a gap required for vibration of the piezoelectric vibrator, so that a piezoelectric vibrating component in which the piezoelectric vibrator and the capacitive element are integrated into one component can be obtained. .

The piezoelectric vibration component according to the present invention includes first to fourth reinforcing layers. The first reinforcing layer is provided on one end side in the length direction of the piezoelectric substrate on the other surface in the thickness direction of the piezoelectric substrate, and one end is led out to one end surface in the length direction of the piezoelectric substrate. The third reinforcing layer is provided on one end in the length direction of the dielectric substrate on the other surface in the thickness direction of the dielectric substrate, and one end is led out to one end surface in the length direction of the dielectric substrate. . Therefore, in both the piezoelectric substrate and the dielectric substrate, a first end electrode is provided on one end surface in the longitudinal direction aligned with each other, and both ends of the first end electrode are connected to the first and third ends. Can be connected to the reinforcing layer.

The corners of the piezoelectric substrate and the dielectric substrate are the first
And the thickness of the third reinforcing layer and the first end electrode are joined together, so that at the corners of the piezoelectric substrate and the dielectric substrate,
The electrode film does not become thin. In addition, since the first and third reinforcing layers are provided, breakage or the like does not occur at the corners of the piezoelectric substrate and the dielectric substrate. For this reason, the reliability of the electrical conduction of the first end electrode becomes extremely high.

Further, the first end electrode is attached to one end face in the longitudinal direction of the piezoelectric substrate and the dielectric substrate, and serves as the outermost layer. Can be given immediately before or after the division. The first end electrode can be applied after the polishing step. Therefore, it is possible to prevent the first end electrode from being damaged in the manufacturing process.

The second reinforcing layer is provided on the other surface in the thickness direction of the piezoelectric substrate at the other end in the length direction of the piezoelectric substrate, and one end is provided on the other end surface in the length direction of the piezoelectric substrate. Is derived. The fourth reinforcing layer is provided on the other surface in the thickness direction of the dielectric substrate on the other end side in the length direction of the dielectric substrate, and one end is led out to the other end surface in the length direction of the dielectric substrate. ing. The second end electrode is attached to the other end face in the longitudinal direction of the piezoelectric substrate and the dielectric substrate, and both ends are attached to the second reinforcing layer and the fourth reinforcing layer.

The relationship between the second end electrode and the second and fourth reinforcing layers is as follows: the first end electrode, the first reinforcing layer and the third reinforcing layer.
This is the same as the relationship with the reinforcing layer. Therefore, also between the second end electrode and the second and fourth reinforcing layers, the above-described operation and effect described in relation to the first end electrode and the first and third reinforcing layers are achieved. can get.

In summary, according to the present invention, a piezoelectric vibration component having a highly reliable terminal structure can be obtained.

The present invention further discloses a specific structure of the piezoelectric vibrating component and a preferable manufacturing method thereof. Other objects, configurations and advantages of the present invention will be described in more detail with reference to the accompanying drawings. The figures are merely examples.

[0026]

FIG. 1 is an exploded perspective view of a piezoelectric vibrating component according to the present invention. FIG. 2 is a plan view showing an assembled state of the piezoelectric vibrating component shown in FIG. 1 without a cap.
2 is a sectional view taken along line 3-3 in FIG. 2, and FIG. 4 is a sectional view taken along line 4-4 in FIG.
FIG. 5 is a sectional view taken along the line, and FIG. 5 is an electric circuit of the embodiment shown in FIGS. The illustrated piezoelectric vibrating component includes a piezoelectric vibrator 20, a capacitive element 21, reinforcing layers 41 to 44, and end electrodes 51 and 52.

<Piezoelectric Vibrator> The piezoelectric vibrator 20 includes a piezoelectric substrate 200, a first vibration electrode 201, and a second vibration electrode 202. The piezoelectric substrate 200 is made of PZT, P
T or a lead-free piezoelectric ceramic such as a bismuth layer compound. The first vibrating electrode 201 is provided on the other surface in the thickness direction of the piezoelectric substrate 200, and one end thereof is
00 is drawn out to one end face on one end side in the longitudinal direction, and the other end ends in the middle of the length direction of the piezoelectric substrate 200.

The second vibrating electrode 202 is connected to the piezoelectric substrate 200
, One end is led out to the other end face on the other end side in the length direction of the piezoelectric substrate 200, and the other end ends in the middle of the length direction of the piezoelectric substrate 200.

The piezoelectric substrate 200 includes a first vibrating electrode 201
When a voltage is applied between the second vibrating electrode 202 and the second vibrating electrode 202, it is polarized to perform thickness-shear vibration.

In the illustrated embodiment, the piezoelectric vibrator 20 has a first
, And a second dummy electrode 62. The first dummy electrode 61 is provided at the other end in the length direction of the piezoelectric substrate 200 on the other surface in the thickness direction of the piezoelectric substrate 200, and is spaced from the first vibration electrode 201. The second dummy electrode 62 is provided on one end in the length direction of the piezoelectric substrate 200 on one surface in the thickness direction of the piezoelectric substrate 200. First and second dummy electrodes 61, 6
2 is provided in a range that does not affect the vibration.

<Capacitance Element 21> The capacitance element 21 is composed of at least two capacitors C1 and C
2 (see FIG. 5). The dielectric substrate 210 is made of, for example, a normal dielectric such as BaTiO ₃ , SrTiO ₃ , and PZT.

The two capacitors C1 and C2 are connected to the dielectric substrate 21
0, a plurality of capacitance electrodes 211 to 211 provided on one surface and the other surface.
213. In the illustrated embodiment, the capacitance electrodes are a first capacitance electrode 211 and a second capacitance electrode 21.
2 and a third capacitor electrode 213. The first capacitor electrode 211 is provided on one surface in the thickness direction of the dielectric substrate 210, one end is led out to one end surface on one end side in the length direction of the dielectric substrate 210, and the other end is formed on the dielectric substrate 210. 210 ends in the middle of the length direction.

The second capacitor electrode 212 is connected to the dielectric substrate 21
0 is provided on one surface in the thickness direction, and one end is provided on the dielectric substrate 21.
0 is led out to the other end face on the other end side in the length direction, and the other end ends in the middle of the length direction of the dielectric substrate 210.

The third capacitor electrode 213 is connected to the dielectric substrate 21
The second substrate is provided on the other surface in the thickness direction of 0, faces the first and second capacitor electrodes 211 and 212 in common, and ends at both ends in the length direction in the middle of the length direction of the dielectric substrate 210.

The capacitive element 21 of the illustrated embodiment further includes a third
, And a fourth dummy electrode 64. The third and fourth dummy electrodes 63 and 64 are provided on the other surface in the thickness direction of the dielectric substrate 210 and at both ends in the length direction. Third and fourth dummy electrodes 6
The shape, size or position of each of the third and fourth dummy electrodes 63 and 64 depends on the capacity to be acquired.
The third capacitor electrode 213 is formed in consideration of a stray capacitance generated between the first capacitor electrode 213 and the third capacitor electrode 213.

The piezoelectric substrate 20 forming the piezoelectric vibrator 20 and the dielectric substrate 210 forming the capacitive element 21 are substantially the same in length, and both ends in the length direction are aligned, and one surface in the thickness direction of each other. Is the gap G1 required for the vibration of the piezoelectric vibrator 20.
And are stacked so as to face each other.

<Reinforcing Layer> The piezoelectric vibration component according to the present invention comprises:
The first to fourth reinforcing layers 41 to 44 are included. The reinforcing layers 41 to 44 may be a conductive adhesive or an insulating adhesive. The first reinforcing layer 41 is provided at one end in the length direction of the piezoelectric substrate 200 on the other surface in the thickness direction of the piezoelectric substrate 200, and one end is led out to one end surface in the length direction of the piezoelectric substrate 200. Have been. In the illustrated embodiment, the first reinforcing layer 41 is provided on the first vibration electrode 201.

The second reinforcing layer 42 is provided on the other surface of the piezoelectric substrate 200 in the thickness direction at the other end of the piezoelectric substrate 200 in the longitudinal direction (opposite to the first reinforcing layer 41). , One end is led out to the other end face in the length direction of the piezoelectric substrate 200. In the illustrated embodiment, the second reinforcing layer 42 includes the first reinforcing layer 42.
Is provided on the dummy electrode 61.

The third reinforcing layer 43 is provided at one end in the longitudinal direction of the capacitive element 21 on the other surface in the thickness direction of the capacitive element 21, and has one end on one side in the longitudinal direction of the capacitive element 21. It is led to the end face.

The fourth reinforcing layer 44 is provided on the other surface in the thickness direction of the dielectric substrate 210 at the other end in the length direction of the dielectric substrate 210, and has one end in the length direction of the capacitive element 21. To the other side end face. In the embodiment, the third reinforcing layer 43 is provided on the third dummy electrode 63, and the fourth reinforcing layer 44 is provided on the fourth dummy electrode 64.

<End Electrode> The piezoelectric vibration component according to the present invention includes a first end electrode 51 and a second end electrode 52. The first end electrode 51 is attached to one longitudinal end surface of the piezoelectric substrate 200 and the dielectric substrate 210, and both ends are attached to the first reinforcing layer 41 and the third reinforcing layer 43. The second end electrode 52 is attached to the other end surface of the piezoelectric substrate 200 and the dielectric substrate 210 in the longitudinal direction, and both ends are attached to the second reinforcing layer 42 and the fourth reinforcing layer 44. The first and second end electrodes 51 and 52 can be formed by a thin film method such as vapor deposition and sputtering, or a method such as application and printing of a conductive adhesive. Furthermore, in order to ensure exposure to the end face of each electrode, after barrel polishing,
The first and second end electrodes 51 and 52 may be formed.

<Assembly> In the stacked assembly state, the piezoelectric vibrator 2
0 second dummy electrode 62 provided on the piezoelectric substrate 200
Are connected to the capacitance electrode 211 provided on the dielectric substrate 210 of the capacitance element 21 by the first conductive adhesive 71, and the second vibration electrode 202 of the piezoelectric vibrator 20 is connected to the second capacitance electrode 212. They are bonded by a second conductive adhesive 72.

Further, the piezoelectric vibration component of the embodiment includes a base plate 1 and a cap 3. The base plate 1 supports an assembly of the piezoelectric vibrator 20 and the capacitive element 21.
The cap 3 is attached to the base plate 1 so as to cover the assembly of the piezoelectric vibrator 20 and the capacitor 21, and creates an airtight space around the assembly of the piezoelectric vibrator 20 and the capacitor 21.

The base plate 1 is made of a hard ceramic such as alumina and forsterite. The base plate 1 has terminal electrodes 11 to 13. The terminal electrodes 11 to 13 are formed so as to make a round around the base plate 1 via the side surface and the back surface of the base plate 1 at intervals. The laminated assembly of the piezoelectric vibrator 20 and the capacitive element 21 is bonded to the base plate 1 by means 280 such as bonding with a conductive adhesive or soldering.
Are connected and fixed to the terminal electrodes 11 to 13.

The cap 3 is made of alumina, forsterite, metal, or the like, covers the piezoelectric vibrator 20 and the capacitance element 21, and is joined to the base plate 1 at the periphery using an adhesive. Thereby, the airtightness of the internal space where the piezoelectric vibrator 20 and the capacitive element 21 are provided is maintained.

FIG. 5 shows a known electric circuit obtained by the embodiment shown in FIGS. 1 to 4, in which both ends of a piezoelectric vibrator 20 are connected to terminal electrodes 11 and 13, and both ends of the piezoelectric vibrator 20 are connected to both ends. , A circuit configuration in which one ends of the capacitors C1 and C2 constituting the capacitive element 21 are connected, and the other ends of the capacitors C1 and C2 are commonly connected to the ground terminal 12.

As described above, in the piezoelectric vibrating component according to the present invention, the piezoelectric substrate 200 of the piezoelectric vibrator 20 and the dielectric substrate 210 of the capacitive element 21 have substantially the same length, and both ends in the length direction. And one side in the thickness direction of each other,
The piezoelectric vibrators 20 are stacked so as to face each other with a gap G1 required for vibration of the piezoelectric vibrators 20.
In addition, a piezoelectric vibrating component in which the capacitive element 21 is integrated into one component is obtained.

Further, the piezoelectric vibration component according to the present invention includes first to fourth reinforcing layers 41 to 44. The first reinforcing layer 41 is provided at one end in the length direction of the piezoelectric substrate 200 on the other surface in the thickness direction of the piezoelectric substrate 200, and one end is led out to one end surface in the length direction of the piezoelectric substrate 200. Have been. The third reinforcing layer 43 is provided at one end in the length direction of the dielectric substrate 210 on the other surface in the thickness direction of the dielectric substrate 210, and one end is located at one end surface in the length direction of the dielectric substrate 210. Is derived. Therefore, in both the piezoelectric substrate 200 and the dielectric substrate 210, the first end electrode 51 is provided on one end surface in the longitudinal direction aligned with each other, and both ends of the first end electrode 51 are First and third reinforcing layers 4
1, 43 can be connected.

The ridges of the piezoelectric substrate 200 and the dielectric substrate 210 are joined to the first and third reinforcing layers 41 and 43 and the first end electrode 51.
In addition, the electrode film does not become thin at the corners of the dielectric substrate 210. In particular, the first and third reinforcing layers 41, 4
3 has conductivity, the thickness of the conductive portion connected to the first end electrode 51 is limited to the first and third reinforcing layers 41, 4.
3, the reliability of the electrical connection at the connection portion is further improved.

Moreover, the first and third reinforcing layers 41, 43
Therefore, breakage or the like does not occur at the corners of the piezoelectric substrate 200 or the dielectric substrate 210. For this reason, the reliability of the electrical conduction of the first end electrode 51 becomes extremely high.

Further, the first end electrode 51 is connected to the piezoelectric substrate 2.
Since it is attached to one end face in the length direction of the dielectric substrate 210 and the dielectric substrate 210 and is an outermost layer, it can be applied immediately before or after being divided into individual piezoelectric vibration components. More specifically, the first end electrode 51 can be applied after the polishing step. Therefore, it is possible to prevent the first end electrode 51 from being damaged in the manufacturing process.

Next, the second reinforcing layer 42 is formed on the piezoelectric substrate 20.
On the other surface in the thickness direction of 0, it is provided at the other end in the length direction of the piezoelectric substrate 200, and one end is led out to the other end surface in the length direction of the piezoelectric substrate 200. The fourth reinforcement layer 44 is provided on the other surface in the thickness direction of the dielectric substrate 210 on the other end side in the length direction of the dielectric substrate 210, and one end is provided on the other side in the length direction of the dielectric substrate 210. It is led to the end face.
The second end electrode 52 is attached to the other end surface of the piezoelectric substrate 200 and the dielectric substrate 210 in the longitudinal direction, and both ends are attached to the second reinforcing layer 42 and the fourth reinforcing layer 44.

The relationship between the second end electrode 52 and the second and fourth reinforcing layers 42 and 44 is as follows: the first end electrode 51, the first reinforcing layer 41 and the third reinforcing layer 43. The relationship is the same. Therefore, the first end electrode 5 is also provided between the second end electrode 52 and the second and fourth reinforcing layers 42 and 44.
1 and the first and third reinforcing layers 41 and 43 have the above-described effects.

In short, according to the present invention, a piezoelectric vibration component having a highly reliable terminal structure can be obtained.

<Other Embodiment> FIG. 6 is an exploded perspective view showing another embodiment of the piezoelectric vibrating component according to the present invention, and FIG. 7 is a sectional view of the piezoelectric component shown in FIG. 6 in an assembled state. In the drawings, the same components as those shown in FIGS. 1 to 4 are denoted by the same reference numerals. The feature of this embodiment lies in the arrangement and structure of the capacitor electrode of the capacitor 21. The illustrated capacitance electrode includes first to sixth capacitance electrodes 211 to 216. First capacitance electrode 211
Is provided on one surface in the thickness direction of the dielectric substrate 210, one end is led out to one end surface on one end side in the length direction of the dielectric substrate 210, and the other end is an intermediate portion in the length direction of the dielectric substrate 210. Ends with

The second capacitor electrode 212 is connected to the dielectric substrate 21
0 is provided on one surface in the thickness direction, and one end is provided on the dielectric substrate 21.
0 is led out to the other end face on the other end side in the length direction, and the other end ends in the middle of the length direction of the dielectric substrate 210.

The third capacitor electrode 213 is connected to the dielectric substrate 21
0 on the one surface in the thickness direction.
It is provided between the first and second capacitor electrodes 212.

The fourth capacitor electrode 214 is connected to the dielectric substrate 21
0 is provided on the other surface in the thickness direction, and one end is provided on the dielectric substrate 21.
0, one end face at one end in the length direction, and the other end ends in the middle of the length direction of the dielectric substrate 210.

The fifth capacitor electrode 215 is connected to the dielectric substrate 21
0 is provided on the other surface in the thickness direction, and one end is provided on the dielectric substrate 21.
0 is led out to the other end face on the other end side in the length direction, and the other end ends in the middle of the length direction of the dielectric substrate 210.

The sixth capacitance electrode 216 is connected to the dielectric substrate 21
On the other surface in the thickness direction of 0, it is provided between the fourth capacitance electrode 214 and the fifth capacitance electrode 215.

The first and second capacitance electrodes 211 and 212
Is bonded to the piezoelectric vibrator 20 via bonding layers 71 and 72.

The third reinforcing layer 43 is formed on the fourth capacitor electrode 21.
4, and the fourth reinforcing layer 44 is provided on the fifth capacitor electrode 215.

The piezoelectric vibrating parts shown in FIGS. 6 and 7 have the same structure as the piezoelectric vibrating parts shown in FIGS.
It has a structure similar to that of the embodiment shown in FIG. 4, and has similar functions and effects.

<Manufacturing Method> Next, a method of manufacturing the piezoelectric vibrating component shown in FIGS.

<Vibration Portion Forming Step: First Step> First, as shown in FIG. 8, a plurality of temporary electrodes for polarization 81 are placed on a large piezoelectric plate 80 having a flat area capable of containing a large number of piezoelectric vibrators. ,
82 are provided in a strip shape along the width direction at intervals in the length direction of the piezoelectric large plate 80. The temporary electrodes for polarization 81 and 82 are
The piezoelectric large plate 80 is provided at opposing positions on the front and back sides. As an example, the piezoelectric large plate 80 has a shape of approximately 35 mm square and a thickness of 0.3 to 0.5 mm produced by a method such as sheet molding. If necessary, the thickness dimension and the external dimension are polished,
It is adjusted by means such as cutting. Temporary electrode for polarization 8
1 and 82 are formed in consideration of removal in the next step. Specifically, it is formed by coating of Ag-containing paste or a thin film method.

Next, as shown in FIG. 9, of the plurality of temporary electrodes for polarization 81 and 82, the adjacent temporary electrodes for polarization 81-8 are used.
1, and a DC high voltage V between the polarization temporary electrodes 82-82.
Is applied to polarize the large piezoelectric plate 80. Piezoelectric large plate 80
Are polarized on the front and back surfaces in a direction parallel to the plate surface.

Next, as shown in FIG. 10, after removing the temporary electrode for polarization, the front and back surfaces of the large piezoelectric plate 80 are polished as shown in FIG. Thereby, the piezoelectric large plate 80
Is adjusted to a dimension at which a desired oscillation frequency can be obtained.

Next, as shown in FIGS. 12 and 13, a plurality of electrodes 83 and 85 are provided on the large piezoelectric plate 80 along the width direction at intervals in the longitudinal direction of the large piezoelectric plate 80. , To form a band. The electrode 83 is formed on the surface of the piezoelectric large plate 80 and is used as a first vibration electrode and a first dummy electrode. The electrode 85 is formed on the back surface of the large piezoelectric plate 80 and is used as a second vibration electrode and a second dummy electrode.
As the electrode forming method, a thin film method such as sputtering or vapor deposition, a plating method, or the like can be applied. The electrodes 83 and 85 are formed so as to obtain a piezoelectric vibration component having the structure shown in FIGS. It is a design matter,
The items to be considered are the length of the vibrating electrode to be obtained, the cutting line width, the length of the dummy electrode, and the like. Also, the electrodes 83 and 85
Are arranged so that the position where the temporary electrode for polarization is located and a cutting line set later, and are opposed to each other on both sides. The electrodes 83 and 85 can be formed by metallizing using means such as vapor deposition, sputtering, electrolytic plating, and electroless plating.

Next, as shown in FIGS. 14 and 15, a reinforcing layer 87 is formed on the surface of the large piezoelectric plate 80. Reinforcement layer 8
7 is formed on the cutting line of the piezoelectric large plate 80. The reinforcing layer 87 is cured by applying a conductive adhesive or an insulating adhesive or the like by a method such as screen printing.

<Capacitance Part Forming Step: Second Step> A capacitance part forming step is performed separately from the vibration part forming step. First, as shown in FIG. 16, after a dielectric large plate 90 that can include a large number of capacitive elements is polished to a predetermined thickness, the dielectric large plate 9 is polished.
A plurality of electrodes 91 are formed in a strip shape along the width direction on the front surface side of the piezoelectric large plate 80 at intervals in the length direction of the dielectric large plate 90 so as to match the form of the electrodes 85 of the piezoelectric large plate 80. I do. This electrode 91 is used as a capacitance electrode. An electrode 92 is formed on the other surface of the large dielectric plate 90 so as to overlap the electrode 91. The electrode 92 is used as a capacitance electrode and a dummy electrode. As an example, the large dielectric plate 90 has a size of approximately 35 mm square and a thickness of 0.1 to 0.1 mm manufactured by a method such as sheet molding.
It has a size of 5 mm, and its thickness and outer dimensions are adjusted by means such as grinding or cutting. The external dimensions are the same as those of the large piezoelectric plate 80. The electrodes 91 and 92 can be formed by applying a thin film method, a plating method, or the like.

The electrodes 91 and 92 are formed according to the arrangement of the capacitance electrodes. Specifically, the electrode width and the interval of the surface-side electrode 91 are determined by the input-side capacitor electrode length or the output-side capacitor electrode length and the cutting line so as to obtain the capacitor electrode arrangement shown in FIGS. Determined in consideration of the width. Further, the electrode width, the interval, and the like of the electrodes 92 on the back side are determined in consideration of the cutting line width, the dummy electrode length, and the ground electrode length. The electrodes 91 and 92 can also be formed by metallizing by a technique such as vapor deposition, sputtering, electrolytic plating, and electroless plating.

Next, as shown in FIG.
A reinforcing layer 94 is formed on the electrode 92 on the back side of the “0”.
The reinforcing layer 94 is formed at a position coincident with the cutting line of the piezoelectric large plate 80. The reinforcing layer 94 is made of a conductive adhesive or
It can be formed by applying an insulating adhesive or the like by a method such as screen printing and curing.

<Lamination Step: Third Step> In the lamination step,
As shown in FIGS. 19 and 20, a vibrating electrode is provided on one surface of either the piezoelectric large plate 80 obtained in the vibrating part forming step or the dielectric large plate 90 obtained in the capacitive part forming step. The adhesive layer 93 is adhered along. In the embodiment, the adhesive layer 93 is attached on the electrode 91 provided on the surface of the large dielectric plate 90. The adhesive layer 93 is provided at a position facing the reinforcing layer 94 on the back surface side.

Next, as shown in FIGS. 21 and 22, one surface of the large piezoelectric plate 80 and one surface of the large dielectric plate 90 are joined by an adhesive layer 93 such that a space is formed between both surfaces. The adhesive layer 93 is formed by applying a conductive adhesive, an insulating adhesive, or the like by screen printing or the like. Alternatively, the conductive resin film or the insulating resin film may be sandwiched and cured by pressing. Although not shown, it goes without saying that a technique such as installing a spacing member on the front surface of the large dielectric plate 90 or the back surface of the large piezoelectric plate 80 is used to maintain the vibration space.

Next, in FIGS. 21 and 22, the plate-like laminate obtained by joining the piezoelectric large plate 80 and the dielectric large plate 90 is cut along the cutting line above the adhesive layer 93 and the reinforcing layer 94. By cutting along B, a plurality of strip-shaped laminates are cut out. Before cutting along cutting line B, cut line B
It is preferable to cut both ends of the laminate in a direction orthogonal to the direction along the cutting line A. FIG. 23 shows one of the strip-shaped laminates cut out through the above-described cutting step.

Next, as shown in FIG. 24, end electrodes 95 and 96 are formed on the cut surface of the strip-shaped laminate. End electrode 9
5, 96 can be obtained by applying a conductive adhesive to the cut surface and curing, or by metallizing by a thin film method, a plating method, or the like. Further, these methods may be combined.

Next, as shown in FIG. 25, the strip-shaped laminate is cut in the direction C perpendicular to the cut surface where the end electrodes 95 and 96 are located. Thereby, the piezoelectric vibration component shown in FIG. 26 is obtained. This piezoelectric vibration component is the same as that shown in FIGS. For understanding of FIG. 26, FIGS.
The reference numbers used in are shown in parentheses. The obtained laminate is made of a base plate 1 made of alumina or the like provided with terminal electrodes.
1 is electrically and mechanically bonded and sealed with a cap 3 made of alumina, metal, or the like to obtain a completed piezoelectric vibration component (FIG. 1).
reference).

FIGS. 8 to 26 show a method of manufacturing the piezoelectric vibrating component shown in FIGS. 1 to 4. Needless to say, the piezoelectric vibrating component shown in FIGS. 6 and 7 can be manufactured by the same manufacturing method. .

[0079]

As described above, according to the present invention, it is possible to provide a piezoelectric vibration component having a highly reliable end electrode structure and a manufacturing method suitable for manufacturing the piezoelectric vibration component. .

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of a piezoelectric vibration component according to the present invention.

FIG. 2 is a plan view showing an assembled state of the piezoelectric vibration component shown in FIG. 1 without a cap.

FIG. 3 is a sectional view taken along line 3-3 in FIG. 2;

FIG. 4 is a sectional view taken along line 4-4 in FIG. 2;

FIG. 5 is an electric circuit of the embodiment shown in FIGS.

FIG. 6 is an exploded perspective view showing another embodiment of the piezoelectric vibration component according to the present invention.

7 is a sectional view of the piezoelectric component shown in FIG. 6 in an assembled state.

FIG. 8 is a view showing one step included in the method for manufacturing a piezoelectric vibration component according to the present invention.

FIG. 9 is a view showing a step subsequent to the step shown in FIG. 8;

FIG. 10 is a view showing a step after the step shown in FIG. 9;

FIG. 11 is a view showing another step included in the method for manufacturing a piezoelectric vibration component according to the present invention.

FIG. 12 is a view showing a step after the step shown in FIG. 11;

FIG. 13 is a sectional view taken along line 13-13 of FIG. 12;

FIG. 14 is a view showing a step after the step shown in FIGS.

FIG. 15 is a sectional view taken along the line 15-15 in FIG. 14;

FIG. 16 is a view showing a step that follows the step shown in FIGS. 14 and 15;

FIG. 17 is a sectional view taken along the line 17-17 in FIG. 16;

FIG. 18 is a view showing a step that follows the step shown in FIGS. 16 and 17;

FIG. 19 is a view showing a step after the step shown in FIG. 18;

FIG. 20 is a sectional view taken along the line 20-20 in FIG. 19;

FIG. 21 is a view showing a step after the step shown in FIGS. 19 and 20;

FIG. 22 is a sectional view taken along the line 22-22 in FIG. 21;

FIG. 23 is a view showing a step that follows the step shown in FIGS. 21 and 22;

FIG. 24 is a view showing a step subsequent to the step shown in FIG. 23;

FIG. 25 is a view showing a step after the step shown in FIG. 24;

FIG. 26 is a perspective view of a laminate obtained by performing the step of FIG. 25.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Base plate 20 Piezoelectric vibrator 21 Capacitance element 3 Cap 41-44 First through fourth reinforcing layers 51, 52 First and second end electrodes

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H03H 9/10 H01L 41/08 C 9/17 41/22 Z F term (Reference) 5J108 BB04 CC04 CC13 DD02 EE03 EE07 EE13 EE17 FF11 FF13 FF14 GG03 GG08 GG15 GG16 JJ02 KK01 KK02 MM11 MM14

Claims (11)

[Claims] 1. A piezoelectric vibrator, a capacitive element, a reinforcing layer,
A piezoelectric vibrating component including an end electrode, wherein the piezoelectric substrate of the piezoelectric vibrator and the dielectric substrate of the capacitive element have substantially the same length, and both ends in the length direction are aligned,
One surface in the thickness direction of the piezoelectric vibrators is stacked on each other so as to face each other with a gap required for vibration of the piezoelectric vibrator, and the reinforcing layer includes first to fourth reinforcing layers. The first reinforcing layer is provided at one end in the longitudinal direction of the piezoelectric substrate on the other surface in the thickness direction of the piezoelectric substrate, and one end is one end surface in the longitudinal direction of the piezoelectric substrate. The second reinforcing layer is provided on the other surface in the thickness direction of the piezoelectric substrate on the other end side in the length direction of the piezoelectric substrate, and one end is the length of the piezoelectric substrate. The third reinforcing layer is provided on one end side in the length direction of the dielectric substrate on the other surface in the thickness direction of the dielectric substrate, and one end is provided on the other end surface in the thickness direction of the dielectric substrate. The fourth reinforcing layer is led to one end face in the length direction of the dielectric substrate, and the fourth reinforcing layer is formed of the dielectric substrate. On the other surface in the thickness direction of the dielectric substrate, provided at the other end in the length direction of the dielectric substrate, and one end is led out to the other end surface in the length direction of the dielectric substrate; Includes a first end electrode and a second end electrode, wherein the first end electrode is attached to the one side end surface in the longitudinal direction of the piezoelectric substrate and the dielectric substrate. And both ends are attached to the first reinforcing layer and the third reinforcing layer, and the second end electrode is attached to the other end face in the longitudinal direction of the piezoelectric substrate and the dielectric substrate. And a piezoelectric vibrating component having both ends attached to the second reinforcing layer and the fourth reinforcing layer. 2. The piezoelectric vibrating component according to claim 1, wherein the piezoelectric vibrator includes a first vibrating electrode and a second vibrating electrode, wherein the first vibrating electrode is Is provided on the other surface in the thickness direction of the piezoelectric substrate, one end is led out to one side end surface on one end side in the length direction of the piezoelectric substrate, and the other end is in the middle of the length direction of the piezoelectric substrate. The second vibration electrode is provided on the one surface in the thickness direction of the piezoelectric substrate, and one end is led out to the other end surface on the other end side in the length direction of the piezoelectric substrate. The piezoelectric vibrating component, wherein an end ends in a middle of a length direction of the piezoelectric substrate, and the first reinforcing layer is provided on the first vibrating electrode. 3. The piezoelectric vibration component according to claim 2, further comprising: a first dummy electrode, wherein the first dummy electrode is provided on the other surface of the piezoelectric substrate in a thickness direction. The second reinforcing layer is provided on the other end side in the length direction of the piezoelectric substrate and is separated from the first vibration electrode, and the second reinforcing layer is provided on the first dummy electrode. parts. 4. The piezoelectric vibration component according to claim 3, further comprising a second dummy electrode, wherein the second dummy electrode is provided on the one surface in the thickness direction of the piezoelectric substrate. A piezoelectric vibrating component provided on one end side in the length direction of the piezoelectric substrate, separated from the second vibrating electrode, and connected to a capacitive electrode provided on the capacitive element. 5. The piezoelectric vibrating component according to claim 1, wherein the capacitive element is formed of at least two piezoelectric elements formed of the same dielectric substrate.
A piezoelectric vibrating component having two capacitors, wherein the two capacitors are obtained by a plurality of capacitor electrodes provided on the one surface and the other surface of the dielectric substrate. 6. The piezoelectric vibrating component according to claim 5, wherein the capacitance electrode includes a first capacitance electrode, a second capacitance electrode, and a third capacitance electrode. The first capacitor electrode is provided on the one surface in the thickness direction of the dielectric substrate, one end is led out to one end surface on one end side in the length direction of the dielectric substrate, and the other end is the dielectric material. The second capacitor electrode is provided on the one surface in the thickness direction of the dielectric substrate, and one end is provided on the other end in the length direction of the dielectric substrate. The third capacitance electrode is provided on the other surface in the thickness direction of the dielectric substrate, and the third capacitance electrode is provided on the other surface of the dielectric substrate. , The first and second capacitor electrodes are commonly opposed, and both ends in the length direction are in the middle of the length direction of the dielectric substrate. Ends with said first and second capacitor electrode, and said piezoelectric vibrator, a piezoelectric oscillator part are bonded via an adhesive layer. 7. The piezoelectric vibrating component according to claim 5, further comprising a third dummy electrode and a fourth dummy electrode, wherein said third and fourth dummy electrodes are each formed of said dielectric material. The third reinforcing layer is provided on the third dummy electrode on the other surface side in the thickness direction of the body substrate, and is provided on both ends in the length direction. The layer is a piezoelectric vibration component provided on the fourth dummy electrode. 8. The piezoelectric vibrating component according to claim 5, wherein the capacitance electrode includes first to sixth capacitance electrodes, and wherein the first capacitance electrode is provided on the dielectric substrate. Provided on the one surface in the thickness direction, one end is led out to one end surface on one end side in the length direction of the dielectric substrate, and the other end ends in the middle of the length direction of the dielectric substrate, The second capacitor electrode is provided on the one surface in the thickness direction of the dielectric substrate, and one end is led out to the other end surface on the other end side in the length direction of the dielectric substrate, and the other end is provided. The third capacitor electrode ends in the middle of the length direction of the dielectric substrate, and the first capacitor electrode and the second capacitor electrode are formed on the one surface in the thickness direction of the dielectric substrate. The fourth capacitance electrode is provided on the other surface of the dielectric substrate in a thickness direction. One end is led out to one side end face on one end side in the length direction of the dielectric substrate, the other end ends in the middle of the length direction of the dielectric substrate, and the fifth capacitance electrode is Is provided on the other surface in the thickness direction of the dielectric substrate, one end is led out to the other end surface on the other end side in the length direction of the dielectric substrate, and the other end is the length of the dielectric substrate. The sixth capacitance electrode is provided between the fourth capacitance electrode and the fifth capacitance electrode on the other surface in the thickness direction of the dielectric substrate. The first and second capacitor electrodes are bonded to the piezoelectric vibrator via an adhesive layer, and the third reinforcing layer is provided on the fourth capacitor electrode. The piezoelectric vibrating component, wherein the fourth reinforcing layer is provided on the fifth capacitance electrode. 9. The piezoelectric component according to claim 1, wherein the piezoelectric substrate and the dielectric substrate are made of a lead-free ceramic. 10. The piezoelectric vibrating component according to claim 1, further comprising: a base plate and a cap, wherein the base plate is provided for the piezoelectric vibrator and the capacitive element. A piezoelectric vibrating component supporting an assembly, wherein the cap is attached to the base plate so as to cover the assembly of the piezoelectric vibrator and the capacitive element, and creates an airtight space around the assembly. 11. A method for manufacturing a piezoelectric vibrating component, comprising: a first step, a second step, and a third step, wherein the first step includes a plurality of piezoelectric vibrators. A plurality of temporary electrodes for polarization are provided in a strip shape along the width direction at intervals in the length direction of the large piezoelectric plate, and the plurality of temporary electrodes for polarization. Among them, a voltage is applied between the adjacent temporary electrodes for polarization to polarize the piezoelectric large plate. Next, the temporary electrodes for polarization are removed. Next, a step of forming a plurality of electrodes on the piezoelectric large plate in a strip shape along the width direction at intervals in the length direction of the piezoelectric large plate. The second step includes: polishing a dielectric large plate that can include a large number of capacitive elements to a predetermined thickness; Forming a plurality of electrodes in a strip shape along the width direction at intervals in the length direction of the dielectric large plate so as to be compatible with the mode of the electrodes of the piezoelectric large plate. The third step includes: attaching an adhesive layer to at least one surface of the piezoelectric large plate or the dielectric large plate along the electrode; and forming one surface of the piezoelectric large plate and the dielectric One surface of the large plate is joined by the adhesive layer so that an interval is generated between both surfaces, and a plurality of strips are cut by cutting the plate-like laminate obtained by the joining along the adhesive layer. Cutting out the strip-shaped laminate, forming an end electrode on the cut surface of the strip-shaped laminate, and then cutting the strip-shaped laminate in a direction orthogonal to the cut surface having the end electrode. A method for manufacturing a piezoelectric vibrating component, including: