JP2001119916A - Linear-motor apparatus, stage and aligner using the same driving methods of linear-motor and stage apparatus, exposure method, and manufacturing method of device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a linear motor which can suppress its consumption of excess power and heat generation. SOLUTION: In a linear motor 100, a plurality of coils 111, etc., 112, etc., are arranged on the side of a stator 100. A plurality of switches S01-S30 are interposed between the coils 111, etc., 112, etc., and a control portion 200. With the switches S01-S30, there is connected a switch-changeover control portion 230 for on/off-controlling the switches S01-S30 correspondingly to the position of a movable element 120. A linear-motor apparatus is realized by the linear motor 100, the switches S01-S30, and the control portion 200. In this linear-motor apparatus, the currents fed to the coils which do not contribute to the movement of the movable element 120 are interrupted to suppress the linear motor 100 from its consumption of excess power and heat generation.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor device, a stage device using the same, an exposure device, a driving method of a linear motor, a driving method of a stage device, an exposure method, and a method of manufacturing a device. The present invention relates to a moving magnet type linear motor device in which a plurality of coils are arranged on a slave side, a stage device using the same, and the like.

[0002]

2. Description of the Related Art Conventionally, there has been proposed a linear motor (moving magnet type linear motor) in which a plurality of coils are arranged on a stator side and a plurality of magnets are arranged on a mover side. In such a moving magnet type linear motor, an inexpensive coil is arranged on the stator having a long length in the moving direction, and an expensive permanent magnet is arranged on the mover having a short length, so that the cost can be reduced as a whole. Further, there is an advantage over a moving coil type linear motor, for example, there is no need to connect a wire for supplying a current to the mover side.

[0003]

However, in the conventional moving magnet type linear motor, a current always flows through all the coils arranged on the stator side regardless of the moving position of the mover. Therefore, a current always flows through the coil that does not actually contribute to the movement of the stator, and there is a problem that power is consumed extra.

[0004] Further, due to this extra current, heat is generated also in the coil portion that does not contribute to the movement of the mover. This fever
This causes fluctuations. For example, in a stage device using a moving magnet type linear motor, this fluctuation
The detection of the stage position (position detection by an interferometer) was made inaccurate. The present invention has been made in view of such circumstances, and a linear motor device capable of suppressing excessive power consumption and heat generation, a stage device using the same, an exposure device, a driving method of a linear motor, and driving of a stage device. It is an object to provide a method, an exposure method, and a method for manufacturing a device.

[0005]

According to a first aspect of the present invention, there is provided a stator having a coil unit having a plurality of coils and a magnet unit having a plurality of magnets. Mover, a current control unit that supplies current to the plurality of coils, a plurality of switches provided between the current control unit and the coil, and the plurality of switches according to a position of the mover. And a switch control means for controlling the linear motor. This linear motor device can cut off current for a coil that is not involved in the movement of the mover.

According to a second aspect of the present invention, in the linear motor device according to the first aspect, the switch control means turns on a number of switches corresponding to the number of magnetic poles of the magnet unit. Thus, a current can be selectively passed between the permanent magnet on the mover side and the coil generating the propulsion force. According to a third aspect of the present invention, the switch control means according to the second aspect is configured such that,
At least one of the coils facing the magnet unit
The plurality of switches are controlled so that current is supplied to each of the switches. Thus, when the at least one coil is energized, a propulsive force can be generated between the at least one coil and the permanent magnet on the mover side.

The invention according to claims 4 and 5 has a stator in which a coil unit having a plurality of coils is arranged, and a mover in which a magnet unit having a plurality of magnets is arranged. A plurality of coils are divided into at least two coil groups, currents of two or more phases are supplied and driven in accordance with each coil group, and the number of coils facing the magnet unit is reduced for each coil group. A linear motor device that changes according to the position of the mover, a current control unit that supplies a current to the plurality of coils, a plurality of switches provided between the current control unit and the coil,
Switch control means for controlling the plurality of switches in accordance with the position of the mover, wherein the switch control means, for a plurality of coils belonging to each coil group, the minimum value of the number of the changing coils And controlling the plurality of switches so that current is supplied to the number of coils obtained by adding 1. Then, for the coil group in which the number of coils facing the magnet unit is the minimum value, the facing coil and one adjacent coil are set.
The switch is on / off controlled so that current is supplied to the two coils. Thus, energization is performed on the coils that generate the propulsive force with the permanent magnet, and the number of energized coils in each coil group can be made sufficient. Thereby, the motor constant is improved.

The invention according to claims 6 and 7 has a stator in which a coil unit having a plurality of coils is arranged, and a movable element in which a magnet unit having a plurality of magnets is arranged. A plurality of coils are divided into at least two coil groups, currents of two or more phases are supplied and driven in accordance with each coil group, and the number of coils facing the magnet unit is reduced for each coil group. A linear motor device that changes according to the position of the mover, a current control unit that supplies a current to the plurality of coils, a plurality of switches provided between the current control unit and the coil,
Switch control means for controlling the plurality of switches in accordance with the position of the mover, wherein the switch control means, for a plurality of coils belonging to each coil group, the minimum value of the number of the changing coils And controlling the plurality of switches so that current is supplied to the number of coils obtained by adding 2. Then, for the coil group in which the number of coils facing the magnet unit is the minimum value, the facing coil and two adjacent coils are set.
The switch is on / off controlled so that current is supplied to the two coils. Thereby, energization is performed on the coils that generate the propulsion force with the permanent magnets, and the number of energized coils in each coil group can be made necessary and sufficient. Thereby, the motor constant is improved.

According to an eighth aspect of the present invention, in the linear motor device according to any one of the first to seventh aspects, the switch comprises two or more coils connected in parallel or in series with each other and the current control means. Between the parts
One switch switches on and off two or more coils. Thereby, the number of wirings on the input side for supplying current to the plurality of coils in the stator can be reduced.

According to a ninth aspect of the present invention, in the linear motor device according to any one of the first to eighth aspects, among the plurality of coils, a coil located in a predetermined region of the stator is provided. It is always electrically connected to the current control unit. Thereby, the number of wirings on the input side for supplying current to the plurality of coils in the stator can be reduced.

According to a tenth aspect of the present invention, the linear motor device according to any one of the first to ninth aspects is used as driving means for the stage. In this case, since the motor constant of the provided linear motor device is increased, the overall function of the stage is enhanced. According to an eleventh aspect of the present invention, there is provided an exposure apparatus for forming a predetermined pattern on a substrate using an optical system for exposure, comprising the stage device according to the tenth aspect. In this exposure apparatus, the motor constant of the linear motor device of the stage section is increased, so that the overall function of the exposure apparatus is enhanced.

According to a twelfth aspect of the present invention, a device having a predetermined pattern is manufactured using the exposure apparatus according to the eleventh aspect. Efficient device manufacturing is made possible by an exposure apparatus with high functionality.
According to a thirteenth aspect of the present invention, in the method for driving a linear motor having a stator in which a coil unit having a plurality of coils is arranged and a mover in which a magnet unit having a plurality of magnets is arranged, A coil for supplying a current to the coil according to the position of the mover is selected. According to this driving method, the motor constant of the linear motor increases.

According to a fourteenth aspect of the present invention, there is provided a driving method of a stage device having a linear motor as a driving means, wherein the linear motor is driven by using the linear motor driving method according to the thirteenth aspect. In this stage device, since the motor constant of the linear motor is increased, the overall function of the stage device is enhanced. According to a fifteenth aspect of the present invention, in the exposure method for forming a predetermined pattern on a substrate mounted on a stage device, the driving method of the stage device according to the fourteenth aspect is provided when the stage device is driven. It is used. Since the motor constant of the linear motor of the stage device is increased in the exposure apparatus driven by this method, the overall function of the exposure apparatus is enhanced.

According to a sixteenth aspect of the present invention, there is provided a method of manufacturing a device on which a predetermined pattern is formed.
Are used. By using this exposure method, in manufacturing a device, an efficient device can be manufactured because the motor constant of the linear motor is increased.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described below with reference to FIGS.

The linear motor 10 according to the first embodiment
0 is composed of a stator 110 and a mover 120 as shown in FIGS. In this embodiment, the linear motor 100, a control unit 200, and a switch (S01
To S30) constitute a linear motor device.
Here, the stator 110 is provided with the coils 111 and 11 of the first row.
, A second row of coils 112, 112, and a housing 113 formed so as to surround them. As shown in FIG. 3 (a), the housing 113 seals the coils 111, 111... Of the first row and the coils 112, 112. Inside, the coils 111, 111... Of the first row and the coils 112, 112 of the second row are provided.
Are formed for cooling liquid. Are fixed to the housing 113 by fixing members 114, 114.

On the other hand, as shown in FIG. 3B, the mover 120 includes base portions 121A and 121B, yokes 122 and 122 screwed to the base portions 121A and 121B, and yokes 122 and 122.
Of the first row of permanent magnets 123, 123 disposed on the inner surface of the
.., The second row of permanent magnets 124, 124. The permanent magnets 123,..., 124,.

Although the permanent magnets 123 and 124 are used as the magnetic flux generating means in the magnet unit 120A, a ground structure such as an electromagnet may be used. And the mover 120
The stator 110 is inserted into the hollow portion 120S, thereby forming the linear motor 100 (FIG. 4). .. Provided in the stator 110 of the linear motor 100 in the first row, the coils 112 in the second row, and so on.
Are W-phase coil groups 111 (W)..., 112 according to the waveforms of the current flowing therethrough (W-phase, V-phase, U-phase).
(W) ..., V-phase coil group 111 (V) ..., 112
(V)..., U-phase coil group 111 (U).
(U) ...

Then, a current (Iu, Iv, Iw) having a predetermined phase difference flows through each coil group,
0 moves in the direction indicated by arrow X in FIG. Here, the first
.., A second row of coils 112,
The shape and arrangement of 112 will be described with reference to FIGS.

The stator 110 according to this embodiment is a so-called "dog bone type" stator.
, And the coils 112, 112,... Of the second row are square-shaped coils, as shown in FIG. FIG. 5 of the stator 110
First row of coils 111, 111 arranged on the middle and front sides
.. Have their longitudinally extending portions (hereinafter referred to as “pole portions”) 111i and 111j bent toward the back. The pole portions 111i and 111j act on the magnetic poles of the magnet unit 150 to generate a propulsive force F.

On the other hand, in FIG. 5, the second row of coils 112, 112...
Is bent to the near side. .., And the second row of coils 112, 112,.
5, pole portions 112i and 112 of the coils 112 of the second row facing each other, as indicated by arrows in FIG.
j, pole portions 111i and 111j of the coil 111 in the first row
Are fitted.

As a result, the coils 111 of the first row, 111
.., The second row of coils 112, 112.
.., 112i, 112j... Are aligned in a straight line at the center of the stator 110 (FIGS. 2 and 6). Pole parts 111i, 111j, 112
i, the first row of coils 1 in which 112j are arranged in a straight line
As shown in FIG. 7, the permanent magnets 123, 123,..., 124, 124 on the mover 120 are moved from both sides of the coils 112, 112,. It will be arranged so as to sandwich it.

Next, the operation principle of the linear motor 100 will be described with reference to FIGS. In this FIG.
In order to simplify the explanation, a total of eight permanent magnets 123,
., 124,... Show an example in which the magnet unit 120A is configured. The magnet unit 120A shown in FIG.
Does not show a permanent magnet forming an auxiliary pole. In the magnet unit 120A, the permanent magnets 123, 123
, 124, 124 form four magnetic poles. In FIG. 8, the distribution of the magnetic flux density by the magnet unit 120A is shown by a dashed line, and the number of peaks is the number of magnetic poles.

In FIG. 8, the coils 111, 1 in the first row are shown.
11, the second row of coils 112, 112..., The symbol “U” is applied to the coil through which the current Iu flows, the symbol “V” is applied to the coil through which the current Iv flows, and the symbol “W” is applied to the coil through which the current Iw flows "Is attached. FIG. 8 shows an example of the direction in which the current Iu flows. Hereinafter, the description of the direction in which the propulsive force is generated is based on the assumption that the current flows in the direction of FIG.

Here, the mover 12 of the linear motor 100
, 112, 112,..., “V-phase” current Iv, “W”
The phase “current Iw” will be described. The mover 120 is shown in FIG.
At the position shown in FIG. 9, the pole portions 111i, 111j, 112i, and 112j indicated by oblique lines in FIG.
A current of Imax shown at time 0 flows. At this time, a propulsive force F to the right in FIG. 8 is obtained.

Here, the U-phase coil group 111 (U),.
112 (U), V-phase coil group 111 (V), 11,
2 (V)..., W-phase coil group 111 (W).
(W)... The currents Iu, Iv, and Iw flowing through the movable element 120 are changed as shown in FIG.
8 moves to the right in FIG. still,
The waveforms of the currents Iu, Iv, and Iw have a phase difference of 2π / 3 from each other.

The coils 111, 111..., 112, 1
If the flow of current to 12 is interrupted, the mover 120 stops. Also, the coils 111, 111 ..., 112, 112
If the phases of the currents Iu, Iv, and Iw flowing through are shifted by 180 degrees with respect to the waveform shown in FIG. 9, the mover 120 moves to the left. In the linear motor 100 according to the first embodiment, the coils 111 and 1 on the stator 110 side are used.
.., 112, 112... Rather than energizing all of the coils 111, 111, 112, 112... In accordance with the number of magnetic poles of the magnet unit 120A. The motor constant is raised.

, 112, 112,... Facing at least one of the magnet units 120A.
When the current is supplied to one of the contacts, a thrust for driving the mover 120 can be obtained. In this embodiment,
In order to obtain a sufficient thrust, the number of coils corresponding to the number of coils 111, 111..., 112, 112.

By the way, the number of coils 111, 111..., 112, 112.
It changes according to the position of the mover 120. FIG.
(F), according to the moving position of the magnet unit 120A, the coils 111, 111,.
This shows how the number of 112 changes. , 112, 112,... Shown by solid lines in the drawing are coils facing the magnet unit 120A.

Here, the U-phase coils 111 (U), 11
Focus on only 1 (U), 112 (U), 112 (U), and consider the number of opposing coils. As shown in this figure, the number of U-phase coils 111 (U),..., 112 (U),... (Indicated by diagonal lines) facing the magnet unit 120 </ b> A (the number of magnetic poles is 4) is “3” → "3" → "2" → "2" →
It changes from “2” to “3”.

That is, regarding the magnet unit 120A having the number of magnetic poles of “4”, the U-phase coil 1
11 (U), 111 (U)..., 112 (U), 112
(U) will vary between two and three. This is the same for the V-phase and W-phase coils. FIG. 11A shows two coils of the U phase and three coils of the V phase.
Coils, W-phase three coils (total of 8
) Indicates a state in which the magnet unit 120A faces the magnet unit 120A.

When considering the optimum value of the motor constant of the linear motor 100, only the eight coils 111, 111..., 112, 112. However, in the linear motor 100, there is a demand that the sum of the resistances of the U-phase, V-phase, and W-phase coil groups must be the same.

Therefore, the coil to be energized as described above is
If there are two in the U phase, three in the V phase and three in the W phase,
It will be out of proportion. This imbalance is a control problem. Therefore, it is necessary to make the number of coils energized in the three-phase coil group of U-phase, V-phase, and W-phase equal. Therefore, in this embodiment, while considering these requirements,
In order to increase the motor constant, the number of coils 111, 111..., 112, 112... To be energized in each of the U-phase, V-phase, and W-phase coil groups and the actual energization are performed by the following two methods. Determine the coil.

(1) First Method In this first method, coils 111, 111,... Opposed to the magnet unit 120A (the number of magnetic poles is 4) in each of the U-phase, V-phase, and W-phase coil groups. When the number of 112, 112 ... changes, paying attention to the fact that the minimum value is "2",
In addition, in consideration of the fact that the magnet unit 120A moves left and right, two opposing coils and one coil (two non-opposite coils) are energized to the left and right of the two coils.
In this case, the number of coils to be energized is U-phase, V-phase, W-phase.
In any of the phases, a total of "4" is provided for each coil group.

FIGS. 11B to 11D show a state in which the magnet unit 120A is opposed to two U-phase coils, three V-phase coils, and three W-phase coils. .., 112, 112.
This is shown for each phase, V phase, and W phase. In the illustrated example, the number of the U-phase coils opposed to the magnet unit 120A is two (two of the eight coils surrounded by a dashed line are shown by oblique lines). Therefore, the remaining two coils to be energized are, as shown in FIG. 11B, two coils on both sides adjacent to each other (coils indicated by oblique lines among coils indicated by broken lines).

At this time, as shown in FIGS. 11C and 11D, the number of V-phase and W-phase coils opposed to the magnet unit 120A is three (the hatched lines out of the eight enclosed by the dashed line). 3). For the remaining one to be energized,
The coil closer to the side end of the magnet unit 120A (the coil indicated by oblique lines among the coils indicated by broken lines).

It should be noted that the magnet unit 120A is
When approaching the end Xo of 0, the remaining coils to be energized are adjacent coils on the opposite side of the end X0.
In the case of a coil group having two coils facing the magnet unit 120A (U phase in FIG. 11E), the remaining two coils to be energized are both on the opposite side of the end portion X0.
(2) Second Method In the second method, as the magnet unit 120A (the number of magnetic poles is four) moves, the coils 111 and 1 facing the magnet unit 120A move.
When the number of 11..., 112, 112.
Paying attention to the fact that the minimum value is “2” in each of the V phase and the W phase, any one of the left and right coils of the two coils is supplied so that the minimum current required for driving the mover 120 is passed. To energize only one adjacent coil. In this case, the number of coils to be energized is "3" for each coil group in any of the U-phase, V-phase, and W-phase.

FIG. 12A is similar to FIG.
The magnet unit 120A has two U-phase coils and three V-phase coils.
Phase coil, three W phase coils (total of 8
Coils 111, 1 that are energized when facing
11, 112, 112... Are shown for each of the U phase, the V phase, and the W phase. In the illustrated example, the number of U-phase coils opposed to the magnet unit 120A is two. Therefore, as for the remaining one to be energized, as shown in FIG. 12A, the one closer to the magnet unit 120A is selected from the two coils on both sides adjacent to each other. Coil drawn).

At this time, as shown in FIGS. 12 (b) and 12 (c), the number of V-phase and W-phase coils facing the magnet unit 120A is three (both of eight enclosed by a dashed line). 3). Therefore, only the coils need to be energized for the V and W phases. Thus, in the second method, the number of coils to be energized can be reduced (three) as compared with the first method. This is for the following reason.

In the first method, both sides of the magnet unit 120A are energized in consideration of the fact that the magnet unit 120A moves to the left and right, but the coils 111, 111 using the switches (S01) to (S30) described later in detail. ..., 112, 112 ...
This is because, in the cutoff control (FIGS. 13 and 14), since the switching speed is much faster than the moving speed of the linear motor 100, the switching speed can sufficiently follow the fine movement of the magnet unit 120A. Also, as described later, the switch (S01)
This is because the switching of (S30) to (S30) is performed when the currents Iu, Iv, and Iw become "0", so that it is not necessary to consider a delay in current rise due to the L component and a current transient response.

Next, the coil 11 of the linear motor 100
, 111 (W), 112 (W), 111 (V), 1
The currents Iu, Iv, Iw flowing for each of 12 (V), 111 (U), 112 (U), are set to the switches (S01, S02,
The control of the linear motor 100 that is turned on (energized) / off (cut off) for each of the coils 111, 112,... Using S30) will be described with reference to FIGS.

In this embodiment, the current value control unit 210
Currents Iv, Iu, Iw supplied from the V-phase switches (S01) to (S10) and U-phase switches (S11) to (S11).
20) By turning on / off the W-phase switches (S21) to (S30) by the switch changeover control unit (switch control means) 230, only the coil that actually generates the propulsion force F is energized. The power consumption is suppressed so that no extra heat is generated.

That is, as shown in FIG.
00 is a current value control unit (current control unit) 210 for generating the currents Iv, Iu, Iw, and a desired current Iv,
Three amplifier units 221 and 22 for generating Iu and Iw
2, 223, and a switch switching control unit 230 for turning on / off (switching) the above-described V-phase, U-phase, and W-phase switches (S01) to (S30). The switch switching control unit 230 has an input unit 240 for inputting a target position of the mover 120 of the linear motor 100.
And a position sensor (position detecting means using an interferometer) 241 for detecting the current position of the mover 120 are connected.

The amplifier section (V phase) 22 of the control section 200
1, amplifier section (U phase) 222, amplifier section (W phase) 223
, 112 (V)..., V-phase coil groups 111 (V).
Between the U-phase coil groups 111 (U), 112 (U), and the W-phase coil groups 111 (W), 112 (W), the V-phase switches (S01) to ( S10), U-phase switches (S11) to (S20), W-phase switches (S21)
To (S30).

The actual U-phase coil groups 111 (U) and 112 (U) of the stator 110 and the W-phase coil group 11
1 (W), 112 (W), V-phase coil group 111
The arrangement of (V) and 112 (V) is as shown in FIG.
The W, V, and U phases are from the left. In this embodiment, the switches (S01) to (S3) of the linear motor 100
The on / off control of 0) is individually performed for each of the switches (S01) to (S30) as described below.

The number of coils energized in each of the U-phase, V-phase, and W-phase coil groups is the same. This is U
This is because all the resistance values of the energized coils in the phase, the V phase, and the W phase are matched in each phase. The coil to be energized is determined by one of the first and second methods described above. As described above, the number of coils to be energized is the same in the U phase, the V phase, and the W phase. Therefore, in the example illustrated in FIG. 10, a so-called star connection in which the output terminal (G) is shared. It has become. Thus, the number of wires (especially wires on the output side) drawn out from the first-row coils 111, 111... And the second-row coils 112, 112.

The dummy resistor (Dumm) shown in FIG.
y) is provided in the case where there is not enough space in the housing 113 to make the number of U-phase, V-phase, and W-phase coils the same (in the example of FIG. 11, 30 coils are required). is there. Thereby, even when all the switches (S01 to S30) are turned on, the resistance value of each phase can be matched. Next, the “energization / shutoff control program” executed by the switch switching control unit 230 will be described.

By executing the energization / interruption control program, the switches (S01) to (S30) of each coil group (V phase, U phase, W phase) are individually turned on / off, and the propulsion force The coil contributing to the generation of the motor is selectively energized, so that the linear motor 1 consumes less power and generates less heat.
00 is performed.

When the energization / cutoff control program is started, first, in step S 01, the target position of the mover 120 input from the input unit 240 and the current position of the mover 120 detected by the position sensor 241 are determined. The difference ΔL is obtained by comparison. In the next step S02, it is determined whether or not the difference (ΔL) is “0”. When the determination result is “Yes”, it is determined that the mover 120 is already at the target position, and the stop processing of the mover 120 (steps S03 to S11) is performed.

On the other hand, if the decision result in the step S02 is "N
In the case of “o”, it is further determined whether the difference (ΔL) is a positive value or a negative value (step S12). If the difference (ΔL) is a positive value, the mover 120 is moved in the positive direction (rightward in FIG. 8). direction)
(Step S13 to Step S22)
Is a negative value, the mover 120 is moved in the negative direction (FIG. 8).
The processing of moving in the middle and left directions (steps S23 to S32) is performed.

First, regarding the stop processing of the mover 120,
explain. When the process proceeds to the stop process of the mover 120 (process after step S3), first, in step S03, it is determined whether or not all the U-phase switches (S11) to (S20) have been turned off in the previous loop. . The result of this determination is “Y
es ", that is, if all the U-phase switches (S11) to (S20) were already off in the previous loop,
It proceeds to step S06 as it is.

On the other hand, the U-phase switches (S11 to (S
If all of 20) are not off, it is determined in step S04 whether the U-phase current Iu is “0”. While the determination result is “No”, the next step S05 is skipped, and the process proceeds to step S6 and subsequent steps. On the other hand, "Ye
s ", in step S05, all the U-phase switches (S11) to (S20) that are on at this time are turned off, and the current Iu is changed to the U-phase coils 111 (U),.
2 (U)... And the process proceeds to step S06.

In step S06, it is determined whether or not all the V-phase switches (S01) to (S10) have been turned off in the previous loop. When the result of this determination is “Yes”, the switches (S01) to (S10) of the V phase are all off, and the process proceeds to step S09. If not all of the V-phase switches (S01) to (S20) have been turned off, it is determined in step S07 whether or not the V-phase current Iv is "0", and the determination result is "No". we are,
The next step S08 is skipped, and the process proceeds to step S9 and the subsequent steps. If "Yes", in step S08, the V-phase switches (S01) to ON which are on at this time are set.
(S20) is all turned off, and the process proceeds to step S09.

In steps S09 to S11, W
Similar processing is performed for the phase, and control is performed so that the current Iw does not flow through the W-phase coils 111 (W) and 112 (W). When the values of the currents Iu, Iv, Iw become "0" as described above, the switches (S1) to (S30) of the U-phase, V-phase, and W-phase are turned off in the first row. Coil 1
., And the second row of coils 112, 112... In order to improve the transient characteristics from energization to interruption.

Next, the process of moving the mover 120 in the positive direction (steps S13 to S22) will be described. In this process, first, in step S13, switches (S01) to (S20) to be turned on are determined based on the current position of the mover 120. Here, the switches to be turned on (S01) to (S20) are the switches connected to the "coil to be energized" determined by the above-described first and second methods.

In the next step S14, first, the U-phase switches (S11) to (S20) to be turned on in this loop are
It is determined whether the switch is already on. If the result of this determination is "Yes", the process proceeds to step S17.
Proceed to. On the other hand, if the U-phase switch to be turned on (any of S11 to S20) does not match the already-on switch, in step S15, the U-phase current Iu is set to "0". Is determined.

While the result of this determination is "No", the next step S16 is skipped, and the process proceeds to step S17 and thereafter, and when "Yes", the process proceeds to step S16.
In step S16, among the U-phase switches (S11 to S20) that are turned off, the switch that is to be newly turned on this time is turned on, and the U-phase switch (S11 to S20) that is turned on is turned on. The switch which should be newly turned off this time is turned off.

As a result, the W-phase current Iu is changed to the W-phase coils 111 (W)...
(W) flows only to ... In the next steps S17 to S19, for the V phase, steps S20 to S
At 22, the control for turning on the switch to be turned on and turning off the switch not to be turned on is similarly performed for the W phase.

As described above, even when the switches (S01) to (S30) are turned on from off and from on to off, the switching is performed when the values of the currents Iu, Iv and Iw become "0". .., 11
This is for improving the transient characteristics from the time of interruption of 2,112. In the process of moving the mover 120 in the negative direction (steps S23 to S32), first, in step S23, the switches (S01) to (S30) to be turned on are set based on the current position of the mover 120. It is determined. The method of determining the switches (S01) to (S30) to be turned on is either the first method or the second method described above.

In the next steps S24 to S26, for the U phase, in order to move the mover 120 in the negative direction, a process of switching the desired switches (S11) to (S20) from on to off and from off to on is performed. Will be The switching of the switches (S11) to (S20) to ON is performed in substantially the same procedure as in steps S14 to S16 described above.

The switches (S01) to (S10) and the switches (S21) to (S30) to be turned on for the V phase in steps S27 to S29 and for the W phase in steps S30 to S32, respectively. Is actually switched from on to off and off to on. (Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIG.

The linear motor 350 according to the second embodiment has coils 111, 111,.
.., And switches (S01) to (S05), (S11) to (S15), (S2)
The arrangement of 1) to (S25) is different from that of the first embodiment. That is, in the linear motor 350, the coil 1
A housing 113 (see FIG.
To reduce the number of wires drawn from
U-phase coil groups 111 (U), 112 (U), V-phase coil groups 111 (V), 112 (V), W-phase coil group 1
11 (W) and 112 (W), the first row of coils 1
11 and the second row of coils 112 are connected in parallel, and one switch is provided between the coils 111 and 112 connected in parallel and the control unit 300.

As a result, the number of wirings drawn out from the housing 113 can be reduced to half. As a result, the water tightness of the housing 113 is enhanced,
Cooling efficiency is improved.

The linear motor 35 according to the second embodiment
0, and switches (S01) to (S05),
The switching control procedure of (S11) to (S15) and (S21) to (S25) is the same as that of the linear motor 1 of the first embodiment.
00 is substantially the same as that of FIG. still,
Although the case where the coils 111 in the first row and the coils 112 in the second row are connected in parallel has been described, they may be connected in series. Also in this case, the number of wirings can be reduced.

(Third Embodiment) Next, a third embodiment of the present invention will be described.
The embodiment will be described with reference to FIG. still,
The linear motor 450 according to the third embodiment includes coils 111, 111, 112, 112,.
And a switch (S01) interposed between the controller and the controller 400
-(S06), (S11)-(S15), (S21)-(S25)
Is different from the above-described first embodiment.

The linear motor 450 is also mounted on the housing 1
A device has been devised to reduce the number of wirings drawn from the wiring 13 (see FIG. 3). That is, in the third embodiment, the plurality of coils 111, 111,.
12, the coils (V-phase, U-phase, W-phase in FIG.
The center four coils of each phase coil group) are directly connected to the current value control unit 410 of the control unit 400 without using a switch.

As described above, the coil 11 located at the center is
, 112,... Are always connected to the current value control unit 410 because the central part of the stator 460 is in a normal use state (for example, when the linear motor 450 is used for a stage device). This is because the mover 460 exists at a high probability. In this case, the power consumption is slightly increased as compared with the linear motor 100 according to the first embodiment, but the number of wires drawn from the housing 113 can be reduced, and the cooling efficiency is improved. Also, the switches (S01) to (S06), (S11) to (S15), (S
On / off control can be easily performed because the number of (21) to (S25) is small.

It should be noted that the region where the current is always supplied is not limited to the central portion. If there is a portion where the mover 460 exists with a high probability, the region may be always supplied with the current. In the first to third embodiments, the linear motor 100 having the mover 120 having four magnetic poles has been described as an example. However, the mover 520 having eight magnetic poles shown in FIG. The linear motor 500 having
The present invention can of course be applied to a linear motor 550 shown in FIG. 8 and having a mover 570 having 11 magnetic poles.

In the first to third embodiments, an example has been described in which at least the coil facing the magnet unit 120A is energized to drive the mover 120. The mover 120 can be driven simply by energizing at least one coil facing the 120A. (Fourth Embodiment) Next, a fourth embodiment of the present invention will be described with reference to FIG.

In the fourth embodiment, the first to third stages described above are applied to a stage device 600 used for manufacturing a semiconductor.
The linear motor (100) obtained by the embodiment
Etc.). Hereinafter, a case where the linear motor 100 (FIG. 1) of the first embodiment is incorporated in a stage device 600 will be described as an example. The linear motor 100 according to the first embodiment includes the coils 111, 111
, 112, 112...
Is controlled in accordance with the position of, so that the heat value Q of the stator 110 is configured to be as small as possible.
The linear motor 100 has a high motor constant.

In the fourth embodiment, the linear motor 100 having a high motor constant is used for driving the X stage (movable stage) 600X of the stage device 600. Here, when a fluid for temperature adjustment is passed through the coolant passage 115 between the housing 113 of the stator 110 and the coils 111, 111, 112, 112,.
Heat from 10 is absorbed.

The configuration of the two linear motors 620 (only one is shown in FIG. 19) used for driving the Y stage 600Y is the same as that of the linear motor 100, and a detailed description thereof will be omitted. These linear motors 100, 6
Stage device 600 in which 20 is used as driving means
Is not limited in its use, but in this embodiment,
It is used as a means for moving the wafer W in an exposure apparatus that transfers a pattern formed on a mask (not shown) onto the wafer (substrate) W.

That is, the stage device 600 is a two-axis XY stage device of X-axis and Y-axis,
02, an X stage 600X driven in the X direction (direction indicated by arrow X in the figure), a Y stage 600Y driven in the Y direction (direction indicated by arrow Y), and a sample stage (movable body) 6
04 is a main component. Here, the sample stage 60
Reference numeral 4 is arranged on the Y stage 600Y, and a wafer (substrate) W is mounted on the sample stage 604 via a wafer holder (not shown).

An irradiation unit (not shown) is arranged above the wafer W, and the wafer W is irradiated with exposure light irradiated from the irradiation unit via a mask (both not shown).
The circuit pattern on the mask is transferred to a resist (not shown) previously applied thereon. The amounts of movement of the X stage 600X and the Y stage 600Y in the stage device 600 are determined by the movable mirrors 605X and 60X fixed to the X-direction end and the Y-direction end of the sample stage 604, respectively.
5Y and the laser interferometers 606X and 606Y fixed to the base 602 so as to face each other. Then, a main controller (not shown) controls the movement of the sample table 604 to a desired position on the base 602 based on the measurement result.

The laser interferometers 606X and 606Y are
Each of the linear motors driven in each axis direction has the function of the position sensor 241 in the first to third embodiments. Outputs from the interferometers 606X and 606Y are used for on / off switching control of each of the switches S01 to S30 via a switch switching control unit 240 shown in FIG.

The X stage 60 of the stage device 600
Both the 0X and Y stages 600Y have many coils 11
Linear motors 100, 100, 6 using a stator 110 in which 1, 111..., 112, 112.
20 and 620, the base portion 602 is driven in the X and Y directions, respectively. Here, the stators 110, 110 of the two linear motors 100, 100 are both fixed on mounting portions 116, 116 on the base 602, and the movers 120, 120 are respectively fixed via fixing plates 607, 607. Fixed to X stage 600X.

Further, the stators 621 and 621 of the linear motors 620 and 620 are both fixed to the X stage 600X, and the movers 622 and 622 (only one is shown) are fixed to the Y stage 600Y. Each stator 110, 1
10, 621 and 621 are cooled by a fluid for temperature adjustment flowing in a flow path inside thereof, and the temperature of this fluid is adjusted by a temperature controller 631. The stator 11
0,110,621,621 and the temperature controller 631
They are connected by a discharge pipe 632, a pipe 633, and the like.

The stage device 600 is provided with an air guide 640 and a static pressure gas bearing (not shown).
The air blowing port 641 and the air suction port 642 constitute a static pressure air bearing type stage. (Fifth Embodiment) Next, a fifth embodiment of the present invention will be described with reference to FIG.

The fifth embodiment is different from the first to the fifth embodiments.
The linear motor (10) obtained by the third embodiment
Reticle (mask) stage 7 of exposure apparatus 700
50 are used as driving means. In the fifth embodiment, the linear motor 100 according to the first embodiment is used.
(FIG. 1) is incorporated in reticle stage 750.

The exposure apparatus 700 is a so-called step-and-scan exposure type scanning exposure apparatus. As shown in FIG. 20, the exposure apparatus 700 includes an illumination system 710, a stage movable unit 751 for holding a reticle (photomask) R, a projection optical system PL, and a wafer (substrate) U in an XY plane. , A stage device 800 for driving in a two-dimensional direction of the X direction and the Y direction, and a main control device 720 for controlling these.

The illumination system 710 irradiates the exposure light emitted from the light source unit to a rectangular (or arc-shaped) illumination area IAR on the reticle R with uniform illuminance. In the reticle stage 750, the stage movable section 751 is moved on a reticle base (not shown) at a predetermined scanning speed along a guide rail (not shown).
A reticle R is fixed on the upper surface of the stage movable section 751, for example, by vacuum suction. Also, the stage movable part 7
An exposure light passage hole (not shown) is formed below the reticle R of 51.

The moving position of the stage movable portion 751 is
The stage control system 719 is detected by the reflecting mirror 715 and the reticle laser interferometer 716, and the main controller 720 based on the detected moving position of the stage movable section 751 is used.
The stage movable section 751 is driven in accordance with the instruction from. The projection optical system PL is a reduction optical system, and is disposed below the reticle stage 750, and the direction of its optical axis AX (coincident with the optical axis IX of the illumination optical system) is defined as the Z-axis direction.
Here, a refraction optical system including a plurality of lens elements arranged at predetermined intervals along the optical axis AX direction so as to have a telecentric optical arrangement is used. Therefore, the illumination area IA of the reticle R by the illumination system 710
When R is illuminated, a reduced image (partially inverted image) of the circuit pattern in the illumination area IAR of the reticle R is formed in the exposure area IA conjugate to the illumination area IAR on the wafer W.

The stage device 800 drives the table 818 in a two-dimensional direction in the XY plane by using a plane motor 870 using a coil as an armature as a driving means. That is, the stage device 800 includes the base unit 8
21, a table 818 that floats above the upper surface of the base portion 821 through a clearance of about several μm,
A flat motor 870 for moving the table 818 is provided. Here, the table 818 stores the values of
A wafer (substrate) W is fixed on the upper surface by, for example, vacuum suction.

A moving mirror 827 is fixed to the table 818, and a laser beam is emitted from the wafer interferometer 831 to detect the moving position of the table 818 in the XY plane. . Information on the movement position obtained at this time is sent to main controller 720 via stage control system 719. Then, the stage control system 719
In accordance with an instruction from main controller 720 based on this information, planar motor 870 is operated and table 818 is set to X
-Move to a desired position in the Y plane.

The table 818 is supported on the upper surface of a mover (not shown) constituting the plane motor 870 at three different points by a support mechanism (not shown). The table 818 is moved in the X and Y directions by the plane motor 870. Not only can it be driven, but also it can be tilted with respect to the XY plane or driven in the Z-axis direction (upward). Note that the planar motor 870 has a known configuration, and other descriptions of the planar motor 870 are omitted.

In the figure, reference numeral 821 denotes a base portion,
A fluid for preventing a temperature rise due to heat generated from the inside thereof is supplied to a supply pipe 792, a discharge pipe 793, and a temperature control device 779.
It is circulated by the action of. In exposure apparatus 700 including reticle stage 750 having such a configuration, exposure processing is generally performed in the following procedure.

First, reticle R and wafer W are loaded, and then reticle alignment, baseline measurement, alignment measurement, and the like are performed. After the completion of the alignment measurement, an exposure operation of a step-and-scan method is performed. In the exposure operation, main controller 720 issues a command to stage control system 719 based on position information of reticle R by reticle interferometer 716 and position information of wafer W by wafer interferometer 831, and controls linear motor 100 of reticle stage 750. , 100 and the plane motor 870, the reticle R and the wafer 9 are moved synchronously, thereby performing a desired scanning exposure.

The reticle interferometer 716 has first to third
1 has the function of the position sensor 241 in the embodiment, and the output from the reticle interferometer 716 is
3 is used for on / off switching control of each of the switches S01 to S30 via a switch switching control unit 240 shown in FIG. In this way, when the transfer of the reticle pattern to one shot area is completed, the table 818 becomes 1
Stepping is performed by the shot area, and scanning exposure is performed on the next shot area. This stepping and scanning exposure are sequentially repeated, and the required number of shot patterns are transferred onto the wafer 9.

Here, in reticle stage 750, stators 11 of linear motors 100, 100
.. Constituting the coils 0, 110 are appropriately supplied with three-phase currents, and the amount of movement is controlled. Reticle stage 750 of exposure apparatus 700 has a large propulsive force and does not consume extra power. Note that the stage device 6 according to the fourth and fifth embodiments of the present invention.
Manufacturing of a semiconductor device using the exposure apparatus 700 or the exposure apparatus 700 is generally performed according to the procedure shown in FIGS.

That is, for a semiconductor device, a step of designing the function and performance of the device, a step of manufacturing a reticle based on this design step, a step of manufacturing a wafer from a silicon material, and a reticle by the exposure apparatus of the above-described embodiment. Is manufactured through a step of transferring the above pattern to a wafer, a device assembling step (including a dicing step, a bonding step, and a package step), an inspection step, and the like.

Hereinafter, the device manufacturing method will be described in more detail. FIG. 21 shows a flowchart of an example of manufacturing a device (a semiconductor chip such as an IC or LSI, a liquid crystal panel, a CCD, a thin-film magnetic head, a micromachine, etc.). As shown in this figure, first, in step 1001 (design step), a function / performance design of a device (for example, a circuit design of a semiconductor device) is performed, and a pattern design for realizing the function is performed.
Subsequently, in step 1002 (mask manufacturing step), a mask (reticle) on which the designed circuit pattern is formed is manufactured. On the other hand, in step 1003 (wafer manufacturing step), a wafer is manufactured using a material such as silicon.

Next, in step 1004 (wafer processing step), steps 1001 to 1003
Using the mask (reticle) and the wafer prepared in the above, an actual circuit or the like is formed on the wafer by lithography technology or the like as described later. Next, step 1005
In (Tevaise assembly step), step 1004
Is assembled by using the wafer processed in the above step. Step 1005 includes processes such as a dicing process, a bonding process, and a packaging process (chip encapsulation) as necessary.

Finally, in step 1006 (inspection step), inspections such as an operation confirmation test and a durability test of the device manufactured in step 1005 are performed. After these steps, the device is completed and shipped.

FIG. 22 shows a detailed flow example of step 1004 in the case of a semiconductor device. In FIG. 22, in step 1011 (oxidation step), the surface of the wafer is oxidized. Step 1
In 012 (CVD step), an oxide insulating film is formed on the wafer surface. In step 1013 (electrode forming step), electrodes are formed on the wafer by vapor deposition. In step 1014 (ion implantation step), ions are implanted into the wafer.

The above steps 1011 to 101
Each of the components 4 constitutes a pre-processing step in each stage of the wafer processing, and is selected and executed according to a necessary process in each stage. In each stage of the wafer process, when the above-described pre-processing step is completed, the post-processing step is executed as follows. In this post-processing step, first, in step 1015 (resist forming step), a photosensitive agent is applied to the wafer. Subsequently, in step 1016 (exposure step), the circuit pattern of the mask is transferred onto the wafer by using the above-described exposure apparatus. Next, in step 1017 (development step), the exposed wafer is developed, and in step 1018 (etching step)
In, the exposed member other than the portion where the resist remains is removed by etching. Then, in step 1019 (resist removing step), unnecessary resist after etching is removed.

By repeating these pre-processing and post-processing steps, multiple circuit patterns are formed on the wafer. In addition, the linear motors 100 and 35 of the present invention
Reference numerals 0 and 450 denote scanning-type exposure apparatuses other than the exposure apparatuses described in the embodiment, which expose the pattern of the mask by synchronously moving the mask and the substrate (for example, US Pat. No. 5,473,473).
No. 410).

In the apparatus to which the linear motor of the present invention is applied, the mask pattern is exposed while the mask and the substrate are stationary, and the substrate is sequentially moved step by step.
The present invention can also be applied to an AND repeat type exposure apparatus. The apparatus to which the linear motor of the present invention is applied can also be applied to a proxy midi exposure apparatus that exposes a mask pattern by bringing a mask and a substrate into close contact without using a projection optical system.

The exposure apparatus to which the linear motor of the present invention is applied is not limited to an exposure apparatus for manufacturing semiconductors. For example, an exposure apparatus for a liquid crystal for exposing a liquid crystal display element pattern to a square glass plate. The present invention can be widely applied to an apparatus and an exposure apparatus for manufacturing a thin-film magnetic head. The light source of the exposure apparatus according to the fifth embodiment includes g-line (436 nm), i-line (365 nm), KrF excimer laser (248 nm), and ArF excimer laser (193).
nm) and F2 laser (157 nm), as well as charged particle beams such as X-rays and electron beams. For example, when an electron beam is used, thermionic emission type lanthanum hexafluoride (LaB6) or tantalum (Ta) can be used as an electron gun. Further, when an electron beam is used, a structure using a mask may be used, or a pattern may be formed directly on a substrate without using a mask.

In this case, when far-ultraviolet light such as excimer laser is used as the projection optical system, a material that transmits far-ultraviolet light such as quartz or fluorite is used as a glass material, and when F2 laser or X-ray is used, reflection is used. An optical system of a refraction system or a refraction system (a reticle of a reflection type is used). When an electron beam is used, an electron optical system including an electron lens and a deflector may be used as the optical system. In addition,
It goes without saying that the optical path through which the electron beam passes is in a vacuum state.

The magnification of the projection optical system of the exposure apparatus to which the linear motor of the present invention is applied as a driving means may be not only a reduction system but also an equal magnification and an enlargement system. When the linear motor of the present invention is used for a wafer stage or a reticle stage, either an air levitation type using an air bearing or a magnetic levitation type using Lorentz force or reactance force may be used.

The stage to which the linear motor of the present invention is applied is not limited to a type that moves along a guide, but may be a guideless type that does not require a guide. The reaction force generated by the movement of the wafer stage may be mechanically released to the floor (ground) by using a frame member by using the invention proposed in Japanese Patent Application Laid-Open No. 8-166475. It may be.

Regarding the reaction force generated by the movement of the reticle stage, utilizing the invention proposed in Japanese Patent Application Laid-Open No. 8-330224, a frame member is used to mechanically move the floor side (ground). You may make it escape to.
The exposure apparatus to which the linear motor according to the present invention described above is applied is designed to maintain various mechanical subsystems including the respective constituent elements recited in the claims with predetermined mechanical accuracy, electrical accuracy, and optical accuracy. And manufactured by assembling.

In order to ensure these various precisions, before and after this assembly, adjustments to achieve optical precision for various optical systems, adjustments to achieve mechanical precision for various mechanical systems, various Adjustments are made to the electrical system to achieve electrical accuracy. In addition, the process of assembling the exposure apparatus from the various subsystems includes mechanical connection, wiring connection of an electric circuit, and piping connection of a pneumatic circuit between the various subsystems.

It goes without saying that there is an assembling process for each subsystem before the assembling process from these various subsystems to the exposure apparatus. When the process of assembling the various subsystems into the exposure apparatus is completed, comprehensive adjustment is performed, and various precisions of the entire exposure apparatus are secured. It is desirable that the manufacture of the exposure apparatus be performed in a clean room in which the temperature, cleanliness, and the like are controlled.

[0105]

According to the first aspect of the present invention described above,
A linear motor device, a stator in which a coil unit having a plurality of coils is arranged, a mover in which a magnet unit having a plurality of magnets is arranged, a current control unit that supplies current to the plurality of coils, Since there are provided a plurality of switches provided between the current control unit and the coil, and switch control means for controlling the plurality of switches according to the position of the mover, the switch is not involved in the movement of the mover. With respect to the coil, the current can be cut off, the power consumption thereof can be suppressed, unnecessary heat generation can be prevented, and the motor constant can be improved.

According to the second aspect of the present invention, the switch connected to the coil is turned on / off in accordance with the number of magnetic poles of the magnet unit disposed on the mover side.
A current can be selectively passed to the coil that generates the propulsion force between the magnet on the mover side and the coil, and the power consumption of the linear motor device can be suppressed, and the motor constant can be improved.

According to a third aspect of the present invention, the switch control means according to the second aspect supplies a current to at least one of the plurality of coils facing the magnet unit. Since the plurality of switches are controlled as described above, it is possible to generate a propulsive force with the magnet on the mover side by supplying a minimum necessary current to the coil. As a result, power consumption can be suppressed, and unnecessary heat generation can be prevented, and the motor constant can be improved.

According to the fourth and fifth aspects of the present invention, the linear motor device comprises a stator on which a coil unit having a plurality of coils is disposed, and a movable unit on which a magnet unit having a plurality of magnets is disposed. The plurality of coils are divided into at least two coil groups, two or more phase currents are supplied and driven in accordance with each coil group, and the number of coils facing the magnet unit is controlled. However, in a linear motor device that changes according to the position of the mover for each coil group, the switch control means sets a minimum value of the changing number of coils to 1 for a plurality of coils belonging to each coil group. And controls a plurality of switches provided between the current control unit and the coil so that current is supplied to the number of coils. For the coil group having the minimum number of coils, the switch is set so that current is supplied to the opposing coil and one coil adjacent thereto. Since the on / off control is performed, power is supplied to the coils that generate the propulsive force with the magnets, and the number of coils to be supplied is necessary and sufficient in each coil group. be able to. As a result, the motor constant is improved.

According to the sixth and seventh aspects of the present invention, there are provided a stator in which a coil unit having a plurality of coils is arranged, and a movable element in which a magnet unit having a plurality of magnets is arranged. The plurality of coils are divided into at least two coil groups, currents of two or more phases are supplied and driven according to each coil group, and the number of coils facing the magnet unit is reduced by each coil group. In the linear motor device, which changes in accordance with the position of the mover every time, the switch control means adds, to a plurality of coils belonging to each coil group, a value obtained by adding 2 to the minimum value of the number of changing coils. Controlling a plurality of switches provided between the current control unit and the coil so that current is supplied to the coil,
Furthermore, the number of coils facing the magnet unit is
For the coil group having the minimum value, the switch is turned on / off so that current is supplied to the opposing coil and two coils adjacent thereto. Therefore, current is supplied to the coils that generate the propulsive force with the magnet, and the number of coils to be supplied can be made necessary and sufficient in each coil group. Thereby, the motor constant is improved.

According to an eighth aspect of the present invention, in the linear motor device according to any one of the first to seventh aspects, the switch comprises two or more coils connected in parallel or in series with each other. It is arranged between the current controller and the current control unit, so that two or more coils are energized / cut off by one switch. Therefore, an input side for flowing current to a plurality of coils in the stator is provided. Wiring can be reduced. This improves the watertightness of the housing and increases the cooling efficiency of the linear motor device.

According to the ninth aspect of the present invention, since the coil located in a predetermined area of the stator of the linear motor device is always electrically connected to the current control unit, the coil is drawn out of the housing. The number of wirings to be used can be reduced, the watertightness of the housing is improved, and the cooling efficiency of the linear motor device is improved. According to the tenth aspect of the present invention, since the linear motor device according to any one of the first to ninth aspects is used as a drive unit of the stage, the motor constant of the linear motor device is increased. The overall function of the stage is enhanced.

According to the eleventh aspect of the present invention, the exposure apparatus for forming a predetermined pattern on a substrate using the optical system for exposure is provided with the stage device according to the tenth aspect.
Because the motor constant of the linear motor device is increasing,
The overall function of the exposure apparatus is enhanced. Claim 1
According to the second aspect, a device on which a predetermined pattern is formed can be manufactured by using the exposure apparatus according to claim 11, so that an efficient device can be manufactured because the motor constant of the linear motor device is increased. Will be possible.

According to the thirteenth aspect of the present invention, there is provided a method for driving a linear motor having a stator in which a coil unit having a plurality of coils is arranged and a movable element in which a magnet unit having a plurality of magnets is arranged. In the above, for the plurality of coils, a coil for supplying a current according to the position of the mover is selected, so that consumption of extra power and heat generation can be suppressed, and the motor constant of the linear motor is reduced. Increase.

According to the fourteenth aspect of the present invention, the first aspect is provided.
Since the linear motor as the driving device of the stage device is driven by using the driving method of the linear motor described in 3, the stage device as a whole is enhanced in function as the motor constant of the linear motor increases. According to a fifteenth aspect of the present invention, in the exposure method for forming a predetermined pattern on a substrate mounted on the stage device, the driving of the stage device according to the fourteenth aspect, when the stage device is driven. Since the method is used, the function of the driven exposure apparatus is enhanced as a whole as the motor constant of the linear motor increases.

Further, according to the invention of claim 16, according to claim 1,
Since the device on which the predetermined pattern is formed is manufactured by using the exposure method described in 5, the device can be manufactured more efficiently by increasing the motor constant of the linear motor in manufacturing the device. .

[Brief description of the drawings]

FIG. 1 shows a linear motor 10 according to a first embodiment of the present invention.
0 is a side view.

FIG. 2 is a plan view in which a part of a mover 120 of the linear motor 100 is cut away.

FIG. 3 is a view showing a longitudinal section of a stator 110 and a mover 120 of the linear motor 100.

FIG. 4 is a view showing a linear motor 10 taken along a line IV-IV in FIG. 2;
0 is a longitudinal sectional view.

FIG. 5 is an explanatory diagram showing shapes of coils 111, 111... In a first row and coils 112, 112.

FIG. 6 is an explanatory diagram showing a state in which coils 111, 111... Of a first row and coils 112, 112.

FIG. 7 shows a first row of coils 111, 111, a second row of coils 112, 112, and permanent magnets 123, 123,.
It is explanatory drawing which shows the positional relationship with 124,124 ....

FIG. 8 is an explanatory diagram illustrating the operation principle of the linear motor 100.

FIG. 9 is a graph showing waveforms of currents Iu, Iv, and Iw.

FIG. 10 is an explanatory diagram showing a state in which a coil opposed to the magnet unit 120A changes as the magnet unit 120A moves.

FIG. 11 is an explanatory diagram showing a positional relationship between a coil to be energized by the first method and a magnet unit 120A.

FIG. 12 is an explanatory diagram showing a positional relationship between a coil to be energized by a second method and a magnet unit 120A.

FIG. 13 is a circuit diagram showing a linear motor 100 and a control unit 200 for controlling the operation of the linear motor.

FIG. 14 is a flowchart showing an energization / interruption control program.

FIG. 15 is a circuit diagram illustrating a linear motor according to a second embodiment and a control unit that controls the operation of the linear motor.

FIG. 16 is a circuit diagram illustrating a linear motor 450 according to a third embodiment and a control unit 400 that controls the operation thereof.

FIG. 17 is an explanatory diagram showing a linear motor 500 including a magnet unit having nine magnetic poles.

FIG. 18 is an explanatory diagram showing a linear motor 550 having a magnet unit having 12 magnetic poles.

FIG. 19 is a perspective view showing a stage device 600 to which the linear motor 100 is applied.

FIG. 20 shows a linear motor 10 mounted on a reticle stage 750.
FIG. 6 is a diagram illustrating an overall configuration of an exposure apparatus 700 in which 0 is used.

FIG. 21 is a diagram showing a semiconductor device manufacturing process using the exposure apparatus according to the present invention.

FIG. 22 is a diagram showing a more specific manufacturing process of a semiconductor device using the exposure apparatus according to the present invention.

[Explanation of symbols]

100, 350, 450 Linear motor 110, 360, 460 Stator 111, 112 Coil 113 Housing 120 Mover 120A Magnet unit 123, 124 Permanent magnet 200, 300, 400 Control unit 210, 310, 410 Current value control unit (current control Parts) 230, 330, 430 Switch switching control part (switch control means) 700 Stage device 800 Exposure device 850 Reticle stage

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01L 21/30 515G (72) Inventor Yutaka Yuda 3-2-3 Marunouchi, Chiyoda-ku, Tokyo Nikon Corporation F term (reference) 5F046 CC01 CC16 CC18 5H540 AA10 BA03 BA05 BB02 BB05 BB09 EE05 FA04 FA14 5H641 BB06 BB19 GG02 GG05 GG07 GG11 GG12 GG15 GG24 GG26 GG29 HH03 HH05 HH06 HH13 JB05

Claims (16)

[Claims] A stator in which a coil unit having a plurality of coils is arranged; a mover in which a magnet unit having a plurality of magnets is arranged; a current control unit for supplying a current to the plurality of coils; A linear motor device comprising: a plurality of switches provided between a current control unit and the coil; and switch control means for controlling the plurality of switches according to the position of the mover. 2. The linear motor device according to claim 1, wherein the switch control means turns on a number of switches corresponding to the number of magnetic poles of the magnet unit. 3. The linear motor device according to claim 2, wherein the switch control means is configured to supply the current to at least one of the coils facing the magnet unit among the plurality of coils. A linear motor device which controls a plurality of switches. 4. A stator having a coil unit having a plurality of coils arranged thereon and a mover having a magnet unit having a plurality of magnets arranged therein, wherein the plurality of coils are divided into at least two coil groups. The current is supplied and driven in two or more phases according to each coil group, and the number of coils facing the magnet unit changes in accordance with the position of the mover for each coil group. A motor device, comprising: a current control unit that supplies current to the plurality of coils; a plurality of switches provided between the current control unit and the coil; and the plurality of switches according to a position of the mover. Switch control means for controlling a switch, wherein the switch control means is configured such that, for a plurality of coils belonging to each coil group, the number of coils obtained by adding 1 to a minimum value of the number of changing coils Linear motor device and a current to control said plurality of switches so as to supply. 5. The linear motor device according to claim 4, wherein the switch control unit determines that the number of coils facing the magnet unit has the minimum value. A linear motor device, wherein the switch is turned on / off so that current is supplied to the opposed coil and one coil adjacent thereto. 6. A stator having a coil unit having a plurality of coils disposed thereon and a mover having a magnet unit having a plurality of magnets disposed therein, wherein the plurality of coils are divided into at least two coil groups. The current is supplied and driven in two or more phases according to each coil group, and the number of coils facing the magnet unit changes in accordance with the position of the mover for each coil group. A motor device, comprising: a current control unit that supplies current to the plurality of coils; a plurality of switches provided between the current control unit and the coil; and the plurality of switches according to a position of the mover. Switch control means for controlling a switch, wherein the switch control means includes, for a plurality of coils belonging to each coil group, a number of coils obtained by adding 2 to a minimum value of the number of coils that change. Linear motor device and a current to control said plurality of switches so as to supply. 7. The linear motor device according to claim 6, wherein the switch control means is configured such that, for a coil group in which the number of coils facing the magnet unit is the minimum value, A linear motor device, wherein the switch is turned on / off so that current is supplied to the opposed coil and two coils adjacent to the coil. 8. The linear motor device according to claim 1, wherein the switch is disposed between two or more coils connected in parallel or in series with each other and the current control unit. Accordingly, a linear motor device wherein two or more coils are energized / disconnected by one switch. 9. The linear motor device according to claim 1, wherein, among the plurality of coils, a coil located in a predetermined area of a stator is always provided to the current control unit. A linear motor device which is electrically connected. 10. A stage device, wherein the linear motor device according to claim 1 is used as driving means for a stage unit. 11. An exposure apparatus for forming a predetermined pattern on a substrate by using an optical system for exposure, comprising: the stage device according to claim 10. 12. A device on which a predetermined pattern is formed, wherein the device is manufactured by using the exposure apparatus according to claim 11. 13. A method for driving a linear motor, comprising: a stator in which a coil unit having a plurality of coils is disposed; and a mover in which a magnet unit having a plurality of magnets is disposed. And a coil for supplying a current according to the position of the mover. 14. A method of driving a stage device having a linear motor as driving means, wherein the linear motor is driven using the method of driving a linear motor according to claim 13. 15. An exposure method for forming a predetermined pattern on a substrate mounted on a stage device, wherein the stage device is driven by using the driving method of the stage device according to claim 14. Exposure method. 16. A method for manufacturing a device on which a predetermined pattern is formed, wherein the exposure method according to claim 15 is used.