JP2001105368A - Suction device and suction method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a suction device capable of certainly sucking and holding a thin film sheet in a stable attitude. SOLUTION: This suction device has a large number of small holes 20e or slit holes 20s; a nearly flat suction part 15 sucking and releasing a film 1; and a fluid part 100 sucking the film 1 onto the suction part 15 or releasing the film 1 from the suction part 15 by sucking or blowing air from a central part to a peripheral part formed with the small holes 21e or the slit holes 20s in sequence.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a suction device and a suction method for sucking and conveying a thin film sheet.

[0002]

2. Description of the Related Art A conventional suction device is disclosed in Japanese Patent Laid-Open No. 7-17869.
This will be described with reference to Japanese Patent Publication No. According to this publication, a suction device (suction pad) is provided with a suction hole for sucking a plurality of small holes, a slit suction hole for sucking a slit hole provided in a ring shape around the small holes, and the suction hole communication. A first vacuum reservoir and a second vacuum reservoir which communicates with the slit suction hole and has a smaller volume than the first vacuum reservoir, and is provided on the periphery and is formed one step higher than the inner periphery. And a lip portion made of rubber or the like. The suction device sucks a sheet to be sucked such as a film through a small hole and a slit hole, and a time difference or a pressure difference between the first and second vacuum reservoirs. A technique of adsorbing and releasing a film or the like by releasing the other inside is disclosed. According to this technique, the first and second vacuum reservoirs are provided to increase the pressure reduction capacity to ensure film adsorption.

[0003]

However, the suction device constructed as described above uses the first and second vacuum reservoirs to simultaneously suction through a suction hole and a slit suction hole to suck a film or the like. First, the second air reservoir having a small capacity is filled with air, and then the first vacuum reservoir having a large capacity is filled with air. Therefore, the film is first sucked by the slit suction hole in the peripheral portion, and then the film is sucked from the small hole in the central portion, so that the film is sequentially sucked from the periphery to the central portion of the film, and the film is easily wrinkled. Become. Furthermore, since the suction device fills the vacuum reservoir with air and sucks the film after the air pressure in the vacuum reservoir becomes lower than the atmospheric pressure, the suction is delayed only for the time until the air pressure decreases. was there.

In addition, in the suction device, since the rib portion is formed higher than the suction portion, the film is suctioned so as to make a wave. Therefore, there is a problem that it is not suitable for applications such as laminating parallel films.

An object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to provide a suction apparatus and a suction method capable of surely holding a thin film sheet in a stable posture by suction.

[0006]

According to a first aspect of the present invention, there is provided a suction device comprising: a plurality of small holes formed from a central portion to a peripheral portion;
With a slit hole, a substantially flat suction portion for sucking and releasing the sheet to be sucked, and by sucking or blowing air in order from the central portion where the small holes or the slit holes are provided to the peripheral portion. Suction blow means for sucking or releasing the sheet to be sucked to or from the suction section.

In the suction device according to a second aspect of the present invention, the suction blow-off means includes a first suction means for sucking the air in the central portion, and a second suction means for sucking the air in the peripheral portion of the central portion. And pressure control means for detecting that the suction pressure of the first suction means reaches a predetermined value, and control means for operating the second suction means by the operation of the pressure detection means. It is characterized by the following.

[0008] In the suction unit of the suction device according to the third invention,
It comprises a movable part that can move in the vertical direction, and a fixed part that does not move. The small hole or the slit hole is formed in the movable part and the fixed part, and the movable part moves up or down. Control means for sucking air only from the small holes or slit holes of the movable portion or the fixed portion.

According to a fourth aspect of the present invention, there is provided a suction method comprising a plurality of small holes or slit holes formed from a central portion to a peripheral portion, and a substantially flat suction portion for sucking and releasing a sheet to be sucked. The air is sucked or blown out in order from the central portion where the small holes or the slit holes are provided to the peripheral portion to suck or release the sheet to be sucked to the sucking portion.

A suction method according to a fifth aspect of the present invention is characterized in that the suction method includes a suction portion having a large number of small holes or slit holes formed from a central portion to a peripheral portion, wherein the small hole or the slit hole is provided. After sucking air from the central portion to the peripheral portion and sucking the sheet to be sucked into the suction portion, air is blown out from the central portion provided with the small holes or the slit holes to the peripheral portion in order. The suctioned sheet is released from the suction section.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 An embodiment of the present invention will be described with reference to FIGS. 1 is a perspective view and a control block diagram of a suction device according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of the suction device of FIG. 1, and FIG. 3 is a side view of a suction portion and a film of the suction device. (a) shows a state in which the film shifts to suction, and (b) shows a state in which the film shifts to release. 1 and 2, a suction device 10 includes a suction unit 15 for sucking and releasing, for example, a film 1 as a sheet to be sucked, and a fluid unit as suction blow means for controlling air sucked and blown from the suction unit 15. The suction portion 15 has a square front surface plate 20 having a flat surface and a square concave portion 40d which is superposed on the front surface plate 20 and is thicker than the front surface plate 20. And a back plate 40.

The front side plate 20 has a number of perforated small holes 20e for sucking and blowing air, and a rectangular ring-shaped slit hole 20s having the same width as the small holes 20e in the periphery for the same purpose. Are formed in the concave portion 40d of the back plate 40, and three types of small, medium, and large rectangular rings 52, 54, and 56 made of silicone rubber for preventing air leakage are fixed. Three rectangular gaps 52d and rectangular ring-shaped gaps 54d and 56d are formed between the front plate 20 and the back plate 40.

A central suction portion 60 as a first suction portion is formed by the small hole 20e for sucking and blowing air from the gap 52d, and the second suction hole 60e for sucking and blowing air from the gap 54d. A ring suction part 70 is formed as a suction part for sucking air from the gap 56d.
A slit suction unit 80 as a third suction unit is formed by a slit hole 20s having substantially the same width as the small hole 20e to blow out.
Are formed. Central suction unit 60, ring suction unit 7
The respective channels of the slit suction unit 80 are connected to joints 63, 73, 83 provided on the side surface of the back plate 40.

The fluid section 100 includes a control section 103, and pipes 65, 75, 85 are connected to the joints 63, 73, 83, respectively.
Detector A with built-in semiconductor pressure sensor connected to
67, a suction blower generator A69, a suction blower generator B79, and a suction blower that incorporate a vacuum generator and a high pressure generator that generates a pressure higher than the atmospheric pressure via a pressure detector B77 and a pressure detector C87. It is connected to section C79. The control unit 103 includes a well-known CPU, ROM, RAM, and the like. The start switch 105 is connected to the input, and suction is performed by detecting pressure detection values of the pressure detection units A67, B77, and C87. The blower generator A69, the suction blower generator B79, and the suction blower generator C89 are configured to be controlled.

The suction operation of the suction device 10 configured as described above will be described with reference to FIGS. 1 to 3A. The surface of the suction unit 15 is approached to the rectangular film 1 slightly smaller than the suction unit 15 of the suction device 1, and the start switch 1
05, the control unit 103 controls the suction blow generation unit A
Air is sucked from the small hole 20e of the central suction part 60 through the joint 63 through the pipe 65 from the pipe 69 to the film 1 as shown by the dashed line 1a in FIG. Is sucked at the center. The suction eliminates the gap between the surface of the suction unit 15 and the center of the film 1, and the pressure detection unit A67 detects a pressure lower than the atmospheric pressure (hereinafter referred to as negative pressure). The part B79 is caused to perform a suction operation, and air is sucked from the small hole 20e of the ring suction part 70 through the joint 73 through the pipe 75 from the suction blow-out generating part B79, and the portion of the film 1 facing the ring suction part 70 is shown in FIG.
As shown by a dotted line 1b in FIG. Note that when the suction blow generating unit B79 performs the suction operation, the suction blow generating unit A69 also performs the suction operation.

The ring suction unit 70 is formed by suction of the film 1.
The gap between the film surface and the film 1 disappears, and the pressure detecting section B
77 detects the negative pressure, so that the suction blowout generating section C8
9 is operated, and the pipe 85
The air is sucked from the slit hole 20s of the slit suction unit 80 through the joint 83 through the joint 83, and the contact portion of the film 1 with the slit suction unit 80 is sucked into the plate 20 to suck the entire film 1. Note that when the suction blow generating unit C89 performs the suction operation, the suction blow generating unit A69 and the suction blow generating unit B79 also perform the suction operation.

Next, the blowing operation of the suction device 100 will be described with reference to FIGS. 1 to 3B. As shown in FIG. 3B, the suction section 15 is oriented horizontally downward, and the film 1 is sucked by the entire suction section 15, that is, the suction blowout generating sections A, B, C69, 79, 89 In the state in which the suction is performed, the control unit 103 controls the suction blowout generation unit A6.
9 through the joint 63 through the pipe 65
Air is blown out from the small holes 20e of the suction unit 15 to release the film 1 from the central part of the suction unit 15 as shown by a dashed line 1e in FIG.

When the film 1 is blown out, a gap is generated between the surface of the central portion of the suction section 15 and the film 1, and the pressure detecting section A6
7 detects a pressure higher than the atmospheric pressure (hereinafter, referred to as a positive pressure), and the control unit 103 causes the suction blow generation unit B79 to detect the pressure.
Is operated, and the small hole 20e of the ring suction unit 70 is passed through the joint 73 through the pipe 75 from the suction blow-out generating unit B79.
Then, air is blown out from the device to release the suction part between the ring suction part 70 and the film 1 as shown by a dashed line 1f in FIG. Note that when the suction blow generating unit B79 is performing the blowing operation, the suction blow generating unit A69 is also performing the blowing operation.

The ring suction unit 7 of the suction unit 15 is released by the release.
When the gap between 0 and the film 1 is generated, the pressure detecting unit B77 detects a positive pressure, and the control unit 103 causes the suction blowing generating unit C89 to perform a blowing operation, and the suction blowing generating unit C8.
9, air is blown out from the slit hole 20 s of the slit suction unit 80 through the joint 83 through the pipe 85, and the contact portion of the film 1 with the slit suction unit 80 is moved to the front plate 2.
The film 1 is blown to zero to release the entire film 1 and put on the table 150. It should be noted that when the suction blow generating unit C89 is performing the blowing operation, the suction blow generating unit A69 and the suction blow generating unit B79 are also performing the blowing operation.

As described above, the suction device 10 is used for the film 1
By adsorbing the peripheral portion in order from the center of the film and expanding the adsorption area in order, the film 1 is adsorbed while expanding wrinkles and the like in order from the central portion.
Air will not accumulate in the gaps between them. In addition, since the suction device 10 does not have a vacuum reservoir, the small holes 2 are formed by suction from the suction blowout generating units A, B, C69, 79, and 89.
0e, the delay time is short from the slit hole 20s, and the film 1 can be sucked. Furthermore, since the suction surface of the suction device 10 has no lip portion and is formed in a flat surface, the suction can be performed without making the film 1 uneven on the suction surface. Moreover, the film 1 can be placed on a table while being kept substantially flat by the suction device 10.

Embodiment 2 FIG. Another embodiment of the present invention will be described with reference to FIGS. FIG. 4 is a perspective view and a control block diagram of an adsorption device according to another embodiment of the present invention, and FIG. 5 is a cross-sectional view taken along a line VV in FIG. FIG.
5, the same reference numerals as those in FIGS. 1 and 2 denote the same or corresponding parts, and a description thereof will be omitted. 4 and 5,
The suction device 200 includes a suction unit 210 that suctions and releases, for example, the film 1 as a sheet to be suctioned,
The suction unit 210 includes a fixed unit 300 fixed to the surroundings, a sliding engagement with the fixed unit 300, and a bottom surface. Is connected to the rod 400 of the cylinder, and the movable part 22 which moves up and down
Consists of zero.

The movable portion 220 has a large number of perforated holes 220e for sucking air, and has a rectangular front surface plate 222 with a flat surface and a square rubber made of silicon rubber for preventing air leakage. It is composed of two types of small and large rings 252 and 254 and a back plate 242 which is opposed to the front plate 222 via the rings 252 and 254 and has a pair of horizontal projections 242x on both side surfaces. ing.

The movable portion 220 has a rectangular gap 252.
d, two square ring-shaped gaps 254d are formed. Then, the central suction part 260 as the first suction part is formed by the small hole 220e that sucks the air from the gap 252d.
Are formed, and the small holes 2 for sucking air from the gap 254d
20e, a ring suction unit 270 as a second suction unit
Are formed.

The fixing part 300 is a rectangular fixing plate 3.
01, a silicone rubber 350 consisting of a square ring,
A rectangular ring plate 303 having a ring-shaped slit hole 303s having substantially the same width as the small hole 220e is fixed to the surface side of the fixed plate 301 via 352. The fixed plate 301 has a rectangular concave portion 301d, and a pair of cutout portions 301x is provided on the side surface of the concave portion 301d, and the cutout portion 301x has a rear plate of the movable portion 220. The projection 242x of the rear plate 242 is formed so that the projection 242x of the rear plate 242 is inserted and the projection 242x of the rear plate 242 moves up and down in the notch 301x by the vertical movement of the movable part 220. Note that a slit suction unit as a third suction unit is formed by the slit hole 303s.

The operation of the suction device 200 configured as described above will be described with reference to FIGS. When the adhesive is applied to the central portion of the film 1 except for the peripheral portion, the rod 400 of the cylinder is lowered to lower the movable portion 220, and as shown in FIG.
A recess is formed in the substrate.

In this state, the start switch 1
When the switch 05 is turned on, the control unit 103 activates the suction blow generating unit C89, sucks air from the suction blow generating unit C89 through the joint 83 through the pipe 85 and the slits 303s (slit suction unit), and removes the film 1 from the film. Suction is applied to the surface of the ring plate 303. Therefore, the suction unit 20
0 can adsorb the film 1 without touching the adhesive applied to the film 1.

[0027]

According to the first or fourth aspect of the present invention, the suction sheet is supplied to the suction portion by suctioning or blowing air in order from the central portion provided with the small holes or the slit holes to the peripheral portion by the suction blowing means. Since the film or the like is sucked or released, the film or the like can be sucked while spreading wrinkles or the like in order from the center, so that air does not accumulate in the gap between the suction surface and the film or the like, and the film or the like is less likely to wrinkle.

According to the second aspect of the invention, in addition to the effects of the first aspect of the invention, there are provided a first suction means for sucking air in the central portion, and a second suction means for sucking air in the peripheral portion, Since a pressure detecting means for detecting that the suction pressure of the first suction means becomes a predetermined value and a control means for operating the second suction means by the operation of the pressure detecting means are provided, the central area of the film or the like is provided. After the suction of the film is confirmed, the peripheral portion of the film or the like is sucked, so that there is an effect that air does not accumulate in the gap between the suction surface and the film or the like.

According to the third aspect of the invention, in addition to the effects of the first aspect, a movable portion movable in the up-down direction is provided in the suction portion.
It consists of a fixed part that does not move, and a large number of small holes or slit holes are formed in the movable part and the fixed part,
Control means for sucking air only from the small holes or slit holes of the movable part or the fixed part by raising or lowering the movable part. And the like can be easily sucked.

According to the fifth aspect of the present invention, the small holes or slit holes are provided after the air is sucked from the central portion where the small holes or slit holes are provided to the peripheral portion to suck the sheet to be sucked into the suction portion. Air is blown out in order from the central portion to the peripheral portion to release the sheet to be sucked from the suction portion, so that when releasing a film or the like from the suction portion, the film or the like can be easily released without wrinkling from the suction surface. This has the effect.

[Brief description of the drawings]

FIG. 1 is a perspective view and a control block diagram of an adsorption device according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of the suction device of FIG.

3A and 3B are side views of a suction unit and a film of the suction device of FIG. 1, and FIG.
(B) shows a state in which the film shifts to release.

FIG. 4 is a perspective view and a control block diagram of a suction device according to another embodiment of the present invention.

FIG. 5 is a sectional view taken along the line VV in FIG. 4;

[Explanation of symbols]

1 Sheet to be sucked (film), 15, 210 Suction part, 20e, 220e small hole, 20s, 303s slit hole, 67, 77, 87 Pressure detecting part (pressure detecting means), 69 Suction blow generating part A (first) Inhalation means),
79 suction blow generating section B (second suction means), 100
Suction blowing means (fluid part), 103 control part (control means), 220 movable part, 300 fixed part.

Continued on the front page (72) Inventor Satoshi Sasamori 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Within Mitsubishi Electric Corporation (72) Inventor Norihiro Murata 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsubishi Electric (72) Inventor Yoshio Kasuga 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsui Electric Co., Ltd. (72) Inventor Kosuke Tominaga 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsubishi Electric Corporation (72) Inventor Masamitsu Okamura 2-3-2 Marunouchi, Chiyoda-ku, Tokyo, Japan Mitsui Electric Corporation (72) Inventor Kazuyuki Yamamoto 2-3-2, Marunouchi, Chiyoda-ku, Tokyo Mitsubishi Electric Corporation F term (reference) 3C007 DS01 FT11 FU00 FU04 GU03 NS09 NS11 3F061 AA01 CB05 CC00 CC13 DB00 DB04 DC03 3F343 FA09 FB01 JB03 JB15 JB16 JB17 JB19 JB24 JB25 MA03 MA09 MA40 MB03 MB09 MC13 MC21

Claims (5)

[Claims] A plurality of small holes or slit holes formed from a central portion to a peripheral portion, a substantially flat suction portion for sucking and releasing a sheet to be sucked, and the small holes or the slit holes. A suction blowout means for sucking or blowing air from the central portion to the peripheral portion to suck or release the sheet to be sucked to or from the suction portion. 2. The apparatus according to claim 1, wherein the suction blow-off means includes first suction means for sucking air in the central portion, and second suction means for sucking air in a peripheral portion of the central portion. 2. The apparatus according to claim 1, further comprising: pressure detection means for detecting that a suction pressure by the suction means reaches a predetermined value; and control means for operating the second suction means by the operation of the pressure detection means. 3. The adsorption device according to item 1. 3. The suction part comprises a movable part movable vertically and a fixed part which does not move. The small hole or the slit hole is formed in the movable part and the fixed part. And control means for sucking air only from the small hole or the slit hole of the movable portion or the fixed portion by raising or lowering the movable portion. 2. The adsorption device according to 1. 4. It has a large number of small holes or slit holes perforated from a central part to a peripheral part, and has a substantially flat suction part for sucking and releasing a sheet to be sucked. Suctioning or blowing air in order from the central portion provided with the peripheral portion to the peripheral portion to suck or release the sheet to be sucked to the suction portion. 5. A suction device having a plurality of small holes or slit holes drilled from a central portion to a peripheral portion, and in order from the central portion provided with the small holes or the slit holes to the peripheral portion. After suctioning the air to suck the sheet to be sucked into the suction section, the air is blown out in order from the central portion where the small holes or the slit holes are provided to the peripheral portion to suck the sheet to be sucked into the suction portion. A method of adsorbing, the method comprising: