JP2001102419A - Test burn-in device and method of control in test burn-in device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a test burn-in device which realizes a self diagnostic test in a low-temperature or high-temperature state and also enables a simpler self diagnostic test. SOLUTION: A diagnostic unit 21 is provided in a test control part 20 and is connected with driver/comparator circuits 26 through a connecting cable in a thermostat 10. Moreover, the cable 11 in the tank 10 is constituted of a heat-resistant material, is connected with the unit 21 via a diagnostic unit connecting connector 14 by a connector 12 for the unit 21 and is connected with the circuits 26 via burn-in board connecting connectors 15 by a connector 13 for a burn-in board.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test burn-in apparatus having a self-diagnosis function for diagnosing whether an electric signal required for a burn-in test is normally supplied to a burn-in board, and a control method in the test burn-in apparatus. About.

[0002]

2. Description of the Related Art Conventionally, in order to evaluate the reliability of a prototyped semiconductor device or to remove in advance, before shipment, a semiconductor device that has the possibility of initial failure from mass-produced semiconductor devices. In an inspection process, a test burn-in device that performs an electrical test while applying a temperature stress is used.

A conventional test burn-in apparatus includes a thermostatic chamber for supplying a temperature stress, a burn-in board as a board for mounting a large number of semiconductor devices to be tested, and an electric signal required for a burn-in test. It is composed of a test control section for controlling a burn-in test of the device. In general, the test burn-in device determines whether or not the timing level of the electric signal supplied from the test control unit to the burn-in board installed in the constant temperature chamber is generated as a reference,
That is, a self-diagnosis function is provided for determining whether or not a signal from the test control unit has normally reached the burn-in board.

FIG. 3 shows a conventional test burn-in device 30.
FIG. 2 is a block diagram showing a schematic configuration of a block 0. As shown in FIG. 3, the conventional test burn-in device 300 includes a constant temperature bath 31 and a test control unit 32. The temperature chamber 31 can normally set an environmental temperature of about −10 ° C. to + 150 ° C. In the temperature chamber 31, several tens of burn-in boards for the same specification can be simultaneously tested. A mounting slot (not shown) is provided. Each slot is provided with a burn-in board connection connector 34, and the diagnosis unit 33 is connected to the burn-in board connection connector 34.

[0005] The diagnostic unit 33 is constituted by, for example, a board in which an electric circuit for self-diagnosis is assembled on a board having the same outer shape as the burn-in board, and is detachable from a burn-in board connector 34. When performing a normal burn-in test, instead of this diagnostic unit 33,
A burn-in board (not shown) on which the semiconductor device under test is mounted is connected to the burn-in board connector 34 of each slot.

The test control unit 32 has a CPU (Central Pr
The control unit 35 includes an operating unit 35a, a signal generator 35b, and the same number of driver / comparator circuits 36 as the number of burn-in boards provided in the thermostat 31. The driver / comparator circuit 36 normally outputs a signal required for a burn-in test via a burn-in board connector 34 to a burn-in board on which a semiconductor device to be measured is mounted, for example, from a power supply 37 when performing a test. The test is performed by outputting various signals such as a power supply voltage, an ADD (address) signal, an IO (input / output) signal, and a CLK (clock) signal input from the signal generator 35b.

When performing a self-diagnosis test, as shown in FIG. 3, a diagnostic unit 33 is mounted in a slot of the thermostat 31 and is connected to a burn-in board connector 34 instead of a burn-in board. driver/
Various signals supplied from the comparator circuit 36 are input to the diagnostic unit 33. The diagnostic unit 33 determines whether or not the timing levels of the various signals input from the driver / comparator circuit 36 are generated according to a reference, and performs self-diagnosis of the test burn-in device 300.

[0008]

However, the temperature in the thermostat 31 is normally set to any temperature between -10 ° C. and + 150 ° C., and the test is performed. Since the electronic components and the like constituting the unit 33 cannot withstand a high-temperature environment, the self-diagnosis test using the diagnostic unit 33 is limited to only room temperature. For this reason, there has been a problem that a contact failure or an operation failure occurring at a low temperature or a high temperature cannot be detected by a self-diagnosis test.

In order to perform a self-diagnosis test by mounting the diagnostic unit 33 in each slot of the thermostat 31 and perform a self-diagnosis test of all the slots of the thermostat 31 at once, several tens Unit 33 is required, and
In order to perform a self-diagnosis test with one or a small number of diagnosis units 33, an operation for replacing the diagnosis unit 33 with each slot is required, and furthermore, the self-diagnosis test must be repeated and it takes time. there were.

It is an object of the present invention to provide a test burn-in device which realizes a self-diagnosis test in a low or high temperature state and enables a simpler self-diagnosis test, and a control method in the test burn-in device.

[0011]

According to the first aspect of the present invention,
For example, as shown in FIGS. 1 and 2, in a test burn-in apparatus (for example, test burn-in apparatuses 1 and 2) for supplying a signal to a burn-in board installed in a thermostat and performing a burn-in test, the burn-in test is performed. A plurality of signal generating means (for example, a signal generator 25 and a driver / comparator circuit 26) for generating necessary signals, and signals generated by the plurality of signal generating means are normally supplied to a burn-in board in a thermostat. A self-diagnosis unit (for example, a diagnosis unit 21) for diagnosing whether or not the self-diagnosis unit is connected to the self-diagnosis unit, and transmitting a signal generated by the signal generation unit to the self-diagnosis unit. Transmission means (for example, a connection cable 11 or a connection board 16), and the self-diagnosis means is provided outside the thermostat. Is, the transmission means is characterized in that provided inside the thermostatic chamber.

According to the first aspect of the present invention, in a test burn-in apparatus for performing a burn-in test by supplying a signal to a burn-in board installed in a constant temperature bath,
The plurality of signal generating means generate a signal necessary for a burn-in test, and the self-diagnosing means diagnoses whether or not the signal generated by the signal generating means is normally supplied to a burn-in board in a constant temperature bath. Transmitting means for connecting the self-diagnosis means and the signal generation means, transmitting a signal generated by the signal generation means to the self-diagnosis means, wherein the self-diagnosis means is provided outside the thermostat; The transmission means is provided inside the thermostat.

According to a fourth aspect of the present invention, there is provided a control method for controlling a processing procedure of a self-diagnosis test in a test burn-in apparatus for performing a burn-in test by supplying a signal to a burn-in board installed in a thermostat. FIG.
As shown in FIG. 2, a signal generating step (for example, a signal generator 25 and a driver / comparator circuit 26) for generating a signal necessary for a burn-in test, and a transmitting step for transmitting the signal generated in the signal generating step (E.g., the connection cable 11 or the connection board 16) and a self-diagnosis step (e.g., the diagnosis unit 21) for diagnosing whether a signal generated in the signal generation step and transmitted by the transmission step is normally supplied. The self-diagnosis step includes diagnosing whether or not a signal is normally supplied outside the thermostat, and the transmitting step transmits a signal inside the thermostat. I have.

According to the fourth aspect of the present invention, there is provided a control method for controlling a processing procedure of a self-diagnosis test in a test burn-in apparatus for performing a burn-in test by supplying a signal to a burn-in board installed in a constant temperature bath. In the signal generation step, a signal necessary for the burn-in test is generated, in the transmission step, the signal generated in the signal generation step is transmitted, and in the self-diagnosis step, the signal is generated by the signal generation step, and Diagnosing whether the transmitted signal is normally supplied or not, in the self-diagnosis step, outside the thermostat, diagnosing whether the signal is normally supplied or not, in the transmission step, the thermostat The signal is transmitted inside.

Therefore, the self-diagnosis function always operates at room temperature outside the thermostat, so that the self-diagnosis test can be performed even when the thermostat is in a low or high temperature state. A temperature-dependent failure or the like occurring only at a low temperature or a high temperature in the apparatus can be detected, and the reliability of the self-diagnosis test can be improved.

According to a second aspect of the present invention, in the test burn-in apparatus according to the first aspect, the transmission means has heat resistance.

According to the second aspect of the present invention, in the test burn-in apparatus according to the first aspect, since the transmission means has heat resistance, even when the temperature of the constant temperature bath is raised, a signal is transmitted within the constant temperature bath. The transmission can be performed reliably, and the reliability of the self-diagnosis test can be further improved.

The third aspect of the present invention is the first or second aspect.
In the test burn-in device described above, for example, as shown in FIG. 2, switching means for selecting a predetermined signal generating means from among the plurality of signal generating means and performing switching so as to connect to the self-diagnosis means (for example, , Switch 17), wherein the transmission means connects the signal generation means selected by the switching means to the self-diagnosis means, and transmits a signal generated by the connected signal generation means to the self-diagnosis means. It is characterized by transmission.

According to the third aspect of the present invention, in the test burn-in apparatus according to the first or second aspect, the switching means selects a predetermined signal generating means from among the plurality of signal generating means, and selects the self-generated signal. Switching is performed so as to connect to the diagnostic means. The transmitting means connects the signal generating means selected by the switching means to the self-diagnosing means, and outputs a signal generated by the connected signal generating means to the self-diagnosing means. Transmit to diagnostic means.

According to a fifth aspect of the present invention, in the control method of the test burn-in apparatus according to the fourth aspect, for example, as shown in FIG. Further comprising a switching step (for example, a switch 17) for performing switching so as to select and transmit the signal generated by the above, and wherein the transmitting step transmits the signal selected by the switching step. .

According to the fifth aspect of the present invention, in the control method of the test burn-in apparatus according to the fourth aspect, in the switching step, of the signals generated in the signal generating step, the signals are generated by predetermined signal generating means. The selected signal is switched so as to be transmitted, and in the transmitting step, the signal selected in the switching step is transmitted.

Therefore, the operator can sequentially execute the self-diagnosis test for each signal to be supplied to the burn-in board in the constant temperature bath simply by performing the connection switching operation, thereby reducing the burden on the operator. It becomes possible.

[0023]

Embodiments of the present invention will be described below in detail with reference to the drawings. (First Embodiment) FIG. 1 is a diagram showing a test burn-in device 1 according to a first embodiment of the present invention.

First, the configuration will be described. FIG. 1 is a block diagram illustrating a schematic configuration of a test burn-in device 1 according to the first embodiment. In FIG. 1, the test burn-in device 1 includes a constant temperature bath 10 and a test control unit 20. The thermostat 10 has a test control unit 2
0, and a plurality of burn-in board connectors 15 connected to the respective driver / comparator circuits 26 in the test control unit 20 are provided. The board connector 15 is connected to the diagnostic unit connector 14 via the connection cable 11.

The connection cable 11 is a heat-resistant cable 1
1a, the diagnostic unit connector 12 and the burn-in board connector 13 are connected. The diagnostic unit connector 12 is connected to the diagnostic unit connector 14 and the burn-in board connector 13 is connected.
Are connected to the burn-in board connector 15.

The test control unit 20 includes a diagnosis unit 21,
Control unit 23 and plural driver / comparator circuits 2
6. The diagnosis unit 21 includes a self-diagnosis circuit 22 including an electric circuit for self-diagnosis. The self-diagnosis unit 22 performs self-diagnosis based on various signals input through the diagnosis unit connector 14, and outputs a diagnosis result to the control unit 23. Is output to the CPU 24.

The control section 23 comprises a CPU 24 and a signal generator 25. The CPU 24 determines whether or not the test burn-in device 1 is operating normally according to the diagnosis result input from the self-diagnosis circuit 22. I do. Further, the CPU 24 outputs an instruction signal for generating various signals for the burn-in test to the signal generator 25.

The signal generation circuit 25 generates various signals for a burn-in test, for example, an ADD signal, an IO signal, a CLK signal, etc., according to an instruction signal input from the CPU 24, and outputs the signals to each driver / comparator circuit 26. . Here, the ADD signal is a signal for addressing one of the semiconductor devices under test mounted on the burn-in board when performing the burn-in test, and the IO signal is a signal under test. A test pattern signal exchanged with a semiconductor device,
The CLK signal is a signal for timing the transmission of the ADD signal.

The driver / comparator circuit 26 outputs various signals input from the signal generator 25 to the connection cable 11 in the thermostat 10 via the burn-in board connector 15 and outputs a power supply in the driver / comparator circuit 26. 27 to the connection cable 11 in the thermostat 10 via the burn-in board connector 15.
Output to

Next, the operation will be described. First, when the temperature of the thermostat 10 is set to a predetermined temperature, the CPU 24 causes the signal generator 25 to generate various signals necessary for the burn-in test, and the signal generator 25 transmits the various signals (ADD signal, IO signal).
Signal, CLK signal, etc.) to the driver / comparator circuit 2
6 is output. The driver / comparator circuit 26 outputs the various signals input from the signal generator 25 and the power supply voltage supplied from the power supply 27 to the burn-in board connector 15 provided in the constant temperature bath 10. The burn-in board connector 15 outputs various signals and the power supply voltage input from the driver / comparator circuit 26 to the burn-in board connector 13 of the connection cable 11.

Various signals and power supply voltages input from the burn-in board connector 13 to the connection cable 11 are transmitted from the diagnostic unit connector 12 via the cable 11a to the diagnostic unit 2 via the diagnostic unit connector 14.
1 is output. The diagnostic unit 21 is connected to the connection cable 11 of the thermostat 10 via the diagnostic unit connector 14.
Self-diagnosis circuit 2 for various signals and power supply voltage input from
2, and outputs the result of the diagnosis to the CPU 24. Then, the CPU 24 determines whether or not the test burn-in device 1 operates normally based on the diagnosis result.

As described above, the diagnostic unit 21 is provided in the test control unit 20 and is connected to the driver / comparator circuit 26 by the connection cable 11 in the thermostat 10. The connection cable 11 in the thermostat 10 is made of a heat-resistant material, and is connected to the diagnostic unit connector 12.
Is connected to the diagnostic unit via the diagnostic unit connector 14, and is connected to the driver / comparator circuit 26 via the burn-in board connector 15 by the burn-in board connector 13.

Therefore, the self-diagnosis test can be performed in a state where the temperature of the thermostat 10 is set to a high temperature or a low temperature, and it is possible to detect a temperature-dependent failure which occurs only at a low temperature or a high temperature. Thus, the reliability of the self-diagnosis test can be improved.

It is sufficient that one diagnostic unit 21 is provided in the test controller 20. To perform a self-diagnosis test for each slot, the burn-in board connector 13 of the connection cable 11 must be connected to each slot. It is only necessary to reconnect to the burn-in board connector 15, and an operation of replacing the diagnostic unit 21 is not required.

In the first embodiment,
A configuration in which a diagnostic unit connector 14 and a burn-in board connector 15 are connected in a thermostat 10 by a connection cable 11 composed of a diagnostic unit connector 12 and a burn-in board connector 13 connected by a heat-resistant cable 11a. However, the present invention is not limited to this. For example, the diagnostic unit connector 14 and the burn-in board connector 15 may be connected by a heat-resistant printed board or the like. Can be appropriately changed without departing from the spirit of the present invention.

(Second Embodiment) Next, a test burn-in device according to a second embodiment of the present invention will be described. The difference between the test burn-in device according to the second embodiment and the first embodiment is the configuration of the connection board 16, and the configuration of the connection board 16 will be described. Descriptions of other parts similar to those of the first embodiment are omitted to avoid duplication.

FIG. 2 is a diagram showing the configuration of the test burn-in device 2 according to the second embodiment. 2, the same components as those of the test burn-in device 1 according to the first embodiment are denoted by the same reference numerals.

As shown in FIG. 2, the connection board 16
The diagnostic unit connector 12 and the plurality of burn-in board connectors 13 are connected by a cable 11a, and the cable 11a is provided with the same number of switches 17 as connectors for connecting and disconnecting each connector. I have.

By the combination of the switches 17, a plurality of burn-in board connectors 13 of the connection board 16 are provided.
Of these, one burn-in board connector 13 is selected and connected to the diagnostic unit connector 12. Also, the switch 17 of the connection board 16, the cable 11a,
And various connectors are made of a heat-resistant material.

Next, the operation will be described. For example, in the connection board 16, the diagnostic unit connector 12 and one burn-in board connector 13 are connected to the cable 11a.
When the switch 17 is switched so as to be connected by the following, the driver / comparator circuit 26 connected to the burn-in board connector 15 connected to the connected burn-in board connector 13 and the diagnostic unit connector 12 are connected. Diagnostic unit connector 1
4 is connected to the diagnostic unit 21, and a self-diagnostic test is performed on the connected driver / comparator circuit 26.

Thereafter, the diagnostic unit connector 12 and
The cable 11 is connected to another burn-in board connector 13.
When the switch 17 is switched so as to be connected by a, another driver / comparator circuit 26 and the diagnostic unit 21 are connected, and a self-diagnostic test is performed on the driver / comparator circuit 26. Similarly, by switching the switch 17, a self-diagnosis test can be performed on each driver / comparator circuit 26 in all slots of the thermostat 10.

As described above, in the second embodiment, the connection board 16 is installed in the constant temperature bath 10, and the connection board 16 connects the diagnostic unit connector 14 connected to the diagnostic unit 21 with each driver / driver. Burn-in board connector 1 connected to comparator circuit 26
5 is connected. By switching a plurality of switches 17 of the connection board 16, one burn-in board connection connector 15 is connected to the diagnostic unit connection connector 14 via the connection board 16. And
A self-diagnosis test is performed on the driver / comparator circuit 26 connected to the one burn-in board connector 15.

By switching the switch 17, another burn-in board connector 15 is connected to the diagnostic unit connector 14, and a self-diagnosis test is performed on a driver / comparator circuit 26 connected to another burn-in board connector 15. carry out. As described above, by switching the switch 17,
A self-diagnosis test can be performed on the driver / comparator circuit 26 of each slot.

Therefore, connection board 16 switch 17
The driver / comparator circuit 26 to be connected to the diagnostic unit 21 can be selected simply by performing the switching operation. Therefore, when the self-diagnosis test is sequentially performed on each driver / comparator circuit 26 in a plurality of slots, an operation such as reconnecting the burn-in board connector 13 to the burn-in board connector 15 in each slot becomes unnecessary, and the connection board 16 Since only the switching operation of the switch 17 need only be performed, the burden on the operator can be reduced.

[0045]

According to the first and fourth aspects of the present invention, the self-diagnosis function always operates at normal temperature outside the constant temperature bath, so that the temperature of the constant temperature bath is set to a low or high temperature. This makes it possible to carry out a self-diagnosis test. As a result, it is possible to detect a temperature-dependent failure or the like occurring only at a low temperature or a high temperature in a test burn-in device, thereby improving the reliability of the self-diagnosis test. Can be planned.

According to the second aspect of the present invention, when the temperature of the thermostat is raised, the signal can be transmitted more reliably in the thermostat, and the reliability of the self-diagnosis test can be further improved. it can.

According to the third and fifth aspects of the present invention, the operator performs the self-diagnosis test for each signal to be supplied to the burn-in board in the constant temperature bath simply by performing the connection switching operation. Can be sequentially executed, so that the burden on the operator can be reduced.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a schematic configuration of a test burn-in device 1 as a first embodiment to which the present invention is applied.

FIG. 2 is a block diagram illustrating a schematic configuration of a test burn-in device 2 according to a second embodiment of the present invention.

FIG. 3 is a block diagram showing a schematic configuration of a conventional test burn-in device 300.

[Explanation of symbols]

 1, 2 Test burn-in device 10 Chamber 11 Connection cable 11a Cable 12 Connector for diagnostic unit 13 Connector for burn-in board 14 Connector for diagnostic unit 15 Burn-in board connector 16 Connection board 17 Switch 20 Test control unit 21 Diagnostic unit 22 Self-diagnosis circuit Reference Signs List 23 control unit 24 CPU 25 signal generator 26 driver / comparator circuit 27 power supply

Claims (5)

[Claims] 1. A test burn-in apparatus for performing a burn-in test by supplying a signal to a burn-in board installed in a thermostat, wherein a plurality of signal generating means for generating a signal necessary for the burn-in test; A self-diagnosis means for diagnosing whether or not the signal generated by the signal is normally supplied to the burn-in board in the thermostatic oven; connecting the self-diagnosis means and the signal generation means; A transmission unit for transmitting the received signal to the self-diagnosis unit, wherein the self-diagnosis unit is provided outside the constant temperature bath, and the transmission unit is provided inside the constant temperature bath. Test burn-in device. 2. The test burn-in apparatus according to claim 1, wherein said transmission means has heat resistance. 3. The apparatus according to claim 2, further comprising a switching unit for selecting a predetermined signal generation unit from among the plurality of signal generation units and switching the signal generation unit to connect to the self-diagnosis unit. 3. The test burn-in device according to claim 1, wherein a selected signal generating unit is connected to the self-diagnosing unit, and a signal generated by the connected signal generating unit is transmitted to the self-diagnosing unit. . 4. A control method for supplying a signal to a burn-in board installed in a thermostat and controlling a processing procedure of a self-diagnosis test in a test burn-in apparatus for performing a burn-in test, wherein a signal required for the burn-in test is generated. A signal generating step of transmitting a signal generated by the signal generating step; and diagnosing whether a signal generated by the signal generating step and transmitted by the transmitting step is normally supplied. A self-diagnosis step, wherein the self-diagnosis step diagnoses whether a signal is normally supplied outside the thermostat, and the transmission step transmits a signal inside the thermostat. A control method in a test burn-in device, which is a feature. 5. The method according to claim 1, further comprising a switching step of selecting and transmitting a signal generated by a predetermined signal generating means from among the signals generated by the signal generating step. The control method according to claim 4, wherein the signal selected in the switching step is transmitted.