JP2000352697A - Optical image detection method and appearance inspection device - Google Patents
Optical image detection method and appearance inspection deviceInfo
- Publication number
- JP2000352697A JP2000352697A JP11164332A JP16433299A JP2000352697A JP 2000352697 A JP2000352697 A JP 2000352697A JP 11164332 A JP11164332 A JP 11164332A JP 16433299 A JP16433299 A JP 16433299A JP 2000352697 A JP2000352697 A JP 2000352697A
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- Prior art keywords
- light
- inspected
- image
- optical image
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 47
- 238000007689 inspection Methods 0.000 title claims abstract description 33
- 238000001514 detection method Methods 0.000 title claims description 20
- 239000013307 optical fiber Substances 0.000 claims abstract description 20
- 238000005286 illumination Methods 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims description 11
- 238000011179 visual inspection Methods 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 claims description 3
- 230000007547 defect Effects 0.000 abstract description 16
- 239000010409 thin film Substances 0.000 abstract description 16
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000001902 propagating effect Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 19
- 238000010586 diagram Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 230000010287 polarization Effects 0.000 description 8
- 210000001747 pupil Anatomy 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 102100033029 Carbonic anhydrase-related protein 11 Human genes 0.000 description 1
- 101000867841 Homo sapiens Carbonic anhydrase-related protein 11 Proteins 0.000 description 1
- 101001075218 Homo sapiens Gastrokine-1 Proteins 0.000 description 1
- 241000276498 Pollachius virens Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Input (AREA)
Abstract
(57)【要約】
【課題】 ＣＭＰウェハ等の外観検査において、欠陥検
出上雑音となる薄膜干渉による明るさむらを低減し、高
感度検査を実現すること。また、高解像度化を目的とし
たＤＵＶレーザー光により画像検出をする場合において
も、欠陥検出上雑音となるスペックル干渉を低減して、
高感度検査を実現すること。
【解決手段】 被検査物体を落射照明して反射・回折し
た光のうち被検査物体に対してＰ偏光成分の反射・回折
光を透過する偏光素子と、ブリュースター角付近の光成
分を透過する空間フィルタとを備え、偏光素子と空間フ
ィルタを透過した光で光学像を形成する。さらに、ＤＵ
Ｖレーザー光により画像検出をする場合、光ファイバー
束に異なる角度で光を伝搬させることによって、空間的
コヒーレンスを低下させる。
(57) [Problem] To provide a high-sensitivity inspection in appearance inspection of a CMP wafer or the like by reducing uneven brightness due to thin-film interference which becomes noise in detecting a defect. In addition, in the case of detecting an image with a DUV laser beam for the purpose of increasing the resolution, speckle interference which is a noise in detecting a defect is reduced,
To realize high sensitivity inspection. SOLUTION: Among the light reflected and diffracted by the epi-illumination of the object to be inspected, a polarizing element that transmits the reflected and diffracted light of the P-polarized component to the object to be inspected, and transmits the light component near the Brewster angle. A spatial filter; and an optical image is formed by the light transmitted through the polarizing element and the spatial filter. In addition, DU
When an image is detected by V laser light, spatial coherence is reduced by propagating light at different angles through an optical fiber bundle.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体やフラット
パネルデイスプレイの製造工程に代表される薄膜製品の
微細パターン欠陥や異物等の検出に用いて好適な光学像
検出方法、およびこれを用いた外観検査装置に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical image detecting method suitable for detecting a fine pattern defect or a foreign matter in a thin film product represented by a manufacturing process of a semiconductor or a flat panel display, and an appearance using the same. The present invention relates to an inspection device.
【０００２】[0002]
【従来の技術】従来の技術として、特開平６−１６７６
４０号公報に記載された、レーザー光を用いて物体の光
学像を観察する技術が挙げられる。この先願公報に開示
された技術の特徴は、レーザー光のスペックル干渉によ
る画質の劣化を低減させるため、レーザー光をインコヒ
ーレント化させるものである。インコヒーレント化させ
る手法として、光ファイバーの長さの差が光源のコヒー
レンス長よりも大きい多数の光ファイバーから構成され
るファイバー束にレーザー光を伝搬させ、空間的コヒー
レンスを低減させている。2. Description of the Related Art As a prior art, Japanese Patent Application Laid-Open No.
There is a technique for observing an optical image of an object by using a laser beam, which is described in Japanese Patent Application Publication No. 40-240. The feature of the technology disclosed in the prior application is that the laser light is made incoherent in order to reduce the deterioration of the image quality due to the speckle interference of the laser light. As a technique for making the optical fiber coherent, laser light is propagated through a fiber bundle composed of a large number of optical fibers whose optical fiber length difference is larger than the coherence length of the light source to reduce spatial coherence.
【０００３】[0003]
【発明が解決しようとする課題】ところで、前記先願公
報に記載の技術では、半導体製造プロセスで適用されて
いるＣＭＰ（Chemical Mechanical Polishing ）処理を
施されたウェハの画像検出において、ＳｉＯ2 などの透
明膜（絶縁膜）で光が薄膜干渉を起こすため、ＳｉＯ2
の膜厚むらが、明暗差や色むらとして検出される。この
膜厚むらは欠陥ではないため、外観検査上はこの明るさ
むらが雑音となる。半導体などの製造ラインでは、外観
検査は主に自動で行っており、光学像をイメージセンサ
で検出して、画像処理を行って欠陥判定をしている。か
ような自動外観検査装置では、透明膜の膜厚むらに伴う
明るさむらを欠陥として判定することがあり、このよう
に明るさむらを欠陥として判定した場合には、虚報とな
る。従って、製造ラインでは虚報が検出されない感度に
検査条件を設定し、自動検査をすることになる。しかし
ながら、虚報が検出されないように検査感度を低く設定
して検査すると、欠陥信号レベルの低い致命的な欠陥を
見逃すことになり、新製品の早期量産立ち上げや安定生
産に障害が生じる可能性がある。According to the technique described in the above-mentioned prior application, in the image detection of a wafer subjected to a CMP (Chemical Mechanical Polishing) process applied in a semiconductor manufacturing process, SiO 2 or the like is detected. Since light causes thin-film interference in a transparent film (insulating film), SiO 2
Is detected as light-dark difference or color unevenness. Since the film thickness unevenness is not a defect, the brightness unevenness becomes noise on an appearance inspection. In a production line for semiconductors or the like, appearance inspection is mainly performed automatically, and an optical image is detected by an image sensor, and image processing is performed to determine a defect. In such an automatic appearance inspection apparatus, uneven brightness due to uneven thickness of the transparent film may be determined as a defect, and when such uneven brightness is determined as a defect, it is a false alarm. Therefore, in the production line, an inspection condition is set to a sensitivity at which a false alarm is not detected, and an automatic inspection is performed. However, if the inspection is set with low inspection sensitivity so that false alarms are not detected, fatal defects with low defect signal levels will be overlooked, which may hinder early mass production of new products and stable production. is there.
【０００４】本発明の目的は、透明膜の薄膜干渉に起因
した明るさむら（色むら）を低減し、様々な構造の製品
においても高感度・安定検査を実現可能とする光学像検
出方法と、それを用いた外観検査装置を提供することに
ある。An object of the present invention is to provide an optical image detecting method which reduces uneven brightness (uneven color) due to thin film interference of a transparent film and realizes high sensitivity and stable inspection even for products having various structures. And a visual inspection apparatus using the same.
【０００５】[0005]
【課題を解決するための手段】本発明では、被検査物体
を落射照明して反射・回折した光のうち被検査物体に対
してＰ偏光成分の反射・回折光を透過する偏光素子と、
ブリュースター角付近の光成分のみを透過する空間フィ
ルタとを備え、前記偏光素子と前記空間フィルタを透過
した光で光学像を形成し、この光学像をイメージセンサ
で検出することにより、透明膜での薄膜干渉を低減す
る。According to the present invention, there is provided a polarizing element that transmits reflected / diffracted light of a P-polarized component to an object to be inspected among light reflected and diffracted by incident illumination of the object to be inspected,
A spatial filter that transmits only a light component near the Brewster angle, forms an optical image with the light transmitted through the polarizing element and the spatial filter, and detects the optical image with an image sensor. Reduce thin film interference.
【０００６】また、高感度検査を実現するためには、光
学像の高解像度化が必要であり、このためには照明光の
短波長化が有効である。これまでに、紫外光を用いた顕
微鏡などが開発されているが、さらに波長の短いＤＵＶ
（Deep Ultra Violet ）光による画像検出をするには、
光源として照度の高いレーザーが実用的である。このレ
ーザー光はコヒーレンスが高いため、スペックル干渉に
よる画質の劣化が問題である。これを低減するため、レ
ーザー光を光ファイバー束に異なる角度で入射し、光フ
ァイバー内を伝搬させることにより空間的コヒーレンス
を低減する。In order to realize a high sensitivity inspection, it is necessary to increase the resolution of an optical image, and for this purpose, it is effective to shorten the wavelength of illumination light. So far, microscopes using ultraviolet light have been developed, but DUVs with shorter wavelengths have been developed.
(Deep Ultra Violet) To detect images by light,
A laser with high illuminance is practical as a light source. Since this laser light has high coherence, there is a problem of deterioration of image quality due to speckle interference. To reduce this, spatial coherence is reduced by injecting laser light into the optical fiber bundle at different angles and propagating through the optical fiber.
【０００７】また、被検査物体をＰ偏光ブリュースター
角で暗視野落射照明して回折・散乱した光で光学像を形
成し、この光学像をイメージセンサで検出することによ
り、透明膜での薄膜干渉を低減する。Further, an object to be inspected is subjected to dark-field epi-illumination at a P-polarized Brewster's angle to form an optical image by diffracted and scattered light, and this optical image is detected by an image sensor, whereby a thin film of a transparent film is formed. Reduce interference.
【０００８】[0008]
【発明の実施の形態】以下、本発明の実施の形態を、図
を用いて説明する。図１は、本発明の第１実施形態に係
る外観検査装置の要部構成を示す説明図である。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory diagram illustrating a main configuration of a visual inspection device according to a first embodiment of the present invention.
【０００９】図１に示す構成において、半導体ウェハな
どの被検査物体（以下、単に物体と称す）１は、チャッ
ク２に真空吸着されており、このチャック２は、θステ
ージ３、Ｚステージ４、Ｙステージ５、Ｘステージ６上
に搭載されている。各ステージ３〜６は、図示せぬモー
タによって駆動されるようになっており、検査時には、
図示せぬコントローラの制御の下に、Ｙステージ５、Ｘ
ステージ６がステップ送りされて、物体１の被検査領域
が後記光学系によって順次走査されるようになってい
る。また、検査に先立ち、θステージ３やＺステージ４
が必要に応じて駆動されて高さや傾き調整などが行われ
る。In the configuration shown in FIG. 1, an object to be inspected (hereinafter simply referred to as an object) 1 such as a semiconductor wafer is vacuum-adsorbed on a chuck 2, and the chuck 2 has a θ stage 3, a Z stage 4, It is mounted on a Y stage 5 and an X stage 6. Each of the stages 3 to 6 is driven by a motor (not shown).
Under the control of a controller (not shown), the Y stage 5, X
The stage 6 is moved stepwise, and the inspection area of the object 1 is sequentially scanned by the optical system described later. Prior to inspection, θ stage 3 and Z stage 4
Is driven as necessary to adjust the height and tilt.
【００１０】物体１の上方に配置されている光学系１１
１は、物体１に形成されているパターンの外観検査を行
うために、物体１の光学像を検出するものであり、主に
照明光学系１１と物体１の像を撮像する検出光学系４５
で構成されている。照明光学系１１に配置された光源１
０はコヒーレント光源である。光源１０から出射したレ
ーザー光９は、これをインコヒーレント化するユニット
１２に入射する。インコヒーレント化された光は、レン
ズ１３を介してハーフミラー１４で反射され、対物レン
ズ１６の射出瞳位置１５に２次光源の像を形成する。こ
れにより、物体１をケーラー照明する。An optical system 11 disposed above the object 1
Numeral 1 is for detecting an optical image of the object 1 in order to inspect the appearance of a pattern formed on the object 1, and mainly includes an illumination optical system 11 and a detection optical system 45 for picking up an image of the object 1.
It is composed of Light source 1 arranged in illumination optical system 11
0 is a coherent light source. The laser light 9 emitted from the light source 10 enters a unit 12 for making it incoherent. The incoherent light is reflected by the half mirror 14 via the lens 13 and forms an image of the secondary light source at the exit pupil position 15 of the objective lens 16. Thus, Koehler illumination of the object 1 is performed.
【００１１】物体１を照明した光は、物体１上で反射、
散乱、回折し、対物レンズ１６のＮＡ（Numerical Aper
ture）以内の光は、再び対物レンズ１６に入射して、ハ
ーフミラー１４を透過した光が、検出光学系４５に導か
れて検出光１７となる。検出光１７は、レンズ１８、１
９により、射出瞳（フーリエ変換面）１５の像を空間フ
ィルタ２１が配置されている面に形成する。この射出瞳
１５の像は、物体１上で反射・回折した角度と方向に応
じて光が集まっている。このため、射出瞳１５の像が形
成されている面において、ブリュースター角で反射・回
折した光のみを透過させることにより、薄膜干渉を低減
することが可能となる。ここで、ブリュースター角は物
体１をＰ偏光で反射・回折した光のみに生じる現象であ
るため、図１に示すように、検出光路４５にＰ偏光のみ
を透過する偏光素子２０と、ブリュースター角付近の光
成分のみを透過させる空間フィルタ２１とを配置してあ
る。そして、偏光素子２０と空間フィルタ２１を透過し
た光は、レンズ２２によりイメージセンサ３０上に物体
１の像を結像させる。Light illuminating the object 1 is reflected on the object 1,
The objective lens 16 is scattered and diffracted, and the NA (Numerical Aper
The light within (ture) enters the objective lens 16 again, and the light transmitted through the half mirror 14 is guided to the detection optical system 45 to become the detection light 17. The detection light 17 includes lenses 18, 1
9, the image of the exit pupil (Fourier transform plane) 15 is formed on the plane on which the spatial filter 21 is arranged. In the image of the exit pupil 15, light is collected according to the angle and direction of reflection and diffraction on the object 1. Therefore, by transmitting only the light reflected and diffracted at the Brewster's angle on the surface of the exit pupil 15 where the image is formed, it is possible to reduce the thin-film interference. Here, since the Brewster angle is a phenomenon that occurs only in the light reflected and diffracted by the object 1 with P-polarized light, as shown in FIG. 1, the polarizing element 20 that transmits only P-polarized light to the detection optical path 45 and the Brewster angle A spatial filter 21 that transmits only light components near the corner is disposed. Then, the light transmitted through the polarizing element 20 and the spatial filter 21 forms an image of the object 1 on the image sensor 30 by the lens 22.
【００１２】このイメージセンサ３０で検出した画像
を、ケーブル５０で画像処理部６０に伝送し、画像処理
部６０において適宜の手法により欠陥（異物による欠陥
を含む）を検出する。なお、物体１は、チャック２を
Ｘ、Ｙ方向に適宜ステップ送りすることによって、その
被検査領域が順次変えられ、各被検査領域の検出画像が
画像処理部６０に転送されることになる。The image detected by the image sensor 30 is transmitted to the image processing section 60 via the cable 50, and the image processing section 60 detects a defect (including a defect due to a foreign substance) by an appropriate method. The inspection area of the object 1 is sequentially changed by appropriately moving the chuck 2 in the X and Y directions, and the detection image of each inspection area is transferred to the image processing unit 60.
【００１３】次に、図２の（ａ）を用いて、透明膜の薄
膜干渉に伴う明るさ（色むら）の発生原理を説明する。
照明光がＳｉＯ2 などの透明膜に入射した場合、ＳｉＯ
2 の上層で反射した光と、透明膜を透過して膜を１〜数
回往復して透明膜を抜け出た光の干渉により、反射率が
決まる。この反射率は干渉する光の位相差によって、強
め合ったり弱め合ったりする。そして、この位相差はＳ
ｉＯ2 の膜厚ｄの関数であるため、膜厚が変わると反射
率も変化する。Next, with reference to FIG. 2A, the principle of generation of brightness (uneven color) due to thin film interference of a transparent film will be described.
When illumination light is incident on a transparent film such as SiO 2 ,
The reflectance is determined by the interference between the light reflected by the upper layer 2 and the light that has passed through the transparent film and reciprocated through the film one to several times and exited the transparent film. The reflectivity reinforces or decomposes depending on the phase difference of the interfering light. And this phase difference is S
Since it is a function of the thickness d of iO 2, the reflectance changes as the thickness changes.
【００１４】図２の（ｂ）に膜厚と反射率の関係を示
す。膜厚の変化に伴い、反射率はコサインカーブを描い
て振動する。半導体ウェハなどの外観検査では、隣接チ
ップの画像をそれぞれ検出して差画像を求め、この差画
像の不一致が一定値を超えている場所を欠陥と判断す
る。このため、比較検査する隣接チップでＳｉＯ2 の膜
厚むらによる明るさむらが大きい場合は、膜厚むらを欠
陥として検出してしまう。しかし、この膜厚むらは製品
の品質上致命性がないため、欠陥として検出すると虚報
になる。このため従来は、前述したように、製造ライン
では虚報が検出されない感度に検査条件を設定して、自
動検査を行っていたが、このようにすると、欠陥信号レ
ベルの低い致命的な欠陥を見逃すことになるという問題
を生じる。そこで、本発明では、薄膜干渉による明るさ
むらを低減して、高感度の外観検査を実現できるように
したものである。FIG. 2B shows the relationship between the film thickness and the reflectance. As the film thickness changes, the reflectance oscillates in a cosine curve. In a visual inspection of a semiconductor wafer or the like, a difference image is obtained by detecting images of adjacent chips, and a portion where the difference between the difference images exceeds a certain value is determined as a defect. For this reason, if the brightness unevenness due to the unevenness in the thickness of SiO 2 is large in the adjacent chips to be compared and inspected, the unevenness in the thickness is detected as a defect. However, since this unevenness in film thickness is not fatal in terms of product quality, it is a false report if detected as a defect. For this reason, conventionally, as described above, in a manufacturing line, an inspection condition is set to a sensitivity at which no false alarm is detected, and an automatic inspection is performed. In this case, a fatal defect having a low defect signal level is overlooked. This causes a problem. Therefore, in the present invention, brightness unevenness due to thin-film interference is reduced, and a highly sensitive appearance inspection can be realized.
【００１５】図３に、本発明による、薄膜干渉による明
るさむらの低減原理を示す。図３の（ａ）に示すよう
に、空気中からＳｉＯ2 にＰ偏光の照明光Ｉを入射させ
た場合に、空気とＳｉＯ2 との境界で反射する光をＲp
とし、ＳｉＯ2 に入射する光をＴp とすると、照明光Ｉ
の入射角と反射率Ｒp との関係は、図３の（ｂ）に示し
たようなものとなる。図３の（ｂ）に示すように、入射
角０〜２５°付近では反射率が数％程度で推移している
が、さらに入射角が大きくなると反射率が低減し、５６
°付近で反射率が０となる。この角度をブリュースター
角と称す。このブリュースター角では、光が全てＳｉＯ
2 に入射し、空気とＳｉＯ2 との境界で反射する光がな
く、ＳｉＯ2 を一往復した光は全て空気中に透過するた
め、薄膜干渉が起こらない。これにより、膜厚むらに伴
う明るさむらを低減することが可能となり、高感度検査
を実現することが可能となる。FIG. 3 shows the principle of reducing uneven brightness due to thin film interference according to the present invention. As shown in FIG. 3 (a), when the air is incident illumination light I of the P-polarized light to SiO 2, the light reflected at the boundary between the air and the SiO 2 Rp
And the light incident on SiO 2 is Tp, the illumination light I
The relationship between the incident angle and the reflectance Rp is as shown in FIG. As shown in FIG. 3 (b), the reflectance changes at about several percent around the incident angle of 0 to 25 °, but the reflectance decreases as the incident angle further increases, and the reflectance decreases.
In the vicinity of °, the reflectance becomes zero. This angle is called Brewster's angle. At this Brewster angle, all light is SiO
Enters the 2, no light reflected at the interface between air and SiO 2, since all light of SiO 2 was reciprocated once is transmitted into the air, it does not occur thin film interference. As a result, it is possible to reduce uneven brightness due to uneven film thickness, and to realize a high-sensitivity inspection.
【００１６】図４は偏光素子２０の機能について示す図
である。フーリエ変換面近くに配置された偏光素子２０
は、光学系の光軸２５を中心として半径方向に振動する
光２７を透過する特性を有した偏光素子である。この偏
光素子２０を実現する１例として、偏光フィルムを貼り
合わせる手法が挙げられる。FIG. 4 shows the function of the polarizing element 20. Polarizing element 20 arranged near Fourier transform plane
Is a polarizing element having a characteristic of transmitting light 27 vibrating in the radial direction around the optical axis 25 of the optical system. One example of realizing the polarizing element 20 is a method of attaching a polarizing film.
【００１７】次に、図５を用いて、レーザー光のスペッ
クル干渉を低減する手法について説明する。図１では詳
細を示していないが、図５に示すように、光源１０から
のレーザー光９は、レンズ７０とレンズ７１で光束径を
広げられた平行光となる。この平行光をレンズ７２で収
束光にして、光ファイバー束（レーザー光をインコヒー
レント化するユニット）１２に入射させる。光ファイバ
ー束１２の光軸付近の光ファイバー７６では、入射角
（出射角）θ２は小さいが、周辺部の光ファイバー７５
では入射角（出射角）θ１が大きくなる。ここで、入射
角と出射角はほぼ等しいとしている。従って、光ファイ
バー束１２を伝搬する光の光路は、光軸付近では短く、
周辺は長くなる。この光路差を少なくともレーザー光の
可干渉距離よりも大きくすることにより、それぞれの光
ファイバーを出射した光が、互いに干渉しないようにイ
ンコヒーレント化することが可能となる。これにより、
光学系に付着した異物などの散乱光が干渉して生じるス
ペックル干渉が低減し、物体の像を忠実に再現すること
が可能となり、以って、スペックル干渉による画像の明
暗差を低減して、虚報を低減することができる。Next, a method for reducing speckle interference of laser light will be described with reference to FIG. Although not shown in detail in FIG. 1, as shown in FIG. 5, the laser light 9 from the light source 10 is a parallel light whose light beam diameter is expanded by the lenses 70 and 71. This parallel light is converted into convergent light by a lens 72 and is incident on an optical fiber bundle (a unit for making the laser light incoherent) 12. In the optical fiber 76 near the optical axis of the optical fiber bundle 12, the incident angle (emission angle) θ2 is small, but the optical fiber 75 in the peripheral portion is small.
In this case, the incident angle (emission angle) θ1 increases. Here, the incident angle and the exit angle are assumed to be substantially equal. Therefore, the optical path of the light propagating through the optical fiber bundle 12 is short near the optical axis,
The periphery becomes longer. By making this optical path difference at least larger than the coherent distance of the laser light, it is possible to make the lights emitted from the respective optical fibers incoherent so as not to interfere with each other. This allows
Speckle interference caused by interference of scattered light such as foreign matter adhered to the optical system is reduced, and it is possible to faithfully reproduce the image of the object. Thus, false alarms can be reduced.
【００１８】図６は、本発明の第２実施形態に係る外観
検査装置の要部構成を示す説明図であり、本実施形態
は、物体をブリュースター角で暗視野照明する構成とな
っている。なお、図６において、前記第１実施形態と均
等なものには同一符号を付してある。FIG. 6 is an explanatory diagram showing the configuration of a main part of a visual inspection apparatus according to a second embodiment of the present invention. This embodiment is configured to illuminate an object with a Brewster angle in a dark field. . In FIG. 6, the same components as those in the first embodiment are denoted by the same reference numerals.
【００１９】図６に示した構成において、光源１０から
出射したレーザー光９は、光ファイバー束（レーザー光
をインコヒーレント化するユニット）１２に入射し、対
物レンズ１６の周辺部に配置された光ファイバーの出射
端から射出される。すなわち、光ファイバー束１２を出
射した光は、対物レンズ１６の外側から物体１を照明す
る。この照明光は、偏光ミラー８５でＰ偏光のみを物体
１上に照明するものであり、その入射角はブリュースタ
ー角付近に設定してある。In the configuration shown in FIG. 6, a laser beam 9 emitted from a light source 10 is incident on an optical fiber bundle (a unit for making the laser beam incoherent) 12, and the laser beam 9 is emitted from an optical fiber disposed around an objective lens 16. It is emitted from the emission end. That is, the light emitted from the optical fiber bundle 12 illuminates the object 1 from outside the objective lens 16. This illumination light is for illuminating only the P-polarized light on the object 1 by the polarization mirror 85, and its incident angle is set near the Brewster angle.
【００２０】物体１上で回折・散乱した光のうち、対物
レンズ１６のＮＡ内の光は対物レンズ１６に捕捉され、
検出光１７となる。この検出光１７は、結像レンズ２２
でイメージセンサ３０上に物体１の暗視野像を形成す
る。そして、この暗視野像の電気信号を画像処理部６０
に伝送し、比較検査法などにより欠陥部を判別する。Of the light diffracted and scattered on the object 1, the light within the NA of the objective lens 16 is captured by the objective lens 16,
It becomes the detection light 17. The detection light 17 is transmitted to the imaging lens 22
To form a dark-field image of the object 1 on the image sensor 30. Then, the electric signal of the dark field image is converted to an image
The defective part is determined by a comparative inspection method or the like.
【００２１】上記の暗視野像は、薄膜干渉による明るさ
むらの大きい平坦部からの光がないため、薄膜干渉によ
る明るさむらを低減できる利点がある。本実施形態の構
成は、対物レンズ１６のＮＡがブリュースター角よりも
小さい場合などに実施できる。The dark-field image described above has an advantage that unevenness in brightness due to thin-film interference can be reduced because there is no light from a flat portion having large uneven brightness due to thin-film interference. The configuration of the present embodiment can be implemented when the NA of the objective lens 16 is smaller than the Brewster angle.
【００２２】図７は、偏光ミラー８５の作用について示
す図である。偏光ミラー８５に入射する光８０の偏光方
向が不規則であったり、円偏光である場合には、Ｐ偏光
照明を行うためには、偏光ミラー８５で反射する光をＰ
偏光成分のみにする必要がある。例えば、光線８０の偏
光がＳ１、Ｐ１の振動方向を有する場合、偏光ミラー８
５で反射する光の成分はＰ１のみである特性を有する。
このＰ偏光とは、物体１を入射面と考えたときの振動方
向を指す。従って、光線８１のＰ偏光成分はＰ２とな
る。FIG. 7 is a diagram showing the operation of the polarizing mirror 85. If the polarization direction of the light 80 incident on the polarization mirror 85 is irregular or circularly polarized, the light reflected by the polarization mirror 85 must be reflected by P
It is necessary to use only the polarization component. For example, when the polarization of the light beam 80 has the vibration directions of S1 and P1, the polarization mirror 8
The component of the light reflected at 5 has the characteristic of being only P1.
The P-polarized light indicates a vibration direction when the object 1 is considered as an incident surface. Therefore, the P-polarized light component of the light beam 81 is P2.
【００２３】図８は、本発明の第３実施形態に係り、本
実施形態は、図６の光ファイバー束の射出端とミラーと
の間の光路中に、図４に示す特性を有した偏光素子２０
を挿入した構成となっている。FIG. 8 relates to a third embodiment of the present invention. In this embodiment, a polarizing element having the characteristics shown in FIG. 4 is provided in the optical path between the exit end of the optical fiber bundle and the mirror shown in FIG. 20
Is inserted.
【００２４】本実施形態では、偏光素子２０を透過した
光はＰ偏光成分のみであるため、本実施形態のミラー
（暗視野ミラー）８５’は、前記第２実施形態のよう
に、Ｐ偏光のみを反射させるような特性は不要であり、
物体１への入射角をブリュースター角付近に設定できる
ものであればよい。なお、アルムニウムなどの金属膜で
偏光した光が反射した場合、位相差を受けて偏光状態が
変わるが、本実施形態ではこれを無視した。In this embodiment, since the light transmitted through the polarizing element 20 is only the P-polarized light component, the mirror (dark-field mirror) 85 'of this embodiment is different from the second embodiment in that only the P-polarized light is transmitted. There is no need to reflect the light,
Any object can be used as long as the angle of incidence on the object 1 can be set near the Brewster angle. When light polarized by a metal film such as aluminum is reflected, the polarization state changes due to a phase difference, but this is ignored in the present embodiment.
【００２５】なお、これまでに記述したブリュースター
角付近とは、図３の（ｂ）の反射率Ｒp が１．５％以下
程度となる角度を指している。何となれば、反射率Ｒp
が１．５％程度以下では、薄膜干渉による明るさのむら
が外観検査上の雑音として問題にならない程度に低減さ
れることによる。The vicinity of the Brewster angle described above refers to an angle at which the reflectance Rp in FIG. 3B is about 1.5% or less. What is the reflectance Rp
When it is about 1.5% or less, uneven brightness due to thin-film interference is reduced to a level that does not cause a problem as noise in visual inspection.
【００２６】[0026]
【発明の効果】以上に説明したごとく本発明の構成によ
れば、透明膜での薄膜干渉に起因した明るさむらを低減
でき、これにより、外観検査上の雑音を低減することが
可能となって、ＣＭＰ（Chemical Mechanical Polishin
g ）処理を施された被検査物体の外観検査においても、
高感度で信頼性の高い外観検査が実現できる。As described above, according to the structure of the present invention, it is possible to reduce the uneven brightness caused by the thin film interference in the transparent film, thereby making it possible to reduce the noise in the visual inspection. And CMP (Chemical Mechanical Polishin)
g) In the visual inspection of the processed inspected object,
Highly sensitive and reliable appearance inspection can be realized.
【００２７】さらに、高感度検査を実現するため、ＤＵ
Ｖレーザー光による画像検出をする場合においても、空
間的コヒーレンスの低下によってスペックル干渉による
画質の劣化を低減できるため、これによっても、高感度
で信頼性の高い外観検査が実現できる。Further, to realize a high sensitivity inspection, the DU
Even in the case of performing image detection using the V laser beam, deterioration in image quality due to speckle interference can be reduced due to reduction in spatial coherence, so that a highly sensitive and highly reliable appearance inspection can be realized.
【図１】本発明の第１実施形態に係る外観検査装置の要
部構成を示す説明図である。FIG. 1 is an explanatory diagram illustrating a main configuration of a visual inspection device according to a first embodiment of the present invention.
【図２】透明膜における薄膜干渉の発生原理を示す説明
図である。FIG. 2 is an explanatory diagram showing the principle of occurrence of thin film interference in a transparent film.
【図３】ブリュースター角を説明するための図である。FIG. 3 is a diagram for explaining Brewster's angle.
【図４】図１中の偏光素子の機能を説明するための図で
ある。FIG. 4 is a diagram for explaining a function of a polarizing element in FIG. 1;
【図５】本発明の第１実施形態における、空間的コヒー
レンス低減のための構成の１例を示す説明図である。FIG. 5 is an explanatory diagram showing an example of a configuration for reducing spatial coherence in the first embodiment of the present invention.
【図６】本発明の第２実施形態に係る外観検査装置の要
部構成を示す説明図である。FIG. 6 is an explanatory diagram illustrating a main configuration of a visual inspection device according to a second embodiment of the present invention.
【図７】図６中の偏光ミラーの機能を説明するための図
である。FIG. 7 is a diagram for explaining a function of a polarizing mirror in FIG. 6;
【図８】本発明の第３実施形態に係る外観検査装置にお
いて、物体の近傍に配置されるミラーの機能を説明する
ための図である。FIG. 8 is a diagram for explaining a function of a mirror arranged near an object in a visual inspection device according to a third embodiment of the present invention.
１ 物体（被検査物体） ２ チャック ３ θステージ ４ Ｚステージ ５ Ｙステージ ６ Ｘステージ ９ レーザー光 １０ 光源 １１ 照明光学系 １２ インコヒーレント化するユニット（光ファイバー
束） １４ ハーフミラー １５ 射出瞳 １６ 対物レンズ １７ 検出光 ２０ 偏光素子 ２１ 空間フィルタ ２５ 光軸 ２７ 透過振動方向 ３０ イメージセンサ ４５ 検出光学系 ５０ ケーブル ６０ 画像処理部 ８５ 偏光ミラーReference Signs List 1 object (object to be inspected) 2 chuck 3 θ stage 4 Z stage 5 Y stage 6 X stage 9 laser beam 10 light source 11 illumination optical system 12 unit for making incoherent (optical fiber bundle) 14 half mirror 15 exit pupil 16 objective lens 17 Detection light 20 Polarizing element 21 Spatial filter 25 Optical axis 27 Transmission vibration direction 30 Image sensor 45 Detection optical system 50 Cable 60 Image processing unit 85 Polarizing mirror
フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｈ０１Ｌ 21/66 Ｇ０６Ｆ 15/64 Ｄ ３２０Ｃ (72)発明者 吉田 実 神奈川県横浜市戸塚区吉田町292番地 株 式会社日立製作所生産技術研究所内 (72)発明者 中田 俊彦 神奈川県横浜市戸塚区吉田町292番地 株 式会社日立製作所生産技術研究所内 (72)発明者 宍戸 弘明 神奈川県横浜市戸塚区吉田町292番地 株 式会社日立製作所生産技術研究所内 (72)発明者 宇都 幸雄 神奈川県横浜市戸塚区吉田町292番地 株 式会社日立製作所生産技術研究所内 Ｆターム(参考） 2G051 AA51 AB01 AB02 BA05 BA10 BB03 BB05 BB07 BB11 BB17 BB20 CB01 CC11 DA08 2H049 BA02 BA43 BB03 BB06 BC23 2H099 AA11 BA09 CA11 DA01 4M106 AA01 BA04 BA05 BA06 BA07 CA38 CA39 CA41 DB01 DB02 DB04 DB07 DB08 DB11 DB12 DB13 DB14 DB18 DJ01 DJ02 DJ03 DJ04 5B047 AA12 BC07 BC08 Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (Reference) H01L 21/66 G06F 15/64 D 320C (72) Inventor Minoru Yoshida 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture, Ltd. Inside Hitachi, Ltd. Production Research Laboratory (72) Inventor Toshihiko Nakata 292, Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Inside Hitachi Ltd. Production Technology Laboratory (72) Inventor Hiroaki Shishido 292, Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa, Japan Hitachi, Ltd., Production Technology Laboratory (72) Inventor Yukio Utsu 292, Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture F-term in Hitachi, Ltd. Production Technology Laboratory (Reference) BB20 CB01 CC11 DA08 2H049 BA02 BA43 BB03 BB06 BC23 2H099 AA11 BA09 CA11 DA01 4M106 AA01 BA04 BA05 BA06 BA07 CA38 CA39 CA41 DB01 DB02 DB04 DB07 DB08 DB11 DB12 DB13 DB14 DB18 DJ01 DJ02 DJ03 DJ04 5B047 AA12 BC07
Claims (8)
た光のうち被検査物体に対してＰ偏光成分の反射・回折
光を透過する偏光素子と、ブリュースター角付近の光成
分のみを透過する空間フィルタとを備え、前記偏光素子
と前記空間フィルタを透過した光で光学像を形成し、こ
の光学像をイメージセンサで検出することを特徴とする
光学像検出方法。1. A polarizing element that transmits reflected / diffracted light of a P-polarized component to an object to be inspected among light reflected and diffracted by incident illumination of the object to be inspected, and only a light component near the Brewster angle. An optical image detection method, comprising: a spatial filter that transmits light; an optical image formed by the polarizing element and light transmitted through the spatial filter; and the optical image is detected by an image sensor.
て、 前記落射照明に用いる光がＤＵＶ（Deep Ultra Violet
）レーザー光であることを特徴とする光学像検出方
法。2. The optical image detection method according to claim 1, wherein the light used for the epi-illumination is a DUV (Deep Ultra Violet).
(2) An optical image detection method, which is a laser beam.
て、 前記ＤＵＶレーザー光は、異なる角度で光ファイバー束
に入射して空間的コヒーレンスを低減させることを特徴
とする光学像検出方法。3. The optical image detection method according to claim 2, wherein the DUV laser light is incident on the optical fiber bundle at different angles to reduce spatial coherence.
暗視野落射照明して回折・散乱した光で光学像を形成
し、この光学像をイメージセンサで検出することを特徴
とする光学像検出方法。4. An optical image detection method, wherein an object to be inspected is epi-illuminated in a dark field at a P-polarized Brewster angle to form an optical image by diffracted and scattered light, and the optical image is detected by an image sensor. Method.
テージを駆動するモータと、前記被検査物体を落射照明
する照明光学系と、前記被検査物体を落射照明して反射
・回折した光のうち前記被検査物体に対してＰ偏光成分
の反射・回折光を透過する偏光素子と、前記被検査物体
を反射・回折する角度がブリュースター角付近の光成分
のみを透過する空間フィルタと、前記偏光素子と前記空
間フィルタを透過した光で光学像を形成する結像光学系
と、この光学像をイメージセンサで検出する画像検出部
と、この検出した画像を用いて前記被検査物体の外観を
検査する画像処理部とを具備したことを特徴とする外観
検査装置。5. A stage on which an object to be inspected is mounted, a motor for driving the stage, an illumination optical system for epi-illuminating the object to be inspected, and a light reflected and diffracted by epi-illuminating the object to be inspected. A polarizing element that transmits reflected / diffracted light of the P-polarized component with respect to the object to be inspected; and a spatial filter that transmits only light components near the Brewster angle at an angle at which the object to be inspected is reflected / diffused, An imaging optical system that forms an optical image with the light transmitted through the polarizing element and the spatial filter, an image detection unit that detects the optical image with an image sensor, and uses the detected image to change the appearance of the inspection object. An appearance inspection apparatus, comprising: an image processing unit for inspection.
て、 前記落射照明に用いる光はＤＵＶレーザー光であること
を特徴とする外観検査装置。6. The appearance inspection apparatus according to claim 5, wherein the light used for the epi-illumination is a DUV laser light.
て、 前記ＤＵＶレーザー光は異なる角度で光ファイバー束を
伝搬し、該光ファイバー束を出射した光を前記被検査物
体に落射照明することを特徴とする外観検査装置。7. The appearance inspection apparatus according to claim 6, wherein the DUV laser light propagates through an optical fiber bundle at different angles, and illuminates the object to be inspected with light emitted from the optical fiber bundle. Appearance inspection equipment.
テージを駆動するモータと、前記被検査物体を暗視野落
射照明する照明光学系と、この照明光が前記被検査物体
に対してＰ偏光となるようにする偏光素子と、前記被検
査物体への入射角をブリュースター角付近にする入射角
設定手段と、前記被検査物体で回折・散乱した光で光学
像を形成する結像光学系と、この光学像をイメージセン
サで検出する画像検出部と、前記検出した画像を用いて
前記被検査物体の外観を検査する画像処理部とを具備し
たことを特徴とする外観検査装置。8. A stage on which an object to be inspected is mounted, a motor for driving the stage, an illumination optical system for illuminating the object to be inspected with a dark field, and illumination light which is p-polarized with respect to the object to be inspected. A polarizing element, an incident angle setting means for setting an incident angle on the object to be inspected to be near the Brewster angle, and an imaging optical system for forming an optical image with light diffracted and scattered by the object to be inspected. A visual inspection apparatus comprising: an image detection unit that detects the optical image with an image sensor; and an image processing unit that inspects the appearance of the inspection object using the detected image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16433299A JP4184543B2 (en) | 1999-06-10 | 1999-06-10 | Optical image detection method and visual inspection apparatus |
Applications Claiming Priority (1)
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| JP16433299A JP4184543B2 (en) | 1999-06-10 | 1999-06-10 | Optical image detection method and visual inspection apparatus |
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- 1999-06-10 JP JP16433299A patent/JP4184543B2/en not_active Expired - Fee Related
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