JP2000319026A - Die for forming glass substrate, apparatus for producing glass substrate, production of glass substrate and glass substrate for magnetic disk - Google Patents
Die for forming glass substrate, apparatus for producing glass substrate, production of glass substrate and glass substrate for magnetic diskInfo
- Publication number
- JP2000319026A JP2000319026A JP12445399A JP12445399A JP2000319026A JP 2000319026 A JP2000319026 A JP 2000319026A JP 12445399 A JP12445399 A JP 12445399A JP 12445399 A JP12445399 A JP 12445399A JP 2000319026 A JP2000319026 A JP 2000319026A
- Authority
- JP
- Japan
- Prior art keywords
- mold
- glass substrate
- glass
- molding
- die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/40—Product characteristics
- C03B2215/45—Ring or doughnut disc products or their preforms
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【0001】[0001]
【発明の属する技術分野】本発明は、磁気ディスクなど
の記録媒体に最適な磁気ディスク用ガラス基板に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate for a magnetic disk which is most suitable for a recording medium such as a magnetic disk.
【0002】[0002]
【従来の技術】近年、磁気記録の分野、特に磁気ディス
クにおいては、小型化、薄型化、高容量化等の高性能化
が進んでいるが、それに伴って、高密度磁気記録媒体へ
の要求が高まり、高剛性、高硬度で平滑化が容易なガラ
ス基板は、高密度化、高信頼性化に極めて有利なことか
ら盛んに検討されている。2. Description of the Related Art In recent years, in the field of magnetic recording, in particular, in magnetic disks, high performance such as miniaturization, thinning, and high capacity has been promoted. Glass substrates with high rigidity, high hardness and easy smoothing have been actively studied because they are extremely advantageous for high density and high reliability.
【0003】従来、磁気ディスク用ガラス基板は、所定
のサイズに切り抜かれた後、平滑な表面を得るために1
枚1枚ガラス基板を研磨する研磨法により製造されてき
た。しかしながら、近年、基板表面には極めて高平滑
性、高平面性が要求されており、この要求は将来にわた
って継続的な精度向上を求められることが予測されてい
る。したがって、研磨工程に非常に高い精度が要求さ
れ、工程数の増加による高価格化が懸念されている。Conventionally, a glass substrate for a magnetic disk has been cut out to a predetermined size and then cut out to obtain a smooth surface.
It has been manufactured by a polishing method of polishing a glass substrate one by one. However, in recent years, the substrate surface has been required to have extremely high smoothness and high flatness, and this demand is expected to require continuous improvement in accuracy in the future. Therefore, very high precision is required for the polishing step, and there is a concern that the price will increase due to an increase in the number of steps.
【0004】それに対して、ガラス素材を加熱、加圧、
冷却し、金型の超平滑面を成形で転写するプレス成形法
は後加工が不要なため、生産性が高く、品質が安定して
いるため光学ガラス素子の製造分野では数多くの検討が
なされ、既に実用化が図られている。On the other hand, a glass material is heated, pressed,
Since the press forming method of cooling and transferring the ultra-smooth surface of the mold by molding does not require post-processing, the productivity is high and the quality is stable, so many studies have been made in the field of manufacturing optical glass elements, It has already been put to practical use.
【0005】光学ガラスの分野では、ガラス素材からプ
レス成形により成形品を得る方法としては、いわゆるリ
ヒートプレス法とダイレクトプレス法とがある。In the field of optical glass, as a method of obtaining a molded product from a glass material by press molding, there are a so-called reheat press method and a direct press method.
【0006】リヒートプレス法では、一旦最終成形品を
得る形状に近似するガラスブランクを形成しておき、こ
のブランク材を成形用金型ユニット内に収容して加熱及
び加圧、冷却し、この金型ユニットにより形成されるキ
ャビティーの形状に対応した最終成形品を得る。In the reheat press method, a glass blank having a shape approximating a shape to obtain a final molded product is once formed, and the blank material is housed in a molding die unit, heated, pressurized, and cooled. A final molded product corresponding to the shape of the cavity formed by the mold unit is obtained.
【0007】ダイレクトプレス法では、溶融ガラスまた
は高温軟化状態のガラスを成形用金型ユニット内に導入
し加圧して、この金型ユニットにより形成されるキャビ
ティーの形状に対応した最終成形品を得る。In the direct press method, molten glass or glass in a high-temperature softened state is introduced into a molding die unit and pressurized to obtain a final molded product corresponding to the shape of a cavity formed by the die unit. .
【0008】一般にリヒートプレス法は、ガラス素材の
温度は金型温度に追従するため、形状精度が得やすい利
点があるが、加熱及び冷却に時間がかかるため工程分割
を行い、複数のプレスヘッドで現実的なタクトを実現す
る技術がある。例えば、特開昭62−292629号公
報において、ガラス及び成形型を加熱するために2つの
予備ステージと、加圧ステージと、冷却ステージとに分
離独立させることが提案されている。この技術を利用し
て精度の高いレンズを能率よく成形することが可能であ
る。In general, the reheat press method has an advantage that the temperature of the glass material follows the mold temperature, so that the shape accuracy is easily obtained. However, since it takes time for heating and cooling, the process is divided, and a plurality of press heads are used. There is a technology to realize a realistic tact. For example, Japanese Patent Application Laid-Open No. 62-292629 proposes that two pre-stages, a pressurizing stage, and a cooling stage are separately provided to heat glass and a mold. Using this technique, it is possible to efficiently mold a highly accurate lens.
【0009】しかしながら、リヒートプレス法における
製造方法においては、タクト短縮のために、複数個のプ
レスヘッド利用した工程分割を導入する必要があり、装
置の大型化、高価格化という課題があった。However, in the manufacturing method in the reheat press method, it is necessary to introduce a process division using a plurality of press heads in order to reduce the tact time, and there has been a problem of increasing the size and cost of the apparatus.
【0010】一方、ダイレクトプレス法としては、例え
ば、特開平1−308840号公報において、溶融ガラ
スの表面温度をガラス軟化温度より低く内部温度を軟化
温度より高い状態にする工程と、前記ガラス塊を第1の
鏡面金型と称する下金型で受ける工程と、この第1の金
型と対向する第2の鏡面金型でプレス成形してガラスレ
ンズを得る工程とから成るガラスレンズの製造方法が提
案されている。この技術によれば、高温軟化状態のガラ
ス塊を直接下金型で受けて成形するので予熱部のタクト
短縮が可能である。On the other hand, as a direct pressing method, for example, in JP-A-1-308840, a process in which the surface temperature of molten glass is set lower than the glass softening temperature and the internal temperature is set higher than the softening temperature is described. A method of manufacturing a glass lens includes a step of receiving a lower mirror called a first mirror mold and a step of obtaining a glass lens by press molding with a second mirror mold opposite to the first mold. Proposed. According to this technique, since the glass lump in the high-temperature softened state is directly received and molded by the lower mold, the tact time of the preheating portion can be reduced.
【0011】しかしながら、ダイレクトプレス法におけ
る金型温度はガラス表面温度まで上昇するため、冷却工
程で金型及びガラス基板を冷却するための成形タクトの
短縮化が課題であった、However, since the mold temperature in the direct press method rises to the glass surface temperature, there has been a problem in shortening the molding tact for cooling the mold and the glass substrate in the cooling step.
【0012】また、従来は研磨工程を経た基板は内外径
加工機、内外周面取り機により最終形状に仕上げてい
た。この複数工程にまたがる基板生産プロセスを簡略化
するために成形工程に加工工程の一部を導入する取組み
も提案されている。Conventionally, a substrate which has undergone a polishing step is finished to a final shape by an inner / outer diameter processing machine and an inner / outer peripheral chamfering machine. In order to simplify the substrate production process over a plurality of processes, an approach for introducing a part of the processing process into the molding process has been proposed.
【0013】例えば、特開昭63−248727号公
報、特開平1−133948号公報及び特開平3−22
8837号公報において、溶融ガラスをノズルから流下
させながら、その両側から水平方向に対向する1対の成
形用型部材を用い上記溶融ガラスを挟み、ガラスを急冷
硬化させ所定形状の成形品を得る方法が提案されてい
る。この技術によれば、成形型周囲に切断用リングを配
置してキャビティー構成と同時に切断したり、冷却後リ
ングをプレス方向にスライドさせ切断できるため、成形
用金型の外側にはみ出した部分を成形工程で除去するこ
とが可能である。For example, JP-A-63-248727, JP-A-1-133948 and JP-A-3-22.
No. 8837, a method of sandwiching the molten glass using a pair of molding die members horizontally opposed from both sides thereof while flowing the molten glass down from a nozzle, rapidly cooling and curing the glass to obtain a molded product having a predetermined shape. Has been proposed. According to this technology, a cutting ring is arranged around the mold and cut at the same time as the cavity configuration, or after cooling, the ring can be slid in the press direction and cut, so that the portion protruding outside the mold is removed. It can be removed in the molding process.
【0014】しかしながら、磁気ディスク用基板は基板
中心部の孔を廃材として処理する必要があり、この技術
では、成形工程での切断処理は不可能である。However, the magnetic disk substrate needs to treat the hole at the center of the substrate as a waste material, and this technique cannot perform the cutting process in the molding process.
【0015】[0015]
【発明が解決しようとする課題】本発明は、タクトタイ
ムの短縮が可能なダイレクトプレス法の特徴と、成形品
の形状精度が出しやすいリヒートプレス法の特徴とを取
り入れることにより、磁気ディスクに最適で、超平滑か
つ超平垣な表面性を有する高性能なガラス基板を、安価
に提供することを目的とする。SUMMARY OF THE INVENTION The present invention is suitable for a magnetic disk by incorporating the features of a direct press method capable of shortening the tact time and the features of a reheat press method capable of easily obtaining the shape accuracy of a molded product. Therefore, an object of the present invention is to provide a high-performance glass substrate having an ultra-smooth and super-flat surface at a low cost.
【0016】[0016]
【課題を解決するための手段】前記課題を解決するため
に、本発明のガラス基板成形用金型は、プレス成形面が
平面である一対の金型のうち少なくとも一方の金型の中
心部から同心円状に形成された貫通孔に内側金型を配置
することによって、一対の金型のうち少なくとも一方の
金型が外側金型と内側金型とを具備することを特徴とす
る。In order to solve the above-mentioned problems, a glass substrate molding die according to the present invention has a press-formed surface which is flat from at least one of a pair of dies. By arranging the inner mold in the through hole formed concentrically, at least one of the pair of molds is provided with an outer mold and an inner mold.
【0017】本発明のガラス基板成形用金型において、
一対の金型の両方の金型の中心部から同心円状に形成さ
れた同じ貫通孔に内側金型が配置され、かつ内側金型の
プレス成形面が嵌合する下型の凹形状と上型の凸形状と
の組み合わせで構成されていることが好ましい。また、
内側金型の外径がガラス基板の内径と同じであることが
好ましい。内側金型をこのような構成とすることによ
り、基板の内径部すなわち廃材の板厚を薄くすることに
よって、廃棄材料を減らすことができる。In the mold for molding a glass substrate of the present invention,
The inner mold is disposed in the same through hole formed concentrically from the center of both molds of the pair of molds, and the concave shape of the lower mold and the upper mold in which the press molding surfaces of the inner mold are fitted. It is preferable to be configured in combination with the convex shape. Also,
Preferably, the outer diameter of the inner mold is the same as the inner diameter of the glass substrate. With such a configuration of the inner mold, the inner diameter of the substrate, that is, the thickness of the waste material is reduced, so that the waste material can be reduced.
【0018】さらに、外側金型と内側金型とが互いに断
熱的に配置されていることが好ましく、内側金型のプレ
ス面が、外側金型のプレス面よりも熱伝導率が高くかつ
熱容量が小さい材料で構成されていることが好ましい。
外側金型と内側金型をこのような構成とすることによ
り、内側金型に高温軟化状態のガラス塊を落としても、
ガラス塊が急冷されず、粘度の低い状態に保たれるた
め、小さな成形圧力で成形することができる。Further, it is preferable that the outer mold and the inner mold are arranged insulated from each other, and the press surface of the inner mold has higher heat conductivity and heat capacity than the press surface of the outer mold. It is preferable to be made of a small material.
By making the outer mold and the inner mold have such a configuration, even if a high temperature softened glass lump is dropped on the inner mold,
Since the glass block is not rapidly cooled and kept in a low viscosity state, it can be formed with a small forming pressure.
【0019】本発明のガラス基板の製造装置は、前記本
発明のガラス基板成形用金型と、前記金型の内側金型及
び外側金型の両者のガラス受け面高さが一致する第1基
準位置と一致しない第2の基準位置に前記内側金型を位
置決めする位置決め手段と、前記内側金型と前記外側金
型とを第1基準位置に配置し両者を同時にプレス成形し
た後、前記内側金型のみを第2基準位置までさらにプレ
スし剪断力によってガラス基板の内径部を抜き取る加工
を施す成形手段とを具備することを特徴とする。The apparatus for manufacturing a glass substrate of the present invention is characterized in that the glass receiving mold of the present invention and the inner and outer dies have the same first glass receiving surface height. Positioning means for positioning the inner mold at a second reference position which does not coincide with the position; and arranging the inner mold and the outer mold at a first reference position, press-molding both at the same time, and then pressing the inner mold. Forming means for further pressing only the mold to the second reference position and extracting the inner diameter portion of the glass substrate by shearing force.
【0020】本発明のガラス基板の製造方法は、前記本
発明のガラス基板成形用金型によりガラス塊をプレス成
形してガラス基板を得る製造方法であって、外側金型と
内側金型とを異なる温度に設定することを特徴とする。
特に、外側金型の温度をガラス転移温度に設定し、内側
金型をガラス転移温度からガラス軟化温度の間の温度に
設定することが好ましい。The method for producing a glass substrate of the present invention is a method for producing a glass substrate by press-molding a glass lump using the mold for molding a glass substrate of the present invention, wherein the outer mold and the inner mold are separated. It is characterized in that different temperatures are set.
In particular, it is preferable to set the temperature of the outer mold to the glass transition temperature and set the inner mold to a temperature between the glass transition temperature and the glass softening temperature.
【0021】また、本発明のガラス基板の製造方法にお
いて、内側金型及び外側金型の両者のガラス受け面高さ
が一致する第1基準位置に両者を配置し両者を同時にプ
レス成形した後、前記内側金型のみを両者のガラス受け
面高さが一致しない第2基準位置までさらにプレスし剪
断力によってガラス基板の内径部を抜き取ることがさら
に好ましい。このような方法により、成形工程の中で内
径部の打抜き加工を行うことができるので、製造工程の
短縮化が実現できる。Further, in the method for manufacturing a glass substrate of the present invention, after placing both the inner mold and the outer mold at the first reference position where the height of the glass receiving surface coincides with each other, and pressing the both at the same time, It is further preferable that only the inner mold is further pressed to a second reference position where the heights of the glass receiving surfaces of the two molds do not coincide with each other, and the inner diameter of the glass substrate is extracted by a shearing force. According to such a method, the inner diameter portion can be punched in the forming process, so that the manufacturing process can be shortened.
【0022】本発明の磁気ディスク用ガラス基板は、前
記本発明のガラス基板の製造方法によって得られる。The glass substrate for a magnetic disk of the present invention is obtained by the above-mentioned method of manufacturing a glass substrate of the present invention.
【0023】[0023]
【発明の実施の形態】以下本発明の実施の形態につい
て、図面を参照しながら説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0024】(実施の形態1)図1は本発明の実施の形
態1におけるガラス基板成形用金型内にガラス塊5を載
置した状態を示す断面図である。(Embodiment 1) FIG. 1 is a sectional view showing a state in which a glass lump 5 is placed in a glass substrate molding die according to Embodiment 1 of the present invention.
【0025】ガラス基板成形用金型は、成形用外側金型
の下型25,上型30と、外側金型25,30の中心部
に形成された貫通穴部に配置されたプレス成形面が凹形
状である内側金型の下型10及びプレス成形面が凸形状
である内側金型の上型85と、成形完了時に外側金型2
5,30の空隙を規制する規制リング35とから構成さ
れている。内側金型の下型10には高温軟化状態のガラ
ス塊5が載置されるため、高温で離型性の良好な材料、
例えばSiCなどの炭化物やカーボン、AlNやTiN
等の窒化物、その他の材料で構成される。内側金型の下
型10全体を前記材料で構成してもよいし、ガラス塊5
の受け面10aのみに前記材料をCVD法などの各種成
膜技術により形成してもよい。この被膜層は単一層であ
る必要はなく、密着強度や耐熱性を向上させるため下地
層を設けることもできる。また、被膜層表面を良好な表
面粗さにするために研磨処理を施すこともできる。The mold for forming a glass substrate includes a lower mold 25 and an upper mold 30 for a molding outer mold, and a press molding surface arranged in a through hole formed in the center of the outer molds 25 and 30. A lower mold 10 having a concave inner mold, an upper mold 85 having an inner mold having a press-formed convex surface, and an outer mold 2 upon completion of molding.
And a regulating ring 35 for regulating the gaps of 5, 30. Since the glass block 5 in a high temperature softened state is placed on the lower mold 10 of the inner mold, a material having good releasability at a high temperature,
For example, carbide and carbon such as SiC, AlN and TiN
And other materials. The entire lower mold 10 of the inner mold may be made of the above material,
The material may be formed only on the receiving surface 10a by various film forming techniques such as the CVD method. The coating layer does not need to be a single layer, and an underlayer may be provided to improve adhesion strength and heat resistance. Further, a polishing treatment can be performed to make the surface of the coating layer have a good surface roughness.
【0026】外側金型25,30及び規制リング35は
タングステンカーバイド(WC)を主成分とする超硬合
金(線膨張係数α=58×10-7)により形成されると
ともに、成形面25a,30aは所望の表面粗さに加工
され、白金(Pt)系の合金保護膜により被膜されてい
る。The outer dies 25, 30 and the regulating ring 35 are made of a cemented carbide (linear expansion coefficient α = 58 × 10 −7 ) containing tungsten carbide (WC) as a main component, and have molding surfaces 25a, 30a. Is processed to a desired surface roughness and is coated with a platinum (Pt) -based alloy protective film.
【0027】図2〜図7は図1に示すガラス基板成形用
金型を用いてガラス基板を成形するための本発明の実施
の形態1におけるガラス基板の製造装置の概略を示す断
面図である。FIGS. 2 to 7 are cross-sectional views schematically showing a glass substrate manufacturing apparatus according to the first embodiment of the present invention for forming a glass substrate using the glass substrate forming die shown in FIG. .
【0028】図2は滴下する高温軟化状態のガラス塊5
を内側金型の下型10に受ける状態を示す外観図であ
る。下型10はガラス塊5を受ける前に加熱装置(図示
せず)によりガラス軟化温度近傍(±50℃程度)以上
の所定温度に加熱されている。従って、高温軟化状態の
ガラス塊が滴下されても、ガラス表面近傍は急激に冷却
されることがなく、ガラス塊5内部は高温度に維持さ
れ、成形用外側金型の温度が低くても従来なみの成形圧
力で成形することが可能になる。FIG. 2 shows a glass mass 5 in a high-temperature softened state to be dropped.
FIG. 2 is an external view showing a state in which the inner mold is received by a lower mold 10 of an inner mold. Before receiving the glass block 5, the lower mold 10 is heated to a predetermined temperature equal to or higher than the glass softening temperature (about ± 50 ° C.) by a heating device (not shown). Therefore, even if the glass lump in the high temperature softened state is dropped, the vicinity of the glass surface is not rapidly cooled, the inside of the glass lump 5 is maintained at a high temperature, and even if the temperature of the outer mold for molding is low, the conventional method is used. Molding can be performed with a normal molding pressure.
【0029】更に、受け面10aの形状は所定重量のガ
ラス塊を適当な厚みと大きさに形成するために緩やかな
凹面としている。すなわち、下型10の温度がガラス軟
化温度近傍以上の所定温度に設定された時、ガラス塊5
の外径が内側金型の下型10の外径と略々同じになるよ
うに形状が求められている。Further, the shape of the receiving surface 10a is a gentle concave surface in order to form a glass block having a predetermined weight into an appropriate thickness and size. That is, when the temperature of the lower mold 10 is set to a predetermined temperature equal to or higher than the glass softening temperature,
Is required to have an outer diameter substantially equal to the outer diameter of the lower mold 10 of the inner mold.
【0030】内側金型の下型10は金型搬送部材15に
よって断熱的に保持され、ガラス溶解炉1の滴下口2の
下に搬送され、高温軟化状態のガラス塊5が所定量滴下
される。The lower mold 10 of the inner mold is held adiabatically by the mold conveying member 15 and conveyed below the dropping port 2 of the glass melting furnace 1 to drop a predetermined amount of the glass mass 5 in a high temperature softened state. .
【0031】図3は、内側金型の下型を成形装置に設置
する工程を示すための成形装置の概略断面図である。成
形装置20はヒータブロック50,53、断熱部材5
5,56、冷却部材60,65がボルトなどの締結部材
で互いに固定され、一対の成形用外側金型25,30が
固定リング40,45を介してそれぞれヒータブロック
50,53に固定されている。FIG. 3 is a schematic cross-sectional view of the molding apparatus for illustrating a step of installing the lower mold of the inner mold in the molding apparatus. The molding device 20 includes the heater blocks 50 and 53 and the heat insulating member 5.
The cooling members 60 and 65 are fixed to each other by fastening members such as bolts, and a pair of outer molding dies 25 and 30 are fixed to the heater blocks 50 and 53 via fixing rings 40 and 45, respectively. .
【0032】規制リング35は外側金型の上型30のつ
ば部に設置され、固定リング45によって上型30と一
体的に固定されている。成形時は規制リング35の端面
35aが外側金型の下型25のつば部25bと当接し、
成形品の厚みを決定することになる。成形用外側金型2
5,30はヒータブロック50,53に埋め込まれた複
数の直管式カートリッジヒータ51,54によりガラス
軟化温度近傍(±50℃程度)とガラス転移温度近傍
(±50℃程度)との間の所定温度に加熱される。支持
部材70は断熱部材55を介して冷却部材60に固定さ
れている。The regulating ring 35 is installed on the flange of the upper die 30 of the outer mold, and is fixed integrally with the upper die 30 by the fixing ring 45. At the time of molding, the end surface 35a of the regulating ring 35 contacts the flange 25b of the lower mold 25 of the outer mold,
This will determine the thickness of the molded article. Outer mold for molding 2
Reference numerals 5 and 30 denote predetermined temperatures between the vicinity of the glass softening temperature (about ± 50 ° C.) and the vicinity of the glass transition temperature (about ± 50 ° C.) by a plurality of straight tube type cartridge heaters 51 and 54 embedded in the heater blocks 50 and 53. Heated to temperature. The support member 70 is fixed to the cooling member 60 via the heat insulating member 55.
【0033】金型搬送部材15に保持された内側金型の
下型10は成形用外側金型25の中央部に形成された貫
通孔部26に搬送され、下型10の勘合部10bが支持
部材70の貫通孔71に挿入され、下型10の底面10
cが高さ調整部材79に当接する高さで位置決めされ
る。この状態で下型10は支持部材70の貫通孔71に
金型搬送部材15から自立可能に支持され、金型搬送部
材15は成形装置20より除かれる。The lower mold 10 of the inner mold held by the mold conveying member 15 is conveyed to a through hole 26 formed at the center of the outer mold 25 for molding, and the fitting portion 10b of the lower mold 10 is supported. Inserted into the through hole 71 of the member 70, the bottom surface 10 of the lower die 10
c is positioned at a height at which it contacts the height adjustment member 79. In this state, the lower mold 10 is supported by the through hole 71 of the support member 70 so as to be able to stand by itself from the mold conveying member 15, and the mold conveying member 15 is removed from the molding apparatus 20.
【0034】図4は内側金型の下型を成形可能な位置に
配置する工程を示すための成形装置の概略断面図であ
る。下型10の装着が完了すると、高さ調整部材79は
駆動手段(図示せず)により金型受け台75の内部に収
納される。高さ調整部材79の先端に当接している下型
10も金型受け台75の端面75aに当接する位置まで
高さ調整部材79と同期して摺動する。FIG. 4 is a schematic sectional view of a molding apparatus for illustrating a step of arranging the lower mold of the inner mold at a position where molding is possible. When the mounting of the lower mold 10 is completed, the height adjusting member 79 is housed in the mold receiving base 75 by a driving means (not shown). The lower mold 10 in contact with the tip of the height adjustment member 79 also slides in synchronization with the height adjustment member 79 to a position where it contacts the end face 75a of the mold receiving base 75.
【0035】金型受け台75はプレス軸77を介して、
油圧シリンダ−78に係合しており、油圧シリンダー7
8によって、べース部材21の位置決め面21aに押圧
位置決めされている。The mold receiving base 75 is formed via a press shaft 77,
The hydraulic cylinder 7 is engaged with the hydraulic cylinder -78.
8, the base member 21 is pressed and positioned on the positioning surface 21a of the base member 21.
【0036】なお、このとき下型10は成形用外側金型
の下型25と200〜300μmの空隙を介して断熱的
に配置され、下型10の急激な温度変動を防止してい
る。更に、下型10の勘合部10bと接触している支持
部材70は断熱部材55を介して固定されるとともにヒ
ータブロック50とも200〜300μmの空隙を介し
て断熱的に配置されており、下型10の勘合部10bの
急激な温度変動を防止している。尚、内側金型としてS
iCなどの炭化物成形体や、AlNやTiN等の窒化物
成形体等のセラミック材料などを用いれば、外側金型と
の空隙を設ける必要はない。At this time, the lower mold 10 is adiabatically arranged with the lower mold 25 of the outer mold for molding through a gap of 200 to 300 μm to prevent a rapid temperature change of the lower mold 10. Further, the support member 70 which is in contact with the fitting portion 10b of the lower mold 10 is fixed via the heat insulating member 55, and is also insulated with the heater block 50 via a gap of 200 to 300 μm. Sudden temperature fluctuation of the ten fitting portions 10b is prevented. In addition, S
If a ceramic material such as a carbide molded body such as iC or a nitride molded body such as AlN or TiN is used, it is not necessary to provide a gap with the outer mold.
【0037】図5はガラス基板の成形工程を示すための
成形装置の概略断面図である。上側の冷却部材65には
プレス軸80が固定されており、このプレス軸80が油
圧シリンダー81に組み込まれている。成形用外側金型
の上型30の貫通孔部に配置された内側金型の上型85
はプレス軸82を介して油圧シリンダー83に組み込ま
れている。油圧シリンダー83は冷却部材65のプレス
軸80に固定されている。したがって、外側金型の上型
30と内側金型の上型85とは油圧シリンダー81と油
圧シリンダー83とによって相対運動可能に支持される
ことになる。FIG. 5 is a schematic sectional view of a molding apparatus for illustrating a molding process of a glass substrate. A press shaft 80 is fixed to the upper cooling member 65, and the press shaft 80 is incorporated in a hydraulic cylinder 81. Upper die 85 of the inner die placed in the through hole of the upper die 30 of the outer die for molding
Are incorporated in a hydraulic cylinder 83 via a press shaft 82. The hydraulic cylinder 83 is fixed to a press shaft 80 of the cooling member 65. Therefore, the upper mold 30 of the outer mold and the upper mold 85 of the inner mold are supported by the hydraulic cylinder 81 and the hydraulic cylinder 83 so as to be capable of relative movement.
【0038】また、内側金型の上型85のガラス塊との
接触面85aは内側金型の下型10の凹形状と嵌合する
同一形状の凸形状である。これによって成形した時、ガ
ラス基板の厚みが均一となる。下型10と上型85とで
成形される部分はガラス基板の内径部であり廃材として
処理される。したがって、本発明におけるこのような金
型形状を有することによって廃材量を少なくし材料費を
押さえることができる。また、上型85の内部にはヒー
タ(図示せず)が配置され、上型をガラス軟化温度とガ
ラス転移温度との間の所定温度に加熱している。したが
って、ガラス塊を粘度の高い状態で成形できるため、成
形圧力を高くする必要がない。The contact surface 85a of the upper mold 85 of the inner mold with the glass block has the same convex shape that fits into the concave shape of the lower mold 10 of the inner mold. Thus, when molded, the thickness of the glass substrate becomes uniform. The portion formed by the lower mold 10 and the upper mold 85 is the inner diameter of the glass substrate and is treated as waste material. Therefore, by having such a mold shape in the present invention, it is possible to reduce the amount of waste material and the material cost. A heater (not shown) is disposed inside the upper die 85 to heat the upper die to a predetermined temperature between a glass softening temperature and a glass transition temperature. Therefore, since the glass lump can be molded in a state of high viscosity, there is no need to increase the molding pressure.
【0039】規制リング35は成形ガラス基板6の厚み
を決定するために、成形用外側金型の上型30のつば部
に設置され、固定リング45によって上型30と一体的
に固定されている。成形時は規制リング35の端面35
aが成形用外側金型の下型25のつば部25bと当接す
るまで押し切り、一定期間後、上型を開放し成形が完了
することになる。この時、内側金型の下型10と上型8
5とはガラス基板を成形可能な第1の基準位置に配置さ
れている。The regulating ring 35 is installed on the flange of the upper die 30 of the outer mold for molding to determine the thickness of the molded glass substrate 6, and is fixed integrally with the upper die 30 by the fixing ring 45. . During molding, the end surface 35 of the regulating ring 35
A is pushed off until it contacts the flange 25b of the lower mold 25 of the outer mold for molding, and after a certain period of time, the upper mold is opened to complete the molding. At this time, the lower mold 10 and the upper mold 8 of the inner mold
Reference numeral 5 denotes a first reference position at which a glass substrate can be formed.
【0040】外側金型25,30は母材としてタングス
テンカーバイド(WC)を主成分とした超硬合金や石英
ガラス等、高温時の機械強度の優れたものがよく、熱膨
張係数が小さいものが望ましい。The outer molds 25 and 30 are preferably made of a material having excellent mechanical strength at a high temperature, such as a cemented carbide or quartz glass mainly containing tungsten carbide (WC) as a base material, and having a small coefficient of thermal expansion. desirable.
【0041】このプレス成形面25a,30aには白金
(Pt)、パラジウム(Pd)、ロジウム(Rh)、ル
テニウム(Ru)、イリジウム(Ir)等の貴金属系金
属またはは合金の材料からなるターゲットをスパッタし
て薄膜状の保護膜を形成しており、高温、高圧下でのガ
ラスのプレス成形の繰り返しによるプレス面への付着及
び母材のプレス成形面の面荒れによる表面平滑性の低下
を防止する。更に、保護膜の平滑性は、磁気ディスク用
としては5nm以下が適当で、望ましくは2nm以下、
さらに望ましくは1nm以下が適当で、このような平滑
面は酸化セリウムの微粒子を用いた研磨によって得るこ
とができる。On the press-formed surfaces 25a and 30a, a target made of a noble metal-based metal such as platinum (Pt), palladium (Pd), rhodium (Rh), ruthenium (Ru), or iridium (Ir) or an alloy material is used. A thin protective film is formed by sputtering, preventing adhesion to the press surface due to repeated press forming of glass under high temperature and high pressure, and deterioration of surface smoothness due to surface roughening of the base metal press formed surface. I do. Further, the smoothness of the protective film is suitably 5 nm or less for a magnetic disk, preferably 2 nm or less.
More preferably, the thickness is 1 nm or less, and such a smooth surface can be obtained by polishing using fine particles of cerium oxide.
【0042】成形用外側金型25,30の温度はガラス
転移温度近傍(±50℃程度)に設定されており、中央
部の内側金型10,85の温度よりも低い。したがっ
て、ガラス塊5が成形され基板形状になると、ガラス基
板6はガラス軟化温度近傍(±50℃程度)よりガラス
転移温度近傍まで急速に冷却されることになり成形タク
トの大幅な短縮が実現できる。更に、成形用金型のプレ
ス成形面25a,30aは平滑性が良好なため、ガラス
成形面に研磨工程の後工程は不要である。The temperatures of the outer molding dies 25 and 30 are set near the glass transition temperature (about ± 50 ° C.), and are lower than the temperatures of the inner dies 10 and 85 at the center. Therefore, when the glass lump 5 is formed into a substrate shape, the glass substrate 6 is rapidly cooled from the vicinity of the glass softening temperature (approximately ± 50 ° C.) to the vicinity of the glass transition temperature, so that the molding tact can be significantly reduced. . Furthermore, since the press forming surfaces 25a and 30a of the forming die have good smoothness, no post-process is required after the polishing process on the glass forming surface.
【0043】図6は成形されたガラス基板の内径部を切
断する加工工程を示す成形装置の概略断面図である。FIG. 6 is a schematic sectional view of a forming apparatus showing a processing step of cutting the inner diameter portion of the formed glass substrate.
【0044】油圧シリンダー81を駆動し、成形用外側
金型の上型30及び内側金型の上型85を所定圧力で抑
圧し、規制リング35が成形用外側金型の下型25のつ
ば部25bに接触し基板成形が完了した時点で、内側金
型の上型85を油圧シリンダー83によって駆動し更に
押圧する。それによって、ガラス基板6は剪断力によっ
て上型85のプレス面に沿って剪断力により抜き加工が
施され、ガラス基板6と内径部7とに分離される。それ
と同時に、内側金型の下型10と一体的に係合する油圧
シリンダー78の押圧力が抜け、下型10は金型受け台
75、基板内径部7、上型85を介して、油圧シリンダ
ー83の押圧力により、ベース22の位置決め面22a
に押圧位置決めされる。The hydraulic cylinder 81 is driven to suppress the upper mold 30 of the outer mold for molding and the upper mold 85 of the inner mold at a predetermined pressure, and the restricting ring 35 is engaged with the flange of the lower mold 25 of the outer mold for molding. 25b, when the substrate molding is completed, the upper die 85 of the inner mold is driven by the hydraulic cylinder 83 and further pressed. Thereby, the glass substrate 6 is subjected to the punching process by the shearing force along the pressing surface of the upper die 85 by the shearing force, and is separated into the glass substrate 6 and the inner diameter portion 7. At the same time, the pressing force of the hydraulic cylinder 78 integrally engaging with the lower mold 10 of the inner mold is released, and the lower mold 10 is moved to the hydraulic cylinder 78 via the mold receiving base 75, the substrate inner diameter portion 7, and the upper mold 85. 83, the positioning surface 22a of the base 22
Is pressed and positioned.
【0045】ガラス基板6と内径部7の板厚は同一であ
る必要はなく、内径部7の厚みを相対的に薄くすれば、
廃材量が削減できるだけでなく、より小さなプレス圧力
で打ち抜くことができる。The thickness of the glass substrate 6 and the inner diameter portion 7 do not need to be the same, and if the thickness of the inner diameter portion 7 is made relatively thin,
Not only the amount of waste material can be reduced, but also punching can be performed with a smaller press pressure.
【0046】図7はガラス基板を成形装置から次工程へ
移載する工程を示すための成形装置の概略断面図であ
る。FIG. 7 is a schematic sectional view of the molding apparatus for showing a step of transferring the glass substrate from the molding apparatus to the next step.
【0047】上側の油圧シリンダー81によって、成形
用外側金型の上型30を含むユニットが引き上げられ、
移載部材95がガラス基板6上方に移動してくる。移載
部材95はガラス基板6と接触する突起部95aと、内
径部7と接触する突起部95bとを有し、各突起部には
空気を導入するための孔95c,95dが独立して形成
されている。したがって、成形装置20から外部へ移載
する場合は、孔95c,95dより空気を吸入し、ガラ
ス基板6、内径部7を吸着し、所定の場所で孔95dよ
り空気を排出し内径部7を外し、次工程で孔95cより
空気を排出しガラス基板6を外し次工程への移載が完了
する。The unit including the upper mold 30 of the outer mold for molding is raised by the upper hydraulic cylinder 81,
The transfer member 95 moves above the glass substrate 6. The transfer member 95 has a projection 95a in contact with the glass substrate 6 and a projection 95b in contact with the inner diameter section 7. Holes 95c and 95d for introducing air are independently formed in each projection. Have been. Therefore, when transferring from the molding apparatus 20 to the outside, air is sucked in from the holes 95c and 95d, the glass substrate 6 and the inner diameter portion 7 are sucked, and air is discharged from the hole 95d at a predetermined place to remove the inner diameter portion 7. In the next step, air is discharged from the hole 95c to remove the glass substrate 6, and the transfer to the next step is completed.
【0048】(実施の形態2)図8は本発明の実施の形
態2におけるガラス基板成形用金型内にガラス塊5を載
置した状態を示す断面図である。(Embodiment 2) FIG. 8 is a sectional view showing a state in which a glass lump 5 is placed in a glass substrate molding die according to Embodiment 2 of the present invention.
【0049】ガラス基板成形用金型は、成形用外側金型
の下型25,上型30と、外側金型25,30の中心部
に形成された貫通穴部に配置された内側金型の下型10
及び上型85と、成形完了時に外側金型25,30の空
隙を規制する規制リング35とから構成されている。内
側金型の下型10の受け面10dは平面で、かつ熱伝導
性が良好で熱容量の小さなSiCなどの炭化物やグラッ
シーカーボンその他で構成されており、高温軟化状態の
ガラス塊5は載置されても、ガラス塊が急激に冷却され
ることがないため、ガラス塊表面に冷却によるしわが発
生しない。したがって、成形しても表面性の良好なガラ
ス基板を得ることができる。The glass substrate forming die is composed of a lower die 25 and an upper die 30 for forming an outer die and an inner die disposed in a through hole formed in the center of the outer die 25 and 30. Lower mold 10
And an upper mold 85, and a regulating ring 35 for regulating the gap between the outer molds 25 and 30 when the molding is completed. The receiving surface 10d of the lower mold 10 of the inner mold is flat and made of carbide such as SiC, glassy carbon or the like having good heat conductivity and small heat capacity, and the glass mass 5 in a high temperature softened state is placed thereon. However, since the glass block is not rapidly cooled, wrinkles due to cooling do not occur on the surface of the glass block. Therefore, a glass substrate having good surface properties can be obtained even when molded.
【0050】また、成形用外側金型25,30と内側金
型10,85とは互いに空隙を介して配置することによ
って互いに断熱されている。The outer molds 25, 30 and the inner molds 10, 85 are insulated from each other by arranging them with a gap therebetween.
【0051】成形工程はガラス塊の載置方法を除き、実
施の形態1と同じである。すなわち、実施の形態2にお
けるガラス塊5は載置部材(図示せず)で、成形装置に
配置した内側金型の下型10の受け面10dまで運ばれ
載置されることになる。The forming process is the same as that of the first embodiment except for the method of placing the glass block. That is, the glass lump 5 in the second embodiment is carried by the placing member (not shown) to the receiving surface 10d of the lower die 10 of the inner mold arranged in the forming apparatus and is placed.
【0052】なお、ここでは上下の金型を外側金型と内
側金型とに分離した場合を説明したが、上側だけ分離し
た場合でも、下側だけ分離した場合でも良い。このよう
な場合はガラス基板の内径部が打ち抜かれない基板が製
造されることもあるが、外側金型に対する内側金型の位
置決めを調整することにより、厚みの薄い内径部を有す
るガラス基板が製造することが可能で、その後の内径部
を削除する工程における加工時間の短縮や加工の容易
化、廃材量の削減につながる。Here, the case where the upper and lower dies are separated into the outer die and the inner die has been described. However, either the upper die or the lower die may be separated. In such a case, a substrate in which the inner diameter portion of the glass substrate is not punched may be manufactured, but by adjusting the positioning of the inner mold with respect to the outer mold, a glass substrate having a thin inner diameter portion is manufactured. It is possible to shorten the processing time, facilitate the processing, and reduce the amount of waste material in the subsequent step of removing the inner diameter portion.
【0053】[0053]
【実施例】(実施例1)つぎに、本発明の磁気ディスク
用基板の製造方法につい図1〜図7により具体的に説明
する。(Embodiment 1) Next, a method for manufacturing a magnetic disk substrate according to the present invention will be specifically described with reference to FIGS.
【0054】ガラス転移温度Tg=501℃、ガラス軟
化温度Ts=670℃、線膨張係数α=95×10-7の
アルミノシリケートガラスを、内径6mmの白金製ノズ
ルより粘度200ポアズとして安定して滴下させた。Aluminosilicate glass having a glass transition temperature Tg = 501 ° C., a glass softening temperature Ts = 670 ° C., and a coefficient of linear expansion α = 95 × 10 −7 was stably dropped from a platinum nozzle having an inner diameter of 6 mm with a viscosity of 200 poise. I let it.
【0055】内側金型の下型の10は材質は耐熱鋼(ス
テンレス)を用いた。また、ガラス塊の受け面にはCV
D法によりSiC薄膜を形成している。また、受け面1
0aの外径は24mmである。The lower mold 10 of the inner mold was made of heat-resistant steel (stainless steel). In addition, CV
A SiC thin film is formed by the D method. In addition, receiving surface 1
The outer diameter of Oa is 24 mm.
【0056】内側金型の下型全体は700℃に加熱して
あるため高温軟化状態のガラス塊が滴下されても、ガラ
ス表面近傍は急激に冷却されることがなく、ガラス塊5
内部は高温度に維持され、外側金型の温度が低くても従
来なみの成形圧力での粘度は316万ポアズになり、重
量は6.5g±0.5g、外径22.3mm±0.3m
m、厚み8mm±0.5mmのマーブル形状のガラス塊
が得られる。Since the entire lower mold of the inner mold is heated to 700 ° C., even if a glass lump in a high-temperature softened state is dropped, the vicinity of the glass surface is not rapidly cooled.
The inside is maintained at a high temperature, the viscosity at the conventional molding pressure becomes 3.16 million poise even when the temperature of the outer mold is low, the weight is 6.5 g ± 0.5 g, and the outer diameter is 22.3 mm ± 0. 3m
m, a marble-shaped glass lump having a thickness of 8 mm ± 0.5 mm is obtained.
【0057】成形条件として、成形用外側金型25,3
0は500℃、内側金型の上型85は700℃、成形圧
力を400kg/cm2 とし、成形時間は1分間とし、
この間に内側金型の上型85により内径部の打抜き加工
を実施した。その後加熱を停止し、プレス圧力を100
kg/cm2 とし冷却を行い、ヒータの温度モニターが
400℃で離型し、移載部材95により、ガラス基板6
と内径部7とを吸着し次工程に移載して成形が終了す
る。As the molding conditions, the outer molding dies 25, 3
0 is 500 ° C., the upper mold 85 of the inner mold is 700 ° C., the molding pressure is 400 kg / cm 2 , the molding time is 1 minute,
In the meantime, the inner die was punched by the upper die 85 of the inner die. Thereafter, the heating was stopped and the pressing pressure was increased to 100
kg / cm 2 , cooling was performed, and the temperature monitor of the heater was released from the mold at 400 ° C.
And the inner diameter portion 7 is adsorbed and transferred to the next step to complete the molding.
【0058】このようにして得られた磁気ディスク用ガ
ラス基板6の形状は、外径70mm、厚み0.635m
m、内径24mmである。The shape of the glass substrate 6 for a magnetic disk thus obtained has an outer diameter of 70 mm and a thickness of 0.635 m.
m, inner diameter 24 mm.
【0059】平滑性はRa=0.5nm±0.2nmと
なり、成形用外側金型25,30のプレス成形面25
a,30aの平滑性がほぼそのまま転写されること確認
した。The smoothness is Ra = 0.5 nm ± 0.2 nm, and the press forming surfaces 25 of the outer molds 25 and 30 are formed.
It was confirmed that the smoothness of a and 30a was transferred almost as it was.
【0060】以上、本発明の実施例について説明した
が、成形用外側金型の温度は、ガラス転移温度に限定さ
れるものではなく、ガラス転移温度±100℃の温度範
囲で設定が可能である。Although the embodiment of the present invention has been described above, the temperature of the outer mold for molding is not limited to the glass transition temperature, but can be set within a temperature range of ± 100 ° C. .
【0061】[0061]
【発明の効果】本発明によれば、超平滑及び超平坦な表
面性を有する高精度な磁気ディスク用ガラス基板を安価
にかつ大量に製造することができる。また、本発明によ
れば、ディスクの内径部廃材の重量を削減し材料費を押
さえることができ、さらに、成形工程に打抜き加工を同
時に行うことができるので、工程削減、タクトアップが
実現できる。According to the present invention, a high-precision glass substrate for a magnetic disk having an ultra-smooth and ultra-flat surface property can be manufactured inexpensively and in large quantities. Further, according to the present invention, it is possible to reduce the material cost by reducing the weight of the waste material at the inner diameter portion of the disk, and furthermore, it is possible to simultaneously perform the punching process in the molding process, so that it is possible to reduce the process and increase the tact time.
【図1】実施の形態1におけるガラス基板成形用金型内
にガラス塊を載置した状態を示す断面図である。FIG. 1 is a cross-sectional view showing a state in which a glass lump is placed in a glass substrate molding die according to a first embodiment.
【図2】実施の形態1において、滴下する高温軟化状態
のガラス塊を内側金型の下型に受ける状態を示す外観図
である。FIG. 2 is an external view showing a state in which a dropped glass lump in a high-temperature softened state is received by a lower mold of an inner mold in the first embodiment.
【図3】実施の形態1において、内側金型の下型を成形
装置に設置する工程を示すための成形装置の概略断面図
である。FIG. 3 is a schematic cross-sectional view of the molding apparatus for illustrating a step of installing the lower mold of the inner mold in the molding apparatus in the first embodiment.
【図4】実施の形態1において、内側金型の下型を成形
可能な位置に配置する工程を示すための成形装置の概略
断面図である。FIG. 4 is a schematic cross-sectional view of a molding apparatus for illustrating a step of disposing a lower mold of an inner mold at a position where molding is possible in the first embodiment.
【図5】実施の形態1における成形工程を示すための成
形装置の概略断面図である。FIG. 5 is a schematic sectional view of a molding apparatus for illustrating a molding step in the first embodiment.
【図6】実施の形態1において、成形されたガラス基板
の内径部を切断する加工工程を示すための成形装置の概
略断面図である。FIG. 6 is a schematic cross-sectional view of a forming apparatus for illustrating a processing step of cutting an inner diameter portion of a formed glass substrate in the first embodiment.
【図7】実施の形態1において、ガラス基板を成形装置
から次工程へ移載する工程を示すための成形装置の概略
断面図である。FIG. 7 is a schematic cross-sectional view of the forming apparatus for illustrating a step of transferring the glass substrate from the forming apparatus to the next step in the first embodiment.
【図8】実施の形態2におけるガラス基板成形用金型内
にガラス塊を載置した状態を示す断面図である。FIG. 8 is a cross-sectional view showing a state in which a glass lump is placed in a glass substrate molding die according to a second embodiment.
1 ガラス溶融炉 5 ガラス塊 10 内側金型の下型 15 金型搬送部材 20 成形装置 25 成形用外側金型の下型 30 成形用外側金型の上型 35 規制リング 40 固定リング 45 固定リング 50 ヒータブロック 53 ヒータブロック 55 断熱部材 56 断熱部材 60 冷却部材 65 冷却部材 70 支持部材 75 金型受け台 79 高さ調整部材 85 内側金型の上型 95 移載部材 DESCRIPTION OF SYMBOLS 1 Glass melting furnace 5 Glass lump 10 Lower mold of inner mold 15 Mold conveying member 20 Molding device 25 Lower mold of outer mold for molding 30 Upper mold of outer mold for molding 35 Regulation ring 40 Fixing ring 45 Fixing ring 50 Heater block 53 Heater block 55 Insulating member 56 Insulating member 60 Cooling member 65 Cooling member 70 Supporting member 75 Mold receiving stand 79 Height adjusting member 85 Upper mold of inner mold 95 Transferring member
フロントページの続き (72)発明者 高木 一彰 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 奥山 富士夫 大阪府門真市大字門真1006番地 松下電器 産業株式会社内Continuing on the front page (72) Inventor Kazuaki Takagi 1006 Kazuma Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd.
Claims (10)
うち少なくとも一方の金型の中心部から同心円状に形成
された貫通孔に内側金型を配置することによって、一対
の金型のうち少なくとも一方の金型が外側金型と内側金
型とを具備することを特徴とするガラス基板成形用金
型。An inner mold is disposed in a through hole formed concentrically from a center of at least one of a pair of molds having a flat press-molded surface, so that a pair of molds is formed. A mold for molding a glass substrate, wherein at least one of the molds includes an outer mold and an inner mold.
心円状に形成された同じ貫通孔に内側金型が配置され、
かつ内側金型のプレス成形面が嵌合する下型の凹形状と
上型の凸形状との組み合わせで構成されている請求項1
に記載のガラス基板成形用金型。2. An inner mold is disposed in the same through hole formed concentrically from the center of both molds of the pair of molds,
And a combination of a concave shape of the lower die and a convex shape of the upper die into which the press-formed surface of the inner die is fitted.
4. The mold for molding a glass substrate according to item 1.
じである請求項1または2に記載のガラス基板成形用金
型。3. The glass substrate molding die according to claim 1, wherein the outer diameter of the inner die is the same as the inner diameter of the glass substrate.
配置されている請求項1〜3のいずれか1項に記載のガ
ラス基板成形用金型。4. The glass substrate molding die according to claim 1, wherein the outer die and the inner die are arranged insulated from each other.
ス面よりも熱伝導率が高くかつ熱容量が小さい材料で構
成されている請求項1〜4のいずれか1項に記載のガラ
ス基板成形用金型。5. The glass according to claim 1, wherein the pressed surface of the inner mold is made of a material having a higher thermal conductivity and a smaller heat capacity than the pressed surface of the outer mold. Mold for substrate molding.
ラス基板成形用金型と、前記金型の内側金型及び外側金
型の両者のガラス受け面高さが一致する第1基準位置と
一致しない第2の基準位置に前記内側金型を位置決めす
る位置決め手段と、前記内側金型と前記外側金型とを第
1基準位置に配置し両者を同時にプレス成形した後、前
記内側金型のみを第2基準位置までさらにプレスし剪断
力によってガラス基板の内径部を抜き取る加工を施す成
形手段とを具備するガラス基板の製造装置。6. A first glass substrate molding die according to claim 1, wherein the inner and outer dies have the same glass receiving surface height. Positioning means for positioning the inner mold at a second reference position which does not coincide with the reference position; and arranging the inner mold and the outer mold at the first reference position, press-molding both at the same time, A molding means for further pressing the mold only to the second reference position and extracting the inner diameter portion of the glass substrate by a shearing force.
ラス基板成形用金型によりガラス塊をプレス成形してガ
ラス基板を得る製造方法であって、外側金型と内側金型
とを異なる温度に設定することを特徴とするガラス基板
の製造方法。7. A method for producing a glass substrate by press-molding a glass lump using the glass substrate molding die according to any one of claims 1 to 5, wherein the outer die and the inner die are provided. A glass substrate at a different temperature.
し、内側金型をガラス転移温度からガラス軟化温度の間
の温度に設定する請求項7に記載のガラス基板の製造方
法。8. The method according to claim 7, wherein the temperature of the outer mold is set to a glass transition temperature, and the temperature of the inner mold is set to a temperature between the glass transition temperature and the glass softening temperature.
け面高さが一致する第1基準位置に両者を配置し両者を
同時にプレス成形した後、前記内側金型のみを両者のガ
ラス受け面高さが一致しない第2基準位置までさらにプ
レスし剪断力によってガラス基板の内径部を抜き取る請
求項7または8に記載のガラス基板の製造方法。9. After placing both the inner mold and the outer mold at a first reference position where the heights of the glass receiving surfaces are the same, press-molding the two molds at the same time, and then setting only the inner mold to the two glass molds. 9. The method of manufacturing a glass substrate according to claim 7, wherein the glass substrate is further pressed to a second reference position where the surface heights do not match, and the inner diameter of the glass substrate is extracted by a shearing force.
ガラス基板の製造方法によって得られる磁気ディスク用
ガラス基板。10. A glass substrate for a magnetic disk obtained by the method for manufacturing a glass substrate according to claim 7. Description:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12445399A JP2000319026A (en) | 1999-04-30 | 1999-04-30 | Die for forming glass substrate, apparatus for producing glass substrate, production of glass substrate and glass substrate for magnetic disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12445399A JP2000319026A (en) | 1999-04-30 | 1999-04-30 | Die for forming glass substrate, apparatus for producing glass substrate, production of glass substrate and glass substrate for magnetic disk |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000319026A true JP2000319026A (en) | 2000-11-21 |
Family
ID=14885906
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12445399A Pending JP2000319026A (en) | 1999-04-30 | 1999-04-30 | Die for forming glass substrate, apparatus for producing glass substrate, production of glass substrate and glass substrate for magnetic disk |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013234090A (en) * | 2012-05-09 | 2013-11-21 | Konica Minolta Inc | Method and apparatus for manufacturing glass sheet |
JP2013234091A (en) * | 2012-05-09 | 2013-11-21 | Konica Minolta Inc | Method and apparatus for manufacturing glass sheet |
US12234175B1 (en) * | 2024-04-16 | 2025-02-25 | Corning Incorporated | Glass parts and gob-pressing methods for making such |
-
1999
- 1999-04-30 JP JP12445399A patent/JP2000319026A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013234090A (en) * | 2012-05-09 | 2013-11-21 | Konica Minolta Inc | Method and apparatus for manufacturing glass sheet |
JP2013234091A (en) * | 2012-05-09 | 2013-11-21 | Konica Minolta Inc | Method and apparatus for manufacturing glass sheet |
US12234175B1 (en) * | 2024-04-16 | 2025-02-25 | Corning Incorporated | Glass parts and gob-pressing methods for making such |
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