JP2000309760A - Double-coated pressure-sensitive adhesive tape - Google Patents
Double-coated pressure-sensitive adhesive tapeInfo
- Publication number
- JP2000309760A JP2000309760A JP11819599A JP11819599A JP2000309760A JP 2000309760 A JP2000309760 A JP 2000309760A JP 11819599 A JP11819599 A JP 11819599A JP 11819599 A JP11819599 A JP 11819599A JP 2000309760 A JP2000309760 A JP 2000309760A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive adhesive
- surface plate
- adhesive tape
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004820 Pressure-sensitive adhesive Substances 0.000 title claims abstract description 39
- 238000005498 polishing Methods 0.000 claims abstract description 22
- 239000000853 adhesive Substances 0.000 claims abstract description 16
- 230000001070 adhesive effect Effects 0.000 claims abstract description 16
- 229920001971 elastomer Polymers 0.000 claims abstract description 9
- 239000003431 cross linking reagent Substances 0.000 claims abstract description 5
- 244000043261 Hevea brasiliensis Species 0.000 claims abstract description 4
- 239000007788 liquid Substances 0.000 claims abstract description 4
- 229920003052 natural elastomer Polymers 0.000 claims abstract description 4
- 229920001194 natural rubber Polymers 0.000 claims abstract description 4
- 125000000524 functional group Chemical group 0.000 claims abstract 2
- 239000002390 adhesive tape Substances 0.000 claims description 12
- 239000011347 resin Substances 0.000 claims description 12
- 229920005989 resin Polymers 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 239000003522 acrylic cement Substances 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- -1 polyethylene Polymers 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229920001519 homopolymer Polymers 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000010008 shearing Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 208000028659 discharge Diseases 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000013464 silicone adhesive Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Adhesives Or Adhesive Processes (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Adhesive Tapes (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、レンズ、ガラス、
アルミディスク、ウエハー等の被研磨材を研磨するため
の研磨材をポリッシングマシーンの定盤に固定するため
の両面粘着テープに関する。TECHNICAL FIELD The present invention relates to a lens, glass,
The present invention relates to a double-sided adhesive tape for fixing a polishing material for polishing a material to be polished such as an aluminum disk or a wafer to a surface plate of a polishing machine.
【０００２】[0002]
【従来の技術】従来、レンズ、ガラス、アルミディス
ク、ウエハー等を研磨するための研磨材をポリッシング
マシーンの定盤に固定するために両面粘着テープが使用
されてきた。このような両面粘着テープとしては、定盤
に確実に接着できる、研磨時に研磨材が剥がれない、研
磨材を定盤から剥がす際に粘着テープを定盤から容易に
剥がすことができ、定盤に糊残りしないという性能が要
求される。通常の粘着テープの粘着剤としては、初期接
着性と保持性とのバランスをとるためにゲル分率が２０
〜６０％のものが用いられている。2. Description of the Related Art Conventionally, a double-sided adhesive tape has been used to fix an abrasive for polishing a lens, glass, an aluminum disk, a wafer, or the like to a surface plate of a polishing machine. As such a double-sided adhesive tape, the adhesive can be securely adhered to the surface plate, the abrasive does not peel off during polishing, and the adhesive tape can be easily peeled off from the surface plate when the abrasive is peeled off from the surface plate. Performance that does not leave glue is required. As a pressure-sensitive adhesive for a normal pressure-sensitive adhesive tape, a gel fraction of 20 is used in order to balance initial adhesion and retention.
〜60% are used.
【０００３】一方、一部の研磨材が巨大化する傾向にあ
り（例えば、直径１．５ｍ以上の円形）、研磨終了後に
研磨材を定盤から剥がす作業が非常に困難となってき
た。上記の問題に鑑み、使用後の剥離性を改良するため
に種々の提案がなされている。On the other hand, some abrasives tend to be enormous (for example, a circle having a diameter of 1.5 m or more), and it has become extremely difficult to remove the abrasives from the surface plate after polishing. In view of the above problems, various proposals have been made to improve the peelability after use.
【０００４】例えば、特開昭６１−２３６７３号公報に
は、ポリエーテルを含む粘着剤を使用した両面粘着テー
プで研磨材を定盤に固定することが記載されているが、
使用後に定盤から剥離する際には５０〜１５０℃に加熱
する必要があり、大型の定盤に貼付した研磨材を能率的
に剥離するための方法としては適当ではない。For example, Japanese Patent Application Laid-Open No. 61-23673 describes that an abrasive is fixed to a surface plate with a double-sided adhesive tape using an adhesive containing polyether.
When peeling off from the surface plate after use, it is necessary to heat to 50 to 150 ° C., which is not suitable as a method for efficiently peeling the abrasive adhered to the large surface plate.
【０００５】特開平６−１７２７２１号公報には、研磨
材を定盤に固定するために再剥離性粘着剤を用いた両面
粘着テープが記載されている。この粘着テープを使用す
れば定盤から容易に剥離することはできるが、大型の定
盤に研磨材を確実に固定し、且つ容易に剥離するための
手段は明確に開示されていない。JP-A-6-172721 discloses a double-sided pressure-sensitive adhesive tape using a removable adhesive for fixing an abrasive to a surface plate. If this adhesive tape is used, it can be easily peeled off from the surface plate. However, means for securely fixing the abrasive to a large surface plate and easily peeling is not disclosed.
【０００６】[0006]
【発明が解決しようとする課題】本発明は、被研磨材を
研磨するための研磨材をポリッシングマシーンの定盤に
固定するために使用され、使用後には定盤に糊残りせず
に剥離することのできる両面粘着テープを提供すること
を目的とする。SUMMARY OF THE INVENTION The present invention is used for fixing an abrasive for polishing a material to be polished to a surface plate of a polishing machine, and after use, peels off without leaving adhesive on the surface plate. It is an object of the present invention to provide a double-sided adhesive tape that can be used.
【０００７】[0007]
【課題を解決するための手段】請求項１記載の発明は、
研磨材をポリッシングマシーンの定盤に固定するための
両面粘着テープであって、定盤に貼り付けられる側の粘
着面が、ゲル分率が７０〜９０％であるアクリル系粘着
剤であることを特徴とする両面粘着テープである。According to the first aspect of the present invention,
A double-sided pressure-sensitive adhesive tape for fixing an abrasive to a surface plate of a polishing machine, wherein the pressure-sensitive adhesive surface on the side attached to the surface plate is an acrylic pressure-sensitive adhesive having a gel fraction of 70 to 90%. Characteristic double-sided adhesive tape.
【０００８】請求項２記載の発明は、研磨材をポリッシ
ングマシーンの定盤に固定するための両面粘着テープで
あって、定盤に貼り付けられる側の粘着面が、天然ゴム
１００重量部、官能基を有する液状ゴム成分３０〜７０
重量部、粘着付与樹脂９０〜１２０重量部、架橋剤５〜
４０重量部とからなるゴム系粘着剤であることを特徴と
する両面粘着テープである。According to a second aspect of the present invention, there is provided a double-sided adhesive tape for fixing an abrasive to a surface plate of a polishing machine. Liquid rubber component having a group 30 to 70
Parts by weight, 90 to 120 parts by weight of tackifier resin, 5 to 5 parts of crosslinking agent
The double-sided pressure-sensitive adhesive tape is a rubber-based pressure-sensitive adhesive comprising 40 parts by weight.
【０００９】先ず、請求項１記載の両面粘着テープの基
材は、それ自体が平滑であり、定盤から剥離する際に切
れないよう一定の強度が要求されるので合成樹脂フィル
ムが好ましい。使用される合成樹脂フィルムとして代表
的なものとして、ポリ塩化ビニル、ポリエチレン、ポリ
プロピレン、ポリエステル等が挙げられる。これらのフ
ィルムは単層であっても、２種以上のフィルムや金属箔
などとのラミネートフィルムであってもよい。全体の厚
みは２０〜２００μｍ程度が好適である。First, the base material of the double-sided pressure-sensitive adhesive tape according to the first aspect is preferably a synthetic resin film because the base material itself is smooth and requires a certain strength so that it does not break when peeled off from the surface plate. Representative examples of the synthetic resin film used include polyvinyl chloride, polyethylene, polypropylene, polyester and the like. These films may be a single layer or a laminate film with two or more kinds of films or metal foils. The total thickness is preferably about 20 to 200 μm.
【００１０】研磨材と貼り合わされる側の粘着剤層（以
下「第１粘着剤層」という）に使用される粘着剤は、研
磨終了後に磨耗した研磨材を交換する際に両面粘着テー
プとともに研磨材を定盤から剥離するので、再剥離性は
不要であり、研磨材と強固に接着できるものであれば特
に制限はない。例えば、アクリル系粘着剤、ゴム系粘着
剤、ウレタン系粘着剤、シリコーン系粘着剤等があり、
特にアクリル系粘着剤、ゴム系粘着剤が好適である。The pressure-sensitive adhesive used for the pressure-sensitive adhesive layer (hereinafter referred to as "first pressure-sensitive adhesive layer") on the side to be bonded to the abrasive is polished together with the double-sided pressure-sensitive adhesive tape when the worn abrasive is replaced after polishing is completed. Since the material is peeled from the surface plate, re-peelability is not required, and there is no particular limitation as long as the material can be firmly bonded to the abrasive. For example, there is an acrylic adhesive, a rubber adhesive, a urethane adhesive, a silicone adhesive, and the like.
In particular, acrylic adhesives and rubber adhesives are preferred.
【００１１】定盤と貼り合わされる側の粘着剤層（以下
「第２粘着剤層」という）に使用される粘着剤は、定盤
から剥離したとき定盤に糊残りしないように７０〜９０
％のゲル分率を有するアクリル系粘着剤である。定盤の
表面状態は研磨仕上げをよくするために鏡面状態に非常
に近くなされているので、上記のように高いゲル分率の
ために初期接着力がそれほど高くなくても充分に対応す
ることができる。The pressure-sensitive adhesive used for the pressure-sensitive adhesive layer to be bonded to the surface plate (hereinafter referred to as "second pressure-sensitive adhesive layer") is 70 to 90 so that no adhesive remains on the surface plate when peeled from the surface plate.
% Acrylic adhesive. The surface condition of the surface plate is very close to the mirror surface condition to improve the polishing finish, so it is possible to cope sufficiently even if the initial adhesive strength is not so high due to the high gel fraction as described above. it can.
【００１２】アクリル系粘着剤は下記一般式で表される
アクリル酸エステルの単独重合体、あるいは１種以上の
アクリル酸エステルとアクリル酸エステル以外の単量体
とからなる共重合体を主とする組成物である。The acrylic pressure-sensitive adhesive is mainly composed of a homopolymer of an acrylate ester represented by the following general formula or a copolymer of at least one acrylate ester and a monomer other than the acrylate ester. A composition.
【００１３】[0013]
【化１】 （但し、Ｒ1 は炭素数２〜１４のアルキル基を表す）Embedded image (However, R 1 represents an alkyl group having 2 to 14 carbon atoms)
【００１４】上記単量体としては酢酸ビニル、スチレ
ン、無水マレイン酸、（メタ）アクリル酸、アクリロア
ミド、２−ヒドロキシエチル（メタ）アクリレート、２
−ヒドロキシプロピル（メタ）アクリレート、アクリル
ニトリルなどが挙げられ、これらを常法によりアクリル
酸エステルと共重合して用いられる。The above monomers include vinyl acetate, styrene, maleic anhydride, (meth) acrylic acid, acrylamide, 2-hydroxyethyl (meth) acrylate,
-Hydroxypropyl (meth) acrylate, acrylonitrile, and the like, which are used after being copolymerized with an acrylate according to a conventional method.
【００１５】上記アクリル酸エステルの単独重合体もし
くは共重合体に架橋剤としてポリイソシアネート、メラ
ミン樹脂、エポキシ樹脂等が添加され、前記ゲル分率と
なるように架橋される。また、必要に応じて粘着付与樹
脂が添加されてもよい。粘着付与樹脂としてはフェノー
ル系樹脂、テルペン系樹脂、スチレン系樹脂、キシレン
系樹脂、ロジン系樹脂、塩化ビニル系樹脂、石油系樹脂
などが挙げられる。A polyisocyanate, a melamine resin, an epoxy resin, or the like is added as a crosslinking agent to the homopolymer or copolymer of the acrylate ester, and the acrylate is crosslinked so as to have the above gel fraction. Further, a tackifier resin may be added as necessary. Examples of the tackifying resin include a phenol resin, a terpene resin, a styrene resin, a xylene resin, a rosin resin, a vinyl chloride resin, and a petroleum resin.
【００１６】上記ゲル分率は粘着剤試料Ｗ0 を大容量の
テトラヒドロフランに２０℃で２４時間浸漬して非ゲル
分をテトラヒドロフランに溶解させ、これを２００メッ
シュの金網で濾過し、回収された不溶部分を１１０℃で
３時間乾燥した重量Ｗ1 を測定してＷ0 ／Ｗ1 ×１００
で表したものである。The gel fraction is determined by immersing the pressure-sensitive adhesive sample W 0 in a large volume of tetrahydrofuran at 20 ° C. for 24 hours to dissolve the non-gel component in tetrahydrofuran. The weight W 1 of the portion dried at 110 ° C. for 3 hours was measured to obtain W 0 / W 1 × 100.
It is represented by
【００１７】次に、請求項２記載の両面粘着テープにお
ける基材及び第１粘着剤層は請求項１記載のものと同じ
ものが使用される。第２粘着剤層におけるゴム系粘着剤
は天然ゴム、粘着付与樹脂に加え、液状ゴム成分を含有
することにより粘着剤層と定盤との界面が平滑となり、
定盤に対して接着力が強くなる。上記粘着付与樹脂は軟
化点が１００〜１１５℃であるものが好ましい。また、
天然ゴム１００重量部に対して架橋剤を５〜４０重量部
が配合されることにより、研磨時に受ける剪断力に耐
え、剥離時に糊残りしないものとなる。Next, the substrate and the first pressure-sensitive adhesive layer in the double-sided pressure-sensitive adhesive tape according to the second aspect are the same as those described in the first aspect. The rubber-based pressure-sensitive adhesive in the second pressure-sensitive adhesive layer contains a liquid rubber component in addition to the natural rubber and the tackifying resin, so that the interface between the pressure-sensitive adhesive layer and the surface plate becomes smooth,
Adhesion to the surface plate increases. The tackifying resin preferably has a softening point of 100 to 115 ° C. Also,
By blending 5 to 40 parts by weight of the crosslinking agent with respect to 100 parts by weight of the natural rubber, it can withstand the shearing force exerted during polishing and does not leave adhesive when peeled off.
【００１８】[0018]
【発明の実施の形態】次に本発明の両面粘着テープの実
施例を図面を参照して説明する。 （実施例１、２、比較例１、２）表１に示す粘着剤組成
物をＰＥＴフィルム（二村化学社製，商品名「ＦＥ２０
０１」，厚み２３μｍ，片面コロナ放電処理）のコロナ
放電処理面に乾燥後の厚みが３５μｍとなるように塗布
乾燥した第２粘着剤層を有する両面粘着テープを作製し
た。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of the double-sided pressure-sensitive adhesive tape of the present invention will be described with reference to the drawings. (Examples 1 and 2 and Comparative Examples 1 and 2) A pressure-sensitive adhesive composition shown in Table 1 was applied to a PET film (trade name “FE20” manufactured by Nimura Chemical Co., Ltd.).
01 ", a thickness of 23 μm, and a single-sided corona discharge treatment) to prepare a double-sided pressure-sensitive adhesive tape having a second pressure-sensitive adhesive layer applied and dried such that the thickness after drying was 35 μm.
【００１９】（実施例３、４、比較例３、４）表２に示
す粘着剤組成物をＰＥＴフィルム（実施例１で使用した
ものと同じもの）のコロナ放電処理面に乾燥後の厚みが
３５μｍとなるように塗布乾燥した第２粘着剤層を有す
る両面粘着テープを作製した。(Examples 3 and 4 and Comparative Examples 3 and 4) The pressure-sensitive adhesive composition shown in Table 2 was applied to the corona discharge treated surface of a PET film (the same as that used in Example 1) after drying. A double-sided pressure-sensitive adhesive tape having a second pressure-sensitive adhesive layer applied and dried to a thickness of 35 μm was produced.
【００２０】物性測定 （１）ゲル分率：前記の測定方法による。 （２）９０度剥離力：ＪＩＳ Ｚ ０２３７に規定され
るステンレス板（ＳＵＳ−２８０）からの９０度剥離力
と剪断接着力を測定し、再剥離し易さと研磨時の剥がれ
難さを評価した。 以上の結果を表１および表２に示した。 Measurement of physical properties (1) Gel fraction: According to the above-mentioned measuring method. (2) 90-degree peeling force: A 90-degree peeling force and a shear adhesive force from a stainless steel plate (SUS-280) specified in JIS Z 0237 were measured, and the ease of re-peeling and the difficulty of peeling during polishing were evaluated. . The above results are shown in Tables 1 and 2.
【００２１】[0021]
【表１】 [Table 1]
【００２２】[0022]
【表２】 [Table 2]
【００２３】[0023]
【発明の効果】本発明の粘着テープは、被研磨材を研磨
するための研磨材をポリッシングマシーンの定盤に貼り
付けて使用すると、研磨時に受ける剪断力に耐えて確実
に固定することができ、また、使用後には定盤に糊残り
せずに剥離することができる。When the adhesive tape of the present invention is used by attaching an abrasive for polishing a material to be polished to the surface plate of a polishing machine, it can withstand the shearing force applied during polishing and can be securely fixed. After use, it can be peeled off without leaving adhesive on the surface plate.
Claims (2)
固定するための両面粘着テープであって、定盤に貼り付
けられる側の粘着面が、ゲル分率が７０〜９０％である
アクリル系粘着剤であることを特徴とする両面粘着テー
プ。1. A double-sided pressure-sensitive adhesive tape for fixing an abrasive to a surface plate of a polishing machine, wherein the pressure-sensitive adhesive surface on the side adhered to the surface plate has a gel fraction of 70 to 90%. Double-sided adhesive tape characterized by being an agent.
固定するための両面粘着テープであって、定盤に貼り付
けられる側の粘着面が、天然ゴム１００重量部、官能基
を有する液状ゴム成分３０〜７０重量部、粘着付与樹脂
９０〜１２０重量部、架橋剤５〜４０重量部とからなる
ゴム系粘着剤であることを特徴とする両面粘着テープ。2. A double-sided adhesive tape for fixing an abrasive to a surface plate of a polishing machine, wherein the adhesive surface on the side to be attached to the surface plate is 100 parts by weight of natural rubber and a liquid rubber component having a functional group. A double-sided pressure-sensitive adhesive tape, which is a rubber-based pressure-sensitive adhesive comprising 30 to 70 parts by weight, 90 to 120 parts by weight of a tackifier resin, and 5 to 40 parts by weight of a crosslinking agent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11819599A JP2000309760A (en) | 1999-04-26 | 1999-04-26 | Double-coated pressure-sensitive adhesive tape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11819599A JP2000309760A (en) | 1999-04-26 | 1999-04-26 | Double-coated pressure-sensitive adhesive tape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000309760A true JP2000309760A (en) | 2000-11-07 |
Family
ID=14730532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11819599A Withdrawn JP2000309760A (en) | 1999-04-26 | 1999-04-26 | Double-coated pressure-sensitive adhesive tape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000309760A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002285114A (en) * | 2001-03-26 | 2002-10-03 | Sekisui Chem Co Ltd | Tape for abrasive fixing |
| JP2008227252A (en) * | 2007-03-14 | 2008-09-25 | Toyo Tire & Rubber Co Ltd | Polishing pad |
| JP2010053258A (en) * | 2008-08-28 | 2010-03-11 | Sekisui Chem Co Ltd | Double-sided tape for fixing polishing cloth |
| JP2012102165A (en) * | 2010-11-05 | 2012-05-31 | Nitto Denko Corp | Double-sided adhesive tape and polishing member |
| JP2015034302A (en) * | 2014-11-11 | 2015-02-19 | 日東電工株式会社 | Re-peeling adhesive composition, adhesive sheet and tape |
| CN111662663A (en) * | 2020-06-24 | 2020-09-15 | 北京理工大学珠海学院 | Anti-prick memory adhesive and preparation method and application thereof |
| CN115247032A (en) * | 2022-04-06 | 2022-10-28 | 上海固柯胶带科技有限公司 | A kind of high-efficiency grinding tape for wafer thinning and preparation method thereof |
| JP7385803B1 (en) | 2022-11-09 | 2023-11-24 | 東洋インキＳｃホールディングス株式会社 | Double-sided adhesive tape for fixing polishing members, method for fixing top pad to surface plate, and method for fixing multi-layer type polishing pad to surface plate |
| JP7406693B1 (en) | 2022-11-09 | 2023-12-28 | 東洋インキＳｃホールディングス株式会社 | Double-sided adhesive tape for fixing polishing members, multi-layer polishing pad, method for fixing top pad to surface plate, and method for fixing multi-layer polishing pad to surface plate |
-
1999
- 1999-04-26 JP JP11819599A patent/JP2000309760A/en not_active Withdrawn
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002285114A (en) * | 2001-03-26 | 2002-10-03 | Sekisui Chem Co Ltd | Tape for abrasive fixing |
| JP2008227252A (en) * | 2007-03-14 | 2008-09-25 | Toyo Tire & Rubber Co Ltd | Polishing pad |
| JP2010053258A (en) * | 2008-08-28 | 2010-03-11 | Sekisui Chem Co Ltd | Double-sided tape for fixing polishing cloth |
| JP2012102165A (en) * | 2010-11-05 | 2012-05-31 | Nitto Denko Corp | Double-sided adhesive tape and polishing member |
| JP2015034302A (en) * | 2014-11-11 | 2015-02-19 | 日東電工株式会社 | Re-peeling adhesive composition, adhesive sheet and tape |
| CN111662663A (en) * | 2020-06-24 | 2020-09-15 | 北京理工大学珠海学院 | Anti-prick memory adhesive and preparation method and application thereof |
| CN111662663B (en) * | 2020-06-24 | 2022-07-08 | 北京理工大学珠海学院 | A kind of anti-stick memory glue and its preparation method and application |
| CN115247032A (en) * | 2022-04-06 | 2022-10-28 | 上海固柯胶带科技有限公司 | A kind of high-efficiency grinding tape for wafer thinning and preparation method thereof |
| CN115247032B (en) * | 2022-04-06 | 2023-10-17 | 上海固柯胶带科技有限公司 | Efficient grinding adhesive tape for wafer thinning and preparation method thereof |
| JP7385803B1 (en) | 2022-11-09 | 2023-11-24 | 東洋インキＳｃホールディングス株式会社 | Double-sided adhesive tape for fixing polishing members, method for fixing top pad to surface plate, and method for fixing multi-layer type polishing pad to surface plate |
| JP7406693B1 (en) | 2022-11-09 | 2023-12-28 | 東洋インキＳｃホールディングス株式会社 | Double-sided adhesive tape for fixing polishing members, multi-layer polishing pad, method for fixing top pad to surface plate, and method for fixing multi-layer polishing pad to surface plate |
| JP2024068758A (en) * | 2022-11-09 | 2024-05-21 | ａｒｔｉｅｎｃｅ株式会社 | Double-sided adhesive tape for fixing polishing members, method for fixing top pad to surface plate, and method for fixing multi-layer type polishing pad to surface plate |
| JP2024068757A (en) * | 2022-11-09 | 2024-05-21 | ａｒｔｉｅｎｃｅ株式会社 | Double-sided adhesive tape for fixing abrasive members, multi-layered polishing pad, method for fixing a top pad to a surface plate, and method for fixing a multi-layered polishing pad to a surface plate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20040326 |