JP2000285429A - Manufacture for magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a required man hour and enhance a productivity by separating a resist layer formed on an upper face of a slider bar simultaneously with detaching the slider bar from an adhesive. SOLUTION: After an etching process, a jig 10 with a plurality of slider bars 8 fixed is soaked in an organic solvent such as acetone or the like. An adhesive which bonds bottom faces 8c of the slider bars 8 and the jig 10 is dissolved to separate the slider bars. At the same time, a release process of releasing resist layers 13 from upper faces 8b of the slider bars 8 and a dissolution process of dissolving resist protecting parts 12a are carried out at once. The release of the resist layers formed on upper faces of the slider bars and the separation of the slider bars from the adhesive are carried out with the use of one kind of the solvent. The adhesive is one from which photosensitive properties are removed from a material of the resist layers, and therefore the adhesive will not change in nature even when exposed. The adhesive can be dissolved at once because of its solubility to the solvent equal to a solubility of the resist.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing a magnetic head mounted on a hard magnetic disk device or the like.

[0002]

2. Description of the Related Art As shown in FIG. 11, a magnetic head mounted on a hard magnetic disk device or the like has a slider 1 made of a ceramic material and a flexible flexure (not shown) made of a thin stainless steel plate. Has been fixed.

On a side end surface 1a (a surface perpendicular to the magnetic disk) of the slider 1, a head element 3 composed of a thin film for recording and reproducing information on and from a magnetic disk, and a recording element 2 electrically connected to the head element 3 are provided. And two connection terminals 4 for playback
Are juxtaposed. The ABS 1b (the surface facing the magnetic disk) 1b of the slider 1 has an air groove 5 and an air groove 5 for controlling the airflow floating on the slider 1.
Has a rail portion 6 on both sides thereof and an inclined portion 6a formed on the rail portion 6.

During operation of the hard magnetic disk drive, the slider 1 is fixed to a flexure such that the ABS 1b faces the magnetic disk, and is controlled by an air flow controlled by the ABS 1b on which the air groove 5 and the like are formed. The slider 1 flies over the surface of the magnetic disk at predetermined intervals, and the head element 3 performs recording and reproduction on the magnetic disk.

Next, a method for manufacturing such a conventional magnetic head will be described. As shown in FIG. 12, a side end face 1 provided with a head element 3, a connection terminal 4, and the like of the slider 1 is provided on a surface of a wafer 7 made of ceramic as a base material of the slider 1.
The region constituting a is formed in a state where a plurality of regions are arranged in a plurality of rows. And the side end surface 1a of the slider 1 is thus
13, the slider bar 8 is formed by cutting the wafer 7 so that the cut surface of the wafer 7 becomes the magnetic disk facing surface 1b of the slider 1, as shown in FIG. At this time, as shown in FIG.
Means that the surface to be the side wall surface 1a of the slider 1 is
Of the slider 1 and the disk facing surface 1b of the slider 1
Is the upper surface 8b of the slider bar 8.

Then, as shown in FIG. 14, the bottom surfaces 8c of the plurality of slider bars 8 are bonded and fixed to the upper surface 10a of the jig 10 on which the adhesive 29 is applied. At this time, the jig 10
And the side end surface 8a of the slider bar 8 is orthogonal to
It is fixed with the upper surface 8b positioned upward. Also, in order to prevent the side end surfaces 8a of the slider bar 8 from being damaged by the contact between the slider bars 8, the slider bar 8 is attached to the side end surfaces 8a.
Each of them is arranged with a certain gap S in front of c.

Next, as shown in FIG. 15, a resist film is stuck on the upper surfaces 8b of the plurality of slider bars 8 to form a resist layer 13.

Then, as shown in FIG. 16, an etching pattern for forming the air groove 5 and the rail portion 6 is formed in the resist layer 13 by photolithography, and the rail portion 6 on the upper surface 8b of the slider bar 8 is formed. The pattern resist layer 13 is left only in the portions where And FIG.
As shown in 6, the exposed upper surface 8b of the slider bar 8 is etched with argon ions.

Next, as shown in FIG. 17, the slider bar 8 fixed to the jig 10 with the adhesive 29 is immersed in a solvent such as NMP, and the resist layer 1 is removed from the upper surface 8b of the slider bar 8.
3 is peeled off. Next, as shown in FIG. 18, the slider bar 8 fixed to the jig 10 with the adhesive 29 is immersed in a solvent such as acetone to bond the bottom surface 8c of the slider 8 to the jig 10. And melt the slider bar 8 into the jig 10
To manufacture the magnetic head.

[0010]

However, in the conventional method for manufacturing a magnetic head, a step of peeling off the resist layer 13 and a step of peeling off the slider bar 8 from the adhesive 29 are required separately. However, there is a problem that the productivity is poor due to complexity.

When the upper surface 8b of the slider bar 8 is etched by dry etching in a state where the gap S exists between the slider bars 8, the etched object passes through the gap S and the side end surface of the slider bar 8 When the magnetic head is mounted on a hard magnetic disk device or the like when the magnetic head is mounted on a hard magnetic disk device or the like while being re-adhered to the slider bar 8 and re-adhered to the side end surface 8a of the slider bar 8, when the device is driven, the re-adhered material will It falls on the surface of the magnetic disk and causes damage to the hard magnetic disk.

[0012]

A first solution is to provide a plurality of slider bars having a plurality of thin film elements on a side end face,
Fix the bottom surface of the slider bar on a jig with an adhesive,
Forming a resist layer by applying a resist on the upper surface of the slider bar, or applying a resist film using the resist on the upper surface of the slider bar; A resist layer forming step, a pattern forming step of forming an etching pattern in the resist layer, an etching step of etching the slider bar to form a groove in the slider bar, and an etching step formed on the upper surface of the slider bar. A stripping step of simultaneously stripping the resist layer and removing the slider bar from the adhesive.

[0013] A second solution is characterized in that the peeling step is performed by immersion in a solvent.

A third solution is that the adhesive uses the non-photosensitive resist or the resist film.

A fourth solution is that the adhesive is a novolak resin or an acrylic resin, and the resist or resist film is a novoc resin or an acrylic resin.

A fifth solution means is to apply a resist between the fixing step and the pattern forming step so as to cover a gap between the slider bars and an upper surface of the slider bar.
Alternatively, a resist film forming step of pasting a resist film to form a resist film and a resist film covering the gap between the slider bars is immersed in the gap between the slider bars, and a resist protection section for closing the gap between the slider bars is provided. Forming a protective portion, forming a resist layer on the upper surface of the slider bar, and removing the resist film on the upper surface of the slider bar. is there.

A sixth solution is to provide a resist film forming step of forming a resist film by applying pressure to the heated and softened resist film and attaching the resist film to the upper surface of the slider bar. The protection section forming step of forming a resist protection section for closing the gap between the bars is performed simultaneously.

According to a seventh aspect of the present invention, there is provided a curing step of curing the resist protection portion in the gap between the slider bars.

An eighth solution is to provide a dissolving step for dissolving the resist protection portion in the gap between the slider bars, and to perform the dissolving step and the stripping step simultaneously.

A ninth solution means is to fix a plurality of slider bars having a plurality of thin film elements on side end surfaces thereof with an adhesive on a bottom surface of the slider bars on a jig, and to provide a front portion of each of the side end surfaces. A fixing step of arranging on a jig with a gap, and forming a resist film by applying a resist or pasting a resist film so as to cover the gap between the slider bar and the upper surface of the slider bar. And a resist film covering the gap between the slider bars,
An immersion step of immersing in the gap between the slider bars, a removing step of removing a resist film formed on the upper surface of the slider bar, a curing step of curing the resist film immersed in the gap of the slider bar, and the slider A resist layer forming step of forming a resist layer by applying a resist or pasting a resist film using the resist on the upper surface of the bar; a pattern forming step of forming an etching pattern on the resist layer; An etching step of etching the slider bar to form a groove in the groove.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A magnetic head mounted on a hard magnetic disk drive or the like has a slider made of a ceramic material at the tip of a flexible flexure (not shown) made of a stainless steel thin plate as shown in FIG. 1 is fixed.

On a side end surface 1a (a surface perpendicular to the magnetic disk) of the slider 1, a head element 3 made of a thin film for recording and reproducing information on and from a magnetic disk, and a recording element 2 electrically connected to the head element 3 are formed. And two connection terminals 4 for playback
Are juxtaposed. The ABS 1b (the surface facing the magnetic disk) 1b of the slider 1 has an air groove 5 and an air groove 5 for controlling the airflow floating on the slider 1.
Has a rail portion 6 on both sides thereof and an inclined portion 6a formed on the rail portion 6.

During operation of the hard magnetic disk drive, the slider 1 is fixed to the flexure so that the ABS 1b faces the magnetic disk, and is controlled by an air flow controlled by the ABS 1b on which the air grooves 5 and the like are formed. The slider 1 flies over the surface of the magnetic disk at predetermined intervals, and the head element 3 performs recording and reproduction on the magnetic disk.

Next, a method for manufacturing the magnetic head of the present invention will be described. As shown in FIG. 2, a plurality of regions forming side end surfaces 1 a provided with the head elements 3, the connection terminals 4, and the like of the slider 1 are formed on the surface of the wafer 7 made of ceramic as a base material of the slider 1. It is formed in a state of being arranged in a plurality of rows.
Then, as shown in FIG. 13, in the case where the side wall surfaces 1a of the slider 1 are arranged in parallel, the slider bar is cut from the wafer 7 so that the cut surface of the wafer 7 becomes the magnetic disk facing surface 1b of the slider 1. 8 is formed. At this time, as shown in FIG.
Are the side end surfaces 1a of the slider bar 8,
The surface of the slider 1 that becomes the disk facing surface 1b is the upper surface 8b of the slider bar 8.

Next, in the fixing step shown in FIG. 4, the bottom surfaces 8b of the plurality of slider bars 8 are fixed to the upper surface 10a of the jig 10 by an adhesive 9 made of a non-photosensitive novolak resin or an acrylic resin. . At this time, the upper surface 10a of the jig 10 is orthogonal to the side end surface 8a of the slider bar 8, and the upper surface 8b is positioned upward. Further, in order to prevent the side end faces 8a of the slider bars 8 from being damaged by the contact between the slider bars 8, the slider bars 8 are arranged with a certain gap S in front of the side end faces 8a.

Next, as shown in FIG. 5, a negative resist film made of a novolak resin or an acrylic resin is coated on the upper surface 8b of a plurality of slider bars 8 heated to 60 to 100.degree. Clearance S of bar 8
And cover it. Then, as shown in FIG. 6, the resist film is heated and pressed on the upper surface 8b of the slider bar 8 by a roller having a temperature of about 130 ° C. Is performed to form a resist film. At this time, the resist film softened by heating is pushed into the gap S of the slider bar 8 by the pressure of the roller,
A protection section forming step of forming a resist protection section 12a for closing the gap S of the slider bar 8 is performed at the same time.

Next, as shown in FIG. 7, a removing step of removing the resist layer 12 on the surface 8a of the slider bar 8 with a developing solution is performed. In this removing step, the plurality of slider bars 8 fixed to the jig 10 and the resist protection portions 12a for closing the gaps S between the slider bars 8 are immersed in a developing solution. It is hard to enter the narrow gap S of the formed slider bar 8. Therefore, by adjusting the dipping time of the slider bar 8 and the resist film 12 and the resist protection portion 12a in the developing solution, the resist layer 12 on the upper surface 8b of the slider bar 8 is adjusted.
Only the resist protection portion 12a can be left with the gap S between the slider bars 8 closed.

Next, the resist protection portion 12a that closes the gap S between the slider bars 8 is exposed to light to expose the resist protection portion 12a.
A curing step of curing the.

Next, as shown in FIG. 8, a resist film made of a novolak resin or an acrylic resin is applied to the upper surface 8b of the slider bar 8 and the resist protection portion 12a.
Place on top of Then, the resist film is heated to 100 ° C.
A resist layer forming step of forming a resist layer 13 by applying heat and pressure with a roller having a temperature of about a degree and attaching the resist layer 13 to the upper surface 8b of the slider bar 8 and the upper surface of the resist protection portion 12a is performed. At this time, since the gap S between the slider bars 8 is closed by the resist protection portion 12a, the surface on which the resist film serving as the resist layer 13 is placed is substantially flat. Further, the resist protection portion 12a is hardened and does not dissolve by heating and does not seep into the resist layer 13, so that the surface of the resist layer 13 is formed evenly and smoothly. As a result, the resist has a flat and uniform thickness, so that unevenness during exposure and development is eliminated, and uniform patterning is possible.

Next, a pattern forming step of forming an etching pattern on the magnetic disk facing surface 1b of the slider 1 on the resist layer 13 by photolithography is performed.
In the pattern forming step, the resist layer 13 covering the upper surface 8b of the slider bar 8 is peeled off by a developing solution except for the region covering the part to be the rail 6, as shown in FIG. At this time, since the resist protection portion 12 has been cured, it is left without being eroded by the developer.

Next, an etching step is performed in the state shown in FIG. In this etching step, the exposed upper surface 8b of the slider bar 8 is etched by a milling step using argon ions to form the air groove 5 on the upper surface 8b of the slider bar 8. At this time, since the gap S of the slider bar 8 is closed by the resist protection portion 12a, the etched object of the slider bar 8 due to argon ions does not adhere to the side end surface 8a of the slider bar 8 again. Further, since the resist protection portion 12a is hardened, the resist protection portion 12a is not easily removed by the argon ions and does not disappear during the etching process.

Next, as shown in FIG. 10, the jig 10 to which the plurality of slider bars 8 are fixed is immersed in an organic solvent such as acetone, and the bottom surface 8c of the slider bar 8c and the jig 10 are bonded. At the same time as dissolving and removing the adhesive, the peeling step of peeling the resist layer 13 from the upper surface 8b of the slider bar 8 and the dissolving step of dissolving the resist protection portion 12a are collectively performed.

After the inclined portion 6b is formed on the rail portion 6, the slider bar 8 is divided into the slider 1.

In this embodiment, after the removing step of removing the resist film 12 on the upper surface 8b of the slider bar 8, a curing step of exposing and curing the resist protection 12a is performed. After the resist film 12 on the surface 8b of the slider bar 8 and the resist protection portion 12a are exposed and cured in a curing step, the upper surface 8 of the slider bar 8 is removed in a removing step.
The resist film 12 of b may be removed by mechanical processing such as wet etching, dry etching, or polishing.

[0035]

According to the method of manufacturing a magnetic head of the present invention, the stripping of the resist layer formed on the upper surface of the slider bar and the removal of the slider bar from the adhesive are simultaneously performed, so that the number of steps can be reduced and the production can be reduced. A good magnetic head manufacturing method is obtained.

In the method of manufacturing a magnetic head according to the present invention, the peeling of the resist layer formed on the upper surface of the slider bar and the removal of the slider bar from the adhesive are collectively performed using one kind of solvent. Material cost can be reduced.

Since the adhesive is obtained by removing the photosensitivity from the material of the resist layer, the adhesive does not change its properties even when exposed, and has the same solubility in a solvent as that of the resist. And can be dissolved at once with the same solvent.

A plurality of the slider bars are fixed on the surface of the jig with a gap therebetween, and the gap between the slider bars is closed by a resist protection portion. A method of manufacturing a magnetic head that does not adhere to the side end surface of the bar.

By hardening the resist protection portion, a magnetic head can be formed in which the resist protection portion does not seep into the resist layer formed on the upper surface of the resist protection portion and the resist layer can be formed smoothly. In addition to the manufacturing method, in the etching step, the resist protection portion is hardened because it is hardened, so that the gap between the slider bars can be closed until the etching step is completed. As a result, the resist has a flat and uniform thickness, so that unevenness during exposure and development can be eliminated and uniform patterning can be performed.

Since the peeling step and the dissolving step of dissolving the resist protection portion that closes the gap of the slider bar are performed at the same time, a magnetic head manufacturing method that does not increase the number of steps conventionally is provided.

In the method of manufacturing a magnetic head according to the present invention, a plurality of slider bars are fixed to the surface of the jig with a gap therebetween, and the slider bar is covered with a hardened resist protection portion to perform etching. In the process, the resist protection portion is not easily removed, and closes the gap between the slider bars until the etching process is completed, so that the re-adhered material due to the etching of the slider bar does not adhere to the side end surface of the slider bar. In addition, by curing the resist protection portion, the resist layer formed on the upper surface of the resist protection portion does not seep into the resist protection portion, and the resist layer can be formed smoothly.

[Brief description of the drawings]

FIG. 1 is a perspective view of a slider.

FIG. 2 is an explanatory diagram of a method of manufacturing a magnetic head according to the present invention.

FIG. 3 is an explanatory diagram of a method for manufacturing a magnetic head according to the present invention.

FIG. 4 is an explanatory diagram of a method for manufacturing a magnetic head according to the present invention.

FIG. 5 is an explanatory diagram of a method of manufacturing a magnetic head according to the present invention.

FIG. 6 is an explanatory diagram of a method for manufacturing a magnetic head according to the present invention.

FIG. 7 is an explanatory diagram of a method for manufacturing a magnetic head according to the present invention.

FIG. 8 is an explanatory diagram of a method for manufacturing a magnetic head according to the present invention.

FIG. 9 is an explanatory diagram of a method for manufacturing a magnetic head according to the present invention.

FIG. 10 is a perspective view of a slider.

FIG. 11 is an explanatory diagram of a conventional magnetic head manufacturing method.

FIG. 12 is an explanatory view of a conventional method for manufacturing a magnetic head.

FIG. 13 is an explanatory diagram of a conventional magnetic head manufacturing method.

FIG. 14 is an explanatory view of a conventional magnetic head manufacturing method.

FIG. 15 is an explanatory view of a conventional magnetic head manufacturing method.

FIG. 16 is an explanatory diagram of a conventional method for manufacturing a magnetic head.

FIG. 17 is an explanatory diagram of a conventional magnetic head manufacturing method.

FIG. 18 is an explanatory diagram of a conventional magnetic head manufacturing method.

DESCRIPTION OF SYMBOLS 1 slider 1a side end surface 1b magnetic disk facing surface 3 head element 4 connection terminal 5 air groove 6 rail portion 6a inclined portion 7 wafer 8 slider bar 8a side wall surface 8b top surface 8c bottom surface 9 adhesive 10 jig 12 resist Film 12a Resist protection section 13 Resist layer 29 Adhesive

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Osamu Suzaki 1-7 Yukiya Otsukacho, Ota-ku, Tokyo Alps Electric Co., Ltd. F-term (reference) 5D042 NA02 PA01 PA05 PA09 RA02 RA04 SA10

Claims (9)

[Claims] 1. A plurality of slider bars each having a plurality of thin-film elements on a side end face are fixed with an adhesive on a bottom surface of the slider bar on a jig, and a gap is provided in front of each of the side end faces. A fixing step of disposing the resist layer on a jig; a resist layer forming step of forming a resist layer by applying a resist on the upper surface of the slider bar or pasting a resist film using the resist; A pattern forming step of forming an etching pattern for forming an ABS surface of the slider of the head; an etching step of etching the slider bar to form the ABS surface of the slider bar; Peeling of the resist layer, and a peeling step of simultaneously removing the slider bar from the adhesive, Method of manufacturing a magnetic head, characterized in that it includes. 2. The method according to claim 1, wherein the removing step is performed by immersing the fixed slider bar in a solvent. 3. The method for manufacturing a magnetic head according to claim 1, wherein the adhesive uses the non-photosensitive resist or the resist film. 4. The method according to claim 3, wherein the adhesive is a novolak resin or an acrylic resin, and the resist or the resist film is a novolak resin or an acrylic resin. 5. A resist film is formed by applying a resist or pasting a resist film between the fixing step and the pattern forming step so as to cover a gap between the slider bar and an upper surface of the slider bar. Forming a resist film that covers the gap between the slider bars; and forming a resist protection section that closes the gap between the slider bars with a resist film that covers the gap between the slider bars. 5. The method according to claim 1, further comprising a removing step of removing the resist film, and a resist layer forming step of forming a resist layer on an upper surface of the slider bar and an upper surface of the resist protection unit. 6. A method for manufacturing any of the magnetic heads. 6. A resist film forming step of forming a resist film by applying pressure to the heated and softened resist film and attaching the resist film to the upper surface of the slider bar, and closing the gap between the slider bars by the pressing. 6. The method of manufacturing a magnetic head according to claim 5, wherein the step of forming a protection portion for forming a resist protection portion is performed simultaneously. 7. The method of manufacturing a magnetic head according to claim 5, further comprising a curing step of curing the resist protection portion in a gap between the slider bar. 8. The method according to claim 5, further comprising a dissolving step for dissolving the resist protection portion in the gap between the slider bars, wherein the dissolving step and the peeling step are performed simultaneously. Of manufacturing a magnetic head. 9. A plurality of slider bars each having a plurality of thin-film elements on a side end face are fixed with an adhesive on a bottom surface of the slider bar on a jig, and a gap is provided in front of each of the side end faces. A fixing step of disposing on a jig; a resist film forming step of forming a resist film by applying a resist or pasting a resist film so as to cover a gap between the slider bars and an upper surface of the slider bar; A protection section forming step of forming a resist protection section by immersing a resist film covering a gap between the bars into the gap between the slider bars; a removing step of removing a resist film formed on an upper surface of the slider bar; Curing a portion by exposure, and applying a resist on the upper surface of the slider bar, or pasting a resist film using the resist Forming a resist layer by applying a resist layer; forming a resist pattern on the slider layer of the magnetic head; and forming an ABS pattern on the slider bar. An etching step of etching the slider bar for etching.