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JP2000254881A5 - - Google Patents

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Publication number
JP2000254881A5
JP2000254881A5 JP1999058011A JP5801199A JP2000254881A5 JP 2000254881 A5 JP2000254881 A5 JP 2000254881A5 JP 1999058011 A JP1999058011 A JP 1999058011A JP 5801199 A JP5801199 A JP 5801199A JP 2000254881 A5 JP2000254881 A5 JP 2000254881A5
Authority
JP
Japan
Prior art keywords
transport robot
attached
motors
tip
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999058011A
Other languages
Japanese (ja)
Other versions
JP2000254881A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP5801199A priority Critical patent/JP2000254881A/en
Priority claimed from JP5801199A external-priority patent/JP2000254881A/en
Publication of JP2000254881A publication Critical patent/JP2000254881A/en
Publication of JP2000254881A5 publication Critical patent/JP2000254881A5/ja
Pending legal-status Critical Current

Links

Description

【特許請求の範囲】
【請求項1】
第一及び第二のモータにより駆動するようパラレルリンク機構で取り付けた第一から第四のハンドで構成された搬送用ロボットであって、
第三のモータと接続したベルトにより制御される第五のハンドを、先端部に取り付けた搬送用ロボット。
[Claims]
[Claim 1]
A transport robot composed of first to fourth hands attached by a parallel link mechanism so as to be driven by first and second motors.
A transport robot with a fifth hand controlled by a belt connected to a third motor attached to the tip.

JP5801199A 1999-03-05 1999-03-05 Parallel link mechanism robot for conveying wafer Pending JP2000254881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5801199A JP2000254881A (en) 1999-03-05 1999-03-05 Parallel link mechanism robot for conveying wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5801199A JP2000254881A (en) 1999-03-05 1999-03-05 Parallel link mechanism robot for conveying wafer

Publications (2)

Publication Number Publication Date
JP2000254881A JP2000254881A (en) 2000-09-19
JP2000254881A5 true JP2000254881A5 (en) 2006-05-25

Family

ID=13072040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5801199A Pending JP2000254881A (en) 1999-03-05 1999-03-05 Parallel link mechanism robot for conveying wafer

Country Status (1)

Country Link
JP (1) JP2000254881A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102068082B1 (en) 2012-12-04 2020-01-20 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼 Link-type transfer robot
CN103481283A (en) * 2013-09-17 2014-01-01 江南大学 Three-axis five-bar parallel manipulator
CN104493831A (en) * 2014-12-23 2015-04-08 东莞市顺如电子科技有限公司 Full-range parallel four-joint control device
CN105479449A (en) * 2016-02-15 2016-04-13 苏州哈工海渡工业机器人有限公司 Modularized five-bar parallel robot practical training table
CN115502992B (en) * 2022-09-22 2023-05-19 国网湖北省电力有限公司黄石供电公司 A high-voltage switch room troubleshooting and fire intelligent disposal robot

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