JP2000241240A - Radiation-displacement converter and imaging device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an excellent optical image corresponding to an image of radiation. SOLUTION: Each pixel has an infrared absorbing film 7 receiving infrared ray and converting it to heat, displacement part 4, 5 being displaced corresponding to the heat by the principle of bimetal, and a reflecting part 9 which gives change of reflecting direction corresponding to the displacements of the displacement parts 4, 5 to a received reading light (j) and outputs a reflected light of the changed reading light. The area of the reflecting part 9 of each pixel is so determined that influence of shading phenomenon or the like of an incident infrared ray (i) is reduced. The area of the reflecting part 9 of the pixel in the central part is made small, and the area of the reflecting part 9 is the pixel in the peripheral part is made large. As a result, picture quality is improved without needing electrical correction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a radiation-to-displacement conversion device such as an optical readout type or a capacitance type and an imaging device using the same.

[0002]

2. Description of the Related Art The present inventor provides an optical readout type radiation-displacement conversion device having a plurality of one-dimensionally or two-dimensionally arranged elements, each of which emits radiation such as infrared rays. A radiation absorbing section that receives and generates heat, a displacement section that generates a displacement corresponding to the heat generated by the radiation absorbing section, receives a readout light, and changes the received readout light according to the displacement of the displacement section. And a light-operating unit for emitting the changed readout light by applying the above-mentioned method, and invented an optical readout type radiation-displacement conversion device and an imaging device using the same (Japanese Patent Application Laid-Open Nos. -260080
No.).

In this converter, radiation such as infrared rays is converted into heat, the heat is converted into displacement, and the displacement is made readable by reading light. In the imaging device using this conversion device, an image of radiation such as infrared rays is formed in an area where the plurality of elements are arranged by an image forming unit such as an infrared image forming optical system, and read out. The optical system irradiates the conversion device with the readout light, and forms an optical image corresponding to the displacement of each element based on the changed readout light emitted from each element. This optical image is observed with the naked eye or captured by an imaging device such as a CCD.

[0004]

By the way, in an image pickup apparatus for picking up a general visible light image, a solid-state image pickup device such as a CCD in which each pixel is exactly the same and a light-receiving surface of the solid-state image pickup device are provided. An imaging lens that forms an image of visible light. In such a solid-state imaging device, as is well known, a shading phenomenon (peripheral dimming phenomenon) occurs due to the imaging lens, and the amount of light incident on each pixel of the solid-state imaging device varies. For this reason, unless some correction is performed, the amount of light in the peripheral pixels is insufficient, and a high-quality image cannot be obtained.

Therefore, in such an image pickup apparatus, the influence of the shading phenomenon is reduced by electrically correcting the image signal obtained from the solid-state image pickup device.

[0006] In the above-described optical readout radiation-displacement converter, it is conceivable that all the elements (corresponding to pixels) are configured exactly the same as in a conventional solid-state image sensor.

[0007] Even in an imaging device using such a conversion device, a shading phenomenon occurs due to an image forming portion such as an infrared image forming optical system, and the amount of radiation such as infrared rays incident on each element varies. Further, when the radiation is infrared light, the infrared light incident on each element is caused by an image forming part such as an infrared image forming optical system, and in particular, the infrared light is also generated from the lens barrel of the image forming part. Etc., the amount of radiation varies.

When an optical image formed by the readout optical system is picked up by an image pickup device, the influence of a shading phenomenon or the like can be reduced by electrically correcting an image signal obtained by the image pickup device. it can. However, in this case, the configuration of the electric circuit becomes complicated, and the cost of the imaging device is inevitably increased. In addition, when an optical image formed by the readout optical system is observed with the naked eye without being imaged by an imaging device, electrical correction cannot be performed, and an optical image with deteriorated image quality is observed. I have to do it.

The radiation-to-displacement converter includes, for example, a capacitance-type radiation-to-displacement converter other than the optical readout type. A capacitance-type radiation-to-displacement conversion device has a plurality of elements arranged one-dimensionally or two-dimensionally. Each of the plurality of elements receives a radiation such as an infrared ray and generates heat, a radiation absorbing section that generates a displacement corresponding to the heat generated in the radiation absorbing section, and a displacement of the displacement section. (Usually composed of an electrode or the like provided on the displacement part and an electrode or the like provided on the fixed side opposed to the electrode or the like). . In other words, the light-reading type radiation-to-displacement converter uses the above-mentioned light acting part as an action part for generating a predetermined change according to the displacement of the displacement part, whereas the capacitance-type radiation-to-displacement converter uses the opposite electrode. Etc. are used.

[0010] Other radiation-to-displacement converters such as the capacitance type also have a problem relating to the shading phenomenon, similarly to the above-mentioned optical readout-type radiation-to-displacement converter.

The present invention has been made in view of such circumstances, and various types of radiation capable of capturing high-quality images corresponding to radiation images without requiring electrical correction. It is an object to provide a displacement conversion device and an imaging device using the same.

Further, the present invention provides a method of directly observing a high-quality optical image corresponding to a radiation image with the naked eye, and capturing a high-quality image corresponding to a radiation image without requiring electrical correction. It is an object of the present invention to provide an optical readout type radiation-to-displacement conversion device and an imaging device using the same.

[0013]

In order to solve the above-mentioned problems, a radiation-to-displacement converter according to a first aspect of the present invention comprises:
A radiation-displacement conversion device having a plurality of one-dimensionally or two-dimensionally arranged elements, wherein each of the plurality of elements is:
A radiation absorption unit that receives heat to generate heat, a displacement unit that generates a displacement according to the heat generated in the radiation absorption unit, and an action unit that generates a predetermined change according to the displacement of the displacement unit,
It has. Then, the influence of the variation in the amount of radiation incident on each of the elements due to the imaging unit that forms an image of the radiation on the region where the plurality of elements is arranged is reduced, At least one of the elements differs from the remaining elements in at least one of an effective area of the radiation absorbing section of the element, an effective dimension of the displacement section of the element, and an effective area of the working section of the element. ing.

Examples of the action section include a light action section in a second mode described later and a capacitance section (for example, an electrode provided in the displacement section) for generating a change in capacitance according to displacement of the displacement section. And an electrode or the like provided on the fixed side so as to face the same.).

Here, the effective area of the radiation absorbing section refers to the area of the radiation absorbing section that receives incident radiation. Even if the amount of radiation per unit area incident on the element is the same, the displacement of the displacement unit increases as the effective area of the radiation absorption unit increases. In addition, the effective dimension of the displacement section refers to a predetermined dimension of the displacement section that determines the displacement of the displacement section that determines the amount of change of the predetermined change by the action section when receiving a certain amount of heat. Further, the effective area of the acting portion refers to an area corresponding to the amount of the changed matter effectively emitted from the acting portion to the outside.

According to the first aspect, infrared rays, X-rays,
Radiation such as ultraviolet rays is applied to the radiation absorbing section of each element, and the radiation is absorbed by the radiation absorbing section of each element and converted into heat. The displacement portions of the respective elements are respectively displaced in accordance with the heat generated in the radiation absorbing sections of the respective elements. Then, the action part of each element generates a predetermined change according to the displacement of the displacement part of each element. That is, the radiation incident on each element is converted into a displacement of a displacement part of each element according to the amount thereof, and further converted into a predetermined change generated from an action part of each element. Therefore, by reading out a predetermined change that occurs from the action portion of each element, for example,
An image corresponding to the radiation image can be captured.

In the first aspect, based on such a principle, the effective area of the radiation absorbing section of the element, the effective dimension of the displacement section of the element, and the effective area of the operating section of the element are described. By changing at least one of the above, even if the amount of radiation received by the element is the same, the amount of the change obtained from the element can be changed, that is, the sensitivity of the element can be adjusted. Therefore, as in the first aspect, in at least one of the plurality of elements and the remaining elements, the effective area of the radiation absorbing portion of the element, the effective dimension of the displacement portion of the element, and At least one of the effective areas of the working portion of the element
By making the two different, the influence of the variation in the amount of radiation incident on each element due to the imaging unit that forms an image of the radiation on the area where the plurality of elements are arranged is reduced. be able to.

Therefore, according to the first aspect, for example, a high-quality image corresponding to a radiation image can be captured without requiring electrical correction.

An optical readout radiation-displacement converter according to a second aspect of the present invention is an optical readout radiation-displacement converter having a plurality of one-dimensionally or two-dimensionally arranged elements. Each of the plurality of elements receives a radiation absorbing portion that generates heat by receiving radiation, a displacement portion that generates displacement in accordance with the heat generated in the radiation absorbing portion, a readout light that receives the readout light, and a readout light that is received. And a light action section for giving a change according to the displacement of the displacement section to emit the changed readout light. Then, the influence of the variation in the amount of radiation incident on each of the elements due to the imaging unit that forms an image of the radiation on the region where the plurality of elements is arranged is reduced, In at least one of the elements and the remaining elements, at least one of an effective area of the radiation absorbing part of the element, an effective dimension of the displacement part of the element, and an effective area of the light acting part of the element is smaller. Is different.

Here, the effective area of the radiation absorbing section refers to the area of the radiation absorbing section that receives incident radiation. Even if the amount of radiation per unit area incident on the element is the same, the displacement of the displacement unit increases as the effective area of the radiation absorption unit increases. Further, the effective dimension of the displacement portion is defined as a displacement of the displacement portion that determines a change amount of the readout light given to the readout light received by the light acting portion when receiving a certain amount of heat. Means a given dimension. Further, the effective area of the light acting portion refers to an area corresponding to the cross-sectional area of the changed readout light effectively emitted to the outside from the light acting portion. The effective area of the light acting portion is, for example, when the cross-sectional area of the changed read light is determined by the area of the predetermined portion itself of the light acting portion, is the area of the predetermined portion, and is emitted from the light acting portion. If there is a mask having a window that consequently limits the cross-sectional area of the changed read-out light, this is the area of the window.

According to the second aspect, infrared rays, X-rays,
Radiation such as ultraviolet rays is applied to the radiation absorbing section of each element, and the radiation is absorbed by the radiation absorbing section of each element and converted into heat. The displacement portions of the respective elements are respectively displaced in accordance with the heat generated in the radiation absorbing sections of the respective elements. That is, the radiation incident on each element is converted into the displacement of the displacement part of each element according to the amount. On the other hand, readout light such as visible light or other light is applied to the light action portion of each element. The light acting section of each element gives the received readout light a change in accordance with the displacement of the displacement section and emits the changed readout light, so that the radiation applied to the radiation absorption section of each element eventually becomes It will be converted into a change in the reading light. Therefore, an optical image corresponding to the radiation image formed in the region where each of the elements is arranged can be formed based on the readout light emitted from the light acting portion of each of the elements.

In the second aspect, based on such a principle, the effective area of the radiation absorbing part of the element, the effective dimension of the displacement part of the element, and the effective area of the light acting part of the element are determined. If at least one of them is changed, even if the amount of radiation received by the element is the same, it is possible to change the amount of light in a portion corresponding to the element in the optical image, that is, to adjust the sensitivity of the element. Can be. Therefore, as in the second aspect, in at least one of the plurality of elements and the remaining elements, the effective area of the radiation absorbing portion of the element, the effective dimension of the displacement portion of the element, and By making at least one of the effective areas of the light acting portions of the element different,
It is possible to reduce the influence of variations in the amount of radiation incident on each of the elements due to the imaging unit that forms an image of radiation on the region where the plurality of elements are arranged.

For this reason, according to the second aspect, a high-quality optical image corresponding to the radiation image can be directly observed with the naked eye, or a high-quality optical image corresponding to the radiation image can be obtained without requiring electrical correction. Or the like.

According to a third aspect of the present invention, there is provided an optical readout radiation-displacement converter according to the second aspect, wherein the light acting section reflects the received readout light in accordance with the displacement of the displacement section. This is a reflection part whose inclination changes.

According to a fourth aspect of the present invention, there is provided an optical readout type radiation-displacement conversion apparatus according to the second aspect, wherein the light acting section changes the received readout light according to the displacement of the displacement section. This is an interference unit that emits light by changing to interference light having an interference state.

In the third and fourth aspects, examples of the light acting section are given, but in the second aspect, the light acting section is not limited to these examples.

According to a fifth aspect of the present invention, there is provided an optical readout radiation-to-displacement converter according to any one of the second to fourth aspects, wherein the at least one element is disposed at a central portion. And the remaining elements are elements arranged in a peripheral portion. Note that the central portion means a central portion in a region where the plurality of elements are arranged, and the peripheral portion means a peripheral portion in a region where the plurality of elements are arranged.

As in the fifth aspect, when the elements that are different from each other are the element at the center and the element at the periphery, particularly,
It is possible to reduce the influence of the shading phenomenon caused by the image forming part.

An imaging device according to a sixth aspect of the present invention comprises:
An optical readout radiation-displacement conversion device according to any one of the second to fifth aspects, and irradiating the readout light to each of the elements, and applying each of the readout light based on the changed readout light emitted from each of the elements. A readout optical system for forming an optical image corresponding to the displacement of the element; and the image forming section.

According to the sixth aspect, the optical image is formed based on the changed readout light emitted from each element. Therefore, if the visible light is used as the readout light, the optical image corresponding to the radiation image is formed. The optical image can be observed with the naked eye. Needless to say, an image pickup means for picking up the optical image may be provided, and in that case, an image by radiation can be picked up.

According to the sixth aspect, the optical readout radiation-displacement converter according to any one of the second to fifth aspects is used as an optical readout radiation-displacement converter. As can be seen from the above description regarding the second embodiment, a high-quality optical image corresponding to the image of radiation can be directly observed with the naked eye, without requiring electrical correction.
For example, a high-quality image corresponding to the radiation image can be captured.

An imaging device according to a seventh aspect of the present invention comprises:
It is provided with an optical readout radiation-displacement conversion device, a readout optical system, and an imaging unit. The optical readout radiation-displacement conversion device is an optical readout radiation-displacement conversion device having a plurality of one-dimensionally or two-dimensionally arranged elements, each of the plurality of elements receiving radiation. A radiation absorbing unit that generates heat, a displacement unit that generates displacement in accordance with the heat generated in the radiation absorbing unit, receives the readout light, and gives a change to the received readout light according to the displacement of the displacement unit. And a light action section for emitting the changed readout light. The readout optical system irradiates each of the elements with the readout light, and forms an optical image according to the displacement of each of the elements based on the changed readout light emitted from each of the elements. The imaging unit forms an image of radiation on an area where the plurality of elements are arranged. Then, at least one of the plurality of elements and the remaining elements are received by the elements so that the influence of the variation in the amount of radiation incident on each of the elements due to the imaging unit is reduced. In the case where the amount of radiation is the same, so that the light amount of the portion corresponding to the element in the optical image is different,
The optical readout radiation-displacement conversion device is configured.

According to the seventh aspect, the same advantages as in the sixth aspect can be obtained. In the seventh aspect, an example of the configuration of an optical readout type radiation-displacement conversion device that makes at least one element of the plurality of elements different from the remaining elements as described above includes the radiation absorption of the element. The effective area of the portion, the effective dimension of the displacement portion of the element, and at least one of the effective area of the light acting portion of the element are different, but the seventh embodiment is limited to the example. It is not something to be done.

An imaging device according to an eighth aspect of the present invention comprises:
It is provided with an optical readout radiation-displacement conversion device, a readout optical system, and an imaging unit. The optical readout radiation-displacement conversion device is an optical readout radiation-displacement conversion device having a plurality of one-dimensionally or two-dimensionally arranged elements, each of the plurality of elements receiving radiation. A radiation absorbing unit that generates heat, a displacement unit that generates displacement in accordance with the heat generated in the radiation absorbing unit, receives the readout light, and gives a change to the received readout light according to the displacement of the displacement unit. And a light action section for emitting the changed readout light. The readout optical system irradiates each of the elements with the readout light, and forms an optical image according to the displacement of each of the elements based on the changed readout light emitted from each of the elements. The imaging unit forms an image of radiation on an area where the plurality of elements are arranged. Then, a filter having a transmittance distribution such that variation in the amount of radiation incident on each element caused by the imaging unit is reduced is provided at a front position (the optical reading type) of the optical reading type radiation-displacement converter. Position on one side of the radiation-to-displacement converter and on the side where the radiation is incident) or the amount of radiation incident on the respective elements caused by the imaging unit. A filter having a transmittance distribution such that the influence of variation is reduced is arranged between the optical readout type radiation-to-displacement converter and the position where the optical image is formed.

According to the eighth aspect, the filter reduces variations in the amount of radiation incident on each of the elements due to the imaging portion or the influence thereof. Therefore,
Even if each element is configured exactly the same, a high-quality optical image corresponding to the radiation image can be directly observed with the naked eye, or a high-quality image corresponding to the radiation image can be captured without electrical correction. You can do.

[0036]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a radiation-displacement conversion device and an imaging device according to the present invention will be described with reference to the drawings. In the following description, an example will be described in which the radiation is infrared light and the readout light is visible light. However, in the present invention, the radiation may be X-rays, ultraviolet rays, or other various radiations other than infrared light, May be other light than visible light.

[First Embodiment]

FIG. 1 is a view showing an optical readout type radiation-displacement converter 100 according to a first embodiment of the present invention, and FIG. 1A is a schematic sectional view showing one element (pixel) thereof. FIG. 1B is a schematic plan view showing a state in which the reflecting portion 9 in FIG. 1A is removed, and FIG. 1C is a schematic plan view showing the entire optical readout type radiation-displacement conversion device. is there.
In FIG. 1B, for convenience, a line that should be a hidden line (dotted line) is also indicated by a solid line. FIG. 2 is a schematic configuration diagram showing an example of an imaging device using the optical readout radiation-displacement conversion device 100 shown in FIG. FIG. 3 shows FIG.
5 is a diagram showing an example of characteristics of infrared light i incident on the optical readout type radiation-displacement converter 100 in the imaging device shown in FIG.

As shown in FIGS. 1 (a) and 1 (b), the optical readout type radiation-to-displacement converter 100 according to the present embodiment
A substrate 1 such as a silicon substrate that transmits infrared rays i, and a supported portion 3 supported in a state of floating above the substrate 1 with a space 6 therebetween via legs 2 disposed on the substrate 1. ing. The supported portion 3 has two films 4 and 5 that are overlapped with each other. One end of each of the membranes 4 and 5 is supported via the leg portion 2 to form a cantilever. Membrane 4
The film 5 and the film 5 are made of different materials having different expansion coefficients, and form a so-called thermal bimorph structure. On the lower surface of the lower film 4, an infrared absorbing film 7 is formed. In the present embodiment, the films 4 and 5 constitute a displacement unit that displaces with respect to the substrate 1 in accordance with the heat generated in the infrared absorption film 7. For example, when the expansion coefficient of the lower film 4 is larger than the expansion coefficient of the upper film 5, the film is curved upward and inclined by the heat. Note that, without providing the infrared absorbing film 7, the film 4 can also be used as an infrared absorbing portion. Further, the supported portion 3 is a light acting portion that receives the readout light j and gives the received readout light j a change corresponding to the displacement of the displacement portions 4 and 5 to emit the changed readout light. It has a reflection section 9. In the present embodiment, as shown in FIG. 1A, a part of the reflector 9 is fixed to the tip end side of the film 5 and the other part is arranged above the film 5 with a space therebetween. Have been. Therefore, the reflecting section 9 reflects the received readout light j and changes its inclination in accordance with the displacement of the displacement sections 4 and 5, and reflects the received readout light in a reflection direction corresponding to the displacement of the films 4 and 5. Note that, in the present embodiment, the film 5 is parallel to the surface of the substrate 1 in a state where the infrared ray i is not received. However, the films 4 and 5 may be tilted in advance in a state where the infrared rays i are not received. Note that the film 5 may also be used as a reflection unit without providing the reflection unit 9.

In this embodiment, as shown in FIG. 1 (c), the films 4 and 5, the infrared absorbing film 7, the reflecting portion 9 and the leg 2 constitute one pixel (element), and the pixel is 11 × Eleven pieces are arranged two-dimensionally on the substrate 1. In FIG. 1 (c), 9
0 indicates a pixel area occupied by one pixel. Of course,
The number of pixels is not limited.

In the present embodiment, as shown in FIG. 1 (c), the area of the reflection portion 9 of each pixel is determined in accordance with the characteristics shown in FIG. The position is smaller as the position is closer to the center, and larger as the position is farther from the center. For this reason, the area of the reflective portion 9 of the central pixel is smaller than the area of the reflective portion 9 of the peripheral pixel. Each pixel has the same configuration except for the area of the reflection section 9. The setting of the area of the reflection section 9 of each pixel described above will be described later in detail.

The conversion device 100 shown in FIG. 1 can be manufactured using semiconductor manufacturing techniques such as film formation and patterning, and formation and removal of a sacrificial layer (each optical readout type radiation described later). The same applies to the displacement conversion device.).

Here, the imaging apparatus shown in FIG. 2 will be described. This imaging apparatus includes a readout optical system and a two-dimensional CC as an imaging unit, in addition to the conversion apparatus 100 described above.
D20 and an infrared imaging lens 30 for collecting infrared rays i from the heat source 31 as an observation target and forming an infrared image of the heat source 31 on the surface of the converter 100 where the infrared absorbing film 7 is distributed. It is composed of In FIG. 2, 30a
Denotes a lens barrel of the imaging lens 30.

In this imaging device, the readout optical system includes an LD (laser diode) 10 as readout light supply means for supplying readout light, and reads out the readout light from the LD 10 to all pixels of the conversion device 100. A first lens system 11 that guides the light to the reflection unit 9, and selectively passes only a desired light beam among the light beams of the readout light reflected by the reflection units 9 of all the pixels after passing through the first lens system 11. A second deflecting unit that cooperates with the first lens system 11 to form a conjugate position with the plurality of reflecting units 9 and guides the light beam that has passed through the light beam restricting unit 12 to the conjugate position. And a lens system 13. CCD at the conjugate position
The light receiving surfaces 20 are disposed, and the reflecting portions 9 of all the pixels and the plurality of light receiving elements of the CCD 20 are optically conjugated by the lens systems 11 and 13.

The LD 10 is arranged on one side (the right side in FIG. 2) with respect to the optical axis O of the first lens system 11, and supplies the reading light so that the reading light passes through the one side area. I do. In this example, the LD 10 is the first lens system 1
The readout light passing through the first lens system 11 is arranged near the focal plane on the side of the first lens system 13 so as to irradiate the reflecting portions 9 of all the pixels as substantially parallel light beams. In order to enhance the contrast of the optical image on the CCD 20, a readout light stop may be provided in front of the LD 10.
In this example, the conversion device 100 is arranged so that the surface of the substrate 1 (in this example, parallel to the surface of the reflection section 9 when no infrared light enters) is orthogonal to the optical axis O. However, it is not limited to such an arrangement.

The light beam restricting section 12 is arranged such that a portion for selectively passing only the desired light beam is on the other side (left side in FIG. 2) with respect to the optical axis O of the first lens system 11. It is configured as follows. In the present example, the light flux limiting unit 12
Is composed of a light-shielding plate having an aperture 12a, and is configured as an aperture stop. In this example, when no infrared rays are incident on the infrared absorbing film 7 of any pixel and the surfaces of the reflection portions 9 of all the pixels are parallel to the surface of the substrate 1, the reflection portions 9 of all the pixels The light beam restricting unit is configured such that the position of the converging point where the reflected light beam (the bundle of individual light beams reflected by each reflecting unit 9) is condensed by the first lens system 11 substantially coincides with the position of the opening 12a. 12 are arranged. Opening 1
The size of 2a is determined so as to substantially coincide with the size of the cross section of the light beam at the converging point. However,
It is not limited to such arrangement and size.

According to the imaging device shown in FIG.
The light beam bundle 41 of the readout light emitted from the first lens system 11 enters the first lens system 11 and becomes a substantially parallel light beam bundle 42. Next, the substantially collimated light beam 42 enters the reflection units 9 of all the pixels of the conversion device 100 at an angle with respect to the normal line of the substrate 1.

On the other hand, the heat source 31 is
From the heat source 31 is focused, and an infrared image of the heat source 31 is formed on the surface of the converter 100 where the infrared absorbing film 7 is distributed. Thereby, infrared rays are incident on the infrared absorbing film 7 of each pixel of the conversion device 100. The incident infrared rays are absorbed by the infrared absorbing film 7 and converted into heat. In response to the heat generated in the infrared absorbing film 7, the films 4 and 5 constituting the cantilever as the displacement portions are curved upward and inclined. For this reason, each reflecting portion 9 is inclined with respect to the surface of the substrate 1 by an amount corresponding to the amount of infrared light incident on the infrared absorbing film 7 corresponding to the reflecting portion 9.

Now, it is assumed that no infrared rays are incident on the infrared absorbing films 7 of all the pixels, and the reflection portions 9 of all the pixels are parallel to the substrate 1. The light beam 42 incident on the reflection portions 9 of all the pixels is reflected by these reflection portions 9 to become a light beam 43, and is again incident on the first lens system 11 from the side opposite to the LD 10 side. It becomes a condensed light beam 44 and condenses on the portion of the opening 12a of the light beam restricting unit 12 arranged at the position of the condensing point of the condensed light beam 44. As a result, the condensed light beam 44 passes through the opening 12a, becomes a divergent light beam 45, and enters the second lens system 13. The divergent light beam 45 incident on the second lens system 13 becomes, for example, a substantially parallel light beam 46 by the second lens system 13 and is incident on the light receiving surface of the CCD 20. Here, since the reflecting portion 9 of each pixel and the light receiving surface of the CCD 20 are conjugated by the lens systems 11 and 13,
Each reflecting portion 9 is provided on each corresponding portion on the light receiving surface 20.
Is formed, and as a whole, an optical image which is a distribution image of the reflection portions 9 of all the pixels is formed.

Now, it is assumed that a certain amount of infrared light is incident on the infrared absorption film 7 of a certain pixel, and that the reflecting portion 9 of the pixel is inclined with respect to the surface of the substrate 1 by an amount corresponding to the amount of the incident light. The individual light beam of the light beam 42 incident on the reflection unit 9 is:
Since the light is reflected by the reflecting portion 9 in a direction different by the amount of tilt, after passing through the first lens system 11, the light condensing point (that is, the opening 12a) by an amount corresponding to the amount of tilt is obtained.
Is condensed at a position shifted from the position, and is blocked by the light flux limiting unit 12 by an amount corresponding to the amount of inclination. Therefore, the amount of light of the image of the reflection unit 9 in the entire optical image formed on the CCD 20 is reduced by an amount corresponding to the amount of inclination of the reflection unit 9.

Therefore, the optical image formed by the readout light on the light receiving surface of the CCD 20 reflects the infrared image incident on the conversion device 100. This optical image is
An image is captured by the CCD 20. The optical image may be observed with the naked eye using an eyepiece or the like without using the CCD 20.

Needless to say, the configuration of the readout optical system is not limited to the configuration described above.

By the way, as schematically shown in FIG. 2, the solid-state angle θa at which the infrared absorbing film 7 of the pixel at the center of the conversion device 100 looks at the infrared light i incident through the imaging lens 30 is shown.
Is generally larger than the solid angle θb at which the infrared absorption film 7 of the peripheral pixels sees the infrared light i incident through the imaging lens 30. For this reason, even if the temperature distribution of the heat source 31 is uniform, the amount of incident infrared rays is large in the pixel at the center and the amount of incident infrared light is small in the pixels in the peripheral part. FIG. 3 shows an example of the relationship between the positions of such pixels and the amount of incident infrared rays. The horizontal axis in FIG. 3 indicates the relative position of the pixel,
Indicates a center position, and -1 and 1 indicate end positions. FIG.
The vertical axis in the middle indicates the relative amount of infrared light incident on the infrared absorption film 7 of the pixel, and the amount of infrared light incident on the infrared absorption film 7 of the center pixel is normalized to 1. FIG. 3 explained above
Is a shading phenomenon. Although it is technically possible to design the imaging lens 30 so that the shading phenomenon does not appear, in that case, the configuration of the imaging lens 30 becomes extremely complicated and extremely expensive. Would.

Further, as shown in FIG. 2, infrared rays i 'also exit from the lens barrel 30a of the imaging lens 30 and enter the infrared absorbing film 7 of a certain pixel, which is not shown in FIG. The infrared absorption film 7 of each pixel is also generated by the infrared light i '.
The amount of infrared light incident on the light source varies.

Therefore, assuming that all the pixels of the conversion device 100 are completely identical and the area of the reflecting portion 9 is the same for all the pixels, if the light source 31 has a uniform temperature distribution, However, the optical image formed on the light receiving surface of the CCD 20 is not based on the uniform light amount, and the light amount of the portion corresponding to the reflective portion 9 of the peripheral pixel is reduced by the shading phenomenon. Is lower than the light amount of the portion corresponding to the reflection portion 9 of the above. In addition, the light amount of each part of the optical image varies due to the influence of the infrared ray i 'from the lens barrel 30a.

On the other hand, in the conversion device 100 according to the present embodiment, the imaging lens 30 which is an imaging unit for forming an infrared image on the area where the infrared absorption film 7 of each pixel is arranged, and its mirror. The area of the reflecting portion 9 (corresponding to the effective area of the light acting portion) of each pixel is made different so as to reduce the influence of the variation in the amount of infrared light incident on each pixel due to the cylinder 30a. Specifically, in the present embodiment, taking only the shading phenomenon into consideration, as described above, the area of the reflection portion 9 of each pixel is reduced to the characteristic shown in FIG. 3 as shown in FIG. Accordingly, the smaller the pixel is located at the center (the center of the pixel arrangement area), the smaller the pixel is, and the farther the pixel is located from the center, the larger.

Therefore, according to the present embodiment, CC
In the optical image formed on the light receiving surface of D20, the light amount of the portion corresponding to the reflective portion 9 of the peripheral pixel is reduced as compared with the light amount of the portion corresponding to the reflective portion 9 of the central pixel. And the shading phenomenon is corrected,
The optical image is of good quality. Therefore, the CCD 20
A special electrical process for correcting the image signal from the camera becomes unnecessary. When the optical image is directly observed with the naked eye via an eyepiece or the like, a high-quality optical image corresponding to an infrared image can be observed. Note that the area of the reflection section 9 of each pixel may be set, for example, by calculating the amount of infrared rays incident on each pixel at the design stage of the imaging lens 30 and canceling the characteristics.

In the present embodiment, as described above, only the shading phenomenon is considered. But, for example,
After the prototype of the imaging lens 30 and its lens barrel 30a, etc., an infrared film or another infrared imaging device is arranged in an area where the infrared absorbing film 7 of each pixel is arranged.
If the in-plane distribution of the amount of incident light to zero is experimentally determined, the area of the reflection portion 9 of each pixel is determined so as to cancel the obtained characteristics, and the conversion device 100 is manufactured, if only the shading phenomenon occurs, In addition, the influence of the infrared ray i 'from the lens barrel 30a can be corrected, and a higher quality optical image can be obtained. This applies to each of the embodiments described later.

[Second Embodiment]

FIG. 4 is a schematic plan view showing one pixel of the optical readout type radiation-to-displacement converter according to the second embodiment of the present invention, from which the reflecting portion 9 has been removed. FIG.
Corresponds to FIG. 1 (b). 4, elements that are the same as elements in FIG. 1 or that correspond to elements in FIG. 1 are given the same reference numerals, and overlapping descriptions are omitted.

An optical readout radiation-to-displacement converter according to the second embodiment of the present invention is a modification of the converter 100 according to the first embodiment described below.

That is, in the first embodiment, each pixel has the same structure except for the area of the reflection section 9, whereas in the present embodiment, each pixel is formed of the infrared absorbing film 7. Except for the effective area, they have the same configuration including the area of the reflector 9.

In the pixel shown in FIG. 4, the effective area of the infrared absorbing film 7 is reduced by narrowing the width of the infrared absorbing film 7 as compared with the pixels shown in FIGS. 1 (a) and 1 (b). . Therefore, even if the same amount of infrared light i per unit area enters both pixels, the pixel shown in FIG.
(A) As compared with the pixels shown in (b), the amount of displacement of the distal ends of the displacement units 4 and 5 is smaller, the inclination of the reflection unit 9 is smaller, and the sensitivity is lower. As described above, the shorter the width of the infrared absorbing film 7, the lower the sensitivity of the pixel becomes, and conversely, the longer the width of the infrared absorbing film 7, the higher the sensitivity of the pixel becomes.

Although not shown in the drawings, the optical readout type radiation-to-displacement converter according to the present embodiment utilizes this characteristic to cancel the characteristic shown in FIG. The effective area is determined.

Therefore, the present embodiment also provides the same advantages as the first embodiment.

The effective area of the infrared absorbing film 7 is not changed by reducing the width of the infrared absorbing film 7 but by, for example, forming the infrared absorbing film 7 in a number of dot patterns or stripe patterns and changing the density. May be changed.

The conversion apparatus according to the present embodiment is shown in FIG.
It is needless to say that the imaging device shown in FIG.

[Third Embodiment]

FIG. 5 is a diagram showing one pixel of an optical readout type radiation-to-displacement converter according to a third embodiment of the present invention. FIG. 5A is a schematic sectional view thereof, and FIG. 5) is a schematic plan view showing a state in which the reflection unit 9 in FIG. 5A is removed. FIGS. 5A and 5B correspond to FIGS. 1A and 1B, respectively. 5, elements that are the same as elements in FIG. 1 or that correspond to elements in FIG. 1 are given the same reference numerals, and overlapping descriptions are omitted.

An optical readout type radiation-to-displacement converter according to the third embodiment of the present invention is a modification of the converter 100 according to the first embodiment as follows.

That is, in the first embodiment, each pixel has the same configuration except for the area of the reflection section 9, whereas in the present embodiment, each pixel includes the displacement sections 4, 5 , Except for the length from the leg portion 2 side to the tip (corresponding to the effective dimension of the displacement portions 4 and 5), the configuration is the same including the area of the reflection portion 9.

In the pixels shown in FIGS. 5A and 5B, FIG.
The length from the leg 2 side of the displacement parts 4 and 5 to the tip is shorter than the pixels shown in (a) and (b). Therefore, even if the same amount of infrared rays i per unit area is incident on both pixels, the pixels shown in FIGS.
As compared with the pixel shown in (b), the amount of displacement of the distal ends of the displacement units 4 and 5 is smaller, the inclination of the reflection unit 9 is smaller, and the sensitivity is lower. As described above, the shorter the length from the leg 2 side of the displacement units 4 and 5 to the tip, the lower the sensitivity of the pixel becomes, and conversely, from the leg 2 side of the displacement units 4 and 5 to the tip. The longer the length is, the higher the sensitivity of the pixel is.

Although not shown in the drawings, the optical readout radiation-displacement converter according to the present embodiment utilizes this characteristic to cancel the characteristic shown in FIG. 5, the length from the leg 2 side to the tip is determined.

Therefore, according to this embodiment, the same advantages as those of the first embodiment can be obtained.

The converter according to the present embodiment is shown in FIG.
It is needless to say that the imaging device shown in FIG.

[Fourth Embodiment]

FIG. 6 is a view showing one pixel of an optical readout type radiation-to-displacement converter according to a fourth embodiment of the present invention. FIG. 6 (a) is a schematic sectional view thereof, and FIG. 7) is a schematic plan view showing a state in which the reflection section 9 in FIG. 6A is removed. FIGS. 6A and 6B respectively correspond to FIGS. 1A and 5B and FIGS. 5A and 5B. 6, elements that are the same as elements in FIG. 1 or that correspond to elements in FIG. 1 are given the same reference numerals, and overlapping descriptions are omitted.

An optical readout radiation-to-displacement converter according to a fourth embodiment of the present invention is a modification of the converter 100 according to the first embodiment described below.

That is, in the first embodiment, each pixel has the same configuration except for the area of the reflection portion 9, whereas in the present embodiment, each pixel has the displacement portions 4, 5 Other than the fixed position with respect to the reflection part 9 in
The configuration is the same, including the area of the reflection portion 9 and the length from the leg 2 side to the tip of the displacement portions 4 and 5.

In the pixel shown in FIGS. 6 (a) and 6 (b), the reflecting portion 9 is fixed not at the tip of the displacement portions 4 and 5, but at a position shifted from the tip to the leg 2 side. The distance from the leg 2 to the position where the reflector 9 is fixed is shorter than that of the pixel shown in FIG. The pixels shown in FIGS. 6A and 6B are the legs 2
(A) and (b) in FIG.
Are the same as the pixels shown in FIG. Therefore, FIG.
When the same amount of infrared rays i per unit area is incident on the pixels shown in FIGS. 5A, 5B, 5A and 5B, and the pixels shown in FIGS. 1A and 1B, FIG. 5 (a) and 5 (b) have the same inclination of the reflection portion 9, and the pixel shown in FIGS. 6 (a) and 6 (b) is the same as the pixel shown in FIGS.
7A and 7B, the inclination of the reflecting portion 9 is smaller than that of the pixel shown in FIG. As described above, even if the lengths of the displacement portions 4 and 5 from the leg 2 side to the tip are the same, the distance from the leg 2 to the fixing position of the reflection portions 9 of the displacement portions 4 and 5 is reduced. The sensitivity of the pixel decreases as the distance from the leg 2 to the fixed position of the reflection portion 9 of the displacement portions 4 and 5 increases. The distance from the leg portion 2 to the position where the reflecting portions 9 of the displacement portions 4 and 5 are fixed also corresponds to the effective size of the displacement portions 4 and 5.

Although not shown in the drawing, the optical readout type radiation-to-displacement converter according to the present embodiment utilizes this characteristic to cancel the characteristic shown in FIG. The distance between the displacement units 4 and 5 and the position where the reflection unit 9 is fixed is determined.

Therefore, the present embodiment also provides the same advantages as the first embodiment.

The conversion device according to the present embodiment is also the same as that shown in FIG.
It is needless to say that the imaging device shown in FIG.

In the first to fourth embodiments described above, in each pixel, any one of the area of the reflecting portion 9, the effective area of the infrared absorbing film 7, and the effective size of the displacement portions 4 and 5 is used. The characteristic shown in FIG. 3 was canceled by changing only one of them. However, in the present invention,
The characteristics shown in FIG. 3 may be canceled by changing two or more of these at the same time for each pixel.

[Fifth Embodiment]

FIG. 7 is a diagram showing an optical readout type radiation-to-displacement converter 200 according to a fifth embodiment of the present invention, and FIG. 7 (a) is a schematic sectional view showing one element (pixel) thereof. FIG. 7B is a schematic plan view showing a state where the mask 203 in FIG. 7A is removed, and FIG. 7C is another element (pixel) of the optical readout type radiation-displacement converter. FIG. 4 is a schematic plan view showing a state where a mask 203 is removed. Note that, in FIGS. 7B and 7C, a line that should be a hidden line (dotted line) is also indicated by a solid line for convenience. FIG.
Is an optical readout radiation-to-displacement converter 200 shown in FIG.
FIG. 1 is a schematic configuration diagram illustrating an example of an imaging device that uses an image. 7, elements that are the same as elements in FIG. 1 or that correspond to elements in FIG. 1 are given the same reference numerals, and redundant descriptions are omitted. Also,
8, elements that are the same as elements in FIG. 2 or that correspond to elements in FIG. 2 are given the same reference numerals, and overlapping descriptions are omitted.

The optical readout type radiation-to-displacement converter 200 according to this embodiment is the same as the converter 100 shown in FIG.
Only the following points are different.

In the present embodiment, as shown in FIG. 7, the supported portion 3 is provided with a reading light j instead of the reflecting portion 9 in FIG.
It has a half mirror unit 201 that reflects only part of _zero . The half mirror unit 201 is fixed to the free ends of the displacement units 4 and 5, and is displaced according to the displacement of the displacement units 4 and 5. An area on the substrate 1 facing the half mirror section 201 is provided with a half mirror section 20.
A total reflection mirror 202 is formed as a reflection section for reflecting the readout light transmitted through 1.

As shown in FIG. 7A, the read light j₀
When the light enters the half mirror unit 201, the read light
j₀Is reflected by the half mirror unit 201 and reflected light
j₁And read-out that has entered the half mirror unit 201
Light j₀Is transmitted through the half mirror unit 201 and totally reflected
The light is reflected by the mirror 202 and returns to the half mirror unit 201 again.
It enters from the lower surface. From the bottom surface to the half mirror unit 201 again
Part of the read light that has entered the half mirror portion 2
01 and transmitted light j₂Becomes This transmitted light j ₂And said
Reflected light j₁Between the half mirror unit 201 and total reflection
Optical path length corresponding to twice the distance d1 from the mirror 202
There is a difference. Therefore, the reflected light j₁And transmitted light j₂Between
Of the reflected light j₁And transmission
Light j₂According to this optical path length difference (therefore, the displacement part
Interfering light having an interference intensity (corresponding to displacements of 4 and 5)
As a result, the light is emitted from the half mirror unit 201.

As can be seen from the above description, in the present embodiment, the half mirror unit 201 and the total reflection mirror 202
(Strictly speaking, the overlapping portion of the two) is, receives the reading light j _0, interference portion to be emitted instead of the interference light which has an interference state corresponding to the reading light j ₀ which has received the displacement of the displacement portion 4,5 , And this interference part is a light acting part.

In this embodiment, the displacement parts 4 and 5, the infrared absorbing film 7, the half mirror part 201, the total reflection mirror 202
And the leg 2 as one pixel (element), the pixels are two-dimensionally arranged on the substrate 1.

In the present embodiment, FIG.
Read light j ₀Half of the
Masking light other than the interference light emitted from the error portion 201
A mask 203 made of a light shielding film is provided. This ma
The disk 203 has a half mirror unit 201 and a total reflection mirror.
Window in the area corresponding to the area where
203a are formed.

In this embodiment, all the pixels have the same configuration except for the areas of the half mirror unit 201 and the total reflection mirror 202. This will be described in detail later.

Here, the imaging apparatus shown in FIG. 8 will be described. This imaging apparatus includes a reading optical system and a two-dimensional CC as an imaging unit, in addition to the conversion apparatus 200 described above.
D20 and an infrared imaging lens 30 for collecting infrared rays i from the heat source 31 as an observation target and forming an infrared image of the heat source 31 on the surface of the converter 200 where the infrared absorbing film 7 is distributed. It is composed of In FIG. 8, 30a
Denotes a lens barrel of the imaging lens 30.

In this example, the readout optical system is the conversion device 2
The read light j ₀ respectively to the half mirror unit 201 of each pixel 00 is irradiated, the half mirror unit 2 of each pixel
An optical image corresponding to the displacement of the displacement units 4 and 5 of each pixel is formed based on the interference light emitted from the light source 24. Specifically, as shown in FIG.
1, aperture 242, beam splitter 243, lens 24
4,245.

In this example, as in the case of FIG. 2, the infrared rays i are condensed by the
An infrared image is formed on the surface where the zero infrared absorbing film 7 is distributed. As a result, the displacement units 4 and 5 of each pixel are displaced according to the amount of incident infrared rays on the infrared absorption film 7 of each pixel of the converter 200. Also in this example, the relationship between the position of the pixel and the amount of incident infrared rays is as shown in FIG.

[0097] On the other hand, light emitted from the light source 241 is reflected by the beam splitter 243 and enters the converter 200 as a reading light _{j 0} through lens 244. As a result, interference light having an interference intensity corresponding to the displacement of the displacement units 4 and 5 of each pixel is emitted from the half mirror unit 201 of each pixel toward the lens 244, and this interference light is
4. An optical image due to the interference light is formed on the CCD 20 via the beam splitter 243 and the lens 245, and the incident infrared image is converted into an optical image. This optical image is C
An image is captured by the CD 20. Instead of using the CCD 20, the optical image may be observed with the naked eye using an eyepiece or the like.

Needless to say, the configuration of the readout optical system is not limited to the configuration described above.

Also in this example, the shading phenomenon as shown in FIG.
Infrared absorbing film 7 of each pixel also by infrared i ′ from a
The amount of infrared light incident on the light source varies.

By the way, in the pixel shown in FIG. 7B, as compared with the pixel shown in FIG. 7C, the width of the half mirror section 201 and the total reflection mirror 202 is narrowed, so that the effective area of the interference section is reduced. Has been reduced. Therefore,
When the same amount of infrared light i is incident on both pixels and the displacement amounts of the displacement parts 4 and 5 are the same, FIG.
The amount of light at the portion corresponding to the pixel shown in FIG. 7B is larger than the amount of light at the portion corresponding to the pixel shown in FIG. 7C in the optical image. Thus, the half mirror unit 2
01 and the area of the total reflection mirror 202 are increased, the light amount of a portion corresponding to the pixel in the optical image is increased, and conversely, as the area of the half mirror unit 201 and the total reflection mirror 202 is reduced, The amount of light in a portion corresponding to the pixel in the optical image is reduced.

Although not shown in the drawings, in the optical readout type radiation-to-displacement converter 200 according to the present embodiment, the half mirror section of each pixel is used to cancel the characteristics shown in FIG. 201 and total reflection mirror 2
02 is determined.

Therefore, the present embodiment also provides the same advantages as those of the first embodiment.

It should be noted that even if the areas of the half mirror section 201 and the total reflection mirror 202 are the same,
If the area of the window 203a is changed, the effective area of the interference part (corresponding to the effective area of the light acting part) will be changed. Therefore, the area of the window 203a corresponding to each pixel may be determined so that the areas of the half mirror unit 201 and the total reflection mirror 202 of all the pixels are the same, and the characteristics shown in FIG. 3 are canceled.

The same modifications as those obtained in the second and third embodiments from the first embodiment are described below.
You may apply to this Embodiment. That is, the characteristics shown in FIG. 3 may be canceled by changing the effective area of the infrared absorbing film 7 and the effective dimensions of the displacement portions 4 and 5 of each pixel. Further, by changing at least two of the effective area of the interference part, the effective area of the infrared absorbing film 7 and the effective dimensions of the displacement parts 4 and 5 simultaneously for each pixel,
The characteristics shown in FIG. 3 may be canceled.

[Sixth Embodiment]

FIG. 9 is a schematic configuration diagram showing an imaging device according to the sixth embodiment of the present invention. In FIG. 9, the same or corresponding elements as those in FIG. 8 are denoted by the same reference numerals, and description thereof will be omitted.

The imaging apparatus according to the present embodiment is different from the imaging apparatus shown in FIG. 8 in that an optical readout radiation-displacement conversion apparatus 200 'is used instead of the conversion apparatus 200, The only difference is that an infrared filter 250 is added between 200 'and the imaging lens 30.

The conversion apparatus 200 'differs from the conversion apparatus 200 only in that all the pixels in the conversion apparatus 200' are configured identically.

The infrared filter 250 has transmittance distribution characteristics that cancel the characteristics shown in FIG. The infrared filter 250 may have an infrared transmittance distribution characteristic that cancels a variation in the amount of infrared light incident on the infrared absorption film 7 of each pixel caused by the infrared light i ′ from the lens barrel 30a of the imaging lens 30.

According to this embodiment, the same advantages as those of the first embodiment can be obtained.

Incidentally, the infrared filter 250 may be arranged in front of the imaging lens 30 (on the side of the heat source 31).

Further, instead of the infrared filter 250, a reading optical filter having a reading light transmittance characteristic which is arranged at an arbitrary position of the reading optical system and cancels the characteristic shown in FIG. 3 may be used.

Further, a modification similar to that obtained in this embodiment from the imaging device shown in FIG. 8 (all pixels are configured identically and filters are used) is applied to the imaging device shown in FIG. May be applied.

Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments.

Although the embodiments described above are examples in which the present invention is applied to an optical readout type radiation-to-displacement converter, the present invention is applicable to various other types of radiation-to-displacement converters such as a capacitance type. It goes without saying that it can be applied.

[0116]

As described above, according to the present invention,
It is possible to provide various types of radiation-displacement conversion devices capable of capturing a high-quality image corresponding to a radiation image without requiring electrical correction, and an imaging device using the same.

Further, according to the present invention, a high-quality optical image corresponding to a radiation image can be directly observed with the naked eye or a high-quality image corresponding to a radiation image can be obtained without requiring electrical correction. Can be provided.

[Brief description of the drawings]

FIG. 1 is a diagram showing an optical readout radiation-displacement conversion device according to a first embodiment of the present invention.

FIG. 2 is a schematic configuration diagram showing an example of an imaging device using the optical readout radiation-displacement conversion device shown in FIG.

FIG. 3 is a diagram illustrating an example of characteristics of infrared light incident on a light-reading radiation-displacement conversion device in the imaging device illustrated in FIG. 2;

FIG. 4 is a schematic plan view showing one pixel of an optical readout type radiation-to-displacement converter according to a second embodiment of the present invention.

FIG. 5 is a diagram showing one pixel of an optical readout type radiation-to-displacement converter according to a third embodiment of the present invention.

FIG. 6 is a diagram illustrating one pixel of an optical readout radiation-displacement conversion device according to a fourth embodiment of the present invention.

FIG. 7 is a diagram showing an optical readout radiation-to-displacement converter according to a fifth embodiment of the present invention.

8 is a schematic configuration diagram illustrating an example of an imaging device using the optical readout radiation-displacement conversion device illustrated in FIG.

FIG. 9 is a schematic configuration diagram showing an imaging device according to a sixth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Substrate 4 Film forming a part of displacement part 5 Film forming another part of displacement part 7 Infrared absorbing film 9 Reflecting part 10, 241 Light source 11 First lens system 12 Ray bundle limiting part 13 Second lens system 30 Image lens 30a Lens barrel 201 Half mirror section 202 Total reflection mirror 203 Mask 203a Window 100, 200, 200 'Optical readout radiation-displacement converter 242 Aperture 243 Beam splitter 244, 245 Lens 250 Infrared filter

Claims (8)

[Claims] 1. A radiation-displacement conversion device having a plurality of one-dimensionally or two-dimensionally arranged elements, wherein each of the plurality of elements receives radiation to generate heat, and A radiation-displacement conversion device, comprising: a displacement portion that generates a displacement corresponding to heat generated in the radiation absorbing portion; and an action portion that generates a predetermined change according to the displacement of the displacement portion. At least one of the plurality of elements so as to reduce the influence of the variation in the amount of radiation incident on each of the elements due to an imaging unit that forms an image on a region where the plurality of elements are arranged. The element and the remaining element are characterized in that at least one of an effective area of the radiation absorbing section of the element, an effective dimension of the displacement section of the element, and an effective area of the working section of the element is different. Radiation-displacement converter. 2. An optical readout radiation-displacement conversion device having a plurality of one-dimensionally or two-dimensionally arranged elements, wherein each of the plurality of elements receives radiation to generate heat. Part, a displacement part that generates displacement in accordance with the heat generated in the radiation absorbing part, and a readout light that receives the readout light and gives the received readout light a change in accordance with the displacement of the displacement part. And a light acting portion for emitting light. The light-reading type radiation-to-displacement conversion device, wherein the radiation image is incident on each of the elements caused by the image forming portion that forms an image of radiation on a region where the plurality of elements are arranged In order to reduce the effect of the variation in the amount of radiation, at least one of the plurality of elements and the remaining element have an effective area of the radiation absorbing portion of the element and a displacement area of the displacement portion of the element. Effective dimensions and applicable elements Light reading type radiation and at least one being different from of the effective area of the optical action part - displacement converter. 3. The light-reading type radiation-displacement conversion device according to claim 2, wherein the light acting portion is a reflection portion that reflects the received readout light and changes its inclination in accordance with the displacement of the displacement portion. . 4. The light working unit according to claim 2, wherein the read unit converts the received read light into interference light having an interference state corresponding to the displacement of the displacement unit and emits the same.
The optical readout radiation-displacement conversion device according to claim 1. 5. The device according to claim 2, wherein the at least one element is an element arranged in a central part, and the remaining elements are elements arranged in a peripheral part. Read-out type radiation-displacement conversion device. 6. An optical readout type radiation-displacement converter according to claim 2, further comprising: irradiating each element with the readout light, and applying the changed readout light emitted from each element. A readout optical system that forms an optical image corresponding to the displacement of each of the elements based on the readout optical system; and the image forming unit. 7. An optical readout radiation-displacement conversion device having a plurality of one-dimensionally or two-dimensionally arranged elements, wherein each of the plurality of elements receives radiation to generate heat. Part, a displacement part that generates displacement in accordance with the heat generated in the radiation absorbing part, and a readout light that receives the readout light and gives the received readout light a change in accordance with the displacement of the displacement part. And a light action section that emits light. The light-reading type radiation-displacement converter, irradiating the readout light to the respective elements, and the respective elements based on the changed readout light emitted from the respective elements. A readout optical system that forms an optical image corresponding to the displacement of: and an imaging unit that forms a radiation image on an area where the plurality of elements are arranged. Each element caused by the part In order to reduce the influence of the variation in the amount of incident radiation, at least one of the plurality of elements and the remaining element have the same optical image when the amount of radiation received by the elements is the same. The light-reading type radiation-to-displacement conversion device is configured so that the light amount of a portion corresponding to the element in the above-mentioned device is different. 8. An optical readout type radiation-displacement conversion device having a plurality of one-dimensionally or two-dimensionally arranged elements, wherein each of the plurality of elements receives radiation to generate heat. Part, a displacement part that generates displacement in accordance with the heat generated in the radiation absorbing part, and a readout light that receives the readout light and gives the received readout light a change in accordance with the displacement of the displacement part. And a light action section that emits light. The light-reading type radiation-displacement converter, irradiating the readout light to the respective elements, and the respective elements based on the changed readout light emitted from the respective elements. A readout optical system that forms an optical image corresponding to the displacement of the above, and an image forming unit that forms an image of radiation on a region where the plurality of elements are arranged. Each element caused by the part A filter having a transmittance distribution such that a variation in the amount of incident radiation is reduced is disposed at a front position of the optical readout type radiation-to-displacement converter, or each of the elements caused by the imaging unit A filter having a transmittance distribution such that the influence of the variation in the amount of radiation incident on the optical readout radiation-displacement conversion device and the optical image forming position is reduced. Imager.