JP2000214390A - Microscope stage - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a microscope stage in which operability is optimized and alignment of a sample is facilitated at reduced cost. SOLUTION: This microscope stage is equipped with a lower stage 206, an upper stage 205 supported to linearly move with respect to the stage 206, a drive force transmitting member 232 laid along it the moving direction of the stage 205 on the stage 206, a pulley 231 arranged at a position where its outer periphery nearly comes in contact with the part of the member 232 along the moving direction of the stage 205 and rotatably supported on the stage 205, and a handle part 250 arranged at a position separated from the part of the member 232 along the moving direction of the stage 205 with respect to the pulley and rotatably supported on the stage 205. The member 232 is laid on the pulley 231 and then the handle part 250, so that the stage 205 is moved by the rotating operation of the handle part 250.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a microscope stage driven by a linear member.

[0002]

2. Description of the Related Art A schematic configuration of a stage in a conventional microscope is composed of a lower stage fixed to a microscope body, and an upper stage which is linearly guided by a mechanism such as a ball guide, a roller guide, and a shaft guide with respect to the lower stage. And a crememel holding member that is linearly guided by the same mechanism in a direction perpendicular to the direction of the linear guide with respect to the upper stage.
The sample holder (Kremmel) fixed to the Klemmel holding member is guided in two directions so that the sample held by the sample holder can move on a plane relative to the lower stage. And located at the desired position.

[0003] As for the drive system, an operation handle is provided at one end of two coaxial shafts rotatably provided on the upper stage, and a rack and pinion, a wire and a pulley are provided at the other end. Or a transmission mechanism such as a belt and a pulley. When the operation handle is rotated, the upper stage and the crememel holding member are linearly guided by the transmission mechanism, and the relative movement of the specimen holder with respect to the lower stage in the plane becomes possible.

Japanese Patent Application Laid-Open No. 8-304708 discloses a microscope stage characterized in that the movement of the upper stage is driven by a wire. In this configuration, one end of the wire is attached to a pin implanted on the lower stage, and the other end is attached to one end of a tension spring.
The other end of the tension spring is attached to another pin implanted on the lower stage. The pulley rotatably mounted on the upper stage has one wire wound around it. When the pulley is rotated by the handle, the pulley rotates without causing a slip with the wire due to the tensile force of the tension spring, and the pulley moves in the Y direction while being wound around the wire.
Since the pulley is attached to the upper stage, the upper stage also moves in the Y direction as the pulley moves.

[0005]

In recent years, as the operability of the microscope has been emphasized in recent years, the operation part of the microscope (for example, a focusing handle, etc.) arranged around the stage has been described.
The importance of the position of the sample moving operation handle (stage operation handle) that is frequently used during microscopy is increasing.

However, in the above-described conventional wire-driven stage, the pulley provided coaxially with the stage operation handle must be arranged so as to contact the wire rope stretched along the stage moving direction. The degree of freedom of arrangement of the stage operation handle is limited.

In the above-mentioned wire-driven stage,
The position of the stage operation handle (sleeve), which is the operation unit for moving the sample, must be a position in contact with the side surface of the lower stage, and it may not be possible to arrange the stage at the best position for operation. Also, if you try to place the handle at an arbitrary position, the lower stage needs to be enlarged, and the entire stage becomes large, not only hindering the operation of the microscope other than the stage, but also when the lower stage cannot be attached to the microscope. Conceivable.

It is another object of the present invention to provide a microscope stage which can optimize the operability, facilitate the alignment of a specimen, and can be manufactured at low cost.

[0009]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems and achieve the object, a microscope stage according to the present invention is configured as follows.

(1) A microscope stage according to the present invention comprises a lower stage, an upper stage supported so as to be able to move linearly with respect to the lower stage, and an extension on the lower stage along a moving direction of the upper stage. A passed driving force transmitting member,
A pulley, which is disposed at a position where the outer periphery of the driving force transmitting member is substantially in contact with a portion along the moving direction of the upper stage, and is rotatably supported on the upper stage, It is arranged at a position away from a portion of the force transmission member along the moving direction of the upper stage,
A handle portion rotatably supported by the upper stage,
The driving force transmission member is hung on the pulley and the handle in order, and moves the upper stage by rotating the handle.

(2) The microscope stage of the present invention is the stage described in (1) above, and the handle shaft of the handle portion has at least a sliding bearing via a lubricant.

(3) The microscope stage of the present invention is the stage described in (1) or (2) above, and the pulley and the handle shaft of the handle portion are connected via a coupling.

(4) A microscope stage according to the present invention is the stage described in (1) or (2) above, wherein the pulley and the handle shaft of the handle portion are connected via an elastic member.

(5) The microscope stage of the present invention is the stage according to any one of the above (1) to (4),
Further, at least two pulleys are provided at a portion along a moving direction of the upper stage, and the driving force transmitting member is composed of the at least two pulleys and a ring-shaped member hung on the handle portion.

As a result of taking the above-described measures, the following effects are obtained.

(1) According to the microscope stage of the present invention, the pulley disposed at a position where the outer periphery is almost in contact with the portion of the driving force transmitting member extending along the moving direction of the upper stage. Have. With respect to this pulley, the handle portion can be freely arranged at a position away from the driving force transmitting member. Therefore, the handle can be arranged at a position that is easy to operate in consideration of the operability of the stage.

(2) According to the microscope stage of the present invention, even when the rotational force of the handle is set small due to the viscous effect of the lubricating material, fine vibrations, creaking,
Roughness and the like are not transmitted, and fine specimen movement becomes possible.

(3) According to the microscope stage of the present invention, in order to eliminate rattling and slippage, the radial tangling force applied to the handle shaft, which is generated when a constant tension is applied to the driving force transmitting member, Due to the action of the coupling, it is no longer transmitted to the bearing. Therefore, the handle can be rotated smoothly, and adverse effects on the movement of the sample due to uneven rotation are eliminated, and fine sample positioning can be performed.

(4) According to the microscope stage of the present invention, in order to eliminate rattling and slippage, the radial tangling force applied to the handle shaft, which is generated when a constant tension is applied to the driving force transmitting member, It is canceled by the elasticity in the radial direction by the elastic member, and is not transmitted to the bearing. Therefore, the handle can be rotated smoothly, and adverse effects on the movement of the sample due to uneven rotation are eliminated, and fine sample positioning can be performed.

(5) According to the microscope stage of the present invention, the driving force transmission member can be easily configured by using a ring-shaped member, and the rigidity of the transmission mechanism is increased.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) FIGS. 1 and 2 are views showing a configuration of a microscope stage according to a first embodiment of the present invention. FIG. FIG. 2 is a partial sectional view. The lower stage 1 shown in FIGS. 1 and 2 is attached to a microscope body (not shown). The lower stage 1 is provided with guide grooves 1a and 1b on its left and right side surfaces to form ball guides. An upper stage 2 is disposed on the lower stage 1. The upper stage 2 is provided with a guide groove 2a, and the guide groove 2a faces one of the guide grooves 1a provided in the lower stage 1. The opposed guide grooves 1a and 2
Between a, a number of unillustrated balls (similar to ball 4 described later) in which the ball interval is always kept constant,
It is sandwiched so as to roll between opposing guide grooves 1a and 2a via a casing (not shown) (same as casing 3 described later).

A guide member 5 is provided on the upper stage 2, and the guide member 5 is provided with a guide groove 5a. The guide groove 5a faces the other guide groove 1b provided on the lower stage 1. Between the opposing guide grooves 1b and 5a, a large number of balls 4 whose ball spacing is always kept constant as described above so as to roll between the opposing guide grooves 1b and 5a via the casing 3. It is sandwiched. Thus, the upper stage 2 is supported so as to be relatively movable in the guide groove direction (Y direction) with respect to the lower stage 1 fixed to the microscope main body.

On the other hand, the upper stage 2 is provided with guide grooves 2b and 2c in a direction (X direction) orthogonal to the Y direction. In the groove of the upper stage 2, a guide member 6 and a crememel holding member 8, which are integrally fixed, are provided. The guide member 6 is provided with a guide groove 6a. The guide groove 6a faces the guide groove 2b. Between the opposing guide grooves 2b and 6a, a large number of unillustrated balls (similar to the above-described ball 4) whose ball intervals are always kept constant as described above,
It is sandwiched so as to roll between the guide grooves 2b and 6a facing each other via a casing (not shown) (similar to the casing 3).

The crememel holding member 8 is provided with a guide groove 8a. The guide groove 8a faces the guide groove 2c of the upper stage 2. Between the opposing guide grooves 2c and 8a, a large number of balls (similar to the balls 4) not shown (same as the above-mentioned balls 4), the ball spacing of which is always kept constant, as described above, are provided. (Similar ones)) so as to roll between the guide grooves 2c and 8a opposed to each other. Thereby, the guide member 6 and the crememel holding member 8
Are integrally supported so as to be relatively movable in the X direction with respect to the upper stage 2. Further, a crememel 9 having a structure for sandwiching a sample is fixed to the crememel holding member 8.

FIG. 3 is a bottom view showing the configuration of the microscope stage, FIG. 4 is a sectional view taken along line AA of FIG. 3, and FIG. 5 is a sectional view taken along line BB of FIG. FIG. 8 is an enlarged view of the handle mechanism shown in FIGS. As shown in FIGS. 4, 5 and 8, a hollow cylindrical fixed shaft 10 for supporting two handle shafts to be described later is vertically fixed to the upper stage 2. A Y handle shaft 11 having a hollow cylindrical shape on the same axis and having an inner diameter larger than the outer diameter of the fixed shaft 10 is provided. At one end (on the upper stage 2 side) of the Y handle shaft 11, there is provided a pulley portion 11a around which a linear member (for example, a wire rope) as a driving force transmitting member to be described later is wound. A Y handle 12 for rotating the shaft 11 is attached. The Y handle shaft 11 is rotatably supported on the fixed shaft 10 via a bearing. The bearing 13 is provided with a bearing 13 as a rolling bearing on the pulley portion 11a side. On the Y handle 12 side, stepped portions are respectively formed on the inner diameter portion of the handle shaft 11 and the outer diameter portion of the fixed shaft 10 so that the Y handle shaft 11 and the fixed shaft 1 are formed.
A sliding bearing is formed by using a Y-fitting portion 51 for fitting with 0 and using a lubricant such as grease in this portion.

A screw portion 10a is formed below the stepped portion of the outer diameter portion of the fixed shaft 10.
A hollow cylindrical fixed guide 14 is screwed into Oa. In addition, the pulley part 11a side in FIG. 8 is the upper side, and the Y handle 12 side is the lower side. The upper end surface of the fixed guide 14 is opposed to the thrust support portion 15 below the Y fitting portion 51 inside the Y handle shaft 11, into which a washer 16 having excellent slidability is inserted. . By supporting the thrust support 15 with the fixed guide 14 via the washer 16, a bearing in the thrust direction is formed. The position of the fixed guide 14 in the axial direction can be adjusted by rotating the fixed guide 14. After the position is adjusted so that there is no play in the thrust direction, the fixed guide 14 is fixed by the set screw 14c.

On the other hand, screw portions 14a and 14b are provided at two portions where the outer diameter of the outer diameter portion of the fixed guide 14 is increased by one step, and a Y torque adjusting handle 17 is screwed into the screw portion 14a. The upper end surface of the Y torque adjusting handle 17 is opposed to the lower end surface of the Y handle shaft 11, into which an elastic member 18 such as a wave spring and a washer 19 having excellent slidability are inserted. When the Y torque adjusting handle 17 is rotated, the pressing force acting on the contact surface between the Y handle shaft 11 and the washer 19 by the elastic member 18 changes, so that the amount of rotational force of the Y handle 12 can be adjusted.

When the Y torque adjusting handle 17 is at the lowermost position, the Y handle shaft 11 and the washer 19 are separated from each other and the pressing force of the elastic member 18 does not act. Only the resistance at the Y fitting portion 51 and the thrust support portion 15 is obtained.
After the adjustment of the force, the fixed ring 53 is pressed against the Y torque adjustment handle 17 from below and fixed with the set screw 54 for the fixed ring to prevent the Y torque adjustment handle 17 from rotating.

On the other hand, an X handle shaft 20 is disposed coaxially inside the fixed shaft 10. This X handle shaft 20
Is provided at one end (on the upper stage 2 side) with a pulley portion 20a around which a driving force transmitting member (for example, a linear member such as a wire rope) to be described later is wound, and at the other end an X handle for rotating the handle shaft. 21 is attached. The X handle shaft 20 is rotatably supported on the fixed shaft 10 via a bearing.

The operation handle in the X direction has basically the same structure as the above-described Y handle, and the bearing includes:
A bearing 22 is provided as a rolling bearing on the pulley portion 20a side, and an X handle shaft 20 is provided on the X handle 21 side.
An X fitting portion 52 is provided which is fitted by a stepped portion formed respectively on the outer diameter portion of the fixed shaft 10 and the inner diameter portion of the fixed shaft 10, and a lubricant such as grease is used in this portion to form a sliding bearing. I have.

The bearing in the thrust direction is the same as that of the above-described Y handle, and a thrust support portion 24 between the thrust ring 23 screwed into the X handle shaft 20 and the fixed shaft 10.
In addition, a structure in which a washer 25 having excellent slidability is sandwiched and supported. Similarly, the X-handle turning force adjusting mechanism also includes an elastic member 27 such as a wave spring and a washer 28 having excellent slidability inserted between the X-torque adjusting handle 26 and the X-handle 21 screwed into the fixed guide 14. When the X torque adjusting handle 26 is rotated, the amount of torque of the X handle 21 can be adjusted. When the X torque adjusting handle 26 is at the uppermost position, the X handle shaft 20 and the washer 28 are separated from each other, and the pressing force by the elastic member 27 does not act. Only the resistance at the portion 52 and the thrust support portion 24 is obtained.

Next, transmission between the two handle shafts 11, 20 and the lower stage 1 and the crememel holding member 8 will be described. As shown in FIGS. 2 and 3, in the X direction, an X tension adjusting member 36 having an X pulley 33 is disposed at a position substantially opposite to the operation handle axis with respect to the center of the stage. The X tension adjusting member 36 is composed of a flat plate portion 36a in which a long hole for fixing is formed and an X pulley 33 rotatably supported on the flat plate portion 36a. It is fixed to. The fixed position is adjustable in the X direction within the range of the slot. A linear member 3 such as a wire rope is provided on two side surfaces of the guide member 6 which is guided to be linearly movable in the X direction.
Hook portions 6b and 6c for fixing the end of the second 2 are provided.

Both ends of the linear member 32 are
A loop is formed so that it can be hooked and fixed to b and 6c. The linear member 32 that has come out of the hook portion 6b is
The pulley portion 20 a of the handle shaft 20 is wound around the X pulley 33 of the X tension adjusting member 36, and the other end is again hooked on a hook portion 6 c provided on the guide member 6. A predetermined tension is applied to the linear member 32 by pulling and fixing the X tension adjusting member 36 to the opposite side along the X direction with respect to the X handle shaft 20, and the X pulley 20a
Are in a state of being tightened up by the linear member 32.

On the other hand, in the Y direction, the hooks 1c, 1c are attached to one end of the side surface of the lower stage 1 along the Y direction.
d is provided, and a Y tension adjusting member 38 is attached to the other end side. The Y-tension adjusting member 38 includes a flat plate portion 38a having a long hole for fixing and a pin 38b planted on the flat plate portion 38a.
It is fixed to the lower stage 1 at c. The fixing position is adjustable in the Y direction within the range of the slot.

Further, a linear member is stretched on the upper stage 2 at a position different from the above-mentioned three coaxial handle shafts 10, 11 and 20, specifically, between the hook portions 1c and 1d and the pin 38b. A pulley 29 is disposed at a position where the outer diameter of the linear member is almost in contact with the linear member. Pulley 2
The position 9 in the Y direction is on a line connecting the operation handle and the axis of the X pulley 33. The pulley 29 is rotatably supported by a rolling bearing 30 such as a bearing with respect to a shaft 31 implanted on the lower surface of the upper stage 2. The linear member 37 for driving the Y-axis also has loops formed at both ends, and one end is hooked on the hook portion 1c.

The linear member 37 is bent in the direction of the Y handle shaft 11 by the pulley 29, wound around the pulley portion 11 a of the Y handle shaft 11, and re-connected to the pulley 2.
9 is bent in the Y direction. Further, the linear member 37
Is hooked on the pin 38b of the tension adjusting member 38 capable of adjusting the position in the Y direction with respect to the lower stage 1, and is folded back.
One turn is made by the pulley 29, and the other end is hooked on a hook 1 d provided on the lower stage 1. By pulling the tension adjusting member 38 in the Y direction on the opposite side to the pulley 29 and fixing it to the lower stage 1 with screws 38c, the pulley portion 11a of the Y handle shaft 11 is constantly tightened by the linear member 37. Can be

In the above, an example of how to hang the linear members 32 and 37 has been described, but the pulley 29 and the pulley portions 11a,
The number of windings at 20a may be plural (multiple windings), or between the pulley 29 and the pulley 11a, the hook 1
It is also possible to provide a multi-stage (multiple-stage) application between c, 1d and the pulley portion 29, and between the pulley portion 29 and the projection 38a.
Further, an endless linear member in which both ends of the linear members 32 and 37 are eliminated may be used.

Hereinafter, the transmission mechanism of the linear member will be specifically described.

FIG. 6 is a schematic diagram showing a transmission mechanism of a linear member. 6, the same parts as those in FIGS. 1 to 5 are denoted by the same reference numerals. The microscope stage includes an upper stage 2 and a lower stage 1 which are vertically stacked, and the upper stage 2 is movable by being guided linearly with respect to the lower stage 1.

A pulley 29 is rotatably mounted on the upper stage 2, and the Y handle shaft 11 is rotatably mounted at a different position from the pulley 29. On both sides of the lower stage 1, both ends of the elongated linear member 37 are hooked and fixed. The linear member 37 is bent from one end by a pulley 29, and is wound around the pulley portion of the Y handle shaft 11 by one turn. Then, the linear member 37 is bent again by the pulley 29, and is folded back by a tension-adjustable tension adjusting member 38 provided at a position in a moving direction different from the position where both ends of the lower stage 1 are hooked, and the pulley 29 is pulled. And is fixed to the other end. The pulley 29 and the Y handle shaft 11 are constantly tightened by the linear member 37, and the Y handle shaft 1
By rotating the first stage 1, the upper stage 2 can be moved with respect to the lower stage 1.

On the other hand, on the upper side of the upper stage 2, the above-mentioned cleanmel 9 is arranged, and this cleanmel 9 is fixed to the cleanmel holding member 8. The crememel holding member 8 is guided linearly with respect to the upper stage 2 via a guide mechanism. Both ends of the elongated linear member 32 are fixed to the crememel holding member 8, and the pulley 33 and the X handle shaft 20 are fixed.
And is arranged in the direction of linear motion guide. The linear member 32 is a Y member rotatably attached to the upper stage 2.
X handle axis X20 disposed coaxially with handle axis 11
Is wound one turn around the pulley part. Further, by fixing the pulley 33 to pull the linear member 32 in a direction away from the X handle shaft 20, the linear member 32 is fixed.
, And the X handle shaft 20 is tightened. Therefore, by rotating the X handle shaft 20, the crememel holding member 8 and the crememel 9 can be moved with respect to the upper stage 2.

Next, the operation of the microscope stage configured as described above will be described. When it is desired to move the upper stage 2 in the Y direction with respect to the lower stage 1 fixed to the microscope main body, the Y handle 12 for operating the stage is rotated. When the Y handle 12 is rotated, the Y handle shaft 11 fixed to the Y handle 12 and the pulley 1 thereof
1a rotates together. Pulley part 1 of Y handle shaft 11
Since the linear member 37 such as a wire rope is wound around 1a, the wire rope 37 is continuously fed by the rotation of the pulley portion 11a.

The continuously delivered wire rope 37
Is bent by the pulley 29 and turned in the Y direction to move. Pulley part 11 of Y handle shaft 11
Since a is fixed to the upper stage 2 via the fixed shaft 10 and the bearing, the guide member 5 fixed to the upper stage 2 and the guide groove provided in the upper stage 2 with the movement of the pulley portion 11a 2a is moved by being guided by the linear movement of the lower stage 1 and the ball 4, whereby the upper stage 2 moves in the Y direction.

The wire rope 37 is stretched by a tension adjusting member 38, and the pulley portion 11 of the Y handle shaft 11 is
Since a is tightened, a sufficient frictional force is generated between the pulley portion 11a and the wire rope 37. Therefore, no slip occurs between the pulley portion 11a and the wire rope 37 during rotation, and the upper stage 2 can be accurately moved by following the rotation amount of the pulley portion 11a. The movement of the upper stage 2 is determined according to the rotation direction and the rotation amount of the pulley portion 11a of the Y handle shaft 11.

The magnitude of the rotational force of the pulley 11a is determined by the frictional force acting between the pulley 11a and the wire rope 37. In order to maintain a high rotation force, it is effective to apply a resistance treatment such as blasting or rubber coating to the pulley portion 11a to increase the friction coefficient, or to increase the tension of the wire rope 37 by the tension adjusting member 38. is there. A resistance treatment that increases the friction coefficient is desirable. In the case of a high tension, if the tension is increased, the Y handle shaft 11 falls down,
A radial offset load is applied to the bearing, which adversely affects the smoothness of rotation. However, the Y handle shaft 11
In order to move the stage by turning, a certain amount of tension is required.

With respect to the fixed shaft 10 fixed to the upper stage 2, the Y handle shaft has a bearing 13
On the other hand, the Y handle 12 side is fitted and the Y fitting portion 51 is filled with a lubricant. Thus, the vicinity where a force acts in the direction perpendicular to the rotation axis of the Y handle shaft 11 due to the tension of the wire rope 37 is supported by the bearing 13, so that the Y handle 1 smoothly rotates.
2 is obtained. Therefore, the steering wheel can be operated smoothly.
Although the description has been made with reference to the Y handle 12, the same applies to the X handle.

On the other hand, when it is desired to move the crememel holding member 8 in the X direction with respect to the upper stage 2, the X handle 21 for operating the stage is rotated. When the X handle 21 is rotated, the X handle shaft 20 fixed to the X handle 21 and its pulley portion 20a also rotate.
When the pulley portion 20a rotates, the pulley portion 20a
Member 32 such as a wire rope wound around
Is sent in accordance with the rotation direction of the pulley portion 20a, and as a result, the guide member 6 is moved by being pulled by the linear member 32. Since the crememel holding member 8 is fixedly attached to the guide member 6, the guide member 6, the crememel holding member 8, and the crememel 9 fixed to the crememel holding member 8 move in the X direction with respect to the upper stage 2. .

The linear member 32 such as a wire rope is stretched by an X pulley 33 via a tension adjusting member 36,
Since the pulley portion 20a of the handle shaft 21 is tightened, a sufficient frictional force is generated between the pulley portion 20a and the linear member 32, and the pulley portion 20a and the linear member 32 are rotated during rotation.
The guide member 6 can be accurately moved by following the rotation amount of the pulley portion 20a. The movement of the guide member 6 is controlled by the pulley section 20.
It is determined according to the rotation direction and the rotation amount of “a”. The magnitude of the rotational force of the pulley portion 20a and the rigidity of the transmission mechanism are the same as in the case of the Y direction described above.

When operating the handle attached to the upper stage 2, the upper stage 2 is pushed or pulled in the Y direction unconsciously. Due to this handle operation, the linear member 37 of the transmission mechanism is extended by the load applied in conjunction with the behavior of the upper stage. When the operation of the handle is completed and the hand is released from the handle, the load on the linear member 37 is released, and the linear member 37 returns to its original length. At that time, the upper stage 2 moves in conjunction with it, and the sample shifts from the target position and stops. As described above, as a factor related to the stage stop accuracy, there is an elongation (rigidity) of the transmission mechanism, that is, the linear member 37 connecting the upper stage 2 and the lower stage 1.

The linear member 37 (wire rope) is hooked at both ends to the hooks 1c and 1d of the lower stage 1 to form a step, and the tension adjusting member 38 is turned almost at the middle of the linear member 37 (wire rope). . The folded linear member 37 (wire rope) is wound or folded twice by the pulley 29. As a result, the upper stage 2 and the lower stage 1 are substantially connected by two linear members (wire ropes), and the load applied at the time of operating the steering wheel is distributed to the two wire ropes. The load per book becomes smaller. Therefore,
The extension of the wire rope can be reduced, the displacement due to the extension can be reduced by half, and the stopping accuracy is improved.

Further, the linear member 37 (wire rope)
Since the tension adjusting member 38 for applying tension to the linear member 37 (wire rope) is folded back by the pin 38b, the load is applied substantially uniformly to each folded linear member 37 (wire rope). Take it. This example is 2
If it is a step, the number of turns of the wire rope is increased, and if the number of steps is three or four with one wire rope, the load per one wire can be further reduced. Folding the wire rope over two or more stages is called multistage hanging.

In this example, Klemmer 9 and upper stage 2
Is a load on the drive mechanism in the Y direction. However, in a three-layer stage in which the moving member in the X direction is not the Clemmel 9 but a stage plate similar to the upper stage 2, the load on the drive mechanism increases. Therefore, multi-stages such as three stages and four stages are effective.

In order to reduce the elongation of the wire rope,
There is also a method of using a thick wire rope, or fixing both ends of a plurality of wire ropes, and using a pulley for each.
When a plurality of wire ropes are used, an adjustment mechanism for adjusting the load or tension of each wire rope may be used. In a microscope, the magnification of the objective lens is 100.
When the magnification is doubled, the alignment accuracy needs to be about several μm (micrometer), so that the above-mentioned elongation of the wire rope affects the observation. If the magnification of the objective lens is about 20 times or less, the effect of the elongation of the wire rope is small, and even a single wire rope without wrapping is at a practically usable level.

FIG. 7 shows a wire rope 1 without multi-stage hanging.
It is a schematic diagram which shows the modification of the transmission mechanism which transmitted the driving force in this book. 7, the same parts as those in FIG. 6 are denoted by the same reference numerals. The microscope stage is composed of an upper stage 2 and a lower stage 1 which are vertically stacked,
The upper stage 2 is movable by being guided linearly with respect to the lower stage 1.

A pulley 29 is rotatably mounted on the upper stage 2, and a Y handle shaft 11 is rotatably mounted in a direction substantially orthogonal to the side of the lower stage 1. Both ends of the elongated linear member 371 are hooked and fixed to the lower stage 1. The linear member 37 is bent from one end by a pulley 29, wound around the pulley portion of the Y handle shaft 11 by one turn, bent again by the pulley 29, and reaches the other end.

In the prior art such as the above-mentioned Japanese Patent Application Laid-Open No. 8-304708, when the position of the stage operation handle is arranged outside the stage, the lower stage and the upper stage become large, and the operability around the stage becomes large. Can be solved by bending a linear member such as a wire rope via a pulley as shown in FIG. Further, the problem of stopping accuracy for surely stopping the sample at a desired position can be solved by increasing the tension of the wire rope or using a wire rope having a small elongation (low spring constant).

However, if the tension of the wire is increased and the wire rope is bent via the pulley, the handle shaft is pulled toward the pulley by the tension of the wire rope and falls down. And smooth rotation becomes difficult. As a result, when an operation is performed to align the sample, squeak or stick-slip may occur, which may make it difficult to align the sample. When it is necessary to deal with such a problem, the problem can be solved by adopting the configuration shown in FIGS.

FIG. 8 is a sectional view showing the structure of the stage operation handle. Y handle shaft 11 and X handle shaft 2
Numeral 0 is rotatably arranged via coaxial bearings on the outer and inner coaxial sides of the fixed shaft 10 fixed to the upper stage 2. The pulley portions of the X handle shaft 20 and the Y handle shaft 11 are used as rolling bearings such as bearings 13 to suppress the influence of the tension of the linear members 32 and 37. In addition, a lubricant such as grease is interposed around the fixed shaft 10 at a fitting portion of the Y handle 12 and the X handle 21 by using the bearing on the X handle 21 side as a sliding bearing.
This imparts viscosity to the rotation of the Y handle 12 and the X handle 21 to smooth their movement and rotation, and also smoothes the movement and sliding of the Y handle 12 in the vertical direction.

By configuring the microscope stage as described above, a wire rope as a linear member, which is a transmission member of the lower stage 1 and the upper stage 2, is supported by folding one linear member 37 back into two. As a result, the load per wire rope can be reduced, so that the rigidity of the handle can be increased without applying a tension high enough to prevent smooth rotation, and a sliding bearing is provided on the operation handle shaft via a lubricant. By using, a good rotational feeling with viscosity can be obtained.

(Second Embodiment) FIG. 9 is a sectional view showing a configuration of a stage operation handle according to a second embodiment of the present invention. In FIG. 9, the same portions as those in FIG. 8 are denoted by the same reference numerals. The difference from the configuration of the first embodiment is that both ends of the Y handle shaft 11 and the X handle shaft 20 are held by rolling bearings 40, 40 such as bearings.
Further, a lubricant such as grease is interposed around the fixed shaft 10 in the fitting portion of the Y handle 12 and the X handle 21 therebetween.
The rotation feeling of 1,20 is improved. Other configurations are the same as those in the first embodiment.

(Third Embodiment) FIG. 10 and FIG.
It is a sectional view showing the composition of the stage for microscopes concerning a 3rd embodiment of the present invention. 10 and 11 correspond to FIGS. 4 and 5, respectively, and the same reference numerals in FIGS. 10 and 11 denote the same parts as in FIGS.

In FIGS. 10 and 11, a brake member 41 is mounted on a tension adjusting member 38 of the lower stage 1 by a screw 42. The brake member 41 is formed of a rectangular flat plate 411, one end of which forms a projection 412, and the other end of which is fixed on the tension adjusting member 38 by a screw 42. The protrusion 412 is in contact with a rectangular protection member (not shown) provided on the back surface of the upper stage 2. Therefore, when the upper stage 2 moves and stops in the Y direction,
The protrusion 412 of the brake member 41 is in contact with the back surface of the upper stage 2.

According to such a configuration, when the upper stage 2 moves and stops, even if a force (restoring force) for returning the linear member 37 in the direction opposite to the moving direction is generated, the projection 4
The upper stage 2 is not returned in the opposite direction due to the frictional force generated between the upper stage 2 and the protective member on the back surface of the upper stage 2. Thereby, the upper stage 2 can be stopped more precisely at a desired position in the Y direction. Similarly, by providing the brake member 41 on the tension adjusting member 36, the upper stage 2 can be more accurately stopped at a desired position in the X direction.

(Fourth Embodiment) FIG. 12 is a schematic view showing a transmission mechanism using a linear member according to a fourth embodiment of the present invention. As described above, the linear member 37 such as a wire rope is wound once or plural times by the pulley 29 and the pulley portion 11a of the Y handle shaft 11, and when the handle is rotated, the linear member 37 becomes It moves vertically (axially) relatively to the pulley 29 and the pulley portion 11a. Therefore, when the linear member 37 is wound around the pulley a plurality of times, not only by the winding width of the linear member but also in addition to the amount of movement of the linear member on the pulley, as shown in FIG. If the linear member 37 is not provided with the step difference ΔT, the linear members 37 rub against each other on the pulley, and cannot be moved up and down smoothly, which adversely affects the movement of the stage. At this time, the step amount ΔT (the amount obtained by adding the winding width of the linear member and the movement amount on the pulley) is expressed by the following equation.

ΔT = t [n + L / {π (d + t)}] Here, t is the wire diameter of the linear member 37 such as a wire rope,
n is the number of windings of the linear member 37, L is the movement stroke of the stage, and d is the pulley diameter. By wrapping the linear member 37 with a step equal to or more than the step amount ΔT obtained as described above, the friction between the linear members 37 can be eliminated.

In each of the other embodiments, by applying the contents of the fourth embodiment to the portion where the linear member is wound around the pulley, the linear member is not rubbed, and the movement accuracy and the stop accuracy are reduced. High stage can be configured.

(Fifth Embodiment) FIG. 13 is a schematic plan view of a wire-driven microscope stage according to a fifth embodiment of the present invention as viewed from below. In FIG. 13, the movement of the upper stage 101 is characterized by being driven by a wire. In order to improve the operability by separating the position of the stage from other operation parts, the position of the operation handle 102 is set near the left and right ends of the stage. It is configured to keep away. That is,
An operation handle 102 having a first pulley 103 is provided at an appropriate position away from the position of the second pulley 104,
One end of the wire 105 is fixed to the pin 107 implanted on the lower stage 106. Then, the wire 105 is bent by the second pulley 104 in the direction of the operation handle 102, turned back by the first pulley 103, bent again by the second pulley 104, and the other end is moved to the lower stage 105.
It is configured to be fixed to the pin 108 implanted in the. 13 is the same as that of the schematic perspective view of FIG.

In the case of this configuration, consideration must be given to the wire tension. When the tension is weak, when the upper stage 101 stops, the holding force of the upper stage 101 by the wire becomes weak. For this reason, the upper stage 101 is blurred due to subtle vibration or slight hand movement when trying to operate the operation handle, and the observation position of the sample is shifted,
There is a problem that adjustment to a position to be observed cannot be performed. In addition, when the operation handle 102 is operated, the wire expands and contracts, and the followability of the upper stage 101 deteriorates.

On the other hand, when the tension is strong, the operation handle 102 is pulled in the direction indicated by the arrow A in FIG. 13, and an unbalanced load is applied to the bearing. For this reason, when operating the operation handle 102, a sense of discomfort (a feeling of
This gives rise to a problem that the operation feeling deteriorates.

FIG. 14 is a schematic three-dimensional view of an example of a microscope stage configured to solve the above-described problem, as viewed obliquely from below. 14, the same parts as those in FIG. 13 are denoted by the same reference numerals. FIG. 14 shows a configuration in which the wire is divided into two wires, a first wire 111 and a second wire 112. The first wire 111 is stretched with strong tension, and one end thereof is fixed to a pin 107 implanted on a side surface of the lower stage 106. And the first wire 111
Is wound one turn around the second pulley 104 and is fixed to a pin 108 implanted on the side surface of the lower stage 106.

On the other hand, the second wire 112 has an annular shape,
The first pulley 103 and the first pulley 104 are stretched with a weaker tension than the first wire 111, and are stretched between the first pulley 103 and the first pulley 104 so that the first pulley 103 and the first pulley 104 are interlocked. It is wound one turn around the first pulley 104 so as not to perform the operation.

According to such a configuration, the upper stage 10
1, the holding force at the time of stopping can be ensured, and an eccentric load is not applied to the operation handle 102, so that a microscope stage with a good operation feeling can be realized.

(Sixth Embodiment) FIG. 15 is a schematic three-dimensional view of a microscope stage according to a sixth embodiment of the present invention as viewed obliquely from below. 15, the same parts as those in FIG. 14 are denoted by the same reference numerals. As shown in FIG. 15, the second pulley 1 corresponding to the second pulley 104
04 ′ first wire 111 and second wire 11
2 is configured to have different diameters so that the upper stage 1 with respect to the rotation amount of the operation handle 102 can be adjusted.
01 can be set to an optimal state.

(Seventh Embodiment) FIG. 16 is a schematic plan view of a microscope stage according to a seventh embodiment of the present invention viewed from below. In FIG. 16, the same parts as those in FIG. 13 are denoted by the same reference numerals. In FIG. 16, the wire is divided into a first wire 121 and a second wire 122. The first wire 121 is connected to the operation handle 102.
Tension that does not give harmful offset load to the
One end of the pin 1 is implanted on the side of the lower stage 106.
07. And the first wire 121 is
After being bent by the second pulley 104 in the direction of the operation handle 102, by the first pulley 103, and again by the second pulley 104, the other end is fixed to the pin 108 implanted on the side surface of the lower stage 106. Have been.

On the other hand, the second wire 122 is the first wire 1
The lower stage 106 has one end fixed to a pin 123 implanted on the side surface of the lower stage 106. The second wire 122 is connected to the third pulley 124
, And the other end is fixed to a pin 125 implanted on the side surface of the lower stage 106.

Even in the case of such a configuration, the holding force when the upper stage 101 is stopped can be ensured.
An unbalanced load is not applied to the operation handle 102, and a microscope stage with a good operation feeling can be realized.

(Eighth Embodiment) FIG. 17 is a schematic three-dimensional view of a microscope stage according to an eighth embodiment of the present invention as viewed obliquely from below. In FIG. 17, the same portions as those in FIG. 14 are denoted by the same reference numerals. In FIG. 17, FIG.
A timing belt 131 is employed in place of the second wire 112 shown in FIG.
04. This makes it easier to assemble the microscope stage than when the second wire is hung.

(Ninth Embodiment) FIG. 18 is a schematic three-dimensional view of a microscope stage according to a ninth embodiment of the present invention as viewed obliquely from below. In FIG. 18, the same portions as those in FIG. 14 are denoted by the same reference numerals. As shown in FIG.
By crossing the second wire 112 so as to intersect between the first pulley 103 and the second pulley 104, the moving direction of the upper stage 101 with respect to the rotating direction of the operation handle 102 can be reversed. Thus, in the erect image microscope, the rotating direction of the operation handle and the moving direction of the observation image can be matched.

(Tenth Embodiment) FIG. 19 (a)
FIG. 4 is a cross-sectional view of an operation handle provided with a slide bearing using a lubricant. According to the fifth to ninth embodiments, when the eccentric load is not applied to the operation handle 102 and the rotational force of the operation handle 102 becomes too light, the viscosity of the rotation is lost and the operation causes squeak and stick-slip. It may make you feel worse. However, FIG.
As shown in (a), by providing a sliding bearing 131 using a lubricant applied to the periphery of the operating handle 102 as a bearing, rotation viscosity can be ensured, and squeak and stick-slip during operation can be prevented. Can be eliminated.

As shown in FIG. 19B, the sliding bearing 131 of the operating handle 102 is
2 and the operating handle 102
Operability can be further improved.

As described above, according to the fifth to tenth embodiments, since the position of the operation handle is separated from other operation parts, the operability is good, and the sample movement followability and the operability are good. A driven microscope stage can be provided.

(Eleventh Embodiment) FIG. 20 is a plan view of a microscope stage according to an eleventh embodiment of the present invention as viewed from above.

As shown in FIG. 20, this microscope stage has a structure in which a specimen 201 is sandwiched between
And Kremmel 202 has fixed screws 203, 2
03 is supported by the crememel holding member 204. The upper stage 2 is located below the crememel holding member 204.
The lower stage 206 is located below the upper stage 205. Lower stage 206 is clamp screw 2
07, it is fixed to a stage holding device of a microscope (not shown).

FIG. 21 is a sectional view taken along line AA of FIG. The Kremmel holding member 204 is mounted on the upper stage 2
A guide such as a linear roller guide mechanism (not shown) provided at 05 can move the upper stage 205 in the X direction. The pins 211 and 212 fixed to the crememel holding member 204 include wires 213.
Are fixed at both ends, and a wire 213 is hung on a pulley 215 rotatably held on the upper stage 205 and a pulley 214 arranged coaxially on the handle portion.

FIG. 22 is a sectional view showing the structure of the handle portion. The rotating shaft 244 is supported on the fixed shaft 241 via a bearing 242 and a slide bearing 243, and a pulley 214 is attached to a tip of the rotating shaft 244. A ring 245 for tightening in the axial direction is fixed to a lower portion of the rotating shaft 244. When the bearing 243 is pressed, the rotating shaft 244 is sandwiched between the bearing 243 and the pulley 14, and the axial position is determined. ing.

The operation ring 246 is fixed to the rotation shaft 244 by a set screw 2461. By turning the operation ring 246, the pulley 214 can be rotated, and as will be described later, the cleanmel 202 can be moved in the X direction.

On the other hand, outside the fixed shaft 241, the pulley 25
0 and the outer shaft 252 are connected via a coupling 251, and the operation ring 253 is fixed to the outer shaft 252. In this configuration, the operation ring 253 is rotatably held with respect to the fixed shaft 241 by the fitting portions 256 and 255 provided on the bearing 254 and the outer shaft 252, and the operation ring 253 is tightened by the ring 257. The position with respect to the bearing 254 is determined in the axial direction.

The ring 247 screwed into the ring 257 allows the ring spring 248 and the washer
9 and the operating ring 246 with the operating ring 246.
6 can be adjusted. Further, the outer shaft 252 is rotated by a ring 258 screwed into the ring 257 via a ring spring 259 and a washer 260.
The adjustment of the amount of rotational force of the operation ring 253 can be performed between these steps.

FIG. 23 is a bottom view of the microscope stage. 21 and 23, the guide plates 221a,
Reference numeral 221b is fixed to the upper stage 205, and forms a general linear ball guide between the lower stage 206 and the lower stage 206 via a triangular wire 223 and a ball 224. Thus, the upper stage 205 is held so as to be able to move directly in the Y direction with respect to the lower stage 206. The pulley 231 is rotatably held on the upper stage 205, and the wire 232 is a pin 2 having one end fixed to the lower stage 206.
33, and the other end is connected via a tension adjusting member 234.
It is fixed to the lower stage 206.

FIG. 24 is a three-dimensional schematic diagram of the microscope stage, showing how to wire. Note that FIG.
4 shows a state where the stage is inverted. One end of the wire 232 is fixed to the lower stage 206, is hung on a pulley 231 rotatably held on the upper stage 205, is wound once around a pulley 250 coaxial with the operation shaft of the handle portion, and is again wound again. Pulley 231
After that, it is fixed to the lower stage 206 again.
In the eleventh embodiment, the wire 23
One end of 2 is fixed via a tension adjusting member 234 shown in FIG. 23, but is not shown in FIG. 24 for convenience.

Next, the operation of the microscope stage configured as described above will be described. To move the crememel 202 in the X direction with respect to the upper stage 205, the operator rotates the handle 246. When the handle 246 rotates, the pulley 214 fixedly connected to the handle 246 also rotates. When the pulley 214 rotates, the wire 2 wound around the pulley 214
13 is sent in accordance with the rotation direction of the pulley 214, and as a result, the crememel holding member 204 is
13 and moves along a guide (not shown).
Since the crememel 202 is fixedly attached to the crememel holding member 204, the crememel holding member 204
Move, the Clemmel 202 moves with respect to the upper stage 205.

When attaching the pulley 215 to the upper stage 205, the position is shifted and fixed so as to apply a tensile force to the wire 213. Therefore, since the wire 213 is strongly tightened by the pulley 214 and the pulley 215 under the tensile force, when the pulley 214 rotates, the pulley 214 and the pulley 215 and the wire 2
13 does not occur, and the crememel holding member 204 can be accurately moved by following the rotation amount of the pulley 214.

To move the upper stage 205 in the Y direction with respect to the lower stage 206, the handle 2
Rotate 53. When the handle 253 is rotated, Y
The Y handle shaft 252 fixed integrally with the handle 253 and the pulley 250 connected via the coupling 251 also rotate. Since the wire 232 is wound around the pulley 250, the pulley 25
The wire 232 is continuously fed by the rotation of 0, and the pulley 231 is rotated. Since both ends of the wire 232 are fixed to the lower stage 206, as a relative result, the pulley 231 moves in the Y direction while rotating while being wound around the wire 232. Since the pulley 231 is fixed to the upper stage 205, the upper stage 205 moves along a linear ball guide formed by the guide plates 221 a and 221 b and the lower stage 206 as the pulley 231 moves.

Since the wire 232 is adjusted and fixed so that a tensile force is applied to the tension adjusting member 234, the wire 232 receives the tensile force and
It is strongly tightened to 31. For this reason, pulley 2
When pulley 50 and pulley 231 rotate, pulley 2
There is no slip between the pulley 50 and the pulley 231 and the wire 232, and the upper stage 205 can be accurately moved by following the rotation amount of the pulley 250. That is, the movement of the upper stage 205 is determined according to the rotation direction and the rotation amount of the pulley 231 due to the rotation of the pulley 250.

When a tensile force is applied to the wire 232, a radial load acts on the pulley 250 in the direction of the pulley 231 with respect to the rotation axis thereof. Acts as. However, according to the eleventh embodiment, the radial load applied to the pulley 250
1 and is not transmitted to the Y handle shaft 252, and no stiffening force is generated.

Further, regarding the operation in the X direction and the Y direction,
In both cases, a sliding portion is provided for the fixed shaft 241, and Y
As for the directional operation, a sliding portion 261 is provided between the Y sliding portions 255 and 256 and the Y handle shaft 252 and the washer 260. The sliding part 260 is a mawashikan (turn ring)
By moving the 258 in the axial direction, the clearance with the washer 260 is changed to change the amount of spring force of the spring 259, thereby making it possible to change the amount of rotation operation force.

A lubricant such as grease is used for the Y sliding portions 255 and 256, and fine sticking and roughness are eliminated by the viscosity of the grease, so that the Y handle shaft rotates smoothly. As for the operation in the X direction, similarly to the Y direction, a sliding portion 263 of the sliding bearing 243 is provided between the fixed shaft 241 and the X handle shaft 244, and a sliding portion 262 is provided between the operating ring 246 and the washer 249. I have.
Regarding the sliding portion 262, a mating ring (turning ring) 2
By moving 47 in the axial direction, the clearance with washer 249 is changed, and by changing the amount of spring force of spring 248, it is possible to change the amount of rotation operation force.

Further, a lubricant such as grease is used for the sliding portion 263, and fine sticking and roughness are eliminated by the viscosity of the grease, so that the X handle shaft 244 rotates smoothly.

As described above, according to the eleventh embodiment, it is possible to change the position of the handle shaft, which is the operation unit, while maintaining the compact structure, and arrange the handle at a position with good operability. It becomes possible to do. In addition, it is possible to use one wire, and it is very inexpensive and compact.

Further, even if the pulling force applied to the wire is increased, the handle and the like are not subjected to the squeezing force, so that the handle can be smoothly rotated and the slip between the pulley and the wire is completely eliminated. Therefore, it is possible to perform an operation with a high feeling without a tracking failure at the time of aligning the sample.

In general, since the operation amount of the stage has advantages such as being less tiring when used for a long time when the operation amount is light, the setting of the rotation amount is set as light as possible. However, in that case, the feeling of getting caught at the beginning of the rotation movement,
In some cases, a feeling of roughness or the like occurred, making it difficult to perform delicate sample operations. In the eleventh embodiment, the effect of the lubricating material such as grease used for the handle shaft reduces the feeling of snagging and roughness, and enables a delicate sample operation.

(Twelfth Embodiment) FIG. 25 is a three-dimensional schematic view of a microscope stage according to a twelfth embodiment of the present invention, showing how to wire. Note that the basic configuration of the stage and the operation in the X direction in the twelfth embodiment are the same as those in the eleventh embodiment, and a description thereof will be omitted. In FIG. 25, FIG.
Portions having functions similar to those of FIG. 0 to FIG. 24 are denoted by the same reference numerals.

In the twelfth embodiment, since the characteristic portions of the pulley and the wire related to the movement of the stage in the Y direction are concentrated, the following description will be made with reference to FIG. FIG. 25 shows a state where the stage is inverted.

A pulley 271 rotatably fixed to the upper stage 205 and a Y coaxially arranged with the handle shaft
A continuous annular endless wire 273 is hung on the pulley 250 (also shown in FIG. 24). The pressing plate 274 is fixed to the lower stage 206, and the sandwiching member 275 is fixed to the pressing plate 274 so as to sandwich the wire 273. As a result, the wire 273 is fixed to the lower stage 206.

Next, the operation of the microscope stage configured as described above will be described. To move the upper stage 205 in the Y direction with respect to the lower stage 206, FIG.
The Y handle 253 shown in FIG. When the Y handle 253 is rotated, the pulley 250 is also rotated. Since the wire 273 is wound around the pulley 250, the rotation of the pulley 250 causes the wire 27
3 is continuously sent, and the wire 273 is connected to the pulley 25.
0, pulley 271 and pulley 272 along a triangle.

The wire 273 is fixed to the lower stage 206 between the pulley 271 and the pulley 272. As a result, the pulley 271 or the pulley 27
2 moves in the Y direction. Pulley 271 and pulley 27
2 is fixed to the upper stage 205, so that the upper stage 205 moves with the guide plates 221a and 221b and the lower stage 20 as the pulley 271 or the pulley 272 moves.
It moves in the Y direction along the straight ball guide constituted by 6. At this time, if a straight line connecting the centers of the pulley 271 and the pulley 272 is formed parallel to the linear ball guide that guides the upper stage 205,
The stage movement is most efficient.

The pulley 271 or the pulley 27
The wire 273 can be given a tensile force by making it fixable after moving and adjusting 2 in the Y direction. Similarly, the pulling force can be applied to the wire 273 by making the pulley 250 movable and adjusted in the X direction and then fixable.

According to the twelfth embodiment, it is possible to adopt a configuration in which the wire between the upper stage 205 and the lower stage 206 is hung in two stages (double). For this reason, a highly rigid configuration is provided, and fluctuation during operation due to elongation of the wire or the like can be reduced, and operability is improved.

In the structure of the twelfth embodiment,
A similar configuration can be made by using an endless toothed belt instead of a wire. By using the toothed belt, the rigidity is higher than that of the wire in the above-described rigidity, so that the elongation and the like are almost eliminated, fluctuations and the like can be remarkably reduced, and operability is improved. In addition, since there is no slippage between the pulley and the belt, no poor follow-up of the stage due to the slippage occurs, and highly accurate sample positioning can be performed.

Further, in the twelfth embodiment, the pressing plate 274 and the sandwiching member 275 are used for fixing the wire to the lower stage 206, but a clutch mechanism (not shown) may be used instead. In that case, lower stage 2
06 and the wire 273 can be released, so that when the clutch is released by the clutch, the upper stage 20
5 can be moved in the Y direction regardless of the operation of the steering wheel.

(Thirteenth Embodiment) FIG. 26 is a schematic three-dimensional view of a microscope stage according to a thirteenth embodiment of the present invention, showing how to wire. Note that the basic configuration of the stage and the operation in the X direction in the thirteenth embodiment are the same as those in the eleventh embodiment, and a description thereof will be omitted. In FIG. 26, FIG.
Portions having functions similar to those of FIG. 0 to FIG. 25 are denoted by the same reference numerals.

In the thirteenth embodiment, since the characteristic portions of the pulley and the wire relating to the movement of the stage in the Y direction are concentrated, the following description will be made with reference to FIG. FIG. 26 shows a state where the stage is reversed.

A pulley 281, a pulley 282, a pulley 283 rotatably fixed to the upper stage 205, and a Y pulley 250 (FIG. 2)
4), a continuous annular endless wire 284 is hung.

Hereinafter, the method of hooking the wire 284 will be described. One end of the wire 284 coming out of the pulley 250 is hooked on the pulley 281 and faces the pulley 282. The wire 284 hung on the pulley 282 and turned back is hung on the pulley 283 and turned back on, and the pulley 281 is turned back on.
And wound on a pulley 250. Note that a pressing plate 274 is fixed to the lower stage 206, and the sandwiching member 275 is connected to the pressing plate 274 by a wire 284.
Is fixed to the pressing plate 274 so as to sandwich the wire 284, and as a result, the wire 284 is fixed to the lower stage 206.

Next, the operation of the microscope stage configured as described above will be described. To move the upper stage 205 in the Y direction with respect to the lower stage 206, FIG.
The Y handle 253 shown in FIG. When the Y handle 253 is rotated, the pulley 250 is also rotated. Since the wire 284 is wound around the pulley 250, the rotation of the pulley 250 causes the wire 28
4 is continuously fed, and the wire 284 is connected to the pulley 25.
0, pulley 281, pulley 282, and pulley 2
Sent in the order of 83.

Since the wire 284 is fixed to the lower stage 206 between the pulley 282 and the pulley 283, when the wire 284 is fed, as a relative result, the pulley 282 or the pulley 283 is pulled and moved in the Y direction. . Since the pulley 282 and the pulley 283 are fixed to the upper stage 205, the upper stage 20
5 moves in the Y direction along a linear ball guide constituted by the guide plates 221a and 221b and the lower stage 206 with the movement of the pulley 282 or the pulley 283. At this time, if the straight line connecting the centers of the pulley 282 and the pulley 283 is formed in parallel with the linear ball guide that guides the upper stage 205, the movement efficiency is maximized.

In addition, pulley 282 or pulley 28
The wire 284 can be given a tensile force by allowing the wire 3 to be fixed after being moved and adjusted in the Y direction. Similarly, the pulling force can be applied to the wire 284 by allowing the pulley 250 to be movable and adjusted in the X direction and then fixed.

According to the thirteenth embodiment, it is possible to adopt a configuration in which the wire between the upper stage 205 and the lower stage 206 is wound in two stages (double). For this reason, a high rigidity configuration is provided, the tension applied at the time of the stage feeding operation or the like is dispersed, fluctuations at the time of operation due to elongation of the wire or the like can be reduced, and operability is improved.

(Fourteenth Embodiment) FIG. 27 is a schematic three-dimensional view of a microscope stage according to a fourteenth embodiment of the present invention, showing how to wire. Note that the basic configuration of the stage and the operation in the X direction in the fourteenth embodiment are the same as those in the eleventh embodiment, and a description thereof will be omitted. In FIG. 27, FIG.
26 having the same functions as those in FIG. 26 are denoted by the same reference numerals.

In the fourteenth embodiment, since the characteristic portions of the pulley and the wire related to the movement of the stage in the Y direction are concentrated, the description will be made below with reference to FIG. FIG. 27 shows a state where the stage is inverted.

One end of the wire 291 is fixed to the lower stage 206 at a fixed end 292, and is hung on a pin 293 fixed to the lower stage 206, and is turned back.
After being wrapped around a pulley 294 rotatably held at 05, it is wound around a pulley 250 coaxial with the operation shaft, further wrapped around the pulley 294, and fixed to the lower stage 206 again at the fixed end 292. .

Next, the operation of the microscope stage configured as described above will be described. To move the upper stage 205 in the Y direction with respect to the lower stage 206, FIG.
The Y handle 253 shown in FIG. When the Y handle 253 is rotated, the pulley 250 is also rotated. Since the wire 291 is wound around the pulley 250, the rotation of the pulley 250
1 is continuously sent, and the wire 291 is connected to the pulley 294.
Can change direction. Wire 291 is lower stage 20
6, when the wire 291 is fed, as a relative result, the pulley 294 is pulled and moved in the Y direction. Since the pulley 294 is fixed to the upper stage 205, the upper stage 205 moves in the Y direction along a linear ball guide formed by the guide plates 221 a and 221 b and the lower stage 206 as the pulley 294 moves. . At this time, if the straight line connecting the pulley 294 and the center of the pin 293 is formed in parallel with the linear ball guide that guides the upper stage 205, the stage movement efficiency is maximized.

When the fixed end 292 or the pin 293 is
By allowing the wire 291 to be fixed after moving and adjusting in the direction, a tensile force can be applied to the wire 291. Similarly,
The pulling force can also be applied to the wire 291 by making the pulley 250 movable and adjusted in the X direction and then fixable.

According to the fourteenth embodiment, since the wire fixed to the lower stage 206 has a double structure, it has high rigidity, and the tension applied at the time of the stage feeding operation and the like is dispersed. And the like can be reduced, fluctuations during operation can be reduced, and operability is improved.

(Fifteenth Embodiment) FIG. 28 is a sectional view showing the structure of a handle portion applied to a microscope stage according to a fifteenth embodiment of the present invention. Note that the basic configuration of the stage and X in the fifteenth embodiment
The operation in the direction is the same as in the eleventh embodiment, and a description thereof will not be repeated. In FIG. 28, FIG.
Portions having functions similar to those of FIG. 27 are denoted by the same reference numerals.

In the fifteenth embodiment, since the characteristic portions of the handle portion relating to the movement of the stage in the Y direction are collected, a description will be given below with reference to FIG. In addition,
The handle portion of the fifteenth embodiment can be applied to the microscope stage shown in the eleventh embodiment. FIG.
8, the coupling 251 shown in FIG. 22 is replaced with an elastic member 2101 such as rubber.

As shown in the eleventh to fourteenth embodiments, the upper stage 205 is set
If it is desired to move in the direction, the Y pulley 250 needs to be rotated. To rotate the Y pulley 250, the Y handle 253 is rotated. Y handle 2
53, the Y handle shaft 253 and the elastic member 2
Y pulley 250 connected via 101 also rotates together.

As described in the eleventh to fourteenth embodiments, the wire 2
32 is adjusted so that a tensile force is applied so as not to cause a slip with the pulley.

In a state where a tensile force is applied to the wire 232, the pulley 23
A radial load acts in the direction of 1 and acts as a rolling force on the rotation bearing of the handle shaft. However, according to the fifteenth embodiment, since the radial load applied to the Y pulley 250 is offset by the deflection of the elastic member 2101, the radial load is not transmitted to the Y handle shaft 252, and a tangling force is generated in the bearing portion. I will not do it.

According to the fifteenth embodiment, even if the pulling force applied to the wire is increased, no twisting force is applied to the handle or the like. Since the slip between the wire and the wire can be completely eliminated, it is possible to perform an operation with a good feeling without a tracking error or the like when positioning the sample. In addition, since the handle portion can be formed using a general elastic member such as rubber, it can be manufactured at low cost.

(Sixteenth Embodiment) FIGS. 29A and 29B are diagrams showing a configuration of a microscope stage according to a sixteenth embodiment of the present invention. FIG. 29A is a partial plan view, and FIG. a) A
It is an arrow view.

In the sixteenth embodiment, an endless belt (ring-shaped belt) is used for the transmitting member in the Y direction. That is, as shown in FIG. 29B, a mechanism for sandwiching the belt is provided on the lower stage 301 attached to the microscope main body, and this mechanism includes a sandwiching member 302 and a pressing plate 303. The endless belt 3 is interposed between the sandwiching member 302 and the pressing plate 303.
04 is sandwiched and fixed, and the lower stage 301
It is fixed to.

The upper stage 305 has pulleys 306 and 30 rotatably supported at different positions in the Y direction.
7 is attached. The pulley 307 is Y
It is fixed to the upper stage 305 via a tension adjusting member 308 capable of adjusting the position in the direction.

A Y handle shaft 309 is provided at a position different from the pulleys 306 and 307, and is rotatably supported with respect to the upper stage 305. This Y
A pulley portion is provided on the handle shaft 309 so that a belt can be hung thereon. In such a configuration, as shown in FIG. 29A, a pulley 306, a pulley 307, a Y handle shaft 309 (a belt is wound around a pulley portion of the Y handle shaft 309), and By connecting the sandwiching mechanism, the upper stage 305 can be moved in the Y direction with respect to the lower stage 301 by rotating the Y handle shaft 309.

In the sixteenth embodiment, a belt is used, and since the spring constant of the belt itself is low, the rigidity of the transmission mechanism increases as a result. Further, by using a toothed belt as a belt, reliable transmission without friction can be achieved, tension can be suppressed low, and a factor that deteriorates rotation of the handle can be eliminated.

Although the sixteenth embodiment is configured using an endless belt, it can be similarly configured using an endless wire rope (ring-shaped wire rope).

(Seventeenth Embodiment) FIG. 30 is a partial plan view showing a configuration of a microscope stage according to a seventeenth embodiment of the present invention.

In the seventeenth embodiment, the configuration shown in the sixteenth embodiment is laid out compactly using endless wire ropes. That is, the wire rope 402 is fixed to the lower stage 401 fixed to the microscope main body via the clamping mechanism including the clamping member 302 and the pressing plate 303 as in the sixteenth embodiment.

The upper stage 403 has pulleys 404, 40 rotatably supported at different positions in the Y direction.
5 are attached. Further, as shown in the sixteenth embodiment, the pulley 405
By adjusting the position in the direction, the wire rope 402
Becomes variable.

The upper stage 403 has a pulley 4
Y handle shaft 4 at a position different from 04, 405, 405
07 is provided, and is rotatably supported with respect to the upper stage 403. The Y handle shaft 407 has a pulley for winding the wire rope 402, as in the sixteenth embodiment.

In such a configuration, the wire rope 402 is hung as follows. That is, the wire rope 402 is folded back by the pulley 405 via the pulley 404 and the above-described sandwiching mechanism, is turned in the direction of the Y handle shaft 407 by the pulley 406, winds the Y handle shaft 407 once, and is again turned by the pulley 406. The direction is changed in the Y direction, and the process returns to the pulley 404. Pulley 404
And the pulley 405, the wire rope 402
As in the case of the sixth embodiment, it is fixed to the lower stage 401 via the sandwiching mechanism.

With the above configuration, the lower stage 401 is rotated by rotating the Y handle shaft 407.
The upper stage 403 can move in the Y direction.

The microscope stage according to the present invention has the following features.

(1) A microscope stage according to the present invention comprises a base member, a moving member supported so as to be linearly movable with respect to the base member, and a moving member mounted on the base member along a moving direction of the moving member. A passed linear driving force transmitting member,
A pulley, which is disposed at a position where an outer diameter of the driving force transmitting member is substantially in contact with a portion along a moving direction of the moving member, and is rotatably supported by the moving member; A handle portion disposed at a position distant from the force transmitting member and rotatably supported by the moving member, wherein the driving force transmitting member is sequentially hung on the pulley and the handle portion to rotate the handle portion. The moving member is configured to be moved by an operation.

According to the microscope stage described in the above (1), the position where the outer diameter of the linear driving force transmitting member is substantially in contact with the portion stretched along the moving direction of the moving member. And a pulley arranged at With respect to this pulley, the handle portion can be freely arranged at a position away from the driving force transmitting member. Therefore, the handle can be arranged at a position that is easy to operate in consideration of the operability of the stage.

(2) The microscope stage according to the present invention is the same as the above (1).
In the stage described in the above, means for rotatably supporting the handle portion with respect to the moving member, a rolling bearing,
A plain bearing lubricated by a lubricant.

According to the microscope stage described in the above (2), the rolling bearing and the sliding bearing can be used together to enable smooth rotation even when an eccentric load due to the tension of the driving force transmitting member acts, and to provide a smooth sliding. The lubrication of the bearing can provide a viscous and good operational feeling to the handle.

(3) The microscope stage according to the present invention is the same as the above (1).
, The driving force transmitting member is multi-staged along the moving direction of the moving member.

According to the microscope stage described in the above (3), since the driving force transmitting member is bent and folded a plurality of times in multiple stages, the load applied to the driving force transmitting member is reduced, so that the elongation is reduced. The rigidity of the transmission mechanism increases, and the stopping accuracy of the stage improves.

(4) The microscope stage of the present invention comprises a base member, a moving member supported so as to be linearly movable with respect to the base member, and a moving member mounted on the base member in a moving direction of the moving member. The transferred linear first driving force transmitting member and the first driving force transmitting member are disposed at positions where their outer diameters are substantially in contact with a portion of the first driving force transmitting member along the moving direction of the moving member. A pulley rotatably supported by the member, a handle disposed at a position distant from the first driving force transmitting member with respect to the pulley, and rotatably supported by the moving member; A second driving force transmitting member bridged between the pulley and the pulley, and configured to move the moving member by rotating the handle.

According to the microscope stage described in the above (4), the use of two driving force transmission members allows the driving force to be increased for the purpose of increasing the rigidity of the transmission mechanism and for achieving the good operating feeling of the steering wheel. The role of the transmission member can be divided,
Good stopping accuracy due to the high rigidity of the transmission mechanism and good operating feeling of the handle are compatible.

(5) The microscope stage of the present invention is the same as the above (4).
Wherein the tension of the second driving force transmission member is lower than the tension of the first driving force transmission member.

According to the microscope stage described in (5), the rigidity of the transmission mechanism can be increased by increasing the tension of the first driving force transmission member, while the tension of the second driving force transmission member can be increased. By making it weak, the unbalanced load applied to the handle portion is reduced, and smooth rotation of the handle is ensured.

(6) The microscope stage according to the present invention is the same as the above (4).
Wherein the second driving force transmitting member is a belt.

(7) The microscope stage according to the present invention is the same as the above (4).
, The second driving force transmitting member is a gear.

(8) The microscope stage according to the present invention comprises a lower stage, an upper stage supported so as to be able to move linearly with respect to the lower stage, and an extension on the lower stage along the moving direction of the upper stage. The transferred linear driving force transmitting member, and the driving force transmitting member is disposed at a position where the outer periphery is substantially in contact with a portion along the moving direction of the upper stage, and is rotatably supported by the upper stage. A pulley, a handle portion disposed with respect to the pulley at a position away from a portion of the driving force transmitting member along a moving direction of the upper stage, and rotatably supported by the upper stage; Braking means for applying a resistance to linear movement of the upper stage with respect to a stage, wherein the driving force transmitting member is hung on the pulley and the handle portion in order, The upper stage is moved by a rotation operation of the control unit.

According to the microscope stage described in (8), since the braking means applies a resistance to the linear movement of the upper stage, the upper stage is reliably stopped when the operation of the handle is stopped. And the stop accuracy of the stage is improved.

Further, with a simple configuration using inexpensive members, it is possible to secure high alignment accuracy, good movement followability and operational feeling as a microscope stage, and to improve the degree of freedom in the arrangement of the stage operation handle. An object of the present invention is to provide a compatible microscope stage.

(9) The microscope stage of the present invention is the same as the one described in (8) above.
Wherein the braking means is a friction member interposed between the lower stage and the upper stage, fixed to one of them and brought into contact with the other to generate a frictional force.

According to the microscope stage described in the above (9), the frictional force generated between the friction member and the stage applies a resistance to the linear movement of the stage, and the time when the operation of the handle is stopped is stopped. The stage can be stopped reliably.

(10) The microscope stage of the present invention is the same as the one described in (8) above.
In the stage described in (1), the braking means is a means provided on the handle portion, for applying a resistance to rotation of the handle.

According to the microscope stage described in the above (10), by applying a resistance to the rotation of the handle, a resistance is applied to the linear movement of the upper stage.
When the operation of the handle is stopped, the upper stage can be reliably stopped.

(11) The microscope stage according to the present invention comprises a lower stage, an upper stage supported so as to be able to move linearly with respect to the lower stage, and an extension on the lower stage along the moving direction of the upper stage. A first linear driving force transmitting member that is provided and a position where the outer periphery of the first driving force transmitting member is substantially in contact with a portion of the first driving force transmitting member along a moving direction of the upper stage; A pulley rotatably supported on the pulley, the pulley being disposed at a position away from a portion of the first driving force transmitting member along the moving direction of the upper stage, and being rotatable with respect to the upper stage. A handle is supported, and a second driving force transmitting member is provided between the handle and the pulley. The upper stage is moved by rotating the handle.

According to the microscope stage described in the above (11), the use of two driving force transmitting members allows the driving force to be increased for the purpose of increasing the rigidity of the transmitting mechanism and for achieving the good operational feeling of the steering wheel. The role of the transmission member can be divided, and both good stopping accuracy due to the high rigidity of the transmission mechanism and good operation feeling of the handle are compatible.

The present invention is not limited to the above embodiments, but can be implemented with appropriate modification without departing from the scope of the invention.

[0166]

According to the microscope stage of the present invention, the operability is optimized, the alignment of the specimen is facilitated, and the microscope can be manufactured at low cost.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a configuration of a microscope stage according to a first embodiment of the present invention.

FIG. 2 is a partial cross-sectional view showing a configuration of the microscope stage according to the first embodiment of the present invention.

FIG. 3 is a bottom view showing the configuration of the microscope stage according to the first embodiment of the present invention.

FIG. 4 is a sectional view of the microscope stage according to the first embodiment of the present invention, taken along the line AA in FIG.

FIG. 5 is a cross-sectional view of the microscope stage according to the first embodiment of the present invention, taken along line BB of FIG. 3;

FIG. 6 is a schematic diagram showing a transmission mechanism of a linear member according to the first embodiment of the present invention.

FIG. 7 is a schematic view showing a modification of the transmission mechanism of the linear member according to the first embodiment of the present invention.

FIG. 8 is an enlarged cross-sectional view showing a configuration of a stage operation handle mechanism according to the first embodiment of the present invention.

FIG. 9 is a sectional view showing a configuration of a stage operation handle according to a second embodiment of the present invention.

FIG. 10 is a sectional view showing a configuration of a microscope stage according to a third embodiment of the present invention.

FIG. 11 is a sectional view showing a configuration of a microscope stage according to a third embodiment of the present invention.

FIG. 12 is a schematic diagram showing a linear member transmission mechanism according to a fourth embodiment of the present invention.

FIG. 13 is a schematic plan view of a wire-driven microscope stage according to a fifth embodiment of the present invention as viewed from below.

FIG. 14 is a schematic three-dimensional view of a microscope stage according to a fifth embodiment of the present invention as viewed obliquely from below.

FIG. 15 is a schematic three-dimensional view of a microscope stage according to a sixth embodiment of the present invention as viewed obliquely from below.

FIG. 16 is a schematic plan view of a microscope stage according to a seventh embodiment of the present invention as viewed from below.

FIG. 17 is a schematic three-dimensional view of a microscope stage according to an eighth embodiment of the present invention as viewed obliquely from below.

FIG. 18 is a schematic three-dimensional view of a microscope stage according to a ninth embodiment of the present invention as viewed obliquely from below.

FIG. 19 is a sectional view of an operation handle according to a tenth embodiment of the present invention.

FIG. 20 is a plan view of a microscope stage according to an eleventh embodiment of the present invention as viewed from above.

FIG. 21 is a sectional view of a microscope stage according to an eleventh embodiment of the present invention.

FIG. 22 is a sectional view showing a configuration of a handle portion according to an eleventh embodiment of the present invention.

FIG. 23 is a bottom view of the microscope stage according to the eleventh embodiment of the present invention.

FIG. 24 is a schematic three-dimensional view of a microscope stage according to an eleventh embodiment of the present invention.

FIG. 25 is a schematic three-dimensional view of a microscope stage according to a twelfth embodiment of the present invention.

FIG. 26 is a schematic three-dimensional view of a microscope stage according to a thirteenth embodiment of the present invention.

FIG. 27 is a schematic three-dimensional view of a microscope stage according to a fourteenth embodiment of the present invention.

FIG. 28 is a sectional view showing a configuration of a handle portion applied to a microscope stage according to a fifteenth embodiment of the present invention.

FIG. 29 is a diagram showing a configuration of a microscope stage according to a sixteenth embodiment of the present invention.

FIG. 30 is a partial plan view showing a configuration of a microscope stage according to a seventeenth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Lower stage 1a, 1b ... Guide groove part 2 ... Upper stage 2a, 2b, 2c ... Guide groove part 3 ... Casing 4 ... Ball 5 ... Guide member 5a ... Guide groove part 6 ... Guide member 6a ... Guide groove part 8 ... Kremmel holding member 8a ... Guide groove part 9 ... Clemmel 10 ... Fixed shaft 10a ... Screw part 11 ... Y handle shaft 11a ... Pulley part 12 ... Y handle 13 ... Bearing 14 ... Fixed guide 14a ... Screw part 14b ... Screw part 14c ... Set screw 15 ... Thrust support Part 16 ... Washer 17 ... Y torque adjustment handle 18 ... Elastic member 19 ... Washer 20 ... X handle shaft 20a ... Pulley part 20b ... Screw part 21 ... X handle 22 ... Bearing 23 ... Thrust ring 24 ... Thrust support part 25 ... Washer 26 … X torque adjustment handle 27… Elastic member 8 ... Washer 29 ... Pulley 30 ... Rolling Bearing 31 ... Shaft 32 ... Linear Member 33 ... Pulley 34 ... Shaft 35 ... Rolling Bearing 36 ... Tension Adjusting Member 37 ... Linear Member 38 ... Tension Adjusting Member 38a ... Protrusion 38b ... Pin 38c: Screw 40: Rolling bearing 41: Brake member 411: Flat plate 412: Projection portion 42: Screw 51: Y fitting portion 52: X fitting portion 53: Fixed ring 54: Fixed ring set screw 101: Upper stage 102 Operation handle 103 ... First pulley 104, 104 '... Second pulley 105 ... Wire 106 ... Lower stage 107 ... Pin 108 ... Pin 111 ... First wire 112 ... Second wire 121 ... First wire 122 ... Second wire 123 ... Pin 124: Third pulley 125: Pin 131: Slide bearing 132: Bearing Reference numeral 201: specimen 202: Klemmel 203: fixed screw 204: Klemmer holding member 205: upper stage 206: lower stage 207: clamp screw 211, 212 ... pin 213 ... wire 214 ... pulley 215 ... pulley 221a, 221b ... guide plate 223 ... triangle Wire 224 Ball 231 Pulley 232 Wire 233 Pin 234 Tension adjusting member 241 Fixed shaft 242 Bearing 243 Sliding bearing 244 Rotating shaft 245 Ring 246 Operation ring 2461 Set screw 250 Pulley 251 Coupling 252 ... Outer shaft 253 ... Operation ring 254 ... Bearing 255 ... Y sliding part 256 ... Y sliding part 257 ... Ring 258 ... Ring 259 ... Spring 260 ... Washer 261,262,263 ... Sliding part 271,27 2 ... Pulley 273 ... Wire 274 ... Pressing plate 275 ... Pinch member 281,282,283 ... Pulley 284 ... Endless wire 291 ... Wire 292 ... Fixed end 293 ... Pin 294 ... Pulley 2101 ... Elastic member 301 ... Lower stage 302 ... Pinch member 303 ... Pressing plate 304 ... Endless belt 305 ... Upper stage 306,307 ... Pulley 308 ... Tension adjusting member 309 ... Y handle shaft 401 ... Lower stage 402 ... Wire rope 403 ... Upper stage 404,405,496 ... Pulley 407 ... Y handle axis

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Takashi Nagano 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Industrial Co., Ltd. (72) Takayuki Shimizu 2-43-2 Hatagaya, Shibuya-ku, Tokyo Within Olympus Optical Co., Ltd. (72) Inventor Hidehiko Ohara 2-43-2 Hatagaya, Shibuya-ku, Tokyo Olympus Optical Co., Ltd.

Claims (5)

[Claims] A lower stage; an upper stage supported to be linearly movable with respect to the lower stage; a driving force transmitting member stretched over the lower stage along a moving direction of the upper stage; A pulley that is disposed at a position where the outer periphery of the driving force transmitting member is substantially in contact with a portion along the moving direction of the upper stage, and is rotatably supported by the upper stage; A handle portion disposed at a position apart from a portion of the force transmission member along the moving direction of the upper stage, and a handle portion rotatably supported by the upper stage, wherein the driving force transmission member includes the pulley and the pulley. A microscope stage, wherein the stage is hung on a handle in order and the upper stage is moved by rotating the handle. 2. The microscope stage according to claim 1, wherein the handle shaft of the handle portion has a slide bearing at least via a lubricant. 3. The microscope stage according to claim 1, wherein the pulley and a handle shaft of the handle portion are connected via a coupling. 4. The microscope stage according to claim 1, wherein the pulley and the handle shaft of the handle portion are connected via an elastic member. 5. The at least two pulleys are provided at a portion along the direction of movement of the upper stage, and the driving force transmitting member comprises a ring-shaped member hung on the at least two pulleys and the handle portion. The microscope stage according to claim 1, wherein: