JP2000214069A - Evaluation apparatus for gas permeation - Google Patents
Evaluation apparatus for gas permeationInfo
- Publication number
- JP2000214069A JP2000214069A JP1596099A JP1596099A JP2000214069A JP 2000214069 A JP2000214069 A JP 2000214069A JP 1596099 A JP1596099 A JP 1596099A JP 1596099 A JP1596099 A JP 1596099A JP 2000214069 A JP2000214069 A JP 2000214069A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- sample
- gas
- carrier gas
- gas permeation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Examining Or Testing Airtightness (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、プラスチックフィ
ルム等の気体透過性能を短時間で評価する気体透過評価
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for evaluating gas permeability of a plastic film or the like in a short time.
【０００２】[0002]
【従来の技術】プラスチックフィルムに酸化珪素薄膜等
を積層し、気体透過性を大きく低減させたガスバリアフ
ィルムが、包装材料、液晶セル等の表示素子デバイスを
形成する光学材料などとして使用されている。従来、こ
のようなガスバリアフィルムの気体透過性能の評価装置
としては、ＡＳＴＭ１４３４Ｄの圧力法に基づくものが
知られている（化学と工業,Vol.61(No.12),p496〜502(1
987)）。2. Description of the Related Art A gas barrier film obtained by laminating a silicon oxide thin film or the like on a plastic film and greatly reducing gas permeability is used as a packaging material, an optical material for forming a display element device such as a liquid crystal cell, or the like. Conventionally, as an apparatus for evaluating the gas permeation performance of such a gas barrier film, an apparatus based on the pressure method of ASTM 1434D is known (Chemistry and Industry, Vol. 61 (No. 12), pp. 496-502 (1)).
987)).
【０００３】このＡＳＴＭ１４３４Ｄの圧力法に基づく
評価装置は、キャリアガスを導入するガス配管を有する
第１チャンバーと、１０-6Torr以下の高真空に減圧され
る第２チャンバーとを有し、第２チャンバーには、その
チャンバー内のガスを分析する四重極質量分析器が接続
している。試料は、第１チャンバーと第２チャンバーと
の境界に設置され、試料の第１チャンバー側がＯリング
で押圧され、第２チャンバー側には、試料の支持材とし
てろ紙が当てられる。この評価装置では試料設置後、第
２チャンバーを高真空にして第１チャンバーにキャリア
ガスを導入し、第１チャンバーから試料を透過して第２
チャンバーに拡散してくるキャリアガス分子が定常状態
になるのを待ち、その後、第２チャンバーに接続した四
重極質量分析器でキャリアガス分子を定量することによ
り試料の気体透過性能を評価する。[0003] The evaluation apparatus based on the pressure method of ASTM 1434D has a first chamber having a gas pipe for introducing a carrier gas, and a second chamber depressurized to a high vacuum of 10 -6 Torr or less. The chamber is connected to a quadrupole mass analyzer that analyzes the gas in the chamber. The sample is placed at the boundary between the first chamber and the second chamber, the first chamber side of the sample is pressed by an O-ring, and a filter paper is applied to the second chamber side as a support for the sample. In this evaluation apparatus, after the sample is set, the second chamber is set to a high vacuum, and a carrier gas is introduced into the first chamber.
Wait for the carrier gas molecules diffusing into the chamber to reach a steady state, and then evaluate the gas permeation performance of the sample by quantifying the carrier gas molecules with a quadrupole mass analyzer connected to the second chamber.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、気体透
過性能を評価するガスバリアフィルムのガスバリア性が
向上するに伴い、従来のＡＳＴＭ１４３４Ｄの圧力法に
基づく評価装置では、第１チャンバーから試料を透過し
て第２チャンバーに拡散してくるキャリアガス分子が定
常状態になるのに時間がかかり、そのため、例えば酸素
の透過性能を評価する場合には、測定に１〜２週間も要
し、評価コストが高くなるという問題がある。However, as the gas barrier properties of the gas barrier film for evaluating the gas permeation performance are improved, the conventional ASTM 1434D-based evaluation apparatus based on the pressure method transmits the sample from the first chamber and passes the sample through the first chamber. It takes time for the carrier gas molecules diffusing into the two chambers to reach a steady state, so that, for example, when evaluating oxygen permeation performance, it takes 1 to 2 weeks for the measurement, and the evaluation cost increases. There is a problem.
【０００５】また、気体透過性能を評価するガスバリア
フィルムのガスバリア性が向上するのに伴い、第２チャ
ンバー内のガス分子濃度が低くなるため、四重極質量分
析器の検出限界に達するという問題も生じている。[0005] Further, as the gas barrier property of the gas barrier film for evaluating gas permeation performance is improved, the gas molecule concentration in the second chamber is reduced, and the detection limit of the quadrupole mass spectrometer is reached. Has occurred.
【０００６】さらに、従来の評価装置では、設置された
試料が、その第１チャンバー側はＯリングでシールされ
るが第２チャンバー側にはろ紙が当てられるだけなの
で、第２チャンバーを高真空にひいたときに試料に不要
な応力がかかり、試料が破損する場合があるという問題
も生じている。Furthermore, in the conventional evaluation apparatus, the installed sample is sealed with an O-ring on the first chamber side, but only the filter paper is applied on the second chamber side. When the sample is pulled, unnecessary stress is applied to the sample, and there is a problem that the sample may be damaged.
【０００７】本発明は以上のような従来技術の問題点を
解決しようとするものであり、ガスバリア性が向上して
いる試料についても、迅速に確実に気体透過性能を評価
できるようにすることを目的としている。[0007] The present invention is to solve the above-mentioned problems of the prior art, and is intended to quickly and surely evaluate the gas permeation performance of a sample having improved gas barrier properties. The purpose is.
【０００８】[0008]
【課題を解決するための手段】本発明は、上記の目的を
達成するため、試料の測定部位の一方の面が面する空間
を囲む第１チャンバー、第１チャンバー内にキャリアガ
スを導入するガス配管、試料の測定部位の他面が面する
空間を囲む第２チャンバー、第２チャンバー内を高真空
にするポンプ、試料の測定部位の周囲を、試料の第１チ
ャンバー側及び第２チャンバー側の両面から対称的に押
圧するシール材、第２チャンバー内のキャリアガス分子
を分析する分析器、及び試料温度を調節する温度制御装
置を備えた気体透過評価装置を提供する。According to the present invention, there is provided a first chamber surrounding a space where one surface of a measurement site of a sample faces, and a gas for introducing a carrier gas into the first chamber. A pipe, a second chamber surrounding a space facing the other surface of the measurement site of the sample, a pump for applying a high vacuum to the second chamber, and a periphery of the measurement site of the sample on the first chamber side and the second chamber side of the sample. Provided is a gas permeation evaluation device including a seal member that presses symmetrically from both surfaces, an analyzer that analyzes carrier gas molecules in a second chamber, and a temperature controller that adjusts a sample temperature.
【０００９】また、この気体透過評価装置を用いた試料
の気体透過性能の評価方法として、この気体透過評価装
置に試料を設置し、第２チャンバー内を高真空にし、第
１チャンバー内にキャリアガスを導入すると共に第２チ
ャンバー内のキャリアガスを分析器で分析し、キャリア
ガス導入開始後の時間と第２チャンバー内に拡散してき
たキャリアガスの量との過渡応答に基づき試料の気体透
過性能を評価する方法、及びこの気体透過評価装置に試
料を設置し、第２チャンバー内を高真空にし、第１チャ
ンバー内にキャリアガスを導入すると共に第２チャンバ
ー内のキャリアガスを分析器で分析し、キャリアガス導
入開始後第２チャンバー内のキャリアガスの量が定常状
態になった後、定常状態における第２チャンバー内のキ
ャリアガスの量に基づき試料の気体透過性能を評価する
方法を提供する。As a method for evaluating the gas permeation performance of a sample using the gas permeation evaluation apparatus, a sample is set in the gas permeation evaluation apparatus, the inside of the second chamber is evacuated to a high vacuum, and the carrier gas is set in the first chamber. And the carrier gas in the second chamber is analyzed by an analyzer, and the gas permeation performance of the sample is determined based on the transient response between the time after the start of the carrier gas introduction and the amount of the carrier gas diffused into the second chamber. A method for evaluating, and setting a sample in the gas permeation evaluation apparatus, applying a high vacuum to the second chamber, introducing a carrier gas into the first chamber, and analyzing the carrier gas in the second chamber with an analyzer, After the carrier gas introduction is started, after the amount of the carrier gas in the second chamber becomes a steady state, the amount of the carrier gas in the second chamber in the steady state is reduced. Hazuki provides a method for evaluating the gas permeability of the sample.
【００１０】本発明の気体透過評価装置によれば、試料
の測定部位の一方の面が面する空間を囲む第１チャンバ
ーが、その第１チャンバー内にキャリアガスを導入する
ガス配管を備え、また、試料の測定部位の他面が面する
空間を囲む第２チャンバーが、その第２チャンバー内を
高真空にするポンプを備え、かつ第２チャンバー内のキ
ャリアガス分子を検出する分析器に接続しているので、
ＡＳＴＭ１４３４Ｄの圧力法に準じて試料の気体透過性
能を評価することが可能となる。According to the gas permeation evaluation apparatus of the present invention, the first chamber surrounding the space facing one surface of the measurement site of the sample is provided with a gas pipe for introducing a carrier gas into the first chamber. A second chamber surrounding a space facing the other surface of the measurement site of the sample, the pump including a pump for creating a high vacuum in the second chamber, and connecting to an analyzer for detecting carrier gas molecules in the second chamber. So
It becomes possible to evaluate the gas permeation performance of the sample according to the pressure method of ASTM1434D.
【００１１】この場合、本発明の気体透過評価装置は、
試料温度を調節する温度制御装置を備えているので、試
料を透過するキャリアガスの拡散速度を試料温度によっ
て制御することができる。したがって、短時間に、かつ
第２チャンバーに接続した当該分析器に適した条件で試
料の気体透過性能を評価することが可能となる。例え
ば、第２チャンバーで定常状態に達したキャリアガスの
濃度を分析器で検出し、試料の気体透過性能を評価する
場合に、試料を加温することにより、常温では１〜２週
間要していた評価期間を２０〜３０分程度に短縮するこ
とができる。また、常温では第２チャンバーで定常状態
に達したキャリアガスの濃度が分析器の検出限界を下回
る場合でも、試料を加温することにより第２チャンバー
内のキャリアガス濃度を高めることができるので、分析
器で検出することが可能となる。In this case, the gas permeation evaluation apparatus of the present invention
Since the temperature controller for adjusting the sample temperature is provided, the diffusion speed of the carrier gas passing through the sample can be controlled by the sample temperature. Therefore, it is possible to evaluate the gas permeation performance of the sample in a short time and under conditions suitable for the analyzer connected to the second chamber. For example, when the concentration of the carrier gas that has reached a steady state in the second chamber is detected by an analyzer and the gas permeation performance of the sample is evaluated, heating the sample requires 1 to 2 weeks at room temperature. The evaluation period can be reduced to about 20 to 30 minutes. Further, even if the concentration of the carrier gas that has reached the steady state in the second chamber at room temperature is lower than the detection limit of the analyzer, the carrier gas concentration in the second chamber can be increased by heating the sample. It becomes possible to detect with an analyzer.
【００１２】さらに、本発明の気体透過評価装置を用い
て試料の気体透過性能を評価する場合に、第２チャンバ
ー内でのキャリアガスが定常状態に達する前から第２チ
ャンバー内でのキャリアガス濃度を分析器が検出できる
場合には、第２チャンバー内でキャリアガスが定常状態
になるのを待つことなく、キャリアガス導入開始後の時
間と第２チャンバー内に拡散してきたキャリアガスの量
との過渡応答に基づいて試料の気体透過性能を評価する
ことができる。したがって、よりいっそう気体透過性能
の評価に要する時間を短縮することができる。Further, when the gas permeation performance of the sample is evaluated using the gas permeation evaluation apparatus of the present invention, the carrier gas concentration in the second chamber is not changed until the carrier gas in the second chamber reaches a steady state. When the analyzer can detect the carrier gas in the second chamber, the time after the start of the introduction of the carrier gas and the amount of the carrier gas diffused into the second chamber can be measured without waiting for the carrier gas to reach a steady state. The gas permeation performance of the sample can be evaluated based on the transient response. Therefore, the time required for evaluating the gas permeation performance can be further reduced.
【００１３】[0013]
【発明の実施の形態】以下、図面を参照しつつ本発明を
詳細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the drawings.
【００１４】図１は、本発明の一態様の気体透過評価装
置１のシステム構成図、図２はその試料取付部付近のｘ
−ｘ断面図、図３は試料取付部付近のｙ−ｙ断面図であ
る。FIG. 1 is a system configuration diagram of a gas permeation evaluation apparatus 1 according to one embodiment of the present invention, and FIG.
FIG. 3 is a sectional view taken along the line y-y in the vicinity of the sample mounting portion.
【００１５】この気体透過評価装置１は、プラスチッ
ク、セラミック、ガラス、金属等の種々のフィルム状の
試料２の気体透過性（あるいはガスバリア性）を評価す
る装置であり、試料２を設置した場合に、その測定部位
の一方の面が面する空間を囲む第１チャンバー３、試料
２の測定部位の他面が面する空間を囲む第２チャンバー
４を有している。The gas permeation evaluation apparatus 1 is an apparatus for evaluating the gas permeability (or gas barrier property) of various film-shaped samples 2 such as plastic, ceramic, glass, and metal. A first chamber 3 surrounding a space where one surface of the measurement site faces, and a second chamber 4 surrounding a space where the other surface of the measurement site of the sample 2 faces.
【００１６】試料２は、その載置位置において、その測
定部位の周囲が、第１チャンバー３側及び第２チャンバ
ー４側の両面から対称的にシール材５ａ、５ｂで押圧さ
れるようになっている。より具体的には、例えば、シー
ル材５ａ、５ｂとしてＯリングが、それぞれ第１チャン
バー側フランジ６ａ及び第２チャンバー側フランジ６ｂ
に取り外し可能にはめ込まれている。このように同一素
材のシール材５ａ、５ｂで試料２を対称的に押圧するこ
とにより試料２に不要な応力がかかることを防止でき
る。At the mounting position of the sample 2, the periphery of the measurement site is symmetrically pressed by the sealing members 5a and 5b from both sides of the first chamber 3 and the second chamber 4. I have. More specifically, for example, O-rings are used as the sealing materials 5a and 5b, respectively, and the first chamber-side flange 6a and the second chamber-side flange 6b
Removably mounted on the By pressing the sample 2 symmetrically with the sealing materials 5a and 5b of the same material in this way, it is possible to prevent unnecessary stress from being applied to the sample 2.
【００１７】また、試料２は、その載置位置において、
第１チャンバー３側及び第２チャンバー４側の両面が通
気性支持板７ａ、７ｂで挟まれるようになっており、試
料２の気体透過性能の評価時に第２チャンバー４内を高
真空にした場合においても試料２に変形やクラックが生
じることを防止している。この通気性支持板７ａ、７ｂ
としては、少なくとも１カ所にφ２ｍｍ以下の孔７ｈが
開いている、厚さ５０〜１００μｍ程度のガラスなどの
板材を使用することができる。なお、本発明の気体透過
評価装置１において、通気性支持板７ａ、７ｂは、試料
２の変形のしやすさ、第２チャンバー４を減圧した場合
の真空度等により、必要に応じて設けられるが、一般的
には、少なくとも試料２にとって低圧側となる第２チャ
ンバー４側に設けることが好ましい。Further, the sample 2 is placed at the mounting position.
When both surfaces of the first chamber 3 side and the second chamber 4 side are sandwiched by the air-permeable supporting plates 7a and 7b, and the inside of the second chamber 4 is set to a high vacuum when evaluating the gas permeability of the sample 2. Also, the sample 2 is prevented from being deformed or cracked. These air-permeable support plates 7a, 7b
For example, a plate material such as glass having a thickness of about 50 to 100 μm and having a hole 7h of φ2 mm or less in at least one place can be used. In the gas permeation evaluation device 1 of the present invention, the permeable support plates 7a and 7b are provided as necessary according to the ease of deformation of the sample 2, the degree of vacuum when the second chamber 4 is depressurized, and the like. However, in general, it is preferable to provide at least the second chamber 4 side which is on the low pressure side for the sample 2.
【００１８】第１チャンバー３にはガス配管８が設けら
れており、このガス配管８を通してボンベ９から第１チ
ャンバー３内にキャリアガスが導入される。キャリアガ
スとしては、フィルム状の試料２の透過性の点から、原
子量４０以下のものが好ましく、例えば、Ａｒ、Ｎ2、
Ｈｅ、Ｈ2等を使用することができる。これらの中で
も、取り扱いが容易な点から、不活性ガスが好ましい。A gas pipe 8 is provided in the first chamber 3, and a carrier gas is introduced into the first chamber 3 from a cylinder 9 through the gas pipe 8. The carrier gas preferably has an atomic weight of 40 or less from the viewpoint of the permeability of the sample 2 in the form of a film. For example, Ar, N 2 ,
He, H 2 or the like can be used. Among these, an inert gas is preferred from the viewpoint of easy handling.
【００１９】また、第１チャンバー３には圧力ゲージ１
０が取り付けられている。The first chamber 3 has a pressure gauge 1
0 is attached.
【００２０】第２チャンバー４には、その内部を１０-6
Torr以下程度の高真空にするポンプとしてターボ分子ポ
ンプ１１が接続されている。また、第２チャンバー４内
のキャリアガス分子を検出する分析器として、四重極質
量分析器１２が接続されている。The inside of the second chamber 4 is 10 -6.
A turbo molecular pump 11 is connected as a pump for making a high vacuum of about Torr or less. A quadrupole mass analyzer 12 is connected as an analyzer for detecting carrier gas molecules in the second chamber 4.
【００２１】さらに、この気体透過評価装置１に特徴的
な構成として、試料２の温度を調節する温度制御装置１
３が備えられている。より具体的には、温度制御装置１
３として、試料２の測定部位に隣接してリボンヒーター
付き熱伝対が配されている。温度制御装置１３で試料温
度を制御することにより、試料２を透過するキャリアガ
スの拡散速度を試料温度によって制御することができ
る。したがって、短時間に、かつ第２チャンバー４に接
続した当該分析器１２に適した条件で、試料２の気体透
過性能を評価することが可能となる。Further, as a characteristic configuration of the gas permeation evaluation device 1, a temperature control device 1 for adjusting the temperature of the sample 2 is provided.
3 are provided. More specifically, the temperature control device 1
As No. 3, a thermocouple with a ribbon heater is arranged adjacent to the measurement site of the sample 2. By controlling the sample temperature with the temperature control device 13, the diffusion speed of the carrier gas passing through the sample 2 can be controlled by the sample temperature. Therefore, the gas permeation performance of the sample 2 can be evaluated in a short time and under conditions suitable for the analyzer 12 connected to the second chamber 4.
【００２２】なお、温度制御装置１３としては、ヒータ
ーだけでなく、必要に応じて冷却パイプ等を設けてもよ
い。The temperature control device 13 may be provided not only with a heater but also with a cooling pipe or the like as necessary.
【００２３】この気体透過評価装置１を用いて試料２の
気体透過性能あるいはガスバリア性を評価する方法とし
ては、まず、第１チャンバー３と第２チャンバー４との
間に試料２を設置し、第２チャンバー４内をターボ分子
ポンプ１１で排気し、１０-6Torr以下、より好ましくは
１０-8Torr程度の高真空にする。次に、必要に応じて温
度制御装置１３で試料２を加熱することにより、第１チ
ャンバー３の容器内温度と試料２とを同一温度にする。
次に、ガス配管８のバルブを開けてキャリアガスを第１
チャンバー３に導入し、それと同時に四重極質量分析器
１２で第２チャンバー４内のキャリアガスを測定する。
そしてこの測定を、第２チャンバー４内でのキャリアガ
スの分圧が定常状態になるまで行う。こうして測定した
定常状態における第２チャンバー４内のキャリアガスの
量に基づき、試料２の気体透過性能を評価する。あるい
は、キャリアガス導入開始後の時間と第２チャンバー４
内に拡散してきたキャリアガスの量との過渡応答を四重
極質量分析器１２で検出し、一定の値になるまでの時間
を測定し、その過渡応答に基づき、試料の気体透過性能
を評価する。As a method of evaluating the gas permeation performance or gas barrier property of the sample 2 using the gas permeation evaluation apparatus 1, first, the sample 2 is set between the first chamber 3 and the second chamber 4, The interior of the two chambers 4 is evacuated by a turbo molecular pump 11 to a high vacuum of 10 -6 Torr or less, more preferably about 10 -8 Torr. Next, the sample 2 is heated by the temperature control device 13 as necessary, so that the temperature in the container of the first chamber 3 and the sample 2 are made the same.
Next, the valve of the gas pipe 8 is opened to supply the carrier gas to the first gas.
The carrier gas is introduced into the chamber 3, and at the same time, the carrier gas in the second chamber 4 is measured by the quadrupole mass analyzer 12.
This measurement is performed until the partial pressure of the carrier gas in the second chamber 4 reaches a steady state. The gas permeation performance of the sample 2 is evaluated based on the amount of the carrier gas in the second chamber 4 in the steady state thus measured. Alternatively, the time after the start of the carrier gas introduction and the second chamber 4
The transient response with the amount of carrier gas diffused into the inside is detected by the quadrupole mass spectrometer 12, the time until it reaches a certain value is measured, and the gas transmission performance of the sample is evaluated based on the transient response. I do.
【００２４】[0024]
【発明の効果】本発明によれば、ガスバリア性が向上し
ているプラスチックフィルムを試料とする場合でも、迅
速に確実に気体透過性能を評価することが可能となる。According to the present invention, even when a plastic film having improved gas barrier properties is used as a sample, the gas permeation performance can be quickly and reliably evaluated.
【図１】 気体透過評価装置のシステム構成図である。FIG. 1 is a system configuration diagram of a gas permeation evaluation device.
【図２】 気体透過評価装置の試料取付部付近のｘ−ｘ
断面図である。FIG. 2 is xx near the sample mounting portion of the gas permeation evaluation device.
It is sectional drawing.
【図３】 気体透過評価措置の試料取付部付近のｙ−ｙ
断面図である。FIG. 3 yy near the sample mounting part of the gas permeation evaluation measure
It is sectional drawing.
１…気体透過評価装置、 ２…試料、 ３…第１チャン
バー、 ４…第２チャンバー、 ５ａ、５ｂ…シール
材、 ６ａ…第１チャンバー側フランジ、 ６ｂ…第２
チャンバー側フランジ、 ７ａ、７ｂ…通気性支持板、
８…ガス配管、９…ボンベ、 １０…圧力ゲージ、
１１…ターボ分子ポンプ、 １２…四重極質量分析器、
１３…温度制御装置DESCRIPTION OF SYMBOLS 1 ... Gas permeation evaluation apparatus, 2 ... Sample, 3 ... 1st chamber, 4 ... 2nd chamber, 5a, 5b ... Seal material, 6a ... 1st chamber side flange, 6b ... 2nd
Chamber side flange, 7a, 7b ... air-permeable support plate,
8 ... gas piping, 9 ... cylinder, 10 ... pressure gauge,
11: turbo molecular pump, 12: quadrupole mass spectrometer,
13. Temperature control device
Claims (5)
を囲む第１チャンバー、第１チャンバー内にキャリアガ
スを導入するガス配管、試料の測定部位の他面が面する
空間を囲む第２チャンバー、第２チャンバー内を高真空
にするポンプ、試料の測定部位の周囲を、試料の第１チ
ャンバー側及び第２チャンバー側の両面から対称的に押
圧するシール材、第２チャンバー内のキャリアガス分子
を分析する分析器、及び試料温度を調節する温度制御装
置を備えた気体透過評価装置。1. A first chamber surrounding a space facing one surface of a measurement site of a sample, a gas pipe for introducing a carrier gas into the first chamber, a first tube surrounding a space facing the other surface of the measurement site of the sample. Two chambers, a pump for creating a high vacuum in the second chamber, a sealing material for pressing the periphery of the measurement site of the sample symmetrically from both the first chamber side and the second chamber side of the sample, a carrier in the second chamber A gas permeation evaluation device including an analyzer for analyzing gas molecules and a temperature control device for adjusting a sample temperature.
少なくとも試料の第２チャンバー側に設けられている請
求項１記載の気体透過評価装置。2. A gas-permeable supporting plate for preventing deformation of a sample,
2. The gas permeation evaluation device according to claim 1, wherein the gas permeation evaluation device is provided at least on the second chamber side of the sample.
して配置されたヒーター付き熱伝対からなる請求項１又
は２記載の気体透過評価装置。3. The gas permeation evaluation device according to claim 1, wherein the temperature control device comprises a thermocouple with a heater disposed adjacent to a measurement site of the sample.
過評価装置に試料を設置し、第２チャンバー内を高真空
にし、第１チャンバー内にキャリアガスを導入すると共
に第２チャンバー内のキャリアガスを分析器で分析し、
キャリアガス導入開始後の時間と第２チャンバー内に拡
散してきたキャリアガスの量との過渡応答に基づき試料
の気体透過性能を評価する方法。4. A sample is set in the gas permeation evaluation apparatus according to claim 1, a second chamber is evacuated to a high vacuum, a carrier gas is introduced into the first chamber, and a second gas is introduced into the second chamber. Of the carrier gas with an analyzer,
A method for evaluating the gas permeation performance of a sample based on a transient response between the time after the start of introduction of the carrier gas and the amount of the carrier gas diffused into the second chamber.
過評価装置に試料を設置し、第２チャンバー内を高真空
にし、第１チャンバー内にキャリアガスを導入すると共
に第２チャンバー内のキャリアガスを分析器で分析し、
キャリアガス導入開始後第２チャンバー内のキャリアガ
スの量が定常状態になった後、定常状態における第２チ
ャンバー内のキャリアガスの量に基づき試料の気体透過
性能を評価する方法。5. A sample is set in the gas permeation evaluation apparatus according to any one of claims 1 to 3, the inside of the second chamber is evacuated to a high vacuum, a carrier gas is introduced into the first chamber, and the inside of the second chamber is introduced. Of the carrier gas with an analyzer,
A method for evaluating the gas permeation performance of a sample based on the amount of the carrier gas in the second chamber in the steady state after the amount of the carrier gas in the second chamber becomes a steady state after the introduction of the carrier gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1596099A JP2000214069A (en) | 1999-01-25 | 1999-01-25 | Evaluation apparatus for gas permeation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1596099A JP2000214069A (en) | 1999-01-25 | 1999-01-25 | Evaluation apparatus for gas permeation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000214069A true JP2000214069A (en) | 2000-08-04 |
Family
ID=11903308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1596099A Pending JP2000214069A (en) | 1999-01-25 | 1999-01-25 | Evaluation apparatus for gas permeation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000214069A (en) |
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