JP2000158158A - Method and device for scanning type laser marking - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily select an optimum setting value of marking conditions in a scanning type laser marking method. SOLUTION: After trial marking is completed against a final row (NA), of a first sequence (a step C4), a provisional setting value of a Y axis parameter condition 'speed' is returned to an initial value (a step C7) and also a marking position in a Y axial direction is returned to an initial value (a first row)(a step C8). Then, a renewal processing in an X axial direction is performed so that a provisional setting value of the X axial parameter condition 'current' is renewed by one step (a step C10) and a marking position of the X axial direction is renewed by one row (from the first row to the second row) (a step C11). For the other conditions, the setting value data is not changed and the same data is used as in the previous case. As a result, each part is actuated according to the obtained condition data, so as to perform a trial marking of the first sequence in the second row (a step C3).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a scanning type laser marking method and apparatus.

[0002]

2. Description of the Related Art A scanning type laser marking method irradiates a workpiece with laser light focused at a high density,
The laser beam is swung by a scanning mirror to scan a laser spot on the surface of the workpiece, and a minute portion of the workpiece surface hit by the beam spot is instantaneously reformed (melting, evaporating, discoloring) with laser energy. This is a technique for marking (engraving or printing) such that a desired pattern such as a character, a figure, a symbol, or the like is drawn while performing the same. As the laser light, a Q-switch type high-speed repetitive pulsed laser light having a high peak power is generally used.

[0003] The laser marking method is a printing technique in which the surface of a workpiece is modified with laser energy as described above, and thus the printing result is greatly affected by the material of the workpiece. In the scanning method, the quality of printing can be adjusted by changing the values of marking conditions such as laser output (light intensity) of laser light, scanning speed, and Q switch frequency. In order to obtain good print quality,
It is important to select the setting value of the marking condition to be an optimum value suitable for the material of the workpiece.

Conventionally, in this type of laser marking method, an on-site worker appropriately selects a value of a marking condition, and actually marks a target pattern on a workpiece or a sample on a trial basis to obtain a satisfactory printing result. The value of the marking condition (temporary set value) at the time when is obtained is selected as a regular set value.

[0005]

However, in the above-mentioned conventional method for determining the set value of the marking condition, the value of the marking condition (temporary set value) is selected by trial and error while being selected, and satisfactory printing is performed. Test marking must be repeated over and over until quality is obtained,
This has been a very cumbersome and time-consuming task for field users, especially for users with little experience.

The present invention has been made in view of the above-mentioned conventional problems, and has as its object to provide a scanning type laser marking method and apparatus capable of easily selecting an optimum set value for a marking condition. .

[0007]

According to a first aspect of the present invention, there is provided a scanning type laser marking method comprising the steps of: setting a desired pattern composed of characters, symbols or figures; Selecting at least one condition item from a plurality of prescribed condition items as a parameter condition; temporarily setting one or more values for each of the parameter conditions; Tentatively setting one value to the above, combining a tentative setting value for each of the condition items into a plurality of sets of tentative setting values, and a marking position of the pattern according to the plurality of sets of tentative setting values. Irradiating a laser beam while scanning the marking position on the surface of the workpiece in accordance with the provisional set value of each set of conditions. And the method comprising the step of testing marking the pattern Te.

According to a second aspect of the present invention, there is provided the scanning laser marking method according to the first aspect, further comprising the step of selecting the best pattern from the plurality of the test-marked patterns. And setting a set of temporary setting values of the plurality of condition items corresponding to the selected best pattern as regular setting values for formal marking.

According to a third aspect of the present invention, there is provided the scanning type laser marking method according to the first or second aspect, wherein the tentative setting values of the parameter conditions respectively corresponding to the plurality of patterns to be test-marked. At a predetermined position.

According to a fourth aspect of the present invention, there is provided a scanning type laser marking apparatus, comprising: a pattern setting means for setting a desired pattern composed of characters, symbols, figures, or the like; and at least one of a plurality of condition items defining the marking. Parameter condition selecting means for selecting one condition item as a parameter condition, first temporary setting means for temporarily setting one or more values for each of the parameter conditions, and conditions other than the parameter conditions Second provisional setting means for provisionally setting one value for each item; grouping means for combining the provisional setting values for each of the condition items into a plurality of sets of condition provisional setting values; Marking position setting means for respectively setting the marking position of the pattern according to the provisional setting value; It has a configuration comprising a marking means for marking test the pattern with radiation scanning the laser beam to the marking location on the surface of the.

The scanning type laser marking device according to claim 5 is the device according to claim 4, wherein
The first temporary setting means includes an initial value setting means for setting an initial value of a temporary setting value for each of the parameter conditions, and a step value for incrementing or decrementing the temporary setting value of each of the parameter conditions. Step setting means for setting, provisional set value number setting means for setting the number of provisional set values of each of the parameter conditions, and, for each of the parameter conditions, the set initial value, step value and Provisional setting value calculating means for calculating a temporary setting value other than the initial value based on the number of temporary setting values.

According to a sixth aspect of the present invention, in the scanning type laser marking apparatus according to the fourth or fifth aspect, the marking position setting means includes a plurality of sets corresponding to the plurality of sets of provisional setting values. The configuration includes a pattern arrangement setting unit for arranging the patterns in a desired arrangement type.

[0013] The scanning type laser marking apparatus according to claim 7 is the apparatus according to claim 6, wherein
The pattern arrangement setting means has a pattern arrangement direction selecting means for selecting one of the pattern arrangement directions preset for each of the parameter conditions.

The scanning type laser marking device according to claim 8 is the device according to claim 7, wherein
The pattern arrangement setting means arranges the plurality of patterns such that the provisional setting value of the parameter condition corresponding to the plurality of patterns arranged along the pattern arrangement direction gradually increases or decreases. And a pattern arrangement order determining means.

According to a ninth aspect of the present invention, in the scanning type laser marking apparatus according to the seventh or the eighth aspect, the pattern arrangement setting means is arranged so that each of the pattern arrangement directions corresponds to each of the parameter conditions. The configuration has a pattern array number setting means for setting the number of pattern arrays.

According to a tenth aspect of the present invention, in the scanning type laser marking apparatus according to the fourth aspect, the pattern arrangement setting means may be arranged so that the pattern arrangement direction corresponds to each of the parameter conditions. The configuration is provided with a pattern arrangement interval setting means for setting the arrangement interval of the pattern every time.

The scanning type laser marking device according to claim 11 is the device according to any one of claims 6 to 10, wherein the parameter condition selection means can select two desired conditions as parameters. A plurality of patterns corresponding to the plurality of sets of condition provisional setting values in a matrix format in which an X-axis direction and a Y-axis direction corresponding to two parameter conditions are respectively set as first and second pattern arrangement directions. The pattern was arranged.

According to a twelfth aspect of the present invention, in the scanning type laser marking apparatus according to any one of the sixth to eleventh aspects, the parameter condition corresponding to each of the plurality of patterns to be test-marked is provisionally set. The configuration includes a provisional set value marking means for marking a value at a predetermined position.

A scanning laser marking device according to a thirteenth aspect of the present invention is the scanning type laser marking device according to any one of the fourth to twelfth aspects, further comprising a plurality of the patterns corresponding to the plurality of sets of the tentative set values of the condition. Are arranged at positions corresponding to the respective marking positions set by the marking position setting means, and are provided with pattern display means for displaying and outputting.

According to a fourteenth aspect of the present invention, in the scanning type laser marking apparatus according to the thirteenth aspect, the provisional setting of the parameter condition corresponding to each of the plurality of patterns to be displayed and output is determined. A provision is made for provisional setting value display means for displaying and outputting at the position.

According to a fifteenth aspect of the present invention, in the scanning type laser marking device according to the thirteenth or fourteenth aspect, further, data indicating a pattern arrangement position corresponding to each of the plurality of patterns to be displayed and output is provided. It has a configuration having pattern arrangement position display means for displaying and outputting.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 shows the appearance of a scanning YAG laser marking apparatus according to an embodiment of the present invention. This YAG laser marking device has a control power unit 10
, Laser oscillation unit 12 and scanning head 20
And

In the control power supply unit 10, a display 13 of a display unit is provided in an upper room, a keyboard and a control board are provided in an intermediate room (behind the front door 14), and a lower room (behind the front door 16). , A laser power supply circuit, a laser cooling device, and the like are arranged. The scanning control signal generated by the control unit in the intermediate room is transmitted to the scanning head 20 via a predetermined signal line (not shown). The scanning head 20 is attached to the laser emission port of the laser oscillation unit 12, and the work table 18 is provided directly below the head 20.
Is arranged. On the worktable 18, the workpiece W
Is marked.

FIG. 2 shows a configuration of a main part in the control power supply unit 10 and the laser oscillation unit 12.

The laser oscillation unit 12 has a YAG laser beam LM for oscillating and outputting a YAG laser beam LM for marking.
A laser oscillator 22 is provided, and a He-Ne laser 24 for generating visibility, for example, red guide light LG is also provided.

The YAG laser light LM oscillated and output from the YAG laser oscillator 22 first has its optical path bent at a right angle by a mirror 26, and then has its optical path bent at a right angle by a mirror 28, and then travels straight to the scanning head 20. Sent. H
The guide light LG generated by the e-Ne laser 24 is first bent at a right angle by a mirror 30 at a mirror 30 and then at a mirror 32
After the optical path is bent at a right angle, the light passes through the mirror 28 from the back side, travels straight, and is sent to the scanning head 20.

In the control power supply unit 10, a YAG laser power supply section 34, a He-Ne laser power supply section 36, a control section 3
8, an input unit 40, a display unit 42, a printing unit 44, an interface circuit 46, and the like.

The YAG laser power supply 34 supplies a lamp current I to a laser excitation means, for example, an excitation lamp in the YAG laser oscillator 22 under the control of the controller 38. He-
The Ne laser power supply unit 36 controls the He laser under the control of the control unit 38.
-Supply power to the laser excitation means (for example, a laser tube) in the Ne laser 24.

The input unit 40 includes input devices such as a keyboard, a mouse, and an image scanner. Display section 42
Displays a screen on the display 13 in accordance with the image or character data from the control unit 38 and the display control.
The printing unit 44 prints out an image corresponding to a screen that can be displayed on the display unit 42. The interface circuit 46 is used to exchange data, control signals, and the like with an external device (not shown).

The control unit 38 is composed of a microcomputer, performs required data processing according to predetermined software stored in a built-in memory, and controls each unit in the apparatus. The control unit 38 supplies a scanning control signal for controlling a scanning operation in the scanning head 20 to be described later to a scanning drive circuit in the head 20 via a signal line 48. The YAG laser oscillator 22 has a built-in Q switch (not shown) for obtaining a repetitive pulse laser beam having a large peak power.
This Q switch is controlled via 0.

FIG. 3 shows a configuration example of the scanning mechanism in the scanning head 20. This scanning mechanism includes an X-axis scan mirror 52 and a Y-axis scan mirror 54 attached to rotating axes 52a and 54a orthogonal to each other, and an X-axis galvanometer 56 for rotating and oscillating (swinging) both mirrors 52 and 54, respectively. And a Y-axis galvanometer 58.

The laser light LM and the guide light LG from the laser oscillation unit 12 that have entered the scanning head 20 first enter the X-axis scan mirror 52, where they are totally reflected and then Y-axis scanned. The light enters the mirror 54, is totally reflected by the mirror 54, and
Then, the laser beam is focused and irradiated on the marking processing surface of the workpiece W through 0. The position of the beam spot SP on the marking surface is X
The direction is determined by the deflection angle of the X-axis scan mirror 52, and the Y direction is determined by the Y-axis scan mirror 5.
4 is determined by the deflection angle.

The X-axis scan mirror 52 oscillates (oscillates) in the directions of arrows A and A 'when the X-axis galvanometer 56 is driven. On the other hand, the Y-axis scan mirror 54 oscillates (oscillates) in the directions of arrows B and B ′ by driving the Y-axis galvanometer 58.

The X-axis galvanometer 56 includes a movable iron piece (rotor) connected to the X-axis scan mirror 52, a control spring connected to the movable iron piece, and a drive coil attached to the stator. Have been. A driving current corresponding to an X-direction scanning control signal is supplied from an X-axis galvanometer driving circuit (not shown) to the driving coil in the X-axis galvanometer 56 via an electric cable 62, so that the movable iron piece (rotor) ) Swings at an angle specified by the X-direction scanning control signal integrally with the X-axis scan mirror 52 against the control spring.

The Y-axis galvanometer 58 has a similar configuration. A driving current corresponding to a Y-direction scanning control signal is supplied from a Y-axis galvanometer driving circuit (not shown) through the electric cable 64 to the Y-axis galvanometer 58. , The movable iron piece (rotor) in the Y-axis galvanometer 58 swings at an angle designated by the Y-direction scanning control signal together with the Y-axis scan mirror 54.

Therefore, each time the laser light LM and the guide light LG from the laser oscillation unit 12 enter the scanning head 20 at a predetermined timing, the two galvanometers 56 and 58 are synchronized with the scanning in the X and Y directions. By oscillating the X-axis scan mirror 52 and the Y-axis scan mirror 54 at predetermined angles in accordance with the scanning control signal, the beam spot SP of the laser light LM and the guide light LG on the marking surface of the workpiece W. Scanned.

FIG. 4 shows an example of a trial matrix screen displayed on the display 13 of the control power supply unit 10 in this embodiment.

On this trial matrix screen, the user can set trial (test) marking according to the present embodiment.

The trial matrix screen is a pattern display screen 70 extending from the left end to the center of the screen.
And a condition setting screen 72 displayed on the right side of the pattern display screen.

In the condition setting screen 72, a plurality of rectangular display frames "□" arranged in a line in the vertical direction indicate arbitrary data (set value or provisional set value) for each item displayed on the left. Is a field for inputting and displaying.

Of the items for which data can be input, the “start number” at the top is an ID number for collectively managing all data relating to one pattern. When a desired number, for example, “5” is entered in the “activation number” field, the file name of the pattern registered with the activation number “5” (“123.MKE” in this example) is displayed in the “file Name"
At the same time as being displayed in the display column, the corresponding pattern (in this example, the character string “ABCD”) is displayed on the pattern display screen 70.

In order to input numerical data, it is only necessary to point to a relevant portion with a cursor and input the relevant numerical data from a keyboard.

In the item "parameter" provided under the "activation number", desired parameter conditions can be designated in the X-axis direction and the Y-axis direction.

As shown in FIG. 5, when the cursor is moved to the mark “▼” displayed on the right of the “X-axis” column and the mouse is clicked, the marking conditions that can be selected as the parameter conditions are changed to those in this column. Is listed near (below).

In this embodiment, arbitrary values can be provisionally set for the three conditions of speed (scanning speed), frequency (Q-switch frequency) and current (lamp current). It is possible to select conditions.

When, for example, “current” is clicked in the list of FIG. 5, “current” is set as “X-axis parameter condition”.
Is selected, and “current” is displayed in the “X-axis” column. Regarding the “Y-axis parameter condition”, for example, “speed” can be selected from the above three marking conditions by the same operation.

In connection with the X-axis parameter conditions, setting items of “number of columns”, “interval” and “offset” are provided.

The "number of columns" directly indicates the number of pattern arrangements in the X-axis direction, and indirectly indicates the number of provisionally set values of the X-axis parameter condition ("current"). In the example shown,
“6” (column) is input in “number of columns”. "interval"
Represents the pattern arrangement interval in the X-axis direction in trial marking (test) marking. In the example shown,
“9.00” (mm) is input in “interval”.
“Offset” is the starting position of the pattern arrangement in the X-axis direction in trial marking (distance from the coordinate center point)
Represents In the illustrated example, “−25.0” is set as the “offset”.
0 "(mm) is input.

In the Y-axis parameter condition, setting items of “number of lines”, “interval” and “offset” are provided.

The "number of rows" directly indicates the number of pattern arrangements in the Y-axis direction, and indirectly indicates the number of provisionally set values according to the Y-axis parameter condition ("speed"). In the illustrated example, “8” (row) is input. The “interval” in the “Y-axis” direction represents the pattern arrangement interval in the Y-axis direction in the test marking. In the illustrated example, “4.00”
(Mm) has been entered. The “offset” in the “Y-axis” direction indicates the starting position of the pattern arrangement in the Y-axis direction in the test marking. In the illustrated example, “−25.0
0 "(mm) is input.

Under the “parameter” item, “initial values” are respectively set for three conditions of the marking conditions in this embodiment, “speed (scanning speed)”, “Q switch frequency”, and “current (lamp current)”. And “step” setting items. "Initial value" represents the initial value of the provisional setting value of each marking condition for trial marking of this embodiment, and "Step" is the step value when incrementing or decrementing the provisional setting value of each marking condition as a parameter. Represents

In the illustrated example, “speed” is “100” (mm / s) for “initial value” and “5” for “step”.
0 ”(mm / s) is input, and“ 2.0 ”(kHz) is set as“ initial value ”for“ Q switch frequency ”.
“1.0” (kHz) is inputted to “step”, and “12.0” is inputted to “initial value” for “current”.
(A), “1.0” (A) is input to “Step”.

In the case of the example shown in FIG.
Data significantly function in “current” selected in “X-axis parameter condition” and “speed” selected in “Y-axis parameter condition”. "Q
Since the “switch frequency” is not selected as a parameter condition, the “step” has no meaning, and the provisional setting value is fixed at “initial value”.

FIG. 6 shows a procedure of data input processing executed by the control unit 38 on the trial matrix screen.

When data is input from the input section 40 for any of the data display fields "□" (step A1), a data input process A2 (i) and a display process A3 (i) corresponding to the relevant setting item are executed.

For example, when “current” is designated (selected) for “X-axis parameter condition”, “X-axis parameter condition” is set as a set value of “X-axis parameter condition” at a predetermined address of a data memory built in control unit 38. "Current" is registered (step A2 (1)). Then, the character "current" is displayed in a corresponding column in the condition setting screen 72, that is, a data display column to the right of the "X-axis parameter" item, and the pattern display screen 70 is displayed.
Is displayed in the X-axis parameter display field at the lower edge of the step (step A3 (1)).

When numerical data such as "6" is input for "number of columns" in the X-axis direction, "6" (column) is set as a "number of columns" set value at a predetermined address in the data memory.
Is registered (step A2 (2)). The input data value “6” is displayed in a corresponding column in the condition setting screen 72, and the setting pattern “ABC” is displayed on the pattern display screen 70.
D "is multiplexed and displayed in six columns in the X-axis direction and displayed (step A3 (2)).

When data is input for only some of the items and no data has been input for the remaining items, appropriate default values are given to the remaining items, so that the pattern display screen 70 is displayed. Set pattern "AB
CD "can be multiplex-deployed and displayed at an intermediate stage.

When numerical data such as "9.00" is input for "interval" in the X-axis direction, "9.0" is stored in a predetermined address of the data memory corresponding to this setting item.
"0" (mm) is registered (step A2 (3)). And
The input data value "9.0 is displayed in the corresponding column in the condition setting screen 72.
"0" is displayed, and the arrangement interval of the set pattern "ABCD" in the X-axis direction is set as the screen display interval corresponding to the input value (9.00 mm) on the pattern display screen 70 (step A3 (3)).

When the set values of the “number of columns” and “interval” are completed as described above, the position (marking position and screen display position) of the pattern “ABCD” of each column in the X-axis direction is calculated. Each obtained position is registered in the data memory. This processing may be executed as a part of the data input processing (A2 (2), A2 (3)) of “number of columns” or “interval”.

When, for example, “12.0” is input for the marking condition, for example, “initial value” of “current”, “12.0” (A) is set to a predetermined address of the data memory corresponding to this setting item. Register (Step A2 (n-
1)). As the display processing, the input value “12.0” is entered in the corresponding field.
Is displayed (step A3 (n-1)).

When, for example, "1.0" is input for "step" of "current", "1.0" (A) is registered at a predetermined address of the data memory corresponding to this item ( Step A2 (n)). As a display process, the input value "1.0" is displayed in the corresponding column (step A3).
(n)).

As in this example, “current” is selected as a parameter condition, and “column number” (or “row number”),
When the “initial value” and “step” setting values are complete,
Data input processing at that time (A2 (2), A2 (n-1) or A2 (n-1)
2 (n)), the provisional set value calculation process may be executed according to the procedure (B1 to B5) shown in FIG.

More specifically, first, the number of columns (rows) NA, the initial value P1, and the step ΔP are set (step B1), and the initial value P1 is set as the augend PN, and the step ΔP is added thereto. Then, the second provisional set value P2 (PN + 1) under this parameter condition is obtained (step B2). Next, the second provisional set value P2 is set as the augend PN, and
To obtain the third provisional set value P3 (PN + 1) under this parameter condition (step B2). Less than,
Similarly, the fourth and fifth temporary setting values P4, P5}
Is obtained. When all the temporary setting values corresponding to the number of columns (rows) NA have been obtained, the temporary setting value calculation processing ends (steps B3 and B4).

The tentative set value of “current” obtained by this arithmetic processing is stored (registered) at a predetermined storage address in the data memory. With respect to other parameter conditions ("speed" in the illustrated example), temporary setting values other than the initial values are obtained by the same temporary setting value calculation processing.

As described above, the user can set necessary conditions or provisional settings for performing a desired trial marking on the trial matrix screen.

FIG. 4 shows a trial matrix screen (one example) at the stage when one set of input has been completed. The set value / temporary set value and the data of the set pattern displayed on the screen are collectively managed by a start number or a file name, and can be saved even if the screen is erased. Unless the registration is deleted, the activation number can be called up on the screen at any time, and furthermore, the trial marking can be executed with the setting contents displayed on the trial matrix screen by operating a predetermined key.

FIG. 8 shows the procedure of the trial marking execution process of the control unit 38 in this embodiment. In the trial marking according to the present embodiment, when a plurality of setting patterns are printed by flat development in a matrix format as illustrated in FIG. 4, a sample having a flat surface extending in four directions is used for the workpiece W. It is desirable.

When starting the trial marking execution mode, first, the activation number designated this time is identified (step C1). For example, assume that the activation number “5” set on the trial matrix screen of FIG. 4 is identified.

Next, the marking data corresponding to the activation number "5" is initialized (step C2). That is, the data memory is searched for the marking data registered with the activation number “5”. The marking data searched for here includes character / graphic data (drawing data) of the setting pattern “ABCD” and data of setting values or provisional setting values of various conditions or items input from the condition setting screen 72. It is. Among them, an initial value is first selected for the temporary setting value of the parameter condition. First, an initial value is also selected for the marking position.

Therefore, as the first set of condition data for trial marking of the first column and the first row, the parameter conditions “current” and “speed” are initially set from a plurality of temporary setting values. A value is set, and only a temporary setting value (initial value) is selected for the “Q switch frequency” of the marking condition, which is a non-parameter condition, and a constant setting value is set for other necessary conditions.

The control unit 38 controls the first
Each unit is operated according to the set of condition data (set value / temporary set value) to execute trial marking for the first column and first row in the trial matrix (step C3).

In this case, the control section 38 operates the YAG laser oscillator 22 and the He-Ne laser 24 through the YAG laser power supply section 34 and the He-Ne laser power supply section 36, respectively, and the YAG laser light LM and the guide light L
Turn on G respectively. The YAG laser power supply unit 34 supplies a lamp current I equal to the initial value of the X-axis parameter condition “current” to the excitation lamp in the YAG laser oscillator 22. Further, the Q switch in the YAG laser oscillator 22 is operated at a frequency equal to the initial value of the marking condition “Q switch frequency”.

Then, the control section 38 sends a scanning control signal corresponding to the drawing data and the condition data to the scanning head 20, and the work (sample) W
The beam spot SP of the YAG laser light LM and the guide light LG is scanned on the surface of. Here, the scanning speed is a value equal to the initial value of the Y-axis parameter condition “speed”. The scanning (marking) position is the position of the first column and first row in the trial matrix region set on the surface of the workpiece W.

By this scanning operation, the workpiece W
A minute portion of the surface of the workpiece hit by the beam spot of the YAG laser beam LM evaporates or discolors instantaneously with the laser energy, and the set pattern "ABCD" is printed.

However, since it is a trial marking print result, the print quality is not guaranteed. The set pattern "ABCD" may be printed clearly, or it may be too dark to bleed or vice versa. Sometimes it is too visual to be recognized.

When the trial marking of the first column and the first row is completed as described above, the second set of condition data for the trial marking of the first column and the second row is set. For this purpose, the temporary setting value of the Y-axis parameter condition "speed" is updated by one step (step C5), and the marking position is changed by one line (from the first line to the second line) in the Y-axis direction. (Step C6).
For other conditions, the same value as the previous time is used without changing the set value data.

The control unit 38 performs the updating process (C5, C6).
The respective parts are operated in accordance with the second set of condition data obtained in the step (3) to execute the trial marking for the first column and the second row (step C3).

At this time, the control section 38 supplies the lamp current I corresponding to the initial value of the X-axis parameter condition “current” to the excitation lamp in the YAG laser oscillator 22 from the YAG laser power supply section 34 as before. Supply. Also, YAG
The Q switch in the laser oscillator 22 is operated at the Q switch frequency equal to the initial value (a fixed temporary setting value) of the marking condition “Q switch frequency”. However, in the scanning head 20, the scanning speed corresponding to the provisional set value of the Y-axis parameter condition "speed" updated in the update processing (C5) and the marking position updated in the update processing (C6) are used. At
The YAG laser light LM and the guide light LG are swung.

Thus, the predetermined position on the surface of the workpiece W, that is, the first column and the second column in the trial matrix
A set pattern “ABCD” corresponding to the second set of condition data is printed at the position of the line.

As described above, the same pattern "AB
For the "CD", the temporary setting value of the Y-axis parameter condition "speed" is updated once (one line), and the setting value of other conditions is set to a constant value. Just do. As a result, on the surface of the workpiece W,
The printing result of the first column in the trial matrix is obtained.

When the trial marking for the last row (eighth row) of the first column is completed (step C4), the provisional set value of the Y-axis parameter condition "speed" is returned to the initial value (step C7), and the Y-axis is set. The marking position in the direction is returned to the initial value (first line) (step C8).

Next, an updating process in the X-axis direction is performed. That is, the provisional set value of the X-axis parameter condition “current” is updated by one step (Step C10), and the marking position in the X-axis direction is updated by one column (from the first column to the second column) (Step C11). ). For other conditions, the same value as the previous time is used without changing the set value data.

The control unit 38 performs the above-described initialization processing (C7, C8) in the Y-axis direction and update processing (C10, C1) in the X-axis direction.
Each unit is operated according to the condition data obtained in 1), and trial marking for the second column and first row is executed (step C3).

At this time, the control unit 38 supplies the same current value (provisional setting value) as that at the time of the trial marking of the first column and the first row to the excitation lamp in the YAG laser oscillator 22 from the YAG laser power supply unit 34. (Initial value). The Q switch in the YAG laser oscillator 22 has a Q switch frequency equal to the initial value (a fixed temporary set value) of the marking condition “Q switch frequency”.
Perform switching control.

In the scanning head 20, the scanning speed is equal to the temporary setting value (initial value) of the Y-axis parameter condition "speed" initialized in the initialization process (C7), and the initialization process is performed. Initialization is performed in the Y-axis direction by (C8) and the update processing (C11) is performed.
At the marking position updated in the X-axis direction by YA
The G laser light LM and the guide light LG are swung.

Thus, the predetermined position on the surface of the workpiece W, that is, the second
The setting pattern “ABCD” corresponding to the ninth set of condition data is printed at the line position.

In the second row, the same pattern "ABC" is used in the same procedure (steps C3 to C6) as in the first row.
For D, the trial marking is performed only the number of times (eight times) of “number of lines” in which only the provisional set value of the Y-axis parameter condition “speed” is different and the set values of other conditions are constant. As a result, a printing result for the second column in the trial matrix is obtained.

The same procedure (steps C3 to C11) is applied to the third and subsequent columns in the same pattern "A".
The provisional set value of the Y-axis parameter condition "speed" is updated for each row of the "BCD", and the provisional set value of the X-axis parameter condition "current" is updated for each column and the set values of other conditions are kept constant. Trial marking is performed for each column and each row.

As a result, on the surface of the workpiece (sample) W, a set pattern “A” of 6 columns and 8 rows similar to that displayed on the pattern display screen 70 of the trial matrix screen is set by the trial marking.
A plurality (48) of printing results of "BCD" are obtained.

However, as described above, since the trial marking has variously changed the marking conditions, the energy of the laser beam spot may be too small in a part of the trial matrix, and the print pattern may not appear substantially.

FIG. 9 schematically shows a part of the printing result of the trial marking. In the X-axis direction, the provisional set value of the “current” (lamp current), which is the X-axis parameter condition, increases stepwise for each row, so that the pattern “ABCD” is printed in a darker color. On the other hand, in the Y-axis direction, the provisional set value of “speed” (scanning speed), which is the Y-axis parameter condition, increases stepwise for each row.
The printing of the pattern "ABCD" gradually becomes thinner.

The user can obtain a large number of test results for the same pattern according to various temporary setting values of the marking conditions at a time by one-time provisional setting and one-time trial marking. There is no need to search through trial and error and select temporary setting values for conditions as in the conventional case. Then, by comparing and observing all the test results of the trial markings which are arranged in a matrix orderly on the surface of the workpiece (sample) W, the best test result can be determined at a glance.

Therefore, even an inexperienced user can easily select an optimum set value for the marking condition.

If one test mark does not satisfy any of the test results, another set value or provisional set value is entered for one or more set items on the trial matrix screen (FIG. 4). Trial marking can be performed again.

When the user finds a satisfactory test result, the user determines the arrangement position of the corresponding pattern "ABCD" in the trial matrix, and easily finds the condition data that has resulted in the test result of the corresponding pattern "ABCD" from the position. be able to.

For example, in this example, it is assumed that the pattern in the third column and fourth row of the trial matrix is selected as a satisfactory test result. The provisional set values of the marking conditions “current”, “speed”, and “Q switch frequency” corresponding to this pattern are obtained as follows.

The provisional set value of “current” is 12.0 (initial value) +1.0 (step value) × 2 (the number of steps in the third column) × = 14.0 (A). The “speed” provisional setting value is 100 (initial value) +50 (step value) × 3 (fourth
The number of steps per row) × = 250 (mm / s).
The temporary setting value of the “Q switch frequency” is 2.0 kHz (initial value).

The user may set the provisional set values of the marking conditions “current”, “speed”, and “Q switch frequency” determined as described above as the regular set values for the official marking.

FIG. 10 shows a main setting screen for setting formal marking.

The user can set the marking conditions “speed”, which are provided as setting items on this main setting screen,
A numerical value equal to the tentative setting value determined by the trial marking may be input to each of the data display columns of “Q switch frequency” and “current”.

In response to the data input operation, the control unit 38 in the apparatus sets the input data of the marking conditions “speed”, “Q switch frequency”, and “current” for the pattern “ABCD” of this example as formal setting values. register.

Therefore, when formal marking is instructed for the pattern "ABCD" of this example by a predetermined user operation, the control section 38 operates each section in accordance with the set value of each marking condition to execute the marking operation. I do. Thus, one pattern “ABCD” is marked on the surface of the workpiece W with the desired print quality. In addition, the workpiece W formal marking may be an actual product.

FIGS. 11 to 13 show modified examples of a function for determining temporary setting values of parameter conditions or marking conditions corresponding to patterns at respective positions on the trial matrix screen.

In the example shown in FIG. 11, provisional set values of the X-axis parameter and the Y-axis parameter corresponding to each column and each row of the trial matrix are marked or displayed. The conditions for marking these temporary setting values may be set to arbitrary values. For example, default values can be used in advance on the device side.

According to the parameter value display function, the user does not need to calculate the temporary setting value of the parameter condition in each pattern by calculation. Furthermore, the provisional set value is also marked on the workpiece (sample) W, so that the user can see the marking state on the workpiece W and immediately find the most appropriate provisional set value.

In the example shown in FIG. 12, when the user selects and instructs an arbitrary pattern in the trial matrix on the pattern display screen 70, a sub-screen 74 is displayed at an appropriate place in the screen. The provisional set values of the marking conditions corresponding to the patterns are displayed in a list. In this function, it is possible to change (register) the temporary setting value displayed on the sub-screen 74 to a formal setting value according to a predetermined operation, for example, a click operation. In this case, when the activation number is input on the main setting screen (FIG. 10), the device automatically displays the data value changed from the temporary setting value to the formal setting value in the data display column of each marking condition. can do.

A function of displaying a column number and a row number on the side of each column and each row of the trial matrix as in the example of FIG. 12 is also convenient for the user.

The function of FIG. 13 is to list the provisionally set values of the marking conditions corresponding to each pattern in the trial matrix in units of sets. Such a list of all provisional set values for each group may be selectively displayed on the pattern display screen 70 in a switchable manner with the trial matrix display (FIG. 4).

It is to be noted that any screen content that can be displayed on the display 13 of the display unit 42 can be printed out by the printing unit 44. Further, the data can be sent to an external device by data transmission via the interface circuit 46.

In the above example, of the three marking conditions “current”, “speed”, and “Q switch frequency”, “current” is selected as the X-axis parameter condition, and “speed” is selected as the Y-axis parameter condition. Was. This parameter selection is an example, and arbitrary parameters can be selected within the range of these three conditions. For example, as shown in FIG. 14, “current” can be selected as the X-axis parameter condition, and “Q switch frequency” can be selected as the Y-axis parameter condition.

In the above example, the marking conditions that can be selected as the parameter conditions are “current”, “speed”, and “Q switch frequency”. However, it is not limited to these conditions. For example, a lamp voltage, a lamp power, a laser output, a Q switch modulation degree, and the like are possible. When a semiconductor laser is used as the laser excitation light generating means, the power or current supplied to the semiconductor laser can be selected as a parameter condition.

Further, the arrangement order of each pattern position in the trial matrix can be arbitrarily selected. Similarly, the printing order of each pattern in the trial marking can be arbitrarily selected.

In the trial matrix screen of the above embodiment, by setting the number of columns of the X-axis parameter or the number of rows of the Y-axis parameter to “1”, the X-axis direction or the Y-axis parameter is set.
A pattern arrangement of only one column (one row) in the axial direction is also possible.

However, the trial marking of the present invention does not limit the direction of the pattern arrangement, but can set an arbitrary arrangement direction. For example, it is also possible to arrange trial marking patterns in an oblique direction or a rotation (θ) direction.

In the above embodiment, the trial matrix screen (FIGS. 4 and 14) or the main setting screen (FIG. 1)
The screen content of 0) is an example, and any screen content or any data input setting method can be adopted.

[0118]

As described above, according to the scanning laser marking method or apparatus of the present invention, the work piece can be processed in one test marking operation while appropriately changing the temporary setting value of the marking condition for the same setting pattern. Since a large number of prints are made at different positions on the surface of the mark, it is possible to easily select an optimum set value for the marking condition.

[Brief description of the drawings]

FIG. 1 shows a scanning YAG according to an embodiment of the present invention.
It is a perspective view showing the appearance of a laser marking device.

FIG. 2 is a block diagram showing a configuration of a main part in a control power supply unit and a laser oscillation unit in the apparatus of the embodiment.

FIG. 3 is a perspective view showing a configuration example of a scanning mechanism in a scanning head in the apparatus of the embodiment.

FIG. 4 is a front view showing a display content example of a trial matrix screen in the apparatus of the embodiment.

FIG. 5 is a partially enlarged front view showing a part of display contents of a trial matrix screen in the embodiment.

FIG. 6 is a flowchart illustrating a procedure of a data input process on a trial matrix screen according to the embodiment.

FIG. 7 is a flowchart illustrating a procedure of a temporary setting value calculation process for obtaining a temporary setting value of a parameter condition in the embodiment.

FIG. 8 is a flowchart illustrating a procedure of a trial marking execution process in the embodiment.

FIG. 9 is a diagram schematically illustrating a part of a printing result of trial marking in the example.

FIG. 10 is a front view showing an example of screen contents of a main setting screen in the embodiment.

FIG. 11 is a diagram showing a modification of the display function of the trial matrix screen in the embodiment.

FIG. 12 is a diagram showing another modification of the display function of the trial matrix screen in the embodiment.

FIG. 13 is a diagram showing another modified example of the display function of the trial matrix screen in the embodiment.

FIG. 14 is a diagram showing another example of parameter selection on the trial matrix screen of the embodiment.

[Explanation of symbols]

 Reference Signs List 10 control power supply unit 13 display 20 scanning head 22 YAG laser oscillator 34 YAG laser power supply unit 38 control unit 40 input unit 42 display unit 44 printing unit 70 pattern display screen 72 condition setting screen 74 sub screen W workpiece

Claims (15)

[Claims] 1. A step of setting a desired pattern including a character, a symbol, a graphic, or the like; a step of selecting at least one condition item among a plurality of condition items defining a marking characteristic as a parameter condition; Tentatively setting one or more values for the parameter condition; tentatively setting one value for each condition item other than the parameter condition; A step of setting a temporary provisional set value and a step of setting a marking position of the pattern in accordance with the plurality of sets of the temporary provisional set values; Irradiating a position with laser light while scanning to test-mark the pattern. 2. A step of selecting a best pattern from the plurality of test-marked patterns, and formalizing a set of provisional set values of the plurality of condition items corresponding to the selected best pattern. Setting the laser beam as a regular setting value for marking. 3. The method according to claim 1, further comprising the step of marking a temporary set value of the parameter condition corresponding to each of the plurality of patterns to be test-marked at a predetermined position.
Or the scanning laser marking method according to 2. 4. A pattern setting means for setting a desired pattern composed of characters, symbols, figures, or the like, and at least one condition item among a plurality of condition items defining the marking as a parameter condition. Parameter condition selecting means, first temporary setting means for temporarily setting one or a plurality of values for each of the parameter conditions, and temporarily setting one value for each condition item other than the parameter conditions Second provisional setting means, combination means for combining provisional setting values for each condition item into a plurality of sets of provisional setting values, and marking positions of the pattern according to the plurality of sets of provisional setting values Marking position setting means for respectively setting the laser beam, and scanning the laser beam at the marking position on the surface of the workpiece in accordance with the provisional set value of each set of conditions. And a marking means for performing test marking of the pattern by irradiating the pattern while scanning. 5. The first tentative setting means includes: initial value setting means for setting an initial value of a tentative setting value for each of the parameter conditions; and incrementing or decrementing the tentative setting value of each of the parameter conditions. Step setting means for setting a step value to be incremented; temporary setting value number setting means for setting the number of temporary setting values of each of the parameter conditions; and the initial value set for each of the parameter conditions. 5. The scanning type laser marking apparatus according to claim 4, further comprising: temporary setting value calculation means for calculating a temporary setting value other than the initial value based on the number of values, step values, and temporary setting values. 6. The marking position setting means includes pattern arrangement setting means for arranging a plurality of patterns in a desired arrangement type according to the plurality of sets of condition provisional setting values. A laser marking device according to item 1. 7. The scanning type laser marking according to claim 6, wherein the pattern arrangement setting means has a pattern arrangement direction selecting means for selecting one of pattern arrangement directions preset for each of the parameter conditions. apparatus. 8. The pattern arrangement setting means, wherein the plurality of the plurality of patterns are arranged such that a provisional set value of the parameter condition corresponding to the plurality of patterns arranged along the pattern arrangement direction gradually increases or decreases. The scanning type laser marking apparatus according to claim 7, further comprising a pattern arrangement order determining means for arranging the patterns. 9. The pattern arrangement number setting means according to claim 7, wherein said pattern arrangement setting means has pattern arrangement number setting means for setting the number of arrangements of said pattern for each of said pattern arrangement directions corresponding to each of said parameter conditions. Scanning laser marking device. 10. The pattern arrangement interval setting means for setting an arrangement interval of the pattern for each pattern arrangement direction corresponding to each of the parameter conditions. A scanning laser marking device according to any one of the above. 11. The parameter condition selecting means makes it possible to select two desired conditions as parameters, and the pattern arrangement setting means makes X parameters corresponding to the two parameter conditions.
11. The plurality of patterns according to the plurality of sets of provisional set values are arranged in a matrix format in which an axis direction and a Y-axis direction are first and second pattern arrangement directions, respectively. A scanning laser marking device according to item 1. 12. The scanning according to claim 6, further comprising a temporary setting value marking means for marking a temporary setting value of the parameter condition corresponding to each of the plurality of patterns to be test-marked at a predetermined position. Type laser marking device. 13. A pattern display means for arranging and displaying a plurality of patterns corresponding to said plurality of sets of condition provisional set values at positions corresponding to respective marking positions set by said marking position setting means. The scanning laser marking device according to claim 4, further comprising: 14. The scanning type laser marking apparatus according to claim 13, further comprising a temporary setting value display means for displaying and outputting, at a predetermined position, a temporary setting value of the parameter condition corresponding to each of the plurality of patterns output and displayed. . 15. The scanning type laser marking apparatus according to claim 13, further comprising a pattern arrangement position display means for displaying and outputting data indicating a pattern arrangement position corresponding to each of the plurality of patterns displayed and output.