JP2000131556A - Connection structure and connection method between optical waveguide and optical fiber - Google Patents
Connection structure and connection method between optical waveguide and optical fiberInfo
- Publication number
- JP2000131556A JP2000131556A JP10307459A JP30745998A JP2000131556A JP 2000131556 A JP2000131556 A JP 2000131556A JP 10307459 A JP10307459 A JP 10307459A JP 30745998 A JP30745998 A JP 30745998A JP 2000131556 A JP2000131556 A JP 2000131556A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- adhesive
- optical
- face
- optical waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 220
- 230000003287 optical effect Effects 0.000 title claims abstract description 174
- 238000000034 method Methods 0.000 title claims description 23
- 239000000853 adhesive Substances 0.000 claims abstract description 212
- 230000001070 adhesive effect Effects 0.000 claims abstract description 212
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 21
- 238000001723 curing Methods 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000003822 epoxy resin Substances 0.000 description 6
- 229920000647 polyepoxide Polymers 0.000 description 6
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 238000000016 photochemical curing Methods 0.000 description 2
- 239000013464 silicone adhesive Substances 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Optical Couplings Of Light Guides (AREA)
Abstract
(57)【要約】
【課題】 光導波路と光ファイバの端面を接合する端面
接続用接着剤では接続信頼性が低かった。
【解決手段】 基板1上に形成された光導波路の端面
と、基板1上に形成された光ファイバ固定溝4に光導波
路と光軸を揃えて載置された光ファイバ5の端面とを光
硬化性接着剤7により接合するとともに、光ファイバ5
を光ファイバ固定溝4に熱硬化性接着剤8により固定し
た光導波路と光ファイバ5との接続構造である。光導波
路と光ファイバ5の端面同士を光硬化性接着剤7で精度
良く接合するとともに光ファイバ5を熱硬化性接着剤8
によって強固に基板に固定して接続強度を向上させるこ
とができ、光軸ずれが生じない良好な光接続を行なうこ
とができる。
(57) [Problem] To provide an end face connection adhesive for bonding an end face of an optical waveguide and an end face of an optical fiber, connection reliability was low. SOLUTION: An end face of an optical waveguide formed on a substrate 1 and an end face of an optical fiber 5 mounted on the optical fiber fixing groove 4 formed on the substrate 1 with the optical axis aligned with the optical axis. The optical fiber 5 is bonded together with the curable adhesive 7.
This is a connection structure between the optical fiber and the optical waveguide in which is fixed to the optical fiber fixing groove 4 by a thermosetting adhesive 8. The end faces of the optical waveguide and the optical fiber 5 are precisely joined together with a photocurable adhesive 7 and the optical fiber 5 is bonded to a thermosetting adhesive 8.
Accordingly, the connection strength can be improved by firmly fixing to the substrate, and good optical connection without causing optical axis shift can be performed.
Description
【0001】[0001]
【発明の属する技術分野】本発明は光集積回路基板等の
基板上において光導波路と光ファイバとを接着剤を用い
て接続する光導波路と光ファイバとの接続構造および接
続方法に関し、特に、光ファイバと光導波路との光軸調
整の精度を改善し、かつ光ファイバの接続強度を高めた
光導波路と光ファイバとの接続構造および接続方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connection structure and a connection method between an optical waveguide and an optical fiber for connecting the optical waveguide and the optical fiber on a substrate such as an optical integrated circuit substrate by using an adhesive, and more particularly, to an optical fiber. The present invention relates to a connection structure and a connection method between an optical waveguide and an optical fiber in which the accuracy of optical axis adjustment between the fiber and the optical waveguide is improved and the connection strength of the optical fiber is increased.
【0002】[0002]
【従来の技術】光集積回路基板や光電子混在基板等の光
信号を扱う基板上においては、その基板上に形成された
三次元導波路形状の光導波路と、外部との光信号の授受
を行なうための光ファイバとを接続する光接続構造が必
要である。2. Description of the Related Art On a substrate for handling optical signals, such as an optical integrated circuit substrate or an opto-electronic mixed substrate, an optical signal is exchanged between a three-dimensional optical waveguide formed on the substrate and the outside. Optical connection structure for connecting to an optical fiber is required.
【0003】そのような光導波路と光ファイバとの接続
構造の従来の例を図3(a)および(b)にそれぞれ斜
視図および断面図で示す。図3において1は基板、2お
よび3は基板1上に形成された三次元導波路形状の光導
波路のそれぞれコア部およびクラッド部、4は基板1上
に形成された光ファイバ固定溝、5は光ファイバ固定溝
4に光導波路のコア部2と光軸を揃えて固定された光フ
ァイバである。FIGS. 3 (a) and 3 (b) show a conventional example of such a connection structure between an optical waveguide and an optical fiber in a perspective view and a sectional view, respectively. In FIG. 3, 1 is a substrate, 2 and 3 are a core part and a clad part of a three-dimensional waveguide optical waveguide formed on the substrate 1, 4 is an optical fiber fixing groove formed on the substrate 1, and 5 is The optical fiber is fixed in the optical fiber fixing groove 4 with the optical axis aligned with the core 2 of the optical waveguide.
【0004】このような光導波路と光ファイバとの接続
構造においては、図3(b)に示すように、まず基板1
上に光導波路と対向して形成された光ファイバ固定溝4
に、光ファイバ5をその端面と光導波路の端面とを対向
させて挿入する。次に、挿入後に両者の光軸調整を行な
って、光ファイバ5の光軸であるコア部6と光導波路の
光軸であるコア部2とを揃える。そして、挿入された光
ファイバ5の端面と光導波路の端面との間に端面接続用
接着剤7を少量滴下して仮止めを行なった後、仮止めを
行なった接着剤7の上からさらに接着剤7を足して端面
同士の接続強度を増加させ、両者を確実に接着してい
た。In such a connection structure between an optical waveguide and an optical fiber, first, as shown in FIG.
Optical fiber fixing groove 4 formed on the upper surface facing the optical waveguide
Then, the optical fiber 5 is inserted with its end face facing the end face of the optical waveguide. Next, after the insertion, the optical axes of the two are adjusted so that the core 6 as the optical axis of the optical fiber 5 and the core 2 as the optical axis of the optical waveguide are aligned. Then, a small amount of the end face connecting adhesive 7 is dropped between the inserted end face of the optical fiber 5 and the end face of the optical waveguide, and the end face is temporarily fixed. The agent 7 was added to increase the connection strength between the end faces, and both were securely bonded.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、図3に
示すような従来の接続方法においては、光導波路と光フ
ァイバ5との端面同士の接続部分において、仮止めした
接着剤7の上からさらに接着剤7を加えると、仮止めに
おいて硬化させた接着剤7に硬化前の接着剤7からその
溶剤等が拡散・浸透して、硬化していた接着剤7が緩ん
でしまうこととなり、そのため光ファイバ5の光軸ずれ
が生じてしまうという問題点があった。However, in the conventional connection method as shown in FIG. 3, at the connection between the end faces of the optical waveguide and the optical fiber 5, the adhesive 7 which has been temporarily fixed is further bonded. When the agent 7 is added, the solvent or the like diffuses and permeates from the adhesive 7 before curing into the adhesive 7 cured in the temporary fixing, so that the cured adhesive 7 is loosened. There is a problem that the optical axis shift of No. 5 occurs.
【0006】また、光ファイバ5の接続をその先端の端
面で行なっていることから、光ファイバ5の接続強度が
不十分で接続信頼性が低いという問題点もあった。Further, since the connection of the optical fiber 5 is performed at the end face of the tip, there is a problem that the connection strength of the optical fiber 5 is insufficient and the connection reliability is low.
【0007】本発明は上記従来技術における問題点に鑑
みてなされたものであり、その目的は、光導波路が形成
された基板上に光ファイバを接着剤で固定する際に、光
ファイバを光ファイバ固定溝に固定するための固定用接
着剤を付与することによって確実に基板に固定してその
強度を向上させることができるとともに、端面接続用接
着剤および固定用接着剤の硬化により生じる光軸ずれの
発生を抑制して良好な位置精度で光軸を揃えて光接続で
きる光導波路と光ファイバとの接続構造および接続方法
を提供することにある。The present invention has been made in view of the above-mentioned problems in the prior art, and has as its object to fix an optical fiber to an optical fiber when the optical fiber is fixed on a substrate having an optical waveguide formed thereon with an adhesive. By applying a fixing adhesive for fixing to the fixing groove, it is possible to securely fix the substrate to the substrate and improve the strength thereof, and the optical axis deviation caused by the curing of the end face connection adhesive and the fixing adhesive. An object of the present invention is to provide a connection structure and a connection method between an optical waveguide and an optical fiber, which are capable of optically connecting the optical axes with good positional accuracy by suppressing occurrence of the optical waveguide.
【0008】[0008]
【課題を解決するための手段】本発明の光導波路と光フ
ァイバとの接続構造は、基板上に形成された光導波路の
端面と、前記基板上に形成された光ファイバ固定溝に前
記光導波路と光軸を揃えて載置された光ファイバの端面
とを光硬化性接着剤により接合するとともに、前記光フ
ァイバを前記光ファイバ固定溝に熱硬化性接着剤により
固定したことを特徴とするものである。According to the present invention, there is provided a connection structure between an optical waveguide and an optical fiber, wherein the optical waveguide is provided on an end face of the optical waveguide formed on a substrate and an optical fiber fixing groove formed on the substrate. And an end face of the optical fiber placed with the optical axis aligned with a light-curing adhesive, and the optical fiber is fixed to the optical fiber fixing groove with a thermosetting adhesive. It is.
【0009】また、本発明の光導波路と光ファイバとの
接続方法は、上面に光導波路と、接着剤分離溝を有する
光ファイバ固定溝とを形成した基板を準備し、次に、前
記光ファイバ固定溝に前記光導波路と光軸を揃えて光フ
ァイバを載置するとともに光導波路と光ファイバの端面
同士を光硬化性の端面接続用接着剤により接合し、しか
る後、前記光ファイバ固定溝と前記光ファイバとを熱硬
化性の固定用接着剤で接合することを特徴とするもので
ある。Further, in the method for connecting an optical waveguide to an optical fiber according to the present invention, a substrate having an optical waveguide on an upper surface and an optical fiber fixing groove having an adhesive separating groove is prepared. The optical fiber is placed with the optical waveguide aligned with the optical axis in the fixing groove, and the end faces of the optical waveguide and the optical fiber are joined with a photocurable end face connection adhesive, and then the optical fiber fixing groove and The optical fiber is bonded with a thermosetting fixing adhesive.
【0010】本発明の光導波路と光ファイバとの接続構
造によれば、光導波路と光ファイバとの端面同士を光硬
化性接着剤の端面接続用接着剤で接合し、熱硬化性接着
剤の端面接続用接着剤により光ファイバを光ファイバ固
定溝に接合して固定することから、端面接続用接着剤を
介して対向させた光導波路と光ファイバのコア部(光
軸)に光硬化性接着剤の硬化用の光を端面接続用接着剤
に照射することによって、光軸間とその近傍の端面接続
用接着剤を光硬化させて端面同士を位置精度よく接合す
ることができるとともに、熱硬化性接着剤の固定用接着
剤により、光ファイバを基板の光ファイバ固定溝に光導
波路との端面同士の位置整合を保ちつつ大きな接続強度
で強固に接合でき、良好かつ確実に固定することができ
る。[0010] According to the connection structure of the optical waveguide and the optical fiber of the present invention, the end faces of the optical waveguide and the optical fiber are joined to each other with an adhesive for connecting the end faces of a photocurable adhesive. Since the optical fiber is bonded and fixed to the optical fiber fixing groove with the adhesive for end face connection, the photocurable adhesive is bonded to the optical waveguide and the core portion (optical axis) of the optical fiber and the opposing optical fiber via the adhesive for end face connection. By irradiating the adhesive for end face connection with the light for curing the adhesive, the adhesive for end face connection between the optical axes and in the vicinity thereof can be light-cured, and the end faces can be joined with high positional accuracy, and the thermosetting can be performed. With the adhesive for fixing the conductive adhesive, the optical fiber can be firmly bonded to the optical fiber fixing groove of the substrate with a large connection strength while maintaining the alignment of the end faces with the optical waveguide, and can be fixed well and securely. .
【0011】また、本発明の光導波路と光ファイバとの
接続方法によれば、光ファイバを光ファイバ固定溝に光
導波路と光軸を揃えて載置して光導波路と光ファイバの
端面同士を光硬化性接着剤の端面接続用接着剤で接合し
た後、光ファイバ固定溝と光ファイバとを端面接続用接
着剤とは種類の異なる熱硬化性接着剤の固定用接着剤で
接合することから、固定用接着剤を付与した際にその一
部が端面接続用接着剤に接触しても、固定用接着剤の溶
剤等が端面接続用接着剤に拡散・浸透して混ざり合って
しまって端面接続用接着剤の接着が緩むことを効果的に
抑制することができる。また、端面接続用接着剤と固定
用接着剤とが混ざり合うことがないため、端面接続用接
着剤で接合した端面同士の固定がずれることがなく、し
かも、接着強度の大きな固定用接着剤で光ファイバを光
ファイバ固定溝に強固に固定することができるので、光
導波路と光ファイバとの間の光軸ずれの発生をなくすこ
とができる。According to the method for connecting an optical waveguide to an optical fiber according to the present invention, the optical fiber is placed in the optical fiber fixing groove so that the optical waveguide and the optical axis are aligned, and the end faces of the optical waveguide and the optical fiber are connected to each other. After bonding with the adhesive for end face connection of the photocurable adhesive, the optical fiber fixing groove and the optical fiber are joined with the adhesive for fixing of thermosetting adhesive different from the adhesive for end face connection. Even if a part of the fixing adhesive is in contact with the end face connection adhesive, the solvent or the like of the fixing adhesive diffuses and permeates into the end face connection adhesive and mixes. Looseness of the connection adhesive can be effectively suppressed. In addition, since the adhesive for connecting the end faces and the adhesive for fixing do not mix, the fixing of the end faces joined by the adhesive for connecting the end faces does not shift, and the fixing adhesive having a large adhesive strength is used. Since the optical fiber can be firmly fixed in the optical fiber fixing groove, the occurrence of optical axis shift between the optical waveguide and the optical fiber can be eliminated.
【0012】[0012]
【発明の実施の形態】以下、本発明を図面を参照しつつ
説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings.
【0013】図1(a)および(b)は、本発明の光導
波路と光ファイバとの接続構造の実施の形態の一例を示
すそれぞれ斜視図および断面図である。図1において、
図3と同様の箇所には同じ符号を付してある。8は、光
ファイバ固定溝4に光ファイバ5の固定を行なうための
固定用接着剤である。FIGS. 1 (a) and 1 (b) are a perspective view and a sectional view, respectively, showing an embodiment of a connection structure between an optical waveguide and an optical fiber according to the present invention. In FIG.
Parts similar to those in FIG. 3 are denoted by the same reference numerals. Reference numeral 8 denotes a fixing adhesive for fixing the optical fiber 5 to the optical fiber fixing groove 4.
【0014】本発明の光導波路と光ファイバとの接続構
造は、基板1上に形成された光導波路の端面と基板1上
に形成された光ファイバ固定溝4に固定用接着剤8によ
り固定された光ファイバ5の端面とを、光軸を揃えて、
すなわち光導波路のコア部2と光ファイバ5のコア部6
とを揃えて端面接続用接着剤7により接合して成る接続
構造であって、端面接続用接着剤7に光硬化性の接着剤
を用い、固定用接着剤8に熱硬化性の接着剤を用いて接
続したことを特徴とする。The connection structure between the optical waveguide and the optical fiber according to the present invention is fixed to the end face of the optical waveguide formed on the substrate 1 and the optical fiber fixing groove 4 formed on the substrate 1 by a fixing adhesive 8. With the end face of the optical fiber 5
That is, the core portion 2 of the optical waveguide and the core portion 6 of the optical fiber 5
And a bonding structure formed by joining with an end face connecting adhesive 7, wherein a light curable adhesive is used for the end face connecting adhesive 7, and a thermosetting adhesive is used for the fixing adhesive 8. The connection is characterized by using
【0015】このように端面接続用接着剤7を光硬化性
のものとし、固定用接着剤8を熱硬化性のものとして異
なる種類の接着剤を用いるので、端面接続用接着剤7が
光ファイバ5の端面および端面近傍の側面を伝って固定
用接着剤8と接触したり、あるいは固定用接着剤8が光
ファイバ5や光ファイバ固定溝4の側面を伝って端面接
続用接着剤7と接触したりしても、両者が混ざり合って
接着剤の、特に端面接続用接着剤7の接着硬化が緩むこ
とがなく、光ファイバ5の光軸ずれの発生を抑制でき
る。As described above, since the end-face connecting adhesive 7 is made of a light-curing material and the fixing adhesive 8 is made of a thermosetting material, different types of adhesives are used. 5 contacts the fixing adhesive 8 along the end face and the side face near the end face, or the fixing adhesive 8 contacts the end face connecting adhesive 7 along the optical fiber 5 and the side face of the optical fiber fixing groove 4. Even if it does, the two will not be mixed, and the adhesive hardening of the adhesive, particularly the adhesive 7 for end face connection, will not be loosened, and the occurrence of optical axis deviation of the optical fiber 5 can be suppressed.
【0016】ここで、端面接続用接着剤7として紫外線
硬化性接着剤等の光硬化性接着剤を用いていることか
ら、図1(b)に示すように、光導波路のコア部2また
は光ファイバ5のコア部6を通して紫外線等の光Lを照
射することによって光軸間およびその近傍の端面接続用
接着剤7を瞬時に硬化させることができるので、接着前
に光軸調整した光導波路と光ファイバ5との位置整合が
そのまま保持され、光軸ずれが生じない光接続を行なう
ことができる。Here, since a photo-curable adhesive such as an ultraviolet-curable adhesive is used as the end face connecting adhesive 7, as shown in FIG. By irradiating the light L such as ultraviolet rays through the core 6 of the fiber 5, the adhesive 7 for connecting the end faces between the optical axes and in the vicinity thereof can be instantaneously cured. The position alignment with the optical fiber 5 is maintained as it is, and the optical connection without the optical axis shift can be performed.
【0017】このような端面接続用接着剤7としては、
光導波路のコア部2および光ファイバ5のコア部6と屈
折率が同程度のもの、すなわち、それらとの屈折率差が
0.1%以下の紫外線硬化性接着剤が望ましい。このよう
な紫外線硬化性接着剤を使用することによって、光導波
路の端面と光ファイバ5の端面との間で光を散乱するこ
となく伝搬させて良好な光接続を得ることができる。ま
た、紫外線硬化性接着剤を用いることによって、光軸調
整を行なった光導波路と光ファイバ5との状態を瞬時に
固定することができるため、アライメント特性が良いも
のとなる。As such an adhesive 7 for end face connection,
Those having the same refractive index as the core portion 2 of the optical waveguide and the core portion 6 of the optical fiber 5, that is, the refractive index difference between them is
A UV curable adhesive of 0.1% or less is desirable. By using such an ultraviolet-curable adhesive, light can be propagated between the end face of the optical waveguide and the end face of the optical fiber 5 without being scattered, and a good optical connection can be obtained. In addition, by using the ultraviolet curable adhesive, the state between the optical waveguide whose optical axis has been adjusted and the optical fiber 5 can be instantaneously fixed, so that the alignment characteristics are improved.
【0018】具体的な紫外線硬化性接着剤としては、例
えば紫外線硬化型エポキシ樹脂や紫外線硬化型アクリル
樹脂等を用いることができる。中でも、紫外線硬化型エ
ポキシ樹脂を用いると、硬化の際の収縮が小さいといっ
た点で好適である。As a specific ultraviolet-curable adhesive, for example, an ultraviolet-curable epoxy resin or an ultraviolet-curable acrylic resin can be used. Above all, the use of an ultraviolet-curable epoxy resin is preferred in that shrinkage during curing is small.
【0019】一方、固定用接着剤8としては熱硬化性の
接着剤を用いていることから、光ファイバ5の光ファイ
バ固定溝4への接着強度を大きくできるために光導波路
と光ファイバとの十分な接続強度を得ることができるも
のとなり、良好な光接続を行なうことができる。On the other hand, since a thermosetting adhesive is used as the fixing adhesive 8, the adhesive strength of the optical fiber 5 to the optical fiber fixing groove 4 can be increased, so that the optical waveguide and the optical fiber are bonded to each other. Sufficient connection strength can be obtained, and good optical connection can be performed.
【0020】このような熱硬化性の固定用接着剤8とし
ては、光ファイバ5を基板1に接着させる効果のあるも
のであればとりわけ限定されるものではない。しかしな
がら、光導波路と光ファイバ5との光軸ずれへの影響を
小さくするためには、仮止めで硬化させた光硬化性の端
面接続用接着剤7と混ざり合わないものであることが望
ましく、できるだけ熱膨張率および硬化時の収縮率が小
さいものが望ましく、また、光ファイバ5の基板1への
良好かつ確実な接着のためには接着面積等を考慮して1
kg以上の接着強度が得られるものが望ましい。The thermosetting fixing adhesive 8 is not particularly limited as long as it has an effect of bonding the optical fiber 5 to the substrate 1. However, in order to reduce the influence on the optical axis deviation between the optical waveguide and the optical fiber 5, it is desirable that the adhesive does not mix with the photocurable end face connection adhesive 7 cured by temporary fixing. It is desirable that the thermal expansion coefficient and the shrinkage rate upon curing are as small as possible. For good and reliable adhesion of the optical fiber 5 to the substrate 1, it is necessary to consider the bonding area and the like.
It is desirable that the adhesive strength be at least kg.
【0021】このような固定用接着剤8としては、例え
ば熱硬化型エポキシ樹脂・アクリル樹脂・ポリイミド樹
脂やシリコーン接着剤等を用いることができる。中で
も、シリコーン接着剤を用いると、接着強度が大きく、
また吸水率が低いといった点で好適である。As the fixing adhesive 8, for example, a thermosetting epoxy resin, an acrylic resin, a polyimide resin, a silicone adhesive or the like can be used. Above all, when a silicone adhesive is used, the adhesive strength is large,
It is also preferable in that the water absorption is low.
【0022】なお、本発明の接続構造によれば、端面接
続用接着剤7と固定用接着剤8に互いに混ざり合わない
ものを用いた場合には、両者の接触を特に問題とする必
要がないので、図1に示すように、光ファイバ固定溝4
を光導波路の端面の直下まで形成することができる。こ
れにより、光ファイバ5の端面は光ファイバ固定溝4に
支持された状態で光導波路の端面に突き当てられるの
で、光接続における光軸の位置整合を良好なものとする
ことができる。According to the connection structure of the present invention, when the end face connection adhesive 7 and the fixing adhesive 8 are not mixed with each other, the contact between them does not need to be a particular problem. Therefore, as shown in FIG.
Can be formed just below the end face of the optical waveguide. As a result, the end face of the optical fiber 5 is abutted against the end face of the optical waveguide while being supported by the optical fiber fixing groove 4, so that the alignment of the optical axis in the optical connection can be improved.
【0023】また、本発明の光導波路と光ファイバとの
接続方法によれば、基板1上に形成された光ファイバ固
定溝4に、光ファイバ5を挿入・載置した後に、光ファ
イバ5と光導波路の光軸調整を行なって両者の光軸(コ
ア部2とコア部6)を揃え、それとともに光導波路と光
ファイバ5の端面の間に光硬化性の端面接続用接着剤7
を少量滴下し、光導波路のコア部2または光ファイバ5
のコア部6から硬化のための光Lを照射して端面接続用
接着剤7を硬化させる。このとき、滴下する端面接続用
接着剤7の量は少なくて済むため、その硬化の際に生じ
る収縮等の影響も小さいので、これによっても光軸ずれ
の発生を抑制できる。Further, according to the method for connecting an optical waveguide and an optical fiber of the present invention, after the optical fiber 5 is inserted and placed in the optical fiber fixing groove 4 formed on the substrate 1, the optical fiber 5 is connected to the optical fiber 5. The optical axis of the optical waveguide is adjusted to align the optical axes (core portion 2 and core portion 6) of the optical waveguide, and at the same time, a photocurable adhesive 7 for connecting the end surface between the optical waveguide and the end surface of the optical fiber 5.
Is dropped, and the core portion 2 of the optical waveguide or the optical fiber 5
Irradiation light L for curing is applied from the core portion 6 to cure the end face connection adhesive 7. At this time, the amount of the end face connection adhesive 7 to be dropped may be small, and the influence of shrinkage or the like generated during the curing is small, so that the occurrence of optical axis shift can be suppressed.
【0024】その後、光ファイバ固定溝4と光ファイバ
5とを光硬化性の端面接続用接着剤7とは種類の異なる
熱硬化性接着剤の固定用接着剤8で接合する。なお、図
1においては固定用接着剤8を光ファイバ5の周囲に付
与した例を示しているが、固定用接着剤8は光ファイバ
固定溝4と光ファイバ5との間のみに介在させて両者を
接着するようにしてもよいことは言うまでもない。Thereafter, the optical fiber fixing groove 4 and the optical fiber 5 are joined by a fixing adhesive 8 of a thermosetting adhesive different from the photocurable end face connection adhesive 7. Although FIG. 1 shows an example in which the fixing adhesive 8 is provided around the optical fiber 5, the fixing adhesive 8 is interposed only between the optical fiber fixing groove 4 and the optical fiber 5. Needless to say, both may be bonded.
【0025】これにより、接着強度の大きい熱硬化性の
固定用接着剤8により光ファイバ5を光ファイバ固定溝
4に強固に固定でき、光導波路と光ファイバ5との間の
光軸ずれの発生をなくすことができる接続信頼性の高い
接続構造を得ることができる。また、端面接続用接着剤
7と固定用接着剤8との種類が異なることから、固定用
接着剤8を付与した際にその一部が広がって仮止め硬化
させた端面接続用接着剤7に接触しても、固定用接着剤
8の溶剤等が端面接続用接着剤7に拡散・浸透して混ざ
り合ってしまって端面接続用接着剤7の接着が緩むこと
を効果的に抑制することができる。As a result, the optical fiber 5 can be firmly fixed to the optical fiber fixing groove 4 by the thermosetting fixing adhesive 8 having a large adhesive strength, and the optical axis deviation between the optical waveguide and the optical fiber 5 occurs. And a connection structure with high connection reliability that can eliminate the problem can be obtained. Further, since the types of the adhesive 7 for connecting the end face and the adhesive 8 for fixing are different, when the adhesive 8 for fixing is applied, a part of the adhesive 7 is spread and temporarily fixed. Even if they come into contact with each other, it is possible to effectively prevent the solvent and the like of the fixing adhesive 8 from diffusing and penetrating into and mixing with the end face connecting adhesive 7 to loosen the adhesion of the end face connecting adhesive 7 effectively. it can.
【0026】本発明の接続構造および接続方法によれ
ば、端面接続用接着剤7と固定用接着剤8にはそれぞれ
光硬化性と熱硬化性という異種の接着剤を用いることか
ら、それぞれの接着剤の有する熱的および機械的な特性
が異なるものとなる。従って、両者の特性の組合せを考
慮して、例えば種々の環境下等において一方の接着剤が
経時的に劣化しやすい場合であっても、他方の接着剤と
してその条件に対して劣化しにくいものを選択すること
によって、光導波路と光ファイバ5との接着効果を持続
させることができ、接続信頼性を向上させることができ
る。According to the connection structure and the connection method of the present invention, different adhesives of photo-curing and thermosetting are used for the adhesive 7 for end face connection and the adhesive 8 for fixing, respectively. The thermal and mechanical properties of the agent will be different. Therefore, taking into account the combination of the two properties, for example, even if one of the adhesives is likely to deteriorate with time under various environments, the other adhesive is unlikely to deteriorate with respect to the conditions. By selecting the above, the bonding effect between the optical waveguide and the optical fiber 5 can be maintained, and the connection reliability can be improved.
【0027】このような特性の組合せとしては、例えば
硬化時の収縮が小さくアライメントが保持しやすい紫外
線硬化型エポキシ樹脂と、吸湿が少なくガラス転移温度
Tgが高くて固定後の信頼性に優れている熱硬化型シリ
コーン樹脂との組合せが考えられる。As a combination of such characteristics, for example, an ultraviolet-curing epoxy resin which has a small shrinkage at the time of curing and easily maintains the alignment and a glass transition temperature Tg which has low moisture absorption and high reliability after fixing are excellent. A combination with a thermosetting silicone resin is conceivable.
【0028】なお、本発明の光導波路と光ファイバとの
接続構造において、図2(a)〜(c)にそれぞれ図1
(b)と同様の断面図で示すように、光ファイバ固定溝
4に対してその光ファイバ5の端面と固定用接着剤8に
よる固定位置との間に端面接続用接着剤7と固定用接着
剤8とを分離するための接着剤分離溝9を形成すること
により、光導波路と光ファイバ5の端面同士を端面接続
用接着剤7で接続した後に光ファイバ固定溝4に固定用
接着剤8を付与しても、両接着剤の間に形成した接着剤
分離溝9により両者が接触して混ざり合うことがないも
のとなる。また、固定用接着剤8と端面接続用接着剤7
との間に所望の距離を設けることが可能なため、固定用
接着剤8を付与する際の影響、あるいは固定用接着剤8
が硬化する際の収縮等の影響が光導波路および光ファイ
バ5の端面に及ぶことを有効に防止することができる。
従って、光軸を揃えて端面接続用接着剤7で接合した光
導波路と光ファイバ5との間の光軸ずれをより効果的に
なくすことができ、光ファイバ5を固定用接着剤8によ
って光ファイバ固定溝4に確実に固定することができる
ものとなり、光ファイバ5の接続信頼性をさらに高める
ことができる。In the connection structure between the optical waveguide and the optical fiber according to the present invention, FIGS.
As shown in a sectional view similar to (b), between the end face of the optical fiber 5 and the fixing position by the fixing adhesive 8 with respect to the optical fiber fixing groove 4, the end face connecting adhesive 7 and the fixing adhesive are used. By forming an adhesive separating groove 9 for separating the adhesive 8 from the optical fiber 8, the end faces of the optical waveguide and the optical fiber 5 are connected to each other with an adhesive 7 for connecting the end faces, and then the adhesive 8 is fixed to the optical fiber fixing groove 4. , The two do not come into contact with each other due to the adhesive separating groove 9 formed between the two adhesives. Also, the fixing adhesive 8 and the end face connecting adhesive 7
Can be provided with a desired distance between the fixing adhesive 8 and the fixing adhesive 8.
Can be effectively prevented from affecting the end faces of the optical waveguide and the optical fiber 5 due to shrinkage and the like during the curing.
Therefore, it is possible to more effectively eliminate the optical axis deviation between the optical fiber 5 and the optical waveguide joined with the end face connecting adhesive 7 with the optical axes aligned, and the optical fiber 5 is fixed by the fixing adhesive 8. The optical fiber 5 can be securely fixed to the fiber fixing groove 4, and the connection reliability of the optical fiber 5 can be further improved.
【0029】また、本発明の光導波路と光ファイバとの
接続方法において、このように基板として光ファイバ固
定溝4に接着剤分離溝9を形成したものを用いると、光
ファイバ5を接着剤分離溝9を有する光ファイバ固定溝
4に光導波路と光軸を揃えて載置して光導波路と光ファ
イバ5の端面同士を端面接続用接着剤7で接合した後、
光ファイバ固定溝4のうち光ファイバ5の端面に対して
間に接着剤分離溝9を挟む領域と光ファイバ5とを固定
用接着剤8で接合することにより、光導波路と光ファイ
バ5の端面同士を端面接続用接着剤7で接続した後に固
定用接着剤8を付与しても、両接着剤の間に形成した接
着剤分離溝9により両者が接触して混ざり合うことがな
くなる。また、固定用接着剤8と端面接続用接着剤7と
の間に所望の距離を設けることが可能なため、固定用接
着剤8を付与する際の影響、あるいは固定用接着剤8が
硬化する際の収縮等の影響が光導波路の端面に及ぶこと
を有効に防止することができる。従って、光軸を揃えて
端面接続用接着剤7で接合した光導波路と光ファイバ5
との間の光軸ずれをなくすことができる。また、光ファ
イバ5を固定用接着剤8によって光ファイバ固定溝4に
確実に固定することができ、光ファイバの接続強度を向
上させることができる。Further, in the method for connecting an optical waveguide and an optical fiber according to the present invention, if the substrate in which the adhesive separating groove 9 is formed in the optical fiber fixing groove 4 is used, the optical fiber 5 is separated from the adhesive. After the optical waveguide and the optical fiber 5 are placed in the optical fiber fixing groove 4 having the groove 9 with the optical axis aligned and the end faces of the optical waveguide and the optical fiber 5 are joined with the end face connecting adhesive 7,
By joining the optical fiber 5 to the region of the optical fiber fixing groove 4 which sandwiches the adhesive separating groove 9 with respect to the end face of the optical fiber 5 with the fixing adhesive 8, the optical waveguide and the end face of the optical fiber 5 are joined together. Even if the fixing adhesive 8 is applied after connecting the two with the end face connecting adhesive 7, the two will not contact and mix due to the adhesive separating groove 9 formed between the two adhesives. Further, since a desired distance can be provided between the fixing adhesive 8 and the end face connecting adhesive 7, the influence when applying the fixing adhesive 8 or the fixing adhesive 8 is cured. It is possible to effectively prevent the influence of shrinkage or the like on the end face of the optical waveguide. Therefore, the optical waveguide and the optical fiber 5 which are aligned with the optical axis and bonded with the end face connection adhesive 7 are
Can be eliminated. Further, the optical fiber 5 can be securely fixed to the optical fiber fixing groove 4 by the fixing adhesive 8, and the connection strength of the optical fiber can be improved.
【0030】しかも、光ファイバ5の基板1への接着強
度、すなわち光ファイバ固定溝4への接着強度について
は、光導波路と光ファイバ5の端面同士を接合した後
に、光ファイバ固定溝4のうち光ファイバ5の端面に対
して間に接着剤分離溝9を挟む領域に設けた固定位置に
おいて光ファイバ固定溝4と光ファイバ5とを固定用接
着剤8で接合するものとなることから、十分な量の固定
用接着剤8を付与することができ、光ファイバ5の接着
強度を向上することができる。このとき、固定用接着剤
8を多量に塗布して、これが表面張力によって光ファイ
バ5の側面に沿って流動しても、光ファイバ5の端面側
に流動した固定用接着剤8は光ファイバ固定溝4に設け
た接着剤分離溝9のところで止まり、端面接続用接着剤
7とは分離されるため、光ファイバ5の端面と光導波路
の端面の接合部分には影響がないようにできる。従っ
て、固定用接着剤8の硬化の際の収縮による光ファイバ
5の光軸ずれも生じないものとできる。In addition, regarding the adhesive strength of the optical fiber 5 to the substrate 1, that is, the adhesive strength to the optical fiber fixing groove 4, after the end faces of the optical waveguide and the optical fiber 5 are joined together, Since the optical fiber fixing groove 4 and the optical fiber 5 are joined with the fixing adhesive 8 at a fixing position provided in a region sandwiching the adhesive separating groove 9 with respect to the end face of the optical fiber 5, sufficient An appropriate amount of the fixing adhesive 8 can be applied, and the adhesive strength of the optical fiber 5 can be improved. At this time, even if a large amount of the fixing adhesive 8 is applied and flows along the side surface of the optical fiber 5 due to the surface tension, the fixing adhesive 8 flowing to the end face side of the optical fiber 5 is fixed to the optical fiber. Since it stops at the adhesive separating groove 9 provided in the groove 4 and is separated from the end face connecting adhesive 7, there is no influence on the joint portion between the end face of the optical fiber 5 and the end face of the optical waveguide. Accordingly, the optical axis of the optical fiber 5 does not deviate due to shrinkage of the fixing adhesive 8 during curing.
【0031】また、接着剤分離溝9は光導波路の端面よ
りも光ファイバ5側に形成されているため、端面接続用
接着剤7を光導波路の端面全体に広がらせ、さらに、光
ファイバ5に対してもその端面が光導波路の端面に突き
当たる角まで広がらせることができる。従って、接着剤
分離溝9を設けたことにより、光導波路と光ファイバ5
の端面同士の接続部の接着強度も向上させることができ
る。Since the adhesive separating groove 9 is formed closer to the optical fiber 5 than the end face of the optical waveguide, the adhesive 7 for connecting the end face is spread over the entire end face of the optical waveguide. On the other hand, the end face can be expanded to the corner where the end face comes into contact with the end face of the optical waveguide. Therefore, the provision of the adhesive separating groove 9 allows the optical waveguide and the optical fiber 5 to be formed.
The bonding strength of the connection portion between the end faces can also be improved.
【0032】さらに、接着剤分離溝9を光導波路の端面
の直下よりも光ファイバ5側に形成しているため、光導
波路と光ファイバ5との光軸調整において光ファイバ5
の先端が不安定になるようなことがなく、光軸調整がし
やすいものとなる。Further, since the adhesive separating groove 9 is formed closer to the optical fiber 5 than immediately below the end face of the optical waveguide, the optical fiber 5 is adjusted when the optical axis of the optical waveguide and the optical fiber 5 is adjusted.
Does not become unstable, and the optical axis can be easily adjusted.
【0033】このような接着剤分離溝9の位置は、具体
的には、光導波路の端面から20μm〜2cmで光ファイ
バ5の端面と固定位置との間の範囲に位置していると良
い。Specifically, the position of the adhesive separating groove 9 is preferably 20 μm to 2 cm from the end face of the optical waveguide, and is located in a range between the end face of the optical fiber 5 and the fixed position.
【0034】中でも、光導波路の端面から20〜50μmの
位置とすると、効果的に端面接続用接着剤7と固定用接
着剤8とを分離することができる好適なものとなる。In particular, if the position is 20 to 50 μm from the end face of the optical waveguide, it is preferable that the end face connection adhesive 7 and the fixing adhesive 8 can be effectively separated.
【0035】また、接着剤分離溝9の幅や深さ・長さ等
の寸法は、この接着剤分離溝9にむけて広がってくる端
面接続用接着剤7の一部または固定用接着剤8の一部の
容積よりも大きい容積を占め、特に、幅については接着
剤の分離効果が確実となる10μm以上の幅を持つものと
することが望ましい。The dimensions such as the width, depth and length of the adhesive separating groove 9 are determined by a part of the end face connecting adhesive 7 spreading toward the adhesive separating groove 9 or the fixing adhesive 8. Occupies a volume larger than a part of the volume, and particularly preferably has a width of 10 μm or more that ensures the effect of separating the adhesive.
【0036】接着剤分離溝9の形状は、光導波路と光フ
ァイバ5の端面の間に付与する端面接続用接着剤7と光
ファイバ支持溝4に付与する固定用接着剤8とを分離す
ることができればどのような形状でも良く、例えば、図
2(a)に示すような断面が直方形状の溝や、図2
(b)に示すようなV字状の溝、あるいは半円形状の溝
等、種々の形状とすることができる。中でも、ダイシン
グにより作製が容易であること、同容積であれば溝を狭
く、あるいは浅くすることができることから、断面が直
方形状の溝とすると本発明の接続構造に好適なものとな
る。The shape of the adhesive separating groove 9 is to separate the end face connecting adhesive 7 applied between the optical waveguide and the end face of the optical fiber 5 and the fixing adhesive 8 applied to the optical fiber supporting groove 4. Any shape may be used as long as it is possible. For example, a groove having a rectangular cross section as shown in FIG.
Various shapes such as a V-shaped groove or a semicircular groove as shown in FIG. Above all, it is easy to manufacture by dicing, and if the volume is the same, the groove can be narrow or shallow. Therefore, a groove having a rectangular cross section is suitable for the connection structure of the present invention.
【0037】さらに、接着剤分離溝9は1個だけでな
く、図2(c)に示すように複数個設けても良い。接着
剤分離溝9を複数個設けた場合には、接着剤の分離をよ
り確実に行なうことができるものとして機能させるのみ
ならず、光ファイバ5の端面に一番近い溝は端面接続用
接着剤7と固定用接着剤8との分離のための溝として使
用し、その他の溝には固定用接着剤8を侵入させて、そ
の表面張力の効果を利用して光ファイバ5の光ファイバ
固定溝4への接着強度をさらに増加させることもでき
る。Further, not only one adhesive separating groove 9 but also a plurality of adhesive separating grooves 9 may be provided as shown in FIG. When a plurality of the adhesive separating grooves 9 are provided, not only can the adhesive function more reliably to separate the adhesive, but also the groove closest to the end face of the optical fiber 5 is the end face connecting adhesive. 7 is used as a groove for separating the fixing adhesive 8 from the fixing adhesive 8, and the fixing adhesive 8 is made to penetrate into the other grooves, and the effect of the surface tension is used to fix the optical fiber of the optical fiber 5. 4 can be further increased.
【0038】なお、接着剤分離溝9を形成する方法とし
ては、光ファイバ固定溝4と同様に、ダイシングを用い
た方法やマスクを用いて反応性ドライエッチングを行な
う方法、その他の方法によればよい。As the method for forming the adhesive separating groove 9, as in the case of the optical fiber fixing groove 4, a method using dicing, a method of performing reactive dry etching using a mask, and other methods are used. Good.
【0039】本発明の光導波路と光ファイバとの接続構
造において、基板1には、光集積回路基板や光電子混在
基板等の光信号を扱う基板として使用される種々の基
板、例えばシリコン基板やアルミナ基板・ガラスセラミ
ックス基板・多層セラミック基板等が使用できる。In the connection structure between an optical waveguide and an optical fiber according to the present invention, the substrate 1 may be any of various substrates used as substrates for handling optical signals, such as an optical integrated circuit substrate and an optoelectronic mixed substrate, such as a silicon substrate and an alumina substrate. Substrates, glass ceramic substrates, multilayer ceramic substrates, etc. can be used.
【0040】基板1上に形成される光導波路は、クラッ
ド部3中にコア部2が形成された三次元導波路形状の光
導波路であり、その形成材料としては、シリカ・ポリイ
ミド・フッ素樹脂・フッ化ポリイミド・シロキサン系ポ
リマ等を用いることができる。中でも、シロキサン系ポ
リマから成る光導波路を用いれば、低温形成および高耐
熱性・低損失といった点で好適なものとなる。The optical waveguide formed on the substrate 1 is a three-dimensional waveguide-shaped optical waveguide in which a core 2 is formed in a cladding portion 3 and is made of silica, polyimide, fluororesin, or the like. A fluorinated polyimide / siloxane-based polymer or the like can be used. Among them, the use of an optical waveguide made of a siloxane-based polymer is preferable in terms of low-temperature formation and high heat resistance and low loss.
【0041】光ファイバ固定溝4としては、基板1の材
料や特性、あるいは光ファイバ5の形状・寸法等に応じ
て種々の形状・寸法・形成方法から適宜選択すればよ
い。図1に示した四角形状の溝の他にも、V字状の溝や
半円形状の溝としてもよい。その形成には、ダイシング
を用いた方法やマスクを用いて反応性ドライエッチング
を行なう方法、その他の方法を用いればよい。The optical fiber fixing groove 4 may be appropriately selected from various shapes, dimensions and forming methods according to the material and characteristics of the substrate 1 or the shape and dimensions of the optical fiber 5. Instead of the square groove shown in FIG. 1, a V-shaped groove or a semicircular groove may be used. For the formation, a method using dicing, a method for performing reactive dry etching using a mask, or another method may be used.
【0042】光ファイバ5としては、シリカ系およびP
MMA(ポリメチルメタアクリレート)・フッ素樹脂等
で形成されるシングルモード光ファイバあるいはマルチ
モード光ファイバが接続できる。The optical fiber 5 is made of silica or P
A single-mode optical fiber or a multi-mode optical fiber made of MMA (polymethyl methacrylate) / fluororesin can be connected.
【0043】[0043]
【実施例】次に、本発明の光導波路と光ファイバとの接
続構造および接続方法について具体例を説明する。Next, a specific example of a connection structure and a connection method between an optical waveguide and an optical fiber according to the present invention will be described.
【0044】〔例1〕アルミナセラミックスから成る基
板上に、クラッド部がシロキサンポリマ、コア部がチタ
ン含有シロキサンポリマから成るステップインデックス
型光導波路を形成した。次いで、この光導波路に対して
光ファイバと接続する部分を決定し、ダイシングブレー
ドを用いて光導波路の端面を形成した。さらに、この端
面に対向する位置に光ファイバ固定溝をダイシングによ
り形成した。このときの光導波路の上面から光ファイバ
固定溝の底面までの深さは90μmとした。Example 1 A step index type optical waveguide having a cladding portion made of siloxane polymer and a core portion made of titanium-containing siloxane polymer was formed on a substrate made of alumina ceramics. Next, a portion of the optical waveguide to be connected to the optical fiber was determined, and an end face of the optical waveguide was formed using a dicing blade. Further, an optical fiber fixing groove was formed at a position facing the end face by dicing. At this time, the depth from the upper surface of the optical waveguide to the bottom surface of the optical fiber fixing groove was 90 μm.
【0045】次に、光ファイバ固定溝に直径125 μmの
シリカ系の光ファイバを挿入し、光導波路のコア部を通
して光ファイバの端面から入射させた光を光ファイバの
他方の端面である出力端からモニタリングしながら、光
導波路と光ファイバとの光軸調整を行なった。Next, a silica-based optical fiber having a diameter of 125 μm is inserted into the optical fiber fixing groove, and light incident from the end face of the optical fiber through the core of the optical waveguide is output from the other end face of the optical fiber. The optical axis of the optical waveguide and the optical fiber was adjusted while monitoring from above.
【0046】次に、光導波路および光ファイバのコア部
と屈折率が同程度の端面接続用接着剤としてスルフォニ
ウム塩系光重合開始剤とエポキシ系樹脂とから成る紫外
線硬化型エポキシ樹脂の紫外線硬化性接着剤を光導波路
と光ファイバの端面の間に0.245 μl滴下し、さらに、
外部から紫外線を照射して硬化させた。Next, an ultraviolet curable epoxy resin comprising a sulfonium salt-based photopolymerization initiator and an epoxy resin as an adhesive for end face connection having a refractive index similar to that of the core portion of the optical waveguide and the optical fiber is used. 0.245 μl of adhesive was dropped between the optical waveguide and the end face of the optical fiber, and
It was cured by irradiating ultraviolet rays from outside.
【0047】その後、光ファイバ固定溝と光ファイバと
に固定用接着剤として熱硬化型シリコーン樹脂の熱硬化
性接着剤を塗布し、ハロゲンランプ光によって150 ℃で
30秒間局所的に加熱することによって、固定用接着剤を
硬化させて光ファイバを基板上に固定した。After that, a thermosetting adhesive of thermosetting silicone resin is applied as a fixing adhesive to the optical fiber fixing groove and the optical fiber, and the light is applied at 150 ° C. by a halogen lamp light.
By locally heating for 30 seconds, the fixing adhesive was cured to fix the optical fiber on the substrate.
【0048】このようにして作製した本発明の光導波路
と光ファイバとの接続構造について光導波路と光ファイ
バとの接続損失をカットバック法により測定したとこ
ろ、波長1.3 μmのLD(レーザダイオード)光に対す
る接続損失は0.5 dB以下に抑えられていることが確認
できた。また、あらかじめ測定した位置ずれと損失の関
係を表わしたデータから、損失の極小値すなわち位置ず
れ=0に対する損失の増加分を位置ずれの大きさに対応
させて光軸ずれの評価を行なったところ、0.2 μm以内
のずれであることが分かった。When the connection loss between the optical waveguide and the optical fiber was measured by a cutback method for the connection structure between the optical waveguide and the optical fiber of the present invention, the LD (laser diode) light having a wavelength of 1.3 μm was obtained. It was confirmed that the connection loss with respect to was suppressed to 0.5 dB or less. Further, based on data representing the relationship between the positional deviation and the loss measured in advance, the optical axis deviation was evaluated by associating the minimum value of the loss, that is, the increase in the loss with respect to the positional deviation = 0, with the magnitude of the positional deviation. , Within 0.2 μm.
【0049】また、この接続構造について光ファイバの
基板への接着強度を荷重引っ張り試験機により測定した
ところ、光ファイバの接着強度は5kg以上あり、光フ
ァイバ接着後の基板の取り回しやハンドリングに充分耐
えることができる良好な接続強度を有していることが確
認できた。When the bonding strength of the optical fiber to the substrate was measured with a load tensile tester for this connection structure, the bonding strength of the optical fiber was 5 kg or more, and the substrate was sufficiently resistant to handling and handling after bonding the optical fiber. It was confirmed that it had good connection strength.
【0050】また、この接続構造を85℃の高温中に1000
時間放置した後においても種々の特性について変化は見
られず、接続信頼性にも優れていることが確認できた。Further, this connection structure is kept at a high temperature of 85.degree.
Even after standing for a long time, no change was observed in various characteristics, and it was confirmed that the connection reliability was excellent.
【0051】〔例2〕次に、〔例1〕と同様の基板を用
い、さらに、光ファイバ固定溝の底面の光導波路端面か
ら20μm離れた位置にダイシングにより接着剤分離溝を
形成した。ここで、接着剤分離溝は深さ30μm・光ファ
イバの光軸方向の幅20μmの直方形状の断面形状で、光
軸方向に対して垂直方向の幅は、光ファイバ固定溝をテ
ラス状に形成したため、基板の端部までの幅と同じとし
た。Example 2 Next, using the same substrate as in Example 1, an adhesive separating groove was formed by dicing at a position 20 μm away from the end face of the optical waveguide on the bottom surface of the optical fiber fixing groove. Here, the adhesive separating groove is a rectangular cross-sectional shape with a depth of 30 μm and a width of 20 μm in the optical axis direction of the optical fiber, and the width in the direction perpendicular to the optical axis direction is formed as a terrace-shaped optical fiber fixing groove. Therefore, the width was the same as the width up to the end of the substrate.
【0052】次いで、〔例1〕と同様にして光導波路と
光ファイバの端面同士を端面接続用接着剤で接続した。
その後、光ファイバの端面に対して間に接着剤分離溝を
挟む領域の光ファイバ固定溝と光ファイバとに〔例1〕
と同様に固定用接着剤を塗布し、加熱して硬化させて、
光ファイバを基板上に固定した。Next, the end faces of the optical waveguide and the optical fiber were connected with an end face connecting adhesive in the same manner as in [Example 1].
Then, the optical fiber fixing groove and the optical fiber in the region where the adhesive separating groove is interposed between the end face of the optical fiber and the optical fiber [Example 1]
Apply the fixing adhesive in the same way as above, heat and cure,
The optical fiber was fixed on the substrate.
【0053】この接続構造について〔例1〕と同様に評
価したところ、いずれも同等以上の良好な特性を有する
ことが確認できた。When this connection structure was evaluated in the same manner as in [Example 1], it was confirmed that all of them had the same or better characteristics.
【0054】なお、以上はあくまで本発明の実施の形態
の例示であって、本発明はこれらに限定されるものでは
なく、本発明の要旨を逸脱しない範囲で種々の変更や改
良を加えることは何ら差し支えない。It should be noted that the above is only an example of the embodiment of the present invention, and the present invention is not limited to these. Various modifications and improvements may be made without departing from the gist of the present invention. No problem.
【0055】[0055]
【発明の効果】以上のように、本発明の光導波路と光フ
ァイバとの接続構造によれば、光導波路と光ファイバと
の端面同士を光硬化性の端面接続用接着剤で接合し、熱
硬化性の端面接続用接着剤により光ファイバを光ファイ
バ固定溝に接合して固定することから、端面接続用接着
剤を介して対向させた光導波路と光ファイバのコア部
(光軸)に硬化用の光を端面接続用接着剤に照射するこ
とによって、光軸間とその近傍の端面接続用接着剤を光
硬化させて端面同士を位置精度よく接合することができ
るとともに、熱硬化性の固定用接着剤により、光ファイ
バを基板の光ファイバ固定溝に光導波路との端面同士の
位置整合を保ちつつ大きな接続強度で強固に接合でき、
良好かつ確実に固定することができた。As described above, according to the connection structure for an optical waveguide and an optical fiber of the present invention, the end surfaces of the optical waveguide and the optical fiber are joined with a photocurable adhesive for connecting the end surfaces, and the heat is applied. Since the optical fiber is bonded and fixed to the optical fiber fixing groove with the curable adhesive for end face connection, the core (optical axis) of the optical waveguide and the optical fiber opposed to each other via the adhesive for end face connection is cured. Irradiating the adhesive for end face connection with the adhesive for end face connection, the adhesive for end face connection between the optical axes and the vicinity thereof can be light-cured, and the end faces can be joined with good positional accuracy, and the thermosetting fixing can be performed. With the adhesive for the optical fiber, the optical fiber can be firmly bonded to the optical fiber fixing groove of the substrate with a large connection strength while maintaining the alignment of the end faces with the optical waveguide,
It could be fixed well and reliably.
【0056】また、本発明の光導波路と光ファイバとの
接続方法によれば、光ファイバを光ファイバ固定溝に光
導波路と光軸を揃えて載置して光導波路と光ファイバの
端面同士を光硬化性の端面接続用接着剤で接合した後、
光ファイバ固定溝と光ファイバとを端面接続用接着剤と
は種類の異なる熱硬化性の固定用接着剤で接合すること
から、固定用接着剤を付与した際にその一部が端面接続
用接着剤に接触しても、固定用接着剤の溶剤等が端面接
続用接着剤に拡散・浸透して混ざり合ってしまって端面
接続用接着剤の接着が緩むことを効果的に抑制すること
ができた。また、端面接続用接着剤と固定用接着剤とが
混ざり合うことがないため、端面接続用接着剤で接合し
た端面同士の固定がずれることがなく、しかも、接着強
度の大きな固定用接着剤で光ファイバを光ファイバ固定
溝に強固に固定することができるので、光導波路と光フ
ァイバとの間の光軸ずれの発生をなくすことができた。According to the method for connecting an optical waveguide and an optical fiber of the present invention, the optical fiber is placed in the optical fiber fixing groove so that the optical waveguide and the optical axis are aligned, and the end faces of the optical waveguide and the optical fiber are connected to each other. After joining with photo-curing adhesive for end face connection,
Since the optical fiber fixing groove and the optical fiber are joined with a thermosetting fixing adhesive different from the adhesive for the end face connection, when the fixing adhesive is applied, part of the adhesive is applied for the end face connection. Even if it comes into contact with the adhesive, it is possible to effectively prevent the solvent and the like of the fixing adhesive from diffusing and penetrating into and mixing with the end face connection adhesive and loosening the adhesion of the end face connection adhesive. Was. In addition, since the adhesive for connecting the end faces and the adhesive for fixing do not mix, the fixing of the end faces joined by the adhesive for connecting the end faces does not shift, and the fixing adhesive having a large adhesive strength is used. Since the optical fiber can be firmly fixed in the optical fiber fixing groove, the occurrence of optical axis shift between the optical waveguide and the optical fiber can be eliminated.
【0057】以上のように、本発明によれば、光導波路
が形成された基板上に光ファイバを接着剤で固定する際
に、光ファイバを光ファイバ固定溝に固定するための固
定用接着剤を付与することによって確実に基板に固定し
てその強度を向上させることができるとともに、端面接
続用接着剤および固定用接着剤の硬化により生じる光軸
ずれの発生を抑制して良好な位置精度で光軸を揃えて光
接続できる光導波路と光ファイバとの接続構造および接
続方法を提供することができた。As described above, according to the present invention, when the optical fiber is fixed on the substrate on which the optical waveguide is formed, the fixing adhesive for fixing the optical fiber to the optical fiber fixing groove is used. By adding the resin to the substrate, it can be securely fixed to the substrate and its strength can be improved, and the occurrence of optical axis deviation caused by the curing of the adhesive for end face connection and the adhesive for fixing can be suppressed to achieve good positional accuracy. It is possible to provide a connection structure and a connection method between an optical waveguide and an optical fiber that can optically connect the optical axes.
【図1】(a)および(b)は、それぞれ本発明の光導
波路と光ファイバとの接続構造の実施の形態の一例を示
す斜視図および断面図である。FIGS. 1 (a) and 1 (b) are a perspective view and a sectional view, respectively, showing an example of an embodiment of a connection structure between an optical waveguide and an optical fiber according to the present invention.
【図2】(a)〜(c)は、それぞれ本発明の光導波路
と光ファイバとの接続構造の実施の形態の他の例を示す
断面図である。FIGS. 2A to 2C are cross-sectional views showing another example of the embodiment of the connection structure between the optical waveguide and the optical fiber according to the present invention.
【図3】(a)および(b)は、それぞれ従来の光導波
路と光ファイバとの接続構造の例を示す斜視図および断
面図である。FIGS. 3A and 3B are a perspective view and a cross-sectional view, respectively, showing an example of a conventional connection structure between an optical waveguide and an optical fiber.
【符号の説明】 1・・・基板 2・・・光導波路のコア部 3・・・光導波路のクラッド部 4・・・光ファイバ固定溝 5・・・光ファイバ 6・・・光ファイバのコア部 7・・・端面接続用接着剤(光硬化性接着剤) 8・・・固定用接着剤(熱硬化性接着剤)[Description of Signs] 1 ... Substrate 2 ... Core part of optical waveguide 3 ... Clad part of optical waveguide 4 ... Fixing groove for optical fiber 5 ... Optical fiber 6 ... Core of optical fiber Part 7: Adhesive for end face connection (photo-curable adhesive) 8: Adhesive for fixing (thermo-curable adhesive)
Claims (2)
前記基板上に形成された光ファイバ固定溝に前記光導波
路と光軸を揃えて載置された光ファイバの端面とを光硬
化性接着剤により接合するとともに、前記光ファイバを
前記光ファイバ固定溝に熱硬化性接着剤により固定した
ことを特徴とする光導波路と光ファイバとの接続構造。1. An end face of an optical waveguide formed on a substrate,
The optical waveguide and the end face of the optical fiber placed in alignment with the optical axis are bonded to the optical fiber fixing groove formed on the substrate with a light-curing adhesive, and the optical fiber is connected to the optical fiber fixing groove. A connection structure between an optical waveguide and an optical fiber, wherein the optical waveguide and the optical fiber are fixed to each other with a thermosetting adhesive.
る光ファイバ固定溝とを形成した基板を準備し、次に、
前記光ファイバ固定溝に前記光導波路と光軸を揃えて光
ファイバを載置するとともに光導波路と光ファイバの端
面同士を光硬化性の端面接続用接着剤により接合し、し
かる後、前記光ファイバ固定溝と前記光ファイバとを熱
硬化性の固定用接着剤で接合することを特徴とする光導
波路と光ファイバとの接続方法。2. A substrate on which an optical waveguide and an optical fiber fixing groove having an adhesive separating groove are formed on the upper surface is prepared.
The optical fiber is placed with the optical axis aligned with the optical waveguide in the optical fiber fixing groove, and the end faces of the optical waveguide and the optical fiber are joined to each other with a photocurable end face connection adhesive, and then the optical fiber A method for connecting an optical waveguide and an optical fiber, wherein the fixing groove and the optical fiber are joined with a thermosetting fixing adhesive.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10307459A JP2000131556A (en) | 1998-10-28 | 1998-10-28 | Connection structure and connection method between optical waveguide and optical fiber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10307459A JP2000131556A (en) | 1998-10-28 | 1998-10-28 | Connection structure and connection method between optical waveguide and optical fiber |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000131556A true JP2000131556A (en) | 2000-05-12 |
Family
ID=17969332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10307459A Pending JP2000131556A (en) | 1998-10-28 | 1998-10-28 | Connection structure and connection method between optical waveguide and optical fiber |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000131556A (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100403739B1 (en) * | 2001-07-06 | 2003-10-30 | 삼성전자주식회사 | Junction device for planar lightwave circuit chip using optical sensor |
WO2004034007A2 (en) * | 2002-10-08 | 2004-04-22 | Council For The Central Laboratory Of The Research Councils | Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block |
WO2004088378A1 (en) * | 2003-03-31 | 2004-10-14 | Jsr Corporation | Optical waveguide chip and optical component comprising same |
JP2006312252A (en) * | 2005-05-06 | 2006-11-16 | Canon Inc | Inkjet recording head and method for fixing substrate |
JP2008003637A (en) * | 2004-03-31 | 2008-01-10 | Hitachi Chem Co Ltd | Optical element-binding structure and optical fiber structure |
JP2008199764A (en) * | 2007-02-13 | 2008-08-28 | Alphana Technology Kk | Motor, and disk drive motor |
CN100432723C (en) * | 2004-03-31 | 2008-11-12 | 日立化成工业株式会社 | Optical element coupling structure and optical fiber structure |
US7492995B2 (en) | 2004-03-31 | 2009-02-17 | Hitachi Chemical Company, Ltd. | Optical element combination structure and optical fiber structure |
JP2009053637A (en) * | 2007-08-29 | 2009-03-12 | Hirose Electric Co Ltd | Photoelectric composite connector |
US8218923B2 (en) | 2008-06-03 | 2012-07-10 | Hitachi Cable, Ltd. | Optical waveguide substrate with optical fiber fixation groove, process for its production, stamps for use in this production process, and opto-electronic hybrid integrated module including said optical waveguide substrate |
WO2016180071A1 (en) * | 2015-05-08 | 2016-11-17 | 中兴通讯股份有限公司 | Coupled connecting method for optical wave guide plate and optical fibers, optical wave guide plate and telecommunication transmission system |
CN112055824A (en) * | 2019-01-08 | 2020-12-08 | 住友电气工业株式会社 | Optical connector and method of making the same |
-
1998
- 1998-10-28 JP JP10307459A patent/JP2000131556A/en active Pending
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100403739B1 (en) * | 2001-07-06 | 2003-10-30 | 삼성전자주식회사 | Junction device for planar lightwave circuit chip using optical sensor |
WO2004034007A2 (en) * | 2002-10-08 | 2004-04-22 | Council For The Central Laboratory Of The Research Councils | Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block |
WO2004034007A3 (en) * | 2002-10-08 | 2004-07-29 | Council Cent Lab Res Councils | Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block |
CN100385276C (en) * | 2003-03-31 | 2008-04-30 | Jsr株式会社 | Optical waveguide chip and optical component comprising same |
US7366381B2 (en) | 2003-03-31 | 2008-04-29 | Jsr Corporation | Optical waveguide chip and optical component comprising same |
JP2004302243A (en) * | 2003-03-31 | 2004-10-28 | Koshin Kogaku Kogyo Kk | Optical waveguide chip and optical component including the same |
WO2004088378A1 (en) * | 2003-03-31 | 2004-10-14 | Jsr Corporation | Optical waveguide chip and optical component comprising same |
CN100432723C (en) * | 2004-03-31 | 2008-11-12 | 日立化成工业株式会社 | Optical element coupling structure and optical fiber structure |
JP2008003637A (en) * | 2004-03-31 | 2008-01-10 | Hitachi Chem Co Ltd | Optical element-binding structure and optical fiber structure |
US7492995B2 (en) | 2004-03-31 | 2009-02-17 | Hitachi Chemical Company, Ltd. | Optical element combination structure and optical fiber structure |
KR100936549B1 (en) * | 2004-03-31 | 2010-01-12 | 히다치 가세고교 가부시끼가이샤 | Optical element coupling structure and optical fiber structure |
JP2006312252A (en) * | 2005-05-06 | 2006-11-16 | Canon Inc | Inkjet recording head and method for fixing substrate |
JP4683622B2 (en) * | 2005-05-06 | 2011-05-18 | キヤノン株式会社 | Ink jet recording head and substrate fixing method |
JP2008199764A (en) * | 2007-02-13 | 2008-08-28 | Alphana Technology Kk | Motor, and disk drive motor |
JP2009053637A (en) * | 2007-08-29 | 2009-03-12 | Hirose Electric Co Ltd | Photoelectric composite connector |
US8218923B2 (en) | 2008-06-03 | 2012-07-10 | Hitachi Cable, Ltd. | Optical waveguide substrate with optical fiber fixation groove, process for its production, stamps for use in this production process, and opto-electronic hybrid integrated module including said optical waveguide substrate |
WO2016180071A1 (en) * | 2015-05-08 | 2016-11-17 | 中兴通讯股份有限公司 | Coupled connecting method for optical wave guide plate and optical fibers, optical wave guide plate and telecommunication transmission system |
CN112055824A (en) * | 2019-01-08 | 2020-12-08 | 住友电气工业株式会社 | Optical connector and method of making the same |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3631622B2 (en) | Connection structure and connection method between optical waveguide and optical fiber | |
US7625132B2 (en) | Packaging for a fiber-coupled optical device | |
US5208885A (en) | Optical fiber to strip waveguide interconnect | |
EP0933656A2 (en) | Optical waveguide component and a method of producing the same | |
US10302869B1 (en) | Optical interconnect attach to photonic device with partitioning adhesive function | |
US20070025663A1 (en) | Optical element combination structure and optical fiber structure | |
KR100926395B1 (en) | Optical waveguide film, method for manufacturing the film, optoelectrical hybrid film including the waveguide film, and electronic device | |
JPH09101431A (en) | How to connect waveguides | |
JP2005352453A (en) | Optical fiber component, optical waveguide module, and manufacturing method | |
JP2000131556A (en) | Connection structure and connection method between optical waveguide and optical fiber | |
JPH03125103A (en) | Coupling device between optical fiber and optical waveguide on substrate | |
JP2000002820A (en) | Optical waveguide element for optical wiring, and manufacture thereof | |
JPH11231163A (en) | Optical fiber connector and method of manufacturing the same | |
CN108780192A (en) | composite optical waveguide | |
US7620278B2 (en) | Optical waveguide device | |
KR20010022335A (en) | Planar optical device connector and method for making same | |
JP2000162467A (en) | Connection structure between optical waveguide and optical fiber | |
US20170059791A1 (en) | Method for coupling an optical fiber to an optical or optoelectronic component | |
JP7617474B2 (en) | Integrated optical device and method for manufacturing the same | |
JP2005345708A (en) | Optical waveguide film, its manufacturing method and splicing method | |
JP2004354947A (en) | Planar optical circuit component and its manufacturing method | |
JP4018852B2 (en) | Optical waveguide substrate | |
JPH05107425A (en) | Optical wave circuit incorporating optic fiber | |
JP4544083B2 (en) | Flexible optical waveguide | |
US20240402444A1 (en) | Optical module |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050308 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20050628 |