JP2000106079A - Plane display and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily fix a relative position relationship between two substrates opposed to each other in a desired condition. SOLUTION: Conical recesses 101a, 102a are respectively provided at four corners of the opposed faces of a glass substrate 101 and a front glass 102. In addition, a glass ball 151 being 0.3-0.5 mm in diameter is arranged so as to be held between the recesses 101a, 102a opposed to each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat display having a plurality of display pixels arranged in, for example, a two-dimensional matrix and a method of manufacturing the same.

[0002]

2. Description of the Related Art One form of a flat display is an FED (Field Emission Display). Less than,
A conventional FED will be described with reference to FIG. This FED has an electron emission portion 420 on a glass substrate 401.
Are formed in a matrix. The electron emission portion 420 includes a substrate electrode 421 made of aluminum formed on a glass substrate 401 and an electron emission electrode 423 formed on the substrate electrode 421 via an insulating film 422 formed to be thin to several nm. It is composed of

[0005] A windshield 402 is disposed to face the glass substrate 401. The glass substrate 401 and the windshield 402 are separated from each other by a predetermined distance around the periphery thereof by a spacer glass 403 arranged in a frame shape. Also, the spacer glass 4
03 denotes a glass substrate 401 and a windshield 402
Are fixed by frit glass 404 having a low melting point. Then, as shown in the perspective view of FIG. 4B, a vacuum container is formed in a rectangular parallelepiped shape by the glass substrate 401, the front glass 402, and the spacer glass 403 separating them.

In the vacuum vessel, a plurality of light emitting portions 440 are formed in a matrix on the surface of a windshield 402. The light emitting section 440 includes a transparent electrode 441 formed on the surface of the windshield 402 and a phosphor pattern 442 formed thereon.
In addition, the electron-emitting section 420 on the glass substrate 401 and the light-emitting section 440 on the front glass 402 side are arranged to face each other. The relative position between the electron emitting section 420 and the light emitting section 440 should be within 10 μm, preferably within several μm.

Here, the relative position is, for example, the positional relationship between the electron emitting section 420 and the light emitting section 440 when viewed from the normal direction of the plane of the windshield 402. When viewed from the normal direction, the state in which the center of the electron emitting section 420 and the center of the light emitting section 440 overlap is a state in which the positional shift is zero. As shown above, in general,
In a flat-panel display composed of two opposing substrates, it is important to accurately fix the relative positional relationship between the two substrates to a predetermined state.

[0006] For this alignment, for example, a reference mark and an alignment mark may be used. That is,
As shown in FIG.
Reference marks 501a and 501b are formed at locations. Further, as shown in FIG. 5B, alignment marks 502a and 502b are formed at two locations around the windshield 402. Then, as shown in FIG.
When the windshield 402 is arranged so as to face the first mark 1, the alignment marks 502 a and 5
02b, the reference marks 501a and 501b can be confirmed. At this time, it is only necessary that the center positions of the respective marks overlap each other and can be confirmed.

At this time, if the following relative positions are designed to be the same, the relative positions of the electron emitting section 420 and the light emitting section 440 will be in an overlapping state. That is, the glass substrate 4
01, the relation between the reference marks 501a and 501b and the electron emitting section 420, and the alignment marks 502a and 502b and the light emitting section 440 on the windshield 402.
Are two relative positional relationships. Then, the reference marks 501a, 501b and the alignment marks 502a, 50
2b, for example, the windshield 402
The position of the front glass 402 facing the glass substrate 401 may be controlled by optical image recognition from the side so that the state shown in FIG.

[0008]

However, there is a problem that the relative positional relationship between the glass substrate and the windshield is deviated even if the positioning is performed as described above. Even if the relative position between the glass substrate and the windshield is set to a predetermined state using the reference mark and the alignment mark, they are shifted at the stage of fusing them with frit glass across the spacer glass. This is because the frit glass is melted at the stage of bonding, and when the frit glass is melted, the relative positional relationship between the glass substrate, the spacer glass, and the windshield is not fixed.

Further, even if two opposing substrates can be fixed without using a frit glass or the like in a state where the relative positional relationship is not shifted, conventionally, alignment is performed by image recognition or the like as described above. I was For this reason,
There has been a problem that a complicated positioning operation is required for positioning, and an expensive positioning device is required, thereby increasing the cost of the process.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and enables the relative positional relationship between two opposing substrates to be easily fixed to a desired state. The purpose is to:

[0011]

A flat display according to the present invention comprises a plurality of first concave portions formed on a surface of a first substrate facing a second substrate, and a first concave portion formed on a second substrate. A plurality of second recesses formed on the surface facing the substrate so as to face the first recess, and a plurality of glass balls arranged so as to be sandwiched between the first recess and the second recess. I prepared it. With such a configuration, the relative positional relationship in the substrate plane direction between the first concave portion forming position of the first substrate and the second concave portion forming position of the second substrate matches.

Further, the flat display according to the present invention comprises:
A plurality of first banks formed on a surface of the first substrate facing the second substrate so as to surround all directions in the substrate plane direction, and a plurality of first banks formed on the surface of the second substrate facing the first substrate. A plurality of second banks formed so as to face the first recess so as to surround all directions in the plane of the substrate, and are sandwiched between the first bank recess and the second bank recess. And a plurality of glass spheres arranged in the same manner. With this configuration, the relative positional relationship between the first bank formation position of the first substrate and the second bank formation position of the second substrate in the plane direction of the substrate coincides with each other.

Further, the method of manufacturing a flat display according to the present invention includes a first step of preparing a first substrate, a transparent second substrate, and a plurality of glass spheres;
A second step of forming a plurality of concave portions of
A third step of forming a plurality of concave portions of the first and second concave portions;
The first substrate and the second
And a fourth step of arranging the substrate in opposition. Because of this, the first substrate
The first substrate and the second substrate are arranged such that the relative positional relationship between the concave portion forming position of the second substrate and the second concave portion forming position of the second substrate in the substrate plane direction coincides with each other.

Further, a method of manufacturing a flat display according to the present invention includes a first step of preparing a first substrate, a transparent second substrate, and a plurality of glass spheres; A second step of forming a plurality of first banks having a shape surrounding all directions in a direction, and a third step of forming a plurality of second banks having a shape surrounding all directions in a plane direction of the substrate on the second substrate And at least a fourth step of arranging the first substrate and the second substrate to face each other with the glass sphere sandwiched between the concave portion formed by the first bank and the concave portion formed by the second bank. . With this configuration, the relative position relationship between the first bank formation position of the first substrate and the second bank formation position of the second substrate in the substrate plane direction is matched.
A first substrate and a second substrate are arranged.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing a partial configuration of a flat display according to an embodiment of the present invention.
And a plan view (b). Here, the configuration of the FED will be described by way of example. In this FED, a plurality of electron-emitting portions 120 are formed in a matrix on a glass substrate (first substrate) 101. This electron emitting portion 120
Is a substrate electrode 121 made of aluminum formed on a glass substrate 101, and several n
and an electron emission electrode 123 formed via an insulating film 122 formed to be thin about m.

Further, a transparent front glass (second substrate) 102 is disposed opposite to the glass substrate 101. Then, the glass substrate 101 and the windshield 1
02 is separated by a predetermined distance around its periphery by a spacer glass 103 arranged in a frame shape. The spacer glass 103 is bonded and fixed to the glass substrate 101 and the front glass 102 with a frit glass 104 having a low melting point. The glass substrate 101, the front glass 102, and the spacer glass 103 form a vacuum container.

In the vacuum vessel, a plurality of light emitting portions 140 are formed in a matrix on the surface of the front glass 102 facing the glass substrate 101. The light emitting section 140 includes a transparent electrode 141 formed on the surface of the windshield 102 and a phosphor pattern 142 formed thereon. Further, the glass substrate 101
Electron emission part 1 on the surface facing windshield 102
20 and the light emitting section 140 on the side of the windshield 102 are arranged facing each other.

In this embodiment, conical concave portions 101a and 101a are respectively formed at four corners of the glass substrate 101 and the front glass 102 facing each other.
2a. In addition, it is sandwiched between the concave portions 101a and 102a arranged opposite to each other, and has a diameter of 0.3-0.
A glass ball 151 having a size of about 5 mm was arranged. Therefore, in the case of this embodiment, four glass balls 151 are provided. Also, the recesses 101a,
102a has a size such that the glass ball 151 does not enter more than half. By the way, these electron emitting portions 1
As described above, the relative position between 20 and the light emitting unit 140 should be within 10 μm, preferably within several μm. If the positional relationship is deviated, the light may be emitted not only to the light emitting unit 140 at the position where light emission is desired but also to the adjacent light emitting unit 140 not desired to emit light.

Here, the glass sphere 151 is
01 is in a state of being filled in the concave portion 101a. Therefore, the position of the glass ball 151 is fixed on the glass substrate 101. Similarly, the glass ball 15
1 is a concave portion 102 on the windshield 102 side.
a. Therefore, the glass ball 151
Is in a state where its position is fixed also on the windshield 102 side. Therefore, the glass substrate 101 and the front glass 102 are in a state where the relative positional relationship is fixed by the four glass balls 151.

It is easy to form the glass spheres 151 with their respective sizes aligned with an accuracy of about 0.1 μm. Glass spheres (glass beads) having a size variation of 0.1 μm or less can be easily obtained at low cost. That is, it is easy to prepare a plurality of glass spheres with almost no variation in size. On the other hand, the concave portions 101a and 102a can be formed with a positional accuracy of about 0.5 μm or less by using photolithography and etching techniques generally used for manufacturing a semiconductor device. Therefore, as described above, in this embodiment, the relative positional relationship between the glass substrate 101 and the windshield 102 can be fixed with a precision of approximately 1.2 μm. The distance between the glass substrate 101 and the windshield 102 is determined by the size of the glass ball 151 and the sizes and depths of the recesses 101a and 102a. As a result, according to the configuration of this embodiment, even when the area becomes larger, the distance between the glass substrate 101 and the windshield 102 can be uniform over the entire area.

By the way, in the above configuration, the concave portion 101
Although a and 102a are formed in a conical shape, they are not limited to this. The recesses 101a and 102a only need to be recesses having a size such that, for example, a glass sphere of about 0.3 to 0.5 mm does not enter more than half.
Therefore, the concave portions 101a and 102a have a rectangular parallelepiped shape,
Further, it may be formed in a cylindrical shape. Also, the recess 10
1a and 102a may be formed in a tetrahedral shape or a hemisphere.

As a method of fitting a glass ball, instead of forming a concave portion, ring-shaped banks 201a, 202a are fixed to four corners of a glass substrate 201 and a front glass 202 as shown in FIG. It may be formed. And the banks 201a, 202a
In the state where the glass ball 251 is fitted, the glass substrate 2
01 and the windshield 202, the spacer glass 2
What is necessary is just to fix with frit glass 204 through 03. The bank does not need to be formed in a circular ring shape in plan view. For example, up to one-third of the glass sphere used may be formed in the shape of a square that enters the recess of the bank.

Further, as shown in FIG.
Slit-shaped grooves 301a and 302a extending in directions perpendicular to each other may be formed at the four corners of the front glass 1 and the windshield 302, and the glass balls 315 may be arranged here. Here, FIG. 3B is a plan view seen from the plane of AA ′ in the cross-sectional view of FIG. Then, similarly to the above, the glass balls 35 are inserted into the grooves 301a and 302a.
The glass substrate 301 and the front glass 302 may be fixed with the frit glass 304 via the spacer glass 303 in a state in which 1 is fitted. in this way,
Since the positioning can be performed only by fitting the glass balls 351 into the grooves 301a and 302a, the work of fixing the glass substrate 301 and the windshield 302 becomes very easy.

In the above description, concave portions and grooves are provided at the four corners of the glass substrate and the windshield.
It is not limited to this. The recess may be provided, for example, at a location that does not hinder display, or may be provided at least at two locations. However, if the distance between the concave portions on one surface is made as long as possible, the accuracy of the alignment is improved. Further, in the above-described embodiment, for example, the formation of the concave portion is performed by using the known photolithography and etching technology.
It is not limited to this. It may be formed by machining, such as making a hole using a drill.

Although a glass substrate is used in the above description, the present invention is not limited to this, and a ceramic substrate may be used. In the above description, the FED has been described as an example, but the present invention is not limited to this. It is needless to say that the present invention can be applied to other types of flat-panel displays that perform a fluorescent display having a thermoelectron emission type electron emission portion using a filament.

Further, in the above description, a plurality of transparent electrodes (anodes) and sets of phosphor patterns and electron-emitting portions are arranged in a matrix in a single vacuum vessel. However, the present invention is not limited to this. A single vacuum vessel is provided with a set of anode and phosphor patterns and an electron-emitting portion. For example, a large number of flat-type displays (units) are arranged in a matrix so that a dot matrix display is possible. You may make it comprise a flat display with a screen.

As described above, in a case where a large screen is constructed by arranging a plurality of the units, for each unit,
When the distance between the glass substrate (first substrate) and the transparent windshield (second substrate) varies, a large screen 1 is formed.
The brightness of the pixels will vary. here,
As described above, if the glass substrate is separated from the windshield by sandwiching the glass sphere between the concave portions of the glass substrate and the windshield facing each other, the distance is evenly spread over a plurality of units. It is possible to do.

[0028]

As described above, according to the present invention, the plurality of first recesses formed on the opposite surface of the first substrate and the first recess are formed on the opposite surface of the second substrate. A plurality of second concave portions formed and arranged, and a plurality of glass balls arranged so as to be sandwiched between the first concave portion and the second concave portion are provided. Also, a plurality of first substrates formed on opposite surfaces of the first substrate so as to surround all directions in the substrate plane direction.
And a plurality of second banks formed so as to face the first recess on the facing surface of the second substrate so as to surround all directions in the plane direction of the substrate, and a recess formed by the first bank And the second
And a plurality of glass spheres arranged so as to be sandwiched between the recesses formed by the banks.

With this configuration, the relative positions of the first concave portion forming position of the first substrate and the second concave portion forming position of the second substrate in the plane direction of the substrate coincide with each other. . Similarly, the relative positional relationship in the substrate plane direction between the first bank formation position of the first substrate and the second bank formation position of the second substrate is the same. Therefore, according to the present invention, 2
This has an effect that the relative positional relationship between the substrates can be easily fixed to a desired state.

According to the present invention, the first substrate, the transparent second substrate, and the first glass ball are prepared.
And forming a plurality of first concave portions in the first substrate.
And a third step of forming a plurality of second concave portions in the second substrate.
And a fourth step of arranging the first substrate and the second substrate to face each other with the glass sphere sandwiched between the first concave portion and the second concave portion. Also, the first
A first step of preparing a substrate, a transparent second substrate, and a plurality of glass spheres, and a second step of forming a plurality of first banks on the first substrate so as to surround all directions in the plane direction of the substrate. And a third step of forming a plurality of second banks on the second substrate in a shape surrounding the substrate in all directions in the plane direction of the substrate, and a recess formed by the first bank and a recess formed by the second bank. At least a fourth step of arranging the first substrate and the second substrate to face each other with the sphere sandwiched therebetween is provided.

With the above arrangement, the first concave portion forming position of the first substrate and the second concave portion forming position of the second substrate are brought into a state where the relative positional relationship in the substrate plane direction coincides with the first concave portion forming position. And the second substrate are arranged. Similarly, the first substrate and the second substrate are placed in a state in which the relative positional relationship in the substrate plane direction between the first bank formation position of the first substrate and the second bank formation position of the second substrate matches. And two substrates. Therefore, according to the present invention, there is an effect that the relative positional relationship between the two substrates arranged opposite to each other can be easily fixed to a desired state.

[Brief description of the drawings]

FIGS. 1A and 1B are a cross-sectional view and a plan view showing a partial configuration of a flat display according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view for explaining another example of the embodiment of the present invention.

3A and 3B are a cross-sectional view and a plan view, respectively, for explaining another example of the embodiment of the present invention.

FIG. 4 is a cross-sectional view (a) and a perspective view (b) showing a partial configuration of a conventional flat display.

FIG. 5 is an explanatory diagram for explaining a reference mark and an alignment mark.

[Explanation of symbols]

101: glass substrate (first substrate), 101a: recess,
Reference numeral 102: front glass (second substrate), 102a: concave portion, 103: spacer glass, 104: frit glass, 120: electron emission portion, 121: substrate electrode, 122:
Insulating film, 123 ... electron emission electrode, 140 ... light emitting section, 14
1: transparent electrode, 142: phosphor pattern, 151: glass sphere.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification FI FI Theme Court ゛ (Reference) H01J 29/87 H01J 29/87 31/12 31/12 C (72) Inventor Junko Yoya Ise City, Mie Prefecture 700, Ueda-cho, Ise Denshi Kogyo Co., Ltd. (72) Inventor Kazuya Kinoshita 700, Ueda-cho, Ueno-cho, Ise-shi, Mie Pref. 700 F-term in Ise Electronics Industry Co., Ltd. (reference) 5C012 BB02 5C032 AA07 BB02 BB16 5C035 AA20 EE01 5C036 EE15 EF01 EF06 EG02 EH10 5G435 AA17 BB06 CC09 KK03

Claims (11)

[Claims] 1. A flat-panel display comprising a first substrate and a transparent second substrate disposed opposite to the first substrate and displaying on the second substrate side, wherein the first substrate A plurality of first recesses formed on a surface facing the second substrate; and a plurality of recesses formed on the surface of the second substrate facing the first substrate so as to face the first recess. A flat display comprising: a second concave portion; and a plurality of glass balls arranged so as to be sandwiched between the first concave portion and the second concave portion. 2. The flat display according to claim 1, wherein the first concave portion and the second concave portion are formed in slit-shaped grooves extending in different directions from each other. Type display. 3. The flat display according to claim 2, wherein the first concave portion and the second concave portion are formed in slit-like grooves extending in directions perpendicular to each other. Flat display. 4. The flat display according to claim 1, wherein the first concave portion and the second concave portion are formed at four corners of the first substrate and the second substrate, respectively. A flat display characterized by the following. 5. A flat-panel display comprising a first substrate and a transparent second substrate disposed opposite to the first substrate and displaying on the second substrate side, wherein: A plurality of first substrates formed on a surface facing the second substrate so as to surround all directions in the substrate plane direction.
And a plurality of second banks formed on the surface of the second substrate facing the first substrate so as to face the first concave portion and to surround the substrate in all directions in the plane direction of the substrate. And a plurality of glass balls arranged so as to be sandwiched between the concave portion formed by the first bank and the concave portion formed by the second bank. 6. The flat panel display according to claim 5, wherein the first bank and the second bank are formed at four corners of the first substrate and the second substrate, respectively. Flat display. 7. The flat panel display according to claim 1, wherein a vacuum container is formed by the first substrate and the second substrate, and the first substrate in the vacuum container is provided. An electron emission portion formed on a surface facing the second substrate on the upper side; and a light emission made of a phosphor formed on a surface facing the first substrate on the second substrate in the vacuum container. And a flat display. 8. The flat display according to claim 7, wherein the plurality of light-emitting units are arranged in a matrix. 9. The flat-panel display according to claim 7, wherein one light-emitting portion is formed. 10. A method of manufacturing a flat-panel display including a first substrate and a transparent second substrate disposed to face the first substrate, wherein a display is provided on the second substrate side. A first step of preparing a transparent second substrate and a plurality of glass spheres; a second step of forming a plurality of first concave portions in the first substrate; and a second step of forming a second concave portion in the second substrate. A third step of forming a plurality of concave portions; and disposing the first substrate and the second substrate to face each other with the glass sphere sandwiched between the first concave portion and the second concave portion. A method for manufacturing a flat panel display, comprising at least a fourth step. 11. A method of manufacturing a flat panel display comprising a first substrate and a transparent second substrate disposed to face the first substrate, wherein a display is provided on the second substrate side. A first step of preparing a transparent second substrate and a plurality of glass spheres, and a second step of forming a plurality of first banks on the first substrate so as to surround all directions in the plane direction of the substrate. A third step of forming a plurality of second banks in the second substrate in a shape surrounding the substrate in all directions in the plane direction of the second substrate; and a concave section formed by the first bank and a concave section formed by the second bank. And a fourth step of disposing the first substrate and the second substrate so as to face each other while the glass sphere is sandwiched therebetween.