JP2000099152A - Xy axes head positioning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a positioning with high acceleration/deceleration and high accuracy by providing an XY axes head positioning device light in weight and high in rigidity which can obtain high feedback controllability. SOLUTION: This device is provided with a head 30 installed on an XY plane guiding device 41 movable in the XY directions, X-axis table 1 installed on a straight move guiding device 6 straight-linearly movable in the X-axis direction and provided with a flat coil 34 so as to drive the head 30 in the X-axis direction, Y-axis table 2 installed on the straight move guiding device 6 enabled in straight-linearly movable in the Y-axis direction and provided with the flat coil 34 so as to drive the head 30 in the Y-axis direction, electromagnetic driving device with the flat coils 34 of the X-axis and Y-axis tables 1 and 2 as movable elements and link guiding device 40 for sliding the head 30 along with the end faces of the X-axis table 1 and Y-axis table 2, and the center of gravity of the said head 30, X-axis table 1, Y-axis table 2 and link guiding device 40 are arranged on almost the same plane.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY-axis head positioning device for moving and positioning a semiconductor bonder or the like in an XY direction, and requires high acceleration / deceleration and high-precision positioning of a wire bonder or the like. It can be applied to various devices.

[0002]

2. Description of the Related Art A conventional XY table for high acceleration / deceleration positioning is disclosed in Japanese Patent Application Laid-Open No. 9-123434. FIG. 8 is a side view thereof. 9 (a) and 9 (b)
FIG. 2 is a schematic configuration diagram in which a guide device having low rigidity is expressed by a spring in a plan view and a side view thereof. In each figure, 1 is an X-axis table, 2 is a Y-axis table, 3 is an output table,
4, 6, 9 are linear guide devices, 4R, 6R, 9R are guide rails, 4S, 6S, 9S are sliders, B1, B2 are bases, 20 is a linear motor, 22 is a mover, 23 is a stator, 25, 26 is a sensor, 25A and 26A are detection units,
25B and 26B are scales, and 30 is a head.

In the conventional apparatus shown in FIGS.
An output table 3 on which a head 30 to be carried is mounted is superposed on the axis table 1, and both tables 1 and 3 are linear guide devices 4 which are linear motion guide devices for transmitting X-axis force. Are connected via The linear guide device 4 includes a pair of linear guide devices,
The guide rail 4R is attached to the lower surface of the output table 3 as a linear motion guide device of the X-axis table 1 so as to be orthogonal to a pair of linear guide devices 6 arranged on the base B1 on the left and right sides.

On the other hand, the Y-axis table 2 has a base B1
It is supported by the linear guide device 6 on the raised base B2, and has the same height as the output table 3. The output table 3 and the Y-axis table 2 are connected via a linear guide device 9 which is a linear motion guide device for transmitting the force of the Y-axis, and a guide rail 9 of the linear guide device 9 is provided.
R is mounted on the Y-axis table 2 side, and the slider 9S is positioned at the center of the width of the output table 3. That is, Y
The driving force applied from the shaft table 2 to the output table 3 via the linear guide device 9 acts on the center of gravity of the output table 3 so that no pitching or yawing moment acts on the output table 3.

As a driving means of the X-axis table 1 and the Y-axis table 2, a ball screw type traveling device in which a servomotor and a screw shaft are connected to the servomotor via a coupling is generally used. In the conventional example shown in FIG. 8, the linear motor 20 having the structure in which the mover 23 and the stator 22 are opposed to each other below the two-axis tables 1 and 2 is eliminated in the conventional example shown in FIG. It is arranged. Reference numerals 25 and 26 denote sensors for detecting the position of the table, and drive a servomotor based on the position information.
Perform feedback control.

[0006]

The conventional XY table is configured as described above. Since the output table 3 is mounted on the X-axis table 1, as shown in FIG. 9B, the pitching moment is applied to the output table 3 and the X-axis table 1 by the motor thrust generated during acceleration / deceleration and the inertia of the head. Works. When the output table 3 is located at a position away from the drive axis of the X-axis table, a yawing moment acts on the X-axis table 1 and the output table 3 as shown in FIG. Further, since the linear motor 20 has a structure in which the mover 23 and the stator 22 are opposed to each other, a vertical suction force acts on the X-axis table 1 and the Y-axis table 2. The head 30 and the tables 1, 2,
In order to support the table 3, the tables 1, 2, 3 are heavy, and the linear guide devices 4, 6 are heavy guide devices with large withstand load. As a result, the inertia further increases, and a vicious cycle occurs in which a large moment is generated. In particular, since the inertia on the head side is large, a large yawing moment acts on the X-axis table 1 and the Y-axis table 2, and yaw vibration is generated on both the axis tables. In this vibration, the phase of the coil, which is the thrust generating portion, differs from the phase of the feedback sensor 25, so that the control system becomes unstable.
Further, when the control system becomes unstable and a high feedback gain cannot be obtained, there is a problem that the gantry vibration caused by the movement in the XY axis directions strongly affects the servo system. The degree of influence of the gantry vibration on the servo system can be expressed by linear motion inertia / (linear motion inertia + rotary inertia). In the case of the ball screw mechanism, the disturbance due to the gantry vibration is reduced because the ratio of the rotary inertia is large, but the linear motion inertia is reduced. There is a problem that the linear motor only has the same effect. Further, since the inertia of the movable portion is large, there is also a problem that the device is largely shaken by a reaction force generated at the time of high acceleration / deceleration.

An object of the present invention is to provide a conventional XY system as described above.
An object of the present invention is to solve the problems of the table and to provide a high-acceleration / deceleration and high-precision positioning by providing an XY-axis head positioning device that is lightweight and has high rigidity and high feedback controllability.

[0008]

According to a first aspect of the present invention, there is provided an XY-axis head positioning apparatus comprising: a head as an object to be conveyed installed in an XY plane guide device movable in the XY directions; A flat X-axis table mounted on a linearly movable X-axis guide device and having a flat driving coil for driving the head in the X-axis direction; and a Y-axis direction guide device capable of linearly moving in the Y-axis direction. A flat Y-axis table provided with a flat drive coil and driving the head in the Y-axis direction; an electromagnetic drive device using a drive coil of the X and Y-axis tables as a mover; and A connection guide device that slides along the end surfaces of the X-axis table and the Y-axis table, wherein the center of gravity of the head, the X-axis table, the Y-axis table, and the connection guide device are arranged on substantially the same plane. .

An XY-axis head positioning apparatus according to a second configuration of the present invention is characterized in that a slider of a connection guide device for connecting the head and the X-axis table is connected to a line passing through the center of gravity of the head and parallel to the X-axis and an end face of the head. And a slider of a connection guide device that connects the head and the Y-axis table is fixed near a crossing of a line passing through the center of gravity of the head and parallel to the Y-axis with the end face of the head.

An XY-axis head positioning apparatus according to a third aspect of the present invention is a XY-axis head positioning apparatus for connecting the head and the X-axis table between a slider of the connection guide device and the head, or connecting the head and the Y-axis table. A coupling whose rigidity in a thrust direction can be adjusted is attached between a slider of the connection guide device and the head.

An XY-axis head positioning device according to a fourth configuration of the present invention is such that the drive coil is wound in parallel with the moving direction, and a heat sink is directly attached to a winding portion that does not contribute to thrust. is there.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 The XY axis head positioning device of the present invention will be described with reference to FIGS.
FIG. 1 is a perspective view showing an XY-axis head positioning device according to an embodiment of the present invention, FIG. 2 is a side view seen from an arrow A in FIG. 1, FIG. 3 is a cross-sectional configuration view taken along line BB in FIG. FIG. 4 shows FIG.
5 is a sectional view taken along line CC of FIG. 2, FIG. 5 is a sectional view taken along line DD of FIG. 2, and FIGS. 6 (a) and 6 (b) are FIGS.
FIG. 7 is a schematic configuration diagram in which a guide device having low rigidity is expressed by a spring.
FIG. 2 is a sectional configuration diagram showing a coupling unit according to one embodiment of the present invention. In each figure, 1 is an X-axis table,
2 is a Y-axis table, 30 is a head, 6, 31, and 32 are linear motion guide devices, 6R, 31R, and 32R are guide rails, 6
S, 31S, 32S are sliders, 40 is head 30 and X
A connection guide device for slidably connecting the axis table 1 and the Y-axis table 2, 40R is a guide rail, 40S is a slider,
41 is an XY plane guide device, B1, B2, and B3 are bases,
26 is a position detecting unit, 26A is a detecting unit, 26B is a scale, 34 is a flat driving coil of an electromagnetic driving device (hereinafter simply referred to as flat coil), 35, 36, 35A, 36.
A, 35B and 36B are permanent magnets, 37 is a yoke, 38 is a heat sink, 39 is a coupling, 39A and 39B are U-shaped members, and 39C is a rubber flat plate.

In the apparatus of the present invention shown in FIGS. 1 to 7, the head 30 which is the object to be conveyed
It is attached via an XY plane guide device 41 for moving the Y plane, is constrained and supported in the vertical, pitching, and yawing directions, and can be displaced to any position on a plane including the X direction and the Y direction. . The XY plane guide device 41 includes:
For example, two pairs of linear motion guide devices 31 are provided on the base B1, and the two guide rails 31R are attached to the base B1 side in parallel with the Y axis. On the slider 31S, a guide rail 32R of the linear guide device 32 for guiding the movement in the X-axis direction is provided with a guide rail 31R in the Y-axis direction.
It is mounted in a direction perpendicular to the direction. The head 30, which is the object to be conveyed, is mounted on the slider 32S.

A flat X-axis table 1 is mounted on a base B2 via a linear motion guide device 6 adjacent to the head 30 which is a conveyed object in the X-axis direction. Two guide rails 6R are fixed on the base B2 in parallel in the X-axis direction. A total of four sliders 6S, two for each guide rail 6R, are mounted on the lower surface of the X-axis table 1 so as to be almost the same height as the flat X-axis table 1. The X-axis table is configured as thin as possible, including the flat coil 34 and the slider 6S. In this case, one end surface of the X-axis table 1 is opposed to one end surface of the head 30, and both are connected by a linear guide device. The guide rail 40R of the connection guide device 40 is fixed to the end surface on the X-axis table 1 side so as to have the same height as the flat plate of the X-axis table 1, and the slider 40S is fixed to the end surface of the head 30.

As a driving device of the X-axis table 1, an in-plane driving motor (voice coil motor) using a flat coil 34 is employed. The coil 34, which is a mover, is formed in a flat shape and is mounted on the surface of the flat X-axis table 1, and is wound in the flat coil 34 in a direction orthogonal to the moving direction to generate a thrust. Part and X
The flat plates of the shaft table 1 are on the same plane. It is desirable that the material of the X-axis table 1 be a non-magnetic material and have high rigidity.
In the present embodiment, for example, ceramic is used.

Below the flat coil 34, a permanent magnet 35 as a stator is fixed on a base B2 also serving as a yoke via a predetermined gap. A permanent magnet 36 and a gate-shaped yoke 37 are fixed on the base B2. The flat coil 34, which is a mover, generates a driving force only in the X-axis direction. Reference numeral 26 denotes an X-axis position detecting device that detects the position of the X-axis table 1, for example, as an optical sensor.
6A is mounted on the base B2, and the scale 26B is mounted on the end of the X-axis table 1. Although not shown, a drive system is provided with a control power supply (driver), a control device (servo controller), and the like.

On the other hand, a Y-axis table 2 having the same structure as the X-axis table 1 is attached to the base B3 next to the head 30 in the Y-axis direction.
They are arranged on substantially the same plane. The drive and control system is the same as that of the X-axis table 1.

As described above, the X-axis table 1 and the Y-axis table 2 are arranged on substantially the same plane, and the driving device is also an in-plane drive motor using the flat coil 34. In the axis table 2, the points of action and directions of all the acting forces are substantially on the same plane. Further, the X-axis table 1, the Y-axis table 2, the head 30, and the connection guide device 40 arrange their centers of gravity on the same plane as the above-mentioned plane. By doing so, no pitching moment or vertical force is generated in any of the X-axis table 1, the Y-axis table 2, and the head 30. Further, in such a configuration, the rigidity required for the X-axis table 1 and the Y-axis table 2 is only in the plane direction.
Rigidity other than the direction is not required, and the weight can be reduced.
Also, since no useless force is applied to the linear motion guide device 6,
It is possible to reduce the size and weight. Further, the life of the linear motion guide device 6 is extended. Similarly, the head 30 is downsized,
Weight reduction becomes possible.

Next, the connection guide device 40 for connecting the head 30 to the X-axis table 1 and the head 30 to the Y-axis table 2 will be described. The slider 40S that transmits the thrust in the X-axis direction to the head 30 passes through the center of gravity of the head 30,
The head 30 is attached at a position where a line parallel to the X axis and an end face of the head 30 intersect. The slider 40S that transmits the thrust in the Y-axis direction to the head 30 passes through the center of gravity of the head 30,
The head 30 is attached at a position where a line parallel to the Y axis and an end face of the head 30 intersect. That is, the driving force applied to the head 30 from the X-axis table 1 via the connection guide device 40,
The head 3 from the Y-axis table 2 via the connection guide device 40
The driving force applied to zero acts on the center of gravity of the head 30. As a result, no pitching and yawing moments are applied to the head 30. Also,
Since no useless force acts on the XY plane guide device 41 of the head 30, the size and weight can be significantly reduced. Further, as the inertia on the head side decreases, the yawing moment acting on the other X-axis table 1 or Y-axis table 2 when one axis is at the end of the movable range is reduced. Because the yawing support rigidity is improved,
The occurrence of yawing vibration of the two-axis tables 1 and 2, which makes the control system unstable, can be reduced. When the X-axis table 1 and the Y-axis table 2 interfere with each other, the heights of the bases B2 and B3 may be made different by the thickness of the plate-shaped table so as to avoid the interference. In this case, since the rail 32R is added to the inertial weight of the head 30 in the Y direction and the center of gravity is equivalently lowered, the Y-axis table may be disposed below the X-axis table.

In the embodiment shown in FIGS. 1 to 7, the head 30 and the slider 40S of the connection guide device 40 for connecting the head 30 and the X-axis table 1 and the head 30 and the Y-axis table 2 are connected. A coupling 39 whose rigidity can be adjusted is attached between the slider 40S and the head 30 of the connection guide device 40 to be connected. An enlarged view of the coupling 39 is shown in FIG. Slider 40
The U-shaped member 39A attached to the S side and the head 30
The rubber flat plate 39C is sandwiched between the U-shaped member 39B attached to the side thereof under a predetermined preload. By changing the area of the rubber plate 39C, the rigidity between the slider 40S and the head 30 can be adjusted. Thus, the resonance frequency can be adjusted so that the servo system does not become unstable due to the vibration in which the coupling guide device 40 transmitting the thrust to the head 30 becomes a node.

In the present embodiment shown in FIGS. 1 to 7, the flat coil 34 is provided with a heat sink 38 at a winding portion which is wound parallel to the moving direction and does not contribute to thrust.
Is directly attached. Therefore, high heat dissipation can be obtained.

[0022]

As described above, in the first configuration of the present invention, the head which is the object to be conveyed, which is installed in the XY plane guide device movable in the XY directions, is capable of linearly moving in the X-axis direction. A flat X-axis table installed on the X-axis direction guide device and having a flat drive coil for driving the head in the X-axis direction; and a flat X-axis table installed on the Y-axis direction guide device capable of linearly moving in the Y-axis direction. A flat Y-axis table that includes a drive coil and drives the head in the Y-axis direction; an electromagnetic drive device that uses a drive coil of the X and Y-axis tables as a mover; A connection guide device that slides along the end surface of the shaft table, and the center of gravity of the head, the X-axis table, the Y-axis table, and the connection guide device are arranged on substantially the same plane. Tables, and Pitching moment and in the vertical direction force does not occur in any of the head. Further, since the rigidity required for the X-axis table and the Y-axis table is only in the plane direction, rigidity other than the direction is unnecessary, and the weight can be reduced.

Further, in the second configuration of the present invention, the slider of the connection guide device for connecting the head and the X-axis table may be arranged so that a line passing through the center of gravity of the head and parallel to the X-axis intersects the end face of the head. And the slider of the connection guide device that connects the head and the Y-axis table is fixed near the intersection of a line passing through the center of gravity of the head and parallel to the Y-axis and the end face of the head. The moment is not applied, and the guide device can be reduced in weight. As a result, the X-axis table and the Y-axis table are reduced in thickness and weight, and the guide device is reduced in size, weight, and life. In addition, the occurrence of vibration that makes the control system unstable due to low inertia can be reduced, and high controllability can be obtained.

According to a third aspect of the present invention, there is provided a connecting and guiding apparatus for connecting the head to the X-axis table between the slider and the head of the connecting and guiding apparatus for connecting the head to the X-axis table. Since couplings whose rigidity in the thrust direction can be adjusted are mounted between the slider and the head, the resonance frequency can be adjusted so that the vibration which becomes a node of the connection guide device does not make the servo system unstable.

Further, in the fourth configuration of the present invention, the drive coil is wound in parallel with the moving direction, and the heat sink is directly attached to the winding portion that does not contribute to the thrust. can get.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an XY-axis head positioning device according to an embodiment of the present invention.

FIG. 2 is a side view as viewed from an arrow A in FIG.

FIG. 3 is a sectional configuration view taken along line BB of FIG. 2;

FIG. 4 is a sectional configuration view taken along line CC of FIG. 2;

FIG. 5 is a cross-sectional configuration diagram taken along line DD of FIG. 2;

FIG. 6 is a schematic configuration diagram in which a guide device having low rigidity is represented by a spring in FIGS. 3 and 4;

FIG. 7 is a cross-sectional configuration diagram illustrating a coupling unit according to an embodiment of the present invention.

FIG. 8 is a side view showing a conventional XY-axis head positioning device.

FIG. 9 is a schematic configuration diagram in which a guide device having low rigidity in a conventional XY-axis head positioning device is represented by a spring.

[Explanation of symbols]

1 X axis table, 2 Y axis table, 3 output tables, 4, 6, 9, 31, 32 Linear motion guide device, 4R, 6
R, 9R, 31R, 32R, 40R Guide rail, 4
S, 6S, 9S, 31S, 32S, 40S slider,
40 connection guide device, 41 XY plane guide device, B1,
B2, B3 base, 20 linear motor, 22 mover, 23 stator, 25, 26 position detector, 25A,
26A detector, 25B, 26B scale, 30 heads, 34 flat coil, 35, 36, 35A, 36
A, 35B, 36B permanent magnet, 37 yoke, 38
Heat sink, 39 coupling, 39A, 39B
U-shaped member, 39C rubber flat plate.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yasuki Kimura 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Inside Mitsubishi Electric Corporation (72) Inventor Masamitsu Okamura 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F term in Mitsubishi Electric Corporation (reference) 5F044 BB19 5H303 AA06 BB02 BB07 BB12 CC01 DD04 EE03 EE07 FF06 GG11

Claims (4)

[Claims] 1. A head, which is an object to be conveyed, mounted on an XY plane guide device movable in the XY directions, and a flat drive coil mounted on an X-axis direction guide device capable of linearly moving in the X-axis direction. Flat X that drives the head in the X-axis direction
A flat Y-axis table installed on a Y-axis direction guide device capable of linearly moving in the Y-axis direction and having a flat driving coil to drive the head in the Y-axis direction;
An electromagnetic drive device using a drive coil of a Y-axis table as a mover, and a connection guide device for sliding the head along the end surfaces of the X-axis table and the Y-axis table, wherein the center of gravity of the head and the X-axis table are provided. An XY-axis head positioning device in which a Y-axis table and a connection guide device are arranged on substantially the same plane. 2. A head of a connection guide device for connecting the head and the X-axis table, the slider being fixed near a crossing of a line passing through the center of gravity of the head and parallel to the X-axis with an end surface of the head, the head and the Y-axis table being fixed. 2. The XY-axis head positioning device according to claim 1, wherein a slider of the connection guide device for connecting the head and the head is fixed at a position where a line passing through the center of gravity of the head and parallel to the Y-axis intersects an end face of the head. 3. A slider between the head and the slider of the connection guide device for connecting the head and the X-axis table, or between a slider and the head of the connection guide device for connecting the head and the Y-axis table, respectively. 2. The XY according to claim 1, further comprising a coupling capable of adjusting the rigidity in the thrust direction.
Shaft head positioning device. 4. The XY-axis head positioning device according to claim 1, wherein the drive coil is wound in parallel with the moving direction, and a heat sink is directly attached to a winding portion that does not contribute to thrust.