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JP2000097909A - Dust monitor - Google Patents

Dust monitor

Info

Publication number
JP2000097909A
JP2000097909A JP10268127A JP26812798A JP2000097909A JP 2000097909 A JP2000097909 A JP 2000097909A JP 10268127 A JP10268127 A JP 10268127A JP 26812798 A JP26812798 A JP 26812798A JP 2000097909 A JP2000097909 A JP 2000097909A
Authority
JP
Japan
Prior art keywords
probe
dust
dust monitor
gas
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10268127A
Other languages
Japanese (ja)
Other versions
JP3605820B2 (en
Inventor
Koji Omura
耕治 大村
Hiroshi Nishino
廣 西野
Shozo Aoyanagi
省三 青柳
Mitsuhiko Sasaki
光彦 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP26812798A priority Critical patent/JP3605820B2/en
Publication of JP2000097909A publication Critical patent/JP2000097909A/en
Application granted granted Critical
Publication of JP3605820B2 publication Critical patent/JP3605820B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a dust monitor which can reduce the costs for purchasing a flow velocity sensor and for setup man-hours, and little in error in measurement while preventing a probe from being deformed when the probe is set horizontally at a high-temperature flow passage. SOLUTION: In the dust monitor, a probe 1 is inserted into a gas flowing a flow passage, a frictional electricity generated when dusts included in the gas collide with the surface of the probe 1 is detected, and the concentration change of dusts in the gas is detected. In this case, a means for measuring a flow velocity of the gas is added to the probe 1. Moreover, a material of the probe 1 is a conductive ceramic, or an insulating ceramic which is covered with a conductive metal thereover.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、気体に含まれるダ
スト量の変化を検出するダストモニタに関し、ダストモ
ニタを構成するフローブに流速測定手段を付加したダス
トモニタに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust monitor for detecting a change in the amount of dust contained in a gas, and more particularly to a dust monitor in which a flow rate measuring means is added to a flow forming the dust monitor.

【0002】[0002]

【従来の技術】例えば火力発電所の煙道(煙突)や、セ
メント工場の集塵装置,粉体の移送装置等におけるダス
ト(粒子)の量を測定する手段として従来は光学式のも
のが用いられている。しかし光学式では透明窓を介して
光の授受を行っているので窓の透明性を保つためのメン
テナンス周期が短い等で問題があった。
2. Description of the Related Art Conventionally, an optical type is used as a means for measuring the amount of dust (particles) in a flue (chimney) of a thermal power plant, a dust collecting device in a cement plant, a powder transferring device, and the like. Have been. However, in the optical system, since light is transmitted and received through a transparent window, there is a problem such as a short maintenance cycle for maintaining the transparency of the window.

【0003】近年これに変わるものとして気体(空気)
の流路に導電性を有するプローブを差し込んで、気体に
含まれる粒子(ダスト)がプローブに衝突して生じる静
電気を検出する方式が開発され、図6に示すようなプロ
ーブ1,変換器2からなるダストモニタ10が市販され
ている。
[0003] In recent years, gas (air) has been used as an alternative.
A method has been developed in which a probe having conductivity is inserted into the flow path of the probe to detect static electricity generated when particles (dust) contained in gas collide with the probe, and the probe 1 and the converter 2 shown in FIG. A dust monitor 10 is commercially available.

【0004】[0004]

【発明が解決しようとする課題】このような、プローブ
式では測定条件として一定の流速が必要であり、また、
流速の変化に応じた出力補正が必要である。そのため、
図6に示すように流路11に取付けたダストモニタ10
の近傍(上流若しくは下流)に流速計2を設け、この流
速計12の出力によりダストモニタ10の出力補正を行
っていた。ていた。
In such a probe system, a constant flow rate is required as a measurement condition.
Output correction according to the change in flow velocity is required. for that reason,
As shown in FIG. 6, the dust monitor 10 attached to the flow path 11
Is provided near (upstream or downstream), and the output of the current monitor 12 is used to correct the output of the dust monitor 10. I was

【0005】しかしながら流速計を別に設けるのは流速
計の購入や設置工数でコスト高となり、また、設置場所
も考慮しなければならない等の問題があった。また、プ
ローブを例えば煙道等に設置する場合には高温、酸化雰
囲気となるため導電性と共に耐酸化性も必要とされ、プ
ローブの材質として高価な超合金、ハステロイ、インコ
ネル等の特殊金属を用いる必要があった。
[0005] However, the provision of a separate current meter increases the cost due to the purchase of the current meter and the number of installation steps, and also requires consideration of the installation location. When the probe is installed in a flue or the like, for example, it is required to have oxidation resistance as well as conductivity because it becomes a high-temperature, oxidizing atmosphere, and a special metal such as an expensive superalloy, Hastelloy, or Inconel is used as a material for the probe. Needed.

【0006】更に垂直の煙道に対して水平にプローブを
取付ける場合には、気体の温度が高い(数百度)と熱と
自重による永久変形が生じダストモニタの取外しができ
なくなったり出力に誤差が発生するという問題があっ
た。本発明は上記問題点を解決するためになされたもの
で流速計の別設置によるコスト高を押えるとともに、高
温気体中にプローブを水平に取付けたときの測定誤差を
低減したダストモニタを提供することを目的とする。
Further, when the probe is mounted horizontally on a vertical flue, if the temperature of the gas is high (hundreds of degrees), permanent deformation due to heat and its own weight occurs, making it impossible to remove the dust monitor or causing errors in the output. There was a problem that occurred. SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and provides a dust monitor which can suppress the cost increase by separately installing a current meter and reduce a measurement error when a probe is horizontally mounted in a high-temperature gas. With the goal.

【0007】[0007]

【課題を解決するための手段】このような目的を達成す
るために本発明では、請求項1においては、流路を流れ
る気体中にプローブを挿入し、気体に含まれるダストが
前記プローブの表面に衝突することによって生ずる摩擦
電気を検出して気体中のダストの濃度変化を感知するダ
ストモニタにおいて、前記プローブに気体の流速を測定
する流速計測手段を付加したことを特徴とする。
In order to achieve the above object, according to the present invention, a probe is inserted into a gas flowing through a flow path, and dust contained in the gas is removed from the surface of the probe. In a dust monitor for detecting a change in the concentration of dust in a gas by detecting triboelectricity generated by colliding with a gas, a flow velocity measuring means for measuring a gas flow velocity is added to the probe.

【0008】請求項2においては、請求項1記載のダス
トモニタにおいて、流速計測はカルマン渦によって生ず
るプローブの撓みを検出することにより行うことを特徴
とする。請求項3においては、請求項2記載のダストモ
ニタにおいて、撓みの検出はプローブの根元付近に設け
たひずみ検出素子により行うことを特徴とする。
According to a second aspect of the present invention, in the dust monitor according to the first aspect, the flow velocity is measured by detecting a deflection of the probe caused by the Karman vortex. According to a third aspect of the present invention, in the dust monitor according to the second aspect, the deflection is detected by a strain detecting element provided near the base of the probe.

【0009】請求項4においては、請求項2記載のダス
トモニタにおいて、流量計測はカルマン渦によって生ず
るプローブのまわりの圧力変化を検出することにより行
うことを特徴とする。請求項5においては、請求項4記
載のダストモニタにおいて、圧力変化の検出はプローブ
の中程に設けた感圧素子または圧力センサにより行うこ
とを特徴とする。
According to a fourth aspect of the present invention, in the dust monitor according to the second aspect, the flow rate measurement is performed by detecting a pressure change around the probe caused by the Karman vortex. According to a fifth aspect of the present invention, in the dust monitor according to the fourth aspect, the pressure change is detected by a pressure-sensitive element or a pressure sensor provided in the middle of the probe.

【0010】請求項6においては、請求項5記載のダス
トモニタにおいて、感圧素子は対向する2面に設けら
れ、差圧を検出するようにしたことを特徴とする。請求
項7においては、流路を流れる気体中にプローブを挿入
し、気体に含まれるダストが前記プローブの表面に衝突
することによって生ずる摩擦電気を検出して気体中のダ
ストの濃度変化を感知するダストモニタにおいて、前記
プローブとしてセラミックを用いたことを特徴とする。
According to a sixth aspect of the present invention, in the dust monitor according to the fifth aspect, the pressure sensitive elements are provided on two opposing surfaces to detect a differential pressure. In claim 7, the probe is inserted into the gas flowing through the flow path, and the change in the concentration of the dust in the gas is detected by detecting the triboelectricity generated by the dust contained in the gas colliding with the surface of the probe. In the dust monitor, ceramic is used as the probe.

【0011】請求項8においては、請求項7記載のダス
トモニタにおいて、前記プローブとして導電性セラミッ
クを用いたことを特徴とする。請求項9においては、請
求項7記載のダストモニタにおいて、前記プローブとし
て絶縁性セラミックを用い表面を導電性金属で被覆した
ことを特徴とする。
According to an eighth aspect of the present invention, in the dust monitor according to the seventh aspect, a conductive ceramic is used as the probe. According to a ninth aspect of the present invention, in the dust monitor according to the seventh aspect, an insulating ceramic is used as the probe and the surface is coated with a conductive metal.

【0012】[0012]

【発明の実施の形態】以下図面を用いて本発明を詳しく
説明する。図1は本発明の請求項1〜3に係る実施の形
態の1例を示すもので、ダストモニタのプローブ1が図示
しない流路に挿入され、図の手前から後方に向かってダ
ストを含む気体が流れているものとする。その場合、ダ
ストモニタは仕様に従って気体に含まれるダストの量を
測定している。同時にプローブの後方には気体の流速に
応じたカルマン渦が生じており、プローブ1はカルマン
渦によって生じる矢印Aで示す方向に交互に力を受けて
いる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 shows an example of an embodiment according to claims 1 to 3 of the present invention, wherein a probe 1 of a dust monitor is inserted into a flow path (not shown), and a gas containing dust from the front to the rear of the figure. Is flowing. In that case, the dust monitor measures the amount of dust contained in the gas according to the specification. At the same time, a Karman vortex corresponding to the gas flow velocity is generated behind the probe, and the probe 1 is alternately subjected to a force in a direction indicated by an arrow A generated by the Karman vortex.

【0013】このプローブ1の根元付近には例えばスト
レンゲージや圧電セラミック等のひずみ検出素子3が取
付けられており、カルマン渦により交互に生ずる力を電
気信号に変換し周波数として出力する。
A strain detecting element 3, such as a strain gauge or a piezoelectric ceramic, is attached near the base of the probe 1, and converts forces alternately generated by Karman vortices into electric signals and outputs them as frequencies.

【0014】周波数Fと流速Vには以下のような関係が
成立することが知られている。 F=St・V/d St:ストローハル数(比例定数) d:電極の直径 この周波数信号は公知の処理方法により処理されてダス
トモニタ出力の補正信号として用いられる。なお、ひず
み検出素子3は撓みの一番大きな根元付近に対向して設
けるものとする。
It is known that the following relationship is established between the frequency F and the flow velocity V. F = St.V / d St: Strouhal number (proportional constant) d: Electrode diameter This frequency signal is processed by a known processing method and used as a correction signal of the dust monitor output. Note that the strain detecting element 3 is provided so as to face the vicinity of the root having the largest deflection.

【0015】図2は本発明の請求項4〜6に係る実施の
形態の1例を示すもので、ここでは図1に示すプローブ
の中ほどに例えば公知の感圧素子やダイアフラム式圧力
センサ4,4aを設けている。なお、この例においても
気体は手前から後方に向かって流れており、プローブの
後方にカルマン渦が生じている。プローブ1はカルマン
渦によって矢印Aで示す方向に交互に力を受けており、
ここでは、周囲に発生する圧力を2つのセンサ4,4a
により差動的に検出している。
FIG. 2 shows an example of an embodiment according to claims 4 to 6 of the present invention. Here, for example, a known pressure-sensitive element or a diaphragm type pressure sensor 4 is provided in the middle of the probe shown in FIG. , 4a. Also in this example, the gas flows from the front to the rear, and a Karman vortex is generated behind the probe. Probe 1 receives force alternately in the direction shown by arrow A by Karman vortex,
Here, the pressure generated around the two sensors 4, 4a
, And differentially detected.

【0016】この2つのセンサ4,4aにより得られる
圧力に対応した信号は周波数信号に変換され上述と同様
公知の処理方法により処理されてダストモニタ出力の補
正信号として用いられる。
A signal corresponding to the pressure obtained by the two sensors 4 and 4a is converted into a frequency signal, processed by a known processing method as described above, and used as a correction signal of the dust monitor output.

【0017】図3は本発明の請求項7に係る実施の形態
の1例を示すもので、この例においてはプローブを例え
ば炭化珪素(SiC)等のような導電性セラミック1a
で形成している。
FIG. 3 shows an example of an embodiment according to claim 7 of the present invention. In this example, the probe is made of a conductive ceramic 1a such as silicon carbide (SiC).
It is formed by.

【0018】図4及び図5は本発明の請求項8に係る実
施の形態の1例を示すもので、図4に示すものは、プロ
ーブを絶縁性セラミック1bで形成し、その表面に蒸着
などの方法により導電性金属1cを付着させたもの、図
5に示すものはプローブを絶縁性セラミック1bで形成
し、その上に導電性金属パイプ1dを被せたものであ
る。
FIGS. 4 and 5 show an example of an embodiment according to claim 8 of the present invention. In the embodiment shown in FIG. 4, a probe is formed of an insulating ceramic 1b, and the probe is formed on its surface by vapor deposition or the like. The method shown in FIG. 5 in which the conductive metal 1c is adhered by the above method is a probe formed of an insulating ceramic 1b, and a conductive metal pipe 1d is put thereon.

【0019】図3〜図5に示すようにプローブ自身を導
電性セラミックで作製したり、プローブの本体は絶縁性
セラミックスで形成し、その上を金属で被覆することに
より高温に強いプローブとなる。その結果、垂直な流路
に水平に取付けたプローブが高温に晒されても自重によ
る変形の生じにくいプローブを実現することができる。
As shown in FIGS. 3 to 5, the probe itself is made of conductive ceramic, or the main body of the probe is made of insulating ceramic, and the probe is covered with metal to provide a probe resistant to high temperatures. As a result, it is possible to realize a probe that is less likely to be deformed by its own weight even when a probe mounted horizontally in a vertical flow path is exposed to high temperatures.

【0020】本発明の以上の説明は、説明および例示を
目的として特定の好適な実施例を示したに過ぎない。し
たがって本発明はその本質から逸脱せずに多くの変更、
変形をなし得ることは当業者に明らかである。特許請求
の範囲の欄の記載により定義される本発明の範囲は、そ
の範囲内の変更、変形を包含するものとする。
The foregoing description of the present invention has been presented by way of illustration and example only of certain preferred embodiments. Accordingly, the present invention is subject to many modifications, without departing from its essence,
It will be apparent to those skilled in the art that variations can be made. The scope of the present invention defined by the description in the claims section is intended to cover alterations and modifications within the scope.

【0021】[0021]

【発明の効果】以上説明したように本発明によれば、流
路を流れる気体中にプローブを挿入し、気体に含まれる
ダストが前記プローブの表面に衝突することによって生
ずる摩擦電気を検出して気体中のダストの濃度変化を検
出するダストモニタにおいて、前記プローブに気体の流
速を測定する手段を付加したので、流速計の購入や設置
工数のコスト削減を図るできことができ、また、プロー
ブの材質を導電性セラミックとしたり、プローブを絶縁
性セラミックとしその上を導電性金属で被覆するように
したので、例えば煙道等に水平に設置する場合に生じる
プローブの変形を防止して測定誤差の少ないダストモニ
タを実現することができる。
As described above, according to the present invention, a probe is inserted into a gas flowing through a flow path, and triboelectricity generated by collision of dust contained in the gas with the surface of the probe is detected. In a dust monitor that detects a change in the concentration of dust in gas, a means for measuring the gas flow velocity is added to the probe, so that it is possible to reduce the cost of purchasing and installing a current meter, Since the material is made of conductive ceramic or the probe is made of insulating ceramic and covered with conductive metal, it is possible to prevent the deformation of the probe that occurs when it is installed horizontally in a flue, etc. It is possible to realize a small dust monitor.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係るダストモニタの実施の形態の一例
を示す構成図である。
FIG. 1 is a configuration diagram showing an example of an embodiment of a dust monitor according to the present invention.

【図2】本発明に係る他の実施例を示す説明図である。FIG. 2 is an explanatory view showing another embodiment according to the present invention.

【図3】本発明に係る他の実施例を示す説明図である。FIG. 3 is an explanatory view showing another embodiment according to the present invention.

【図4】本発明に係る他の実施例を示す説明図である。FIG. 4 is an explanatory diagram showing another embodiment according to the present invention.

【図5】本発明に係る他の実施例を示す説明図である。FIG. 5 is an explanatory view showing another embodiment according to the present invention.

【図6】従来例を示す構成説明図である。FIG. 6 is a configuration explanatory view showing a conventional example.

【符号の説明】[Explanation of symbols]

1 プローブ 2 変換器 3 感圧素子 4 圧力センサ 10 ダストモニタ 11 流路 12 流速計 DESCRIPTION OF SYMBOLS 1 Probe 2 Transducer 3 Pressure sensitive element 4 Pressure sensor 10 Dust monitor 11 Flow path 12 Current meter

───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐々木 光彦 東京都武蔵野市中町2丁目9番32号 横河 電機株式会社内 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Mitsuhiko Sasaki 2-9-132 Nakamachi, Musashino City, Tokyo Inside Yokogawa Electric Corporation

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】流路を流れる気体中にプローブを挿入し、
気体に含まれるダストが前記プローブの表面に衝突する
ことによって生ずる摩擦電気を検出して気体中のダスト
の濃度変化を感知するダストモニタにおいて、前記プロ
ーブに気体の流速を測定する流速計測手段を付加したこ
とを特徴とするダストモニタ。
A probe is inserted into a gas flowing through a flow path,
In a dust monitor that detects a change in the concentration of dust in a gas by detecting triboelectricity caused by dust contained in the gas colliding with the surface of the probe, a flow velocity measuring means for measuring the flow velocity of the gas is added to the probe. Dust monitor characterized by:
【請求項2】流速計測はカルマン渦によって生ずるプロ
ーブの撓みを検出することにより行うことを特徴とする
請求項1記載のダストモニタ。
2. The dust monitor according to claim 1, wherein the flow velocity measurement is performed by detecting a deflection of the probe caused by the Karman vortex.
【請求項3】撓みの検出はプローブの根元付近に設けた
ひずみ検出素子により行うことを特徴とする請求項2記
載のダストモニタ。
3. The dust monitor according to claim 2, wherein the deflection is detected by a strain detecting element provided near a root of the probe.
【請求項4】流量計測はカルマン渦によって生ずるプロ
ーブのまわりの圧力変化を検出することにより行うこと
を特徴とする請求項1記載のダストモニタ。
4. The dust monitor according to claim 1, wherein the flow rate measurement is performed by detecting a pressure change around the probe caused by the Karman vortex.
【請求項5】圧力変化の検出はプローブの中程に設けた
感圧素子または圧力センサにより行うことを特徴とする
請求項4記載のダストモニタ。
5. The dust monitor according to claim 4, wherein the pressure change is detected by a pressure-sensitive element or a pressure sensor provided in the middle of the probe.
【請求項6】感圧素子は対向する2面に設けられ、差圧
を検出するようにしたことを特徴とする請求項5記載の
ダストモニタ。
6. The dust monitor according to claim 5, wherein the pressure-sensitive elements are provided on two opposing surfaces to detect a differential pressure.
【請求項7】流路を流れる気体中にプローブを挿入し、
気体に含まれるダストが前記プローブの表面に衝突する
ことによって生ずる摩擦電気を検出して気体中のダスト
の濃度変化を感知するダストモニタにおいて、前記プロ
ーブとしてセラミックを用いたことを特徴とするダスト
モニタ。
7. A probe is inserted into a gas flowing through a flow path,
A dust monitor in which a ceramic is used as the probe in a dust monitor for detecting a change in the concentration of dust in a gas by detecting triboelectricity generated by dust contained in a gas colliding with the surface of the probe. .
【請求項8】前記プローブとして導電性セラミックを用
いたことを特徴とする請求項7記載のダストモニタ。
8. The dust monitor according to claim 7, wherein a conductive ceramic is used as said probe.
【請求項9】前記プローブとして絶縁性セラミックを用
い表面を導電性金属で被覆したことを特徴とする請求項
7記載のダストモニタ。
9. The dust monitor according to claim 7, wherein an insulating ceramic is used as said probe and the surface is covered with a conductive metal.
JP26812798A 1998-09-22 1998-09-22 Dust monitor Expired - Fee Related JP3605820B2 (en)

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Application Number Priority Date Filing Date Title
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JP2000097909A true JP2000097909A (en) 2000-04-07
JP3605820B2 JP3605820B2 (en) 2004-12-22

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003022778A (en) * 2001-06-28 2003-01-24 Agilent Technol Inc Ionization room which has tolerance to reactive sample
JP2010190609A (en) * 2009-02-16 2010-09-02 Kurita Water Ind Ltd Method and apparatus for measuring high temperature deposit, and method of suppressing high temperature deposit
JP2011525606A (en) * 2008-06-27 2011-09-22 プロメコン・プロツェス−ウント・メステヒニク・コンラーツ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング Apparatus and method for controlling the fuel to air ratio during coal burning in coal power plant combustion equipment.
KR101180573B1 (en) 2010-02-25 2012-09-06 연세대학교 산학협력단 Multi function sensor using piezoelectric material and monitering system using the same and method for setting up the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003022778A (en) * 2001-06-28 2003-01-24 Agilent Technol Inc Ionization room which has tolerance to reactive sample
JP2011525606A (en) * 2008-06-27 2011-09-22 プロメコン・プロツェス−ウント・メステヒニク・コンラーツ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング Apparatus and method for controlling the fuel to air ratio during coal burning in coal power plant combustion equipment.
JP2010190609A (en) * 2009-02-16 2010-09-02 Kurita Water Ind Ltd Method and apparatus for measuring high temperature deposit, and method of suppressing high temperature deposit
KR101180573B1 (en) 2010-02-25 2012-09-06 연세대학교 산학협력단 Multi function sensor using piezoelectric material and monitering system using the same and method for setting up the same

Also Published As

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