JP2000091409A - Precision substrate storage container and method of assembling the same - Google Patents

Abstract

(57) Abstract: Provided is a precision substrate storage container capable of reducing a dimensional error at the time of assembling components of a container body and improving the precision of supporting a precision substrate, and a method of assembling the same. SOLUTION: The apparatus includes a component group of a container main body 1 for storing a wafer, and positioning attachment means 37 for coupling one component of the component group and another component combined therewith. A component group is a pod 2 for wafer storage,
A robotic handle screwed to the ceiling of the pod 2, a bottom plate 4 screwed to the bottom of the pod 2, a plurality of positioning tools screwed to the bottom plate 4, and a pair of screwed screws inside the pod 2 It comprises a column and a rear retainer screwed into the pod 2. Further, the positioning attachment means 37 is provided with a fitting boss 38 formed on the pod 2,
And a fitting projection 39 formed on the bottom plate 4 and the like. A guide taper surface 41 is formed on the fitting inner peripheral surface of the fitting boss 38, and a positioning taper surface 42 that is in surface contact with the guide taper surface 41 is formed on the fitting protrusion 39.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the storage, storage, and storage of precision substrates such as semiconductor wafers and mask glass.
TECHNICAL FIELD The present invention relates to a precision substrate storage container used for transporting, transporting, positioning connection to a processing device, and the like, and an assembling method thereof. More specifically, the present invention relates to an improvement in an attachment structure of a component group constituting a container body and an assembling method.

[0002]

2. Description of the Related Art Due to severe price competition for semiconductor devices, precision substrates such as semiconductor wafers (hereinafter abbreviated as "wafers") and mask glass related to the manufacture of semiconductor devices are designed to reduce the cost by improving the yield. As represented by wafers and the like, the increase in diameter is being promoted at a rapid pace. At the same time, in recent years, semiconductor circuits have become more and more finely structured, so that not only manufacturing plants that process precision substrates, but also precision substrate storage containers used for transporting and transporting precision substrates are highly clean. A state is being requested. For example, the design rule of the circuit formed on the wafer is 0.25 μm
The shift to 0.18 μm is being considered, and a clean room of a semiconductor manufacturing plant is required to be of class 1 or higher.

The quality level of a wafer used for manufacturing a semiconductor device is required to be 20 or less particles having a diameter of 0.17 μm or less and a metal contamination of 1 × 10 ¹⁰ / cm ² or less in a 200 mm diameter wafer. ing.

As a method for satisfying the above requirements, a plurality of processes required for processing a precision substrate are set in a highly clean environment,
A method (SMIF) of transporting and transporting a sealed precision substrate storage container between the plurality of clean environments has been proposed and has become influential. Under such circumstances, precision substrate storage containers capable of storing and transporting precision substrates without contaminating them, and which can be directly connected to a precision substrate processing apparatus, have been intensively studied and developed.

[0005] Although not shown, this type of precision substrate storage container includes a container main body for aligning and storing a plurality of wafers, a detachable lid for closing the opening front of the container main body in a sealed state, and a lid for this purpose. And a lock means for maintaining the closed state of the camera. The container body has a front open box structure pod (Pod) for aligning and storing wafers, a robotic handle screwed to the ceiling of this pod,
A bottom plate screwed to the bottom surface of the pod; a plurality of positioning tools attached to one of the pod and the bottom plate; and a pair of columns screwed to both inner sides of the pod to support left and right side edges of the wafer. And a rear retainer that is screwed to the inner rear surface of the pod and supports the rear edge of the wafer.

Japanese Patent Application Laid-Open Nos. 8-279546 and 9-8 disclose prior art documents relating to this type of precision substrate storage container.
No. 8398, No. 8-340043, Tokuhyo Hei 4-5052
No. 34 or 7-504536.

[0007]

SUMMARY OF THE INVENTION A precision substrate storage container is
As described above, since a plurality of components are simply assembled and manufactured, the dimensional errors of the components accumulate and increase with the assembly, and the accuracy of supporting the wafer and the accuracy of positioning with respect to the processing apparatus deteriorate. As a result, when loading or unloading the wafer, the pod or the wafer is rubbed, which causes a problem of contamination of the wafer. In particular, it is very difficult to attach a large bottom plate having a plurality of attachment points to the pod with high accuracy.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and is intended to reduce a dimensional error in assembling components of a container body, and to improve precision of supporting a precision substrate and positioning accuracy with respect to a processing apparatus. An object of the present invention is to provide a storage container and a method for assembling the same.

[0009]

According to the first aspect of the present invention, in order to achieve the above object, a precision substrate is housed in a container body, and a group of components constituting the container body, It is characterized by including positioning attachment means for connecting at least one component of the component group and another component combined therewith. In addition,
A box-shaped pod having an open end face for accommodating the precision substrate, a robotic handle attached to the ceiling of the pod, a bottom plate attached to the bottom surface of the pod, A plurality of positioning tools attached to any one of the bottom plates; a pair of columns attached to both insides of the pod to support both sides of the precision substrate; and a precision attachment attached to the other end inside the pod. And a retainer for supporting an end of the substrate.

[0010] The positioning mounting means may be provided on a fitting boss provided on one of the one component and the other component, and on one of the one component and the other component. And a fitting projection that fits into the fitting boss and forms a guide inclined surface that gradually narrows from the opening toward the inner bottom on the fitting peripheral surface of the fitting boss. It is preferable to form a positioning inclined surface that gradually widens from the distal end side toward the distal end side and that comes into contact with the guide inclined surface on the fitting peripheral surface of the collision portion. If it is difficult to integrally mold the positioning and mounting means with the component, the positioning and mounting means is formed as a separate part and provided on the one component and the fitting boss or the fitting projection is provided. It is preferable to additionally use a tapered hole fitted on the outer periphery of the portion and a tapered surface formed on the peripheral surface of the fitting boss or the fitting projection and in contact with the taper of the tapered hole.

[0011] Further, there is provided an adjusting positioning attaching means for connecting at least one component of the above component group and another component combined therewith, and the adjusting positioning attaching means is provided with the one component and the other component. And an adjustment fitting boss provided on one of the components, and an adjustment fitting projection provided on the other of the one component and the other component and fitted on the adjustment fitting boss. The adjustment fitting boss is formed by partitioning the inside of the adjustment fitting boss with a long axis and a short axis, and the adjustment fitting boss is formed on each of the fitting peripheral surfaces in the long axis direction and the short axis direction from the opening toward the inner bottom. First and second guide inclined surfaces that gradually narrow are formed, and the fitting peripheral surface of the adjustment fitting protrusion gradually expands from the distal end toward the distal end, and It is opposed to the guide inclined surface via a gap, and is in contact with the second guide inclined surface. It is desirable to form a positioning inclined surface.

Further, when it is difficult to integrally form the adjusting / positioning attaching means with the constituent element, the adjusting / positioning attaching means is formed as a separate part, and the adjusting / positioning attaching means is provided on the one constituent element and the adjusting fitting boss or the adjusting fitting boss is formed. A taper hole fitted on the outer peripheral surface of the adjustment fitting protrusion and a taper surface formed on the peripheral surface of the adjustment fitting boss or the adjustment fitting protrusion and in contact with the taper of the taper hole are further added. It is good to use.

According to a seventh aspect of the present invention, there is provided an assembling method for assembling a container main body for accommodating a precision substrate by combining a group of constituent elements. And the other components to be combined therewith are connected by using the positioning mounting means according to the third aspect and the adjusting positioning mounting means according to the fifth aspect.

Here, the precision substrate in the claims refers to a single or plural (eg, 13 or 25) semiconductor wafers (eg, silicon wafers) used in the field of manufacturing semiconductors, etc. , 200 mm to 300 mm or more). However, the present invention is not limited to this, and includes a plurality of aluminum disks, liquid crystal cells, quartz glass, mask substrates, and the like used in the field of information communication, electric, or electronic manufacturing.

The component group, positioning mounting means, and / or adjustment positioning mounting means constituting the container body are made of acrylic resin, polyamide resin, polycarbonate (PC), polyetheretherketone (PEEK), acrylonitrile, polybutylene terephthalate (PBT). ), Polyetherimide (PE
I), polyether sulfone (PES), or polypropylene (P
It can be molded by appropriately using a resin such as P). Also,
If necessary, a transparent treatment, an antistatic treatment, coloring or the like can be applied. When used as a 300 mm wafer carrier, the appearance of the container body is SEMI standard E47.
1-0097, E1.9, and each modified ballot.

The combination of at least one component and another component mainly includes a pod and a bottom plate, a bottom plate and a plurality of positioning tools, or a pod and a plurality of positioning tools. Also, as a usual combination, a pod and a robotic handle, a pod and a bottom plate, a bottom plate and a plurality of positioning tools or a pod and a plurality of positioning tools, a pod and a pair of columns,
And / or a pod and a plurality of rear retainers. However, the present invention is not limited to these, and a combination of any one of the pod and the bottom plate with an identification protrusion such as an ID or a tag, or a combination of a pod and a side handle can be widely included. When fitting the fitting boss and the fitting protrusion and / or the adjustment fitting boss and the adjustment fitting protrusion, it is preferable to use a fastener together. Examples of the fastener include a nut, a washer, and / or an O-ring in addition to a screw member including a plurality of bolts.

Although one or more fitting bosses and adjustment fitting bosses are usually provided on one of the pod and the bottom plate, they may not be provided. Similarly, although one or more fitting protrusions and adjustment fitting protrusions are usually provided for components other than those described above, this is not essential. In addition, the guide inclined surface, the first guide inclined surface, the second guide inclined surface, and / or the positioning inclined surface can be a tapered surface, a curved surface, a hyperboloid, or a crown as long as the positioning can be performed accurately. It may be spherical. Further, the tapered hole is mainly provided in the pod, but may be provided in a portion other than the pod as needed. Furthermore, since the inside of the adjustment fitting boss is defined by the long axis and the short axis, it is formed in a substantially oval shape, an elliptical shape, a long hole shape, or a similar shape.

According to the first aspect of the present invention, when manufacturing the container body, part or all of the component groups of the container body are assembled via the positioning attachment means, so that the accumulation of errors due to the assembly is reduced. It can be suppressed or prevented, and the mounting position of the component can be accurately maintained. Also,
Since the container body is manufactured by combining some or all of the components, specification changes for each user (e.g., shape, dimensions,
Or the material) can be dealt with simply by replacing the corresponding components. Similarly, when adding optional parts, add the corresponding optional parts,
It is possible to respond simply by changing clothes. Accordingly, there is no need to remodel the molds for the optional parts, and the degree of freedom in selecting the mounting position of the optional parts is increased.

According to the third aspect of the present invention, when the container body is manufactured, the pod, the robotic handle, the bottom plate, the plurality of positioning tools, the pair of columns, the retainer, etc., which are separate from each other, are positioned. Assemble via mounting means. At this time, the positioning inclined surface of the fitting projection comes into contact with the guide inclined surface of the fitting boss, and by this contact, the fitting projection is accurately positioned at the center of the fitting boss. Also,
The fitting projection is accurately positioned in the height direction by the position of the positioning inclined surface. With such an assembly,
A robotic handle, a bottom plate, or the like, which is another component, is attached to the pod with high precision. Since the container body is manufactured by assembling the robotic handle, the bottom plate, and the like to the pod afterward, various options can be added and changed even with one type of pod.

According to the fifth aspect of the present invention, when the container body is manufactured, the pod, the bottom plate, the plurality of positioning tools, the pair of columns, etc., which are separate from each other, are adjusted via the positioning and mounting means. assemble. At this time, the position can be adjusted by appropriately shifting the adjustment fitting projection in the direction of the first guide inclined surface of the adjustment fitting boss, in other words, in a direction in which there is little problem in position adjustment. Also, the positioning inclined surface of the adjustment fitting protrusion contacts the second guide inclined surface of the adjustment fitting boss,
By this contact, the adjustment fitting projection is accurately positioned on the adjustment fitting boss. Further, the height of the adjustment fitting protrusion is accurately determined by the position of the positioning inclined surface. By such assembling, a bottom plate, a positioning tool, and the like, which are separate components, are attached to the pod in a highly accurate positioning state.

[0021]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. As shown in FIGS. 1, 2, 8, 9, and 10, a precision substrate storage container and a method of assembling the container according to the present embodiment include: a container body 1 for aligning and storing a plurality of wafers W; 1, a detachable lid 10 for closing the front of the opening in a sealed state,
Locking means 16 of an inner lock type which is built in and maintains the closed state, positioning mounting means 37 for a component group constituting the container main body 1, and adjusting positioning mounting means 43 for a component group constituting the container main body 1 , And play attaching means 50.

As shown in FIGS. 1 to 4, the container body 1 has a large pod 2 for arranging and storing a plurality of wafers W arranged vertically at a predetermined pitch, and a screw at the center of the ceiling of the pod 2. A transferable robotic handle 3 to be attached, a bottom plate 4 to be screwed through a plurality of cylindrical ribs on the bottom surface of the pod 2, and a plurality of (books) to be screwed to the bottom plate 4. In the embodiment, three (3) positioning tools 5 are screwed to both inside sides of the pod 2 to face each other, and support the left and right side edges of the plurality of wafers W with substantially U-shaped or V-shaped support slots. A pair of columns 6 for vibration prevention, and a plurality of rear retainers for vibration prevention, which are screwed side by side on the inner back surface of the pod 2 and support the rear end edges of the plurality of wafers W with substantially U-shaped or V-shaped support slots. Assemble with 7 It is.

As shown in FIG. 1, the pod 2 is formed in a transparent front open box structure having an open front, and side handles 8 are detachably mounted on left and right outer surfaces thereof. Side handle 8 is used for manual operation and transportation. As shown in the figure, the bottom plate 4 is basically formed in a substantially Y-shape in a plane, and a positioning tool 5 composed of a kinematic coupling (also referred to as a buoy group) is provided on both sides of a front part and a rear part thereof. Each is screwed according to the SEMI standard. A circular through hole 9 is formed in a substantially central portion of the bottom plate 4, and a locking claw of a processing device (not shown) is inserted into the through hole 9 to be mounted on a load port of the processing device. Pod 2 is ± 0.5mm
Position, preferably within ± 0.25 mm (hereinafter simply referred to as high precision).

The lid 10 is, as shown in FIG.
Surface plate 11 molded using the same synthetic resin
And a substantially box-shaped back plate 12 having an open front surface. The front plate 11 is covered on the opening surface of the back plate 12 via a fastener. Key holes 13 are formed on both sides of the center of the surface plate 11 respectively, and an attachment of a door opening / closing device of a processing device is inserted into each key hole 13. Further, a front retainer 14 having basically the same configuration as the rear retainer 7 is removably mounted and fixed at the center of the back plate 12 as necessary, and a thermoplastic elastomer, silicone rubber, Alternatively, a frame-shaped seal gasket 15 made of fluorine rubber or the like is detachably fitted through a projection, a groove, or the like (not shown).

As shown in FIGS. 6 and 7, the locking means 16 includes a plurality of clamp holes 17 formed by drilling the upper and lower inner peripheral surfaces of one end surface of the pod 2, and the upper and lower peripheral surfaces of the lid 10. A plurality of through holes 18 formed by piercing and facing the plurality of clamp holes 17; a pair of rotating plates 19 pivotally supported at the center on both inner sides of the lid 10 and rotating by an external access operation; 19, a plurality of power transmission plates 20 that slide linearly inward and outward of the lid 10 by rotation of the cover 19, a guide member 21 that guides the slide of each power transmission plate 20, and a through hole when each power transmission plate 20 projects. 18 and fit into each clamp hole 17,
When each power transmission plate 20 returns, it is composed of a synthetic resin clamp member 22 that returns into each through hole 18.

Each rotating plate 19 is formed in a disc shape using a polyacetal resin or the like, and a cylindrical bottomed operation protrusion 23 is formed at the center of the surface thereof. An attachment that penetrates through the keyhole 13 is removably fitted therein. A pair of cylindrical connecting pins 24 are protrudingly formed on the outer periphery of the surface of each rotating plate 19, and a cylindrical rotating roller as a friction reducing member is rotatably fitted into each connecting pin 24 as necessary. .

The door opening and closing device and each rotating plate 19
The connection position and dimensions of the pod 2 are determined for each size of the pod 2 in the SEMI standard. For example, a lid 1 for a 300 mm wafer
The standard of 0 is defined corresponding to E62 of the SEMI standard.

The plurality of power transmission plates 20 are basically formed in a rectangular plate shape using a polyacetal resin or the like, and both sides of the inside of the lid 10 are so arranged that the central axis in the longitudinal direction passes through the center of the rotating plate 19. Are slidably arranged above and below, respectively. The end portion of each power transmission plate 20 is curved toward the side in a substantially semicircular arc shape, covers a part of the outer periphery of the surface of the rotating plate 19, and has a guide groove 25 fitted into the connecting pin 24 or the rotating roller. Perforated.

The guide groove 25 has a first guide groove 26 having a curvature substantially equal to the trajectory of the connecting pin 24, a second guide groove 27 having a larger curvature than the trajectory of the connecting pin 24,
And an inflection portion 28 connecting the second guide grooves 26 and 27. Each first guide groove 2 thus formed
6 functions to linearly move each power transmission plate 20 in the inward and outward directions of the lid 10. Also, each second guide groove 2
7 guides each power transmission plate 20 so as to linearly move on a three-dimensional path.

In the vicinity of the center of each power transmission plate 20, a plurality of oval guide elongated holes 29 are formed at predetermined intervals in the longitudinal direction. Guide pins 30 are formed on both right and left sides of each power transmission plate 20 so as to protrude therefrom, and a cylindrical rotary roller as a friction reducing member is rotatably fitted into each guide pin 30 as necessary.

The guide member 21 includes a first guide 31 and a second guide 32 which are formed on the inner surface of the back plate 12 so as to protrude from the inner surface of the back plate 12 and loosely fit into the plurality of guide slots 29, respectively. The first guide 31 is formed in a cylindrical shape, and a rotating roller 33 as a friction reducing member is rotatably fitted as required. The second guide 32 includes a plurality of pairs of opposing guides, each of which is formed to protrude from the inner opposing surfaces of the front plate 11 and the back plate 12. The opposing curved surfaces of each pair of opposing guides function so that the power transmission plate 20 that moves linearly across each guide pin or each rotating roller moves three-dimensionally in the front and back directions of the lid 10.

The clamp member 22 is connected to the power transmission plate 2.
The first arm 34 includes a rotatable first arm 34 pivotally supported by a pin via a pin, and a second arm 35 in which the distal end and the distal end of the first arm 34 are integrated. .
The second arm 35 is bent and formed in a substantially L-shape, and its tip is directed in a direction substantially perpendicular to the first arm 34, and this tip is a fitting holding part 36 for the clamp hole 17. A cylindrical rotary roller (friction reducing member) that slides into the clamp hole 17 is supported by the fitting holding portion 36 via a pin. The distal end of the second arm 35 is pivotally supported via a pin near the through hole 18 in the outer periphery of the inside of the lid 10, and the second arm 35, in other words, the clamp member 22 is connected to the inside and outside of the lid 10. Rotate in the direction.

As shown in FIGS. 2, 8 and 9, etc., the positioning mounting means 37 includes a pod 2 and a part of the robotic handle 3, a pod 2 and a part of the bottom plate 4, and a bottom plate 4 and One end of the positioning tool 5, one end of the pod 2 and each column 6, and the pod 2 and each rear retainer 7 are detachably connected and fixed. Less than,
The positioning and mounting means 37 will be described by taking the pod 2 and the bottom plate 4 as an example. The positioning and mounting means 37 includes a plurality of fitting bosses 38 formed on the bottom surface of the pod 2 and a projection formed on the bottom plate 4. The fitting boss 38 includes a plurality of fitting projections 39 to be fitted into the fitting bosses 38, and bolts 40 that are screwed into and fastened to the center portions of the fitting bosses 38 and the fitting projections 39.

The fitting boss 38 is formed in a bottomed cylindrical shape, and is formed on a part of the fitting inner peripheral surface from the opening (lower side in FIG. 9) to the inner bottom (upper side in FIG. 9). Accordingly, a tapered guide surface 41 that gradually narrows is formed. Also, the fitting projection 3
9 is formed into a cylindrical shape, and a part of the fitting peripheral surface gradually becomes radially outward from the distal end side (upper side in FIG. 9) toward the distal end side (lower side in FIG. 9). A positioning taper surface 42 that spreads and makes surface contact with the guide taper surface 41 is formed.

As shown in FIG. 2, FIG. 8, and FIG. 10, the adjustment positioning mounting means 43 includes the remaining portion of the pod 2 and the bottom plate 4, the other end of the bottom plate 4 and each positioning tool 5, and the pod 2 And the other end of each column 6 are detachably connected and fixed. This adjustment positioning attachment means 43
In the same manner as above, the pod 2 and the bottom plate 4 will be described as an example. The adjustment positioning mounting means 43 is formed by a plurality of adjustment fitting bosses 44 formed on the bottom surface of the pod 2 and formed on the bottom plate 4. A plurality of adjustment fitting projections 45 fitted into the respective fitting bosses 38;
And a bolt 46 screwed into the center of the adjustment fitting projection 45 and fastened.

The adjustment fitting boss 44 is formed in a substantially elliptic cylindrical shape with a bottom, and a portion of the fitting inner peripheral surface is opened from the opening (lower side in FIG. 10) to the inner bottom (upper side in FIG. 10). The first and second guide tapered surfaces 47 and 48, which gradually become narrower as they move toward, are formed. The first guide taper surface 47 is in a direction in which there is no problem in positional accuracy, in other words, in the long axis direction (FIG.
0, and the second guide tapered surface 48 is formed in the short axis direction (the depth direction of the paper surface of FIG. 10).

The adjustment fitting projection 45 is formed in a cylindrical shape.
A positioning taper surface 49 is formed on a part of the fitting peripheral surface so as to gradually expand in a radially outward direction from the distal end side (upper side in FIG. 10) to the distal end side (lower side in FIG. 10). I have. The positioning taper surface 49 faces the first guide taper surface 47 via a gap, and the second guide taper surface 48.
Acts to make surface contact.

Further, the play attaching means 50 is provided in FIG.
As shown in the figures, the remaining portion of the pod 2 and the robotic handle 3 and the remaining portion of the pod 2 and the bottom plate 4 are removably connected and fixed. Hereinafter, a detailed description will be given by taking the remaining portion of the pod 2 and the robotic handle 3 as an example. The play attachment means 50 includes a bottomed cylindrical fitting boss formed in a plurality of protruding portions at the center of the ceiling of the pod 2, and a robotic handle. 3
And a bolt which is screwed into the center of the fitting boss and the fitting protrusion to be fastened to the respective fitting bosses so as to be position-adjustable. ing.

In the above configuration, in order to manufacture the container body 1, a pod 2, a robotic handle 3, a bottom plate 4, a plurality of positioning tools 5, a pair of columns 6, and a rear retainer which are separately formed with high precision are formed. 7 is assembled via the positioning mounting means 37, the adjustment positioning mounting means 43, and the play mounting means 50. At this time, the fitting boss 38
The positioning taper surface 42 of the fitting protrusion 39 comes into surface contact with the guide taper surface 41 of the second member, and the surface contact allows the fitting protrusion 39 to be positioned at the center position of the fitting boss 38 with high accuracy. The fitting protrusion 39 is positioned with high accuracy in the height direction by the position of the positioning tapered surface 42. With these configurations, the robotic handle 3, the bottom plate 4, the plurality of positioning tools 5, the pair of columns 6, and each of the rear retainers 7 are positioned and installed on the pod 2 with high precision.

The wafer W is placed in the container body 1 thus manufactured.
First, a plurality of wafers W sliced into the pod 2 are aligned and stored via the rear retainer 7 and the pair of columns 6, and the lid 1 is placed in front of the opening of the pod 2.
0 is fitted via the seal gasket 15, the front retainer 14 is pressed against the plurality of wafers W, and the locking means 16 is operated to lock the door opening and closing device of the processing apparatus.

Then, the operation projection 23 of the rotating plate 19
The rotation plate 19 is rotated 90 ° clockwise by rotating the rotation plate 19 clockwise, and each power transmission plate 20 projects linearly and three-dimensionally from the inside inside to the outside outside of the lid 10 while being guided by the guide member 21. One arm 34 is swung so that the second arm 35 is
0, and swings outward and outward to expose the press-fitting portion 36 from the through hole 18. The rotating roller of the press-fitting pressing portion 36 is fitted and locked in the clamp hole 17 to firmly fix the lid 10 in the fixed state. maintain.

At this time, the fitting holding portions 36 of the respective second arms 35 are connected to the respective power transmission plates 20 which function as beams.
Are fitted and locked in the clamp holes 17 in a state of being substantially straight. Therefore, the power applied to the rotating plate 19 is transmitted straight and smoothly to the clamp member 22. In addition, the fitting holding portion 36 is exposed without making a circular motion and coming into contact with the through hole 18.

Next, when it is desired to process the stored, stored or transported wafer W, first, the locking means 16 is unlocked by the door opening / closing device of the processing apparatus, and the rotating plate 19 is operated.
Attachment is inserted into the operation projection 23, and the rotation plate 19 is rotated counterclockwise by 90 °. Each power transmission plate 20 is guided by the guide member 21 from the inside to the outside of the lid 10 in a straight line. The first arm 34 is returned three-dimensionally and is returned to swing. This first arm 34
By the return swing of the second arm 35, the second arm 35 swings inward in the inside of the lid 10 to return the press-fitting portion 36 inserted into the through hole 18, and the lid 10 is in a removable state. At this time, the fitting presser 36 returns in a circular motion without contacting the through hole 18.

When the lid 10 can be opened in this way,
The lid 10 is removed from the pod 2 by vacuum suction, and thereafter, a plurality of wafers W are sequentially taken out from below the pod 2 and a predetermined process is performed on the wafer W.

According to the above configuration, the fitting boss 3 of the component group of the FOUP (front opening unified pod) is provided.
8 and the fitting protrusion 39, and the adjusting fitting boss 44 and the adjusting fitting protrusion 45 each exhibit a high-precision positioning function. Therefore, even when the component group is assembled later to manufacture the container body 1, In addition, it is possible to maintain and improve the accuracy of supporting the wafer W and the accuracy of positioning with respect to the processing apparatus without accumulating and increasing dimensional errors. Therefore, when loading / unloading / reloading the wafer W, the pod 2 and the wafer W are not rubbed, so that the contamination of the wafer W does not occur. The bottom plate 4 in question can be attached to the pod 2 with high accuracy. Also, in the case of mounting using a large number of bolts 40, if the positioning mounting means 37 is used in some of the mounting locations, it is only necessary to use the adjustable play mounting means 50 in the remaining mounting locations.

In addition, the lid 10 is fixed in a state where the fitting / holding portion 36 of the second arm 35 is substantially aligned with the power transmission plate 20 during the locking operation, so that the lid 10 is fixed with a stable and large locking force. be able to. Therefore, it is possible to effectively prevent the power from locally acting on each of the power transmission plates 20 and to bend, or to effectively reduce the reduction of the locking force caused by the bend. And it becomes possible to seal uniformly. In addition, since each power transmission plate 20 can be formed using a high-rigidity synthetic resin, the number of metal parts can be reduced or omitted, and the wafer W due to generation of metal ions during cleaning or the like can be formed.
It can also be expected to prevent the prevention of contamination.

Further, since the rotating roller 33 and the like are rotatably supported at the contact portions, the frictional resistance is remarkably reduced, and the generation of resin powder can be prevented. Further, since the second arm 35 is pivotally supported in the vicinity of the through hole 18, the thickness of the lid 10 can be reduced to a necessary minimum.

Next, FIG. 11 shows a second embodiment of the present invention. In this case, the shape of the bottom plate 4 is changed and a plurality of mutually independent positioning tools are provided on the bottom surface of the pod 2. 5 is screwed through the positioning attachment means 37 and the adjustment positioning attachment means 43. The other parts are the same as those in the above-described embodiment, and the description is omitted.

In this embodiment, the same operation and effect as those of the above embodiment can be expected. Further, instead of indirectly screwing a plurality of positioning tools 5 to the pod 2 via the bottom plate 4, the pod 2 Since a plurality of small positioning tools 5 formed with high precision are directly screwed into the apparatus, a great improvement in positioning precision can be expected. Further, since the assembling method according to the present invention is used, the adjustment of the mounting position of each positioning tool 5 is also facilitated. Furthermore, since the plurality of positioning tools 5 are likely to be worn by contact with metal parts, when molding using expensive engineering plastic such as PEEK, the plurality of positioning tools 5 can be shared as small parts by Cost reduction becomes possible.

Next, FIG. 12 shows a third embodiment of the present invention. In this case, a tapered hole 51 is newly provided as one component as the positioning and attaching means 37, and the tapered hole 51 is provided in the tapered hole 51. Either one of the fitting boss 38 and the fitting projection 39 is selectively fitted, and a tapered surface 53 that comes into surface contact with the taper 52 of the tapered hole 51 on the peripheral surface of the fitting boss 38 or the fitting projection 39. Is to be molded.

Hereinafter, this configuration will be described by taking the pod 2 and each column 6 as an example. In the present embodiment, circular tapered holes 51 are formed in a plurality of positions of the pod 2, respectively, and the fitting bosses 38 separately formed in the respective tapered holes 51 are closely fitted via the tapered surface 53 on the outer periphery thereof. An O-ring 54 is interposed between the peripheral edge of the tapered hole 51 and the fitting boss 38, and the fitting boss 38 and the fitting projection 39 of the column 6 are fitted via the O-ring 54, and these fittings are performed. The fitting boss 38 and the fitting projection 39 are connected and fixed via a bolt 40. The other parts are the same as those in the above-described embodiment, and the description is omitted.

In this embodiment, the same operation and effect as those of the above embodiment can be expected, and even if it is difficult to directly form the fitting boss 38 or the fitting projection 39 on the pod 2, a simple configuration can be achieved. Can be screwed in the positioning state,
Significant improvement in positioning accuracy can be expected.

Next, FIG. 13 shows a fourth embodiment of the present invention.
3, a taper hole 51A is newly provided as one component, and one of the adjustment fitting boss 44 and the adjustment fitting protrusion 45 is selectively fitted into the taper hole 51A, and the adjustment fitting boss 44 or the adjustment A tapered hole 5 is formed in the peripheral surface of the fitting projection 45.
A taper surface 53A that is in surface contact with the 1A taper 52A is formed.

The above configuration will be described using the pod 2 and each column 6 as an example. In the present embodiment, circular tapered holes 51A are formed in a plurality of places of the pod 2, respectively, and a separate adjustment fitting boss 44 is closely fitted to each tapered hole 51A via a tapered surface 53A on the outer periphery thereof. An O-ring 54A is interposed between the peripheral edge of the tapered hole 51 and the adjusting fitting boss 44, and the adjusting fitting boss 44 and the adjusting fitting protrusion 45 of the column 6 are fitted through the O-ring 54A, The fitted fitting boss 44 and the fitted fitting projection 45 are fitted and fixed via bolts 46. For other parts,
The description is omitted because it is similar to the above embodiment.

In this embodiment, the same operation and effect as those of the above embodiment can be expected.
Even when it is difficult to form the adjustment fitting protrusion 45 directly, the screw can be screwed into the positioning state with a simple configuration, and the positioning accuracy can be significantly improved.

In the above embodiment, the bottom plate 4 and the like having a substantially Y-shaped plane are shown, but the present invention is not limited to this. For example, a bottom plate 4 having a substantially V-shaped or rectangular plane may be used. In the above-described embodiment, the rotating plate 19 provided with the pair of connecting pins 24 is shown. However, the present invention is not limited to this. For example, a cam mechanism, a screw mechanism, a rack and pinion mechanism, a link mechanism, or the like is used. And each power transmission plate 2
The one that slides 0 may be used. When the positioning attachment means 37 and the adjustment positioning attachment means 43 are not used, a plurality of positioning tools 5 can be integrally formed on the bottom plate 4. Further, although the play attaching means 50 is provided on the pod 2 and the robotic handle 3, etc., it can be provided at other places as appropriate.

[0057]

As described above, according to the present invention, a dimensional error in assembling the components of the container body can be reduced, so that the precision of supporting a precision substrate and the precision of positioning with respect to a processing device can be improved. There is an effect that can be.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing an embodiment of a precision substrate storage container and an assembling method thereof according to the present invention.

FIG. 2 is a plan view showing an embodiment of a precision substrate storage container and an assembling method thereof according to the present invention.

FIG. 3 is a front view showing an embodiment of a precision substrate storage container and an assembling method thereof according to the present invention.

FIG. 4 is an explanatory side view showing an embodiment of a precision substrate storage container and an assembling method thereof according to the present invention.

FIG. 5 is a perspective view showing a front retainer in the embodiment of the precision substrate storage container and the method for assembling the same according to the present invention.

FIG. 6 is a perspective view showing a lid and a locking means in the embodiment of the precision substrate storage container and the method for assembling the same according to the present invention.

FIG. 7 is a sectional view taken along line VII-VII of FIG. 6;

FIG. 8 is a bottom view showing an embodiment of a precision substrate storage container and an assembling method thereof according to the present invention.

9 is a vertical sectional view taken along line IX-IX of FIG.

FIG. 10 is a vertical sectional view taken along line XX of FIG. 8;

FIG. 11 is a bottom view showing a precision substrate storage container and a method for assembling the same according to a second embodiment of the present invention.

FIG. 12 is a longitudinal sectional view showing a precision substrate storage container and a method for assembling the same according to a third embodiment of the present invention.

FIG. 13 is a longitudinal sectional view showing a fourth embodiment of a precision substrate storage container and an assembling method thereof according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Container main body 2 Pod 3 Robotic handle 4 Bottom plate 5 Positioning tool 6 Column 7 Rear retainer 10 Lid 16 Locking means 37 Positioning mounting means 38 Fitting boss 39 Fitting projection 40 Bolt 41 Guide taper surface (Guided inclined surface) 42 Positioning taper surface (positioning inclined surface) 43 Adjusting positioning mounting means 44 Adjusting fitting boss 46 Bolt 47 First guiding tapered surface (first guiding inclined surface) 48 Second guiding tapered surface (second guiding inclined surface) 49 Positioning taper surface (positioning inclined surface) 50 Play attachment means 51 Tapered hole 51A Tapered hole 52 Taper 52A Taper 53 Tapered surface 53A Tapered surface W Wafer (precision substrate)

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3E096 AA06 BA16 BA17 CA02 DA05 DA26 DC04 EA02X EA02Y FA03 FA10 GA04 GA05 5F031 BB04 BC03 HH07

Claims (7)

[Claims] 1. A precision substrate storage container for storing a precision substrate in a container body, comprising a component group constituting the container body, at least one component of the component group, and another configuration combined therewith. And a positioning mounting means for connecting the element and the element. 2. The component group includes a box-shaped pod having an open end for accommodating the precision substrate, a robotic handle attached to a ceiling of the pod, and a bottom plate attached to a bottom surface of the pod. A plurality of positioning tools attached to one of the pod and the bottom plate; a pair of columns attached to both insides of the pod to support both sides of the precision substrate; The precision substrate storage container according to claim 1, further comprising a retainer attached to support an end of the precision substrate. 3. The positioning mounting means includes a fitting boss provided on one of the one component and the other component, and a fitting boss provided on one of the one component and the other component. And a fitting projection that fits into the fitting boss and is formed on the fitting peripheral surface of the fitting boss with a guide inclined surface that gradually narrows from the opening toward the inner bottom. The precision substrate storage container according to claim 1 or 2, wherein a positioning inclined surface is formed on a fitting peripheral surface of the protrusion so as to gradually widen from a distal end portion toward a distal end portion and contact the guide inclined surface. 4. The positioning mounting means includes a tapered hole provided in the one component and fitted in the fitting boss or the fitting projection, and a peripheral surface of the fitting boss or the fitting projection. 4. The precision substrate storage container according to claim 3, further comprising: a tapered surface formed on said tapered hole and in contact with a taper of said tapered hole. 5. An adjusting positioning mounting means for connecting at least one component of the component group and another component combined therewith, wherein the adjusting positioning mounting means comprises the one component and the other component. An adjustment fitting boss provided on one of the components,
An adjustment fitting protrusion provided on one of the one component and the other component and fitted to the adjustment fitting boss,
The inside of the adjustment fitting boss is defined by a long axis and a short axis, and gradually narrows from the opening toward the inner bottom in each of the fitting peripheral surfaces in the long axis direction and the short axis direction of the adjustment fitting boss. First and second guide inclined surfaces are respectively formed, and the fitting peripheral surface of the adjustment fitting protrusion gradually spreads from the distal end side toward the distal end side, and the first guide inclined surface is formed. 5. The precision substrate storage container according to claim 1, wherein a positioning inclined surface is formed so as to be opposed to the second guiding inclined surface with a gap therebetween. 6. The adjusting positioning boss or the adjusting fitting boss or the adjusting fitting boss, the adjusting fitting boss or the adjusting fitting boss, the adjusting fitting boss or the adjusting fitting boss. 6. The precision substrate storage container according to claim 5, further comprising a tapered surface formed on a peripheral surface of the projection and in contact with the taper of the tapered hole. 7. A method of assembling a precision substrate storage container comprising a container body for storing a precision substrate by combining a group of components, wherein at least one component of the group of components is combined with another configuration. A method for assembling a precision substrate storage container, characterized in that the components are connected using the positioning mounting means according to claim 3 and the adjusting positioning mounting means according to claim 5.