【特許請求の範囲】
【請求項１】 検査試料の形状を測定する試料検査装置において、前記検査試料の測定表面及び測定裏面を除く部分を保持する保持手段と、該保持手段に保持された検査試料の測定表面に可干渉光を投光して第１参照面と測定表面との光干渉により干渉縞を形成し該干渉縞を撮像素子により撮像する第１検査光学系と、前記保持手段に保持された検査試料の測定裏面に可干渉光を投光して第２参照面と測定裏面との光干渉により干渉縞を形成し該干渉縞を撮像素子により撮像する第２検査光学系と、前記第１及び第２検査光学系によりそれぞれ得られる干渉縞画像に基づいて前記検査試料の面形状情報を得る解析手段と、を備えることを特徴とする試料検査装置。
【請求項２】 請求項１の試料検査装置において、前記第１及び第２検査手段の撮像素子は、それぞれ得る干渉縞画像を同期して撮像することを特徴とする試料検査装置。
【請求項３】 請求項１の試料検査装置は、さらに前記第１参照面と第２参照面との相対的平行度を検出する平行度検出手段を備え、前記解析手段は検出された平行度情報に基づいて検査試料の表裏面の相対的な面形状情報を補正することを特徴とする試料検査装置。
【請求項４】 請求項１の試料検査装置において、さらに前記第１及び第２検査光学系に対して前記保持手段に保持された検査試料を相対移動させる移動手段を備え、第１及び第２検査光学系は該移動手段により相対移動される前記検査試料の測定面の干渉縞画像を参照面の大きさに応じて分割して得ることを特徴とする試料検査装置。
【請求項５】 請求項４の試料検査装置は、さらに分割して得られる干渉縞画像に基づく面形状情報を得ると共に、該面形状情報を繋ぎ合わせて全体の面形状情報を得る分割画像解析手段を備えることを特徴とする試料検査装置。
[Claims]
1. In a sample inspection device for measuring the shape of an inspection sample, the holding means for holding a portion other than the measurement front surface and the measurement back surface of the inspection sample and the measurement surface of the inspection sample held by the holding means can be used. A first inspection optical system in which interference light is projected to form interference fringes by optical interference between the first reference surface and the measurement surface, and the interference fringes are imaged by an imaging element, and an inspection sample held by the holding means. A second inspection optical system in which interfering light is projected onto the back surface of the measurement to form interference fringes due to optical interference between the second reference surface and the back surface of the measurement, and the interference fringes are imaged by an imaging element, and the first and second inspection optical systems. A sample inspection apparatus comprising: an analysis means for obtaining surface shape information of the inspection sample based on interference fringe images obtained by the inspection optical system.
2. The sample inspection device according to claim 1, wherein the image pickup devices of the first and second inspection means synchronously capture the interference fringe images obtained respectively.
3. The sample inspection apparatus according to claim 1 further includes a parallelism detecting means for detecting the relative parallelism between the first reference plane and the second reference plane, and the analysis means detects the detected parallelism. A sample inspection apparatus characterized in that the relative surface shape information of the front and back surfaces of an inspection sample is corrected based on the information.
4. The sample inspection apparatus according to claim 1, further comprising moving means for relatively moving the inspection sample held by the holding means with respect to the first and second inspection optical systems, the first and second inspection means. The inspection optical system is a sample inspection apparatus characterized in that an interference fringe image of a measurement surface of the inspection sample, which is relatively moved by the moving means, is divided and obtained according to the size of a reference surface.
5. The sample inspection apparatus according to claim 4 obtains surface shape information based on an interference fringe image obtained by further dividing the sample, and also obtains the entire surface shape information by connecting the surface shape information. A sample inspection device comprising means.
【０００６】
【課題を解決するための手段】
上記課題を解決するために、本発明は以下のような構成を備えることを特徴とする。
（１） 検査試料の形状を測定する試料検査装置において、前記検査試料の測定表面及び測定裏面を除く部分を保持する保持手段と、該保持手段に保持された検査試料の測定表面に可干渉光を投光して第１参照面と測定表面との光干渉により干渉縞を形成し該干渉縞を撮像素子により撮像する第１検査光学系と、前記保持手段に保持された検査試料の測定裏面に可干渉光を投光して第２参照面と測定裏面との光干渉により干渉縞を形成し該干渉縞を撮像素子により撮像する第２検査光学系と、前記第１及び第２検査光学系によりそれぞれ得られる干渉縞画像に基づいて前記検査試料の面形状情報を得る解析手段と、を備えることを特徴とする。
（２） （１）の試料検査装置において、前記第１及び第２検査手段の撮像素子は、それぞれ得る干渉縞画像を同期して撮像することを特徴とする。
（３） （１）の試料検査装置は、さらに前記第１参照面と第２参照面との相対的平行度を検出する平行度検出手段を備え、前記解析手段は検出された平行度情報に基づいて検査試料の表裏面の相対的な面形状情報を補正することを特徴とする。
（４） （１）の試料検査装置において、さらに前記第１及び第２検査光学系に対して前記保持手段に保持された検査試料を相対移動させる移動手段を備え、第１及び第２検査光学系は該移動手段により相対移動される前記検査試料の測定面の干渉縞画像を参照面の大きさに応じて分割して得ることを特徴とする。
（５） （４）の試料検査装置は、さらに分割して得られる干渉縞画像に基づく面形状情報を得ると共に、該面形状情報を繋ぎ合わせて全体の面形状情報を得る分割画像解析手段を備えることを特徴とする。
0006
[Means for solving problems]
In order to solve the above problems, the present invention is characterized by having the following configurations.
(1) In a sample inspection device for measuring the shape of an inspection sample, interference light can interfere with a holding means for holding a portion other than the measurement front surface and the measurement back surface of the inspection sample and the measurement surface of the inspection sample held by the holding means. The first inspection optical system is projected to form interference fringes by light interference between the first reference surface and the measurement surface, and the interference fringes are imaged by an imaging element, and the measurement back surface of the inspection sample held by the holding means. A second inspection optical system in which interference fringes are projected by light interference between the second reference surface and the back surface of the measurement to form interference fringes, and the interference fringes are imaged by an imaging element, and the first and second inspection optics. It is characterized by comprising an analysis means for obtaining surface shape information of the inspection sample based on the interference fringe images obtained by the system.
(2) In the sample inspection apparatus of (1), the image pickup elements of the first and second inspection means are characterized in that the interference fringe images obtained are simultaneously imaged.
(3) The sample inspection apparatus of (1) further includes a parallelism detecting means for detecting the relative parallelism between the first reference plane and the second reference plane, and the analysis means uses the detected parallelism information. It is characterized in that the relative surface shape information of the front and back surfaces of the inspection sample is corrected based on the above.
(4) The sample inspection apparatus of (1) further includes moving means for relatively moving the inspection sample held by the holding means with respect to the first and second inspection optical systems, and the first and second inspection optics. The system is characterized in that an interference fringe image of the measurement surface of the inspection sample, which is relatively moved by the moving means, is divided according to the size of the reference surface.
(5) The sample inspection apparatus of (4) is a divided image analysis means that obtains surface shape information based on the interference fringe image obtained by further dividing the sample and obtains the entire surface shape information by connecting the surface shape information. It is characterized by being prepared.