JP2000073102A - Decompression gas concentration estimation method and gas path switching method using gas concentration estimation - Google Patents
Decompression gas concentration estimation method and gas path switching method using gas concentration estimationInfo
- Publication number
- JP2000073102A JP2000073102A JP10242795A JP24279598A JP2000073102A JP 2000073102 A JP2000073102 A JP 2000073102A JP 10242795 A JP10242795 A JP 10242795A JP 24279598 A JP24279598 A JP 24279598A JP 2000073102 A JP2000073102 A JP 2000073102A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- decompression chamber
- vacuum
- vacuum gauge
- decompression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006837 decompression Effects 0.000 title claims abstract description 100
- 238000000034 method Methods 0.000 title claims abstract description 31
- 230000035945 sensitivity Effects 0.000 claims abstract description 24
- 238000007599 discharging Methods 0.000 claims description 18
- 239000007789 gas Substances 0.000 description 155
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 48
- 238000010438 heat treatment Methods 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000006356 dehydrogenation reaction Methods 0.000 description 6
- -1 hydride compound Chemical class 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000048 titanium hydride Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004018 waxing Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
Abstract
(57)【要約】
【課題】減圧室の減圧雰囲気の推定ガス濃度を推定でき
る減圧ガス濃度推定方法、および、推定ガス濃度の推定
に基づいてガス排出経路を切り替えるガス経路切替方法
を提供する。
【解決手段】ガス成分の種類に応じて真空度の出力感度
が影響を受けない第１真空計２と、ガス成分の種類に応
じて真空度の出力感度が影響を受ける第２真空計３とを
用い、減圧室１の真空度を第１真空計２および第２真空
計３で検出する。第１真空計２の指示値および第２真空
計３の指示値に基づいて減圧室１の推定ガス濃度を推定
する。更に推定した推定ガス濃度が所定濃度を越える
と、第１切替弁６１および第２切替弁６２の一方を閉塞
する閉塞操作と、第１切替弁６１および第２切替弁６２
の他方を開放する開放操作とを行い、減圧室１のガス排
出の経路を変更する操作とを実施する。
(57) [Problem] To provide a decompression gas concentration estimation method capable of estimating an estimated gas concentration of a decompression atmosphere in a decompression chamber and a gas path switching method for switching a gas discharge path based on the estimation of the estimated gas concentration. A first vacuum gauge (2) whose output sensitivity of a vacuum degree is not affected according to a type of a gas component, and a second vacuum gauge (3) whose output sensitivity of a vacuum degree is affected according to a type of a gas component. And the first vacuum gauge 2 and the second vacuum gauge 3 detect the degree of vacuum in the decompression chamber 1. The estimated gas concentration in the decompression chamber 1 is estimated based on the indicated value of the first vacuum gauge 2 and the indicated value of the second vacuum gauge 3. Further, when the estimated gas concentration exceeds a predetermined concentration, a closing operation for closing one of the first switching valve 61 and the second switching valve 62 and a first switching valve 61 and a second switching valve 62 are performed.
And an operation of changing the gas discharge path of the decompression chamber 1 is performed.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、減圧室の減圧雰囲
気のガス濃度を推定する減圧ガス濃度推定方法、およ
び、ガス濃度推定を利用してガス経路を切り替えるガス
経路切替方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a decompression gas concentration estimation method for estimating a gas concentration in a decompression atmosphere in a decompression chamber, and a gas path switching method for switching a gas path by using the gas concentration estimation.
【０００２】[0002]
【従来の技術】水素化化合物を焼結して焼結体を製造す
る際におけるガス経路切替方法を、例にとって従来技術
について説明する。水素化化合物を焼結して焼結体を製
造する場合には、水素化化合物とワックスとを混合した
圧粉体である処理物を用いる。ワックスは、圧縮成形性
の向上のために使用される。この処理物を減圧室に収容
した状態で、減圧室を減圧雰囲気に維持しつつ処理物を
減圧室の減圧雰囲気内で加熱し、処理物に含まれている
ワックス成分を減圧室に放出する脱ワックス工程を実施
する。脱ワックス工程の終了後、処理物を更に高温に加
熱して処理物から水素ガスを放出させる脱水素工程を実
施する。その後、本焼結工程を実施して焼結体を得る。2. Description of the Related Art The prior art will be described by taking, as an example, a gas path switching method when a hydride compound is sintered to produce a sintered body. In the case of producing a sintered body by sintering a hydrogenated compound, a processed product that is a green compact obtained by mixing a hydrogenated compound and wax is used. Wax is used for improving compression moldability. In a state where the processing object is accommodated in the decompression chamber, the processing object is heated in the decompression atmosphere of the decompression chamber while maintaining the decompression chamber in the decompression atmosphere, and the wax component contained in the processing object is discharged to the decompression chamber. Perform a waxing step. After the dewaxing step is completed, a dehydrogenation step of heating the processed material to a higher temperature to release hydrogen gas from the processed material is performed. Thereafter, the main sintering step is performed to obtain a sintered body.
【０００３】脱ワックス工程においては、主としてワッ
クス成分を主要成分とするワックスガスが減圧室に放出
される。減圧室に放出されたワックスガスは、第１排出
経路から減圧室の外方に排出される。脱水素工程におい
ては、処理物を構成する水素化化合物から主として水素
ガスが放出される。このとき排出経路を、第１ガス排出
経路から、拡散真空ポンプをもつ第２ガス排出経路に切
り替える。従って、減圧室に放出された水素ガスは、第
２排出経路から減圧室の外方に排出される。ワックスガ
スを排出するための第１排出経路の他に、水素ガスを排
出する第２排出経路を設けた理由は、真空度を維持しや
すく水素ガスを排出するための第２排出経路がワックス
成分で汚染されることを防止するためである。[0003] In the dewaxing step, a wax gas mainly composed of a wax component is released into a decompression chamber. The wax gas discharged into the decompression chamber is discharged from the first discharge path to the outside of the decompression chamber. In the dehydrogenation step, hydrogen gas is mainly released from the hydride compound constituting the treated product. At this time, the discharge path is switched from the first gas discharge path to the second gas discharge path having a diffusion vacuum pump. Therefore, the hydrogen gas discharged into the decompression chamber is discharged from the second discharge path to the outside of the decompression chamber. The reason why the second discharge path for discharging the hydrogen gas is provided in addition to the first discharge path for discharging the wax gas is that the second discharge path for discharging the hydrogen gas is easy to maintain the degree of vacuum. This is to prevent contamination from occurring.
【０００４】ところで、製造時間の短縮化などのため
に、ワックス工程における処理温度を高温化した場合に
は、処理物からワックスガスが放出されるとともに水素
ガスも放出されるため、減圧室の減圧雰囲気においては
ワックスガスとともに水素ガスも混在している。減圧室
の減圧雰囲気のガス濃度において、脱ワックス工程が終
了に近づくにつれて、つまり経時的に、ワックスガスの
割合が低下するとともに水素ガスの割合が増加し、最終
的には水素ガスのみが処理物から放出される。そのた
め、減圧室の減圧雰囲気のガスを排出する際に、ワック
スガス放出用の第１排出経路から、水素ガス放出用の第
２排出経路に適宜のタイミングで切り替える必要があ
る。この切替タイミングの判定は必ずしも容易ではな
い。切替タイミングの判定を経験的にのみ行えば、減圧
室のガス濃度の変化に切替タイミングが対応しないおそ
れがある。When the processing temperature in the wax process is increased to shorten the manufacturing time, the wax gas is released from the processed product and the hydrogen gas is also released. In the atmosphere, hydrogen gas is mixed together with wax gas. At the gas concentration of the decompression atmosphere in the decompression chamber, as the dewaxing process approaches the end, that is, with time, the ratio of the wax gas decreases and the ratio of the hydrogen gas increases, and finally, only the hydrogen gas is treated. Released from Therefore, when discharging the gas in the reduced-pressure atmosphere in the reduced-pressure chamber, it is necessary to switch from the first discharge path for releasing the wax gas to the second discharge path for releasing the hydrogen gas at an appropriate timing. It is not always easy to determine the switching timing. If the switching timing is determined only empirically, the switching timing may not correspond to the change in the gas concentration in the decompression chamber.
【０００５】[0005]
【発明が解決しようとする課題】本発明は上記した実情
に鑑みなされたものであり、減圧室の減圧雰囲気の推定
ガス濃度を推定できる減圧ガス濃度推定方法、および、
推定ガス濃度の推定に基づいてガス排出経路を切り替え
るガス経路切替方法を提供することを課題とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and a method for estimating a decompressed gas concentration capable of estimating an estimated gas concentration of a decompressed atmosphere in a decompression chamber, and
It is an object to provide a gas path switching method for switching a gas discharge path based on estimation of an estimated gas concentration.
【０００６】[0006]
【課題を解決するための手段】第１発明に係る減圧ガス
濃度推定方法は、ガス種類が予測できるガスを減圧雰囲
気で収容する減圧室と、減圧室のガス成分の種類に応じ
て真空度の出力感度が実質的に影響を受けない特性をも
つ第１真空計と、減圧室のガス成分の種類に応じて真空
度の出力感度が影響を受け易い特性をもつ第２真空計と
を用い、減圧室の圧力を第１真空計および第２真空計で
検出する操作と、第１真空計の指示値および第２真空計
の指示値に基づいて減圧室の推定ガス濃度を推定するこ
とを特徴とするものである。According to a first aspect of the present invention, there is provided a method for estimating a reduced pressure gas concentration, comprising: a decompression chamber for accommodating a predictable gas in a decompression atmosphere; A first vacuum gauge having a characteristic that the output sensitivity is not substantially affected, and a second vacuum gauge having a property that the output sensitivity of the vacuum degree is easily affected according to the type of the gas component in the decompression chamber, Detecting the pressure of the decompression chamber with the first and second vacuum gauges, and estimating the estimated gas concentration of the decompression chamber based on the indicated values of the first and second vacuum gauges. It is assumed that.
【０００７】第２発明に係るガス濃度推定を利用したガ
ス経路切替方法は、ガス種類が予測できるガスを減圧雰
囲気で収容する減圧室と、減圧室のガス成分の種類に応
じて真空度の出力感度が実質的に影響を受けない特性を
もつ第１真空計と、減圧室のガス成分の種類に応じて真
空度の出力感度が影響を受け易い特性をもつ第２真空計
と、減圧室のガスを排出する第１ガス排出経路と、減圧
室のガスを排出する第２ガス排出経路と、第１ガス排出
経路の開閉を切り替える第１切替弁と、第２ガス排出経
路の開閉を切り替える第２切替弁とを用い、減圧室の圧
力を第１真空計および第２真空計でそれぞれ検出する操
作と、第１真空計の指示値および第２真空計の指示値に
基づいて減圧室の推定ガス濃度を推定する操作と、推定
した推定ガス濃度が所定濃度を越えると、第１切替弁お
よび第２切替弁の一方を閉塞する閉塞操作と、第１切替
弁および第２切替弁の他方を開放する開放操作とを行
い、減圧室のガス排出の経路を変更する操作とを実施す
ることを特徴とするものである。A gas path switching method using gas concentration estimation according to a second aspect of the present invention provides a decompression chamber for accommodating a predictable gas in a decompressed atmosphere, and an output of a degree of vacuum according to the type of gas component in the decompression chamber. A first vacuum gauge having a characteristic in which the sensitivity is not substantially affected, a second vacuum gauge having a characteristic in which the output sensitivity of the degree of vacuum is easily affected in accordance with the type of a gas component in the decompression chamber, and A first gas discharge path for discharging gas, a second gas discharge path for discharging gas in the decompression chamber, a first switching valve for switching between opening and closing the first gas discharging path, and a second switching valve for switching between opening and closing for the second gas discharging path. An operation of detecting the pressure in the decompression chamber with the first vacuum gauge and the second vacuum gauge using the two switching valves, and estimating the decompression chamber based on the indicated values of the first and second gauges. Operation for estimating gas concentration and estimated gas concentration When the concentration exceeds the predetermined concentration, a closing operation for closing one of the first switching valve and the second switching valve and an opening operation for opening the other of the first switching valve and the second switching valve are performed to reduce the gas discharge of the decompression chamber. And performing an operation of changing the route.
【０００８】[0008]
【発明の実施の形態】本発明方法に係る減圧室は、減圧
雰囲気のガスを（例えば１０-3台Ｐａ〜１０ 2台Ｐａ）
収容するものであり、例えば、ガスを放出する処理物を
熱処理する熱処理炉の炉室で構成できる。第１真空計
は、減圧室のガス成分の種類に応じて真空度の出力感度
が実質的に影響を受けない特性をもつ真空計である。こ
のような第１真空計としてはＵ字管マノメータがある。DESCRIPTION OF THE PREFERRED EMBODIMENTS The decompression chamber according to the method of the present invention is
Atmospheric gas (for example, 10-3Table Pa-10 TwoTable Pa)
It accommodates, for example, a treated substance that releases gas.
It can be constituted by a furnace chamber of a heat treatment furnace for heat treatment. 1st vacuum gauge
Is the output sensitivity of the degree of vacuum according to the type of gas component in the decompression chamber.
Is a vacuum gauge having characteristics that are substantially unaffected. This
As the first vacuum gauge, there is a U-tube manometer.
【０００９】第２真空計は、減圧室のガス成分の種類に
応じて真空度の出力感度が影響を受け易い特性をもつ真
空計である。このような第２真空計としてはピラニ真空
計、電離真空計、熱電対真空計、粘性真空計がある。 文献：真空ハンドブック（出版社：オーム社,発行日：
平成４年１１月３０日）３０ページによれば、Ｕ字管マ
ノメータは、ガス種類に応じて感度が変化しないとされ
ている。同文献によれば、ピラニ真空計は、原理として
気体分子による熱伝導を利用するものであり、ガス種類
に応じて感度が変化するとされている。同文献によれ
ば、電離真空計は、原理として熱電子による残留ガスの
電離作用を利用するものであり、ガスの種類により感度
が変化するとされている。同文献によれば、粘性真空計
は、原理として気体の粘性を利用しており、ガスの種類
により感度が変化するとされている。The second vacuum gauge has a characteristic that the output sensitivity of the degree of vacuum is easily affected depending on the type of gas component in the decompression chamber. Such a second vacuum gauge includes a Pirani gauge, an ionization gauge, a thermocouple gauge, and a viscous gauge. Reference: Vacuum Handbook (Publisher: Ohmsha, Publication date:
According to page 30 (November 30, 1992), the sensitivity of the U-tube manometer does not change depending on the gas type. According to the document, the Pirani vacuum gauge utilizes heat conduction by gas molecules in principle, and its sensitivity changes according to the type of gas. According to the document, the ionization vacuum gauge uses, in principle, the ionization effect of residual gas due to thermoelectrons, and the sensitivity varies depending on the type of gas. According to the document, a viscous vacuum gauge utilizes the viscosity of a gas as a principle, and the sensitivity varies depending on the type of the gas.
【００１０】本発明方法では、減圧室の圧力を第１真空
計および第２真空計で検出する操作を行う。次に、第１
真空計の指示値および第２真空計の指示値に基づいて減
圧室の推定ガス濃度を推定する操作を行う。本発明に係
るガス経路切替方法によれば、上記推定方法で推定した
推定ガス濃度が所定の濃度（しきい値濃度）を越える
と、第１切替弁および第２切替弁の一方を閉塞する閉塞
操作と、第１切替弁および第２切替弁の他方を開放する
開放操作とを行い、減圧室のガス排出の経路を変更す
る。In the method of the present invention, an operation of detecting the pressure in the decompression chamber with the first vacuum gauge and the second vacuum gauge is performed. Next, the first
An operation of estimating the estimated gas concentration in the decompression chamber is performed based on the indicated value of the vacuum gauge and the indicated value of the second vacuum gauge. According to the gas path switching method of the present invention, when the estimated gas concentration estimated by the above estimation method exceeds a predetermined concentration (threshold concentration), one of the first switching valve and the second switching valve is closed. An operation and an opening operation for opening the other of the first switching valve and the second switching valve are performed to change a gas discharge path of the decompression chamber.
【００１１】[0011]
【実施例】（第１実施例）以下、第１実施例を図１〜図
２を参照して説明する。本実施例では図１から理解でき
るように、ガスを減圧雰囲気で収容する減圧室１と、減
圧室１のガス成分の種類に応じて真空度の出力感度が実
質的に影響を受けない特性をもつ第１真空計としてのＵ
字管マノメータ２と、減圧室１のガス成分の種類に応じ
て真空度の出力感度が影響を受け易い特性をもつ第２真
空計としてのピラニ真空計３とを用いる。減圧室１は真
空ポンプ４で減圧雰囲気とされている。処理物１ｃが減
圧室１に収容されている。処理物１ｃは圧粉体でも良い
し非圧粉体でも良い。処理物１ｃから水素ガスと、その
他のガスとの双方が減圧室１内に放出される。その他の
ガスは、その種類が予測がつくものものの、その濃度は
変化するおそれがありガス濃度の予測がつきにくいもの
である。本実施例方法は、このような減圧室１の減圧雰
囲気のガス濃度、つまり各ガスの概略的な水素ガス濃度
を推定するものである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment will be described below with reference to FIGS. In the present embodiment, as can be understood from FIG. 1, a decompression chamber 1 for accommodating a gas in a decompression atmosphere and a characteristic in which the output sensitivity of the degree of vacuum is not substantially affected according to the type of gas components in the decompression chamber 1 are shown. U as the first gauge
A pipe-shaped manometer 2 and a Pirani vacuum gauge 3 as a second vacuum gauge having a characteristic that the output sensitivity of the degree of vacuum is easily affected depending on the type of gas component in the decompression chamber 1 are used. The decompression chamber 1 is set in a decompression atmosphere by a vacuum pump 4. The processing object 1 c is accommodated in the decompression chamber 1. The processed material 1c may be a compact or a non-compact. Both hydrogen gas and other gases are released into the decompression chamber 1 from the processing object 1c. For other gases, although their types can be predicted, their concentrations may change and it is difficult to predict their gas concentrations. The method of the present embodiment estimates the gas concentration of the reduced-pressure atmosphere in the reduced-pressure chamber 1, that is, the approximate hydrogen gas concentration of each gas.
【００１２】マノメータ２は、上記した文献によればガ
スの種類の影響をうけないため、マノメータ２の指示値
は真空度の真値を示すとみなす。図２は、ピラニ真空計
３の真空度の指示値と真空度の真値と関係を示す。表１
は図２に基づいたデータである。図２の○印は窒化ガス
である場合を示し、●印は水素ガスである場合を示し、
△印はアルゴンガスである場合を示す。図２の○印及び
表１から理解できるように、水素ガスのときには、ピラ
ニ真空計３によれば、窒素ガスのときには、ピラニ真空
計３の真空度の指示値と真空度の真値と関係は、良好に
整合する。Since the manometer 2 is not affected by the type of gas according to the above-mentioned document, it is assumed that the indicated value of the manometer 2 indicates a true value of the degree of vacuum. FIG. 2 shows the relationship between the indicated value of the degree of vacuum of the Pirani vacuum gauge 3 and the true value of the degree of vacuum. Table 1
Is data based on FIG. In FIG. 2, the mark ○ indicates the case of nitriding gas, the mark ● indicates the case of hydrogen gas,
The mark Δ indicates the case of argon gas. As can be understood from the circles in FIG. 2 and Table 1, according to the Pirani vacuum gauge 3 for hydrogen gas, the relationship between the indicated value of the vacuum degree of the Pirani vacuum gauge 3 and the true value of the vacuum degree for nitrogen gas. Is a good match.
【００１３】[0013]
【表１】 しかしながら図２の●印及び表１から理解できるよう
に、水素ガスのときには、真空度の真値よりもピラニ真
空計３の真空度の指示値は高めとなり易い。[Table 1] However, as can be understood from the black circles in FIG. 2 and Table 1, in the case of hydrogen gas, the indicated value of the degree of vacuum of the Pirani vacuum gauge 3 tends to be higher than the true value of the degree of vacuum.
【００１４】例えば、図２及び表１によれば、水素ガス
のときには、真空度の真値が３５［Ｐａ］のときであっ
ても、ピラニ真空計３の真空度の指示値は５０［Ｐａ］
となる。また真空度の真値が８２［Ｐａ］のときであっ
ても、ピラニ真空計３の真空度の指示値は２００［Ｐ
ａ］となる。また真空度の真値が１３０［Ｐａ］のとき
であっても、ピラニ真空計３の真空度の指示値は５００
［Ｐａ］となる。For example, according to FIG. 2 and Table 1, in the case of hydrogen gas, even if the true value of the degree of vacuum is 35 [Pa], the indicated value of the degree of vacuum of the Pirani vacuum gauge 3 is 50 [Pa]. ]
Becomes Even when the true value of the degree of vacuum is 82 [Pa], the indicated value of the degree of vacuum of the Pirani gauge 3 is 200 [P].
a]. Even when the true value of the degree of vacuum is 130 [Pa], the indicated value of the degree of vacuum of the Pirani vacuum gauge 3 is 500
[Pa].
【００１５】なお、ピラニ真空計３によれば、アルゴン
ガスのときには、図２の△印及び表１から理解できるよ
うに、真空度の真値よりも真空度の指示値は低めとなり
易い。本実施例では、減圧室１の減圧雰囲気の圧力をマ
ノメータ２およびピラニ真空計３の双方で検出する操作
を行う。次に、マノメータ２の指示値およびピラニ真空
計３の指示値に基づいて、減圧室１の減圧雰囲気の推定
ガス濃度を推定する。According to the Pirani vacuum gauge 3, in the case of argon gas, the indicated value of the degree of vacuum is likely to be lower than the true value of the degree of vacuum, as can be understood from the marks in FIG. 2 and Table 1. In this embodiment, an operation of detecting the pressure of the reduced-pressure atmosphere in the reduced-pressure chamber 1 with both the manometer 2 and the Pirani vacuum gauge 3 is performed. Next, based on the indicated value of the manometer 2 and the indicated value of the Pirani vacuum gauge 3, the estimated gas concentration of the decompressed atmosphere in the decompression chamber 1 is estimated.
【００１６】例として、マノメータ２の指示値が８０
［Ｐａ］を示し、ピラニ真空計３が１００［Ｐａ］を示
した場合において、水素ガスの分圧とその他のガスの分
圧、ひいては水素ガスの濃度とその他のガスの濃度とを
推定するときについて、次の（ａ）〜（ｅ）にしたがっ
て説明する。ここで、減圧室１の減圧雰囲気における水
素ガスの分圧をＰH2とし、その他のガス（ワックスガ
ス）の分圧をＰBとする。 （ａ）マノメータ２の指示値が８０［Ｐａ］を示してい
る。これにより次の（１）が成立する。As an example, if the indicated value of the manometer 2 is 80
[Pa], and when the Pirani vacuum gauge 3 indicates 100 [Pa], when estimating the partial pressure of hydrogen gas and the partial pressure of other gases, and thus the concentration of hydrogen gas and the concentrations of other gases Will be described according to the following (a) to (e). Here, the partial pressure of hydrogen gas in the reduced-pressure atmosphere in the reduced-pressure chamber 1 is set to PH2, and the partial pressures of other gases (wax gas) are set to PB. (A) The indicated value of the manometer 2 indicates 80 [Pa]. Thereby, the following (1) is established.
【００１７】８０=ＰH2＋ＰB……（１） ここで真空度の真値を示すマノメータ２による検出であ
るため、ＰH2は減圧雰囲気における水素ガスの分圧の真
値であり、ＰBは減圧雰囲気におけるその他のガスの分
圧の真値であるとみなす。 （ｂ）ピラニ真空計３では、前述したように減圧雰囲気
における水素ガスの圧力を検出するときには、水素ガス
の分圧の真値よりも指示値が高めにでる。このピラニ真
空計３の指示値は１００［Ｐａ］を示している。これに
より次の（２）が成立する。80 = PH2 + PB (1) Here, since the detection is performed by the manometer 2 indicating the true value of the degree of vacuum, PH2 is the true value of the partial pressure of the hydrogen gas in the reduced pressure atmosphere, and PB is the other value in the reduced pressure atmosphere. Is considered to be the true value of the partial pressure of the gas. (B) In the Pirani vacuum gauge 3, as described above, when detecting the pressure of the hydrogen gas in the reduced-pressure atmosphere, the indicated value is higher than the true value of the partial pressure of the hydrogen gas. The indicated value of the Pirani vacuum gauge 3 indicates 100 [Pa]. Thereby, the following (2) is established.
【００１８】１００=Ｐ＋ＰB……（２） ここでＰは、ピラニ真空計３をもちいたとき、水素ガス
の分圧の真値よりも高めにでる水素ガスの分圧の指示値
とする。ＰBは、ピラニ真空計３をもちいたとき、その
他のガスの分圧である。実験によれば、ピラニ真空計３
をもちいたときとマノメータ２を用いたときとの間にお
ける差異は無視できる程度であるため、ＰBは、本ガス
推定方法（１）（２）においては同じ値として取り扱
う。（ｃ）ピラニ真空計３の指示値が１００［Ｐａ］付
近であるとき、図２の水素ガスを示す●印のグラフの傾
き（１００［Ｐａ］付近の傾き）から読みとれば、次の
（３）が得られる。100 = P + PB (2) Here, P is an indicated value of the partial pressure of the hydrogen gas which is higher than the true value of the partial pressure of the hydrogen gas when the Pirani vacuum gauge 3 is used. PB is the partial pressure of other gases when the Pirani vacuum gauge 3 is used. According to the experiment, Pirani vacuum gauge 3
Since the difference between the case of using the method and the case of using the manometer 2 is negligible, PB is treated as the same value in the present gas estimation methods (1) and (2). (C) When the indicated value of the Pirani vacuum gauge 3 is around 100 [Pa], the following (3) can be obtained by reading from the slope (slope near 100 [Pa]) of the graph of hydrogen gas shown in FIG. ) Is obtained.
【００１９】 Ｐ=（２．５×ＰH2）−３７．５……（３） ここでＰはピラニ真空計３による水素ガスの分圧の指示
値であり、ＰH2は水素ガスの分圧の真値である。（ｄ）
（２）に（３）を代入すると、次の（２’）が成立す
る。 １００=（２．５×ＰH2−３７．５）＋ＰB……（２’） （ｅ）（２’）−（１）を求めれば、次の（４）が成立
する。P = (2.5 × PH2) −37.5 (3) Here, P is an instruction value of a partial pressure of hydrogen gas by the Pirani vacuum gauge 3, and PH2 is a true value of a partial pressure of hydrogen gas. Value. (D)
By substituting (3) for (2), the following (2 ') holds. 100 = (2.5 × PH2−37.5) + PB (2 ′) (e) If (2 ′) − (1) is obtained, the following (4) is established.
【００２０】２０=１．５×ＰH2−３７．５……（４） （４）を展開すれば、 ＰH2=５７．５／１．５=３８．３ ＰH2=３８．３を前記（１）に代入すれば、 ＰB=８０−３８．３=４１．７ すなわち、上記したようにマノメータ２の指示値が８０
［Ｐａ］を示し、ピラニ真空計３が１００［Ｐａ］を示
したとき、減圧雰囲気における水素ガスの分圧とその他
のガスの分圧とを推定すると、水素ガスの分圧の真値は
３８．３［Ｐａ］であると推定され、その他のガス（ワ
ックスガス）の分圧の真値は４１．７［Ｐａ］であると
推定される。故に上記した指示値のとき、減圧室１の減
圧雰囲気における水素ガスの濃度は４７．９％（３８．
３／８０=０．４７９）である。20 = 1.5 × PH2−37.5 (4) By developing (4), PH2 = 57.5 / 1.5 = 38.3 PH2 = 38.3 PB = 80−38.3 = 41.7 That is, as described above, the indicated value of the manometer 2 becomes 80
When the Pirani vacuum gauge 3 indicates 100 [Pa] and the partial pressure of hydrogen gas and the partial pressure of other gases in the reduced pressure atmosphere are estimated, the true value of the partial pressure of hydrogen gas is 38. 0.3 [Pa], and the true value of the partial pressure of the other gas (wax gas) is estimated to be 41.7 [Pa]. Therefore, at the above indicated value, the hydrogen gas concentration in the reduced pressure atmosphere of the reduced pressure chamber 1 is 47.9% (38.
3/80 = 0.479).
【００２１】（別例）別例として、マノメータ２の指示
値が８０［Ｐａ］を示し、ピラニ真空計３が１５０［Ｐ
ａ］を示したとき、水素ガスの分圧とその他のガスの分
圧とを推定する。 ８０=ＰH2＋ＰB……（１Ａ） １５０=Ｐ＋ＰB=（２．５×ＰH2−３７．５）＋ＰB……（２Ａ’） （２Ａ’）−（１Ａ）を求めれば、次の（４Ａ）が成立
する。(Another Example) As another example, the indicated value of the manometer 2 indicates 80 [Pa] and the Pirani vacuum gauge 3 indicates 150 [P].
a), the partial pressures of hydrogen gas and other gases are estimated. 80 = PH2 + PB (1A) 150 = P + PB = (2.5.times.PH2-37.5) + PB (2A ') If (2A')-(1A) is obtained, the following (4A) is established. .
【００２２】 ７０=１．５×ＰH2−３７．５……（４Ａ） （４Ａ）を展開すれば、 ＰH2=１０７．５／１．５=７１．７ ＰH2=７１．７を前記（１Ａ）に代入すれば、 ＰB=８０−７１．７=８．３ すなわち、上記したようにマノメータ２の指示値が８０
［Ｐａ］を示し、ピラニ真空計３が１５０［Ｐａ］を示
したとき、減圧雰囲気における水素ガスの分圧とその他
のガスの分圧とを推定すると、水素ガスの分圧の真値は
７１．７［Ｐａ］であると推定され、その他のガスの分
圧の真値は８．３［Ｐａ］であると推定される。故に上
記した指示値のとき、減圧室１の減圧雰囲気における水
素ガスの濃度は８９．６％（７１．７／８０=０．８９
６）である。このようにワックスガスであるその他のガ
スの濃度がかなり低下しているとともに、水素ガスの濃
度がかなり高くなっているため、脱ワックス工程がかな
り進行したことを示している。70 = 1.5 × PH2−37.5 (4A) If (4A) is developed, PH2 = 107.5 / 1.5 = 71.7 PH2 = 71.7 is obtained by the above (1A) PB = 80−71.7 = 8.3 That is, as described above, the indicated value of the manometer 2 is 80
When the Pirani vacuum gauge 3 indicates 150 [Pa] and the partial pressure of hydrogen gas and the partial pressure of other gases in the reduced pressure atmosphere are estimated, the true value of the partial pressure of hydrogen gas is 71. 0.7 [Pa], and the true value of the partial pressure of other gases is estimated to be 8.3 [Pa]. Therefore, at the above indicated value, the hydrogen gas concentration in the reduced-pressure atmosphere in the reduced-pressure chamber 1 is 89.6% (71.7 / 80 = 0.89).
6). As described above, the concentration of the other gas as the wax gas is considerably decreased, and the concentration of the hydrogen gas is considerably increased, indicating that the dewaxing step has been considerably advanced.
【００２３】（第２実施例）第２実施例を図３，図４に
示す。本実施例によれば、図３に示すように、ガスを減
圧雰囲気で収容できる減圧室１と、減圧室１のガス成分
の種類に応じて真空度の出力感度が実質的に影響を受け
ない特性をもつ第１真空計としてのＵ字管マノメータ２
と、減圧室１のガス成分の種類に応じて真空度の出力感
度が影響を受け易い特性をもつ第２真空計としてのピラ
ニ真空計３と、減圧室１のガスを排出する第１ガス排出
経路５１と、減圧室１のガスを排出する第２ガス排出経
路５２と、第１ガス排出経路５１の開閉を切り替える第
１切替弁６１と、第２ガス排出経路５２の開閉を切り替
える第２切替弁６２と、第１切替弁６１及び第２切替弁
６２を駆動させる切替制御装置７とを用いる。Second Embodiment FIGS. 3 and 4 show a second embodiment. According to the present embodiment, as shown in FIG. 3, the decompression chamber 1 capable of storing a gas in a decompression atmosphere, and the output sensitivity of the degree of vacuum is not substantially affected by the type of gas components in the decompression chamber 1. U-tube manometer 2 as the first vacuum gauge having characteristics
A Pirani vacuum gauge 3 as a second vacuum gauge having a characteristic that the output sensitivity of the degree of vacuum is easily affected according to the type of gas component in the decompression chamber 1, and a first gas discharge for discharging the gas in the decompression chamber 1 A path 51, a second gas discharge path 52 for discharging gas from the decompression chamber 1, a first switching valve 61 for switching between opening and closing the first gas discharging path 51, and a second switching for switching between opening and closing for the second gas discharging path 52 The valve 62 and the switching control device 7 that drives the first switching valve 61 and the second switching valve 62 are used.
【００２４】減圧室１は、熱源をもつ熱処理炉１ｒで形
成されている。第１ガス排出経路５１の吸引端５１ａと
第２ガス排出経路５２の吸引端５２ａとは合流してお
り、合流部分に真空ポンプとしてのロータリポンプ５３
が装備されている。第１ガス排出経路５１には、ワック
ス成分を捕獲する捕獲装置５４が装備されている。第２
ガス排出経路５２には、真空ポンプとしての拡散ポンプ
５５、ブースタ５６が装備されている。The decompression chamber 1 is formed by a heat treatment furnace 1r having a heat source. The suction end 51a of the first gas discharge path 51 and the suction end 52a of the second gas discharge path 52 are joined, and a rotary pump 53 as a vacuum pump is provided at the junction.
Is equipped. The first gas discharge path 51 is provided with a capturing device 54 for capturing a wax component. Second
The gas discharge path 52 is equipped with a diffusion pump 55 as a vacuum pump and a booster 56.
【００２５】切替制御装置７は、マノメータ２及びピラ
ニ真空計３の指示値の信号がそれぞれ入力される入力処
理回路７０と、各信号に基づいて減圧雰囲気の水素ガス
の分圧、その他のガスの分圧、ひいては水素ガスの濃
度、その他のガスの濃度を推定する濃度推定手段を構成
するＣＰＵ７１と、ＣＰＵ７１からの制御信号が出力さ
れる出力処理回路７３と、出力処理回路７３からの信号
が入力される第１駆動回路７４及び第２駆動回路７５と
をもつ。第１駆動回路７４は第１切替弁６１を駆動して
開閉する。第２駆動回路７５は第２切替弁６２を駆動し
て開閉する。The switching control device 7 includes an input processing circuit 70 to which signals of indicated values of the manometer 2 and the Pirani vacuum gauge 3 are respectively inputted, a partial pressure of hydrogen gas in a reduced-pressure atmosphere, A CPU 71 constituting concentration estimating means for estimating the partial pressure, and thus the concentration of hydrogen gas and the concentration of other gases, an output processing circuit 73 for outputting a control signal from the CPU 71, and an input of a signal from the output processing circuit 73 And a second driving circuit 75. The first drive circuit 74 drives the first switching valve 61 to open and close. The second drive circuit 75 drives the second switching valve 62 to open and close.
【００２６】本実施例によれば、水素化チタン粉末（Ｔ
ｉＨ2粉末）とワックス（アクラワックス）とが混合し
た混合材料を圧縮成形した圧粉体１ｃを処理物として用
いる。熱処理炉の減圧室１に多数個の圧粉体１ｃを収容
した状態で、減圧室１を減圧しつつ、減圧室１内の圧粉
体１ｃを熱源１ｘを利用して加熱する。加熱に伴い、脱
ワックス工程が実施される。次に、更に高温領域におい
て脱水素工程が実施される。次に、更に高温領域におい
て本焼結工程が実施される。この熱履歴を図４に示す。According to this embodiment, the titanium hydride powder (T
A green compact 1c obtained by compression-molding a mixed material in which iH 2 powder) and wax (acura wax) are mixed is used as a processed material. In a state where a large number of compacts 1c are accommodated in the vacuum chamber 1 of the heat treatment furnace, the green compact 1c in the vacuum chamber 1 is heated using the heat source 1x while the vacuum chamber 1 is depressurized. With the heating, a dewaxing step is performed. Next, a dehydrogenation step is performed in a higher temperature region. Next, the main sintering step is performed in a higher temperature region. This heat history is shown in FIG.
【００２７】４００〜６００℃においてワックスガスが
圧粉体１ｃから減圧室１に放出され、４５０〜９００℃
において水素ガスが圧粉体１ｃから減圧室１に放出され
る。ワックスガスによって拡散ポンプ５５などが汚染さ
れるのを防止するため、ワックス工程においては、第１
切替弁６１を開放操作して第１ガス排出経路５１を開
き、且つ、第２切替弁６２を閉塞操作して第２ガス排出
経路５２を閉じる。At 400 to 600 ° C., wax gas is released from the green compact 1 c into the decompression chamber 1,
, Hydrogen gas is released from the green compact 1c to the decompression chamber 1. In order to prevent the diffusion pump 55 and the like from being contaminated by the wax gas, the first step is performed in the wax process.
The switching valve 61 is opened to open the first gas discharge path 51, and the second switching valve 62 is closed to close the second gas discharge path 52.
【００２８】これにより本実施例によれば、脱ワックス
工程においては減圧室１に放出されたワックスガスは第
１ガス排出経路５１を通過し、ワックス成分は捕獲装置
５４で捕獲される。第１ガス排出経路５１だけでは真空
度に限界があるため、脱水素工程においては第１切替弁
６１を閉塞操作して第１ガス排出経路５１を閉じ、且
つ、第２切替弁６２を開放操作して第２ガス排出経路５
２を開き、第２ガス排出経路５２を介して水素ガスを排
出する。Thus, according to the present embodiment, in the dewaxing step, the wax gas released into the decompression chamber 1 passes through the first gas discharge path 51, and the wax component is captured by the capturing device 54. Since the degree of vacuum is limited only by the first gas discharge path 51, in the dehydrogenation step, the first switching valve 61 is closed and the first gas discharge path 51 is closed, and the second switching valve 62 is opened. And the second gas discharge path 5
2 is opened, and hydrogen gas is discharged through the second gas discharge path 52.
【００２９】従来例によれば、水素ガスが多量には発生
しない４５０℃で脱ワックス工程を実施した後、所定時
間待機する。待機後、第１ガス排出経路５１を閉じ、第
２ガス排出経路５２を開き、脱水素工程に移行する。待
機時間として長時間(例えば３〜５時間）必要とする。
本実施例によれば、脱ワックス工程においては従来例よ
りもより高温の領域（５００〜９００℃）で実施し、脱
ワックス工程の所要時間の短縮化を図る。そのため、脱
ワックス工程においてはワックスガスと水素ガスの双方
が圧粉体１ｃから減圧室１に放出される。脱ワックス工
程の初期では減圧室１の減圧雰囲気はワックスガスの割
合が高いが、脱ワックス工程の終期に近づくにつれてワ
ックスガスの割合が次第に低くなり、水素ガスの割合が
高くなる。According to the conventional example, after performing the dewaxing process at 450 ° C. where a large amount of hydrogen gas is not generated, the process waits for a predetermined time. After the standby, the first gas discharge path 51 is closed, the second gas discharge path 52 is opened, and the process proceeds to the dehydrogenation step. A long time (for example, 3 to 5 hours) is required as the standby time.
According to this embodiment, the dewaxing step is performed in a higher temperature region (500 to 900 ° C.) than the conventional example, and the time required for the dewaxing step is reduced. Therefore, in the dewaxing step, both the wax gas and the hydrogen gas are released from the green compact 1c to the decompression chamber 1. At the beginning of the dewaxing step, the reduced pressure atmosphere in the decompression chamber 1 has a high proportion of wax gas, but as the end of the dewaxing step approaches, the proportion of wax gas gradually decreases and the proportion of hydrogen gas increases.
【００３０】本実施例によれば、脱ワックス工程におい
ては切替制御装置７の指令により、マノメータ２の指示
値とピラニ真空計３の指示値を所定時間ごとに求める。
そして切替制御装置７は、マノメータ２の指示値とピラ
ニ真空計３の指示値とに基づいて、水素ガスの分圧ＰH2
とその他のガスの分圧ＰBとを推定で求め、これに基づ
いて、減圧室１の減圧雰囲気における水素ガスの濃度Ｃ
ｓを推定で求める。According to the present embodiment, in the dewaxing step, the command value of the manometer 2 and the command value of the Pirani vacuum gauge 3 are obtained at predetermined time intervals according to a command from the switching control device 7.
Then, the switching controller 7 determines the partial pressure PH2 of the hydrogen gas based on the indicated value of the manometer 2 and the indicated value of the Pirani vacuum gauge 3.
And the partial pressures PB of the other gases are estimated, and based on this, the hydrogen gas concentration C in the reduced-pressure atmosphere of the reduced-pressure chamber 1 is determined.
s is obtained by estimation.
【００３１】そして、予め設定したしきい値Ｃｋよりも
水素ガスの濃度Ｃｓが高くなったら、脱ワックス工程が
終了、あるいは、実質的に終了したと、切替制御装置７
は判定する。故に、切替制御装置７は、減圧室１の加熱
温度を更に高温化して脱水素工程を行う。この場合に
は、切替制御装置７は、第１切替弁６１を閉塞操作して
第１ガス排出経路５１を閉じるとともに、第２切替弁６
２を開放操作して第２ガス排出経路５２を開く。以降
は、第２ガス排出経路５２からガスを排出する。When the concentration Cs of the hydrogen gas becomes higher than the preset threshold value Ck, the switching controller 7 determines that the dewaxing step has been completed or substantially completed.
Is determined. Therefore, the switching control device 7 performs the dehydrogenation step by further increasing the heating temperature of the decompression chamber 1. In this case, the switching control device 7 closes the first gas discharge path 51 by closing the first switching valve 61, and
2, the second gas discharge path 52 is opened. Thereafter, the gas is discharged from the second gas discharge path 52.
【００３２】このように本実施例によれば、減圧室１の
減圧雰囲気の水素ガスの濃度を推定できる。そのため、
この推定値に基づいて第１切替弁６１及び第２切替弁６
２の切替タイミングを判定すれば、第１ガス排出経路５
１から第２ガス排出経路５２への切替時期を良好になし
得、製造時間の短縮化に有利である。 （他の例）上記した例では減圧室１内の水素ガスの濃度
を推定しているが、これに限らず、減圧室１内にアルゴ
ンガスなどの別のガスが収容される場合には、アルゴン
ガスなどの別のガス濃度を推定することに適用しても良
い。As described above, according to this embodiment, the concentration of hydrogen gas in the reduced-pressure atmosphere in the reduced-pressure chamber 1 can be estimated. for that reason,
Based on this estimated value, the first switching valve 61 and the second switching valve 6
2 is determined, the first gas discharge path 5
The timing for switching from the first gas discharge path 52 to the second gas discharge path 52 can be made satisfactorily, which is advantageous for shortening the manufacturing time. (Other Examples) In the above example, the concentration of hydrogen gas in the decompression chamber 1 is estimated. However, the present invention is not limited to this, and when another gas such as argon gas is stored in the decompression chamber 1, It may be applied to estimating another gas concentration such as an argon gas.
【００３３】（付記）上記した実施例から次の技術的思
想も把握できる。 付記項：ガス種類が予測できるガスを減圧雰囲気で収
容する減圧室と、前記減圧室のガス成分の種類に応じて
真空度の出力感度が実質的に影響を受けない特性をもつ
第１真空計と、前記減圧室のガス成分の種類に応じて真
空度の出力感度が影響を受け易い特性をもつ第２真空計
と、前記第１真空計の指示値および前記第２真空計の指
示値に基づいて前記減圧室の推定ガス濃度を推定する濃
度推定手段とを具備していることを特徴とする減圧ガス
濃度推定装置。(Supplementary Note) The following technical ideas can be understood from the above-described embodiment. Additional notes: a decompression chamber for accommodating a gas whose gas type can be predicted in a decompression atmosphere, and a first vacuum gauge having characteristics that the output sensitivity of the degree of vacuum is not substantially affected according to the type of gas component in the decompression chamber. A second vacuum gauge having a characteristic that the output sensitivity of the degree of vacuum is easily affected in accordance with the type of the gas component in the decompression chamber, and an indication value of the first vacuum gauge and an indication value of the second vacuum gauge. And a concentration estimating means for estimating the estimated gas concentration in the decompression chamber based on the pressure.
【００３４】付記項：ガス種類が予測できるガスを減
圧雰囲気で収容する減圧室と、前記減圧室のガス成分の
種類に応じて真空度の出力感度が実質的に影響を受けな
い特性をもつ第１真空計と、前記減圧室のガス成分の種
類に応じて真空度の出力感度が影響を受け易い特性をも
つ前記第２真空計と、前記減圧室のガスを排出する第１
ガス排出経路と、前記減圧室のガスを排出する第２ガス
排出経路と、前記第１ガス排出経路の開閉を切り替える
第１切替弁と、前記第２ガス排出経路の開閉を切り替え
る第２切替弁と、前記第１真空計の指示値および前記第
２真空計の指示値に基づいて減圧室の推定ガス濃度を推
定するとともに、推定した推定ガス濃度が所定濃度を越
えると、前記第１切替弁および前記第２切替弁の一方を
閉塞する閉塞操作と、前記第１切替弁および前記第２切
替弁の他方を開放する開放操作とを行い、前記減圧室の
ガス排出の経路を変更する切替制御装置７とを具備して
いることを特徴とするガス経路切替装置。Additional remarks: A decompression chamber for accommodating a gas whose gas type can be predicted in a decompression atmosphere, and a second decompression chamber having characteristics that the output sensitivity of the degree of vacuum is not substantially affected by the type of gas component in the decompression chamber. (1) a vacuum gauge, the second vacuum gauge having a characteristic that the output sensitivity of the degree of vacuum is easily affected according to the type of gas component in the decompression chamber, and the first vacuum gauge for discharging the gas in the decompression chamber.
A gas discharge path, a second gas discharge path for discharging gas from the decompression chamber, a first switching valve for switching between opening and closing of the first gas discharging path, and a second switching valve for switching between opening and closing of the second gas discharging path And estimating the estimated gas concentration in the decompression chamber based on the indication value of the first vacuum gauge and the indication value of the second vacuum gauge, and when the estimated gas concentration exceeds a predetermined concentration, the first switching valve A switching operation for closing one of the second switching valves and an opening operation for opening the other of the first switching valve and the second switching valve to change a gas discharge path of the decompression chamber. A gas path switching device, comprising:
【００３５】付記項：請求項２または付記項におい
て、加熱に伴いガスを放出する処理物を減圧室に収容し
つつ、減圧室の処理物を高温領域に加熱する熱処理で用
いるガス経路切替方法、ガス経路切替装置、熱処理方法
または熱処理装置。 付記項：水素化化合物粉末（水素化チタン粉末）とワ
ックスとを主要成分とする混合材料で形成した処理物を
用い、処理物を減圧室内で加熱しつつ、請求項２または
付記項に基づいて脱ワックス工程を行ない、減圧室の
水素ガス濃度の推定値が所定濃度を越えたら、脱ワック
ス工程が終了したと判定する脱ワックス工程終了判定方
法。The gas path switching method used in the heat treatment for heating the processed material in the reduced-pressure chamber to a high-temperature region while accommodating the processed material that releases gas with heating in the reduced-pressure chamber according to claim 2 or the additional claim, Gas path switching device, heat treatment method or heat treatment device. Supplementary note: based on claim 2 or the supplementary note, using a processed product formed of a mixed material containing a hydride compound powder (titanium hydride powder) and wax as main components, and heating the processed product in a decompression chamber. A dewaxing step completion determining method for performing a dewaxing step and determining that the dewaxing step has been completed when the estimated value of the hydrogen gas concentration in the decompression chamber exceeds a predetermined concentration.
【００３６】[0036]
【発明の効果】第１発明によれば、減圧室の減圧雰囲気
のガス濃度を推定できる。第２発明によれば、推定した
ガス濃度に基づいて、適切な切替タイミングでガス排出
経路を切り替えることができる。According to the first aspect of the present invention, the gas concentration in the reduced-pressure atmosphere in the reduced-pressure chamber can be estimated. According to the second aspect, the gas discharge path can be switched at an appropriate switching timing based on the estimated gas concentration.
【図１】減圧ガス濃度推定方法で用いる装置の概略図で
ある。FIG. 1 is a schematic diagram of an apparatus used in a method for estimating a reduced pressure gas concentration.
【図２】各種ガスにおけるピラニ真空計の指示値と真空
度の真値との関係を示すグラフである。FIG. 2 is a graph showing the relationship between the indicated value of a Pirani vacuum gauge and the true value of the degree of vacuum for various gases.
【図３】ガス経路切替方法で用いる装置の概略図であ
る。FIG. 3 is a schematic view of an apparatus used in a gas path switching method.
【図４】焼結における熱履歴を示すグラフである。FIG. 4 is a graph showing a thermal history in sintering.
図中、１は減圧室、２は第１真空計としてのＵ字管マノ
メータ、３は第２真空計としてのピラニ真空計、５１は
第１ガス排出経路、５２は第２ガス排出経路、６１は第
１切替弁、６２は第２切替弁、７は切替制御装置を示
す。In the figure, 1 is a decompression chamber, 2 is a U-shaped tube manometer as a first vacuum gauge, 3 is a Pirani vacuum gauge as a second vacuum gauge, 51 is a first gas discharge path, 52 is a second gas discharge path, 61 Denotes a first switching valve, 62 denotes a second switching valve, and 7 denotes a switching control device.
Claims (2)
収容する減圧室と、前記減圧室のガス成分の種類に応じ
て真空度の出力感度が実質的に影響を受けない特性をも
つ第１真空計と、前記減圧室のガス成分の種類に応じて
真空度の出力感度が影響を受け易い特性をもつ第２真空
計とを用い、 前記減圧室の圧力を前記第１真空計および前記第２真空
計で検出する操作と、 前記第１真空計の指示値および前記第２真空計の指示値
に基づいて前記減圧室の推定ガス濃度を推定することを
特徴とする減圧ガス濃度推定方法。1. A decompression chamber for accommodating a gas whose gas type can be predicted in a decompression atmosphere, and a first decompression chamber having a characteristic that the output sensitivity of the degree of vacuum is not substantially affected by the type of gas component in the decompression chamber. Using a vacuum gauge and a second vacuum gauge having a characteristic that the output sensitivity of the degree of vacuum is easily affected according to the type of gas component in the decompression chamber, and using the first vacuum gauge and the second (2) A method for estimating a decompressed gas concentration, comprising: estimating an estimated gas concentration in the decompression chamber based on an operation of detecting with a vacuum gauge and an indicated value of the first gauge and an indicated value of the second gauge.
収容する減圧室と、前記減圧室のガス成分の種類に応じ
て真空度の出力感度が実質的に影響を受けない特性をも
つ第１真空計と、前記減圧室のガス成分の種類に応じて
真空度の出力感度が影響を受け易い特性をもつ前記第２
真空計と、前記減圧室のガスを排出する第１ガス排出経
路と、前記減圧室のガスを排出する第２ガス排出経路
と、前記第１ガス排出経路の開閉を切り替える第１切替
弁と、前記第２ガス排出経路の開閉を切り替える第２切
替弁とを用い、 前記減圧室の圧力を前記第１真空計および前記第２真空
計でそれぞれ検出する操作と、 前記第１真空計の指示値および前記第２真空計の指示値
に基づいて減圧室の推定ガス濃度を推定する操作と、 推定した推定ガス濃度が所定濃度を越えると、前記第１
切替弁および前記第２切替弁の一方を閉塞する閉塞操作
と、前記第１切替弁および前記第２切替弁の他方を開放
する開放操作とを行い、前記減圧室のガス排出の経路を
変更する操作とを実施することを特徴とするガス濃度推
定を利用したガス経路切替方法。2. A decompression chamber for accommodating a gas whose gas type can be predicted in a decompression atmosphere, and a first decompression chamber having a characteristic that the output sensitivity of the degree of vacuum is not substantially affected by the type of gas component in the decompression chamber. A vacuum gauge and the second one having a characteristic that the output sensitivity of the degree of vacuum is easily affected depending on the type of gas component in the decompression chamber.
A vacuum gauge, a first gas discharge path for discharging gas from the decompression chamber, a second gas discharge path for discharging gas from the decompression chamber, and a first switching valve for switching between opening and closing of the first gas discharge path; An operation of detecting the pressure of the decompression chamber with the first vacuum gauge and the second vacuum gauge, respectively, using a second switching valve for switching the opening and closing of the second gas discharge path; and an indication value of the first vacuum gauge And estimating the estimated gas concentration in the decompression chamber based on the indication value of the second vacuum gauge.
A closing operation for closing one of the switching valve and the second switching valve and an opening operation for opening the other of the first switching valve and the second switching valve are performed to change a gas discharge path of the decompression chamber. And a gas path switching method using gas concentration estimation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10242795A JP2000073102A (en) | 1998-08-28 | 1998-08-28 | Decompression gas concentration estimation method and gas path switching method using gas concentration estimation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10242795A JP2000073102A (en) | 1998-08-28 | 1998-08-28 | Decompression gas concentration estimation method and gas path switching method using gas concentration estimation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000073102A true JP2000073102A (en) | 2000-03-07 |
Family
ID=17094414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10242795A Pending JP2000073102A (en) | 1998-08-28 | 1998-08-28 | Decompression gas concentration estimation method and gas path switching method using gas concentration estimation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000073102A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180102494A (en) * | 2017-03-07 | 2018-09-17 | 토와 가부시기가이샤 | Resin sealing apparatus, resin molding method and manufacturing method of resin molded article |
| JP2021523361A (en) * | 2018-05-09 | 2021-09-02 | エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Partial pressure detector and method |
-
1998
- 1998-08-28 JP JP10242795A patent/JP2000073102A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180102494A (en) * | 2017-03-07 | 2018-09-17 | 토와 가부시기가이샤 | Resin sealing apparatus, resin molding method and manufacturing method of resin molded article |
| KR102232403B1 (en) | 2017-03-07 | 2021-03-26 | 토와 가부시기가이샤 | Resin sealing apparatus, resin molding method and manufacturing method of resin molded article |
| JP2021523361A (en) * | 2018-05-09 | 2021-09-02 | エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Partial pressure detector and method |
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