JP2000029035A - Liquid crystal element and its manufacture - Google Patents
Liquid crystal element and its manufactureInfo
- Publication number
- JP2000029035A JP2000029035A JP10194661A JP19466198A JP2000029035A JP 2000029035 A JP2000029035 A JP 2000029035A JP 10194661 A JP10194661 A JP 10194661A JP 19466198 A JP19466198 A JP 19466198A JP 2000029035 A JP2000029035 A JP 2000029035A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- substrate
- columnar structure
- substrates
- crystal element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 260
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000000758 substrate Substances 0.000 claims abstract description 225
- 239000000463 material Substances 0.000 claims abstract description 119
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 88
- 238000000034 method Methods 0.000 claims description 50
- 239000011248 coating agent Substances 0.000 claims description 41
- 238000000576 coating method Methods 0.000 claims description 41
- 239000011521 glass Substances 0.000 claims description 21
- 238000007789 sealing Methods 0.000 claims description 21
- 229920000642 polymer Polymers 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 14
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 239000002861 polymer material Substances 0.000 claims description 6
- 229920003002 synthetic resin Polymers 0.000 claims 2
- 239000000057 synthetic resin Substances 0.000 claims 2
- 239000000565 sealant Substances 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 26
- 239000004988 Nematic liquid crystal Substances 0.000 description 17
- 239000004986 Cholesteric liquid crystals (ChLC) Substances 0.000 description 16
- 150000002148 esters Chemical class 0.000 description 12
- 238000002310 reflectometry Methods 0.000 description 11
- 230000018109 developmental process Effects 0.000 description 10
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 229920000877 Melamine resin Polymers 0.000 description 7
- 230000018044 dehydration Effects 0.000 description 7
- 238000006297 dehydration reaction Methods 0.000 description 7
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000004925 Acrylic resin Substances 0.000 description 4
- 229920000178 Acrylic resin Polymers 0.000 description 4
- 239000004640 Melamine resin Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000003098 cholesteric effect Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000001747 exhibiting effect Effects 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920005575 poly(amic acid) Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- UWCWUCKPEYNDNV-LBPRGKRZSA-N 2,6-dimethyl-n-[[(2s)-pyrrolidin-2-yl]methyl]aniline Chemical compound CC1=CC=CC(C)=C1NC[C@H]1NCCC1 UWCWUCKPEYNDNV-LBPRGKRZSA-N 0.000 description 1
- 101000879758 Homo sapiens Sjoegren syndrome nuclear autoantigen 1 Proteins 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 102100037330 Sjoegren syndrome nuclear autoantigen 1 Human genes 0.000 description 1
- 239000004990 Smectic liquid crystal Substances 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- VBIXEXWLHSRNKB-UHFFFAOYSA-N ammonium oxalate Chemical compound [NH4+].[NH4+].[O-]C(=O)C([O-])=O VBIXEXWLHSRNKB-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、少なくとも一方が
透明な一対の基板間に柱状構造体と液晶とを配置した液
晶素子及びその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal device in which a columnar structure and a liquid crystal are arranged between a pair of substrates, at least one of which is transparent, and a method of manufacturing the same.
【0002】[0002]
【従来の技術】一対の基板間に液晶を封入した液晶素子
において、所定の駆動電圧で、所定のコントラスト、所
定の反射率等を得るためには基板間隙すなわち液晶の厚
みを一定に保つことが重要である。基板間隙を一定に保
つために、両基板間にプラスチック、ガラス等の材料か
らなる多数の粒状等のスペーサを挟持させることが行わ
れている。スペーサは基板を組み立てる前に予め一方の
基板に散布する、液晶材料中に予め混入させておく等の
方法で使用される。2. Description of the Related Art In a liquid crystal device in which liquid crystal is sealed between a pair of substrates, in order to obtain a predetermined contrast, a predetermined reflectance, and the like at a predetermined driving voltage, it is necessary to keep the substrate gap, that is, the thickness of the liquid crystal constant. is important. In order to keep the substrate gap constant, a large number of granular spacers made of a material such as plastic or glass are sandwiched between the two substrates. The spacer is used in such a manner that the spacer is sprayed on one of the substrates before assembling the substrate, or is mixed in the liquid crystal material in advance.
【0003】しかし、多数のスペーサを目的とする面積
範囲に均一に散布等することは技術的に困難である。ま
た、一対の基板の少なくとも一方が柔軟性のあるフィル
ム又はシート状のものである場合、基板間にスペーサを
挟持しただけでは基板表面に加えられた圧力により液晶
層の厚みが部分的に変化して表示が変化し易い。また、
スペーサによる方法では長期にわたり液晶層を所定の形
状に保つことが困難である。そこで、基板間隙の液晶領
域間に所定厚さの例えば樹脂からなる壁状構造体を形成
することが提案されている。[0003] However, it is technically difficult to uniformly spray a large number of spacers over a desired area range. In the case where at least one of the pair of substrates is a flexible film or sheet, the thickness of the liquid crystal layer partially changes due to the pressure applied to the substrate surface only by holding the spacer between the substrates. Display is easy to change. Also,
With the method using spacers, it is difficult to keep the liquid crystal layer in a predetermined shape for a long time. Therefore, it has been proposed to form a wall-shaped structure made of, for example, resin having a predetermined thickness between liquid crystal regions in a substrate gap.
【0004】例えば、特開昭62−203123号公報
によると、一対の電極付きフレキシブル基板間に液晶を
封入した液晶素子において、該基板間に厚さ均一のマト
リクス状に連続するポリマーからなる堰を固着し、該堰
により互いに分離された複数のセル内に液晶を互いに独
立して封入した液晶素子が開示されている。そして、こ
れにより基板周縁部からの液晶の漏れだしを防止するた
めに基板周縁部間をシールすることが不要になり、大面
積又は長尺に形成した液晶素子を切断して任意のサイズ
や形状の液晶素子を得ることができるとしている。For example, according to Japanese Patent Application Laid-Open No. 62-203123, in a liquid crystal element in which liquid crystal is sealed between a pair of flexible substrates with electrodes, a weir made of a polymer having a uniform thickness and continuous in a matrix is provided between the substrates. There is disclosed a liquid crystal element in which liquid crystals are independently sealed in a plurality of cells which are fixed and separated from each other by the weir. This eliminates the need to seal the periphery of the substrate in order to prevent leakage of liquid crystal from the periphery of the substrate, and cuts a large or long formed liquid crystal element to an arbitrary size or shape. It is said that a liquid crystal element of the above can be obtained.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、前記特
開昭62−203123号公報による液晶素子において
も、堰(壁状構造体)の材料である高分子物質の種類に
よっては液晶中に該高分子物質が溶けだして、液晶の特
性を損なったり、壁状構造体の形状が経時的に変化した
りする。壁状構造体の形状が崩れると、基板間隔が変化
するようになる。これらの場合、十分なコントラスト及
び反射率が得られなくなる。液晶を作動させるのに必要
な駆動電圧が全液晶領域にわたり均一にならず、そのた
め全液晶領域を同じように作動させるために駆動電圧を
高くしなければならなくなるという難点もある。However, in the liquid crystal device disclosed in Japanese Patent Application Laid-Open No. 62-203123, depending on the kind of the polymer substance which is the material of the weir (wall-like structure), the polymer is contained in the liquid crystal. The substance is melted, thereby impairing the properties of the liquid crystal and changing the shape of the wall-like structure over time. When the shape of the wall-like structure is broken, the distance between the substrates changes. In these cases, sufficient contrast and reflectance cannot be obtained. Another drawback is that the drive voltage required to operate the liquid crystal is not uniform over the entire liquid crystal area, and therefore the drive voltage must be increased to operate the entire liquid crystal area in the same manner.
【0006】そこで本発明は、少なくとも一方が透明な
一対の基板間に液晶を封入した液晶素子であって、従来
素子に比べて基板の硬軟に影響されることなく、また、
長期にわたり液晶層の厚みを一定に保つことができ、こ
れにより所望のコントラスト及び反射率が安定的に得ら
れる液晶素子及びその簡単な製造方法を提供することを
課題とする。Accordingly, the present invention provides a liquid crystal device in which liquid crystal is sealed between a pair of transparent substrates, at least one of which is not affected by the hardness of the substrate as compared with the conventional device.
It is an object of the present invention to provide a liquid crystal element in which the thickness of a liquid crystal layer can be kept constant over a long period of time, whereby a desired contrast and reflectance can be stably obtained, and a simple manufacturing method thereof.
【0007】[0007]
【課題を解決するための手段】前記課題を解決するため
に本発明者は研究を重ね、以下の、及びの知見を
得た。 基板の少なくとも一方が柔軟な材料からなるもので
ある場合に基板間隔を所定の間隔に保つためには、基板
対間に複数の柱状構造体を形成しておき、該柱状構造体
間の空間に液晶を満たせばよい。 この柱状構造体の材料として例えばホトレジストを
採用し、一方の基板上にホトレジスト材料を所定の厚さ
に塗布し、該塗膜を所定のフォトマスクを介して露光、
現像してホトレジストからなる柱状構造体とすることに
より、スペーサを用いなくても所望の高さの柱状構造体
を得ることができる。また、フォトマスクを介して露光
する方法により、極めて精度の良い柱状構造体を得るこ
とができる。 高分子物質と溶剤等の液体との相互作用を示す主要
なパラメータとして溶解度パラメータSPがあり、柱状
構造体の材料としてSP値が10〜15の材料から得ら
れる高分子物質を用いれば、液晶中への該高分子物質の
溶け出しが無視できる程度に少なくなり、柱状構造体の
形状を一定に保つことができる。そして、その結果液晶
相の厚みを一定に保つことができる。Means for Solving the Problems In order to solve the above-mentioned problems, the present inventors have conducted repeated studies and obtained the following findings. When at least one of the substrates is made of a flexible material, in order to keep the substrate interval at a predetermined interval, a plurality of columnar structures are formed between a pair of substrates, and a space between the columnar structures is formed. What is necessary is just to fill a liquid crystal. For example, a photoresist is adopted as a material of the columnar structure, a photoresist material is applied on one substrate to a predetermined thickness, and the coating film is exposed through a predetermined photomask,
By developing the columnar structure made of photoresist, a columnar structure having a desired height can be obtained without using a spacer. In addition, an extremely accurate columnar structure can be obtained by a method of exposing through a photomask. There is a solubility parameter SP as a main parameter indicating the interaction between a polymer substance and a liquid such as a solvent, and when a polymer substance obtained from a material having an SP value of 10 to 15 is used as a material for the columnar structure, the liquid crystal has Dissolution of the polymer material into the columnar structure becomes negligible, and the shape of the columnar structure can be kept constant. As a result, the thickness of the liquid crystal phase can be kept constant.
【0008】前記知見に基づき本発明は、少なくとも一
方が透明な、対向配置された第1及び第2の基板と、該
基板間に設けられた複数の柱状構造体と、前記基板間に
おける前記柱状構造体間の空間に封入された液晶とを備
えており、前記柱状構造体は、SP値が10〜15の材
料から得られる高分子物質で形成されていることを特徴
とする液晶素子を提供する。[0008] Based on the above knowledge, the present invention provides a first and second substrates, at least one of which is transparent, opposed to each other, a plurality of columnar structures provided between the substrates, and the columnar structure between the substrates. And a liquid crystal sealed in a space between the structures, wherein the columnar structure is formed of a polymer material obtained from a material having an SP value of 10 to 15. I do.
【0009】前記本発明の液晶素子によると、基板対間
に高分子物質からなる複数の柱状構造体が予め形成さ
れ、該柱状構造体間の領域に液晶が保持されているた
め、基板の少なくとも一方が柔軟な材料からなるもので
ある場合にも、基板対間隔を所定の間隔に保つことがで
きる。また、基板対間隔の維持にあたりスペーサを必要
としない。また、液晶は一般的に溶解度パラメータSP
の値が8以下であるが、本発明の液晶素子において柱状
構造体を構成している高分子物質は溶解度パラメータS
Pの値が10〜15の範囲にある材料から得られるもの
であるため、液晶に対して溶解せず又は殆ど溶解せず、
長期にわたり該柱状構造体の所定の形状が保持される。
これにより、基板対の間隔すなわち基板対間の液晶層の
厚みを一定に保つことができ、所望のコントラスト及び
所望の反射率を保つことができる。According to the liquid crystal device of the present invention, a plurality of columnar structures made of a polymer material are formed in advance between a pair of substrates, and the liquid crystal is held in a region between the columnar structures. Even when one is made of a flexible material, the distance between the substrates can be kept at a predetermined distance. Also, no spacer is required to maintain the substrate-to-substrate spacing. Also, the liquid crystal generally has a solubility parameter SP
Is 8 or less, the polymer constituting the columnar structure in the liquid crystal device of the present invention has a solubility parameter S
Since the value of P is obtained from a material in the range of 10 to 15, it is not dissolved or hardly dissolved in the liquid crystal,
The predetermined shape of the columnar structure is maintained for a long time.
Thereby, the distance between the substrate pairs, that is, the thickness of the liquid crystal layer between the substrate pairs can be kept constant, and the desired contrast and the desired reflectance can be maintained.
【0010】なお、材料のSP値は、測定対象である材
料と予めSP値の分かっている溶剤とを混ぜ、相溶する
か否かで測定することができる。前記高分子物質を得る
ための材料のSP値が10より小さくなってくると、液
晶のSP値と近くなって柱状構造体を構成する高分子物
質が液晶中に溶け出し易くなる。また、このSP値が1
5より大きくなってくると、高分子物質の吸湿性が増大
し、柱状構造体が水分を吸収して液晶性能が低下し易く
なる。[0010] The SP value of a material can be measured by mixing a material to be measured with a solvent whose SP value is known in advance and determining whether or not they are compatible with each other. When the SP value of the material for obtaining the polymer substance becomes smaller than 10, the SP value of the liquid crystal becomes close to the SP value of the liquid crystal, and the polymer substance constituting the columnar structure is easily dissolved in the liquid crystal. The SP value is 1
When it is larger than 5, the hygroscopicity of the polymer substance increases, and the columnar structure absorbs moisture, so that the liquid crystal performance tends to decrease.
【0011】また、前記高分子物質の種類は特に限定さ
れないが、ホトレジストを採用することにより、簡単に
所望の基板間隔を得ることができる。また、前記知見に
基づき本発明は、第1の基板の片方の面に、SP値が1
0〜15のホトレジスト材料を所定の厚さで塗布するホ
トレジスト材料塗布工程と、前記ホトレジスト材料の塗
膜から所定の露光パターンで露光処理を施す露光工程
と、前記露光工程後、前記塗膜を現像処理して前記露光
パターンに対応した複数の柱状構造体を得る現像工程
と、前記柱状構造体の上から、第2の基板を被せて前記
第1基板上方に重ね設ける基板重ね合わせ工程と、前記
柱状構造体間に液晶を配置する液晶配置工程とを含むこ
とを特徴とする液晶素子の製造方法を提供する。Although the kind of the polymer substance is not particularly limited, a desired substrate interval can be easily obtained by employing a photoresist. Further, based on the above knowledge, the present invention provides that the SP value is 1 on one surface of the first substrate.
A photoresist material application step of applying a photoresist material of 0 to 15 with a predetermined thickness, an exposure step of performing an exposure treatment on the coating film of the photoresist material in a predetermined exposure pattern, and after the exposure step, developing the coating film A developing step of processing to obtain a plurality of columnar structures corresponding to the exposure pattern, a substrate superimposing step of covering a second substrate from above the columnar structures and superimposing the first substrate on the first substrate, And a liquid crystal arranging step of arranging a liquid crystal between the columnar structures.
【0012】前記本発明の液晶素子の製造方法による
と、柱状構造体の材料としてホトレジストを採用し、一
方の基板上にホトレジスト材料を所定厚さで予め塗布し
ておき、該塗膜を露光、現像して柱状構造体を得るが、
さらに、柱状構造体を形成した基板を新たな基板で挟み
込むことにより所定厚さの液晶層を形成できる。また、
所望の柱状構造体が得られるような複数の開口を有する
フォトマスクを介してホトレジスト材料塗膜を露光、現
像して柱状構造体を得るため、マスク形状に応じた極め
て精度の良い柱状構造体を得ることができる。According to the method of manufacturing a liquid crystal element of the present invention, a photoresist is adopted as a material of the columnar structure, a photoresist material is applied in advance to a predetermined thickness on one of the substrates, and the coating film is exposed. Develop to get a columnar structure,
Further, a liquid crystal layer having a predetermined thickness can be formed by sandwiching the substrate on which the columnar structure is formed with a new substrate. Also,
To obtain a columnar structure by exposing and developing a photoresist material coating through a photomask having a plurality of openings so that a desired columnar structure can be obtained, an extremely accurate columnar structure corresponding to the mask shape is obtained. Obtainable.
【0013】なお、本発明において、「ホトレジスト材
料」とは、露光及び現像によりホトレジストを得るため
の原材料を指し、「ホトレジスト」とは、ホトレジスト
材料を露光及び現像して得られる材料を指す。ネガタイ
プの場合、ホトレジスト材料は低分子のモノマー又は
(及び)オリゴマーであり、露光した部分が重合するこ
とにより高分子物質となり、未露光部分は現像により除
去される。ポジタイプの場合、ホトレジスト材料は高分
子物質であり、露光した部分はアルカリ性現像液への溶
解性が増大し、現像することで該露光部分が除去され
て、未露光部分が高分子物質として残る。In the present invention, the term "photoresist material" refers to a raw material for obtaining a photoresist by exposure and development, and the term "photoresist" refers to a material obtained by exposing and developing a photoresist material. In the case of the negative type, the photoresist material is a low molecular weight monomer or (and) oligomer, and the exposed portion is polymerized by polymerizing, and the unexposed portion is removed by development. In the case of the positive type, the photoresist material is a polymer substance, and the exposed portion has increased solubility in an alkaline developer, and the exposed portion is removed by development, and the unexposed portion remains as a polymer material.
【0014】本発明の液晶素子及びその製造方法におい
て、柱状構造体は断面形状が円形、四角形等の多角形、
壁板状等のいずれであってもよい。いずれにしても、基
板間に連続した液晶領域が形成されるようにする。前記
柱状構造体の高さは、個々の柱状構造体の径、柱状構造
体の分布密度等にもよるが、前記両基板間に所定厚さで
液晶を封入するために、そしてあまり高くなりすぎて外
部からの荷重でたやすく座屈してしまうことがないよう
に、それには限定されないが、概ね3μm〜20μm程
度、より好ましくは5μm〜15μm程度にすることが
できる。In the liquid crystal element and the method of manufacturing the same according to the present invention, the columnar structure has a polygonal shape such as a circular or square cross section.
Any shape such as a wall plate shape may be used. In any case, a continuous liquid crystal region is formed between the substrates. The height of the columnar structure depends on the diameter of each columnar structure, the distribution density of the columnar structure, etc., but is too high for sealing the liquid crystal between the two substrates with a predetermined thickness. In order not to be easily buckled by a load from the outside, it is not limited thereto, but may be about 3 μm to 20 μm, more preferably about 5 μm to 15 μm.
【0015】透明基板側から見たときの観察面の光変調
領域における柱状構造物(柱状構造体)の占める面積の
割合が0.5%(開口率99.5%)以上であれば、液
晶素子として最低限必要な強度を得ることができる。光
変調領域における柱状構造物の占める面積の割合が増加
するにしたがって光変調部の面積は小さくなるが、その
割合が40%(開口率60%)以下であれば液晶素子と
して実用上充分な特性が得られる。上記を考慮して、柱
状構造物(柱状構造体)の幅方向の大きさは2μm〜2
50μm程度、柱間隔は3μm〜1000μm程度とす
ることができる。If the ratio of the area occupied by the columnar structure (columnar structure) in the light modulation region of the observation surface when viewed from the transparent substrate side is 0.5% or more (99.5% aperture ratio), the liquid crystal The minimum required strength as an element can be obtained. As the ratio of the area occupied by the columnar structures in the light modulation region increases, the area of the light modulation portion decreases. However, if the ratio is 40% or less (aperture ratio of 60%), the characteristics are sufficient for practical use as a liquid crystal element. Is obtained. In consideration of the above, the size of the columnar structure (columnar structure) in the width direction is 2 μm to 2 μm.
The distance between the pillars can be about 50 μm, and the distance between the pillars can be about 3 μm to about 1000 μm.
【0016】また、前記両基板の周縁部間の液晶漏れを
防止するために、前記柱状構造体の一部を該両基板の周
縁部間に延在させた封止壁とすることができる。或い
は、例えば樹脂等の封止剤で別途に形成された封止壁を
設けてもよい。封止壁は基板対を接着する接着剤として
の役割も有する。この場合、封止剤として、補助的に粒
状等の多数のスペーサを含む封止剤を採用しても構わな
い。In order to prevent liquid crystal leakage between the peripheral portions of the two substrates, a part of the columnar structure may be formed as a sealing wall extending between the peripheral portions of the two substrates. Alternatively, a sealing wall separately formed with a sealing agent such as a resin may be provided. The sealing wall also serves as an adhesive for bonding the substrate pair. In this case, as the sealing agent, a sealing agent containing a large number of spacers, such as particles, may be employed.
【0017】また、本発明の液晶素子において、第1及
び第2基板のそれぞれは駆動電圧を印加するための電極
を備えたものとすることができる。この場合例えば該両
基板を該電極が互いに向き合うように対向配置すること
ができる。また、本発明の液晶素子の製造方法において
も、第1及び第2基板としてそれぞれ電極を備えたもの
を採用することができる。この場合、例えば前記ホトレ
ジスト材料を第1基板の電極形成面上に塗布するととも
に、第2基板をその電極形成面を柱状構造体に向けてこ
れに被せることにより、該両基板を該電極が向き合うよ
うに対向配置させることができる。なお、第1及び第2
基板の少なくとも一方に電極を設けない場合も、例えば
外部電極を用いて該両基板間の液晶に駆動電圧を印加す
ることにより、表示を行うことは可能である。Further, in the liquid crystal device of the present invention, each of the first and second substrates may include an electrode for applying a drive voltage. In this case, for example, the two substrates can be arranged to face each other such that the electrodes face each other. Also, in the method of manufacturing a liquid crystal element of the present invention, the first and second substrates each having an electrode can be employed. In this case, for example, the photoresist material is applied on the electrode forming surface of the first substrate, and the second substrate is covered with the electrode forming surface of the first substrate facing the columnar structure. As shown in FIG. Note that the first and second
Even when electrodes are not provided on at least one of the substrates, display can be performed by applying a driving voltage to liquid crystal between the two substrates using, for example, external electrodes.
【0018】また、第1及び第2の基板として電極付き
基板を採用する場合であれ、そうでない場合であれ、前
記柱状構造体と前記第1又は(及び)第2の基板との間
に電気絶縁性膜を形成してもよい。第1、第2基板とし
て電極付き基板を採用するときは、電気絶縁性膜を設け
ると両基板間の電気的短絡防止に役立つ。電気絶縁性膜
は例えば少なくとも一方の基板の電極形成面上に形成し
ておくことができる。Further, whether or not a substrate with electrodes is used as the first and second substrates, an electric current is provided between the columnar structure and the first and / or second substrate. An insulating film may be formed. When a substrate with electrodes is used as the first and second substrates, providing an electrically insulating film helps prevent an electrical short circuit between the two substrates. The electrically insulating film can be formed, for example, on the electrode formation surface of at least one substrate.
【0019】また、前記柱状構造体と前記第1又は(及
び)第2の基板との間に配向膜を形成してもよい。配向
膜を設けると、液晶を所定の一定方向に配向させること
ができる。配向膜は電気絶縁性膜を兼ねていてもよい。
また、それは柱状構造体と基板とを接着する接着剤を兼
ねていてもよい。配向膜は第1基板の柱状構造体を形成
すべき面上又は(及び)第2基板の柱状構造体に向けて
被せられる面上に形成しておけばよい。また、第1基板
上に柱状構造体を形成し、その上に配向膜を設けたもの
を用意し、一方、第2基板の片方の面に同様の配向膜を
形成したものを用意し、両者の配向膜を高温にて貼り合
わせることもでき、これにより該配向膜を接着剤を兼ね
るものとすることができる。Further, an alignment film may be formed between the columnar structure and the first and / or second substrate. When the alignment film is provided, the liquid crystal can be aligned in a predetermined fixed direction. The alignment film may also serve as an electric insulating film.
It may also serve as an adhesive for bonding the columnar structure and the substrate. The alignment film may be formed on the surface of the first substrate on which the columnar structure is to be formed or (and / or) on the surface of the second substrate facing the columnar structure. Also, a columnar structure is formed on a first substrate, and an alignment film is provided on the columnar structure. On the other hand, a substrate on which a similar alignment film is formed on one surface of a second substrate is prepared. Can be bonded at a high temperature, so that the alignment film can also serve as an adhesive.
【0020】また、本発明方法において、前記露光工程
における露光処理は、それには限定されないが、例え
ば、前記柱状構造体を形成できるように露光用開口を形
成したフォトマスクで前記ホトレジスト材料塗膜を覆
い、該マスクの上から該塗膜に所定の光を照射すること
で行える。露光及び現像処理については、露光後のホト
レジスト材料塗膜を現像液に接触させて、該ホトレジス
ト材料がポジタイプかネガタイプかに応じて、露光され
た部分又は露光されなかった部分を溶解等させて除去す
ることで行える。In the method of the present invention, the exposure treatment in the exposure step is not limited to the above. For example, the photoresist material coating film may be formed using a photomask having an exposure opening formed so as to form the columnar structure. Covering is performed by irradiating the coating film with predetermined light from above the mask. For the exposure and development treatment, the exposed photoresist material coating is brought into contact with a developing solution, and depending on whether the photoresist material is a positive type or a negative type, an exposed portion or an unexposed portion is dissolved and removed. You can do that.
【0021】また、本発明方法において、前記露光工程
前に、前記ホトレジスト材料塗膜に所定温度及び時間で
プレベーキング処理を施してもよい。プレベーキング処
理を行うことにより、ホトレジスト材料中の有機溶剤を
除去することができる。また、前記露光工程後、前記現
像工程前に、前記塗膜に所定温度及び時間で露光後ベー
キング処理を施してもよい。このように、露光後にホト
レジスト材料塗膜にベーキング処理を施すことにより、
露光によるパターン形成を完結することができる。In the method of the present invention, the photoresist film may be subjected to a pre-baking treatment at a predetermined temperature and time before the exposure step. By performing the pre-baking process, the organic solvent in the photoresist material can be removed. Further, after the exposure step and before the development step, the coating film may be subjected to a post-exposure baking treatment at a predetermined temperature and a predetermined time. Thus, by performing the baking treatment on the photoresist material coating after exposure,
Pattern formation by exposure can be completed.
【0022】さらに、必要に応じて、前記現像工程後で
あって前記基板重ね合わせ工程及び液晶配置工程前に、
該現像工程により得られる柱状構造体に対しポスト露光
処理及びポストベーキング処理を施してもよい。ポスト
露光処理は、柱状構造体が形成された第1基板の全体に
対して行えばよい。ポスト露光処理を行うことにより、
ホトレジスト中の感光剤や反応促進剤等の添加物の液晶
中への流出を抑制することができ、該添加物による液晶
性能の低下をその分抑制することができる。また、ポス
ト露光処理及びポストベーキング処理を行うことによ
り、第1基板と柱状構造体との密着性を向上させること
ができる。Further, if necessary, after the developing step and before the substrate overlapping step and the liquid crystal disposing step,
The columnar structure obtained by the developing step may be subjected to a post exposure treatment and a post baking treatment. The post exposure treatment may be performed on the entire first substrate on which the columnar structures are formed. By performing post exposure processing,
It is possible to suppress an additive such as a photosensitizer or a reaction accelerator in the photoresist from flowing into the liquid crystal, and to suppress a decrease in liquid crystal performance due to the additive. Further, by performing the post exposure treatment and the post baking treatment, the adhesion between the first substrate and the columnar structure can be improved.
【0023】なお、本発明方法においては、柱状構造体
が形成された第1基板上に第2基板を重ね設けた後に両
基板間に液晶を封入してもよいが、第1基板上に形成さ
れた柱状構造体間の領域に液晶を満たした後、その上に
第2基板を重ね設けて、第1及び第2基板で柱状構造体
及び液晶を挟み込むこともできる。In the method of the present invention, the liquid crystal may be sealed between the two substrates after the second substrate is provided on the first substrate on which the columnar structures are formed. After the region between the columnar structures is filled with the liquid crystal, a second substrate may be overlaid thereon, and the columnar structure and the liquid crystal may be sandwiched between the first and second substrates.
【0024】[0024]
【発明の実施の形態】本発明の1実施形態である液晶素
子は、少なくとも一方が透明な、第1及び第2の電極付
き基板を有する。該基板は、該電極が互いに向き合うよ
うに対向配置されている。また、該基板間には複数の柱
状構造体が形成されている。該複数の柱状構造体はSP
値が10〜15の材料から得られる高分子物質からなる
ものである。前記基板間における前記柱状構造体間の空
間には液晶が封入されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS A liquid crystal device according to one embodiment of the present invention has first and second substrates with electrodes, at least one of which is transparent. The substrates are arranged so that the electrodes face each other. Also, a plurality of columnar structures are formed between the substrates. The plurality of columnar structures are SP
It is composed of a polymer substance obtained from a material having a value of 10 to 15. Liquid crystal is sealed in a space between the columnar structures between the substrates.
【0025】前記本発明の実施形態の液晶素子は、例え
ば次のようにして作製できる。前記高分子物質としてホ
トレジストを採用し、まず、第1の電極付き基板の電極
形成面に、SP値が10〜15のホトレジスト材料を所
定の厚さで塗布する。ホトレジスト材料の塗布は、スピ
ンコーティング法等の公知の方法で行える。ホトレジス
ト材料は、概ね3μm〜20μm程度、より好ましくは
5μm〜15μm程度の厚膜となるように均一に塗布す
る。The liquid crystal device according to the embodiment of the present invention can be manufactured, for example, as follows. A photoresist is adopted as the polymer substance. First, a photoresist material having an SP value of 10 to 15 is applied to a predetermined thickness on the electrode forming surface of the first electrode-attached substrate. The application of the photoresist material can be performed by a known method such as a spin coating method. The photoresist material is uniformly applied so as to form a thick film having a thickness of about 3 μm to 20 μm, more preferably about 5 μm to 15 μm.
【0026】本発明における「基板」は、可撓性のある
又は可撓性に乏しい板状部材、柔軟性のあるフィルム等
を含む概念のものであり、例えば、1対の基板のうち一
方が複合膜を保持し得るだけの硬度を有する板状のもの
であり、他方が該複合膜を保護するための、例えばフィ
ルム状のものであることも考えられる。第1及び第2基
板の双方がフィルム状等の柔軟な材料からなるものであ
っても勿論構わない。The "substrate" in the present invention is a concept including a flexible or poorly flexible plate-like member, a flexible film, and the like. For example, one of a pair of substrates is used. It is also conceivable that it is a plate having a hardness enough to hold the composite film, and the other is a film, for example, for protecting the composite film. Of course, both the first and second substrates may be made of a flexible material such as a film.
【0027】第1及び第2の電極付き基板のうち少なく
とも液晶素子観察側の電極付き基板を透明基板上に透明
電極を形成したものとすればよい。透明基板の材料とし
ては、例えば、ポリエチレンテレフタレート、ポリカー
ボネイト、ポリエーテルスルホン等の樹脂やガラス等を
採用できる。透明電極としてはITO(Indium Tin Oxi
de)、SnO2 、InO3 等の材料からなる電極、薄い
金属膜からなる電極等を用いることができる。It is sufficient that at least the substrate with electrodes on the liquid crystal element observation side of the first and second substrates with electrodes has a transparent electrode formed on a transparent substrate. As a material of the transparent substrate, for example, a resin such as polyethylene terephthalate, polycarbonate, polyether sulfone, glass, or the like can be adopted. As a transparent electrode, ITO (Indium Tin Oxi
de), an electrode made of a material such as SnO 2 or InO 3 , an electrode made of a thin metal film, or the like can be used.
【0028】次いで、所望の柱状構造体を形成できるよ
うなフォトマスクで前記ホトレジスト材料の塗膜を覆
い、該マスクの外側から該塗膜に該ホトレジスト材料に
応じた所定の光を照射する。なお、露光前又は(及び)
露光後現像前に、前記ホトレジスト材料塗膜に対してベ
ーキング処理を行ってもよい。露光前のベーキング(プ
レベーキング)処理は、具体的にはホトレジスト材料を
塗布した基板をホットプレート上に載置することで行え
る。このときの加熱温度は例えば100℃以上にするこ
とができる。露光後のベーキング(露光後ベーキング)
処理も同様に、露光後のレジスト付き基板を例えば10
0℃以上のホットプレート上に載置することで行える。Next, the coating of the photoresist material is covered with a photomask capable of forming a desired columnar structure, and the coating is irradiated with predetermined light corresponding to the photoresist material from outside the mask. In addition, before exposure or (and)
After the exposure and before the development, the photoresist material coating may be subjected to a baking treatment. The baking (pre-baking) treatment before exposure can be specifically performed by placing a substrate coated with a photoresist material on a hot plate. The heating temperature at this time can be, for example, 100 ° C. or higher. Baking after exposure (post-exposure baking)
In the same manner, the exposed substrate with the resist
It can be carried out by placing it on a hot plate at 0 ° C. or higher.
【0029】次いで、露光後の塗膜を現像液に浸ける等
して接触させ、該ホトレジスト材料がポジタイプかネガ
タイプかに応じて、露光部分又は未露光部分を溶解等し
て除去する。さらに、現像後の塗膜を純水等で洗浄し、
乾燥させる。これにより、マスク形状に応じた柱状構造
体が得られる。この後、必要に応じて、ポスト露光及び
ポストベーキング処理を行ってもよい。ポスト露光処理
とは、柱状構造にパターニングされたレジスト付き基板
の全体を露光する処理をいう。ポスト露光を行うことに
より、基板とレジストの密着性を高めることができる。
また、ポストベーキング処理は、具体的にはポスト露光
後のレジスト付き基板をホットプレート上に載置するこ
とで行える。このときの加熱温度は例えば100℃以上
にすることができる。ポストベーキングにより基板とレ
ジストの密着性が向上する。Then, the exposed coating film is brought into contact with the developer by immersing it in a developer or the like, and the exposed or unexposed portion is removed by dissolving or the like, depending on whether the photoresist material is a positive type or a negative type. Furthermore, the developed coating film is washed with pure water or the like,
dry. Thereby, a columnar structure corresponding to the mask shape is obtained. Thereafter, post-exposure and post-baking may be performed as necessary. The post-exposure process refers to a process of exposing the entire resist-coated substrate patterned into a columnar structure. By performing the post exposure, the adhesion between the substrate and the resist can be increased.
In addition, the post-baking treatment can be specifically performed by placing the substrate with the resist after the post-exposure on a hot plate. The heating temperature at this time can be, for example, 100 ° C. or higher. Post-baking improves the adhesion between the substrate and the resist.
【0030】次いで、第2の電極付き基板を、その電極
形成面を柱状構造体の方に向けてこれに重ね、第1の電
極付き基板と第2の電極付き基板とで柱状構造体を挟み
込む。次いで、液晶注入口を残し、樹脂等の封止剤を用
いて第1及び第2基板周縁部間を封止する。なお、柱状
構造体形成と同時に、同じホトレジスト材料を用いて第
1基板の周縁部に封止壁を形成しておくこともできる。Next, the second electrode-attached substrate is overlaid thereon with its electrode formation surface facing the columnar structure, and the columnar structure is sandwiched between the first electrode-attached substrate and the second electrode-attached substrate. . Next, the liquid crystal injection port is left, and the periphery of the first and second substrates is sealed using a sealing agent such as a resin. At the same time as the formation of the columnar structure, a sealing wall may be formed on the peripheral portion of the first substrate using the same photoresist material.
【0031】このようにして得られた空セルの注入口か
ら液晶を真空注入することにより、液晶素子が得られ
る。液晶の種類は特に限定されず、ネマティック液晶、
スメクティック液晶、コレステリック相を示す液晶(コ
レステリック液晶、ネマティック液晶に所定のヘリカル
ピッチが得られるようにカイラル材料を添加したカイラ
ルネマティック液晶等)等のいずれも用いることができ
る。A liquid crystal element is obtained by vacuum-injecting the liquid crystal from the injection port of the empty cell thus obtained. The type of liquid crystal is not particularly limited, and nematic liquid crystal,
Any of a smectic liquid crystal, a liquid crystal exhibiting a cholesteric phase (a cholesteric liquid crystal, a chiral nematic liquid crystal in which a chiral material is added to a nematic liquid crystal so as to obtain a predetermined helical pitch, and the like) can be used.
【0032】このようにして得られる本発明の1実施形
態の液晶素子の1例の断面を図1に示す。この液晶素子
は、第1電極付き基板1a及び第2の電極付き基板1b
を有し、両基板は電極が対向するように配置されてい
る。また、基板1a及び1bの間にはSP値10〜15
のホトレジスト材料から得られるホトレジストからなる
複数の柱状構造体2が形成されており、基板1a、1b
間の柱状構造体2間の空間には液晶3が満たされてい
る。また、基板1a、1b間の周縁部には高分子体から
なる封止壁4が形成されている。FIG. 1 shows a cross section of an example of the liquid crystal element of the embodiment of the present invention obtained in this way. This liquid crystal element comprises a substrate 1a with a first electrode and a substrate 1b with a second electrode.
, And both substrates are arranged so that the electrodes face each other. The SP value is between 10 and 15 between the substrates 1a and 1b.
A plurality of columnar structures 2 made of a photoresist obtained from the above photoresist material are formed on the substrate 1a, 1b.
The space between the columnar structures 2 is filled with liquid crystal 3. Further, a sealing wall 4 made of a polymer is formed at a peripheral portion between the substrates 1a and 1b.
【0033】この液晶素子によると、基板対1a、1b
間に複数の柱状構造体2が予め形成され、柱状構造体2
間の領域に液晶3が保持されているため、基板対1a、
1bの少なくとも一方が柔軟な材料からなるものである
場合にも、基板対間隔を所定の間隔に保つことができ
る。また、柱状構造体2を構成するホトレジストを得る
ためのホトレジスト材料は溶解度パラメータSPの値が
10〜15の範囲にあるため、これから得られるホトレ
ジスト柱状構造体は、通常SP値が8以下である液晶3
に対して溶解せず又は殆ど溶解せず、長期にわたり柱状
構造体2の所定の形状が保持される。これにより、基板
対1a、1bの間隔すなわち基板対間の液晶層の厚みを
一定に保つことができ、所望のコントラスト及び反射率
を保つことができる。なお、基板対間隔の維持にあたり
スペーサは特に必要ないが、柱状構造体を形成するとと
もにスペーサを併用しても構わない。この場合、例えば
第2基板1b上に予めスペーサを散布しておき、柱状構
造体を形成した第1基板1aと重ね合わせることにより
セルを作製することができる。According to this liquid crystal element, the substrate pair 1a, 1b
A plurality of columnar structures 2 are previously formed between the columnar structures 2
Since the liquid crystal 3 is held in the region between the two, the substrate pair 1a,
Even when at least one of 1b is made of a flexible material, the substrate-to-substrate distance can be kept at a predetermined distance. Further, since the photoresist material for obtaining the photoresist constituting the columnar structure 2 has a solubility parameter SP in the range of 10 to 15, the photoresist columnar structure obtained therefrom usually has a liquid crystal having an SP value of 8 or less. 3
The columnar structure 2 is not dissolved or hardly dissolved, and the predetermined shape of the columnar structure 2 is maintained for a long time. Thereby, the distance between the pair of substrates 1a and 1b, that is, the thickness of the liquid crystal layer between the pair of substrates can be kept constant, and desired contrast and reflectance can be maintained. A spacer is not particularly necessary for maintaining the distance between the substrates, but a spacer may be used together with the formation of the columnar structure. In this case, for example, a cell can be manufactured by dispersing spacers in advance on the second substrate 1b and overlapping the first substrate 1a on which the columnar structures are formed.
【0034】また、柱状構造体2の材料としてホトレジ
ストを採用し、一方の基板1a上にホトレジスト材料を
所定厚さで予め塗布しておき、該塗膜を露光、現像して
柱状構造体2を得る。さらに、柱状構造体2を形成した
基板1aに新たな基板1bを重ね合わせて所定厚さの液
晶層を形成できる。また、所望の柱状構造体が得られる
ような複数の開口を有するフォトマスクを介してホトレ
ジスト材料塗膜を露光、現像して柱状構造体2を得るた
め、マスク形状に応じた極めて精度の良い柱状構造体2
を得ることができる。Further, a photoresist is adopted as a material of the columnar structure 2, a photoresist material is previously applied to one substrate 1a at a predetermined thickness, and the coating film is exposed and developed to form the columnar structure 2. obtain. Furthermore, a new substrate 1b is superimposed on the substrate 1a on which the columnar structure 2 is formed, so that a liquid crystal layer having a predetermined thickness can be formed. In addition, since the photoresist material coating is exposed and developed through a photomask having a plurality of openings so that a desired columnar structure can be obtained, the columnar structure 2 is obtained. Structure 2
Can be obtained.
【0035】柱状構造物(柱状構造体)を構成する樹脂
として、液晶との接触角が小さいものを用いることによ
り、駆動電圧やコントラストなどのデバイス特性をより
良好なものとすることができる。液晶の種類にもよる
が、例えば液晶との接触角が20°以下、より好ましく
は17°以下となるような柱状構造物を用いることがで
きる。By using a resin having a small contact angle with the liquid crystal as a resin constituting the columnar structure (columnar structure), device characteristics such as driving voltage and contrast can be improved. Although it depends on the type of liquid crystal, for example, a columnar structure having a contact angle with liquid crystal of 20 ° or less, more preferably 17 ° or less can be used.
【0036】また、本発明の他の実施形態の液晶素子を
図2に示す。この液晶素子は、図1に示す液晶素子にお
いて、第1基板1aと柱状構造体2との間及び第2基板
1bと柱状構造体2との間に、それぞれこれら基板の面
積範囲にわたる電気絶縁性膜5が設けられたものであ
る。その他の構成は、図1の液晶素子と同様であり、同
じ部品には同じ参照符号を付している。この液晶素子に
よると、基板1a、1bの対向する面にそれぞれ設けら
れた電極間の電気的短絡が防止される。FIG. 2 shows a liquid crystal device according to another embodiment of the present invention. This liquid crystal element is different from the liquid crystal element shown in FIG. 1 in that the electrical insulating property between the first substrate 1a and the columnar structure 2 and between the second substrate 1b and the columnar structure 2 is over the area of these substrates. A film 5 is provided. Other configurations are the same as those of the liquid crystal element of FIG. 1, and the same components are denoted by the same reference numerals. According to this liquid crystal element, an electrical short circuit between the electrodes provided on the opposing surfaces of the substrates 1a and 1b is prevented.
【0037】この液晶素子を作製するにあたっては、電
極付き基板1a、1bの電極形成面上に予めSiO2 等
の電気絶縁性膜をスピンコート法、蒸着法等により形成
しておく。この電極及び電気絶縁性膜付き基板1a、1
bを用いて、図1の液晶素子の場合と同様にして液晶素
子を作製する。また、本発明のさらに他の実施形態の液
晶素子を図3に示す。この液晶素子は、図1に示す液晶
素子において、第1基板1aと柱状構造体2との間及び
第2基板1bと柱状構造体2との間に、それぞれこれら
基板の面積範囲にわたる配向膜6が設けられたものであ
る。その他の構成は、図1の液晶素子と同様であり、同
じ部品には同じ参照符号を付している。この液晶素子に
よると、配向膜6の存在により、初期状態において液晶
分子はその長軸方向が基板に垂直、平行又は一定角度傾
いた方向に揃った配向状態となる。In manufacturing this liquid crystal element, an electrically insulating film such as SiO 2 is previously formed on the electrode forming surfaces of the substrates 1a and 1b with electrodes by a spin coating method, a vapor deposition method or the like. These electrodes and the substrates 1a, 1
Using b, a liquid crystal element is manufactured in the same manner as in the case of the liquid crystal element in FIG. FIG. 3 shows a liquid crystal device according to still another embodiment of the present invention. This liquid crystal element is different from the liquid crystal element shown in FIG. 1 in that an alignment film 6 is provided between the first substrate 1a and the columnar structure 2 and between the second substrate 1b and the columnar structure 2 over the area of these substrates. Is provided. Other configurations are the same as those of the liquid crystal element of FIG. 1, and the same components are denoted by the same reference numerals. According to this liquid crystal element, due to the presence of the alignment film 6, in the initial state, the liquid crystal molecules have an alignment state in which the major axis directions are aligned in a direction perpendicular, parallel or inclined at a certain angle to the substrate.
【0038】この液晶素子を作製するにあたっては、電
極付き基板1a、1bの電極形成面上に予めポリイミド
配向膜、ポリアミック酸タイプ配向膜などの配向膜をス
ピンコーティング法等の方法により形成しておく。この
電極及び配向膜付き基板1a、1bを用いて、図1の液
晶素子の場合と同様にして液晶素子を作製する。また、
図4に示すように、第1基板1aと柱状構造体2との間
及び第2基板1bと柱状構造体2との間に、それぞれこ
れら基板の面積範囲にわたる電気絶縁性膜5及び配向膜
6がこの順に設けられた液晶素子も、本発明のさらに他
の実施形態として挙げることができる。この液晶素子に
よると、基板1a、1bの対向する面にそれぞれ設けら
れた電極間の電気的短絡が防止されるとともに、初期状
態において液晶分子が所定の配向状態となる。この液晶
素子は、第1及び第2基板1a、1bの各電極形成面上
に予め電気絶縁性膜5及び配向膜6を形成しておき、そ
の他は図1の液晶素子の場合と同様にして作製できる。In manufacturing this liquid crystal element, an alignment film such as a polyimide alignment film or a polyamic acid type alignment film is previously formed on the electrode forming surfaces of the substrates 1a and 1b with electrodes by a method such as spin coating. . Using these electrodes and the substrates 1a and 1b with an alignment film, a liquid crystal element is manufactured in the same manner as in the case of the liquid crystal element of FIG. Also,
As shown in FIG. 4, between the first substrate 1a and the columnar structure 2 and between the second substrate 1b and the columnar structure 2, the electrically insulating film 5 and the alignment film 6 covering the area range of these substrates respectively. However, a liquid crystal element provided in this order can also be cited as still another embodiment of the present invention. According to this liquid crystal element, an electric short circuit between the electrodes provided on the opposing surfaces of the substrates 1a and 1b is prevented, and the liquid crystal molecules are in a predetermined alignment state in an initial state. In this liquid crystal element, an electric insulating film 5 and an alignment film 6 are previously formed on each of the electrode forming surfaces of the first and second substrates 1a and 1b, and otherwise the same as in the case of the liquid crystal element of FIG. Can be made.
【0039】また、図5に示すように、第1基板1aと
柱状構造体2との間に基板の面積範囲にわたる電気絶縁
性膜5及び配向膜6がこの順に形成された液晶素子も、
本発明のさらに他の実施形態として挙げることができ
る。この液晶素子によると、図3の液晶素子と同様に、
基板1a、1bの対向する面にそれぞれ設けられた電極
間の電気的短絡が防止されるとともに、初期状態におい
て液晶分子が所定の配向状態となる。この液晶素子は、
第1基板1aの電極形成面上に予め電気絶縁性膜5及び
配向膜6を形成しておき、その他は図1の液晶素子の場
合と同様にして作製できる。As shown in FIG. 5, a liquid crystal element in which an electric insulating film 5 and an alignment film 6 are formed in this order between the first substrate 1a and the columnar structure 2 over the area of the substrate is also provided.
This can be cited as still another embodiment of the present invention. According to this liquid crystal element, like the liquid crystal element of FIG.
An electric short circuit between the electrodes provided on the opposing surfaces of the substrates 1a and 1b is prevented, and the liquid crystal molecules are in a predetermined alignment state in an initial state. This liquid crystal element
An electrical insulating film 5 and an alignment film 6 are previously formed on the electrode forming surface of the first substrate 1a, and the other components can be manufactured in the same manner as the liquid crystal element of FIG.
【0040】また、図6に示すように、第2基板1bと
柱状構造体2との間に基板の面積範囲にわたる電気絶縁
性膜5及び配向膜6がこの順に形成された液晶素子も、
本発明のさらに他の実施形態として挙げることができ
る。この液晶素子によると、図3の液晶素子と同様に、
基板1a、1bの対向する面にそれぞれ設けられた電極
間の電気的短絡が防止されるとともに、初期状態におい
て液晶分子が所定の配向状態となる。この液晶素子は、
第2基板1bの電極形成面上に予め電気絶縁性膜5及び
配向膜6を形成しておき、その他は図1の液晶素子の場
合と同様にして作製できる。As shown in FIG. 6, a liquid crystal element in which an electric insulating film 5 and an orientation film 6 are formed in this order between the second substrate 1b and the columnar structure 2 over the area of the substrate is also provided.
This can be cited as still another embodiment of the present invention. According to this liquid crystal element, like the liquid crystal element of FIG.
An electric short circuit between the electrodes provided on the opposing surfaces of the substrates 1a and 1b is prevented, and the liquid crystal molecules are in a predetermined alignment state in an initial state. This liquid crystal element
An electrical insulating film 5 and an alignment film 6 are previously formed on the electrode forming surface of the second substrate 1b, and the other components can be manufactured in the same manner as the liquid crystal device of FIG.
【0041】なお、図3、図4及び図6の液晶素子を作
製するにあたり、第2基板1b上に配向膜をスピンコー
ティング法等の方法で形成しておくのに加えて、第1基
板1a上に形成した柱状構造体2の上面に配向膜の材料
をスプレー塗布し、高温(例えば200℃)で焼き締め
ることで配向膜を形成することもできる。この後、両基
板1a及び1bの配向膜を高温(例えば200℃)の温
度下で貼り合わせることにより、両基板1a、1b間の
接着力を向上させることができる。In manufacturing the liquid crystal device shown in FIGS. 3, 4 and 6, in addition to forming an alignment film on the second substrate 1b by a method such as spin coating, the first substrate 1a The alignment film can also be formed by spray-coating the material of the alignment film on the upper surface of the columnar structure 2 formed thereon and baking at high temperature (for example, 200 ° C.). Thereafter, by bonding the alignment films of both substrates 1a and 1b at a high temperature (for example, 200 ° C.), the adhesive strength between both substrates 1a and 1b can be improved.
【0042】以上説明した液晶素子を電圧印加により駆
動するにあたっては、高低2種類の電圧を印加して液晶
分子の配列を切り換える。例えばコレステリック相を示
す液晶を用いる場合、高低2種類のパルス電圧を印加し
液晶分子の配列をプレーナ配列とフォーカルコニック配
列との間で切替える。この状態は電圧印加停止後も安定
に保持される。In driving the above-described liquid crystal element by applying a voltage, two kinds of high and low voltages are applied to switch the arrangement of liquid crystal molecules. For example, when a liquid crystal exhibiting a cholesteric phase is used, two kinds of high and low pulse voltages are applied to switch the arrangement of liquid crystal molecules between a planar arrangement and a focal conic arrangement. This state is maintained stably even after the voltage application is stopped.
【0043】コレステリック相を示す液晶は、ヘリカル
軸が基板に対して垂直に並んだプレーナ配列状態でヘリ
カルピッチと該液晶の平均屈折率の積に対応する波長の
光を選択的に反射する。従って、選択反射波長が例えば
赤色域、青色域、緑色域にある液晶を用いれば、プレー
ナ配列状態で各波長の光を選択的に反射してそれぞれ
赤、青、緑に着色して見える。また、各色の液晶層を積
層することによりマルチカラー表示も可能である。ま
た、選択反射波長を例えば赤外域に設定することにより
透明に見える。カイラルネマティック液晶では、カイラ
ル剤の添加量を調整してヘリカルピッチを調整すること
により、選択反射波長を調整できる。A liquid crystal exhibiting a cholesteric phase selectively reflects light having a wavelength corresponding to the product of the helical pitch and the average refractive index of the liquid crystal in a planar arrangement in which the helical axis is arranged perpendicular to the substrate. Therefore, if liquid crystals having selective reflection wavelengths in, for example, the red, blue, and green regions are used, light of each wavelength is selectively reflected in the planar arrangement state and appears to be colored red, blue, and green, respectively. Multi-color display is also possible by stacking liquid crystal layers of each color. In addition, by setting the selective reflection wavelength to, for example, an infrared region, it looks transparent. In the chiral nematic liquid crystal, the selective reflection wavelength can be adjusted by adjusting the helical pitch by adjusting the amount of the chiral agent added.
【0044】また、コレステリック相を示す液晶は、ヘ
リカル軸が不規則な方向を向いたフォーカルコニック配
列状態で入射光を散乱して白濁して見える。コレステリ
ック液晶の選択反射波長が可視域にある場合のように、
そのヘリカルピッチが短いと散乱が小さくなって、ヘリ
カル軸が基板に対してほぼ平行に並ぶようになり、透明
に近い状態が得られる。The liquid crystal exhibiting a cholesteric phase appears opaque by scattering incident light in a focal conic alignment state in which the helical axis is oriented in an irregular direction. As in the case where the selective reflection wavelength of the cholesteric liquid crystal is in the visible range,
When the helical pitch is short, scattering is reduced, and the helical axis is arranged substantially parallel to the substrate, so that a state close to being transparent can be obtained.
【0045】従って、プレーナ配列とフォーカルコニッ
ク配列の2状態を切り換えることにより、選択反射(プ
レーナ配列)−透明(フォーカルコニック配列)、透明
(プレーナ配列)−白濁(フォーカルコニック配列)等
の表示を行うことができる。なお、ネマティック液晶を
単独で用いる方法、例えば、偏光板2枚を直交させて液
晶層を挟んで設置し、上部偏光板を通過した光を液晶分
子の光学異方性Δnの効果により液晶分子のねじれに沿
って回転させ、下部の偏光板を通過させることによって
明るい状態とする一方、液晶層に電界を印加し液晶分子
のねじれが解けた状態においては、偏波面を回転させる
効果がないため入射光は下部の偏光板によって遮られ暗
い状態となる、いわゆるTN方式にも適用可能である。Therefore, by switching between the two states of the planar arrangement and the focal conic arrangement, a display such as selective reflection (planar arrangement) -transparent (focal conic arrangement), transparent (planar arrangement) -white turbidity (focal conic arrangement), or the like is performed. be able to. In addition, a method using a nematic liquid crystal alone, for example, two polarizing plates are arranged orthogonally to each other with a liquid crystal layer interposed therebetween, and light passing through the upper polarizing plate is subjected to the effect of the optical anisotropy Δn of the liquid crystal molecules to form the liquid crystal molecules. By rotating along the twist and passing it through the lower polarizing plate, it becomes brighter.On the other hand, when the electric field is applied to the liquid crystal layer and the liquid crystal molecules are untwisted, there is no effect of rotating the plane of polarization. The light can also be applied to a so-called TN method in which light is blocked by a lower polarizing plate and becomes dark.
【0046】[0046]
【実施例】以下、本発明を実施例を挙げて具体的に説明
するが、本発明はそれらの実施例に限定されるものでは
ない。以下の各例において、反射率の測定は反射型分光
測色計CM−1000(ミノルタ社製)を用いていて分
光反射率(Y値)を測定することで行った。Y値が小さ
いほど透明である。また、コントラストは(高反射率状
態でのY値/低反射率状態でのY値)で与えられる。 実施例1 良く洗浄された第1のITO電極付きガラス基板を20
0℃で30分間脱水ベーキングし、メラミン系樹脂から
なるホトレジスト材料(SP値10、ネガ型、JSR社
製)を5μm、12μm、18μmの厚膜となるように
それぞれスピンコーティングした。次いで、該塗膜を1
00℃で5分間プレベーキングし、複数の柱状構造体が
得られるような複数の開口を有するフォトマスクを該塗
膜上に設け、該フォトマスクを介して該ホトレジスト材
料塗膜を紫外線照射装置を用いて露光した。次いで、1
00℃で3分間露光後ベーキングを行い、現像を行っ
た。次いで、純水で洗浄後、乾燥させた。さらに、ポス
ト露光と100℃で5分間のポストベーキングを行い、
柱状構造体を得た。EXAMPLES Hereinafter, the present invention will be described specifically with reference to examples, but the present invention is not limited to these examples. In each of the following examples, the reflectance was measured by measuring the spectral reflectance (Y value) using a reflection type spectrophotometer CM-1000 (manufactured by Minolta). The smaller the Y value, the more transparent. The contrast is given by (Y value in high reflectance state / Y value in low reflectance state). Example 1 A well-cleaned first glass substrate with an ITO electrode was
After dehydration baking at 0 ° C. for 30 minutes, a photoresist material made of a melamine resin (SP value: 10, negative type, manufactured by JSR) was spin-coated so as to form thick films of 5 μm, 12 μm, and 18 μm, respectively. Then, the coating film was
Prebaking at 00 ° C. for 5 minutes, providing a photomask having a plurality of openings so as to obtain a plurality of columnar structures on the coating film, and applying the photoresist material coating film through the photomask to an ultraviolet irradiation device. And exposed. Then 1
After exposure at 00 ° C. for 3 minutes, baking was performed and development was performed. Next, the substrate was washed with pure water and dried. Furthermore, post exposure and post baking at 100 ° C. for 5 minutes are performed.
A columnar structure was obtained.
【0047】なお、ホトレジスト材料のSP値は、予め
SP値の分かっている有機溶剤と混合し、相溶する(透
明状態を維持する)か相溶しない(白濁する)かを目視
にて判断し、該ホトレジスト材料が相溶した有機溶剤の
SP値と同じであるとした。以下の各実施例においても
同様である。膜厚計で柱状構造体の高さを測定したとこ
ろ、それぞれ5μm、12μm、18μmの膜厚であっ
た。以上の工程により得られる柱状構造体の高さは基板
上に塗布したホトレジスト材料の厚みと同じであること
が確認された。The SP value of the photoresist material is determined by mixing it with an organic solvent of which the SP value is known in advance and visually determining whether it is compatible (maintains a transparent state) or incompatible (has cloudiness). And the SP value of the organic solvent in which the photoresist material was compatible. The same applies to the following embodiments. When the height of the columnar structure was measured with a film thickness meter, the film thickness was 5 μm, 12 μm, and 18 μm, respectively. It was confirmed that the height of the columnar structure obtained by the above steps was the same as the thickness of the photoresist material applied on the substrate.
【0048】次いで、第1基板上の柱状構造体の上に、
第2のITO電極付きガラス基板を電極形成面を該柱状
構造体の方に向けて被せ、スペーサ入りの封止剤フォト
レック(積水ファインケミカル社製)を用いて基板周縁
部間を封止及び接着し、空セルを得た。次いで、空セル
にSP値7の、エステル系ネマティック液晶(屈折率異
方性Δn=0.170、誘電率異方性Δε=30、等方
相への相転移温度TN- I =100℃)にカイラル材料
(S−811、メルク社製)を添加したカイラルネマテ
ィック液晶を注入した。5μmの柱状構造体を有する空
セルには青色領域に選択反射波長を有するようにカイラ
ル材料の添加量を調整した液晶を注入し、12μmの柱
状構造体を有する空セルには緑色領域に選択反射波長を
有するようにカイラル材料の添加量を調整した液晶を注
入し、18μmの柱状構造体を有する空セルには赤色領
域に選択反射波長を有するようにカイラル材料の添加量
を調整した液晶を注入し、液晶素子を得た。Next, on the columnar structure on the first substrate,
A glass substrate with a second ITO electrode is covered with the electrode forming surface facing the columnar structure, and a sealing agent Photolec (manufactured by Sekisui Fine Chemical Co., Ltd.) containing spacers is used to seal and bond between the peripheral portions of the substrate. Then, an empty cell was obtained. Next, an ester-based nematic liquid crystal having an SP value of 7 (refractive index anisotropy Δn = 0.170, dielectric anisotropy Δε = 30, phase transition temperature to isotropic phase T N− I = 100 ° C.) is placed in an empty cell. ) Was injected with a chiral nematic liquid crystal to which a chiral material (S-811, manufactured by Merck) was added. Liquid crystal in which the amount of the chiral material added is adjusted so as to have a selective reflection wavelength in the blue region is injected into an empty cell having a columnar structure of 5 μm, and selectively reflected in the green region into an empty cell having a columnar structure of 12 μm. Liquid crystal in which the addition amount of the chiral material is adjusted so as to have a wavelength is injected, and liquid crystal in which the addition amount of the chiral material is adjusted so as to have a selective reflection wavelength in the red region is injected into an empty cell having a columnar structure of 18 μm. Thus, a liquid crystal element was obtained.
【0049】これらの液晶素子に比較的高いパルス電圧
を印加すると、パルス電圧除去後、液晶がプレーナ状態
となってそれぞれ青、緑及び赤に表示された。また、こ
れらの液晶素子に比較的低いパルス電圧を印加すると、
パルス電圧除去後、いずれも透明状態となった。各液晶
素子に電圧印加してデバイス性能を測定したところ、以
下に示すように良好な性能が得られた。すなわち、青で
は駆動電圧は30V(フォーカルコニック配列)/50
V(プレーナ配列)、コントラストは5.4、プレーナ
配列での反射率は23%であった。緑では駆動電圧は3
0V(フォーカルコニック配列)/60V(プレーナ配
列)、コントラストは14.6、プレーナ配列での反射
率は22%であった。赤では駆動電圧は55V(フォー
カルコニック配列)/100V(プレーナ配列)、コン
トラストは4、プレーナ配列での反射率は27%であっ
た。When a relatively high pulse voltage was applied to these liquid crystal elements, the liquid crystal was in a planar state after removal of the pulse voltage, and displayed in blue, green and red, respectively. When a relatively low pulse voltage is applied to these liquid crystal elements,
After removing the pulse voltage, all became transparent. When a voltage was applied to each liquid crystal element and the device performance was measured, good performance was obtained as shown below. That is, for blue, the driving voltage is 30 V (focal conic arrangement) / 50
V (planar arrangement), contrast was 5.4, and reflectivity in the planar arrangement was 23%. Drive voltage is 3 in green
0 V (focal conic arrangement) / 60 V (planar arrangement), the contrast was 14.6, and the reflectance in the planar arrangement was 22%. For red, the drive voltage was 55 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 4, and the reflectance in the planar arrangement was 27%.
【0050】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑及び赤の各液晶を滴下し、接触角計(協和界
面科学社製、CA−X)を用いて柱状構造体と各液晶と
の接触角を測定した。接触角は青で6°、緑で13°、
赤で12°であった。 実施例2 前記実施例1において、前記ホトレジスト材料(SP値
10)に代えて、メラミン系樹脂からなるホトレジスト
材料(SP値15、ネガ型、JSR社製)を用いた他
は、前記実施例1と同様にして青、緑及び赤色表示を行
える各液晶素子を得た。Further, on the resist film obtained by performing the same process as described above but exposing the entire surface without using a photomask,
Each of the blue, green, and red liquid crystals was dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). The contact angle is 6 ° for blue, 13 ° for green,
It was 12 ° in red. Example 2 Example 1 was the same as Example 1 except that a photoresist material (SP value 15, negative type, manufactured by JSR Corporation) made of a melamine-based resin was used instead of the photoresist material (SP value 10). In the same manner as in the above, each liquid crystal element capable of displaying blue, green and red was obtained.
【0051】各液晶素子に電圧印加してデバイス性能を
測定したところ、以下に示すように良好な性能が得られ
た。すなわち、青では駆動電圧は30V(フォーカルコ
ニック配列)/55V(プレーナ配列)、コントラスト
は5.2、プレーナ配列での反射率は24%であった。
緑では駆動電圧は30V(フォーカルコニック配列)/
60V(プレーナ配列)、コントラストは15.3、プ
レーナ配列での反射率は23%であった。赤では駆動電
圧は50V(フォーカルコニック配列)/95V(プレ
ーナ配列)、コントラストは4.5、プレーナ配列での
反射率は28%であった。When a voltage was applied to each liquid crystal element and the device performance was measured, good performance was obtained as shown below. That is, in blue, the driving voltage was 30 V (focal conic arrangement) / 55 V (planar arrangement), the contrast was 5.2, and the reflectance in the planar arrangement was 24%.
In green, the driving voltage is 30 V (focal conic arrangement) /
60V (planar arrangement), contrast was 15.3, and reflectivity in the planar arrangement was 23%. In red, the driving voltage was 50 V (focal conic arrangement) / 95 V (planar arrangement), the contrast was 4.5, and the reflectance in the planar arrangement was 28%.
【0052】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑及び赤の各液晶を滴下し、接触角計(協和界
面科学社製、CA−X)を用いて柱状構造体と各液晶と
の接触角を測定した。接触角は青で5°、緑で15°、
赤で11°であった。 実施例3 前記実施例1において、前記ホトレジスト材料(SP値
10)に代えて、メラミン系樹脂からなるホトレジスト
材料(SP値12、ネガ型、JSR社製)を用いた他
は、前記実施例1と同様にして青、緑及び赤色表示を行
える各液晶素子を得た。Further, on the resist film obtained by performing the same process as above, but exposing the entire surface without using a photomask,
Each of the blue, green, and red liquid crystals was dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). The contact angle is 5 ° for blue, 15 ° for green,
It was 11 ° in red. Example 3 Example 1 was the same as Example 1 except that a photoresist material (SP value 12, negative type, manufactured by JSR Corporation) made of a melamine-based resin was used instead of the photoresist material (SP value 10). In the same manner as in the above, each liquid crystal element capable of displaying blue, green and red was obtained.
【0053】各液晶素子に電圧印加してデバイス性能を
測定したところ、以下に示すように良好な性能が得られ
た。すなわち、青では駆動電圧は29V(フォーカルコ
ニック配列)/52V(プレーナ配列)、コントラスト
は5.4、プレーナ配列での反射率は24%であった。
緑では駆動電圧は30V(フォーカルコニック配列)/
60V(プレーナ配列)、コントラストは14.9、プ
レーナ配列での反射率は23%であった。赤では駆動電
圧は50V(フォーカルコニック配列)/100V(プ
レーナ配列)、コントラストは4.2、プレーナ配列で
の反射率は28%であった。When a voltage was applied to each liquid crystal element and the device performance was measured, good performance was obtained as shown below. That is, for blue, the driving voltage was 29 V (focal conic arrangement) / 52 V (planar arrangement), the contrast was 5.4, and the reflectance in the planar arrangement was 24%.
In green, the driving voltage is 30 V (focal conic arrangement) /
60V (planar arrangement), contrast was 14.9, and reflectance in the planar arrangement was 23%. In red, the driving voltage was 50 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 4.2, and the reflectance in the planar arrangement was 28%.
【0054】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑及び赤の各液晶を滴下し、接触角計(協和界
面科学社製、CA−X)を用いて柱状構造体と各液晶と
の接触角を測定した。接触角は青で5°、緑で14°、
赤で13°であった。 実施例4 前記実施例1において、前記ホトレジスト材料(SP値
10)に代えて、メラミン系樹脂からなるホトレジスト
材料(SP値14、ネガ型、JSR社製)を用いた他
は、前記実施例1と同様にして青、緑及び赤色表示を行
える各液晶素子を得た。Also, on the resist film obtained by performing the same process as above but exposing the entire surface without using a photomask,
Each of the blue, green, and red liquid crystals was dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). The contact angles are 5 ° for blue, 14 ° for green,
It was 13 ° in red. Example 4 Example 1 was the same as Example 1 except that a photoresist material (SP value 14, negative type, manufactured by JSR Corporation) composed of a melamine-based resin was used instead of the photoresist material (SP value 10). In the same manner as in the above, each liquid crystal element capable of displaying blue, green and red was obtained.
【0055】各液晶素子に電圧印加してデバイス性能を
測定したところ、以下に示すように良好な性能が得られ
た。すなわち、青では駆動電圧は30V(フォーカルコ
ニック配列)/53V(プレーナ配列)、コントラスト
は5.3、プレーナ配列での反射率は23%であった。
緑では駆動電圧は30V(フォーカルコニック配列)/
59V(プレーナ配列)、コントラストは15.1、プ
レーナ配列での反射率は23%であった。赤では駆動電
圧は50V(フォーカルコニック配列)/98V(プレ
ーナ配列)、コントラストは4.3、プレーナ配列での
反射率は28%であった。When a voltage was applied to each liquid crystal element and the device performance was measured, good performance was obtained as shown below. That is, for blue, the driving voltage was 30 V (focal conic arrangement) / 53 V (planar arrangement), the contrast was 5.3, and the reflectance in the planar arrangement was 23%.
In green, the driving voltage is 30 V (focal conic arrangement) /
59V (planar arrangement), contrast was 15.1, and reflectivity in the planar arrangement was 23%. In red, the driving voltage was 50 V (focal conic arrangement) / 98 V (planar arrangement), the contrast was 4.3, and the reflectance in the planar arrangement was 28%.
【0056】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑及び赤の各液晶を滴下し、接触角計(協和界
面科学社製、CA−X)を用いて柱状構造体と各液晶と
の接触角を測定した。接触角は青で5°、緑で13°、
赤で12°であった。 実施例5 良く洗浄された第1のITO電極付きガラス基板を乾燥
炉内で80℃で15分間加熱した後、ポリイミド配向膜
をスピンコーティングし、ホットプレートにて80℃で
5分間加熱し、乾燥炉内で180℃で2時間加熱した。
この配向膜付き第1基板を200℃で30分間脱水ベー
キングし、メラミン系樹脂からなるホトレジスト材料
(SP値10、ネガ型、JSR社製)をスピンコーティ
ングした。次いで、該塗膜を100℃で5分間プレベー
キングし、複数の柱状構造体が得られるような複数の開
口を有するフォトマスクを該塗膜上に設け、該フォトマ
スクを介して該ホトレジスト材料塗膜を紫外線照射装置
を用いて露光した。次いで、100℃で3分間露光後ベ
ーキングし、現像を行った。次いで、純水で洗浄後、乾
燥させた。さらに、ポスト露光と100℃で5分間のポ
ストベーキングを行い、柱状構造体を得た。膜厚計で柱
状構造体の高さを測定したところ7μmであった。Further, on the resist film obtained by performing the same process as described above but exposing the entire surface without using a photomask,
Each of the blue, green, and red liquid crystals was dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). The contact angle is 5 ° for blue, 13 ° for green,
It was 12 ° in red. Example 5 A well-cleaned first glass substrate with an ITO electrode was heated in a drying oven at 80 ° C. for 15 minutes, then a polyimide alignment film was spin-coated, and heated at 80 ° C. for 5 minutes on a hot plate and dried. Heated in furnace at 180 ° C. for 2 hours.
The first substrate with the alignment film was dehydrated and baked at 200 ° C. for 30 minutes, and spin-coated with a photoresist material (SP value: 10, negative type, manufactured by JSR) made of a melamine resin. Next, the coating film is pre-baked at 100 ° C. for 5 minutes, and a photomask having a plurality of openings so as to obtain a plurality of columnar structures is provided on the coating film, and the photoresist material is applied through the photomask. The film was exposed using an ultraviolet irradiation device. Next, the film was baked after exposure at 100 ° C. for 3 minutes and developed. Next, the substrate was washed with pure water and dried. Further, post exposure and post baking at 100 ° C. for 5 minutes were performed to obtain a columnar structure. When the height of the columnar structure was measured with a film thickness meter, it was 7 μm.
【0057】次いで、第1基板上の柱状構造体の上に、
同様にしてITO電極形成面にポリイミド配向膜を形成
した第2のガラス基板を配向膜形成面を該柱状構造体の
方に向けて被せ、スペーサ入りの封止剤フォトレック
(積水ファインケミカル社製)を用いて基板周縁部間を
封止及び接着し、空セルを得た。次いで、この空セルに
SP値7の緑色領域に選択反射波長を有する、エステル
系ネマティック液晶にカイラル材料を添加したカイラル
ネマティック液晶を注入して液晶素子を得た。Next, on the columnar structure on the first substrate,
Similarly, a second glass substrate having a polyimide alignment film formed on the ITO electrode formation surface is covered with the alignment film formation surface facing the columnar structure, and a sealing agent Photolec containing spacers (manufactured by Sekisui Fine Chemical Co., Ltd.) Was used to seal and adhere between the peripheral portions of the substrate to obtain empty cells. Next, a chiral nematic liquid crystal obtained by adding a chiral material to an ester-based nematic liquid crystal and having a selective reflection wavelength in a green region having an SP value of 7 was injected into the empty cell to obtain a liquid crystal element.
【0058】この液晶素子に電圧印加してデバイス性能
を測定したところ、駆動電圧は60V(フォーカルコニ
ック配列)/90V(プレーナ配列)、コントラストは
8.1、プレーナ配列での反射率は27%と、良好なデ
バイス特性が得られた。また、前記と同様の工程で、但
しフォトマスクを介さず全面的に露光して得たレジスト
膜の上に、前記液晶を滴下し、接触角計(協和界面科学
社製、CA−X)を用いて柱状構造体と液晶との接触角
を測定したところ、14°であった。 実施例6 良く洗浄された第1のITO電極付きガラス基板を20
0℃で30分間脱水ベーキングし、メラミン系樹脂から
なるホトレジスト材料(SP値10、ネガ型、JSR社
製)をスピンコーティングした。次いで、該塗膜を10
0℃で5分間プレベーキングし、複数の柱状構造体が得
られるような複数の開口を有するフォトマスクを該塗膜
上に設け、該フォトマスクを介して該ホトレジスト材料
塗膜を紫外線照射装置を用いて露光した。次いで、10
0℃で3分間露光後ベーキングし、現像を行った。次い
で、純水で洗浄後、乾燥させた。さらに、ポスト露光と
100℃で5分間のポストベーキングを行い、柱状構造
体を得た。この柱状構造体の高さを測定したところ7μ
mであった。When a device performance was measured by applying a voltage to the liquid crystal element, the driving voltage was 60 V (focal conic arrangement) / 90 V (planar arrangement), the contrast was 8.1, and the reflectance in the planar arrangement was 27%. And good device characteristics were obtained. Further, the liquid crystal was dropped on a resist film obtained by performing the same process as above, but exposing the entire surface without using a photomask, and using a contact angle meter (manufactured by Kyowa Interface Science Co., Ltd., CA-X). When the contact angle between the columnar structure and the liquid crystal was measured using the above method, it was 14 °. Example 6 A well-cleaned first glass substrate with an ITO electrode was
After dehydration baking at 0 ° C. for 30 minutes, a photoresist material (SP value: 10, negative type, manufactured by JSR) made of a melamine resin was spin-coated. Then, the coating film was
Pre-baking at 0 ° C. for 5 minutes, providing a photomask having a plurality of openings so as to obtain a plurality of columnar structures on the coating film, and applying the photoresist material coating film through the photomask to an ultraviolet irradiation device. And exposed. Then 10
After exposure at 0 ° C. for 3 minutes, the film was baked and developed. Next, the substrate was washed with pure water and dried. Further, post exposure and post baking at 100 ° C. for 5 minutes were performed to obtain a columnar structure. When the height of this columnar structure was measured, it was 7μ.
m.
【0059】次いで、第1基板上の柱状構造体の上に、
ポリアミック酸タイプの配向膜を設けた。この配向膜
は、柱状構造体上に配向膜材料をスプレー塗布し、20
0℃で焼き締めることで形成した。また、第2のITO
電極付きガラス基板の該電極形成面上にも同じ配向膜を
設け、該配向膜を第1電極上の配向膜と合わせるように
してこれに被せ、温度200℃にて両配向膜を貼り合わ
せた。また、スペーサ入りの封止剤フォトレック(積水
ファインケミカル社製)を用いて基板周縁部間を封止及
び接着し、空セルを得た。Next, on the columnar structure on the first substrate,
An alignment film of a polyamic acid type was provided. This alignment film is formed by spray coating the alignment film material on the columnar structure,
It was formed by baking at 0 ° C. Also, the second ITO
The same alignment film was also provided on the electrode-formed surface of the glass substrate with electrodes, and the alignment film was put thereon so as to be aligned with the alignment film on the first electrode, and both alignment films were bonded at a temperature of 200 ° C. . Further, using a sealing agent Photolec containing spacers (manufactured by Sekisui Fine Chemical Co., Ltd.), the periphery of the substrate was sealed and bonded to obtain an empty cell.
【0060】この空セルにSP値7の緑色に選択反射波
長を有する、エステル系ネマティック液晶にカイラル材
料を添加したカイラルネマティック液晶を注入した。こ
の液晶素子に電圧印加してデバイス性能を測定したとこ
ろ、駆動電圧は35V(フォーカルコニック配列)/6
5V(プレーナ配列)、コントラストは8、プレーナ配
列での反射率は23%と、良好なデバイス特性が得られ
た。A chiral nematic liquid crystal obtained by adding a chiral material to an ester-based nematic liquid crystal having an SP value of 7 and having a selective reflection wavelength in green was injected into the empty cell. When a device performance was measured by applying a voltage to this liquid crystal element, the drive voltage was 35 V (focal conic alignment) / 6.
Good device characteristics were obtained, with 5V (planar arrangement), contrast of 8, and reflectivity of 23% in the planar arrangement.
【0061】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記液晶を滴下し、接触角計(協和界面科学社製、CA
−X)を用いて柱状構造体と液晶との接触角を測定した
ところ、16°であった。 実施例7 前記実施例1において、SP値7のカイラルネマティッ
ク液晶に代えて、SP値7のエステル系ネマティック液
晶(屈折率異方性Δn=0.170、誘電率異方性Δε
=30、等方相への相転移温度TN-I =100℃)を用
いた他は、前記実施例1と同様にして液晶素子を得た。In addition, on a resist film obtained by performing the same process as above, but exposing the entire surface without using a photomask,
The liquid crystal was dropped and a contact angle meter (manufactured by Kyowa Interface Science Co., Ltd., CA
When the contact angle between the columnar structure and the liquid crystal was measured using -X), it was 16 °. Example 7 In Example 1, an ester nematic liquid crystal having an SP value of 7 (refractive index anisotropy Δn = 0.170, dielectric anisotropy Δε) was used in place of the chiral nematic liquid crystal having an SP value of 7.
= 30 and a phase transition temperature to an isotropic phase T NI = 100 ° C), except that a liquid crystal device was obtained in the same manner as in Example 1.
【0062】この液晶素子の上下に互いに直交する偏光
板を配置しTN方式の液晶素子を構成した。そして、こ
の液晶素子に電圧を印加して素子特性を測定したとこ
ろ、駆動電圧0Vで透過率93%、駆動電圧2.3Vで
透過率10%の良好なデバイス特定が得られた。また、
前記と同様の工程で、但しフォトマスクを介さず全面的
に露光して得たレジスト膜の上に、前記ネマティック液
晶を滴下し、接触角計(協和界面科学社製、CA−X)
を用いて柱状構造体と液晶との接触角を測定したところ
13°であった。 実施例8 前記実施例3において、SP値7のカイラルネマティッ
ク液晶に代えて、SP値7のエステル系ネマティック液
晶(屈折率異方性Δn=0.170、誘電率異方性Δε
=30、等方相への相転移温度TN-I =100℃)を用
いた他は、前記実施例3と同様にして液晶素子を得た。Polarizing plates perpendicular to each other were arranged above and below this liquid crystal element to form a TN type liquid crystal element. Then, when a voltage was applied to the liquid crystal element and the element characteristics were measured, a good device specification having a transmittance of 93% at a driving voltage of 0 V and a transmittance of 10% at a driving voltage of 2.3 V was obtained. Also,
The nematic liquid crystal is dropped on a resist film obtained by performing the same process as above but exposing the entire surface without using a photomask, and a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.)
The contact angle between the columnar structure and the liquid crystal was measured using, and was 13 °. Example 8 In Example 3, an ester nematic liquid crystal having an SP value of 7 (refractive index anisotropy Δn = 0.170, dielectric anisotropy Δε) was used in place of the chiral nematic liquid crystal having an SP value of 7.
= 30 and a phase transition temperature to an isotropic phase T NI = 100 ° C), except that a liquid crystal device was obtained in the same manner as in Example 3.
【0063】この液晶素子の上下に互いに直交する偏光
板を配置しTN方式の液晶素子を構成した。そして、こ
の液晶素子に電圧を印加して素子特性を測定したとこ
ろ、駆動電圧0Vで透過率95%、駆動電圧2.3Vで
透過率12%の良好なデバイス特定が得られた。また、
前記と同様の工程で、但しフォトマスクを介さず全面的
に露光して得たレジスト膜の上に、前記ネマティック液
晶を滴下し、接触角計(協和界面科学社製、CA−X)
を用いて柱状構造体と液晶との接触角を測定したところ
16°であった。 実施例9 良く洗浄された第1のITO電極付きガラス基板を20
0℃で30分間脱水ベーキングし、アクリル系樹脂から
なるホトレジスト材料(SP値11、ポジ型、東京応化
工業社製)を3μm、10μm、19μmの厚膜となる
ようにそれぞれスピンコーティングした。次いで、該塗
膜を110℃で3分間プレベーキングし、複数の柱状構
造体が得られるような複数の開口を有するフォトマスク
を該塗膜上に設け、該フォトマスクを介して該ホトレジ
スト材料塗膜を紫外線照射装置を用いて露光し、常温で
現像を行った。次いで、純水で洗浄後、乾燥させた後、
3%シュウ酸アンモニウムで洗浄し、純水で洗浄し、乾
燥させた。さらに、ポスト露光と220℃で3分間のポ
ストベーキングを行い、柱状構造体を得た。Polarizing plates orthogonal to each other were arranged above and below the liquid crystal element to form a TN type liquid crystal element. Then, when a voltage was applied to the liquid crystal element and the element characteristics were measured, a good device specification having a transmittance of 95% at a driving voltage of 0 V and a transmittance of 12% at a driving voltage of 2.3 V was obtained. Also,
The nematic liquid crystal is dropped on a resist film obtained by performing the same process as above but exposing the entire surface without using a photomask, and a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.)
The contact angle between the columnar structure and the liquid crystal was measured using, and was 16 °. Example 9 A well-cleaned first glass substrate with an ITO electrode was
After dehydration baking at 0 ° C. for 30 minutes, a photoresist material made of an acrylic resin (SP value 11, positive type, manufactured by Tokyo Ohka Kogyo Co., Ltd.) was spin-coated so as to form a thick film of 3 μm, 10 μm, and 19 μm, respectively. Next, the coating film is pre-baked at 110 ° C. for 3 minutes, and a photomask having a plurality of openings for obtaining a plurality of columnar structures is provided on the coating film, and the photoresist material is applied through the photomask. The film was exposed using an ultraviolet irradiation device and developed at room temperature. Then, after washing with pure water and drying,
Washed with 3% ammonium oxalate, washed with pure water and dried. Further, post exposure and post baking at 220 ° C. for 3 minutes were performed to obtain a columnar structure.
【0064】膜厚計で柱状構造体の高さを測定したとこ
ろ、それぞれ3μm、10μm、19μmの膜厚であっ
た。以上の工程により得られる柱状構造体の高さは基板
上に塗布したホトレジスト材料の厚みと同じであること
が確認された。次いで、第1基板上の柱状構造体の上
に、第2のITO電極付きガラス基板を電極形成面を該
柱状構造体の方に向けて被せ、スペーサ入りの封止剤フ
ォトレック(積水ファインケミカル社製)を用いて基板
周縁部間を封止及び接着し、空セルを得た。次いで、空
セルにSP値7の、エステル系ネマティック液晶にカイ
ラル材料を添加したカイラルネマティック液晶を注入し
た。3μmの柱状構造体を有する空セルには青色領域に
選択反射波長を有するようにカイラル材料の添加量を調
整した液晶を注入し、10μmの柱状構造体を有する空
セルには緑色領域に選択反射波長を有するようにカイラ
ル材料の添加量を調整した液晶を注入し、19μmの柱
状構造体を有する空セルには赤色領域に選択反射波長を
有するようにカイラル材料の添加量を調整した液晶を注
入し、各液晶素子を得た。When the heights of the columnar structures were measured with a film thickness meter, the thicknesses were 3 μm, 10 μm, and 19 μm, respectively. It was confirmed that the height of the columnar structure obtained by the above steps was the same as the thickness of the photoresist material applied on the substrate. Next, a second glass substrate with an ITO electrode is placed on the columnar structure on the first substrate with the electrode forming surface facing the columnar structure, and a sealing agent Photolec containing spacers (Sekisui Fine Chemical Co., Ltd.) ) Was used to seal and bond between the peripheral portions of the substrate to obtain empty cells. Next, a chiral nematic liquid crystal having an SP value of 7 and a chiral material added to an ester nematic liquid crystal was injected into the empty cell. Liquid crystal in which the amount of the chiral material added is adjusted so as to have a selective reflection wavelength in the blue region is injected into an empty cell having a columnar structure of 3 μm, and selectively reflected in the green region into an empty cell having a columnar structure of 10 μm. Liquid crystal in which the addition amount of the chiral material is adjusted so as to have a wavelength is injected, and liquid crystal in which the addition amount of the chiral material is adjusted so as to have a selective reflection wavelength in the red region is injected into an empty cell having a columnar structure of 19 μm. Then, each liquid crystal element was obtained.
【0065】各液晶素子に電圧印加してデバイス性能を
測定したところ、以下に示すように良好な性能が得られ
た。すなわち、青では駆動電圧は45V(フォーカルコ
ニック配列)/70V(プレーナ配列)、コントラスト
は2.5、プレーナ配列での反射率は27%であった。
緑では駆動電圧は40V(フォーカルコニック配列)/
85V(プレーナ配列)、コントラストは7.9、プレ
ーナ配列での反射率は30%であった。赤では駆動電圧
は60V(フォーカルコニック配列)/115V(プレ
ーナ配列)、コントラストは2.3、プレーナ配列での
反射率は31%であった。When the device performance was measured by applying a voltage to each liquid crystal element, good performance was obtained as shown below. That is, in blue, the driving voltage was 45 V (focal conic arrangement) / 70 V (planar arrangement), the contrast was 2.5, and the reflectance in the planar arrangement was 27%.
In green, the driving voltage is 40 V (focal conic arrangement) /
85V (planar arrangement), the contrast was 7.9, and the reflectance in the planar arrangement was 30%. In red, the driving voltage was 60 V (focal conic arrangement) / 115 V (planar arrangement), the contrast was 2.3, and the reflectance in the planar arrangement was 31%.
【0066】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑及び赤の各液晶を滴下し、接触角計(協和界
面科学社製、CA−X)を用いて柱状構造体と各液晶と
の接触角を測定した。接触角は青で10°、緑で12
°、赤で16°であった。 実施例10 前記実施例9において、前記ホトレジスト材料(SP値
11)に代えて、アクリル系樹脂からなるホトレジスト
材料(SP値14、ポジ型、東京応化工業社製)を用い
た他は、前記実施例9と同様にして青、緑及び赤色表示
を行える各液晶素子を得た。Also, on the resist film obtained by performing the same process as above, but exposing the entire surface without using a photomask,
Each of the blue, green, and red liquid crystals was dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). Contact angle is 10 ° for blue and 12 for green
° and 16 ° in red. Example 10 The procedure of Example 9 was repeated except that a photoresist material (SP value 14, positive type, manufactured by Tokyo Ohka Kogyo Co., Ltd.) made of an acrylic resin was used instead of the photoresist material (SP value 11). In the same manner as in Example 9, each liquid crystal element capable of displaying blue, green, and red was obtained.
【0067】各液晶素子に電圧印加してデバイス性能を
測定したところ、以下に示すように良好な性能が得られ
た。すなわち、青では駆動電圧は50V(フォーカルコ
ニック配列)/80V(プレーナ配列)、コントラスト
は2.3、プレーナ配列での反射率は25%であった。
緑では駆動電圧は45V(フォーカルコニック配列)/
90V(プレーナ配列)、コントラストは7.6、プレ
ーナ配列での反射率は29%であった。赤では駆動電圧
は65V(フォーカルコニック配列)/125V(プレ
ーナ配列)、コントラストは2.0、プレーナ配列での
反射率は29%であった。When a voltage was applied to each liquid crystal element to measure the device performance, good performance was obtained as shown below. That is, for blue, the driving voltage was 50 V (focal conic arrangement) / 80 V (planar arrangement), the contrast was 2.3, and the reflectance in the planar arrangement was 25%.
In green, the driving voltage is 45V (focal conic arrangement) /
90V (planar arrangement), the contrast was 7.6, and the reflectivity in the planar arrangement was 29%. For red, the drive voltage was 65 V (focal conic arrangement) / 125 V (planar arrangement), the contrast was 2.0, and the reflectivity in the planar arrangement was 29%.
【0068】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑及び赤の各液晶を滴下し、接触角計(協和界
面科学社製、CA−X)を用いて柱状構造体と各液晶と
の接触角を測定した。接触角は青で11°、緑で13
°、赤で17°であった。 実施例11 前記実施例1において、前記ITO電極付きガラス基板
に代えて、ITO電極付きプラスチック製基板を用い、
200℃での基板の脱水ベーキングを行わなかった他
は、前記実施例1と同様にして青、緑及び赤色表示を行
える各液晶素子を得た。Further, on a resist film obtained by performing the same process as described above but exposing the entire surface without using a photomask,
Each of the blue, green, and red liquid crystals was dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). The contact angle is 11 ° for blue and 13 for green
° and 17 ° in red. Example 11 In Example 1, a plastic substrate with an ITO electrode was used instead of the glass substrate with an ITO electrode.
Each liquid crystal element capable of displaying blue, green, and red was obtained in the same manner as in Example 1 except that dehydration baking of the substrate at 200 ° C. was not performed.
【0069】各液晶素子に電圧印加してデバイス性能を
測定したところ、以下に示すように良好な性能が得られ
た。すなわち、青では駆動電圧は30V(フォーカルコ
ニック配列)/50V(プレーナ配列)、コントラスト
は5.4、プレーナ配列での反射率は23%であった。
緑では駆動電圧は30V(フォーカルコニック配列)/
60V(プレーナ配列)、コントラストは14.6、プ
レーナ配列での反射率は22%であった。赤では駆動電
圧は55V(フォーカルコニック配列)/100V(プ
レーナ配列)、コントラストは4、プレーナ配列での反
射率は27%であった。When the device performance was measured by applying a voltage to each liquid crystal element, good performance was obtained as shown below. That is, for blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.4, and the reflectance in the planar arrangement was 23%.
In green, the driving voltage is 30 V (focal conic arrangement) /
The voltage was 60 V (planar arrangement), the contrast was 14.6, and the reflectance in the planar arrangement was 22%. For red, the drive voltage was 55 V (focal conic arrangement) / 100 V (planar arrangement), the contrast was 4, and the reflectance in the planar arrangement was 27%.
【0070】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑及び赤の各液晶を滴下し、接触角計(協和界
面科学社製、CA−X)を用いて柱状構造体と各液晶と
の接触角を測定した。接触角は青で9°、緑で16°、
赤で15°であった。 実施例12 良く洗浄された第1のITO電極付きガラス基板を20
0℃で30分間脱水ベーキングし、メラミン系樹脂から
なるホトレジスト材料(SP値10、ネガ型、JSR社
製)を5μm、12μm、18μmの厚膜となるように
それぞれスピンコーティングした。次いで、該塗膜を1
00℃で5分間プレベーキングし、複数の柱状構造体が
得られるような複数の開口を有するフォトマスクを該塗
膜上に設け、該フォトマスクを介して該ホトレジスト材
料塗膜を紫外線照射装置を用いて露光した。次いで、1
00℃で3分間露光後ベーキングを行い、現像を行っ
た。次いで、純水で洗浄後、乾燥させた。さらに、ポス
ト露光と100℃で5分間のポストベーキングを行い、
柱状構造体を得た。Further, on the resist film obtained by performing the same process as described above but exposing the entire surface without using a photomask,
Each of the blue, green, and red liquid crystals was dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). The contact angles are 9 ° for blue, 16 ° for green,
It was 15 ° in red. Example 12 A well-cleaned first glass substrate with an ITO electrode was
After dehydration baking at 0 ° C. for 30 minutes, a photoresist material made of a melamine resin (SP value: 10, negative type, manufactured by JSR) was spin-coated so as to form thick films of 5 μm, 12 μm, and 18 μm, respectively. Then, the coating film was
Prebaking at 00 ° C. for 5 minutes, providing a photomask having a plurality of openings so as to obtain a plurality of columnar structures on the coating film, and applying the photoresist material coating film through the photomask to an ultraviolet irradiation device. And exposed. Then 1
After exposure at 00 ° C. for 3 minutes, baking was performed and development was performed. Next, the substrate was washed with pure water and dried. Furthermore, post exposure and post baking at 100 ° C. for 5 minutes are performed.
A columnar structure was obtained.
【0071】次いで、電極形成面に直径5μm、12μ
m、18μmのスペーサを散布した第2のITO電極付
きガラス基板を準備し、第1基板上の柱状構造体の上
に、第2のITO電極付きガラス基板を電極形成面(ス
ペーサ散布面)を該柱状構造体の方に向けて被せた。さ
らに、スペーサ入りの封止剤XN−21−S(三井化学
社製)を用いて基板周縁部間を封止し、基板両側から治
具を用いて加圧しながら180℃で2時間加熱して該封
止剤を硬化させて両基板を接着し、空セルを得た。この
とき、膜厚計を用いてセルギャップを測定したところ、
それぞれ5μm、12μm、18μmであった。Then, a 5 μm diameter, 12 μm
A second glass substrate with an ITO electrode on which spacers of m and 18 μm are scattered is prepared, and a second glass substrate with an ITO electrode is provided on the columnar structure on the first substrate with an electrode forming surface (spacer scatter surface). It was covered toward the columnar structure. Furthermore, the periphery of the substrate is sealed with a sealing agent XN-21-S (manufactured by Mitsui Chemicals, Inc.) containing a spacer, and heated at 180 ° C. for 2 hours while pressing with a jig from both sides of the substrate. The sealing agent was cured to bond the two substrates together to obtain an empty cell. At this time, when the cell gap was measured using a film thickness meter,
They were 5 μm, 12 μm and 18 μm, respectively.
【0072】次いで、空セルにSP値7の、エステル系
ネマティック液晶(屈折率異方性Δn=0.170、誘
電率異方性Δε=30、等方相への相転移温度TN-I =
100℃)にカイラル材料(S−811、メルク社製)
を添加したカイラルネマティック液晶を注入した。5μ
mの柱状構造体を有する空セルには青色領域に選択反射
波長を有するようにカイラル材料の添加量を調整した液
晶を注入し、12μmの柱状構造体を有する空セルには
緑色領域に選択反射波長を有するようにカイラル材料の
添加量を調整した液晶を注入し、18μmの柱状構造体
を有する空セルには赤色領域に選択反射波長を有するよ
うにカイラル材料の添加量を調整した液晶を注入し、液
晶素子を得た。Next, an ester nematic liquid crystal having an SP value of 7 (refractive index anisotropy Δn = 0.170, dielectric anisotropy Δε = 30, phase transition temperature to isotropic phase T NI = 7) was placed in an empty cell.
(100 ° C) chiral material (S-811, manufactured by Merck)
The chiral nematic liquid crystal to which was added was injected. 5μ
An empty cell having a columnar structure of m is injected with a liquid crystal in which the amount of a chiral material added is adjusted so as to have a selective reflection wavelength in a blue region, and an empty cell having a columnar structure of 12 μm is selectively reflected in a green region. Liquid crystal in which the addition amount of the chiral material is adjusted so as to have a wavelength is injected, and liquid crystal in which the addition amount of the chiral material is adjusted so as to have a selective reflection wavelength in the red region is injected into an empty cell having a columnar structure of 18 μm. Thus, a liquid crystal element was obtained.
【0073】各液晶素子に電圧印加してデバイス性能を
測定したところ、以下に示すように良好な性能が得られ
た。すなわち、青では駆動電圧は30V(フォーカルコ
ニック配列)/50V(プレーナ配列)、コントラスト
は5.3、プレーナ配列での反射率は22%であった。
緑では駆動電圧は30V(フォーカルコニック配列)/
60V(プレーナ配列)、コントラストは14.5、プ
レーナ配列での反射率は22%であった。赤では駆動電
圧は50V(フォーカルコニック配列)/95V(プレ
ーナ配列)、コントラストは3.9、プレーナ配列での
反射率は26%であった。When a voltage was applied to each liquid crystal element and the device performance was measured, good performance was obtained as shown below. That is, in blue, the driving voltage was 30 V (focal conic arrangement) / 50 V (planar arrangement), the contrast was 5.3, and the reflectance in the planar arrangement was 22%.
In green, the driving voltage is 30 V (focal conic arrangement) /
The voltage was 60 V (planar arrangement), the contrast was 14.5, and the reflectance in the planar arrangement was 22%. In red, the driving voltage was 50 V (focal conic arrangement) / 95 V (planar arrangement), the contrast was 3.9, and the reflectance in the planar arrangement was 26%.
【0074】なお、この実施例12は、前記実施例1に
おいて、ホトレジスト材料塗膜の膜厚と同じ直径のスペ
ーサを用いたものであるが、実施例1で形成された柱状
構造体の高さと同じセルギャップが得られた。また、こ
の液晶素子の駆動電圧、コントラスト及びプレーナ配列
での反射率は、それぞれ実施例1の液晶素子と略同じで
あった。これらのことから、柱状構造体を形成するとと
もにスペーサを併用しても、デバイス特性には影響を及
ぼさないとともに、スペーサを用いない場合と同様に所
望の厚さの液晶層が得られることが分かる。 比較例1 良く洗浄された第1のITO電極付きガラス基板を20
0℃で30分間脱水ベーキングし、アクリル系樹脂から
なるホトレジスト材料(SP値8、ネガ型、JSR社
製)を5μm、12μm、18μmの厚膜となるように
それぞれスピンコーティングした。次いで、該塗膜を9
0℃で5分間プレベーキングし、複数の柱状構造体が得
られるような複数の開口を有するフォトマスクを該塗膜
上に設け、該フォトマスクを介して該ホトレジスト材料
塗膜を紫外線照射装置を用いて露光し、現像を行った。
次いで、純水で洗浄後、乾燥させた。さらに、ポスト露
光と130℃で5分間のポストベーキングを行い、柱状
構造体を得た。In the twelfth embodiment, a spacer having the same diameter as the thickness of the photoresist material coating film in the first embodiment is used, but the height of the columnar structure formed in the first embodiment is reduced. The same cell gap was obtained. The driving voltage, contrast, and reflectivity in the planar arrangement of this liquid crystal element were substantially the same as those of the liquid crystal element of Example 1, respectively. From these facts, it is understood that, even when the columnar structure is formed and the spacer is used in combination, the device characteristics are not affected, and a liquid crystal layer having a desired thickness can be obtained as in the case where the spacer is not used. . Comparative Example 1 A first glass substrate with a well-cleaned ITO electrode
After dehydration baking at 0 ° C. for 30 minutes, a photoresist material made of an acrylic resin (SP value: 8, negative type, manufactured by JSR Corporation) was spin-coated to form thick films of 5 μm, 12 μm, and 18 μm, respectively. Then, the coating was applied to 9
Pre-baking at 0 ° C. for 5 minutes, providing a photomask having a plurality of openings so as to obtain a plurality of columnar structures on the coating film, and applying the photoresist material coating film through the photomask to an ultraviolet irradiation device. Exposure and development.
Next, the substrate was washed with pure water and dried. Furthermore, post exposure and post-baking at 130 ° C. for 5 minutes were performed to obtain a columnar structure.
【0075】膜厚計で柱状構造体の高さを測定したとこ
ろ、それぞれ5μm、12μm、18μmの膜厚であっ
た。次いで、第1基板上の柱状構造体の上に、第2のI
TO電極付きガラス基板を電極形成面を該柱状構造体の
方に向けて被せ、スペーサ入りの封止剤フォトレック
(積水ファインケミカル社製)を用いて基板周縁部間を
封止及び接着し、空セルを得た。次いで、空セルにSP
値7の、エステル系ネマティック液晶にカイラル材料を
添加したカイラルネマティック液晶を注入した。5μm
の柱状構造体を有する空セルには青色領域に選択反射波
長を有するようにカイラル材料の添加量を調整した液晶
を注入し、12μmの柱状構造体を有する空セルには緑
色領域に選択反射波長を有するようにカイラル材料の添
加量を調整した液晶を注入し、液晶素子を得た。なお、
18μmの柱状構造体を有する空セルは用いなかった。When the heights of the columnar structures were measured with a film thickness meter, they were 5 μm, 12 μm, and 18 μm, respectively. Next, the second I-type semiconductor substrate is placed on the columnar structure on the first substrate.
A glass substrate with a TO electrode is covered with the electrode forming surface facing the columnar structure, and the periphery of the substrate is sealed and bonded using a sealing agent Photolec containing spacers (manufactured by Sekisui Fine Chemical Co., Ltd.). I got a cell. Next, SP into the empty cell
A chiral nematic liquid crystal having a value of 7 and a chiral material added to an ester-based nematic liquid crystal was injected. 5 μm
Liquid crystal in which the amount of the chiral material added is adjusted so as to have a selective reflection wavelength in the blue region is injected into the empty cell having the columnar structure, and the selective reflection wavelength is applied to the green region into the empty cell having the 12 μm columnar structure. The liquid crystal in which the added amount of the chiral material was adjusted so as to have the above was injected to obtain a liquid crystal element. In addition,
An empty cell having a columnar structure of 18 μm was not used.
【0076】各液晶素子に電圧印加してデバイス性能を
測定したところ、青では駆動電圧は25V(フォーカル
コニック配列)/65V(プレーナ配列)、コントラス
トは1.3、プレーナ配列での反射率は28%であり、
コントラストが非常に低かった。また、緑では駆動電圧
は40V(フォーカルコニック配列)/90V(プレー
ナ配列)、コントラストは5.9、プレーナ配列での反
射率は18%であり、プレーナ状態での反射率が非常に
低かった。When the device performance was measured by applying a voltage to each liquid crystal element, the drive voltage for blue was 25 V (focal conic arrangement) / 65 V (planar arrangement), the contrast was 1.3, and the reflectance in the planar arrangement was 28. %
The contrast was very low. In green, the driving voltage was 40 V (focal conic arrangement) / 90 V (planar arrangement), the contrast was 5.9, the reflectivity in the planar arrangement was 18%, and the reflectivity in the planar state was very low.
【0077】なお、前記と同様にして得た高さ7μmの
柱状構造体間に、前記と同様のSP値7の、エステル系
ネマティック液晶にカイラル材料を添加したカイラルネ
マティック液晶(緑色に選択反射波長を有するもの)を
満たし、2時間放置した後、該液晶をn−ヘキサンで洗
い流し、乾燥させた。この柱状構造体に金を蒸着したサ
ンプルを走査型電子顕微鏡(SEM)を用いて観察した
ところ、外形が崩れ、高さが低下していた。A chiral nematic liquid crystal having an SP value of 7 similar to that described above and having a chiral material added to an ester nematic liquid crystal (selective reflection wavelength in green) was provided between the columnar structures having a height of 7 μm obtained in the same manner as described above. Was left for 2 hours, and the liquid crystal was washed away with n-hexane and dried. When a sample obtained by depositing gold on the columnar structure was observed using a scanning electron microscope (SEM), the outer shape was broken and the height was reduced.
【0078】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑の各液晶及び別途調製した赤の液晶を滴下
し、接触角計(協和界面科学社製、CA−X)を用いて
柱状構造体と各液晶との接触角を測定した。接触角は青
で21°、緑で17°、赤で25°であった。 比較例2 良く洗浄された第1のITO電極付きガラス基板を20
0℃で30分間脱水ベーキングし、アクリル系樹脂から
なるホトレジスト材料(SP値7、ネガ型、JSR社
製)を5μm、12μm、18μmの膜厚となるように
スピンコーティングした。次いで、該塗膜を80℃で5
分間プレベーキングし、複数の柱状構造体が得られるよ
うな複数の開口を有するフォトマスクを該塗膜上に設
け、該フォトマスクを介して該ホトレジスト材料塗膜を
紫外線照射装置を用いて露光し、現像を行った。次い
で、純水で洗浄後、乾燥させた。さらに、ポスト露光と
110℃で5分間のポストベーキングを行い、柱状構造
体を得た。Further, on the resist film obtained by performing the same process as described above but exposing the entire surface without using a photomask,
Each of the blue and green liquid crystals and the separately prepared red liquid crystal were dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). The contact angles were 21 ° for blue, 17 ° for green, and 25 ° for red. Comparative Example 2 A first glass substrate with a well-cleaned ITO electrode
After dehydration baking at 0 ° C. for 30 minutes, a photoresist material (SP value: 7, negative type, manufactured by JSR) made of an acrylic resin was spin-coated so as to have a film thickness of 5 μm, 12 μm, and 18 μm. Next, the coating film is treated at 80 ° C. for 5
Pre-baking for a minute, providing a photomask having a plurality of openings such that a plurality of columnar structures can be obtained on the coating film, and exposing the photoresist material coating film through the photomask using an ultraviolet irradiation device. And development. Next, the substrate was washed with pure water and dried. Further, post exposure and post baking at 110 ° C. for 5 minutes were performed to obtain a columnar structure.
【0079】膜厚計で柱状構造体の高さを測定したとこ
ろ、それぞれ5μm、12μm、18μmの膜厚であっ
た。次いで、第1基板上の柱状構造体の上に、第2のI
TO電極付きガラス基板を電極形成面を該柱状構造体の
方に向けて被せ、スペーサ入りの封止剤フォトレック
(積水ファインケミカル社製)を用いて基板周縁部間を
封止及び接着し、空セルを得た。次いで、空セルにSP
値7の、エステル系ネマティック液晶にカイラル材料を
添加したカイラルネマティック液晶を注入した。5μm
の柱状構造体を有する空セルには青色領域に選択反射波
長を有するようにカイラル材料の添加量を調整した液晶
を注入し、12μmの柱状構造体を有する空セルには緑
色領域に選択反射波長を有するようにカイラル材料の添
加量を調整した液晶を注入し、液晶素子を得た。なお、
18μmの柱状構造体を有する空セルは用いなかった。When the heights of the columnar structures were measured with a film thickness meter, the thicknesses were 5 μm, 12 μm, and 18 μm, respectively. Next, the second I-type semiconductor substrate is placed on the columnar structure on the first substrate.
A glass substrate with a TO electrode is covered with the electrode forming surface facing the columnar structure, and the periphery of the substrate is sealed and bonded using a sealing agent Photolec containing spacers (manufactured by Sekisui Fine Chemical Co., Ltd.). I got a cell. Next, SP into the empty cell
A chiral nematic liquid crystal having a value of 7 and a chiral material added to an ester-based nematic liquid crystal was injected. 5 μm
Liquid crystal in which the amount of the chiral material added is adjusted so as to have a selective reflection wavelength in the blue region is injected into the empty cell having the columnar structure, and the selective reflection wavelength is applied to the green region into the empty cell having the 12 μm columnar structure. The liquid crystal in which the added amount of the chiral material was adjusted so as to have the above was injected to obtain a liquid crystal element. In addition,
An empty cell having a columnar structure of 18 μm was not used.
【0080】各液晶素子に電圧印加してデバイス性能を
測定したところ、青では駆動電圧は28V(フォーカル
コニック配列)/67V(プレーナ配列)、コントラス
トは1.1、プレーナ配列での反射率は27%であり、
コントラストが非常に低かった。また、緑では駆動電圧
は38V(フォーカルコニック配列)/88V(プレー
ナ配列)、コントラストは5.7、プレーナ配列での反
射率は17%であり、プレーナ状態での反射率が非常に
低かった。When the device performance was measured by applying a voltage to each liquid crystal element, the drive voltage for blue was 28 V (focal conic arrangement) / 67 V (planar arrangement), the contrast was 1.1, and the reflectance in the planar arrangement was 27. %
The contrast was very low. In green, the driving voltage was 38 V (focal conic arrangement) / 88 V (planar arrangement), the contrast was 5.7, the reflectivity in the planar arrangement was 17%, and the reflectivity in the planar state was extremely low.
【0081】なお、前記と同様にして得た高さ12μm
の柱状構造体間に、前記と同様のSP値7の、エステル
系ネマティック液晶にカイラル材料を添加したカイラル
ネマティック液晶(緑色に選択反射波長を有するもの)
を満たし、2時間放置した後、該液晶をn−ヘキサンで
洗い流し、乾燥させた。この柱状構造体に金を蒸着した
サンプルを走査型電子顕微鏡(SEM)を用いて観察し
たところ、溶解が進み外形が著しく崩れ、高さが低下し
ていた。The height of 12 μm obtained in the same manner as above
Chiral nematic liquid crystal (having a selective reflection wavelength in green), in which an chiral material is added to an ester nematic liquid crystal having an SP value of 7 as described above, between columnar structures of
And left for 2 hours, then the liquid crystal was washed off with n-hexane and dried. When a sample obtained by depositing gold on the columnar structure was observed using a scanning electron microscope (SEM), it was found that the dissolution had progressed, the outer shape had been significantly collapsed, and the height had decreased.
【0082】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑の各液晶及び別途調製した赤の液晶を滴下
し、接触角計(協和界面科学社製、CA−X)を用いて
柱状構造体と各液晶との接触角を測定した。接触角は青
で23°、緑で19°、赤で28°であった。 比較例3 良く洗浄された第一のITO電極付きガラス基板を20
0℃で30分間脱水ベーキングし、環化ポリイソプレン
系ホトレジスト(SP値7、ネガ型、東京応化製OMR
−83)を7μmの膜厚となるようにスピンコーティグ
し、フォトマスクを用いて露光し、現像をへて柱状構造
を得た。この7μmの柱状構造体間に、前記と同様のS
P値7の、エステル系ネマチック液晶にカイラル材料を
添加したカイラルネマチック液晶(緑に選択波長を有す
るもの)を満たし、2時間放置した後、該液晶をn−ヘ
キサンで洗い流し、乾燥させた。この柱状構造体に金を
蒸着したサンプルを走査型電子顕微鏡(SEM)を用い
て観察したところ、外形が崩れ、高さが低下していた。Also, on the resist film obtained by performing the same process as described above but exposing the entire surface without using a photomask,
Each of the blue and green liquid crystals and the separately prepared red liquid crystal were dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Interface Science Co., Ltd.). The contact angles were 23 ° for blue, 19 ° for green, and 28 ° for red. Comparative Example 3 A first glass substrate with a well-cleaned ITO electrode
Dehydrated and baked at 0 ° C for 30 minutes, and cyclized polyisoprene-based photoresist (SP value 7, negative type, OMR manufactured by Tokyo Ohka)
-83) was spin-coated to a thickness of 7 μm, exposed using a photomask, and developed to obtain a columnar structure. Between the 7 μm columnar structures, the same S
After filling with a chiral nematic liquid crystal (having a selected wavelength for green) obtained by adding a chiral material to an ester type nematic liquid crystal having a P value of 7, the liquid crystal was washed with n-hexane and dried. When a sample obtained by depositing gold on the columnar structure was observed using a scanning electron microscope (SEM), the outer shape was broken and the height was reduced.
【0083】また、前記と同様の工程で、但しフォトマ
スクを介さず全面的に露光して得たレジスト膜の上に、
前記青、緑の各液晶及び別途調整した赤の液晶を滴下
し、接触角計(協和海面科学社製、CA−X)を用いて
柱状構造体と各液晶との接触角を測定した。接触角は青
で25°、緑で19°、赤で27°であった。以上の結
果、ホトレジスト材料のSP値が10〜15の範囲にあ
る本発明実施例1〜12により得られた液晶素子は、S
P値が8以下の範囲にある液晶と組み合わせ使用した場
合に、いずれも良好なコントラスト及び反射率を示した
ことが分かる。これに対して、ホトレジスト材料のSP
値が7又は8である比較例1及び2により得られた各液
晶素子は、SP値7の液晶と組み合わせ使用した場合
に、十分なコントラスト及び反射率が得られなかったこ
とが分かる。Further, on the resist film obtained by performing the same process as described above but exposing the entire surface without using a photomask,
Each of the blue and green liquid crystals and the separately adjusted red liquid crystal were dropped, and the contact angle between the columnar structure and each liquid crystal was measured using a contact angle meter (CA-X, manufactured by Kyowa Sea Surface Science Co., Ltd.). The contact angles were 25 ° for blue, 19 ° for green, and 27 ° for red. As a result, the liquid crystal devices obtained by Examples 1 to 12 of the present invention in which the SP value of the photoresist material was in the range of 10 to 15 were S
It can be seen that when used in combination with a liquid crystal having a P value in the range of 8 or less, all exhibited good contrast and reflectance. On the other hand, SP of photoresist material
It can be seen that each of the liquid crystal devices obtained in Comparative Examples 1 and 2 having a value of 7 or 8 did not provide sufficient contrast and reflectance when used in combination with a liquid crystal having an SP value of 7.
【0084】なお、最終的に得られる柱状構造体の高さ
は基板上に塗布したホトレジスト材料膜の厚みと同様で
あったことから、ホトレジスト材料を用いた本発明方法
により、スペーサを用いなくても、所望の高さの柱状構
造体を簡単に形成できることも分かる。なお、ホトレジ
ストからなる柱状構造体を形成するとともにスペーサを
併用しても、同様の良好なデバイス特性を有する液晶素
子が得られることも分かる。Since the height of the finally obtained columnar structure was the same as the thickness of the photoresist material film applied on the substrate, the method of the present invention using the photoresist material did not require the use of spacers. However, it can be seen that a columnar structure having a desired height can be easily formed. It is also understood that a liquid crystal element having similar good device characteristics can be obtained by forming a columnar structure made of photoresist and using a spacer.
【0085】[0085]
【発明の効果】以上説明したように本発明によると、少
なくとも一方が透明な一対の基板間に液晶を封入した液
晶素子であって、従来素子に比べて基板の硬軟に影響さ
れることなく、また、長期にわたり液晶層の厚みを一定
に保つことができ、これにより所望のコントラスト及び
反射率が安定的に得られる液晶素子及びその簡単な製造
方法を提供することができる。As described above, according to the present invention, at least one is a liquid crystal element in which liquid crystal is sealed between a pair of transparent substrates, and is not affected by the hardness of the substrate as compared with the conventional element. In addition, it is possible to provide a liquid crystal element in which the thickness of the liquid crystal layer can be kept constant over a long period of time, whereby a desired contrast and reflectance can be stably obtained, and a simple manufacturing method thereof.
【図1】本発明の1実施形態である液晶素子の断面を示
す図である。FIG. 1 is a diagram showing a cross section of a liquid crystal element according to one embodiment of the present invention.
【図2】本発明の他の実施形態である液晶素子の断面を
示す図である。FIG. 2 is a diagram illustrating a cross section of a liquid crystal element according to another embodiment of the present invention.
【図3】本発明のさらに他の実施形態でる液晶素子の断
面を示す図である。FIG. 3 is a diagram showing a cross section of a liquid crystal element according to still another embodiment of the present invention.
【図4】本発明のさらに他の実施形態でる液晶素子の断
面を示す図である。FIG. 4 is a diagram showing a cross section of a liquid crystal element according to still another embodiment of the present invention.
【図5】本発明のさらに他の実施形態でる液晶素子の断
面を示す図である。FIG. 5 is a view showing a cross section of a liquid crystal element according to still another embodiment of the present invention.
【図6】本発明のさらに他の実施形態でる液晶素子の断
面を示す図である。FIG. 6 is a diagram showing a cross section of a liquid crystal element according to still another embodiment of the present invention.
1a、1b 電極付き基板 2 柱状構造体 3 液晶 4 封止壁 5 電気絶縁性膜 6 配向膜 1a, 1b Substrate with electrodes 2 Columnar structure 3 Liquid crystal 4 Sealing wall 5 Electric insulating film 6 Alignment film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 植田 秀昭 大阪市中央区安土町二丁目3番13号 大阪 国際ビル ミノルタ株式会社内 Fターム(参考) 2H089 LA09 MA04X NA14 PA01 QA14 RA04 SA17 ────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Hideaki Ueda 2-13-13 Azuchicho, Chuo-ku, Osaka-shi Osaka International Building Minolta Co., Ltd. F term (reference) 2H089 LA09 MA04X NA14 PA01 QA14 RA04 SA17
Claims (20)
た第1及び第2の基板と、 該基板間に設けらた複数の柱状構造体と、 前記基板間における前記柱状構造体間の空間に封入され
た液晶とを備えており、 前記柱状構造体は、SP値が10〜15の材料から得ら
れる高分子物質で形成されていることを特徴とする液晶
素子。A first and a second substrate, at least one of which is transparent, opposed to each other, a plurality of columnar structures provided between the substrates, and a space between the columnar structures between the substrates. A liquid crystal element comprising: a sealed liquid crystal; wherein the columnar structure is formed of a polymer substance obtained from a material having an SP value of 10 to 15.
求項1記載の液晶素子。2. The liquid crystal device according to claim 1, wherein said polymer substance is a photoresist.
状構造体の高さは3μm〜20μmである請求項1又は
2記載の液晶素子。3. The liquid crystal device according to claim 1, wherein the height of the columnar structure formed of the polymer material is 3 μm to 20 μm.
状構造体の高さは5μm〜15μmである請求項1又は
2記載の液晶素子。4. The liquid crystal device according to claim 1, wherein the height of the columnar structure formed of the polymer material is 5 μm to 15 μm.
極を有するものであり、該両基板は該電極が互いに向き
合うように対向配置されている請求項1から4のいずれ
かに記載の液晶素子。5. The device according to claim 1, wherein each of the first and second substrates has an electrode, and the two substrates are arranged to face each other such that the electrodes face each other. Liquid crystal element.
も液晶素子観察側に配置される基板は透明ガラス板又は
透明合成樹脂フィルムである請求項1から5のいずれか
に記載の液晶素子。6. The liquid crystal device according to claim 1, wherein at least one of the first and second substrates disposed on the liquid crystal device observation side is a transparent glass plate or a transparent synthetic resin film.
れている請求項1から6のいずれかに記載の液晶素子。7. The liquid crystal device according to claim 1, wherein a peripheral portion between the two substrates is sealed with a sealant.
第2の基板との間に電気絶縁性膜が形成されている請求
項1から7のいずれかに記載の液晶素子。8. The columnar structure and the first or (and)
The liquid crystal device according to claim 1, wherein an electric insulating film is formed between the liquid crystal device and the second substrate.
第2の基板との間に配向膜が形成されている請求項1か
ら8のいずれかに記載の液晶素子。9. The columnar structure and the first or (and)
9. The liquid crystal device according to claim 1, wherein an alignment film is formed between the liquid crystal device and the second substrate.
0〜15のホトレジスト材料を所定の厚さで塗布するホ
トレジスト材料塗布工程と、 前記ホトレジスト材料の塗膜から所定の露光パターンで
露光処理を施す露光工程と、 前記露光工程後、前記塗膜を現像処理して前記露光パタ
ーンに対応した複数の柱状構造体を得る現像工程と、 前記柱状構造体の上から、第2の基板を被せて前記第1
基板上方に重ね設ける基板重ね合わせ工程と、 前記柱状構造体間に液晶を配置する液晶配置工程とを含
むことを特徴とする液晶素子の製造方法。10. An SP value of 1 on one surface of the first substrate.
A photoresist material application step of applying a photoresist material of 0 to 15 with a predetermined thickness; an exposure step of performing an exposure treatment on the coating film of the photoresist material in a predetermined exposure pattern; and after the exposure step, developing the coating film. A developing step of performing processing to obtain a plurality of columnar structures corresponding to the exposure pattern; and covering the first substrate with a second substrate over the columnar structure.
A method for manufacturing a liquid crystal element, comprising: a substrate superimposing step of superposing over a substrate; and a liquid crystal disposing step of disposing a liquid crystal between the columnar structures.
前記ホトレジスト材料を厚さ3μm〜20μmで塗布す
る請求項10記載の液晶素子の製造方法。11. In the photoresist material applying step,
The method according to claim 10, wherein the photoresist material is applied to a thickness of 3 μm to 20 μm.
前記ホトレジスト材料を厚さ5μm〜15μmで塗布す
る請求項10記載の液晶素子の製造方法。12. In the photoresist material applying step,
The method for manufacturing a liquid crystal element according to claim 10, wherein the photoresist material is applied in a thickness of 5m to 15m.
材料塗膜にプレベーキング処理を施す請求項10から1
2のいずれかに記載の液晶素子の製造方法。13. The method according to claim 10, wherein a pre-baking process is performed on the photoresist material coating before the exposing step.
3. The method for manufacturing a liquid crystal element according to any one of 2.
前記塗膜に露光後ベーキング処理を施す請求項10から
13のいずれかに記載の液晶素子の製造方法。14. After the exposing step and before the developing step,
14. The method for manufacturing a liquid crystal device according to claim 10, wherein the coating film is subjected to a baking treatment after exposure.
工程及び液晶配置工程前に、該現像工程により得られる
柱状構造体に対しポスト露光処理及びポストベーキング
処理を施す請求項10から14のいずれかに記載の液晶
素子の製造方法。15. The post-exposure process and the post-baking process performed on the columnar structure obtained by the developing process after the developing process and before the substrate overlapping process and the liquid crystal disposing process. 3. The method for producing a liquid crystal element according to item 1.
れ電極を有するものを用い、前記ホトレジスト材料塗布
工程においては第1基板の電極形成面上にホトレジスト
材料を塗布するとともに、前記基板重ね合わせ工程にお
いては第2基板をその電極形成面を柱状構造体に向けて
その上に被せることにより、該両基板を該電極が互いに
向き合うように対向配置させる請求項10から15のい
ずれかに記載の液晶素子の製造方法。16. The method according to claim 16, wherein the first and second substrates each have an electrode. In the photoresist material applying step, a photoresist material is applied on an electrode forming surface of the first substrate, and the substrate overlapping step is performed. The liquid crystal according to any one of claims 10 to 15, wherein the second substrate is placed on the second substrate so that the electrodes face each other by covering the second substrate with its electrode formation surface facing the columnar structure. Device manufacturing method.
とも液晶素子観察側に配置される基板として透明ガラス
板又は透明合成樹脂フィルムを用いる請求項10から1
6のいずれかに記載の液晶素子の製造方法。17. A transparent glass plate or a transparent synthetic resin film is used as at least one of the first and second substrates disposed on the liquid crystal element observation side.
7. The method for manufacturing a liquid crystal element according to any one of 6.
する工程を含む請求項10から17のいずれかに記載の
液晶素子の製造方法。18. The method for manufacturing a liquid crystal element according to claim 10, further comprising a step of sealing a peripheral portion between the two substrates with a sealing agent.
び)第2の基板との間に配向膜を形成する工程を含む請
求項10から18のいずれかに記載の液晶素子。19. The liquid crystal device according to claim 10, further comprising a step of forming an alignment film between said columnar structure and said first and / or second substrate.
び)第2の基板との間に電気絶縁性膜を形成する工程を
含む請求項10から19のいずれかに記載の液晶素子の
製造方法。20. The liquid crystal device according to claim 10, further comprising a step of forming an electrically insulating film between said columnar structure and said first and / or second substrate. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10194661A JP2000029035A (en) | 1998-07-09 | 1998-07-09 | Liquid crystal element and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10194661A JP2000029035A (en) | 1998-07-09 | 1998-07-09 | Liquid crystal element and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000029035A true JP2000029035A (en) | 2000-01-28 |
Family
ID=16328223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10194661A Withdrawn JP2000029035A (en) | 1998-07-09 | 1998-07-09 | Liquid crystal element and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000029035A (en) |
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-
1998
- 1998-07-09 JP JP10194661A patent/JP2000029035A/en not_active Withdrawn
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| US7218374B2 (en) | 2002-02-20 | 2007-05-15 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display device and method of manufacturing the same |
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| US6774958B2 (en) | 2002-02-26 | 2004-08-10 | Lg.Philips Lcd Co., Ltd. | Liquid crystal panel, apparatus for inspecting the same, and method of fabricating liquid crystal display thereof |
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| US7259802B2 (en) | 2002-02-26 | 2007-08-21 | Lg.Philips Lcd Co., Ltd. | Liquid crystal panel, apparatus for inspecting the same, and method of fabricating liquid crystal display thereof |
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| US6784970B2 (en) | 2002-02-27 | 2004-08-31 | Lg.Philips Lcd Co., Ltd. | Method of fabricating LCD |
| US7391494B2 (en) | 2002-02-27 | 2008-06-24 | Lg Display Co., Ltd. | Method of fabricating LCD |
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| USRE42372E1 (en) * | 2002-02-27 | 2011-05-17 | Lg Display Co., Ltd. | Apparatus for dispensing liquid crystal and method for controlling liquid crystal dropping amount |
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| US7270587B2 (en) | 2002-03-05 | 2007-09-18 | Lg.Philips Lcd Co., Ltd. | Apparatus and method for manufacturing liquid crystal display devices, method for using the apparatus, and device produced by the method |
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| US6850088B2 (en) | 2002-03-06 | 2005-02-01 | Lg.Philips Lcd Co., Ltd. | Apparatus and method for testing liquid crystal display panel |
| US7532301B2 (en) | 2002-03-07 | 2009-05-12 | Lg Display Co., Ltd. | Method for fabricating liquid crystal display panel including dummy sealant pattern |
| US7416010B2 (en) | 2002-03-08 | 2008-08-26 | Lg Display Co., Ltd. | Bonding apparatus and system for fabricating liquid crystal display device |
| US6860533B2 (en) | 2002-03-08 | 2005-03-01 | Lg. Philips Lcd Co., Ltd. | Substrate loading/unloading apparatus for manufacturing a liquid crystal display device |
| US7372511B2 (en) | 2002-03-08 | 2008-05-13 | Lg.Philips Lcd Co., Ltd. | Device for controlling spreading of liquid crystal and method for fabricating an LCD |
| US7319503B2 (en) | 2002-03-09 | 2008-01-15 | Lg.Philips Lcd Co., Ltd. | Method for cutting liquid crystal display panel |
| US7545477B2 (en) | 2002-03-12 | 2009-06-09 | Lg Display Co., Ltd. | Bonding apparatus having compensating system for liquid crystal display device and method for manufacturing the same |
| US7027122B2 (en) | 2002-03-12 | 2006-04-11 | Lg.Philips Lcd Co., Ltd. | Bonding apparatus having compensating system for liquid crystal display device and method for manufacturing the same |
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| US7324184B2 (en) | 2002-03-13 | 2008-01-29 | Lg.Philips Lcd Co., Ltd. | Indicator for deciding grinding amount of liquid crystal display panel and method for detecting grinding failure using the same |
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| US7250989B2 (en) | 2002-03-15 | 2007-07-31 | Lg.Philips Lcd Co., Ltd. | Substrate bonding apparatus having alignment system with one end provided inside vacuum chamber for liquid crystal display device |
| US7436483B2 (en) | 2002-03-15 | 2008-10-14 | Lg Display Co., Ltd. | System for fabricating liquid crystal display with calculated pattern of liquid crystal drops that do not contact sealant and method of fabricating liquid crystal display using the same |
| US7096897B2 (en) | 2002-03-15 | 2006-08-29 | Lg.Philips Lcd Co., Ltd. | Liquid crystal dispensing apparatus having confirming function for remaining amount of liquid crystal and method for measuring the same |
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| US7306016B2 (en) | 2002-03-15 | 2007-12-11 | Lg.Philips Lcd Co., Ltd. | Liquid crystal dispensing apparatus having confirming function for remaining amount of liquid crystal and method for measuring the same |
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| US6885427B2 (en) | 2002-03-15 | 2005-04-26 | Lg.Philips Lcd Co., Ltd. | Substrate bonding apparatus for liquid crystal display device having alignment system with one end provided inside vacuum chamber |
| US7102726B2 (en) | 2002-03-15 | 2006-09-05 | Lg. Philips Lcd Co., Ltd. | System for fabricating liquid crystal display and method of fabricating liquid crystal display using the same |
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| US7196763B2 (en) | 2002-03-19 | 2007-03-27 | Lg. Philips Lcd Co., Ltd. | Liquid crystal display panel and method for fabricating the same |
| US7280180B2 (en) | 2002-03-19 | 2007-10-09 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display panel with first and second dummy UV sealants and method for fabricating the same |
| US7196764B2 (en) | 2002-03-20 | 2007-03-27 | Lg. Philips Lcd Co., Ltd. | Liquid crystal display device and method of manufacturing the same comprising at least one portion for controlling a liquid crystal flow within a closed pattern of sealant material |
| US7040525B2 (en) | 2002-03-20 | 2006-05-09 | Lg.Philips Lcd Co., Ltd. | Stage structure in bonding machine and method for controlling the same |
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| US7619709B2 (en) | 2002-03-20 | 2009-11-17 | Lg Display Co., Ltd. | Liquid crystal display panel and fabricating method thereof |
| US7341641B2 (en) | 2002-03-20 | 2008-03-11 | Lg.Philips Lcd Co., Ltd. | Bonding device for manufacturing liquid crystal display device |
| US7131893B2 (en) | 2002-03-20 | 2006-11-07 | Lg.Philips Lcd Co., Ltd. | Method for grinding liquid crystal display panel |
| US7405799B2 (en) | 2002-03-20 | 2008-07-29 | Lg Display Co., Ltd. | Liquid crystal display device and method of manufacturing the same |
| US6848963B2 (en) | 2002-03-20 | 2005-02-01 | Lg. Philips Lcd Co., Ltd. | Method for cleaning bonding chamber of bonding machine |
| US6755724B2 (en) | 2002-03-21 | 2004-06-29 | Lg.Philips Lcd Co., Ltd. | Device for grinding liquid crystal display panel |
| US6874662B2 (en) | 2002-03-21 | 2005-04-05 | Lg. Philips Lcd Co., Ltd. | Liquid crystal dispensing apparatus |
| US7179155B2 (en) | 2002-03-21 | 2007-02-20 | Lg.Philips Lcd Co., Ltd. | Device for grinding liquid crystal display panel |
| US7497762B2 (en) | 2002-03-21 | 2009-03-03 | Lg Display Co., Ltd. | Apparatus and method for correcting grinding amount of liquid crystal display panel |
| US6793756B2 (en) | 2002-03-22 | 2004-09-21 | Lg. Phillips Lcd Co., Ltd. | Substrate bonding apparatus for liquid crystal display device and method for driving the same |
| US7487812B2 (en) | 2002-03-22 | 2009-02-10 | Lg Display Co., Ltd. | Substrate bonding apparatus for liquid crystal display device and method for fabricating the same |
| US7075612B2 (en) | 2002-03-23 | 2006-07-11 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display device and method for manufacturing the same |
| US7616289B2 (en) | 2002-03-23 | 2009-11-10 | Lg Display Co., Ltd. | Apparatus for conveying liquid crystal display panel |
| US7244160B2 (en) | 2002-03-23 | 2007-07-17 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display device bonding apparatus and method of using the same |
| US7258894B2 (en) | 2002-03-23 | 2007-08-21 | L.G.Philips Lcd Co., Ltd. | Apparatus and method for dispensing liquid crystal material |
| US7405800B2 (en) | 2002-03-23 | 2008-07-29 | Lg Display Co., Ltd. | Liquid crystal display panel device having compensation cell gap, method of fabricating the same and method of using the same |
| US7271872B2 (en) | 2002-03-23 | 2007-09-18 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display panel device having compensation cell gap, method of fabricating the same and method of using the same |
| US6628365B1 (en) | 2002-03-23 | 2003-09-30 | Lg.Philips Lcd Co., Ltd. | LCD with UV shielding part at dummy sealant region |
| US8899175B2 (en) | 2002-03-23 | 2014-12-02 | Lg Display Co., Ltd. | Apparatus and method for dispensing liquid crystal material |
| US7300084B2 (en) | 2002-03-23 | 2007-11-27 | L.G.Philips Lcd Co., Ltd. | Apparatus for conveying liquid crystal display panel |
| US6893311B2 (en) | 2002-03-25 | 2005-05-17 | Lg.Philips Lcd Co., Ltd. | LCD bonding machine and method for fabricating LCD by using the same |
| US6815002B2 (en) | 2002-03-25 | 2004-11-09 | Lg. Philips Lcd Co., Ltd. | Method for dispensing liquid crystal using plurality of liquid crystal dispensing devices |
| US7329169B2 (en) | 2002-03-25 | 2008-02-12 | Lg.Philips Lcd Co., Ltd. | Apparatus and method for fabricating liquid crystal display panel |
| US7423703B2 (en) | 2002-03-25 | 2008-09-09 | Lg Display Co., Ltd. | Cassette for liquid crystal panel inspection and method of inspecting liquid crystal panel |
| US7426951B2 (en) | 2002-03-25 | 2008-09-23 | Lg Display Co., Ltd. | LCD bonding machine and method for fabricating LCD by using the same |
| US7214283B2 (en) | 2002-03-25 | 2007-05-08 | Lg.Philips Lcd Co., Ltd. | Working range setting method for bonding device for fabricating liquid crystal display devices |
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| US7100778B2 (en) | 2002-06-14 | 2006-09-05 | Lg.Phillips Lcd Co., Ltd. | Cleaning jig |
| US7659962B2 (en) | 2002-06-14 | 2010-02-09 | Lg Display Co., Ltd. | Portable jig |
| US7225917B2 (en) | 2002-06-15 | 2007-06-05 | Lg.Philips Lcd Co., Ltd. | Conveyor system having width adjustment unit |
| US7365824B2 (en) | 2002-06-28 | 2008-04-29 | Lg.Philips Lcd Co., Ltd. | System and method for manufacturing liquid crystal display devices |
| US7710534B2 (en) | 2002-06-28 | 2010-05-04 | Lg Display Co., Ltd. | System and method for manufacturing liquid crystal display devices |
| US7295279B2 (en) | 2002-06-28 | 2007-11-13 | Lg.Philips Lcd Co., Ltd. | System and method for manufacturing liquid crystal display devices |
| US6863097B2 (en) | 2002-07-20 | 2005-03-08 | Lg Philips Lcd Co., Ltd. | Apparatus and method for dispensing liquid crystal |
| US7021342B2 (en) | 2002-07-20 | 2006-04-04 | Lg.Philips Lcd Co., Ltd. | Apparatus and method for dispensing liquid crystal |
| US7363948B2 (en) | 2002-07-20 | 2008-04-29 | Lg.Philips Lcd Co., Ltd. | Apparatus and method for dispensing liquid crystal |
| US7527743B2 (en) | 2002-10-16 | 2009-05-05 | Lg Display Co., Ltd. | Apparatus and method for etching insulating film |
| US7314535B2 (en) | 2002-11-07 | 2008-01-01 | Lg.Philips Lcd Co., Ltd. | Structure for loading substrate in substrate bonding apparatus for fabricating liquid crystal display device |
| US7592034B2 (en) | 2002-11-13 | 2009-09-22 | Lg Display Co., Ltd. | Dispenser system for liquid crystal display panel, dispensing method using the same, and method of fabricating liquid crystal display panel using dispenser system and dispensing method |
| US7271904B2 (en) | 2002-11-13 | 2007-09-18 | Lg.Philips Lcd Co., Ltd. | Seal dispenser for fabricating liquid crystal display panel and method for detecting discontinuous portion of seal pattern using the same |
| US7364633B2 (en) | 2002-11-15 | 2008-04-29 | Lg. Philips Lcd Co., Ltd. | Device and method for fabricating liquid crystal display device |
| US7275577B2 (en) | 2002-11-16 | 2007-10-02 | Lg.Philips Lcd Co., Ltd. | Substrate bonding machine for liquid crystal display device |
| US7370681B2 (en) | 2002-11-16 | 2008-05-13 | Lg.Philips Lcd Co., Ltd. | Substrate bonding apparatus for liquid crystal display device |
| US7418991B2 (en) | 2002-11-18 | 2008-09-02 | Lg Display Co., Ltd. | Substrate bonding apparatus for manufacturing liquid crystal display device |
| US7215405B2 (en) | 2002-11-19 | 2007-05-08 | Lg.Philips Lcd Co., Ltd. | Dispenser system for liquid crystal display panel and method of using the same |
| US7075611B2 (en) | 2002-11-28 | 2006-07-11 | Lg.Philips Lcd Co., Ltd. | LCD manufacturing method involving forming a main seal pattern by screen printing and a dummy seal pattern by selective dispensing |
| US7193680B2 (en) | 2002-11-28 | 2007-03-20 | Lg.Philips Lcd Co., Ltd. | Method for forming seal pattern of liquid crystal display device |
| US7567336B2 (en) | 2002-11-28 | 2009-07-28 | Lg Display Co., Ltd. | Method for manufacturing liquid crystal display device |
| US7528922B2 (en) | 2002-12-17 | 2009-05-05 | Lg Display Co., Ltd. | Apparatus and method for measuring ground amounts of liquid crystal display panel |
| US7547362B2 (en) | 2002-12-18 | 2009-06-16 | Lg Display Co., Ltd. | Dispenser for liquid crystal display panel and method for controlling gap between substrate and nozzle using the same |
| US7342639B2 (en) | 2002-12-30 | 2008-03-11 | Lg.Philips Lcd Co., Ltd. | Fabrication method of liquid crystal display panel and seal pattern forming device using the same |
| US7528927B2 (en) | 2002-12-30 | 2009-05-05 | Lg Display Co., Ltd. | Fabrication method of liquid crystal display panel and seal pattern forming device using the same |
| US9285614B2 (en) | 2003-04-24 | 2016-03-15 | Lg Display Co., Ltd. | Liquid crystal dispensing system and method of dispensing liquid crystal material using same |
| US7322490B2 (en) | 2003-05-09 | 2008-01-29 | Lg.Philips Lcd Co., Ltd. | Liquid crystal dispensing system and method of dispensing liquid crystal material using same |
| US7407553B2 (en) | 2003-06-02 | 2008-08-05 | Lg Display Co., Ltd. | Dispenser for fabricating a liquid crystal display panel |
| US7419548B2 (en) | 2003-06-24 | 2008-09-02 | Lg Display Co., Ltd. | Liquid crystal dispensing apparatus having separable liquid crystal discharging pump |
| US7384485B2 (en) | 2003-06-24 | 2008-06-10 | Lg Display Co., Ltd. | Liquid crystal dispensing system which can read information of liquid crystal container and method of dispensing liquid crystal material using same |
| US7159624B2 (en) | 2003-06-24 | 2007-01-09 | Lg.Philips Lcd Co., Ltd. | Liquid crystal dispensing system using spacer information and method of dispensing liquid crystal material using the same |
| US7373958B2 (en) | 2003-06-25 | 2008-05-20 | Lg Displays Co., Ltd. | Liquid crystal dispensing apparatus |
| US7237579B2 (en) | 2003-06-27 | 2007-07-03 | Lg.Philips Lcd Co., Ltd. | Liquid crystal dispensing system |
| US6997216B2 (en) | 2003-06-27 | 2006-02-14 | Lg. Philips Lcd Co., Ltd. | Liquid crystal dispensing system |
| US7163033B2 (en) | 2003-06-30 | 2007-01-16 | Lg.Philips Lcd Co., Ltd. | Substrate bonding apparatus for liquid crystal display device panel |
| US7340322B2 (en) | 2003-10-31 | 2008-03-04 | Lg.Philips Lcd Co., Ltd. | Rubbing apparatus for liquid crystal display panel and method thereof |
| US7316248B2 (en) | 2003-11-17 | 2008-01-08 | Lg.Philips Lcd Co., Ltd. | Apparatus and method of dispensing liquid crystal |
| US7273077B2 (en) | 2003-11-28 | 2007-09-25 | Lg.Philips Lcd Co., Ltd. | Apparatus and method of dispensing liquid crystal |
| US7265805B2 (en) | 2003-11-29 | 2007-09-04 | Lg.Phillips Lcd Co., Ltd. | Method for cutting liquid crystal display panel wherein removing a particular portion of the seal line |
| US7349060B2 (en) | 2003-12-02 | 2008-03-25 | Lg.Philips Lcd Co., Ltd. | Loader and bonding apparatus for fabricating liquid crystal display device and loading method thereof |
| US7377049B2 (en) | 2003-12-10 | 2008-05-27 | Lg. Philips Lcd Co., Ltd. | Aligning apparatus |
| US7408614B2 (en) | 2003-12-10 | 2008-08-05 | Lg.Philips Lcd Co., Ltd. | Liquid crystal display panel having seal pattern for easy cut line separation minimizing liquid crystal contamination and method of manufacturing the same |
| US7240438B2 (en) | 2003-12-10 | 2007-07-10 | Lg.Philips Lcd Co., Ltd. | Aligning apparatus |
| US9004005B2 (en) | 2003-12-10 | 2015-04-14 | Lg Display Co., Ltd. | Apparatus for aligning dispenser using alignment plate and dispenser alignment system |
| US7595083B2 (en) | 2003-12-10 | 2009-09-29 | Lg Display Co., Ltd. | Apparatus for aligning dispenser system, method of aligning dispenser system, and dispenser alignment system |
| US7361240B2 (en) | 2003-12-13 | 2008-04-22 | Lg.Philips Lcd Co., Ltd. | Apparatus and method for fabricating liquid crystal display |
| US7310128B2 (en) | 2003-12-26 | 2007-12-18 | Lg. Philips Lcd Co., Ltd. | Manufacturing line of liquid crystal display device and fabricating method thereof |
| US7294999B2 (en) | 2003-12-30 | 2007-11-13 | Lg.Philips Lcd Co., Ltd. | Apparatus for automatically displaying the grade of liquid crystal display device and operating method thereof |
| US7345734B2 (en) | 2003-12-30 | 2008-03-18 | Lg.Philips Lcd Co., Ltd. | Dispenser system for liquid crystal display panel and dispensing method using the same |
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