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ITUB20159197A1 - Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare - Google Patents

Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare

Info

Publication number
ITUB20159197A1
ITUB20159197A1 ITUB2015A009197A ITUB20159197A ITUB20159197A1 IT UB20159197 A1 ITUB20159197 A1 IT UB20159197A1 IT UB2015A009197 A ITUB2015A009197 A IT UB2015A009197A IT UB20159197 A ITUB20159197 A IT UB20159197A IT UB20159197 A1 ITUB20159197 A1 IT UB20159197A1
Authority
IT
Italy
Prior art keywords
microelettromechanical
gyroscope
rejection
disorder
detecting
Prior art date
Application number
ITUB2015A009197A
Other languages
English (en)
Inventor
Carlo Valzasina
Zhang Huantong
Matteo Fabio Brunetto
Gert Ingvar Andersson
Erik Daniel Svensson
Nils Einar Hedenstierna
Original Assignee
St Microelectronics Srl
St Microelectronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl, St Microelectronics Inc filed Critical St Microelectronics Srl
Priority to ITUB2015A009197A priority Critical patent/ITUB20159197A1/it
Priority to US15/197,414 priority patent/US10180324B2/en
Priority to CN201610509398.0A priority patent/CN106931957B/zh
Priority to CN201620679379.8U priority patent/CN205991806U/zh
Priority to EP16199423.1A priority patent/EP3187825B1/en
Publication of ITUB20159197A1 publication Critical patent/ITUB20159197A1/it
Priority to US16/243,876 priority patent/US11085769B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5649—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
ITUB2015A009197A 2015-12-29 2015-12-29 Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare ITUB20159197A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
ITUB2015A009197A ITUB20159197A1 (it) 2015-12-29 2015-12-29 Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare
US15/197,414 US10180324B2 (en) 2015-12-29 2016-06-29 Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate
CN201610509398.0A CN106931957B (zh) 2015-12-29 2016-06-30 抑制干扰的微机电陀螺仪以及感测角速率的方法
CN201620679379.8U CN205991806U (zh) 2015-12-29 2016-06-30 微机电陀螺仪和电子系统
EP16199423.1A EP3187825B1 (en) 2015-12-29 2016-11-17 Microelectromechanical gyroscope with rejection of disturbances
US16/243,876 US11085769B2 (en) 2015-12-29 2019-01-09 Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUB2015A009197A ITUB20159197A1 (it) 2015-12-29 2015-12-29 Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare

Publications (1)

Publication Number Publication Date
ITUB20159197A1 true ITUB20159197A1 (it) 2017-06-29

Family

ID=55588435

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUB2015A009197A ITUB20159197A1 (it) 2015-12-29 2015-12-29 Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare

Country Status (4)

Country Link
US (2) US10180324B2 (it)
EP (1) EP3187825B1 (it)
CN (2) CN106931957B (it)
IT (1) ITUB20159197A1 (it)

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ITUB20159197A1 (it) * 2015-12-29 2017-06-29 St Microelectronics Srl Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare
EP3190421B1 (en) 2016-01-07 2019-05-22 Analog Devices, Inc. Two- or three-axis angular accelerometer
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
US10696541B2 (en) * 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
IT201700031177A1 (it) 2017-03-21 2018-09-21 St Microelectronics Srl Demodulatore compensato per segnali modulati in fase e quadratura, giroscopio mems includente il medesimo e metodo di demodulazione
IT201700031167A1 (it) * 2017-03-21 2018-09-21 St Microelectronics Srl Demodulatore per segnali modulati in fase e quadratura, giroscopio mems includente il medesimo e metodo di demodulazione
DE102017213637A1 (de) * 2017-08-07 2019-02-07 Robert Bosch Gmbh Ein- und zweiachsiger Drehratensensor
US10732198B2 (en) * 2017-08-09 2020-08-04 Analog Devices, Inc. Integrated linear and angular MEMS accelerometers
IT201700097531A1 (it) * 2017-08-30 2019-03-02 St Microelectronics Srl Sensore inerziale fm e metodo di funzionamento del sensore inerziale fm
CN108507555B (zh) * 2018-04-16 2024-04-05 四川知微传感技术有限公司 一种mems微机械全解耦闭环陀螺仪
EP3696503B1 (en) 2019-02-15 2022-10-26 Murata Manufacturing Co., Ltd. Vibration-robust multiaxis gyroscope
CN110146065B (zh) * 2019-06-10 2020-11-20 北京航空航天大学 一种基于波导光栅倏逝场扰动检测的微机械陀螺
IT202000003868A1 (it) * 2020-02-25 2021-08-25 St Microelectronics Srl Inclinometro mems avente ridotto errore di rettificazione di vibrazioni
US12012327B2 (en) 2020-03-12 2024-06-18 Honeywell International Inc. Methods for vibration immunity to suppress bias errors in sensor devices
CN118654653B (zh) * 2024-08-15 2024-11-12 苏州亿波达微系统技术有限公司 同向驱动的单轴mems陀螺仪

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US20050229703A1 (en) * 2004-04-14 2005-10-20 Geen John A Coupling apparatus for inertial sensors
US20120013355A1 (en) * 2010-06-16 2012-01-19 Narita Katsutoshi Compound sensor
US20150330783A1 (en) * 2014-05-15 2015-11-19 Maxim Integrated Products, Inc. Systems and methods for mems gyroscope shock robustness

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US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
EP1023607A2 (en) * 1997-10-14 2000-08-02 Irvine Sensors Corporation Multi-element micro gyro
JP4126833B2 (ja) * 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
DE10108198A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
US6598475B2 (en) * 2001-09-20 2003-07-29 Honeywell International Inc. Micromechanical inertial sensor having increased pickoff resonance damping
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US7231824B2 (en) * 2005-03-22 2007-06-19 Honeywell International Inc. Use of electrodes to cancel lift effects in inertial sensors
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US7240552B2 (en) * 2005-06-06 2007-07-10 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
JP4887034B2 (ja) * 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
DE102007030119A1 (de) * 2007-06-29 2009-01-02 Litef Gmbh Corioliskreisel
US8322213B2 (en) 2009-06-12 2012-12-04 The Regents Of The University Of California Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection
US9068834B2 (en) * 2009-09-09 2015-06-30 Continental Teves Ag & Co. Ohg Double-axial, shock-resistant rotation rate sensor with nested, linearly oscillating seismic elements
ITTO20091042A1 (it) * 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
CN102539830B (zh) * 2012-01-29 2015-05-13 迈尔森电子（天津）有限公司 多轴传感器及其制作方法、差分的传感器系统
CN106066175B (zh) * 2015-04-24 2019-09-24 意法半导体股份有限公司 用于感测角速率的微机电陀螺仪及感测角速率的方法
ITUB20159197A1 (it) * 2015-12-29 2017-06-29 St Microelectronics Srl Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare

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Publication number Priority date Publication date Assignee Title
US20050229703A1 (en) * 2004-04-14 2005-10-20 Geen John A Coupling apparatus for inertial sensors
US20120013355A1 (en) * 2010-06-16 2012-01-19 Narita Katsutoshi Compound sensor
US20150330783A1 (en) * 2014-05-15 2015-11-19 Maxim Integrated Products, Inc. Systems and methods for mems gyroscope shock robustness

Also Published As

Publication number Publication date
EP3187825A1 (en) 2017-07-05
US11085769B2 (en) 2021-08-10
CN106931957B (zh) 2020-09-08
US20170184400A1 (en) 2017-06-29
CN205991806U (zh) 2017-03-01
EP3187825B1 (en) 2020-08-19
US10180324B2 (en) 2019-01-15
CN106931957A (zh) 2017-07-07
US20200025567A1 (en) 2020-01-23

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