IT996218B - Dilatometro ottico - Google Patents

Dilatometro ottico

Info

Publication number: IT996218B
Authority: IT; Italy
Prior art keywords: optical dilatometer; dilatometer; optical
Prior art date: 1972-10-02

Application number

IT52813/73A

Other languages

English (en)

Original Assignee

Hewlett Packard Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1972-10-02

Filing date

1973-09-28

Publication date

1975-12-10

1973-09-28 Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co

1975-12-10 Application granted granted Critical

1975-12-10 Publication of IT996218B publication Critical patent/IT996218B/it

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/16—Investigating or analyzing materials by the use of thermal means by investigating thermal coefficient of expansion
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Biochemistry (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Health & Medical Sciences (AREA)
General Health & Medical Sciences (AREA)
Immunology (AREA)
Pathology (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)
Length Measuring Devices By Optical Means (AREA)
Investigating Or Analyzing Materials Using Thermal Means (AREA)

IT52813/73A 1972-10-02 1973-09-28 Dilatometro ottico IT996218B (it)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US29411472A	1972-10-02	1972-10-02

Publications (1)

Publication Number	Publication Date
IT996218B true IT996218B (it)	1975-12-10

Family

ID=23131943

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT52813/73A IT996218B (it)	1972-10-02	1973-09-28	Dilatometro ottico

Country Status (7)

Country	Link
US (1)	US3788746A (it)
JP (1)	JPS5441341B2 (it)
CH (1)	CH569254A5 (it)
DE (1)	DE2348272C3 (it)
FR (1)	FR2201764A5 (it)
GB (1)	GB1450692A (it)
IT (1)	IT996218B (it)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2198636A5 (it) *	1972-09-06	1974-03-29	France Etat
US4043671A (en) *	1976-07-13	1977-08-23	The United States Of America As Represented By The United States Energy Research And Development Administration	Laser system preset unit
US4147435A (en) *	1977-06-30	1979-04-03	International Business Machines Corporation	Interferometric process and apparatus for the measurement of the etch rate of opaque surfaces
US4329059A (en) *	1980-03-03	1982-05-11	The Boeing Company	Multiple channel interferometer
US4334778A (en) *	1980-09-12	1982-06-15	The United States Of America As Represented By The United States Department Of Energy	Dual surface interferometer
DE3279056D1 (en) *	1982-01-15	1988-10-27	Zeiss Carl Fa	Threedimensional interferometric length-measuring device
JPS58158508A (ja) *	1982-03-16	1983-09-20	Mitsubishi Heavy Ind Ltd	高温ひずみ計測方法
US5350899A (en) *	1992-04-15	1994-09-27	Hiroichi Ishikawa	Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber
US4711574A (en) *	1984-04-27	1987-12-08	Hewlett-Packard Company	Minimum deadpath interferometer and dilatometer
US4930894A (en) *	1984-04-27	1990-06-05	Hewlett-Packard Company	Minimum deadpath interferometer and dilatometer
JPS60231146A (ja) *	1984-05-01	1985-11-16	Rigaku Denki Kk	熱膨張率測定装置
JPS60237307A (ja) *	1984-05-11	1985-11-26	Yokogawa Hewlett Packard Ltd	レ−ザ測長器
JP2519411B2 (ja) *	1985-11-26	1996-07-31	真空理工株式会社	熱膨張計
US4717250A (en) *	1986-03-28	1988-01-05	Zygo Corporation	Angle measuring interferometer
US4802764A (en) *	1986-03-28	1989-02-07	Young Peter S	Differential plane mirror interferometer having beamsplitter/beam folder assembly
US4746216A (en) *	1986-03-28	1988-05-24	Zygo Corporation	Angle measuring interferometer
US4815856A (en) *	1986-06-05	1989-03-28	Storage Technology Partners Ii	Method and apparatus for measuring the absolute thickness of dust defocus layers
JPS62298702A (ja) *	1986-06-12	1987-12-25	ジゴ−　コ−ポレ−シヨン	差動平面鏡干渉計システム
JPS63124901A (ja) *	1986-11-07	1988-05-28	インターナショナル・ビジネス・マシーンズ・コーポレーション	干渉計
JPH0721472B2 (ja) *	1986-12-11	1995-03-08	品川白煉瓦株式会社	セラミックスの熱間における変位測定装置
US4784490A (en) *	1987-03-02	1988-11-15	Hewlett-Packard Company	High thermal stability plane mirror interferometer
US5121987A (en) *	1989-03-02	1992-06-16	Honeywell Inc.	Method and apparatus for measuring coefficient of thermal expansion
US4989980A (en) *	1989-03-02	1991-02-05	Honeywell Inc.	Method and apparatus for measuring coefficient of thermal expansion
US5018862A (en) *	1989-11-02	1991-05-28	Aerotech, Inc.	Successive fringe detection position interferometry
DD296549A5 (de) *	1990-07-13	1991-12-05	��@��@��@��@��@��K@��K`��K@��@��k��	Stehwelleninterpolator
US5404222A (en) *	1994-01-14	1995-04-04	Sparta, Inc.	Interferametric measuring system with air turbulence compensation
US5991033A (en) *	1996-09-20	1999-11-23	Sparta, Inc.	Interferometer with air turbulence compensation
ITMO20010248A1 (it) *	2001-12-12	2003-06-12	Expert System Solutions Srl	Dilatometro ottico perfezionato
US7025498B2 (en) *	2003-05-30	2006-04-11	Asml Holding N.V.	System and method of measuring thermal expansion
DE102004045802B4 (de) *	2004-09-22	2009-02-05	Robert Bosch Gmbh	Interferometrisches System mit Referenzfläche mit einer verspiegelten Zone
CN101881891B (zh) *	2009-05-05	2012-10-03	菲尼萨光电通讯(上海)有限公司	偏振光分束仪
GB2516281A (en) *	2013-07-17	2015-01-21	Cambridge Consultants	Optical apparatus and methods
CN104006739B (zh) *	2014-05-29	2016-06-15	清华大学	一种光学八细分线性干涉仪
CN108519402B (zh) *	2018-03-28	2020-12-22	北京工业大学	激光法测量超薄玻璃再热线收缩率的装置和方法
CN108759704B (zh) *	2018-07-06	2020-05-26	武汉理工大学	一种光纤f-p复合腔型高温应变传感器

1972
- 1972-10-02 US US00294114A patent/US3788746A/en not_active Expired - Lifetime
1973
- 1973-09-24 GB GB4462973A patent/GB1450692A/en not_active Expired
- 1973-09-26 DE DE2348272A patent/DE2348272C3/de not_active Expired
- 1973-09-28 IT IT52813/73A patent/IT996218B/it active
- 1973-10-01 CH CH1404973A patent/CH569254A5/xx not_active IP Right Cessation
- 1973-10-02 FR FR7335169A patent/FR2201764A5/fr not_active Expired
- 1973-10-02 JP JP11076373A patent/JPS5441341B2/ja not_active Expired

Also Published As

Publication number	Publication date
US3788746A (en)	1974-01-29
DE2348272C3 (de)	1975-09-11
JPS4970649A (it)	1974-07-09
CH569254A5 (it)	1975-11-14
DE2348272A1 (de)	1974-04-18
DE2348272B2 (de)	1975-01-23
JPS5441341B2 (it)	1979-12-07
FR2201764A5 (it)	1974-04-26
GB1450692A (en)	1976-09-22

Publication	Publication Date	Title
IT996218B (it)	1975-12-10	Dilatometro ottico
BR7301058D0 (pt)	1973-12-18	Penso
AT327426B (de)	1976-01-26	Brillenglaser
ATA1073373A (de)	1977-10-15	Brillenfassung
BE808276R (fr)	1974-06-06	Ontwikkelversnellers
AT324072B (de)	1975-08-11	Wendelbohreb
AT343378B (de)	1978-05-26	Brillengestell
AT353108B (de)	1979-10-25	Skibob
AT323930B (de)	1975-08-11	Untermatratze
AT333051B (de)	1976-11-10	Pankratisches objektiv
SE384495B (sv)	1976-05-10	Solskyddsglas
IT995343B (it)	1975-11-10	Proiettore ottico multiplo
IT991939B (it)	1975-08-30	Fasometro rapido
AR196894A1 (es)	1974-02-28	Estabilizador optico
AT326498B (de)	1975-12-10	Signalleuchte
SE7700663L (sv)	1977-01-21	Mellanprodukt
DK135917B (da)	1977-07-11	Pladespiller
CH544912A (de)	1973-11-30	Signalleuchte
AT335953B (de)	1977-04-12	Lauterboden
AT322779B (de)	1975-06-10	Bücherbrett
AT316891B (de)	1974-07-25	Lichtstarkes Objektiv
BR7303725D0 (pt)	1974-08-29	Descensor lento
CH541141A (fr)	1973-08-31	Dilatomètre
CH550994A (de)	1974-06-28	Optisches mikrometer.
SU427174A2 (ru)	1974-05-05	Штифт