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IT201700071798A1 - Sensore di forza multiassiale, metodo di fabbricazione del sensore di forza multiassiale, e metodo di funzionamento del sensore di forza multiassiale - Google Patents

Sensore di forza multiassiale, metodo di fabbricazione del sensore di forza multiassiale, e metodo di funzionamento del sensore di forza multiassiale

Info

Publication number
IT201700071798A1
IT201700071798A1 IT102017000071798A IT201700071798A IT201700071798A1 IT 201700071798 A1 IT201700071798 A1 IT 201700071798A1 IT 102017000071798 A IT102017000071798 A IT 102017000071798A IT 201700071798 A IT201700071798 A IT 201700071798A IT 201700071798 A1 IT201700071798 A1 IT 201700071798A1
Authority
IT
Italy
Prior art keywords
force sensor
axial force
multixial
manufacturing
axial
Prior art date
Application number
IT102017000071798A
Other languages
English (en)
Inventor
Gavarti Mohammad Abbasi
Daniele Caltabiano
Francesco Braghin
Original Assignee
St Microelectronics Srl
Milano Politecnico
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl, Milano Politecnico filed Critical St Microelectronics Srl
Priority to IT102017000071798A priority Critical patent/IT201700071798A1/it
Priority to EP18178963.7A priority patent/EP3421959B1/en
Priority to US16/019,092 priority patent/US11137299B2/en
Priority to CN201810682088.8A priority patent/CN109470385B/zh
Priority to CN201821002537.1U priority patent/CN208847381U/zh
Publication of IT201700071798A1 publication Critical patent/IT201700071798A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
IT102017000071798A 2017-06-27 2017-06-27 Sensore di forza multiassiale, metodo di fabbricazione del sensore di forza multiassiale, e metodo di funzionamento del sensore di forza multiassiale IT201700071798A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT102017000071798A IT201700071798A1 (it) 2017-06-27 2017-06-27 Sensore di forza multiassiale, metodo di fabbricazione del sensore di forza multiassiale, e metodo di funzionamento del sensore di forza multiassiale
EP18178963.7A EP3421959B1 (en) 2017-06-27 2018-06-21 Multi-axial force sensor, method of manufacturing the multi-axial force sensor, and method for operating the multi-axial force sensor
US16/019,092 US11137299B2 (en) 2017-06-27 2018-06-26 Multi-axial force sensor including piezoresistive groups, method of manufacturing the multi-axial force sensor, and method for operating the multi-axial force sensor
CN201810682088.8A CN109470385B (zh) 2017-06-27 2018-06-27 多轴力传感器、制造多轴力传感器的方法以及用于操作多轴力传感器的方法
CN201821002537.1U CN208847381U (zh) 2017-06-27 2018-06-27 微机电换能器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000071798A IT201700071798A1 (it) 2017-06-27 2017-06-27 Sensore di forza multiassiale, metodo di fabbricazione del sensore di forza multiassiale, e metodo di funzionamento del sensore di forza multiassiale

Publications (1)

Publication Number Publication Date
IT201700071798A1 true IT201700071798A1 (it) 2018-12-27

Family

ID=60183002

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000071798A IT201700071798A1 (it) 2017-06-27 2017-06-27 Sensore di forza multiassiale, metodo di fabbricazione del sensore di forza multiassiale, e metodo di funzionamento del sensore di forza multiassiale

Country Status (4)

Country Link
US (1) US11137299B2 (it)
EP (1) EP3421959B1 (it)
CN (2) CN109470385B (it)
IT (1) IT201700071798A1 (it)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700044301A1 (it) 2017-04-21 2018-10-21 St Microelectronics Srl Sensore di sforzo per il monitoraggio dello stato di salute di strutture fabbricate quali costruzioni, edifici, infrastrutture e simili
IT201700045285A1 (it) * 2017-04-26 2018-10-26 St Microelectronics Srl Trasduttore microelettromeccanico basato su trincea e metodo di fabbricazione del trasduttore microelettromeccanico
AT520955B1 (de) * 2018-01-18 2020-08-15 Engel Austria Gmbh Messvorrichtung zur Messung des Abstands zweier ausgewählter Punkte
CN113167668B (zh) * 2018-11-26 2023-12-26 国立大学法人东京大学 多轴触觉传感器
DE102019129411A1 (de) * 2019-09-12 2021-03-18 Wika Alexander Wiegand Se & Co. Kg Aufnehmerkörper mit einem Messelement und Herstellungsverfahren für einen Aufnehmerkörper
US11653568B2 (en) * 2020-01-08 2023-05-16 Texas Instmments Incorporated Integrated circuit stress sensor
US12013304B2 (en) * 2020-07-27 2024-06-18 Precision Biomems Corporation Electronic force and pressure sensor devices having flexible layers
CN112611489A (zh) * 2020-12-21 2021-04-06 陕西电器研究所 一种基于薄膜溅射的抗过载扭矩传感器
JP7592957B2 (ja) * 2020-12-24 2024-12-03 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
US20230127077A1 (en) * 2021-10-08 2023-04-27 Qorvo Us, Inc. Input structures for strain detection
JP2023109029A (ja) * 2022-01-26 2023-08-07 アルプスアルパイン株式会社 荷重センサ装置

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JPS63169078A (ja) * 1987-01-06 1988-07-13 Nippon Denso Co Ltd 半導体振動・加速度センサ
US20030209075A1 (en) * 2002-05-13 2003-11-13 Wacoh Corporation Acceleration sensor and manufacturing method for the same
EP1653208A2 (en) * 2004-10-26 2006-05-03 HONDA MOTOR CO., Ltd. Multi-axis force sensor chip and multi-axis force sensor using same
US20060272413A1 (en) * 2005-06-04 2006-12-07 Vladimir Vaganov Three-axis integrated mems accelerometer
EP1739401A1 (en) * 2005-06-28 2007-01-03 HONDA MOTOR CO., Ltd. Force sensor
JP2010185781A (ja) * 2009-02-12 2010-08-26 Torex Semiconductor Ltd 加速度センサー
US20100300205A1 (en) * 2009-05-29 2010-12-02 Torex Semiconductor Ltd. Acceleration sensor element and acceleration sensor having same

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Also Published As

Publication number Publication date
EP3421959A1 (en) 2019-01-02
CN109470385B (zh) 2022-03-15
CN109470385A (zh) 2019-03-15
EP3421959B1 (en) 2021-08-04
CN208847381U (zh) 2019-05-10
US20180372564A1 (en) 2018-12-27
US11137299B2 (en) 2021-10-05

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