IT1401001B1 - Accelerometro capacitivo triassiale microelettromeccanico - Google Patents
Accelerometro capacitivo triassiale microelettromeccanicoInfo
- Publication number
- IT1401001B1 IT1401001B1 ITTO2010A000511A ITTO20100511A IT1401001B1 IT 1401001 B1 IT1401001 B1 IT 1401001B1 IT TO2010A000511 A ITTO2010A000511 A IT TO2010A000511A IT TO20100511 A ITTO20100511 A IT TO20100511A IT 1401001 B1 IT1401001 B1 IT 1401001B1
- Authority
- IT
- Italy
- Prior art keywords
- triassial
- microelettromechanical
- accelerometer
- triassial accelerometer
- microelettromechanical triassial
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Steroid Compounds (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITTO2010A000511A IT1401001B1 (it) | 2010-06-15 | 2010-06-15 | Accelerometro capacitivo triassiale microelettromeccanico |
| US13/161,345 US8863575B2 (en) | 2010-06-15 | 2011-06-15 | Microelectromechanical three-axis capacitive accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITTO2010A000511A IT1401001B1 (it) | 2010-06-15 | 2010-06-15 | Accelerometro capacitivo triassiale microelettromeccanico |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ITTO20100511A1 ITTO20100511A1 (it) | 2011-12-16 |
| IT1401001B1 true IT1401001B1 (it) | 2013-07-05 |
Family
ID=43587119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ITTO2010A000511A IT1401001B1 (it) | 2010-06-15 | 2010-06-15 | Accelerometro capacitivo triassiale microelettromeccanico |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8863575B2 (it) |
| IT (1) | IT1401001B1 (it) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120131994A1 (en) * | 2010-03-25 | 2012-05-31 | Yona Ben-David | Retainer structure for vehicle testing platform, use of the retainer, and specialized vehicle testing platform to test an electronic stability program of a vehicle |
| US8555719B2 (en) | 2011-01-24 | 2013-10-15 | Freescale Semiconductor, Inc. | MEMS sensor with folded torsion springs |
| DE102012200740B4 (de) * | 2011-10-27 | 2024-03-21 | Robert Bosch Gmbh | Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements |
| US8978475B2 (en) * | 2012-02-01 | 2015-03-17 | Fairchild Semiconductor Corporation | MEMS proof mass with split z-axis portions |
| JP5799929B2 (ja) * | 2012-10-02 | 2015-10-28 | 株式会社村田製作所 | 加速度センサ |
| JP6070113B2 (ja) * | 2012-11-27 | 2017-02-01 | 株式会社村田製作所 | 加速度センサ |
| US9316666B2 (en) * | 2012-11-27 | 2016-04-19 | Murata Manufacturing Co., Ltd. | Acceleration sensor having a capacitor array located in the center of an inertial mass |
| JP6070112B2 (ja) * | 2012-11-27 | 2017-02-01 | 株式会社村田製作所 | 加速度センサ |
| US9106575B2 (en) * | 2013-01-31 | 2015-08-11 | Apple Inc. | Multiplexing multiple serial interfaces |
| KR20140123258A (ko) * | 2013-04-12 | 2014-10-22 | 삼성전기주식회사 | 3축 가속도 센서의 가속도 측정 회로 |
| FI20135714L (fi) | 2013-06-28 | 2014-12-29 | Murata Manufacturing Co | Kapasitiivinen mikromekaaninen kiihtyvyysanturi |
| US20150268269A1 (en) * | 2014-03-20 | 2015-09-24 | Freescale Semiconductor, Inc. | Sensor with combined sense elements for multiple axis sensing |
| DE102014211054A1 (de) * | 2014-06-10 | 2015-12-17 | Robert Bosch Gmbh | Mikromechanischer Beschleunigungssensor |
| US10241129B1 (en) * | 2014-08-01 | 2019-03-26 | Faez Ba-Tis | MEMS piston-tube based capacitive accelerometer |
| US9733269B2 (en) * | 2014-11-06 | 2017-08-15 | Richtek Technology Corporation | Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame |
| US10436812B2 (en) | 2015-03-20 | 2019-10-08 | Nxp Usa, Inc. | Micro-electro-mechanical acceleration sensor device |
| US9720012B2 (en) * | 2015-07-21 | 2017-08-01 | Nxp Usa, Inc. | Multi-axis inertial sensor with dual mass and integrated damping structure |
| WO2017075591A1 (en) | 2015-10-30 | 2017-05-04 | Ion Geophysical Corporation | Ocean bottom seismic systems |
| US10012671B2 (en) | 2015-11-03 | 2018-07-03 | Richtek Technology Corporation | Micro-electro-mechanical system device |
| US10393770B2 (en) * | 2016-04-28 | 2019-08-27 | Semiconductor Components Industries, Llc | Multi-axis accelerometer with reduced stress sensitivity |
| KR101915954B1 (ko) * | 2016-06-29 | 2018-11-08 | 주식회사 신성씨앤티 | 멤스 기반의 3축 가속도 센서 |
| US10122392B2 (en) * | 2016-08-18 | 2018-11-06 | Advanced Micro Devices, Inc. | Active equalizing negative resistance amplifier for bi-directional bandwidth extension |
| CN107782914B (zh) * | 2016-08-27 | 2021-07-09 | 深迪半导体(绍兴)有限公司 | 一种三轴加速计 |
| US10732196B2 (en) * | 2017-11-30 | 2020-08-04 | Invensense, Inc. | Asymmetric out-of-plane accelerometer |
| EP3850373B1 (en) | 2018-09-13 | 2025-01-01 | TGS-NOPEC Geophysical Company | Multi-axis, single mass accelerometer |
| US11733263B2 (en) * | 2018-09-21 | 2023-08-22 | Analog Devices, Inc. | 3-axis accelerometer |
| RU204922U1 (ru) * | 2019-03-19 | 2021-06-17 | Российская Федерация, От Имени Которой Выступает Министерство Промышленности И Торговли Российской Федерации | Чувствительный элемент трехосевого микромеханического акселерометра |
| CN110308308B (zh) * | 2019-06-27 | 2021-07-13 | 深迪半导体(绍兴)有限公司 | 一种带补偿电极的面内平动式加速度计 |
| IT201900024475A1 (it) * | 2019-12-18 | 2021-06-18 | St Microelectronics Srl | Dispositivo micromeccanico con gruppo elastico a costante elastica variabile |
| IT202000005563A1 (it) * | 2020-03-16 | 2021-09-16 | St Microelectronics Srl | Sensore inerziale mems con elevata resistenza al fenomeno della adesione |
| EP4123313B1 (en) * | 2021-07-23 | 2024-11-13 | STMicroelectronics S.r.l. | Closed-loop microelectromechanical accelerometer with compensation of spurious vibration modes and process for manufacturing a microelectromechanical accelerometer |
| EP4131256A1 (en) * | 2021-08-06 | 2023-02-08 | STMicroelectronics S.r.l. | Voice recognition system and method using accelerometers for sensing bone conduction |
| CN114487480A (zh) * | 2022-01-14 | 2022-05-13 | 瑞声开泰科技(武汉)有限公司 | 微机电系统加速度计 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69938658D1 (de) | 1999-09-10 | 2008-06-19 | St Microelectronics Srl | Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur |
| DE10108196A1 (de) | 2001-02-21 | 2002-10-24 | Bosch Gmbh Robert | Drehratensensor |
| US20040231420A1 (en) * | 2003-02-24 | 2004-11-25 | Huikai Xie | Integrated monolithic tri-axial micromachined accelerometer |
| US6845670B1 (en) * | 2003-07-08 | 2005-01-25 | Freescale Semiconductor, Inc. | Single proof mass, 3 axis MEMS transducer |
| US6935175B2 (en) * | 2003-11-20 | 2005-08-30 | Honeywell International, Inc. | Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping |
| US7140250B2 (en) * | 2005-02-18 | 2006-11-28 | Honeywell International Inc. | MEMS teeter-totter accelerometer having reduced non-linearty |
| FI119299B (fi) * | 2005-06-17 | 2008-09-30 | Vti Technologies Oy | Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi |
| EP1879034B1 (en) * | 2006-07-14 | 2009-11-18 | STMicroelectronics S.r.l. | Microelectromechanical inertial sensor, in particular for free-fall detection applications |
| US7487661B2 (en) * | 2006-10-11 | 2009-02-10 | Freescale Semiconductor, Inc. | Sensor having free fall self-test capability and method therefor |
| DE102006058747A1 (de) * | 2006-12-12 | 2008-06-19 | Robert Bosch Gmbh | Mikromechanischer z-Sensor |
| US7578190B2 (en) * | 2007-08-03 | 2009-08-25 | Freescale Semiconductor, Inc. | Symmetrical differential capacitive sensor and method of making same |
| DE102008001442A1 (de) * | 2008-04-29 | 2009-11-05 | Robert Bosch Gmbh | Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements |
| DE102008041327B4 (de) * | 2008-08-19 | 2021-12-30 | Robert Bosch Gmbh | Dreiachsiger Beschleunigungssensor |
| US8020443B2 (en) * | 2008-10-30 | 2011-09-20 | Freescale Semiconductor, Inc. | Transducer with decoupled sensing in mutually orthogonal directions |
| DE102008043788A1 (de) * | 2008-11-17 | 2010-05-20 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| US8205498B2 (en) * | 2008-11-18 | 2012-06-26 | Industrial Technology Research Institute | Multi-axis capacitive accelerometer |
-
2010
- 2010-06-15 IT ITTO2010A000511A patent/IT1401001B1/it active
-
2011
- 2011-06-15 US US13/161,345 patent/US8863575B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US8863575B2 (en) | 2014-10-21 |
| ITTO20100511A1 (it) | 2011-12-16 |
| US20120000287A1 (en) | 2012-01-05 |
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