IT1399567B1 - Smorzatore di vibrazioni per pompe di vuoto - Google Patents

Smorzatore di vibrazioni per pompe di vuoto

Info

Publication number: IT1399567B1
Authority: IT; Italy
Prior art keywords: vibration damper; vacuum pumps; pumps; vacuum; damper
Prior art date: 2010-04-16

Application number

ITTO2010A000313A

Other languages

English (en)

Inventor

Silvio Giors

Carmelo Quartarone

Luca Bonmassar

Vincenzo Pandolfo

Original Assignee

Varian Spa

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2010-04-16

Filing date

2010-04-16

Publication date

2013-04-19

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=43216324&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IT1399567(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

2010-04-16 Application filed by Varian Spa filed Critical Varian Spa

2010-04-16 Priority to ITTO2010A000313A priority Critical patent/IT1399567B1/it

2011-02-24 Priority to EP11155766.6A priority patent/EP2410184B1/en

2011-03-02 Priority to JP2011045140A priority patent/JP2011226466A/ja

2011-03-28 Priority to US13/072,997 priority patent/US8794678B2/en

2011-10-17 Publication of ITTO20100313A1 publication Critical patent/ITTO20100313A1/it

2013-04-19 Application granted granted Critical

2013-04-19 Publication of IT1399567B1 publication Critical patent/IT1399567B1/it

2014-03-27 Priority to US14/228,137 priority patent/US9995421B2/en

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/02—Energy absorbers; Noise absorbers
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F1/00—Springs
- F16F1/36—Springs made of rubber or other material having high internal friction, e.g. thermoplastic elastomers
- F16F1/373—Springs made of rubber or other material having high internal friction, e.g. thermoplastic elastomers characterised by having a particular shape
- F16F1/3732—Springs made of rubber or other material having high internal friction, e.g. thermoplastic elastomers characterised by having a particular shape having an annular or the like shape, e.g. grommet-type resilient mountings
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L25/00—Construction or details of pipe joints not provided for in, or of interest apart from, groups F16L13/00 - F16L23/00
- F16L25/12—Joints for pipes being spaced apart axially

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Non-Positive Displacement Air Blowers (AREA)
Pipe Accessories (AREA)
Compressor (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Vibration Prevention Devices (AREA)

ITTO2010A000313A 2010-04-16 2010-04-16 Smorzatore di vibrazioni per pompe di vuoto IT1399567B1 (it)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
ITTO2010A000313A IT1399567B1 (it)	2010-04-16	2010-04-16	Smorzatore di vibrazioni per pompe di vuoto
EP11155766.6A EP2410184B1 (en)	2010-04-16	2011-02-24	Vibration damper for vacuum pumps
JP2011045140A JP2011226466A (ja)	2010-04-16	2011-03-02	真空ポンプ用の振動減衰器
US13/072,997 US8794678B2 (en)	2010-04-16	2011-03-28	Vibration damper for vacuum pumps
US14/228,137 US9995421B2 (en)	2010-04-16	2014-03-27	Vibration damper for vacuum pumps

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
ITTO2010A000313A IT1399567B1 (it)	2010-04-16	2010-04-16	Smorzatore di vibrazioni per pompe di vuoto

Publications (2)

Publication Number	Publication Date
ITTO20100313A1 ITTO20100313A1 (it)	2011-10-17
IT1399567B1 true IT1399567B1 (it)	2013-04-19

Family

ID=43216324

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
ITTO2010A000313A IT1399567B1 (it)	2010-04-16	2010-04-16	Smorzatore di vibrazioni per pompe di vuoto

Country Status (4)

Country	Link
US (2)	US8794678B2 (it)
EP (1)	EP2410184B1 (it)
JP (1)	JP2011226466A (it)
IT (1)	IT1399567B1 (it)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IT1399567B1 (it)	2010-04-16	2013-04-19	Varian Spa	Smorzatore di vibrazioni per pompe di vuoto
DE102012112492A1 (de) *	2012-12-18	2014-06-18	Pfeiffer Vacuum Gmbh	Vakuumsystem
KR200475369Y1 (ko)	2013-07-01	2014-11-26	한국남부발전 주식회사	순환수펌프 축 정렬용 기구
DE102014103510B4 (de) *	2014-03-14	2016-02-25	Pfeiffer Vacuum Gmbh	Vakuumpumpen-Dämpfer
DE202015008803U1 (de) *	2015-12-23	2017-03-24	Leybold Gmbh	Verbindungseinrichtung
CN107044430B (zh) *	2016-02-05	2021-10-15	埃地沃兹日本有限公司	真空泵及被用于其中的转子及定子
GB2552324B (en) *	2016-07-18	2019-06-12	Edwards Ltd	Vibration damping connector systems
EP3318763B1 (de) *	2016-11-04	2020-07-01	Pfeiffer Vacuum Gmbh	Vakuumdichtung, doppeldichtung, vakuumsystem und vakuumpumpe
IT201800002429A1 (it) *	2018-02-06	2019-08-06	Sapa S P A	Dispositivo antivibrante per cover motore
JP7009274B2 (ja) *	2018-03-20	2022-01-25	エドワーズ株式会社	真空ポンプ及び真空ポンプ用ダンパ
GB2598762B (en) *	2020-09-11	2024-01-31	Thermo Fisher Scient Bremen Gmbh	Coupling for connecting analytical systems with vibrational isolation
TWI834063B (zh) *	2020-09-30	2024-03-01	荷蘭商Ａｓｍｌ荷蘭公司	減輕幫浦故障造成之損害之真空系統
CN112922908B (zh) *	2021-01-29	2022-08-26	安徽工程大学	一种运用在离心泵中的减振器
US11832728B2 (en) *	2021-08-24	2023-12-05	Sleep Number Corporation	Controlling vibration transmission within inflation assemblies
CN113700966B (zh) *	2021-08-31	2022-11-08	厦门振为科技有限公司	一种基于粒子阻尼的法兰用减振连接装置
EP4500024A1 (en) *	2022-03-28	2025-02-05	Baker Hughes Oilfield Operations, LLC	Particle damper for electric submersible pumps
CN115506995A (zh) *	2022-09-26	2022-12-23	拓荆科技(北京)有限公司	真空泵的安装结构、安装方法及半导体器件的加工装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB454969A (en)	1935-04-12	1936-10-12	Lamson Pneumatic Tube Co	Improvements in and relating to static vacuum or suction cleaning installations
US3189372A (en) *	1962-05-24	1965-06-15	Shell Oil Co	Flexible pipe joint having deflection limiting means
US3590852A (en)	1968-04-08	1971-07-06	Kunio Yamane	Air pump
US3517951A (en) *	1969-01-09	1970-06-30	Christy Metal Products Inc	Pipe coupling
US4036512A (en) *	1974-10-01	1977-07-19	Robert Arthur Francis	Pipe joints
US4332404A (en) *	1980-08-27	1982-06-01	Metal Bellows Corporation	Flexible tubing coupling
US5516122A (en) *	1993-12-10	1996-05-14	Caffee; Barry K.	Ultra high vacuum elastomer seal
JP4250353B2 (ja)	2001-06-22	2009-04-08	エドワーズ株式会社	真空ポンプ
EP1533530B1 (en) *	2003-11-18	2006-04-26	VARIAN S.p.A.	Vacuum pump provided with vibration damper
DE102004012677A1 (de)	2004-03-16	2005-10-13	Leybold Vakuum Gmbh	Vakuumsystem
DE102004044775A1 (de) *	2004-09-16	2006-04-06	Leybold Vacuum Gmbh	Vakuumpumpen-Schwingungsdämpfer
WO2006068014A1 (ja)	2004-12-20	2006-06-29	Boc Edwards Japan Limited	端部間の接続構造及び該構造を適用した真空システム
DE102005019054A1 (de) *	2005-04-23	2006-10-26	Pfeiffer Vacuum Gmbh	Schwingungsreduzierendes Bauteil und damit ausgerüstetes Vakuumpumpsystem
WO2008111335A1 (ja) *	2007-03-13	2008-09-18	Edwards Japan Limited	真空ポンプ防振構造とその構造を備えた真空ポンプ
IT1399567B1 (it)	2010-04-16	2013-04-19	Varian Spa	Smorzatore di vibrazioni per pompe di vuoto
JP5632992B2 (ja) *	2010-11-22	2014-12-03	日本電子株式会社	ターボ分子ポンプの接続装置

2010
- 2010-04-16 IT ITTO2010A000313A patent/IT1399567B1/it active
2011
- 2011-02-24 EP EP11155766.6A patent/EP2410184B1/en active Active
- 2011-03-02 JP JP2011045140A patent/JP2011226466A/ja active Pending
- 2011-03-28 US US13/072,997 patent/US8794678B2/en active Active
2014
- 2014-03-27 US US14/228,137 patent/US9995421B2/en active Active

Also Published As

Publication number	Publication date
US9995421B2 (en)	2018-06-12
US20140197627A1 (en)	2014-07-17
EP2410184B1 (en)	2013-05-01
ITTO20100313A1 (it)	2011-10-17
US8794678B2 (en)	2014-08-05
JP2011226466A (ja)	2011-11-10
US20110254263A1 (en)	2011-10-20
EP2410184A1 (en)	2012-01-25

Publication	Publication Date	Title
IT1399567B1 (it)	2013-04-19	Smorzatore di vibrazioni per pompe di vuoto
EP2530319A4 (en)	2013-08-07	PUMP
BR112013008389A2 (pt)	2016-06-21	montagem de pistão
EP2661290A4 (en)	2014-07-16	INTEGRATED PUMP MODULE
ITMI20111638A1 (it)	2012-03-14	Dispositivo di soppressione di vibrazione
DE112010005938T8 (de)	2014-02-06	Schwingungsdämpfvorrichtung
EP2592274A4 (en)	2015-12-16	VOLUTE COMPRESSOR
EP2689702A4 (en)	2014-08-06	VACUUM CLEANER
EP2578880A4 (en)	2016-03-16	HERMETIC COMPRESSOR
EP2628957A4 (en)	2014-04-16	VACUUM PUMP
EP2762726A4 (en)	2015-04-15	SPIRAL COMPRESSOR
EP2657527A4 (en)	2014-08-20	COMPRESSOR
FR2967883B1 (fr)	2013-08-23	Suceur d'aspirateur
EP2762727A4 (en)	2015-05-06	SPIRAL COMPRESSOR
EP2660472A4 (en)	2014-09-03	COMPRESSOR
DK2410180T3 (da)	2019-08-19	Svingstempelkompressor
DE112010002012A5 (de)	2012-06-28	Vakuumpumpe
DE112011101434A5 (de)	2013-03-28	Vakuumpumpe
BR112013022517A2 (pt)	2016-12-06	unidade de sucção
BR112013011854A2 (pt)	2016-08-16	compressor hermético compreendendo um membro de sucção de óleo
EP2578887A4 (en)	2016-01-27	COMPRESSOR
ITRM20110099A1 (it)	2011-09-12	Compressore ad onda di pressione.
IT1404076B1 (it)	2013-11-08	Apparecchiatura di aspirazione.
EP2787218A4 (en)	2015-07-29	VACUUM PUMP
DE112011102089A5 (de)	2013-07-18	Pumpenanordnung