IT1399480B1 - Apparecchiatura per la deposizione di materiale semiconduttore su vetro - Google Patents
Apparecchiatura per la deposizione di materiale semiconduttore su vetroInfo
- Publication number
- IT1399480B1 IT1399480B1 ITMI2010A000416A ITMI20100416A IT1399480B1 IT 1399480 B1 IT1399480 B1 IT 1399480B1 IT MI2010A000416 A ITMI2010A000416 A IT MI2010A000416A IT MI20100416 A ITMI20100416 A IT MI20100416A IT 1399480 B1 IT1399480 B1 IT 1399480B1
- Authority
- IT
- Italy
- Prior art keywords
- deposition
- glass
- equipment
- semiconductive material
- semiconductive
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI2010A000416A IT1399480B1 (it) | 2010-03-15 | 2010-03-15 | Apparecchiatura per la deposizione di materiale semiconduttore su vetro |
| PCT/EP2011/000897 WO2011113518A1 (en) | 2010-03-15 | 2011-02-24 | Apparatus for the deposition of semiconductor material on a glass sheet |
| EP11705819A EP2548219A1 (en) | 2010-03-15 | 2011-02-24 | Apparatus for the deposition of semiconductor material on a glass sheet |
| CN201180013855.2A CN102804357B (zh) | 2010-03-15 | 2011-02-24 | 用于在玻璃板上沉积半导体材料的设备 |
| US13/634,339 US20130000556A1 (en) | 2010-03-15 | 2011-02-24 | Apparatus for the deposition of semiconductor material on a glass sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITMI2010A000416A IT1399480B1 (it) | 2010-03-15 | 2010-03-15 | Apparecchiatura per la deposizione di materiale semiconduttore su vetro |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ITMI20100416A1 ITMI20100416A1 (it) | 2011-09-16 |
| IT1399480B1 true IT1399480B1 (it) | 2013-04-19 |
Family
ID=42671818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ITMI2010A000416A IT1399480B1 (it) | 2010-03-15 | 2010-03-15 | Apparecchiatura per la deposizione di materiale semiconduttore su vetro |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20130000556A1 (it) |
| EP (1) | EP2548219A1 (it) |
| CN (1) | CN102804357B (it) |
| IT (1) | IT1399480B1 (it) |
| WO (1) | WO2011113518A1 (it) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8557093B2 (en) | 2007-03-22 | 2013-10-15 | Sunpower Corporation | Deposition system with electrically isolated pallet and anode assemblies |
| KR101830782B1 (ko) | 2011-09-22 | 2018-04-05 | 삼성전자주식회사 | 그래핀을 포함하는 전극 구조체 및 전계효과 트랜지스터 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4635788A (en) * | 1984-07-12 | 1987-01-13 | Cincinnati Milacron Inc. | Conveyor |
| US5110249A (en) * | 1986-10-23 | 1992-05-05 | Innotec Group, Inc. | Transport system for inline vacuum processing |
| US5170714A (en) * | 1988-06-13 | 1992-12-15 | Asahi Glass Company, Ltd. | Vacuum processing apparatus and transportation system thereof |
| US5248349A (en) | 1992-05-12 | 1993-09-28 | Solar Cells, Inc. | Process for making photovoltaic devices and resultant product |
| US6875468B2 (en) | 2001-04-06 | 2005-04-05 | Rwe Solar Gmbh | Method and device for treating and/or coating a surface of an object |
| NZ579354A (en) | 2007-02-01 | 2011-03-31 | Willard & Kelsey Solar Group Llc | System and method for glass sheet semiconductor coating |
| US8557093B2 (en) * | 2007-03-22 | 2013-10-15 | Sunpower Corporation | Deposition system with electrically isolated pallet and anode assemblies |
| US20090191031A1 (en) * | 2008-01-28 | 2009-07-30 | Willard & Kelsey Solar Group, Llc | System and method for cooling semiconductor coated hot glass sheets |
| US8252619B2 (en) * | 2010-04-23 | 2012-08-28 | Primestar Solar, Inc. | Treatment of thin film layers photovoltaic module manufacture |
-
2010
- 2010-03-15 IT ITMI2010A000416A patent/IT1399480B1/it active
-
2011
- 2011-02-24 US US13/634,339 patent/US20130000556A1/en not_active Abandoned
- 2011-02-24 CN CN201180013855.2A patent/CN102804357B/zh not_active Expired - Fee Related
- 2011-02-24 EP EP11705819A patent/EP2548219A1/en not_active Withdrawn
- 2011-02-24 WO PCT/EP2011/000897 patent/WO2011113518A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| CN102804357A (zh) | 2012-11-28 |
| WO2011113518A1 (en) | 2011-09-22 |
| US20130000556A1 (en) | 2013-01-03 |
| ITMI20100416A1 (it) | 2011-09-16 |
| CN102804357B (zh) | 2016-05-25 |
| EP2548219A1 (en) | 2013-01-23 |
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