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IT1393781B1 - Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione - Google Patents

Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione

Info

Publication number
IT1393781B1
IT1393781B1 ITTO2009A000322A ITTO20090322A IT1393781B1 IT 1393781 B1 IT1393781 B1 IT 1393781B1 IT TO2009A000322 A ITTO2009A000322 A IT TO2009A000322A IT TO20090322 A ITTO20090322 A IT TO20090322A IT 1393781 B1 IT1393781 B1 IT 1393781B1
Authority
IT
Italy
Prior art keywords
photodium
photodiodo
controllable
integrated
ring
Prior art date
Application number
ITTO2009A000322A
Other languages
English (en)
Inventor
Delfo Nunziato Sanfilippo
Piero Giorgio Fallica
Massimo Cataldo Mazzillo
Original Assignee
St Microelectronics Rousset
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Rousset filed Critical St Microelectronics Rousset
Priority to ITTO2009A000322A priority Critical patent/IT1393781B1/it
Priority to US12/764,888 priority patent/US8476730B2/en
Publication of ITTO20090322A1 publication Critical patent/ITTO20090322A1/it
Application granted granted Critical
Publication of IT1393781B1 publication Critical patent/IT1393781B1/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/225Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/241Electrodes for devices having potential barriers comprising ring electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/807Pixel isolation structures
ITTO2009A000322A 2009-04-23 2009-04-23 Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione IT1393781B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO2009A000322A IT1393781B1 (it) 2009-04-23 2009-04-23 Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione
US12/764,888 US8476730B2 (en) 2009-04-23 2010-04-21 Geiger-mode photodiode with integrated and JFET-effect-adjustable quenching resistor, photodiode array, and corresponding manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2009A000322A IT1393781B1 (it) 2009-04-23 2009-04-23 Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione

Publications (2)

Publication Number Publication Date
ITTO20090322A1 ITTO20090322A1 (it) 2010-10-24
IT1393781B1 true IT1393781B1 (it) 2012-05-08

Family

ID=41226669

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2009A000322A IT1393781B1 (it) 2009-04-23 2009-04-23 Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione

Country Status (2)

Country Link
US (1) US8476730B2 (it)
IT (1) IT1393781B1 (it)

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IT1392366B1 (it) 2008-12-17 2012-02-28 St Microelectronics Rousset Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile, schiera di fotodiodi e relativo procedimento di fabbricazione
IT1393781B1 (it) 2009-04-23 2012-05-08 St Microelectronics Rousset Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione

Also Published As

Publication number Publication date
ITTO20090322A1 (it) 2010-10-24
US8476730B2 (en) 2013-07-02
US20100271108A1 (en) 2010-10-28

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