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IT1391973B1 - Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari - Google Patents

Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari

Info

Publication number
IT1391973B1
IT1391973B1 ITTO2008A000877A ITTO20080877A IT1391973B1 IT 1391973 B1 IT1391973 B1 IT 1391973B1 IT TO2008A000877 A ITTO2008A000877 A IT TO2008A000877A IT TO20080877 A ITTO20080877 A IT TO20080877A IT 1391973 B1 IT1391973 B1 IT 1391973B1
Authority
IT
Italy
Prior art keywords
biassial
mono
speed detection
angular speed
increased sensitivity
Prior art date
Application number
ITTO2008A000877A
Other languages
English (en)
Inventor
Sarah Zerbini
Gabriele Cazzaniga
Luca Coronato
Original Assignee
St Microelectronics Rousset
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Rousset filed Critical St Microelectronics Rousset
Priority to ITTO2008A000877A priority Critical patent/IT1391973B1/it
Priority to EP09177122.0A priority patent/EP2192383B1/en
Priority to US12/626,442 priority patent/US8312769B2/en
Publication of ITTO20080877A1 publication Critical patent/ITTO20080877A1/it
Application granted granted Critical
Publication of IT1391973B1 publication Critical patent/IT1391973B1/it
Priority to US13/615,353 priority patent/US8661897B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
ITTO2008A000877A 2008-11-26 2008-11-26 Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari IT1391973B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
ITTO2008A000877A IT1391973B1 (it) 2008-11-26 2008-11-26 Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari
EP09177122.0A EP2192383B1 (en) 2008-11-26 2009-11-25 Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection
US12/626,442 US8312769B2 (en) 2008-11-26 2009-11-25 Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection
US13/615,353 US8661897B2 (en) 2008-11-26 2012-09-13 Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2008A000877A IT1391973B1 (it) 2008-11-26 2008-11-26 Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari

Publications (2)

Publication Number Publication Date
ITTO20080877A1 ITTO20080877A1 (it) 2010-05-27
IT1391973B1 true IT1391973B1 (it) 2012-02-02

Family

ID=41170926

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2008A000877A IT1391973B1 (it) 2008-11-26 2008-11-26 Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari

Country Status (3)

Country Link
US (2) US8312769B2 (it)
EP (1) EP2192383B1 (it)
IT (1) IT1391973B1 (it)

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Also Published As

Publication number Publication date
US20130061672A1 (en) 2013-03-14
US8312769B2 (en) 2012-11-20
EP2192383B1 (en) 2018-10-03
US8661897B2 (en) 2014-03-04
US20100126272A1 (en) 2010-05-27
ITTO20080877A1 (it) 2010-05-27
EP2192383A1 (en) 2010-06-02

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