IT1241177B - Statore per pompa turbomolecolare. - Google Patents

Statore per pompa turbomolecolare.

Info

Publication number: IT1241177B
Authority: IT; Italy
Prior art keywords: stator; pump; fastening; turbomolecular pump; disc
Prior art date: 1990-02-16

Application number

IT67113A

Other languages

English (en)

Other versions

IT9067113A0 (it

IT9067113A1 (it

Inventor

Fausto Casaro

Giampaolo Levi

Original Assignee

Varian Spa

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-02-16

Filing date

1990-02-16

Publication date

1993-12-29

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11299682&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IT1241177(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1990-02-16 Publication of IT9067113A0 publication Critical patent/IT9067113A0/it

1990-02-16 Priority to IT67113A priority Critical patent/IT1241177B/it

1990-02-16 Application filed by Varian Spa filed Critical Varian Spa

1991-01-29 Priority to DE69101455T priority patent/DE69101455T2/de

1991-01-29 Priority to AT91200172T priority patent/ATE103374T1/de

1991-01-29 Priority to ES91200172T priority patent/ES2050498T3/es

1991-01-29 Priority to EP91200172A priority patent/EP0442556B1/en

1991-02-15 Priority to JP3022212A priority patent/JPH0826876B2/ja

1991-02-15 Priority to US07/656,361 priority patent/US5158426A/en

1991-08-16 Publication of IT9067113A1 publication Critical patent/IT9067113A1/it

1993-12-29 Publication of IT1241177B publication Critical patent/IT1241177B/it

1993-12-29 Application granted granted Critical

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S415/00—Rotary kinetic fluid motors or pumps
- Y10S415/914—Device to control boundary layer
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T403/00—Joints and connections
- Y10T403/65—Scarf
- Y10T403/655—Mirror images

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

IT67113A 1990-02-16 1990-02-16 Statore per pompa turbomolecolare. IT1241177B (it)

Priority Applications (7)

Application Number	Priority Date	Filing Date	Title
IT67113A IT1241177B (it)	1990-02-16	1990-02-16	Statore per pompa turbomolecolare.
DE69101455T DE69101455T2 (de)	1990-02-16	1991-01-29	Stator für eine Turbomolekularpumpe.
EP91200172A EP0442556B1 (en)	1990-02-16	1991-01-29	A stator for a turbo-molecular pump
AT91200172T ATE103374T1 (de)	1990-02-16	1991-01-29	Stator fuer eine turbomolekularpumpe.
ES91200172T ES2050498T3 (es)	1990-02-16	1991-01-29	Estator para bomba turbo-molecular.
JP3022212A JPH0826876B2 (ja)	1990-02-16	1991-02-15	ターボ分子ポンプ用固定子
US07/656,361 US5158426A (en)	1990-02-16	1991-02-15	Stator assembly for a turbomolecular pump

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
IT67113A IT1241177B (it)	1990-02-16	1990-02-16	Statore per pompa turbomolecolare.

Publications (3)

Publication Number	Publication Date
IT9067113A0 IT9067113A0 (it)	1990-02-16
IT9067113A1 IT9067113A1 (it)	1991-08-16
IT1241177B true IT1241177B (it)	1993-12-29

Family

ID=11299682

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT67113A IT1241177B (it)	1990-02-16	1990-02-16	Statore per pompa turbomolecolare.

Country Status (7)

Country	Link
US (1)	US5158426A (it)
EP (1)	EP0442556B1 (it)
JP (1)	JPH0826876B2 (it)
AT (1)	ATE103374T1 (it)
DE (1)	DE69101455T2 (it)
ES (1)	ES2050498T3 (it)
IT (1)	IT1241177B (it)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IT1250804B (it) *	1991-07-10	1995-04-21	Varian Spa	Stadio di pompaggio per pompa turbomolecolare
US5358373A (en) *	1992-04-29	1994-10-25	Varian Associates, Inc.	High performance turbomolecular vacuum pumps
JP3013083B2 (ja) *	1998-06-23	2000-02-28	セイコー精機株式会社	ターボ分子ポンプ
US6508631B1 (en)	1999-11-18	2003-01-21	Mks Instruments, Inc.	Radial flow turbomolecular vacuum pump
DE10046766A1 (de) *	2000-09-21	2002-04-11	Leybold Vakuum Gmbh	Compound-Reibungsvakuumpumpe
EP1249613B1 (en) *	2001-03-15	2004-01-28	VARIAN S.p.A.	Turbine pump with a stator stage integrated with a spacer ring
FR2850714B1 (fr)	2003-02-03	2005-04-29	Cit Alcatel	Pompe turbomoleculaire a entretoises multietagees de stator
JP3734816B2 (ja)	2003-03-25	2006-01-11	株式会社リコー	光情報記録装置、光情報記録媒体、光情報記録方法、プログラム、及び記憶媒体
JP4676731B2 (ja) *	2004-09-10	2011-04-27	エドワーズ株式会社	ターボ分子ポンプ固定翼及び真空ポンプ
DE102005027097A1 (de) *	2005-06-11	2006-12-14	Pfeiffer Vacuum Gmbh	Statorscheibe für Turbomolekularpumpe
JP2007309245A (ja) *	2006-05-19	2007-11-29	Boc Edwards Kk	真空ポンプ
US7866949B2 (en) *	2006-08-24	2011-01-11	General Electric Company	Methods and apparatus for fabricating a rotor for a steam turbine
DE102006050565A1 (de) *	2006-10-26	2008-04-30	Pfeiffer Vacuum Gmbh	Statorscheibe für eine Turbomolekularpumpe
DE202010011790U1 (de) *	2010-08-25	2011-12-05	Oerlikon Leybold Vacuum Gmbh	Turbomolekularpumpen
US9879553B2 (en) *	2010-12-14	2018-01-30	Edwards Japan Limited	Fixed blade assembly usable in exhaust pump, and exhaust pump provided with same
GB2498816A (en) *	2012-01-27	2013-07-31	Edwards Ltd	Vacuum pump
JP6236806B2 (ja) *	2013-03-07	2017-11-29	株式会社島津製作所	真空ポンプ
JP6241223B2 (ja) *	2013-03-13	2017-12-06	株式会社島津製作所	真空ポンプ
DE102013220879A1 (de) *	2013-10-15	2015-04-16	Pfeiffer Vacuum Gmbh	Vakuumpumpe
DE102014100207B4 (de) *	2014-01-09	2020-07-09	Pfeiffer Vacuum Gmbh	Statorscheibe
EP3051140B1 (de) *	2015-01-29	2018-01-10	Pfeiffer Vacuum Gmbh	Statorscheibe für eine vakuumpumpe
JP7049052B2 (ja) *	2016-09-27	2022-04-06	エドワーズ株式会社	真空ポンプ、および真空ポンプに備わる固定円板
JP2021173257A (ja) *	2020-04-28	2021-11-01	株式会社島津製作所	ターボ分子ポンプおよびターボ分子ポンプのステータ
KR102669882B1 (ko)	2022-02-08	2024-05-28	(주)엘오티베큠	터보 분자 펌프

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US416592A (en) *		1889-12-03		Separable pulley
US3004700A (en) *	1959-08-18	1961-10-17	Gen Electric	Turbine engine casing
FR84100E (fr) *	1963-08-02	1964-11-20	Snecma	Pompe à vide turbomoléculaire perfectionnée
DE1503704C3 (de) *	1966-12-30	1972-03-23	Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar	Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
FR1508546A (fr) *	1967-01-18	1968-01-05		Profils à emboîtement multiple
DE2214702A1 (de) *	1972-03-25	1973-09-27	Leybold Heraeus Gmbh & Co Kg	Turbomolekularpumpe
US3741680A (en) *	1972-04-05	1973-06-26	Avco Corp	Split housing piloting device
DE2229724B2 (de) *	1972-06-19	1980-06-04	Leybold-Heraeus Gmbh, 5000 Koeln	Turbomolekularpumpe
DE2654055B2 (de) *	1976-11-29	1979-11-08	Kernforschungsanlage Juelich Gmbh, 5170 Juelich	Rotor- und Statorscheibe für Turbomolekularpumpe
JPS5743384U (it) *	1980-08-26	1982-03-09
JPS60139098U (ja) *	1984-02-24	1985-09-13	セイコ−精機株式会社	組合せ型軸流分子ポンプ
JPS62173594U (it) *	1986-03-22	1987-11-04
JPS62258187A (ja) *	1986-05-02	1987-11-10	Mitsubishi Heavy Ind Ltd	タ−ボ分子ポンプ用静翼板の成形方法
DE3722164C2 (de) *	1987-07-04	1995-04-20	Balzers Pfeiffer Gmbh	Turbomolekularpumpe
JPS6449694U (it) *	1987-09-24	1989-03-28
DE3931661A1 (de) *	1989-08-25	1991-04-04	Leybold Ag	Magnetgelagerte vakuumpumpe

1990
- 1990-02-16 IT IT67113A patent/IT1241177B/it active IP Right Grant
1991
- 1991-01-29 ES ES91200172T patent/ES2050498T3/es not_active Expired - Lifetime
- 1991-01-29 EP EP91200172A patent/EP0442556B1/en not_active Expired - Lifetime
- 1991-01-29 AT AT91200172T patent/ATE103374T1/de not_active IP Right Cessation
- 1991-01-29 DE DE69101455T patent/DE69101455T2/de not_active Expired - Fee Related
- 1991-02-15 US US07/656,361 patent/US5158426A/en not_active Expired - Fee Related
- 1991-02-15 JP JP3022212A patent/JPH0826876B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
DE69101455D1 (de)	1994-04-28
JPH0826876B2 (ja)	1996-03-21
EP0442556A1 (en)	1991-08-21
IT9067113A0 (it)	1990-02-16
US5158426A (en)	1992-10-27
DE69101455T2 (de)	1994-07-14
JPH04219495A (ja)	1992-08-10
ATE103374T1 (de)	1994-04-15
EP0442556B1 (en)	1994-03-23
IT9067113A1 (it)	1991-08-16
ES2050498T3 (es)	1994-05-16

Publication	Publication Date	Title
IT1241177B (it)	1993-12-29	Statore per pompa turbomolecolare.
KR930016642A (ko)	1993-08-26	전동연료펌프
ATE113343T1 (de)	1994-11-15	Verbesserte turbomolekularpumpe.
ATE393314T1 (de)	2008-05-15	Turbomolekularpumpe
JPS6424200A (en)	1989-01-26	Pump
US7278822B2 (en)	2007-10-09	Turbomolecular pump
DE69518815D1 (de)	2000-10-19	Seitenströmungspumpe
DE69111345D1 (de)	1995-08-24	Verstopfungssichere Pumpe.
KR970707623A (ko)	1997-12-01	분할 포트형 플랜지에 고정된 분해가능한 모터 고정자(motor stator removably fitted on the split pot flange)
ATE333590T1 (de)	2006-08-15	Turbomolekularpumpe
KR890006980A (ko)	1989-06-17	다단펌프
US2956736A (en)	1960-10-18	Centrifugal fans
ES1018485U (es)	1992-01-16	"lava-vajillas con bomba centrifuga de circulacion"
IT1285864B1 (it)	1998-06-24	Gruppo girevole di supporto per rotatore di pompa da vuoto.
JPS62165595A (ja)	1987-07-22	マグネツト駆動形ポンプ
SU1240957A1 (ru)	1986-06-30	Вакуумный молекул рный насос
SU985446A1 (ru)	1982-12-30	Рабочее колесо турбомолекул рного вакуумного насоса
WO1999032792A2 (fr)	1999-07-01	Pompe a vide moleculaire
SU1267055A1 (ru)	1986-10-30	Вакуумный молекул рный насос
JPS5943520Y2 (ja)	1984-12-24	モ−トルポンプ
SU979715A1 (ru)	1982-12-07	Центробежна турбомашина
SU1626004A1 (ru)	1991-02-07	Рабочее колесо центробежного вентил тора
DE59201671D1 (de)	1995-04-20	Seitenkanalverdichter.
RU98111697A (ru)	2000-03-20	Радиальный потолочный вентилятор
GB1486083A (en)	1977-09-14	Multiple-stage centrifugal compressor or pump

Legal Events

Date	Code	Title	Description
1993-12-29	0001	Granted
1999-10-27	TA	Fee payment date (situation as of event date), data collected since 19931001	Effective date: 19970221