IT1214235B - Procedimento di planarizzazione - Google Patents

Procedimento di planarizzazione

Info

Publication number: IT1214235B
Authority: IT; Italy
Prior art keywords: planarization procedure; planarization; procedure
Prior art date: 1987-03-03

Application number

IT8783610A

Other languages

English (en)

Other versions

IT8783610A0 (it

Inventor

Crapella Stefano

Gualandris Fabio

Original Assignee

Sgs Microelettronica Spa

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-03-03

Filing date

1987-03-03

Publication date

1990-01-10

1987-03-03 Application filed by Sgs Microelettronica Spa filed Critical Sgs Microelettronica Spa

1987-03-03 Priority to IT8783610A priority Critical patent/IT1214235B/it

1987-03-03 Publication of IT8783610A0 publication Critical patent/IT8783610A0/it

1990-01-10 Application granted granted Critical

1990-01-10 Publication of IT1214235B publication Critical patent/IT1214235B/it

Links

IT8783610A 1987-03-03 1987-03-03 Procedimento di planarizzazione IT1214235B (it)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
IT8783610A IT1214235B (it)	1987-03-03	1987-03-03	Procedimento di planarizzazione

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
IT8783610A IT1214235B (it)	1987-03-03	1987-03-03	Procedimento di planarizzazione

Publications (2)

Publication Number	Publication Date
IT8783610A0 IT8783610A0 (it)	1987-03-03
IT1214235B true IT1214235B (it)	1990-01-10

Family

ID=11323096

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT8783610A IT1214235B (it)	1987-03-03	1987-03-03	Procedimento di planarizzazione

Country Status (1)

Country	Link
IT (1)	IT1214235B (it)

1987
- 1987-03-03 IT IT8783610A patent/IT1214235B/it active

Also Published As

Publication number	Publication date
IT8783610A0 (it)	1987-03-03

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Legal Events

Date	Code	Title	Description
1999-10-27	TA	Fee payment date (situation as of event date), data collected since 19931001	Effective date: 19970329