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IT1174089B - Struttura di maschera per litografia a radiazione ultravioletta sottovuoto - Google Patents

Struttura di maschera per litografia a radiazione ultravioletta sottovuoto

Info

Publication number
IT1174089B
IT1174089B IT20877/84A IT2087784A IT1174089B IT 1174089 B IT1174089 B IT 1174089B IT 20877/84 A IT20877/84 A IT 20877/84A IT 2087784 A IT2087784 A IT 2087784A IT 1174089 B IT1174089 B IT 1174089B
Authority
IT
Italy
Prior art keywords
vacuum ultraviolet
mask structure
lithography mask
ultraviolet lithography
vacuum
Prior art date
Application number
IT20877/84A
Other languages
English (en)
Other versions
IT8420877A0 (it
IT8420877A1 (it
Inventor
Harold Gene Craighead
Richard Edwin Howard
Lawrence David Jackel
Jonathan Curtis White
Original Assignee
American Telephone & Telegraph
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone & Telegraph filed Critical American Telephone & Telegraph
Publication of IT8420877A0 publication Critical patent/IT8420877A0/it
Publication of IT8420877A1 publication Critical patent/IT8420877A1/it
Application granted granted Critical
Publication of IT1174089B publication Critical patent/IT1174089B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
IT20877/84A 1983-05-13 1984-05-10 Struttura di maschera per litografia a radiazione ultravioletta sottovuoto IT1174089B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49506483A 1983-05-13 1983-05-13

Publications (3)

Publication Number Publication Date
IT8420877A0 IT8420877A0 (it) 1984-05-10
IT8420877A1 IT8420877A1 (it) 1985-11-10
IT1174089B true IT1174089B (it) 1987-07-01

Family

ID=23967113

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20877/84A IT1174089B (it) 1983-05-13 1984-05-10 Struttura di maschera per litografia a radiazione ultravioletta sottovuoto

Country Status (6)

Country Link
JP (1) JPS59214856A (it)
DE (1) DE3417888A1 (it)
FR (1) FR2545949B1 (it)
GB (1) GB2139781B (it)
IT (1) IT1174089B (it)
NL (1) NL8401525A (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2189903A (en) * 1986-04-01 1987-11-04 Plessey Co Plc An etch technique for metal mask definition
US4780175A (en) * 1986-10-27 1988-10-25 Sharp Kabushiki Kaisha Method for the production of an optical phase-shifting board
JPH02166447A (ja) * 1988-12-20 1990-06-27 Fujitsu Ltd 露光用マスクおよびその製造方法
JPH11237503A (ja) * 1997-12-03 1999-08-31 Canon Inc 回折光学素子及びそれを有する光学系
DE19808461A1 (de) * 1998-03-02 1999-09-09 Zeiss Carl Fa Retikel mit Kristall-Trägermaterial

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2658623C2 (de) * 1976-12-23 1982-07-29 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Aufzeichnungsträger und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
FR2545949B1 (fr) 1986-10-10
GB8411765D0 (en) 1984-06-13
IT8420877A0 (it) 1984-05-10
JPS59214856A (ja) 1984-12-04
DE3417888A1 (de) 1984-11-15
GB2139781B (en) 1986-09-10
FR2545949A1 (fr) 1984-11-16
NL8401525A (nl) 1984-12-03
IT8420877A1 (it) 1985-11-10
GB2139781A (en) 1984-11-14

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