[go: up one dir, main page]

IT1060035B - Sostanza protettiva fotosensibile termostabile di tipo positivo - Google Patents

Sostanza protettiva fotosensibile termostabile di tipo positivo

Info

Publication number
IT1060035B
IT1060035B IT23187/76A IT2318776A IT1060035B IT 1060035 B IT1060035 B IT 1060035B IT 23187/76 A IT23187/76 A IT 23187/76A IT 2318776 A IT2318776 A IT 2318776A IT 1060035 B IT1060035 B IT 1060035B
Authority
IT
Italy
Prior art keywords
positive type
protective substance
type thermo
photosensitive protective
stable photosensitive
Prior art date
Application number
IT23187/76A
Other languages
English (en)
Original Assignee
Gaf Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gaf Corp filed Critical Gaf Corp
Application granted granted Critical
Publication of IT1060035B publication Critical patent/IT1060035B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
IT23187/76A 1975-07-18 1976-05-12 Sostanza protettiva fotosensibile termostabile di tipo positivo IT1060035B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/597,226 US4093461A (en) 1975-07-18 1975-07-18 Positive working thermally stable photoresist composition, article and method of using

Publications (1)

Publication Number Publication Date
IT1060035B true IT1060035B (it) 1982-07-10

Family

ID=24390630

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23187/76A IT1060035B (it) 1975-07-18 1976-05-12 Sostanza protettiva fotosensibile termostabile di tipo positivo

Country Status (9)

Country Link
US (1) US4093461A (it)
JP (1) JPS5213315A (it)
CA (1) CA1063416A (it)
CH (1) CH619055A5 (it)
DE (1) DE2631535A1 (it)
FR (1) FR2317680B1 (it)
GB (1) GB1548583A (it)
IT (1) IT1060035B (it)
NL (1) NL164975C (it)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4292384A (en) * 1977-09-30 1981-09-29 Horizons Research Incorporated Gaseous plasma developing and etching process employing low voltage DC generation
US4180404A (en) * 1977-11-17 1979-12-25 Asahi Kasei Kogyo Kabushiki Kaisha Heat resistant photoresist composition and process for preparing the same
US4326018A (en) * 1977-12-12 1982-04-20 Polychrome Corporation Lithographic printing plate
US4208477A (en) * 1977-12-26 1980-06-17 Asahi Kasei Kogyo Kabushiki Kaisha Heat resistant photoresist composition and process for preparing the same
US4268602A (en) * 1978-12-05 1981-05-19 Toray Industries, Ltd. Photosensitive O-quinone diazide containing composition
US4289573A (en) * 1979-03-30 1981-09-15 International Business Machines Corporation Process for forming microcircuits
US4339522A (en) * 1979-06-18 1982-07-13 International Business Machines Corporation Ultra-violet lithographic resist composition and process
DE2931297A1 (de) * 1979-08-01 1981-02-19 Siemens Ag Waermebestaendige positivresists und verfahren zur herstellung waermebestaendiger reliefstrukturen
JPS5622428A (en) * 1979-08-01 1981-03-03 Toray Ind Inc Polyimide pattern forming method
US4284706A (en) * 1979-12-03 1981-08-18 International Business Machines Corporation Lithographic resist composition for a lift-off process
US4369247A (en) * 1980-09-03 1983-01-18 E. I. Du Pont De Nemours And Company Process of producing relief structures using polyamide ester resins
US4414312A (en) * 1980-09-03 1983-11-08 E. I. Du Pont De Nemours & Co. Photopolymerizable polyamide ester resin compositions containing an oxygen scavenger
US4329419A (en) * 1980-09-03 1982-05-11 E. I. Du Pont De Nemours And Company Polymeric heat resistant photopolymerizable composition for semiconductors and capacitors
US4410612A (en) * 1980-09-03 1983-10-18 E. I. Du Pont De Nemours And Company Electrical device formed from polymeric heat resistant photopolymerizable composition
DE3110632A1 (de) * 1981-03-19 1982-09-30 Hoechst Ag, 6000 Frankfurt Verfahren zum einbrennen von lichtempflindlichen schichten bei der herstellung von druckformen
JPS57168942A (en) * 1981-04-13 1982-10-18 Hitachi Ltd Photosensitive polymer composition
US4476216A (en) * 1981-08-03 1984-10-09 Amdahl Corporation Method for high resolution lithography
US4439516A (en) * 1982-03-15 1984-03-27 Shipley Company Inc. High temperature positive diazo photoresist processing using polyvinyl phenol
JPS58223149A (ja) * 1982-06-22 1983-12-24 Toray Ind Inc 感光性ポリイミド用現像液
JPS59100135A (ja) * 1982-11-30 1984-06-09 Japan Synthetic Rubber Co Ltd 樹脂組成物
US5059513A (en) * 1983-11-01 1991-10-22 Hoechst Celanese Corporation Photochemical image process of positive photoresist element with maleimide copolymer
US4857435A (en) * 1983-11-01 1989-08-15 Hoechst Celanese Corporation Positive photoresist thermally stable compositions and elements having deep UV response with maleimide copolymer
JPS60169852A (ja) * 1984-02-14 1985-09-03 Fuji Photo Film Co Ltd 湿し水不要ネガ型感光性平版印刷版の製版法
CA1255142A (en) * 1985-03-11 1989-06-06 Edward C. Fredericks Method and composition of matter for improving conductor resolution in microelectronic circuits
US4745045A (en) * 1985-03-11 1988-05-17 International Business Machines Corporation Method for improving resolution in microelectronic circuits using photoresist overlayer by using thermally processed polyimide underlayer formed from positive photoresist and polyamic acid
US4942108A (en) * 1985-12-05 1990-07-17 International Business Machines Corporation Process of making diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers
EP0224680B1 (en) * 1985-12-05 1992-01-15 International Business Machines Corporation Diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers
CA1308596C (en) * 1986-01-13 1992-10-13 Rohm And Haas Company Microplastic structures and method of manufacture
US4720445A (en) * 1986-02-18 1988-01-19 Allied Corporation Copolymers from maleimide and aliphatic vinyl ethers and esters used in positive photoresist
JPH0721642B2 (ja) * 1986-06-19 1995-03-08 宇部興産株式会社 感光性ポリイミドのパタ−ン形成方法
JPH0644154B2 (ja) * 1986-07-03 1994-06-08 宇部興産株式会社 有機溶媒可溶性のポジ型感光性ポリイミド組成物
US5077378A (en) * 1986-10-02 1991-12-31 Hoechst Celanese Corporation Polyamide containing the hexafluoroisopropylidene group
US5021320A (en) * 1986-10-02 1991-06-04 Hoechst Celanese Corporation Polyamide containing the hexafluoroisopropylidene group with O-quinone diazide in positive working photoresist
EP0264678B1 (de) * 1986-10-02 1991-09-18 Hoechst Celanese Corporation Polyamide mit Hexafluorisopropyliden-gruppen, diese enthaltende positiv arbeitende lichtempfindliche Gemische und damit hergestellte Aufzeichnungsmaterialien
DE3850809D1 (de) * 1987-05-18 1994-09-01 Siemens Ag Wärmebeständige Positivresists und Verfahren zur Herstellung wärmebeständiger Reliefstrukturen.
US5037720A (en) * 1987-07-21 1991-08-06 Hoechst Celanese Corporation Hydroxylated aromatic polyamide polymer containing bound naphthoquinone diazide photosensitizer, method of making and use
DE3835737A1 (de) * 1988-10-20 1990-04-26 Ciba Geigy Ag Positiv-fotoresists mit erhoehter thermischer stabilitaet
DE3837612A1 (de) * 1988-11-05 1990-05-23 Ciba Geigy Ag Positiv-fotoresists von polyimid-typ
US5024922A (en) * 1988-11-07 1991-06-18 Moss Mary G Positive working polyamic acid/imide and diazoquinone photoresist with high temperature pre-bake
EP0478321B1 (en) * 1990-09-28 1997-11-12 Kabushiki Kaisha Toshiba Photosenstive resin composition for forming polyimide film pattern and method of forming polyimide film pattern
JP2890213B2 (ja) * 1991-02-25 1999-05-10 チッソ株式会社 感光性重合体組成物及びパターンの形成方法
JP3677191B2 (ja) 1999-03-15 2005-07-27 株式会社東芝 感光性ポリイミド用現像液、ポリイミド膜パターン形成方法、及び電子部品
JP4529252B2 (ja) 1999-09-28 2010-08-25 日立化成デュポンマイクロシステムズ株式会社 ポジ型感光性樹脂組成物、パターンの製造法及び電子部品
KR100422971B1 (ko) 1999-12-29 2004-03-12 삼성전자주식회사 나프톨 구조를 가진 이온형 광산발생제 및 이를 이용한감광성 폴리이미드 조성물
JP3773845B2 (ja) 2000-12-29 2006-05-10 三星電子株式会社 ポジティブ型感光性ポリイミド前駆体およびこれを含む組成物
KR100532590B1 (ko) * 2002-11-07 2005-12-01 삼성전자주식회사 감광성 폴리이미드 전구체용 가용성 폴리이미드 및, 이를포함하는 감광성 폴리이드 전구체 조성물
US7638254B2 (en) 2004-05-07 2009-12-29 Hitachi Chemical Dupont Microsystems Ltd Positive photosensitive resin composition, method for forming pattern, and electronic part
JP4775261B2 (ja) 2004-05-07 2011-09-21 日立化成デュポンマイクロシステムズ株式会社 ポジ型感光性樹脂組成物、パターンの製造方法及び電子部品
TWI407255B (zh) * 2005-09-22 2013-09-01 Hitachi Chem Dupont Microsys 負片型感光性樹脂組成物、圖案形成方法以及電子零件
CN101405655B (zh) * 2006-03-16 2013-02-06 旭硝子株式会社 负型感光性含氟芳香族类树脂组合物
WO2007125921A1 (ja) * 2006-04-28 2007-11-08 Asahi Kasei Kabushiki Kaisha 感光性樹脂組成物及び感光性フィルム
WO2007148384A1 (ja) * 2006-06-20 2007-12-27 Hitachi Chemical Dupont Microsystems Ltd. ネガ型感光性樹脂組成物、パターンの製造方法及び電子部品
KR101438857B1 (ko) * 2007-03-12 2014-09-05 히다치 가세이듀퐁 마이쿠로시스데무즈 가부시키가이샤 감광성 수지 조성물, 그 수지 조성물을 이용한 패턴 경화막의 제조방법 및 전자부품
JP5176872B2 (ja) * 2007-10-29 2013-04-03 日立化成デュポンマイクロシステムズ株式会社 ポジ型感光性樹脂組成物、パタ−ンの製造方法及び電子部品
CN101981154B (zh) 2008-03-31 2014-03-19 大日本印刷株式会社 碱产生剂、感光性树脂组合物、包含该感光性树脂组合物的图案形成用材料、使用了该感光性树脂组合物的图案形成方法以及物品
US8071273B2 (en) * 2008-03-31 2011-12-06 Dai Nippon Printing Co., Ltd. Polyimide precursor, resin composition comprising the polyimide precursor, pattern forming method using the resin composition, and articles produced by using the resin composition
US9274438B1 (en) * 2008-06-25 2016-03-01 Western Digital (Fremont), Llc Method and system for exposing photoresist in a microelectric device
CN102365341B (zh) 2009-03-31 2014-12-31 大日本印刷株式会社 碱产生剂、感光性树脂组合物、含有该感光性树脂组合物的图案形成用材料、使用该感光性树脂组合物的图案形成方法以及物品
CN102713753A (zh) 2010-01-21 2012-10-03 日立化成杜邦微系统股份有限公司 正型感光性树脂组合物、图形固化膜的制造方法以及电子部件
US9519221B2 (en) * 2014-01-13 2016-12-13 Applied Materials, Inc. Method for microwave processing of photosensitive polyimides
KR101580898B1 (ko) 2014-04-18 2015-12-31 (주)휴넷플러스 폴리실세스퀴옥산 공중합체 및 이를 포함하는 감광성 수지 조성물
CN107407875B (zh) 2015-03-16 2021-08-24 太阳控股株式会社 正型感光性树脂组合物、干膜、固化物和印刷电路板
KR102071112B1 (ko) 2017-10-11 2020-01-29 타코마테크놀러지 주식회사 바인더 수지 및 이를 포함하는 감광성 수지 조성물 또는 코팅 용액
TW202128826A (zh) 2019-12-03 2021-08-01 日商東京應化工業股份有限公司 負型感光性樹脂組合物及硬化膜之製造方法
JP2022175020A (ja) 2021-05-12 2022-11-25 東京応化工業株式会社 感光性樹脂、ネガ型感光性樹脂組成物、パターン化された硬化膜の製造方法及びカルボキシ基含有樹脂

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL104507C (it) * 1957-08-03
US3126281A (en) * 1959-02-04 1964-03-24 Formula
US3179634A (en) * 1962-01-26 1965-04-20 Du Pont Aromatic polyimides and the process for preparing them
GB1116674A (en) * 1966-02-28 1968-06-12 Agfa Gevaert Nv Naphthoquinone diazide sulphofluoride
US3551154A (en) * 1966-12-28 1970-12-29 Ferrania Spa Light sensitive article comprising a quinone diazide and polymeric binder
US3802885A (en) * 1967-08-15 1974-04-09 Algraphy Ltd Photosensitive lithographic naphthoquinone diazide printing plate with aluminum base
US3637384A (en) * 1969-02-17 1972-01-25 Gaf Corp Positive-working diazo-oxide terpolymer photoresists
US3623870A (en) * 1969-07-22 1971-11-30 Bell Telephone Labor Inc Technique for the preparation of thermally stable photoresist
DE2000623C3 (de) * 1970-01-08 1979-06-28 Agfa-Gevaert Ag, 5090 Leverkusen Photographisches Verfahren zur Herstellung von Bildern
US3759711A (en) * 1970-09-16 1973-09-18 Eastman Kodak Co Er compositions and elements nitrogen linked apperding quinone diazide light sensitive vinyl polym
DE2053363C3 (de) * 1970-10-30 1980-09-18 Hoechst Ag, 6000 Frankfurt Lichtempfindliches Gemisch
US3833436A (en) * 1972-09-05 1974-09-03 Buckbee Mears Co Etching of polyimide films
US3871930A (en) * 1973-12-19 1975-03-18 Texas Instruments Inc Method of etching films made of polyimide based polymers

Also Published As

Publication number Publication date
NL164975B (nl) 1980-09-15
FR2317680B1 (fr) 1981-08-07
GB1548583A (en) 1979-07-18
JPS5213315A (en) 1977-02-01
NL164975C (nl) 1981-02-16
FR2317680A1 (fr) 1977-02-04
CH619055A5 (it) 1980-08-29
NL7607897A (nl) 1977-01-20
CA1063416A (en) 1979-10-02
DE2631535A1 (de) 1977-02-03
US4093461A (en) 1978-06-06

Similar Documents

Publication Publication Date Title
IT1060035B (it) Sostanza protettiva fotosensibile termostabile di tipo positivo
DK136476A (da) Stralingsfolsom kopieringsmasse
SE7514066L (sv) Dosaerosol ii
RO73090A (ro) Racord special
FR2302617A1 (fr) Di
BR7601417A (pt) Estrutura flutuante aperfeicoada
FR2300480A1 (fr) Di
FR2302327A1 (fr) No
BR7600986A (pt) Tipo de lagarta
BR7608364A (pt) Composicao fotocondutora
FR2300604A1 (fr) Di
SE7606947L (sv) Svevfarkost
SE419013B (sv) Skyddskoppling
FR2300226A1 (fr) Perfectionnements
SE7613935L (sv) Substituerad triazoleter
DK520175A (da) Korrosionsbeskyttelsesmiddel
FR2299188A1 (fr) Perfectionnements
DK195076A (da) Smeltesikring
FR2299028A1 (fr) Nouvea
FR2301243A1 (fr) Nouve
SE7609640L (sv) Fotosensitiv etsskyddsskiktskomposition
IT1123936B (it) Tetraalchilpiperidin-4-ossime sostituite
FR2300972A1 (fr) Di
SE7605133L (sv) Elektrofotografisk kopieringsmaskin
TR19682A (tr) Secimli herbisid